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CN105293039A - Substrate transferring device - Google Patents

Substrate transferring device Download PDF

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Publication number
CN105293039A
CN105293039A CN201510340642.0A CN201510340642A CN105293039A CN 105293039 A CN105293039 A CN 105293039A CN 201510340642 A CN201510340642 A CN 201510340642A CN 105293039 A CN105293039 A CN 105293039A
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CN
China
Prior art keywords
belt
substrate
press section
side press
space portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510340642.0A
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Chinese (zh)
Other versions
CN105293039B (en
Inventor
柳俊圭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Filing date
Publication date
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Publication of CN105293039A publication Critical patent/CN105293039A/en
Application granted granted Critical
Publication of CN105293039B publication Critical patent/CN105293039B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)

Abstract

The present invention provides a substrate transferring device. After brittle materials are scored and cut and then are transferred to the next step, the smooth transferring of the substrate can be performed without damaging. The substrate transferring device comprises a transferring belt (20) used for transferring the substrate from a first position space part (A) to a second position space part (B), and a belt rotation driving part arranged between the first position space part (A) and the second position space part (B). The belt rotation driving part is configured to decrease the lower portion with respect to the belt at the upper portion through pressing down the lower portion of the transferring belt (20), and moreover to lift the upper portion of the belt through pressing up the lower portion of the belt.

Description

Base plate transfer device
Technical field
The invention relates to and the invention relates to a kind of base plate transfer device, more specifically, is can not cause damage to the glass substrate etc. of the display panel being used in liquid crystal display about a kind of and be transferred to the base plate transfer device of next step glidingly.
Background technology
Generally speaking, the display panel of liquid crystal display etc. uses the glass substrate of hard brittle material and formed.Fit in the mode being separated with appropriate intervals by by a pair glass substrate, and enclose liquid crystal in-between and become display panel.
When the display panel as manufacturing so, carry out carrying out disjunction by the stuck mother substrate of the female glass substrate of laminating, and make the processing of multiple display panel from stuck mother substrate.For the substrate breaking apparatus of the stuck mother substrate as disjunction so, be disclosed in No. 2006-0125915th, Korean Patent Laid (hereinafter referred to as patent documentation 1).
Fig. 1 is the block diagram that outline represents the main composition of the substrate breaking apparatus shown in Figure 32 of patent documentation 1.
With reference to Fig. 1, substrate cutting system 200, has positioning unit portion 220, delineation unit portion 240, brisement delivery section 260, steam brisement unit portion 280, panel inverting units portion 320 and panel terminal separation unit 340.
If move into side to be configured with side, positioning unit portion 220 as substrate, side is taken out of as substrate to be configured with panel terminal separation unit 340 side, then behind the positioning unit portion 220 supply substrate to substrate being moved into side, while sequentially transfer while carry out substrate-cutting operation along delineation unit portion 240, brisement delivery section 260, steam brisement unit portion 280, panel inverting units portion 320 and panel terminal separation unit 340, take out of sidesway toward substrate afterwards and send.
The substrate in the positioning unit portion 220 be arranged in setting table 230 will be supplied to, be placed in and be formed on multiple substrate-holding units (not indicating in figure) in positioning unit portion 220, behind the position of the upper positioning baseplate of the belt (not indicating in figure) being arranged at substrate-holding units, by belt spinning movement and delineation unit portion 240 toward next stage transfers.
On the other hand, delineation unit portion 240, has the break-up device guide body 242 that is arranged in X direction in setting table 250 and this break-up device guide body 242 to be sandwiched in therebetween and along the 1st substrate-holding units portion 241A of Y-direction configuration and the 2nd substrate-holding units portion 241B.In addition, the 1st substrate-holding units 244A of the 1st substrate-holding units portion 241A and the 2nd substrate-holding units 244B of the 2nd substrate-holding units portion 241B, configures abreast relative to framework 243A and framework 243B respectively.
In this case, by being transferred to the substrate in delineation unit portion 240 from positioning unit portion 220, being placed in the 1st substrate-holding units 244A of the 1st substrate-holding units portion 241A, and clamping by grip device 251.Afterwards, the belt making to be arranged at the 1st substrate-holding units 244A is in rotary moving and make grip device 251 move in Y-direction simultaneously, substrate is scored by shutoff device guide body 242 whereby, and through the substrate of delineation, the 2nd substrate-holding units 244B toward the 2nd substrate-holding units portion 241B transfers.
The substrate of the 2nd substrate-holding units 244B will be transferred to, by making, the belt being arranged at the 2nd substrate-holding units 244B is in rotary moving, transfer toward the belt 261 of isolating the brisement delivery section 260 arranged with the belt of the 2nd substrate-holding units 244B, afterwards, by steam brisement unit portion 280 by complete for substrate disjunction, and through base plate transfer unit portion 300, panel inverting units portion 320 and panel terminal separation unit 340 take out of side conveyance toward substrate by robot etc.
Usually, delineation operation the substrate be transferred on the belt of the 2nd substrate-holding units 244B will be completed, by the 2nd substrate-holding units 244B belt in rotary moving and transfer toward brisement delivery section 260.By completing the substrate transferred toward brisement delivery section 260, under the state of the stopping in rotary moving of the belt of brisement delivery section 260, after brisement by steam brisement unit 280, picking up by picking up robot etc. and discharging.In addition, also under the state of the stopping in rotary moving of the belt of brisement delivery section 260, in order to the delineation of substrate, formation delineation the 1st substrate-holding units 244A in unit portion 240 and the belt of the 2nd substrate-holding units 244B are controlled to continue carrying out mode in rotary moving.
Patent documentation 1: No. 2006-0125915th, Korean Patent Laid.Because above-mentioned existing substrate breaking apparatus Problems existing, the present inventor is based on being engaged in the practical experience and expertise that this type of product design manufacture enriches for many years, and coordinate the utilization of scientific principle, actively in addition research and innovation, to founding a kind of base plate transfer device of new structure, existing substrate breaking apparatus Problems existing can be solved, make it have more practicality.Through constantly research, design, and through repeatedly studying sample and after improving, finally creating the utility model had practical value.
Summary of the invention
But, in existing known substrate breaking apparatus as so, when the substrate through delineating is transferred from delineation unit portion 240 toward brisement delivery section 260, more specifically, when transferring from the belt of the 2nd substrate-holding units 244B toward brisement delivery section 260, change owing to carrying out carrying between the belt and the belt of brisement delivery section 260 of the 2nd substrate-holding units 244B, therefore make to produce between the 2nd substrate-holding units 244B and brisement delivery section 260 hold that material glass (dummyglass) falls, the glass chip of substrate breakage (glasschipping) etc.Change produced problem about carrying as so, be more specifically described with reference to Fig. 2.
Fig. 2 roughly represents after utilizing existing known substrate breaking apparatus to delineate substrate, picks up the graphic of the process of delivery section transfer by past from delineation unit portion for substrate.In fig. 2, symbol 100, expression obtains moves into the substrate that sidesway is sent here and the supply section positioning and/or circle round from substrate, symbol 110 and 120, represent upstream side delineation portion and delineation portion, downstream respectively, and, symbol 130, represent by robot etc. pick up through disjunction substrate and discharge pick up delivery section.
With reference to Fig. 2, the substrate held by substrate grasping mechanism 114, reciprocates between upstream side delineation portion 110 and delineation portion, downstream 120, while be arranged on the engraving head 118 delineating beam 116 and contact and be scored.Then, will the substrate 102a completing delineation on the belt in delineation portion, downstream 120 be placed in, transfer toward the belt 135 picking up delivery section 130.
But change portion owing to existing to carry between the belt and the belt 135 picking up delivery section 130 in delineation portion, downstream 120, therefore by substrate 102a toward the position transfer of 102b time, sometimes have the situation falling end material glass from substrate 102a.
In addition, substrate 102a from delineation portion, downstream 120 toward pick up delivery section 130 upload change time, produce in substrate 102a and rise and fall, make the part through delineation of substrate 102a collide each other and make the glass chip that substrate generating portion is broken accordingly.Even if downstream being delineated portion 120 is designed to identical with the height from ground picking up delivery section 130, in fact highly also have Subtle differences or both in any one is arranged obliquely, thus make glass chip produce.Especially mostly to be the situation of handling thin substrate recently, therefore so as problem become more serious.
The object of the present invention is to provide a kind of can preventing because carrying of conveying is changed and the problem that produces, and can not with the substrate delineated being caused to damage by base plate transfer to the base plate transfer device of next stage.
The object of the invention to solve the technical problems realizes by the following technical solutions.
The invention provides a kind of base plate transfer device, comprise: belt conveyor 20, be set up in the multiple 1st to make substrate from the 1st locational space portion A toward the mode that the 2nd locational space portion B transfers and fix swivel 10 and carry out in rotary moving; Belt rotary driving part, be configured between the 1st locational space portion A and the 2nd locational space portion B, be formed as the lower belt corresponding with this upper belt when the upper belt of this substrate of mounting by this belt conveyor 20 is depressed toward below also to decline, and, by this lower belt toward above voltage rise time this upper belt also rise; And, 2nd fixing swivel 60, configure in the mode be set up in inside this lower belt, and install into this upper belt and this lower belt decline and rise time move and be fixed, and to rotate according to the decline of this upper belt and lower belt and climb.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Preferably, aforesaid base plate transfer device, wherein this belt rotary driving part, can comprise: lower side press section 40, installs into and under the state abutted with this lower belt, make this lower belt increase or decline; And upper side press section 30, be configured in the top of this lower side press section 40 and the outside of this upper belt, this upper belt is pressed toward this side, lower side press section 40.
Preferably, aforesaid base plate transfer device, wherein this belt rotary driving part, comprises lifting unit, this lifting unit, can any one is formed by cylinder, ball screw or linear motor.
Preferably, aforesaid base plate transfer device, wherein this lower side press section 40 and upper side press section 30 can be roller.
Preferably, aforesaid base plate transfer device, wherein also can have the drg of the stopping in rotary moving making this belt conveyor 20.
Preferably, aforesaid base plate transfer device, wherein this drg, can be installed in the 1st locational space portion A on this belt conveyor 20 and the 2nd locational space portion B respectively.
Preferably, aforesaid base plate transfer device, wherein this lower side press section 40 and this upper side press section 30, can install plural roller in position mutually corresponding respectively in horizontal direction.
The present invention compared with prior art has obvious advantage and beneficial effect.By technique scheme, base plate transfer device of the present invention at least has following advantages and beneficial effect:
Base plate transfer device provided by the present invention can not only not cause damage to substrate when being transferred toward next step by the brittle substrate delineated and transfer substrate glidingly, also belt can be made to carry out action to transfer substrate by simple structure.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to technological means of the present invention can be better understood, and can be implemented according to the content of specification sheets, and can become apparent to allow above and other object of the present invention, feature and advantage, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, be described in detail as follows.
Accompanying drawing explanation
Fig. 1 is the schematic diagram representing existing known substrate breaking apparatus;
Fig. 2 represents the view with existing known substrate breaking apparatus transfer substrate;
Fig. 3 is the schematic diagram representing base plate transfer device of the present invention;
Fig. 4 is the formation schematic diagram diagrammatically representing base plate transfer device of the present invention;
Fig. 5 is the schematic diagram of the action of the belt conveyor representing the 1st locational space portion A of base plate transfer device of the present invention under operating state;
Fig. 6 is the schematic diagram of the action of the belt conveyor representing the 2nd locational space portion B of base plate transfer device of the present invention under operating state.
[main element nomenclature]
A: the 1 locational space portion of locational space portion B: the 2
10: the 1 fixing swiveies 20: belt conveyor
30: upper side press section 40: lower side press section
70a, 70b: drg
60, the 60a, 60b, 60c, 60d: 2nd fixing swivel
Detailed description of the invention
Below, with reference to appended graphic, an example for base plate transfer device of the present invention is described in detail.But the present invention can various different form present, be not limited thereto the example that place illustrates.In the drawings, omit to simply the present invention is described and irrelevant part is described, and marking identical reference marks for same or similar inscape in full throughout specification sheets.
Please refer to Fig. 3 and Fig. 4, with across and the 1st locational space portion A and the 2nd locational space portion B mode of carrying out movement belt conveyor 20 is set.
Belt conveyor 20, not for such as existing known as be separately positioned on the 1st locational space portion A and the 2nd locational space portion B and the mode that individually rotates, but at the 1st locational space portion A and the 2nd locational space portion B can the mode of movement continuously connect to integrally.
In the part that belt conveyor 20 is bending, move smooth mode to make belt conveyor 20 and be provided with the multiple 1st fixing swivel 10.
Between 1st locational space portion A and the 2nd locational space portion B, be separated a little mutually.
In order to make substrate transfer from the 1st locational space portion A toward the 2nd locational space portion B, between the 1st locational space portion A and the 2nd locational space portion B, possesses belt rotary driving part.
Belt rotary driving part, is formed in the mode making the lower belt of the upper belt of the mounting substrate of belt conveyor 20 and the belt conveyor 20 corresponding with this upper belt be elevated toward equidirectional.
In addition, the 2nd fixing swivel 60 carrying out rotating according to its pressure or voltage rise distance when the pressure of belt rotary driving part or voltage rise belt conveyor 20, is installed in lower belt with the state across certain intervals.
Belt rotary driving part, in order to make belt conveyor 20 carry out action to transfer substrate, include be configured in belt conveyor 20 upper belt outside and outside the upper side press section 30 pressed toward below the upper belt of belt conveyor 20 and the lower belt being configured in belt conveyor 20 and all the time with the lower side press section 40 of the lower belt with the state support belt conveyor 20 abutted outside the lower belt of belt conveyor 20.
Lower side press section 40 and upper side press section 30 are positioned at same straight line in the vertical direction, and install into when the upper belt of belt conveyor 20 is elevated with lower belt, and lower side press section 40 is move integratedly with upper side press section 30.
At belt rotary driving part, add installing lifting unit, only to utilize an actuating device pressure and voltage rise belt conveyor 20, this lifting unit, can use cylinder, ball screw or linear motor etc. certainly.But lifting unit of the present invention, is not limited thereto certainly, if the device that belt conveyor 20 can be made to drive then is not limited.
Lower side press section 40 and upper side press section 30, can comprise roller can reduce the friction with belt conveyor 20, make belt conveyor 20 carry out action glidingly.In the present embodiment, 2 rollers are installed in each mutually corresponding position of lower side press section 40 and upper side press section 30 in horizontal direction.
In addition, depress in the action by belt rotary driving part or voltage rise belt conveyor 20 time, in order to make the total length of the belt conveyor 20 being positioned at the 1st locational space portion A and the 2nd locational space portion B constant, add the drg that installing stops belt conveyor 20 movement.
Next, please refer to the graphic action specifically describing the base plate transfer device of the present invention as above formed.
Please refer to Fig. 3 to Fig. 5, in base plate transfer device of the present invention, in order on the belt conveyor 20 of the 1st locational space portion A, be placed with substrate state under, substrate (not indicating in figure) is sent toward the 2nd locational space portion B sidesway, and make the drg 70b being arranged on the 2nd locational space portion B carry out action, belt conveyor 20 is fixed in the mode motionless in the 2nd B side, locational space portion.
Once at the 2nd locational space portion B, drg 70b is to decline as shown in Figure 5, the then belt conveyor 20 of the 2nd locational space portion B, be fixed to by drg 70b and do not move, and on the other hand, the belt conveyor 20 of the 1st locational space portion A, becoming as shown in Figure 5 can toward the state of the direction of arrow comfortable ground movement.
Now, the belt rotary driving part be installed between the 1st locational space portion A and the 2nd locational space portion B is declined mobile.
Once belt rotary driving part declines, then the upper side press section 30 of this belt rotary driving part, by the upper belt of belt conveyor 20 as shown in Figure 5 toward below pressing, while decline.
With the decline of upper side press section 30 side by side, lower side press section 40 is also to decline with the state abutted outside the lower belt of belt conveyor 20.
Carry out dipping and heaving relative to upper side press section 30 and lower side press section 40, at the 2nd fixing swivel 60 of the below erection belt conveyor 20 of lower side press section 40, do not change at high and low position.
2nd fixing swivel 60, only for setting up belt conveyor 20 and rotating, its high and low position is fixing not to be changed.
2nd fixing swivel 60 of erection belt conveyor 20, as shown in Figure 4, with the cross-shaped link in lower side press section 40 carrying out lifting action.
2nd fixing swivel 60a, 60d installs across certain intervals at same level line to abut the mode of setting up with the inner face of belt conveyor 20, lower side press section 40, installs in the mode abutted with the outside of belt conveyor 20 on the contrary with the 2nd fixing swivel 60a, 60d that going forward side by side takes action does.
If fix swivel 60b, 60c and link cross-shaped with lower side press section 40 at the 2nd fixing other the 2nd of installing between swivel 60a, 60d, then the miles of relative movement of belt conveyor 20 can be made to increase.
When lower side press section 40 is moved in the mode that the position of lower side press section 40 and the 2nd fixing swivel 60 is close, also by installing the upper side press section 30 of row cutting of going forward side by side with lower side press section 40 in one the upper belt of belt conveyor 20 is side by side pressed and declined.
Now, because the drg 70b be installed on the 2nd locational space portion B makes the movement of the belt conveyor 20 being positioned at the 2nd B side, locational space portion fix, therefore decline by belt conveyor 20, and as shown in Figure 5, the belt conveyor 20 of the 1st locational space portion A moves toward the 2nd B side, locational space portion.
Therefore, be placed in the substrate on the belt conveyor 20 of the 1st locational space portion A, transferred by the belt conveyor 20 toward the 2nd B side, locational space portion.
So, because upper side press section 30 plays the function of pressure belt conveyor 20, therefore, with the amount that belt conveyor 20 is depressed toward below by the direction of arrow drawing of belt conveyor 20 toward Fig. 5, side by side, lower side press section 40, with the function playing and loosen belt conveyor 20 that declined by the Length Quantity of 30 drawings in upper side press section.
Lower side press section 40, supports, upper side press section 30 outside the lower belt being connected to belt conveyor 20, to outside the upper belt of belt conveyor 20 toward below pressure movement on one side.By the down maneuver of the upper side press section 30 as so and lower side press section 40, the belt conveyor 20 of the 1st locational space portion A while movement by drawing, has been placed in the substrate on belt conveyor 20, has then moved toward the 2nd B side, locational space portion.
Transfer is continued toward the direct of travel in the 2nd locational space portion B in order to make the substrate of the belt conveyor 20 being transferred to the 2nd locational space portion B, the drg 70b declined is made to increase, and other the drg 70a be installed on the 1st locational space portion A is declined, and it is made to fix in the mode of the belt conveyor 20 non rotating movement by the 1st locational space portion A.
Then, under the state rotation of the belt conveyor 20 of the 1st locational space portion A stopped by drg 70a, make the lower side press section 40 that declined and upper side press section 30 increase as shown in Figure 6.
As shown in Figure 6, once make the lower side press section 40 in one installing and upper side press section 30 rise, then the belt conveyor 20 of lower side press section 40 drawing the 2nd locational space portion B is while rise.
Therefore, the belt conveyor 20 of the 2nd locational space portion B moves toward the direction of arrow.
Specifically, lower side press section 40, the belt conveyor 20 of drawing the 2nd locational space portion B rises, and upper side press section 30, side by side rise while loosen belt conveyor 20, therefore, belt conveyor 20 moves toward the direction of arrow of Fig. 6.
Distance between the lower side press section 40 of belt conveyor 20 and the 2nd fixing swivel 60 is situation recently or farthest, and the miles of relative movement being placed in the substrate on belt conveyor 20 is maximum.
The distance of lower side press section 40 and the 2nd fixing swivel 60, determines the miles of relative movement of belt conveyor 20.
The present invention especially can make to allow the upper side press section 30 of belt conveyor 20 movement and lower side press section 40 start integratedly, and its structure is very simple.
In addition, as long as be elevated integratedly owing to only making upper side press section 30 and lower side press section 40, therefore, it is possible to utilize cylinder, ball screw or linear motor etc. as the lifting unit making straight-line motion carry out and make it drive simply, it makes very simple and can make its miniaturization.
Base plate transfer device of the present invention, is not limited to the device etc. cutting off substrate etc., is certainly also applicable to the device etc. that can make the transfers such as other article.
The above, it is only preferred embodiment of the present invention, not any pro forma restriction is done to the present invention, although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be the content not departing from technical solution of the present invention, according to any simple modification that technical spirit of the present invention is done above embodiment, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.

Claims (7)

1. a base plate transfer device, is characterized in that, comprises:
Belt conveyor (20), is set up in the multiple 1st fixing swivel (10) in the mode making substrate transfer toward the 2nd locational space portion (B) from the 1st locational space portion (A) and carries out in rotary moving;
Belt rotary driving part, be configured between the 1st locational space portion (A) and the 2nd locational space portion (B), be formed as the lower belt corresponding with this upper belt when the upper belt of this substrate of mounting by this belt conveyor (20) is depressed toward below also to decline, and, by this lower belt toward above voltage rise time this upper belt also rise;
And the 2nd fixes swivel (60), configure in the mode be set up in inside this lower belt, and install into this upper belt and this lower belt decline and rise time move and be fixed, and to rotate according to the decline of this upper belt and lower belt and climb.
2. base plate transfer device according to claim 1, is characterized in that wherein, and this belt rotary driving part, comprises:
Lower side press section (40), installs into and under the state abutted with this lower belt, makes this lower belt increase or decline;
And upper side press section (30), be configured in the top of this lower side press section (40) and the outside of this upper belt, this upper belt is pressed toward this lower side press section (40) side.
3. base plate transfer device according to claim 2, is characterized in that wherein, and this belt rotary driving part, comprises lifting unit, and by cylinder, ball screw or linear motor, any one is formed this lifting unit.
4. base plate transfer device according to claim 2, is characterized in that wherein, and this lower side press section (40) and upper side press section (30) are roller.
5. base plate transfer device according to any one of claim 1 to 4, is characterized in that it has the drg of the stopping in rotary moving making this belt conveyor (20).
6. base plate transfer device according to claim 5, is characterized in that wherein, this drg, is installed in the 1st locational space portion (A) on this belt conveyor (20) and the 2nd locational space portion (B) respectively.
7. base plate transfer device according to claim 4, is characterized in that wherein, this lower side press section (40) and this upper side press section (30), installs plural roller in the horizontal direction in position mutually corresponding respectively.
CN201510340642.0A 2014-07-24 2015-06-18 Substrate transfer device Active CN105293039B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020140093687A KR101579818B1 (en) 2014-07-24 2014-07-24 Apparatus for transferring substrate
KR10-2014-0093687 2014-07-24

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CN105293039A true CN105293039A (en) 2016-02-03
CN105293039B CN105293039B (en) 2022-04-01

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KR101406607B1 (en) * 2013-04-03 2014-06-12 주식회사 포스코 Conveyer

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