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CN103743553B - The dual channel optical performance testing device of a kind of integrated waveguide manipulator and polarization crosstalk identification thereof and processing method - Google Patents

The dual channel optical performance testing device of a kind of integrated waveguide manipulator and polarization crosstalk identification thereof and processing method Download PDF

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CN103743553B
CN103743553B CN201310744466.8A CN201310744466A CN103743553B CN 103743553 B CN103743553 B CN 103743553B CN 201310744466 A CN201310744466 A CN 201310744466A CN 103743553 B CN103743553 B CN 103743553B
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杨军
苑勇贵
吴冰
彭峰
苑立波
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Guangdong University of Technology
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Abstract

本发明设计属于光学器件测量技术领域,具体涉及到一种集成波导调制器的双通道光学性能测试装置及其偏振串音识别与处理方法。本发明包括高偏振稳定度宽谱光源、待测集成波导调制器、光程解调装置、偏振串音检测与记录装置。该装置简化了系统结构,丰富了测试功能,降低了成本,提高了测试效率,可以广泛用于80dB以上集成波导器件的光学性能的定量测试。

The design of the invention belongs to the technical field of optical device measurement, and specifically relates to a dual-channel optical performance testing device of an integrated waveguide modulator and a polarization crosstalk identification and processing method thereof. The invention includes a high polarization stability wide-spectrum light source, an integrated waveguide modulator to be tested, an optical path demodulation device, and a polarization crosstalk detection and recording device. The device simplifies the system structure, enriches the test function, reduces the cost, improves the test efficiency, and can be widely used in the quantitative test of the optical performance of the integrated waveguide device above 80dB.

Description

一种集成波导调制器的双通道光学性能测试装置及其偏振串 音识别与处理方法A dual-channel optical performance test device with integrated waveguide modulator and its polarization string Sound recognition and processing method

技术领域technical field

本发明设计属于光学器件测量技术领域,具体涉及到一种集成波导调制器的双通道光学性能测试装置及其偏振串音识别与处理方法。The design of the invention belongs to the technical field of optical device measurement, and specifically relates to a dual-channel optical performance testing device of an integrated waveguide modulator and a polarization crosstalk identification and processing method thereof.

背景技术Background technique

多功能集成光学器件俗称“Y波导”,一般采用铌酸锂材料作为基底,它将单模光波导、光分束器、光调制器和光学偏振器进行了高度集成,是组成干涉型光纤陀螺(FOG)和光纤电流互感器的核心器件,决定着光纤传感系统的测量精度、稳定性、体积和成本。Multifunctional integrated optical devices are commonly known as "Y waveguides", generally using lithium niobate materials as the substrate, which highly integrates single-mode optical waveguides, optical beam splitters, optical modulators and optical polarizers, forming an interference fiber optic gyroscope The core components of (FOG) and fiber optic current transformer determine the measurement accuracy, stability, volume and cost of the fiber optic sensing system.

Y波导器件的重要参量主要包括:波导芯片消光比、尾纤串音、输出通道光程差,上述参数的温度特性等。如何对Y波导器件的光学性能进行准确、全面的测试是高性能器件研制和生产中遇到的一个非常棘手的问题。高精度精密级光纤陀螺中使用的Y波导的芯片消光比要求达到80dB以上。例如,中国电子科技集团公司第四十四研究所的华勇、舒平等人提出的一种提高光纤陀螺用Y波导芯片消光比的方法(CN 201310185490.2),已经可以实现80dB以上Y波导器件。而常用的偏振性能检测仪器——消光比测试仪,分辨率最高的美国dBm Optics公司研制的Model4810型偏振消光比测量仪也仅有72dB;其余美国GeneralPhotonics公司的ERM102型、韩国Fiberpro公司的ER2200型、日本Santec公司的PEM-330型最高消光比均只能达到50dB左右。The important parameters of the Y waveguide device mainly include: the extinction ratio of the waveguide chip, the crosstalk of the pigtail, the optical path difference of the output channel, and the temperature characteristics of the above parameters. How to accurately and comprehensively test the optical properties of Y-waveguide devices is a very difficult problem encountered in the development and production of high-performance devices. The chip extinction ratio of the Y-waveguide used in the high-precision precision fiber optic gyroscope is required to reach more than 80dB. For example, Hua Yong and Shu Ping of the 44th Research Institute of China Electronics Technology Group Corporation proposed a method for improving the extinction ratio of Y-waveguide chips for fiber optic gyroscopes (CN 201310185490.2), which can already realize Y-waveguide devices above 80dB. And the commonly used polarization performance testing instrument—the extinction ratio tester, the Model 4810 polarization extinction ratio measuring instrument developed by the US dBm Optics company with the highest resolution is only 72dB; The highest extinction ratio of the PEM-330 type of Japan Santec Company can only reach about 50dB.

Y波导器件由输入光纤、波导芯片和输出光纤、调制电极等几部分组成,至少包含一个输入通道和两个输出通道。结构的复杂性要求除芯片消光比外,其余芯片的线性双折射射、尾纤串音、插损损耗、输出通道光程差,以及上述参数的温度特性、电压特性等性能也是必须进行测量的参量。The Y waveguide device is composed of input optical fiber, waveguide chip, output optical fiber, modulation electrode, etc., and includes at least one input channel and two output channels. The complexity of the structure requires that in addition to the extinction ratio of the chip, the linear birefringence, pigtail crosstalk, insertion loss, optical path difference of the output channel, and the temperature characteristics and voltage characteristics of the other chips must also be measured. Parameter.

20世纪90年代初,法国Herve Lefevre等人(US 4893931)首次公开了基于白光干涉原理的OCDP系统,它采用超辐射发光二极管(SLD)和空间干涉光路测量结构。法国Photonetics公司根据此专利研制了WIN-P 125和WIN-P 400两种型号OCDP测试系统,主要用于较短(500m)和较长(1600m)保偏光纤的偏振特性分析。其主要性能为偏振串音灵敏度为-70dB、动态范围为70dB,后经过改进,灵敏度和动态范围分别提升到-80dB和80dB。但对于高消光比Y波导的测量还略显不足。In the early 1990s, French Herve Lefevre et al. (US 4893931) disclosed for the first time the OCDP system based on the principle of white light interference, which uses a superluminescent light-emitting diode (SLD) and a spatial interference optical path measurement structure. According to this patent, the French Photonetics company has developed two types of OCDP test systems, WIN-P 125 and WIN-P 400, which are mainly used for the analysis of the polarization characteristics of shorter (500m) and longer (1600m) polarization-maintaining optical fibers. Its main performance is that the polarization crosstalk sensitivity is -70dB and the dynamic range is 70dB. After improvement, the sensitivity and dynamic range are increased to -80dB and 80dB respectively. However, the measurement of Y-waveguide with high extinction ratio is not enough.

2002年美国Fibersense Technology Corporation公司的Alfred Healy等人公开一种集成波导芯片的输入/输出光纤的耦合方法(US6870628),利用白光干涉测量方法实现了波导芯片输入/输出光纤的耦合串音的测量;2004年北京航空航天大学的伊小素、肖文等人公开了一种光纤陀螺用集成光学调制器在线测试方法及其测试装置(CN200410003424.X),可以实现器件的损耗、分光比等光学参数的测量;2007年北京航空航天大学的伊小素、徐小斌等人公开了一种Y波导芯片与保偏光纤在线对轴装置及其在线对轴方法(CN 200710064176.3),利用干涉光谱法同样实现了波导芯片与波导输入/输出光纤串音的测量。但没有涉及波导芯片消光比的测量问题。In 2002, Alfred Healy et al. of Fibersense Technology Corporation of the United States disclosed a coupling method for the input/output optical fiber of an integrated waveguide chip (US6870628), and realized the coupling crosstalk measurement of the input/output optical fiber of the waveguide chip by using the white light interferometry method; In 2004, Yi Xiaosu and Xiao Wen of Beijing University of Aeronautics and Astronautics disclosed an online test method and test device for an integrated optical modulator for a fiber optic gyroscope (CN200410003424.X), which can realize optical parameters such as device loss and splitting ratio In 2007, Yi Xiaosu and Xu Xiaobin of Beihang University disclosed a Y waveguide chip and polarization-maintaining optical fiber online alignment device and its online alignment method (CN 200710064176.3), using the interference spectroscopy method to achieve the same Measurement of crosstalk between waveguide chip and waveguide input/output fiber. But it does not involve the measurement of the extinction ratio of the waveguide chip.

2011年,天津大学张红霞等人公开了一种光学偏振器件偏振消光比的检测方法和检测装置(CN 201110052231.3),同样采用空间干涉光路作为OCDP的核心装置,通过检测耦合点的耦合强度,推导出偏振消光比。该装置适用于保偏光纤、保偏光纤耦合器、偏振器等多种光学偏振器件。与Herve Lefevre等人的方案相比,技术性能和指标相近。In 2011, Zhang Hongxia of Tianjin University and others disclosed a detection method and detection device for the polarization extinction ratio of an optical polarization device (CN 201110052231.3). The spatial interference optical path is also used as the core device of OCDP. By detecting the coupling strength of the coupling point, the derivation Polarization extinction ratio. The device is suitable for various optical polarization devices such as polarization-maintaining fiber, polarization-maintaining fiber coupler, and polarizer. Compared with the scheme of Herve Lefevre et al., the technical performance and index are similar.

同年,美国通用光电公司(General Photonics Corporation)的姚晓天等人公开了一种用于保偏光纤和光学双折射材料中分布式偏振串音测量的全光纤测量系统(US20110277552,Measuring Distributed Polarization Crosstalk in PolarizationMaintaining Fiber and Optical Birefringent Material),利用在光程相关器之前增加光程延迟器,抑制偏振串音测量时杂散白光干涉信号的数量和幅度。该方法可以将全光纤测量系统的偏振串音灵敏度提高到-95dB,但动态范围保持在75dB。In the same year, people such as Yao Xiaotian of General Photonics Corporation of the United States disclosed an all-fiber measurement system (US20110277552, Measuring Distributed Polarization Crosstalk in PolarizationMaintaining Fiber and Optical Birefringent Material), using an optical path retarder before the optical path correlator to suppress the number and magnitude of stray white light interference signals during polarization crosstalk measurements. This method can improve the polarization crosstalk sensitivity of the all-fiber measurement system to -95dB, but keep the dynamic range at 75dB.

2012年,本研究组提出了基于全光纤光路的偏振串音测量测试装置(CN201210379406.6)及其提高光学器件偏振串音测量性能的方法(CN201210379407.0),采用全光纤光路和抑制拍噪声的技术方案,极大地抑制噪声幅度,使偏振串音测量的灵敏度提高的-95dB以上,同时动态范围能够相应保持在95dB,同时减小了测试系统的体积,增加了测量稳定性。为高消光比Y波导器件的特性测量奠定了基础。In 2012, our research group proposed a polarization crosstalk measurement test device based on an all-fiber optical path (CN201210379406.6) and a method for improving the performance of polarization crosstalk measurements of optical devices (CN201210379407.0), using an all-fiber optical path and suppressing beat noise The technical solution greatly suppresses the noise amplitude, improves the sensitivity of polarization crosstalk measurement to over -95dB, and maintains the dynamic range at 95dB, reduces the volume of the test system, and increases the measurement stability. It lays the foundation for the characteristic measurement of high extinction ratio Y-waveguide devices.

传统观点认为:Y波导的两个输出端的光学性能如芯片消光比、线性双折射是一致的。但实际测试的研究表明:受限于Y波导的材料和制作工艺,两输出通道的光学性能可能具有一定差异性,这对于分析波导的制作工艺和参数具有非常大的意义;基于白光干涉测量原理的Y波导测量系统,只具备单通道的测试能力,需要对Y波导的两个输出通道进行测量时,必须分两次测量完成;特别是在外界环境参数(如温度等)或者应用参数(如波导芯片的电极加载电压等)变化时,两次单通道测量和一次双通道同时测量,在外界加载条件和测量时间存在差异时,是无法完全等效的。因此,对于Y波导器件不同输出通道的参数,如:波导芯片消光比、线性双折射、插入损耗、尾纤串音等光学特性的绝对值和差异值,具有非常重大的实际价值。但目前测试装置和方法还没有涉及到对Y波导器件不同输出通道光学性能及其差异性的全面测试和评估。The traditional view holds that the optical properties of the two output ends of the Y waveguide, such as chip extinction ratio and linear birefringence, are consistent. However, the actual test research shows that: limited by the material and manufacturing process of the Y waveguide, the optical performance of the two output channels may have a certain difference, which is of great significance for analyzing the manufacturing process and parameters of the waveguide; based on the principle of white light interferometry The Y-waveguide measurement system of the company only has the single-channel test capability. When it is necessary to measure the two output channels of the Y-waveguide, it must be measured twice; especially when the external environment parameters (such as temperature, etc.) or application parameters (such as When the electrode loading voltage of the waveguide chip, etc.) changes, two single-channel measurements and one dual-channel simultaneous measurement cannot be completely equivalent when there are differences in external loading conditions and measurement time. Therefore, the parameters of different output channels of Y-waveguide devices, such as the absolute value and difference value of optical characteristics such as waveguide chip extinction ratio, linear birefringence, insertion loss, and pigtail crosstalk, are of great practical value. However, at present, the testing device and method have not yet involved in the comprehensive testing and evaluation of the optical properties and differences of the different output channels of the Y waveguide device.

本发明提供了一种Y波导器件的双通道光学性能同时测试装置,其设计思想是:基于全光纤光路结构,将两套功能独立的解调干涉仪分别用于Y波导器件的两个输出通道,利用对称性原则,通过对测试装置结构的有机复合和简化,通过对光路和器件参数的一致性设定,实现了Y波导器件的光学特性参数的全面测量。装置的特征包含两个功能独立、光路结构和参数相同的解调干涉仪,它们分别连接于波导调制器的两个输出通道,并且共用同一个光程扫描器,它特别适合于在加载温度等环境参数载荷下,对Y波导器件输出通道光学性能变化及其不一致性的评价和分析,可以实现集成波导器件两输出通道间的波导芯片消光比、线性双折射、插入损耗、尾纤串音等光学参量的绝对值和差异值的同时测量。具有测试参数全面、测量精度高、稳定性好,光路结构简单等优点,既降低了系统造价,又提高了测试效率、节约了测试成本,可以广泛用于80dB以上高消光比集成波导器件的光学性能的定量测试。The invention provides a dual-channel optical performance simultaneous testing device of a Y waveguide device. The design idea is: based on the all-fiber optical path structure, two sets of demodulation interferometers with independent functions are used for the two output channels of the Y waveguide device respectively. , using the principle of symmetry, through the organic compound and simplification of the test device structure, through the consistent setting of the optical path and device parameters, the comprehensive measurement of the optical characteristic parameters of the Y waveguide device is realized. The characteristics of the device include two demodulation interferometers with independent functions and the same optical path structure and parameters. They are respectively connected to the two output channels of the waveguide modulator and share the same optical path scanner. It is especially suitable for loading temperature, etc. Under the load of environmental parameters, the evaluation and analysis of the optical performance change and inconsistency of the output channel of the Y waveguide device can realize the extinction ratio of the waveguide chip between the two output channels of the integrated waveguide device, linear birefringence, insertion loss, pigtail crosstalk, etc. Simultaneous measurement of absolute and difference values of optical parameters. It has the advantages of comprehensive test parameters, high measurement accuracy, good stability, and simple optical path structure. It not only reduces the system cost, but also improves the test efficiency and saves the test cost. It can be widely used in the optics of integrated waveguide devices with high extinction ratio above 80dB. Quantitative testing of performance.

发明内容Contents of the invention

本发明的目的在于提供一种集成波导调制器的双通道光学性能测试装置,本发明的目的还在于提供一种集成波导调制器的双通道光学性能测试装置的偏振串音识别与处理方法。The purpose of the present invention is to provide a dual-channel optical performance testing device with integrated waveguide modulator, and the purpose of the present invention is also to provide a polarization crosstalk identification and processing method for the dual-channel optical performance testing device with integrated waveguide modulator.

本发明的目的是这样实现的:The purpose of the present invention is achieved like this:

一种集成波导调制器的双通道光学性能测试装置,包括高偏振稳定度宽谱光源、待测集成波导调制器、光程解调装置、偏振串音检测与记录装置:A dual-channel optical performance testing device for an integrated waveguide modulator, including a high polarization stability broadband light source, an integrated waveguide modulator to be tested, an optical path demodulation device, and a polarization crosstalk detection and recording device:

待测集成波导调制器的第一输出通道和第二输出通道分别连接于光程解调装置的第一解调干涉仪和第二解调干涉仪;偏振串音检测与记录装置同时连接第一解调干涉仪和第二解调干涉仪,光电转换与信号处理单元对第一解调干涉仪中的第一差分探测器和第二解调仪中的第二差分探测器输出的白光干涉信号同时进行处理与记录;控制计算机利用内置的待测集成波导调制器的偏振串音识别与处理方法,对待测集成波导调制器的第一输出通道和第二输出通道间的波导芯片消光比、线性双折射、插入损耗、尾纤串音的绝对值进行测量、存储与显示,对在外界环境参数或应用参数变化时的性能差异进行比较和显示。The first output channel and the second output channel of the integrated waveguide modulator to be tested are respectively connected to the first demodulation interferometer and the second demodulation interferometer of the optical path demodulation device; the polarization crosstalk detection and recording device is connected to the first The demodulation interferometer and the second demodulation interferometer, the photoelectric conversion and signal processing unit output white light interference signals from the first differential detector in the first demodulation interferometer and the second differential detector in the second demodulator Simultaneous processing and recording; the control computer uses the built-in polarization crosstalk identification and processing method of the integrated waveguide modulator to be tested to determine the waveguide chip extinction ratio and linearity between the first output channel and the second output channel of the integrated waveguide modulator to be tested. The absolute values of birefringence, insertion loss, and pigtail crosstalk are measured, stored, and displayed, and the performance differences when external environmental parameters or application parameters change are compared and displayed.

第一解调干涉仪和第二解调干涉仪:第一解调干涉仪由第一光纤检偏器与第一2×2光纤耦合器的第一端连接、第一2×2光纤耦合器的第二端与第二2×2光纤耦合器的第一端连接、第一2×2光纤耦合器的第三端与第二2×2光纤耦合器的第四端通过第一光纤环形器连接、第一2×2光纤耦合器的第四端与第一DFB光源连接,第一光纤环形器的另一端连接第一光纤准直透镜、第二2×2光纤耦合器的第二端和第三端连接第一差分探测器;The first demodulation interferometer and the second demodulation interferometer: the first demodulation interferometer is connected with the first end of the first 2×2 fiber coupler by the first fiber analyzer, and the first 2×2 fiber coupler The second end of the second 2×2 fiber coupler is connected to the first end of the second 2×2 fiber coupler, the third end of the first 2×2 fiber coupler is connected to the fourth end of the second 2×2 fiber coupler through the first fiber circulator Connection, the fourth end of the first 2×2 fiber coupler is connected to the first DFB light source, the other end of the first fiber circulator is connected to the first fiber collimator lens, the second end of the second 2×2 fiber coupler and The third end is connected to the first differential detector;

第二解调干涉仪与第一解调干涉仪的组成相同,分别由第二光纤检偏器、第三2×2光纤耦合器、第四2×2光纤耦合器、第二光纤环形器、第二光纤准直透镜、第二差分探测器、第二DFB光源组成。The composition of the second demodulation interferometer is the same as that of the first demodulation interferometer, consisting of a second fiber analyzer, a third 2×2 fiber coupler, a fourth 2×2 fiber coupler, a second fiber circulator, It consists of a second fiber collimator lens, a second differential detector, and a second DFB light source.

高偏振稳定度宽谱光源,通过光纤耦合器的第一输出端连接于第一光电探测器;通过第二输出端经过光纤隔离器后,连接于光纤起偏器。The high polarization stability wide-spectrum light source is connected to the first photodetector through the first output end of the fiber coupler; after passing through the fiber isolator through the second output end, it is connected to the fiber polarizer.

待测集成波导调制器与高偏振稳定度宽谱光源和光程解调装置的连接关系是:The connection relationship between the integrated waveguide modulator to be tested and the wide-spectrum light source with high polarization stability and the optical path demodulation device is:

光纤起偏器的输出保偏光纤与待测集成波导调制器输入通道的输入保偏尾纤对轴角度为0~45°;The output polarization-maintaining fiber of the optical fiber polarizer and the input polarization-maintaining pigtail fiber of the input channel of the integrated waveguide modulator to be tested have an axial angle of 0-45°;

待测集成波导调制器的第一输出通道、第二输出通道的输出保偏尾纤与第一解调干涉仪和第二解调干涉仪的第一光纤检偏器、第二光纤检偏器的输入保偏尾纤的对轴角度分别为0~45°。The first output channel of the integrated waveguide modulator to be tested, the output polarization-maintaining pigtail of the second output channel, and the first and second optical fiber analyzers of the first demodulation interferometer and the second demodulation interferometer The on-axis angles of the input polarization-maintaining pigtails are 0-45°.

一种集成波导调制器的双通道光学性能测试装置的偏振串音识别与处理方法:A polarization crosstalk identification and processing method for a dual-channel optical performance testing device integrating a waveguide modulator:

1)检测输入保偏尾纤的长度lW-,,判断是否满足:1) Detect the length l W- of the input polarization-maintaining pigtail, and judge whether it satisfies:

SW-i=lW-i×Δnf>Sripple S Wi =l Wi ×Δn f >S ripple

式中:Δnf为保偏尾纤线性双折射,Sripple为光源二阶相干峰的光程最大值;In the formula: Δn f is the linear birefringence of the polarization-maintaining pigtail, and S ripple is the maximum value of the optical path of the second-order coherence peak of the light source;

2)如不满足,则焊接一段延长保偏光纤lf-i,对轴角度为0°-0°,测量并记录延长光纤lf-i的长度和理论光程Sf-i,判断:2) If not satisfied, then weld a section of extended polarization-maintaining optical fiber l fi , with an axis angle of 0°-0°, measure and record the length of the extended optical fiber l fi and the theoretical optical path S fi , and judge:

Sf-i=lf-i×Δnf>Sripple S fi =l fi ×Δn f >S ripple

3)测量波导芯片的长度lW3) measure the length l W of the waveguide chip;

4)测量第一输出通道尾纤、第二输出通道尾纤的长度lW-o-1、lW-o-2,判断:4) Measure the length l Wo-1 and l Wo-2 of the first output channel pigtail and the second output channel pigtail, and judge:

SW-o-1=lW-o-1×Δnf且SW-o-2=lW-o-1×Δnf>SW=lW×ΔnW S Wo-1 = l Wo-1 ×Δn f and S Wo-2 = l Wo-1 ×Δn f >S W =l W ×Δn W

式中:ΔnW波导芯片的线性双折射;Where: the linear birefringence of Δn W waveguide chip;

5)如输出通道尾纤的长度lW-o-1、lW-o-2不满足步骤4)的条件,则在第一输出通道、第二输出通道分别焊接两段长度相同的延长光纤lf-o-1、lf-o-2,其对轴角度为0°-0°,其长度要求满足:5) If the length lWo-1 and lWo-2 of the output channel pigtails do not meet the conditions of step 4), then weld two lengths of extension optical fiber lfo-1 of the same length on the first output channel and the second output channel respectively , l fo-2 , its angle to the axis is 0°-0°, and its length requirements meet:

Sf-o-1=lf-o-1×Δnf且Sf-o-2=lf-o-1×Δnf>SW=lW×ΔnW,测量并记录延长光纤lf-o-1、lf-o-2S fo-1 =l fo-1 ×Δn f and S fo-2 =l fo-1 ×Δn f >S W =l W ×Δn W , measure and record the extended optical fiber l fo-1 , l fo-2 ;

6)将待测集成波导调制器与宽谱光源和光程解调装置连接,其输入和和输出的对轴角度分别为θ1=45°,θ2=45°;6) Connect the integrated waveguide modulator to be tested with the wide-spectrum light source and the optical path demodulation device, and the angles on the axes of its input and output are respectively θ 1 =45°, θ 2 =45°;

7)启动白光干涉仪,同时获得第一输出通道、第二输出通道的两幅分布式偏振串音测量结果曲线;7) Start the white light interferometer, and obtain two distributed polarization crosstalk measurement result curves of the first output channel and the second output channel at the same time;

8)利用已经测量的器件各部分的几何长度,包括:输入保偏尾纤长度lW-i、输入延长保偏光纤长度lf-i、波导芯片长度lW、第一输出通道、第二输出通道尾纤长度lW-o-1、lW-o-2、输出延长光纤的长度lf-o-1、lf-o-2;计算其光程延迟量,并按照大小依次排列为两行:8) Use the measured geometric lengths of each part of the device, including: input polarization-maintaining pigtail length l Wi , input extension polarization-maintaining fiber length l fi , waveguide chip length l W , first output channel, second output channel pigtail Length l Wo-1 , l Wo-2 , length of output extension fiber l fo-1 , l fo-2 ; calculate the optical path delay, and arrange them in two rows according to the size:

第一行对应第一波导输出通道:Sf-i、(Sf-i+SW-i)、Sf-o-1、(Sf-o-1+SW-o-1)、(Sf-o-1+SW-o-1+Sf-i+SW-i+SW-1)The first row corresponds to the first waveguide output channel: S fi , (S fi +S Wi ), S fo-1 , (S fo-1 +S Wo-1 ), (S fo-1 +S Wo-1 +S fi +S Wi +S W-1 )

第二行对应第二波导输出通道:Sf-i、(Sf-i+SW-i)、Sf-o-2、(Sf-o-2+SW-o-2)、(Sf-o-2+SW-o-2+Sf-i+SW-i+SW-2)The second row corresponds to the second waveguide output channel: S fi , (S fi +S Wi ), S fo-2 , (S fo-2 +S Wo-2 ), (S fo-2 +S Wo-2 +S fi +S Wi +S W-2 )

9)与理论公式进行对比,确定第一输出通道测量的偏振串音特征峰,具体为:9) Compared with the theoretical formula, determine the polarization crosstalk characteristic peak measured by the first output channel, specifically:

(1)波导输入延长光纤与波导输入尾纤的偏振串音ρf-i(1) The polarization crosstalk ρ fi of the waveguide input extension fiber and the waveguide input pigtail;

(2)波导输入尾纤与波导芯片的偏振串音ρW-i(2) Polarized crosstalk ρ Wi between the waveguide input pigtail and the waveguide chip;

(3)输出延长光纤与第一输出通道波导输出尾纤的偏振串音ρf-o-1(3) output the polarization crosstalk p fo-1 of the extension fiber and the first output channel waveguide output pigtail;

(4)第一输出通道波导输出尾纤与波导芯片的偏振串音ρW-o-1(4) polarization crosstalk ρWo-1 of the first output channel waveguide output pigtail and waveguide chip;

(5)第一通道测量的Y波导芯片的偏振串音 (5) Polarization crosstalk of the Y-waveguide chip measured in the first channel

确定第二输出通道(2C)测量的偏振串音特征峰,具体为:Determine the polarization crosstalk characteristic peak measured by the second output channel (2C), specifically:

(1)波导输入延长光纤与波导输入尾纤(21)的偏振串音ρf-i(1) polarization crosstalk ρ fi of waveguide input extension fiber and waveguide input pigtail (21);

(2)波导输入尾纤(21)与波导芯片(2D)的偏振串音ρW-i(2) Polarized crosstalk ρWi between the waveguide input pigtail (21) and the waveguide chip (2D);

(3)输出延长光纤与第二输出通道波导输出尾纤的偏振串音ρf-o-2(3) output the polarization crosstalk p fo-2 of the extension fiber and the second output channel waveguide output pigtail;

(4)第二输出通道波导输出尾纤与波导芯片(2D)的偏振串音ρW-o-2(4) polarization crosstalk ρWo-2 of the second output channel waveguide output pigtail and waveguide chip (2D);

(5)第二通道测量的Y波导芯片的偏振串音 (5) Polarization crosstalk of the Y waveguide chip measured by the second channel

10)对比偏振串音与偏振串音偏振串音ρW-o-2与偏振串音ρW-o-110) Contrasting polarized crosstalk crosstalk with polarization Polarized crosstalk ρ Wo-2 and polarized crosstalk ρ Wo-1 ;

11)根据计算得出的保偏光纤尾纤和波导芯片实测的双折射Δnf、ΔnW;I(0)out1/I(0)out2代表波导器件第一、第二输出通道测量的插入损耗比值;11) Measured birefringence Δn f and Δn W based on the calculated polarization-maintaining fiber pigtail and waveguide chip; I(0) out1 /I(0) out2 represents the measured insertion loss of the first and second output channels of the waveguide device ratio;

12)当外界环境参数或者应用参数变化时,重新执行步骤7),对Y波导的光学参数进行测量,可以测量的参数还包括两个输出通道的光学特性变化,包括输入/输出光纤与波导芯片的耦合串音随温度的变化;波导两输出通道的芯片消光比随外加电压的变化。12) When the external environmental parameters or application parameters change, re-execute step 7) to measure the optical parameters of the Y waveguide. The parameters that can be measured also include the optical characteristic changes of the two output channels, including input/output optical fibers and waveguide chips. The coupling crosstalk changes with the temperature; the chip extinction ratio of the two output channels of the waveguide changes with the applied voltage.

本发明的有益效果在于:The beneficial effects of the present invention are:

(1)作为一种Y波导器件光学性能的全方位测试装置,能够测量的光学参数最多,也最为全面,包括Y波导器件两输出通道间的波导芯片消光比、线性双折射、尾纤串音、插入损耗,及其输出通道一致性的测量,一次扫描即可获得众多参数的测量,测试效率高、稳定性好、受环境影响小;(1) As an all-round test device for the optical performance of Y-waveguide devices, it can measure the most and most comprehensive optical parameters, including the waveguide chip extinction ratio between the two output channels of the Y-waveguide device, linear birefringence, and pigtail crosstalk , Insertion loss, and the measurement of the consistency of the output channel, one scan can obtain the measurement of many parameters, the test efficiency is high, the stability is good, and the influence of the environment is small;

(2)采用功能完全独立的两套解调干涉仪,可以对两个输出通道的光学特性同时进行测量,可以实现不同波导输出通道在环境参数(如温度等)或应用参数(如波导芯片的电极加载电压等)加载时,Y波导器件的光学性能变化及其不一致性的评价和分析,既提高了测试效率,又节约了测试成本;(2) Two sets of demodulation interferometers with completely independent functions can be used to measure the optical characteristics of the two output channels at the same time. The evaluation and analysis of the optical performance change and inconsistency of the Y-waveguide device when the electrode is loaded (voltage, etc.) is loaded, which not only improves the test efficiency, but also saves the test cost;

(3)全同光路设计(包括光路结构和元件参数),共用同一光程扫描器,降低了系统构建成本,提高了测试速度、减小了通道之间的测量不一致性;(3) The same optical path design (including optical path structure and component parameters), sharing the same optical path scanner, reduces the system construction cost, improves the test speed, and reduces the measurement inconsistency between channels;

(4)采用全光纤光路,具有体积小、测量精度高、温度稳定性和抗振动稳定性好等。(4) It adopts all-fiber optical path, which has the advantages of small size, high measurement accuracy, good temperature stability and anti-vibration stability, etc.

附图说明Description of drawings

图1是光学器件的分布式偏振串音测量的光学原理示意图;Figure 1 is a schematic diagram of the optical principle of distributed polarization crosstalk measurement of optical devices;

图2是偏振串音形成的干涉信号幅度与光程对应关系示意图;Figure 2 is a schematic diagram of the corresponding relationship between the interference signal amplitude and the optical path formed by polarization crosstalk;

图3是基于Mach-Zehnder解调干涉仪的Y波导器件双通道光学性能测试装置原理图;Figure 3 is a schematic diagram of a dual-channel optical performance test device for a Y-waveguide device based on a Mach-Zehnder demodulation interferometer;

图4是一种集成波导调制器的双通道光学性能测试装置的偏振串音处理方法流程图;Fig. 4 is a flow chart of a polarization crosstalk processing method of a dual-channel optical performance testing device integrating a waveguide modulator;

图5是波导尾纤慢轴与波导芯片快轴对准,器件0°~0°接入测试装置时,测量得到的布式偏振串音数据(测量装置的偏振串扰噪声);Figure 5 shows the measured cloth polarization crosstalk data (polarization crosstalk noise of the measurement device) when the slow axis of the waveguide pigtail is aligned with the fast axis of the waveguide chip, and the device is connected to the test device at 0° to 0°;

图6是Y波导器件的输入0°~45°、输出45°~0°接入测量装置时,从第一输出通道2B测量得到的分布式偏振串音数据(Y波导器件的光学特性);Fig. 6 is when the input 0°~45° of the Y waveguide device and the output 45°~0° are connected to the measurement device, the distributed polarization crosstalk data measured from the first output channel 2B (the optical characteristics of the Y waveguide device);

图7是Y波导器件90°~0°接入测试装置时,从第一输出通道2C测量得到的布式偏振串音数据(测量装置的偏振串扰噪声);Fig. 7 is when the Y-waveguide device 90 °~0 ° accesses the testing device, from the first output channel 2C measurement of the cloth polarization crosstalk data (the polarization crosstalk noise of the measuring device);

图8是Y波导输入尾纤与波导芯片的功率耦合串音随温度的变化;Fig. 8 is the variation of the power coupling crosstalk between Y waveguide input pigtail and waveguide chip with temperature;

图9是Y波导第一输出通道尾纤与波导芯片的功率耦合串音随温度的变化;Fig. 9 is the change of the power coupling crosstalk between the pigtail of the first output channel of the Y waveguide and the waveguide chip with temperature;

图10是Y波导第二输出通道尾纤与波导芯片的功率耦合串音随温度的变化;Figure 10 is the variation of the power coupling crosstalk between the pigtail of the second output channel of the Y waveguide and the waveguide chip with temperature;

图11是Y波导第一输出通道2B的测量数据汇总表;Fig. 11 is the measurement data summary table of Y waveguide first output channel 2B;

图12是Y波导第二输出通道2C的测量数据汇总表;Fig. 12 is the measurement data summary table of Y waveguide second output channel 2C;

图13是Y波导第一输出通道2B的测量的线性双折射;Figure 13 is the measured linear birefringence of the first output channel 2B of the Y waveguide;

图14是Y波导第二输出通道2C的线性双折射。FIG. 14 is the linear birefringence of the second output channel 2C of the Y waveguide.

具体实施方式detailed description

本发明提出的一种Y波导器件的双通道光学性能同时测试装置,包括高偏振稳定度宽谱光源1、待测集成波导调制器(Y波导)2、光程解调装置3、偏振串音检测与记录装置4,其特征是:A dual-channel optical performance simultaneous testing device for a Y waveguide device proposed by the present invention includes a high polarization stability wide-spectrum light source 1, an integrated waveguide modulator to be tested (Y waveguide) 2, an optical path demodulation device 3, and polarization crosstalk Detection and recording device 4 is characterized in that:

1)Y波导2的第一和第二输出通道2B、2C分别连接于光程解调装置3的第一、第二解调干涉仪31、32;1) The first and second output channels 2B, 2C of the Y waveguide 2 are respectively connected to the first and second demodulation interferometers 31, 32 of the optical path demodulation device 3;

2)第一解调干涉仪31和第二解调干涉仪32的光路结构、组成元件及其器件参数均相同,包括第一干涉仪31与第二干涉仪32两臂光程差和连接光纤300、320、302、322、304、324;2) The optical path structures, components and device parameters of the first demodulation interferometer 31 and the second demodulation interferometer 32 are the same, including the optical path difference between the arms of the first interferometer 31 and the second interferometer 32 and the connecting optical fiber 300, 320, 302, 322, 304, 324;

3)第一解调干涉仪31中的光纤准直透镜306和第二解调干涉仪32中的光纤准直透镜326共用同一个光程扫描器310;3) The fiber collimator lens 306 in the first demodulation interferometer 31 and the fiber collimator lens 326 in the second demodulation interferometer 32 share the same optical path scanner 310;

4)偏振串音检测与记录装置4同时连接第一、第二解调干涉仪31、32,光电转换与信号处理单元41对第一、第二差分探测器308与309、328与329输出白光干涉信号,同时进行处理与记录;4) The polarization crosstalk detection and recording device 4 is simultaneously connected to the first and second demodulation interferometers 31 and 32, and the photoelectric conversion and signal processing unit 41 outputs white light to the first and second differential detectors 308 and 309, 328 and 329 Interference signal, processing and recording at the same time;

5)控制计算机42利用数据识别与处理算法,除对Y波导2第一、第二输出通道2B、2C的光学性能进行测量、存储与显示外,还要对输出通道2B、2C的性能差异性,特别是加载温度等环境条件和电压等应用条件下的性能进行比较和显示。5) The control computer 42 utilizes the data recognition and processing algorithm, in addition to measuring, storing and displaying the optical properties of the first and second output channels 2B and 2C of the Y waveguide 2, it also needs to check the performance differences of the output channels 2B and 2C , especially the performance under environmental conditions such as loading temperature and application conditions such as voltage are compared and displayed.

所述的第一、第二解调干涉仪31、32,其特征是:The first and second demodulation interferometers 31, 32 are characterized in that:

1)第一解调干涉仪31分别由第一光纤检偏器301、第一2×2光纤耦合器303、第二2×2光纤耦合器307、第一光纤环形器305、第一光纤准直透镜306、第一差分探测器308、309、第一DFB光源311组成;1) The first demodulation interferometer 31 consists of a first fiber analyzer 301, a first 2×2 fiber coupler 303, a second 2×2 fiber coupler 307, a first fiber circulator 305, a first fiber quasi Composed of straight lens 306, first differential detectors 308, 309, and first DFB light source 311;

2)第二解调干涉仪32分别由第二光纤检偏器321、第三2×2光纤耦合器323、第四2×2光纤耦合器327、第二光纤环形器325、第二光纤准直透镜326、第二差分探测器328、329、第二DFB光源331组成;2) The second demodulation interferometer 32 consists of a second fiber analyzer 321, a third 2×2 fiber coupler 323, a fourth 2×2 fiber coupler 327, a second fiber circulator 325, a second fiber quasi Composed of straight lens 326, second differential detectors 328, 329, and second DFB light source 331;

3)第一解调干涉仪31和第二解调干涉仪32的光路结构、组成元件及其器件参数均相同,包括第一干涉仪31与第二干涉仪32两臂光程差大小和连接光纤300与320、302与322、304与324的长度;3) The optical path structures, components and device parameters of the first demodulation interferometer 31 and the second demodulation interferometer 32 are the same, including the optical path difference between the two arms of the first interferometer 31 and the second interferometer 32 and the connection the lengths of optical fibers 300 and 320, 302 and 322, 304 and 324;

所述的高偏振稳定度宽谱光源1,其特征是:宽谱光源11通过光纤耦合器12的第一输出端13连接于第一光电探测器14;通过第二输出端15经过光纤隔离器16后,连接于光纤起偏器17。The described high polarization stability broadband light source 1 is characterized in that: the broadband light source 11 is connected to the first photodetector 14 through the first output end 13 of the fiber coupler 12; through the second output end 15 through the fiber isolator After 16, it is connected to the fiber polarizer 17.

所述的Y波导2与高偏振稳定度宽谱光源1和光程解调装置3的连接关系,其特征是:The connection relationship between the Y waveguide 2 and the high polarization stability broadband light source 1 and the optical path demodulation device 3 is characterized in that:

1)起偏器17的输出保偏光纤18与Y波导2输入通道2A的输入保偏尾纤21对轴角度为0~45°;1) The output polarization-maintaining fiber 18 of the polarizer 17 and the input polarization-maintaining pigtail 21 of the input channel 2A of the Y waveguide 2 have an axial angle of 0-45°;

2)Y波导的第一、第二输出通道2B、2C的输出保偏尾纤22、23与第一、第二解调干涉仪31、32的第一、第二光纤检偏器301、321的输入保偏尾纤300、320的对轴角度分别为0~45°。2) The output polarization maintaining pigtails 22, 23 of the first and second output channels 2B, 2C of the Y waveguide and the first and second optical fiber analyzers 301, 321 of the first and second demodulation interferometers 31, 32 The axis-to-axis angles of the input polarization-maintaining pigtails 300 and 320 are respectively 0-45°.

所述的Y波导2器件的光学参数测量方法,其特征是:The optical parameter measuring method of described Y waveguide 2 device is characterized in that:

1)输入保偏尾纤21的长度lW-i要求满足下式:1) The length l Wi of the input polarization-maintaining pigtail 21 is required to satisfy the following formula:

SW-i=lW-i×Δnf>Sripple (1)S Wi =l Wi ×Δn f >S ripple (1)

式中:Δnf为保偏尾纤线性双折射,Sripple为光源11二阶相干峰的光程最大值。In the formula: Δn f is the linear birefringence of the polarization-maintaining pigtail, and S ripple is the maximum value of the optical path of the second-order coherence peak of the light source 11.

2)如不满足,则焊接一段延长保偏光纤lf-i,对轴角度为0°-0°,长度要求类似(1)式,即满足(2)式,测量并记录延长光纤lf-i的长度和理论光程Sf-i2) If it is not satisfied, then weld a section of extended polarization maintaining optical fiber l fi , the angle to the axis is 0°-0°, the length requirement is similar to formula (1), that is, formula (2) is satisfied, measure and record the length of the extended optical fiber l fi and theoretical optical path S fi ;

Sf-i=lf-i×Δnf>Sripple (2)S fi =l fi ×Δn f >S ripple (2)

3)测量波导芯片2D的长度lW3) measuring the length l W of the waveguide chip 2D;

4)测量波导第一、第二输出通道尾纤21、22的长度lW-o-1、lW-o-2,其长度要求类似(1)式,即满足(3)式:4) Measure the lengths lWo-1 and lWo-2 of the first and second output channel pigtails 21 and 22 of the waveguide. The length requirements are similar to formula (1), which satisfies formula (3):

SW-o-1=lW-o-1×Δnf且SW-o-2=lW-o-1×Δnf>SW=lW×ΔnW (3)S Wo-1 = l Wo-1 ×Δn f and S Wo-2 = l Wo-1 ×Δn f >S W =l W ×Δn W (3)

式中:ΔnW波导芯片的线性双折射。Where: Δn W is the linear birefringence of the waveguide chip.

5)如输出尾纤21、22的长度lW-o-1、lW-o-2不满足(3)式,则在第一第二输出通道分别焊接两段长度相同的延长光纤lf-o-1、lf-o-2,其对轴角度为0°-0°,其长度要求类似(3)式,即满足(4)式,测量并记录延长光纤lf-o-1、lf-o-25) If the lengths l Wo-1 and l Wo-2 of the output pigtails 21 and 22 do not satisfy the formula (3), then weld two sections of extended optical fibers l fo-1 and l of the same length in the first and second output channels respectively fo-2 , its on-axis angle is 0°-0°, and its length requirement is similar to formula (3), that is, to satisfy formula (4), measure and record the extended optical fibers l fo-1 and l fo-2 ;

Sf-o-1=lf-o-1×Δnf且Sf-o-2=lf-o-1×Δnf>SW=lW×ΔnW (4)S fo-1 =l fo-1 ×Δn f and S fo-2 =l fo-1 ×Δn f >S W =l W ×Δn W (4)

6)将Y波导2与光源1和光程解调装置3连接,其输入和和输出的对轴角度分别为θ1=45°,θ2=45°;6) Connecting the Y waveguide 2 to the light source 1 and the optical path demodulation device 3, the angles on the axes of its input and output are respectively θ 1 =45°, θ 2 =45°;

7)启动白光干涉仪,同时获得第一、第二输出通道2B、2C的两幅分布式偏振串音测量结果曲线;7) Start the white light interferometer, and obtain two distributed polarization crosstalk measurement result curves of the first and second output channels 2B and 2C at the same time;

8)利用已经测量的器件各部分的几何长度,包括:输入保偏尾纤21长度lW-i、输入延长保偏光纤长度lf-i、波导芯片2D长度lW、波导第一、第二输出通道尾纤21、22长度lW-o-1、lW-o-2、输出延长光纤的长度lf-o-1、lf-o-2;计算其光程延迟量,并按照其大小依次排列为两行:8) Utilize the measured geometric lengths of each part of the device, including: input polarization-maintaining pigtail 21 length l Wi , input extension polarization-maintaining fiber length l fi , waveguide chip 2D length l W , waveguide first and second output channel tails Fiber 21, 22 length lWo-1 , lWo-2 , output extension fiber length lfo-1 , lfo-2 ; calculate the optical path delay, and arrange them in two rows according to their size:

第一行(对应第一波导输出通道):Sf-i、(Sf-i+SW-i)、Sf-o-1、(Sf-o-1+SW-o-1)、(Sf-o-1+SW-o-1+Sf-i+SW-i+SW-1)The first line (corresponding to the first waveguide output channel): S fi , (S fi +S Wi ), S fo-1 , (S fo-1 +S Wo-1 ), (S fo-1 +S Wo-1 +S fi +S Wi +S W-1 )

第二行(对应第二波导输出通道):Sf-i、(Sf-i+SW-i)、Sf-o-2、(Sf-o-2+SW-o-2)、(Sf-o-2+SW-o-2+Sf-i+SW-i+SW-2)The second row (corresponding to the second waveguide output channel): S fi , (S fi +S Wi ), S fo-2 , (S fo-2 +S Wo-2 ), (S fo-2 +S Wo-2 +S fi +S Wi +S W-2 )

9)跟与理论分析结果公式(7)进行对比,按照光程延迟量可能出现的范围,确定各偏振串音峰值的含义,包括:9) Compared with the formula (7) of the theoretical analysis results, according to the possible range of the optical path delay, determine the meaning of each polarization crosstalk peak, including:

确定第一输出通道2B测量的偏振串音特征峰,具体为:Determine the polarization crosstalk characteristic peak measured by the first output channel 2B, specifically:

(1)波导输入延长光纤与波导输入尾纤21的偏振串音ρf-i(1) polarization crosstalk ρ fi of waveguide input extension fiber and waveguide input pigtail 21;

(2)波导输入尾纤21与波导芯片2D的偏振串音ρW-i(2) polarization crosstalk ρWi between waveguide input pigtail 21 and waveguide chip 2D;

(3)输出延长光纤与第一输出通道波导输出尾纤22的偏振串音ρf-o-1(3) output the polarization crosstalk pfo-1 of the extension fiber and the first output channel waveguide output pigtail 22;

(4)第一输出通道波导输出尾纤与波导芯片2D的偏振串音ρW-o-1(4) polarization crosstalk ρWo-1 of the first output channel waveguide output pigtail and waveguide chip 2D;

(5)第一通道测量的Y波导芯片的偏振串音 (5) Polarization crosstalk of the Y-waveguide chip measured in the first channel

确定第二输出通道2C测量的偏振串音特征峰,具体为:Determine the polarization crosstalk characteristic peak measured by the second output channel 2C, specifically:

(1)波导输入延长光纤与波导输入尾纤21的偏振串音ρf-i(1) polarization crosstalk ρ fi of waveguide input extension fiber and waveguide input pigtail 21;

(2)波导输入尾纤21与波导芯片2D的偏振串音ρW-i(2) polarization crosstalk ρWi between waveguide input pigtail 21 and waveguide chip 2D;

(3)输出延长光纤与第二输出通道波导输出尾纤23的偏振串音ρf-o-2(3) output the polarization crosstalk p fo-2 of the extension fiber and the second output channel waveguide output pigtail 23;

(4)第二输出通道波导输出尾纤与波导芯片2D的偏振串音ρW-o-2(4) polarization crosstalk ρWo-2 of the second output channel waveguide output pigtail and waveguide chip 2D;

(5)第二通道测量的Y波导芯片的偏振串音 (5) Polarization crosstalk of the Y waveguide chip measured by the second channel

10)对比ρW-o-2与ρW-o-1,可知Y波导2两个输出通道2B、2C之间性能上的不一致;10) Contrast and ρ Wo-2 and ρ Wo-1 , it can be seen that the performance of the two output channels 2B and 2C of the Y waveguide 2 is inconsistent;

11)根据公式(7)和(8)可以计算出保偏光纤尾纤和波导芯片实测的双折射Δnf、ΔnW;I(0)out1/I(0)out2代表波导器件第一、第二输出通道测量的插入损耗比值;11) According to formulas (7) and (8), the measured birefringence Δn f and Δn W of polarization-maintaining fiber pigtails and waveguide chips can be calculated; I(0) out1 /I(0) out2 represent the first and second waveguide devices The insertion loss ratio measured by the two output channels;

12)当外界环境参数(如温度等)或者应用参数(如波导芯片的电极加载电压等)变化时,重新回到步骤7),重新对Y波导的光学参数进行测量,可以测量的参数除上述步骤给出的外,还包括两个通道的光学特性变化:12) When the external environmental parameters (such as temperature, etc.) or application parameters (such as the electrode loading voltage of the waveguide chip, etc.) change, go back to step 7) and measure the optical parameters of the Y waveguide again. The parameters that can be measured except the above In addition to the steps given, the optical properties of the two channels vary:

(1)输入/输出光纤与波导芯片的耦合串音随温度的变化;(1) The coupling crosstalk between the input/output optical fiber and the waveguide chip changes with temperature;

(2)波导两输出通道的芯片消光比随外加电压的变化。(2) The chip extinction ratio of the two output channels of the waveguide varies with the applied voltage.

本发明是对基于白光干涉原理的光学相干域偏振测试系统(OCDP)的一种技术改进。OCDP的工作原理如图1所示,以保偏光纤的焊接点串音性能测试为例,由宽谱光源发出的高稳定宽谱偏振光501注入到一定长度的保偏光纤521的慢轴(快轴时,原理相同)。当传输光经过光纤521中的焊接点511时,在慢轴中信号光的一部分光能量就会耦合到正交的快轴中,形成耦合光束503,剩余的传输光束502依旧沿着慢轴传输。当传输光从光纤521的另外一端出射时(传输距离为l),由于光纤存在的线性双折射Δn(例如:5×10-4),使慢轴中的传输光502和在快轴中的耦合光503之间将存在一个光程差Δnl。光束502和503通过45°旋转的焊接点或者连接头512,并经过检偏器531的偏振极化后,由分光器532分别均匀地分成两部分。如图2所示,由传输光601和耦合光602组成参考光束,传输在干涉仪的固定臂中,经过固定反射镜533的反射后回到分光器532;由传输光603和耦合光604组成扫描光束,同样经过移动反射镜534的反射后也回到分光器532,两部分光汇聚在探测器537上形成白光干涉信号,被其接收并将光信号转换为电信号。此信号经过信号解调电路551处理后,送入测量计算机552中;测量计算机552另外还要负责控制移动反射镜534实现光程扫描。The invention is a technical improvement to the optical coherent domain polarization test system (OCDP) based on the principle of white light interference. The working principle of OCDP is shown in Figure 1. Taking the welding point crosstalk performance test of polarization-maintaining optical fiber as an example, the highly stable wide-spectrum polarized light 501 emitted by a wide-spectrum light source is injected into the slow axis of a certain length of polarization-maintaining optical fiber 521 ( Fast axis, the principle is the same). When the transmission light passes through the welding point 511 in the optical fiber 521, a part of the light energy of the signal light in the slow axis will be coupled into the orthogonal fast axis to form a coupling beam 503, and the remaining transmission beam 502 is still transmitted along the slow axis . When the transmitted light emerges from the other end of the optical fiber 521 (the transmission distance is l), due to the linear birefringence Δn (for example: 5×10 -4 ) existing in the optical fiber, the transmitted light 502 in the slow axis and the light in the fast axis There will be an optical path difference Δn1 between the coupled lights 503 . The light beams 502 and 503 pass through the welding point or the connecting head 512 rotated by 45°, and after being polarized by the analyzer 531 , they are divided into two parts uniformly by the beam splitter 532 . As shown in Figure 2, the reference beam is composed of transmitted light 601 and coupled light 602, transmitted in the fixed arm of the interferometer, and returned to the beam splitter 532 after being reflected by the fixed mirror 533; it is composed of transmitted light 603 and coupled light 604 The scanning light beam also returns to the beam splitter 532 after being reflected by the moving mirror 534, and the two parts of the light converge on the detector 537 to form a white light interference signal, which is received and converted into an electrical signal. After the signal is processed by the signal demodulation circuit 551, it is sent to the measurement computer 552; the measurement computer 552 is also responsible for controlling the moving mirror 534 to realize optical path scanning.

如图1和2所示,在测量计算机552的控制下,Michelson干涉仪的移动反射镜534使干涉仪两臂的光程差从Δnl经过零,扫描至-Δnl:As shown in Figures 1 and 2, under the control of the measurement computer 552, the moving mirror 534 of the Michelson interferometer makes the optical path difference of the two arms of the interferometer pass through zero from Δnl and scan to -Δnl:

(1)当光程差等于Δnl时,扫描光束中耦合光604与参考光束中的传输光601光程发生匹配,则产生白光干涉信号,其峰值幅度为它与缺陷点的耦合幅度因子和光源强度成正比;(1) When the optical path difference is equal to Δnl, the coupling light 604 in the scanning beam matches the transmission light 601 in the reference beam, and a white light interference signal is generated with a peak amplitude of It is proportional to the coupling amplitude factor of the defect point and the intensity of the light source;

(2)当光程差为零时,参考光束601、602分别与扫描光束中的传输光605、耦合光606光程发生匹配,分别产生白光干涉信号,其峰值幅度为二者的强度叠加,其幅度为Imain∝I0,它与光源输入功率成正比。如图2可知,与前一个白光干涉信号相比,两个白光干涉信号峰值之间的光程差刚好为Δnl。如果已知光学器件的线性双折射Δn,则可以计算得到缺陷点发生的位置l,而通过干涉信号峰值强度的比值可以计算得到缺陷点的功率耦合大小ρ;(2) When the optical path difference is zero, the optical paths of the reference beams 601 and 602 are respectively matched with the transmission light 605 and the coupling light 606 in the scanning beam, and white light interference signals are generated respectively, and the peak amplitudes are the superposition of the intensity of the two, Its magnitude is I main ∝I 0 , which is proportional to the input power of the light source. It can be seen from FIG. 2 that, compared with the previous white light interference signal, the optical path difference between the peaks of the two white light interference signals is just Δnl. If the linear birefringence Δn of the optical device is known, the position l of the defect point can be calculated, and the power coupling size ρ of the defect point can be calculated through the ratio of the peak intensity of the interference signal;

(3)当光程差等于-Δnl时,扫描光束中传输光607与参考光束中的耦合光602光程发生匹配,则产生白光干涉信号,其峰值幅度为它与光程差为Δnl时相同。如图可知,与光程差为Δnl时相比,此白光干涉信号与之在光程上对称,幅度上相同。(3) When the optical path difference is equal to -Δnl, the transmission light 607 in the scanning beam matches the optical path of the coupling light 602 in the reference beam, and a white light interference signal is generated with a peak amplitude of It is the same as when the optical path difference is Δnl. As can be seen from the figure, compared with when the optical path difference is Δnl, the white light interference signal is symmetrical in the optical path, and the amplitude is the same.

偏振串音ρ可以根据光程差为Δnl或者-Δnl获得的偏振串音信号幅度Icoupling,以及光程差为零时获得传输光信号幅度Imain计算得到:The polarization crosstalk ρ can be calculated according to the polarization crosstalk signal amplitude I coupling obtained when the optical path difference is Δnl or -Δnl, and the transmission optical signal amplitude I main obtained when the optical path difference is zero:

II cc oo uu pp ll ii nno gg II mm aa ii nno == ρρ (( 11 -- ρρ )) -- -- -- (( 55 ))

由于一般偏振串音远小于1,因此(1)式变化为:Since the general polarization crosstalk is much smaller than 1, formula (1) changes to:

II cc oo uu pp ll ii nno gg II mm aa ii nno == ρρ -- -- -- (( 66 ))

为了同时获得Y波导器件两个输出通道的光学特性,其测试装置如图3所示。当Y波导器件2与宽谱光源1和光程解调装置3的对准角度为0°~45°、45°~0°对准时,偏振串音检测与记录装置4获得的第一和第二输出通道2B、2C的白光干涉信号的幅度和光程延迟量,均满足(3)式表示:In order to simultaneously obtain the optical characteristics of the two output channels of the Y-waveguide device, the test setup is shown in Figure 3. When the Y-waveguide device 2 is aligned with the wide-spectrum light source 1 and the optical path demodulation device 3 at an alignment angle of 0°-45°, 45°-0°, the polarization crosstalk detection and recording device 4 obtains the first and second The amplitude and optical path delay of the white light interference signals of the output channels 2B and 2C all satisfy the formula (3):

II (( SS oo uu tt 11 )) oo uu tt 11 II (( 00 )) oo uu tt 11 == RR (( SS oo uu tt 11 )) ++ ρρ ff -- ii RR (( SS oo uu tt 11 ±± SS ff -- ii )) ++ ρρ WW -- ii RR [[ SS oo uu tt 11 ±± (( SS ff -- ii ++ SS WW -- ii )) ]] ++ ρρ ff -- oo -- 11 RR (( SS oo uu tt 11 ±± SS ff -- oo -- 11 )) ++ ρρ WW -- oo -- 11 RR [[ SS oo uu tt 11 ±± (( SS ff -- oo -- 11 ++ SS WW -- oo -- 11 )) ]] ++ ϵϵ cc hh ii pp 11 RR [[ SS oo uu tt 11 ±± (( SS ff -- ii ++ SS WW -- ii ++ SS ff -- oo -- 11 ++ SS WW -- oo -- 11 ++ SS EE. -- 11 )) ]] II (( SS oo uu tt 22 )) II (( 00 )) oo uu tt 22 == RR (( SS oo uu tt 22 )) ++ ρρ ff -- ii RR (( SS oo uu tt 22 ±± SS ff -- ii )) ++ ρρ WW -- ii RR [[ SS oo uu tt 22 ±± (( SS ff -- ii ++ SS WW -- ii -- 22 )) ]] ++ ρρ ff -- oo RR (( SS oo uu tt 22 ±± SS ff -- oo -- 22 )) ++ ρρ WW -- oo RR [[ SS oo uu tt 22 ±± (( SS ff -- oo -- 22 ++ SS WW -- oo -- 22 )) ]] ++ ϵϵ cc hh ii pp 22 RR [[ SS oo uu tt 22 ±± (( SS ff -- ii ++ SS WW -- ii -- 22 ++ SS ff -- oo -- 22 ++ SS WW -- oo -- 22 ++ SS WW 22 )) ]]

式中:I(Sout1)、I(Sout2)分别表示为第一差分探测器(308、309)和第二差分探测器(328、329)探测的所有白光干涉信号幅度之和;Sout1、Sout2分别代表第一、第二解调干涉仪31、32的光程扫描延迟量,I(0)out1、I(0)out2分别光程差为零时,表示白光干涉信号的最大峰值幅度;R(S)为宽谱光源的归一化自相干函数,R(0)=1,传输光的白光干涉峰值信号幅度,光程差为零;R(S)=0(S>S0时,S0为宽谱光源的相干长度);Sf-i、Sf-o-1、Sf-o-2、SW-i、SW-o-1、SW-o-2、SW-1、SW-2分别为输入延长光纤、第一输出通道延长光纤、第二输出通道延长光纤、波导输入尾纤、波导第一输出通道尾纤、波导第二输出通道尾纤、第一输出通道波导传输光程、第二输出通道波导传输光程所对应的光程延迟量,当慢轴光程超前于快轴光程时,上述延迟量定义为+;当慢轴光程落后于快轴光程时,上述延迟量定义为-,各光程延迟量可以依次表示为:In the formula: I(S out1 ), I(S out2 ) are respectively expressed as the sum of the amplitudes of all white light interference signals detected by the first differential detector (308, 309) and the second differential detector (328, 329); S out1 , S out2 represent the optical path scanning delays of the first and second demodulation interferometers 31 and 32 respectively, and when the optical path difference of I(0) out1 and I(0) out2 is zero respectively, it represents the maximum peak value of the white light interference signal Amplitude; R(S) is the normalized autocoherence function of the broadband light source, R(0)=1, the white light interference peak signal amplitude of the transmitted light, and the optical path difference is zero; R(S)=0(S>S 0 , S 0 is the coherence length of the broadband light source); S fi , S fo-1 , S fo-2 , S Wi , S Wo-1 , S Wo-2 , S W-1 , S W-2 respectively The input extension fiber, the first output channel extension fiber, the second output channel extension fiber, the waveguide input pigtail, the waveguide first output channel pigtail, the waveguide second output channel pigtail, the first output channel waveguide transmission optical path, the second The optical path delay corresponding to the waveguide transmission optical path of the two output channels, when the optical path of the slow axis is ahead of the optical path of the fast axis, the above delay is defined as +; when the optical path of the slow axis lags behind the optical path of the fast axis, the above delay The quantity is defined as -, each optical path delay can be expressed as:

Sf-i=lf-i×Δnf S fi =l fi ×Δn f

SW-i=lW-i×Δnf S Wi =l Wi ×Δn f

Sf-o-1=lf-o-1×Δnf S fo-1 = l fo-1 ×Δn f

Sf-o-2=lf-o-2×Δnf S fo-2 = l fo-2 ×Δn f

(8) (8)

SW-o-1=lW-o-1×Δnf S Wo-1 =l Wo-1 ×Δn f

SW-o-2=lW-o-2×Δnf S Wo-2 =l Wo-2 ×Δn f

SW-1=lW-1×ΔnW S W-1 = l W-1 ×Δn W

SW-2=lW-2×ΔnW S W-2 = l W-2 ×Δn W

式中,lf-i、lf-o-1、lf-o-2、lW-i、lW-o-1、lW-o-2、lW-1、lW-2分别为输入延长光纤、第一输出通道延长光纤、第二输出通道延长光纤、波导输入尾纤、波导第一输出通道尾纤、波导第二输出通道尾纤、第一输出通道波导芯片、第二输出通道波导芯片的长度,Δnf、ΔnW分别为保偏光纤和波导芯片的线性双折射;ρf-i、ρf-o-1、ρf-o-2分别为波导输入延长光纤与波导输入尾纤、第一输出通道的延长光纤与波导输出尾纤、第二输出通道的延长光纤与波导输出尾纤的焊点偏振串音功率因子,ρW-i、ρW-o-1、ρW-o-2分别为波导输入、第一输出尾纤、第二输出尾纤与波导芯片的偏振串音功率因子,分别为第一、第二通道测量的Y波导芯片偏振串音(消光比的倒数)。In the formula, l fi , l fo-1 , l fo-2 , l Wi , l Wo-1 , l Wo-2 , l W-1 , l W-2 are the input extension fiber and the first output channel extension fiber respectively , Length of second output channel extension fiber, waveguide input pigtail, waveguide first output channel pigtail, waveguide second output channel pigtail, first output channel waveguide chip, second output channel waveguide chip, Δn f , Δn W are the linear birefringence of the polarization - maintaining fiber and the waveguide chip respectively; The solder joint polarization crosstalk power factor of the extension fiber of the second output channel and the waveguide output pigtail, ρWi , ρWo-1 , ρWo-2 are respectively the waveguide input, the first output pigtail, the second output pigtail and The polarization crosstalk power factor of the waveguide chip, Y-waveguide chip polarization crosstalk (reciprocal of extinction ratio) measured for the first and second channels respectively.

由(7)、(8)式可知,如果已知输入、第一输出、第二输出延长光纤,输入、第一输出、第二输出波导尾纤、以及波导芯片的长度,通过光程解调装置3的光程扫描和偏振串音检测与记录装置4的白光干涉信号幅度的采集与处理,在光程延迟量为0、±Sf-i、±Sf-o-1、±Sf-o-2、±(Sf-i+SW-i)、±(Sf-o-1+SW-o-1)、±(Sf-o-2+SW-o-2)、±(Sf-o-1+SW-o-1+Sf-i+SW-i+SW-1)、±(Sf-o-2+SW-o-2+Sf-i+SW-i+SW-2)处,分别可以获得白光干涉信号的峰值,其幅度分别对应ρf-i、ρf-o-1、ρf-o-2、ρW-i、ρW-o-1、ρW-o-2等光学参数。It can be known from (7) and (8) that if the input, the first output, and the second output extension fiber are known, the lengths of the input, the first output, the second output waveguide pigtail, and the waveguide chip can be demodulated through the optical path The optical path scanning of device 3 and the collection and processing of polarization crosstalk detection and recording device 4 white light interference signal amplitude, when the optical path delay is 0, ±S fi , ±S fo-1 , ±S fo-2 , ±S fo-2 , ± (S fi +S Wi ), ±(S fo-1 +S Wo-1 ), ±(S fo-2 +S Wo-2 ), ±(S fo-1 +S Wo-1 +S fi +S Wi +S W-1 ), ±(S fo-2 +S Wo-2 +S fi +S Wi +S W-2 ), respectively, the peak value of the white light interference signal can be obtained, and its amplitude corresponds to ρ fi , ρ fo-1 , ρ fo-2 , ρ Wi , ρ Wo-1 , ρ Wo-2 , and other optical parameters.

为清楚地说明本发明集成波导调制器(Y波导)双输出通道同时测量的装置和测量方法,结合实施例和附图对本发明作进一步说明,但不应以此限制本发明的保护范围。In order to clearly illustrate the device and method for simultaneous measurement of dual output channels of the integrated waveguide modulator (Y waveguide) of the present invention, the present invention will be further described in conjunction with the embodiments and accompanying drawings, but this should not limit the protection scope of the present invention.

实施例1——基于Mach-Zehnder解调干涉仪的波导测量装置Embodiment 1——Waveguide measurement device based on Mach-Zehnder demodulation interferometer

器件测量装置如图3所示,白光干涉测量装置的器件选择与参数如下:The device measurement device is shown in Figure 3. The device selection and parameters of the white light interferometry device are as follows:

(1)宽带光源11的中心波长1550nm、半谱宽度大于45nm,出纤功率大于2mW,光源光谱纹波<0.05dB(峰值幅度大约为-60dB),相干峰的光程范围4~7mm;DFB光源311的半谱宽度小于50MHz,出纤功率大于1mW;(1) The central wavelength of the broadband light source 11 is 1550nm, the half-spectrum width is greater than 45nm, the output power of the fiber is greater than 2mW, the spectral ripple of the light source is <0.05dB (the peak amplitude is about -60dB), and the optical path range of the coherence peak is 4-7mm; DFB The half-spectrum width of the light source 311 is less than 50MHz, and the output power of the fiber is greater than 1mW;

(2)2/98光纤耦合器12工作波长1550nm、分光比2:98;(2) 2/98 fiber coupler 12 working wavelength 1550nm, splitting ratio 2:98;

(3)光纤隔离器16工作波长1550nm、插入损耗0.8dB,隔离度>35dB;(3) Optical fiber isolator 16 has a working wavelength of 1550nm, insertion loss of 0.8dB, and isolation >35dB;

(4)光纤起偏器17,第一、第二光纤检偏器301、321的工作波长为1550nm,消光比为30dB,插入损耗小于1dB;(4) Optical fiber polarizer 17, the operating wavelength of the first and second optical fiber analyzers 301, 321 is 1550nm, the extinction ratio is 30dB, and the insertion loss is less than 1dB;

(5)第一、第二、第三、第四光纤耦合器303、307、323、337的参数相同,工作波长为1310/1550nm,分光比50:50;(5) The parameters of the first, second, third, and fourth fiber couplers 303, 307, 323, and 337 are the same, the operating wavelength is 1310/1550nm, and the splitting ratio is 50:50;

(6)第一、第二光纤环行器305、325为三端口环行器,插入损耗1dB,回波损耗大于55dB;(6) The first and second optical fiber circulators 305 and 325 are three-port circulators with an insertion loss of 1 dB and a return loss greater than 55 dB;

(7)第一、第二准直透镜306、326的工作波长为1550nm,它与光程扫描器310(反射率为92%以上)之间的光程扫描距离大约在0~200mm之间变化,平均插入损耗为2.0dB,损耗波动±0.2dB以内,并且光程扫描器310大约处于100mm位置时,第一、第二解调干涉仪31、32的两臂光程差大约为零;(7) The operating wavelength of the first and second collimating lenses 306, 326 is 1550nm, and the optical path scanning distance between it and the optical path scanner 310 (the reflectivity is more than 92%) changes approximately between 0-200mm , the average insertion loss is 2.0dB, the loss fluctuation is within ±0.2dB, and when the optical path scanner 310 is approximately at the 100mm position, the optical path difference between the two arms of the first and second demodulating interferometers 31, 32 is approximately zero;

(8)第一、第二差分探测器308与309、328与329的光敏材料均为InGaAs,光探测范围为1100~1700nm,响应度大于0.85;(8) The photosensitive materials of the first and second differential detectors 308 and 309, 328 and 329 are all InGaAs, the light detection range is 1100-1700nm, and the responsivity is greater than 0.85;

(9)选择待测的Y波导器件2,其工作波长为1550nm,波导尾纤慢轴与波导芯片的快轴对准,波导芯片长度20mm。(9) Select the Y waveguide device 2 to be tested, its working wavelength is 1550nm, the slow axis of the waveguide pigtail is aligned with the fast axis of the waveguide chip, and the length of the waveguide chip is 20mm.

测量装置的工作过程如下:The working process of the measuring device is as follows:

宽谱光源11的输出光经过光纤耦合器12的分光、光纤隔离器16的隔离和起偏器17的极化后成为线偏光,再经过保偏输出光纤18与Y波导2的保偏输入尾纤21的45°对轴焊点,光能量均匀地注入到待测波导芯片2D的快慢轴中;光信号首先被分成两束,分别传输在2B和2C中,由于Y波导的消光比的存在,在波导慢轴中传输信号光得到较大衰减,而快轴传输光略有衰减(对应插入损耗),快慢轴传输光一同从Y波导的第一输出通道2B和第一输出通道2C中输出,注入尾纤22和23中,分别经过尾纤300和320的45°焊点,分别在第一检偏器301和第二检偏器321中混合,并分别注入到第一解调干涉仪31和第二解调干涉仪32中。The output light of the broadband light source 11 becomes linearly polarized after being split by the fiber coupler 12, isolated by the fiber isolator 16 and polarized by the polarizer 17, and then passes through the polarization maintaining output fiber 18 and the polarization maintaining input tail of the Y waveguide 2 The 45° on-axis solder joint of the fiber 21, the light energy is evenly injected into the fast and slow axes of the waveguide chip 2D to be tested; the light signal is first divided into two beams and transmitted in 2B and 2C respectively, due to the existence of the extinction ratio of the Y waveguide , the signal light transmitted in the slow axis of the waveguide is greatly attenuated, while the light transmitted in the fast axis is slightly attenuated (corresponding to the insertion loss), and the light transmitted in the fast and slow axes is output from the first output channel 2B and the first output channel 2C of the Y waveguide together , injected into the pigtails 22 and 23, passed through the 45° solder joints of the pigtails 300 and 320 respectively, mixed in the first polarizer 301 and the second polarizer 321 respectively, and injected into the first demodulation interferometer respectively 31 and the second demodulation interferometer 32.

以第一解调干涉仪31为例,从Y波导2的慢轴中输出的信号光和快轴输出的信号光被303均匀分成2束,一束传输在光纤304组成的固定臂中,另外一束传输在由第一环形器305、第一准直器306和光程扫描器310组成的扫描臂中。当光程扫描器310运动实现光程扫描时,第一解调干涉仪31的固定臂和扫描臂之间产生的光程差与Y波导2快、慢轴输出光的光程差相匹配时,第一差分探测器308与309将输出白光干涉信号,白光干涉峰值与波导芯片消光比成反比,其峰值对应的光程扫描位置对应波导芯片的长度。上述测量过程获得了从第一输出通道测量的Y波导2的光学性能。Taking the first demodulation interferometer 31 as an example, the signal light output from the slow axis of the Y waveguide 2 and the signal light output from the fast axis are evenly divided into two beams by 303, and one beam is transmitted in a fixed arm composed of an optical fiber 304. One beam is transmitted in a scanning arm consisting of a first circulator 305 , a first collimator 306 and an optical path scanner 310 . When the optical path scanner 310 moves to realize the optical path scanning, the optical path difference generated between the fixed arm and the scanning arm of the first demodulation interferometer 31 matches the optical path difference of the fast and slow axis output light of the Y waveguide 2 , the first differential detectors 308 and 309 will output white light interference signals, the white light interference peak value is inversely proportional to the extinction ratio of the waveguide chip, and the optical path scanning position corresponding to the peak value corresponds to the length of the waveguide chip. The above measurement process obtains the optical properties of the Y-waveguide 2 measured from the first output channel.

第二解调干涉仪32与第一解调干涉仪共用同一光程扫描器310。因此,当光程扫描器310工作时,第二解调干涉仪32几乎同时获得了从第一输出通道测量的Y波导2的光学性能。The second demodulation interferometer 32 shares the same optical path scanner 310 as the first demodulation interferometer. Therefore, when the optical path scanner 310 is working, the second demodulation interferometer 32 obtains the optical properties of the Y waveguide 2 measured from the first output channel almost simultaneously.

实施例2——尾纤慢轴与波导芯片的快轴的Y波导器件的双通道同时测量Embodiment 2——Double-channel simultaneous measurement of the Y-waveguide device with the slow axis of the pigtail and the fast axis of the waveguide chip

Y波导器件的测量装置图如图3所示,光学性能测量流程如图4所示。The measurement device diagram of the Y waveguide device is shown in Figure 3, and the optical performance measurement process is shown in Figure 4.

(1)由步骤701可知,测量Y波导输入尾纤长度lW-i为1.53米;(1) As can be seen from step 701, it is 1.53 meters to measure the Y waveguide input pigtail length lWi ;

(2)由步骤702可知,输入尾纤lW-i的理论光程(Δnf按5×10-4计)SW-i=0.765mm;而Sripple=4~7mm,可见,必须要焊接输入延长光纤;(2) It can be known from step 702 that the theoretical optical path of the input pigtail l Wi (Δn f is calculated as 5×10 -4 ) S Wi = 0.765 mm; and S ripple = 4 ~ 7 mm, it can be seen that the input extension fiber must be welded ;

(3)根据步骤703可知,连接延长光纤lf-i的长度至少要7×10-3/5×10-4=14米,实际选取15米;(3) According to step 703, it can be seen that the length of the connecting extension optical fiber l fi is at least 7×10 -3 /5×10 -4 = 14 meters, and 15 meters is actually selected;

(4)根据步骤704可知,测量波导芯片的长度为20mm,其理论光程(ΔnW按8×10-2计)SW-o=1.6mm,对应的输出尾纤长度lW-o=1.6×10-3/5×10-4=3.2米;(4) According to step 704, it can be seen that the length of the measured waveguide chip is 20 mm, its theoretical optical path (Δn W is calculated as 8×10 −2 ) S Wo = 1.6 mm, and the corresponding output pigtail length l Wo = 1.6×10 − 3 /5×10 -4 = 3.2 meters;

(5)根据步骤705可知,测量第一、第二输出通道的尾纤长度lW-o-1、lW-o-1为1.72米、1.78米;(5) According to step 705, it can be known that the pigtail lengths l Wo-1 and l Wo-1 of the first and second output channels are measured to be 1.72 meters and 1.78 meters;

(6)根据步骤706~707可知,输出尾纤的光程SW-o-1、SW-o-1均小于SW,可见,必须要延长输出光纤,焊接延长光纤lf-o至少要3.2米,实际选取5.6米;(6) According to steps 706-707, it can be seen that the optical distances S Wo-1 and S Wo-1 of the output pigtails are both smaller than S W . It can be seen that the output optical fiber must be extended, and the welding extension optical fiber l fo must be at least 3.2 meters. The actual selection 5.6 meters;

(7)由于是首次测量,将Y波导输入/输出尾纤与光源1和光程解调装置3的对轴角度调整为0°-0°,启动测量,获得如图5的测量结果,81表示为测量的干涉主峰,它是测量幅度和光程位置参考点;82(82’)、83(83’)为测量装置3光路的杂散干涉峰;84(84’)为光源光谱纹波导致的高阶相干峰;85(85’)为测量装置3的偏振串音噪声本底,代表测量装置的测量极限;(7) Since it is the first measurement, adjust the on-axis angle of the Y waveguide input/output pigtail, the light source 1 and the optical path demodulation device 3 to 0°-0°, start the measurement, and obtain the measurement result as shown in Figure 5, 81 represents It is the main interference peak of the measurement, which is the reference point of the measurement amplitude and optical path position; 82 (82'), 83 (83') are the stray interference peaks of the optical path of the measuring device 3; 84 (84') is caused by the spectral ripple of the light source High-order coherence peak; 85 (85') is the polarization crosstalk noise floor of the measuring device 3, representing the measurement limit of the measuring device;

(8)由步骤708~709可知,调整输入/输出角度分别为0°-45°、45°-0°再次启动测试装置,可以获得如图6、图7所示的Y波导第一输出通道2B、第二输出通道2C的测量结果;(8) From steps 708 to 709, it can be seen that the input/output angles are adjusted to 0°-45° and 45°-0° and the test device is restarted to obtain the first output channel of the Y waveguide as shown in Figure 6 and Figure 7 2B, the measurement result of the second output channel 2C;

(9)由步骤710~711可知,根据光纤和波导芯片长度,计算各部分的光程量,并排序,获得8A~8E(8A’~8E’分别8A~8E对称)、9A~9E(9A’~9E’分别9A~9E对称)各10个特征峰,并由公式(7)确定各偏振串音峰值的含义和具体幅值,如图11和图12所示;(9) From steps 710 to 711, it can be seen that according to the length of the optical fiber and the waveguide chip, the optical path length of each part is calculated and sorted to obtain 8A to 8E (8A' to 8E' are respectively symmetric to 8A to 8E), 9A to 9E (9A '~9E' respectively 9A~9E symmetry) 10 characteristic peaks each, and the meaning and specific amplitude of each polarization crosstalk peak are determined by formula (7), as shown in Figure 11 and Figure 12;

(10)由步骤712可知,第一输出通道和第二输出通道分别测量波导芯片的消光比分别为55.2±0.2dB和52.3±0.2dB,其差值为2.9dB;(10) It can be seen from step 712 that the extinction ratios of the waveguide chip measured by the first output channel and the second output channel are respectively 55.2±0.2dB and 52.3±0.2dB, and the difference is 2.9dB;

(11)由步骤713~714可知,根据输入/输出延长光纤长度分别为lf-i=15.00米、lf-o-1=lf-o-2=5.60米,输入/输出尾纤分别为lW-i=1.53米、lW-o-1=1.72米、lW-o-1=1.78米,波导芯片长度为20mm,并根据(7)、(8)式可以计算得到光纤和波导的线性双折射详见图13和图14;(11) From steps 713 to 714, it can be known that the lengths of the input/output extension fibers are respectively l fi =15.00 meters, l fo-1 =l fo-2 =5.60 meters, and the input/output pigtails are respectively l Wi =1.53 meters , l Wo-1 = 1.72 meters, l Wo-1 = 1.78 meters, the length of the waveguide chip is 20mm, and the linear birefringence of the optical fiber and the waveguide can be calculated according to (7) and (8), see Figure 13 and Figure 14 for details ;

(12)根据测试数据可知,从第一、第二输出通道得到的白光干涉信号峰值的最大值I(0)out1、I(0)out2分别为2.8dBV、3.9dBV,可知两通道插入损耗相差1.1dB。(12) According to the test data, the maximum value of the white light interference signal peak values I(0) out1 and I(0) out2 obtained from the first and second output channels are 2.8dBV and 3.9dBV respectively. It can be seen that the insertion loss of the two channels is different 1.1dB.

实施例3——Y波导器件两输出通道随温度变化的测量Embodiment 3——Measurement of the change of two output channels of Y waveguide device with temperature

Y波导器件的测量装置依旧如图3所示,与实施例2的区别之处在于,将另外一只连接与宽谱光源1和光程解调装置3的待测Y波导2置于温度控制箱内,从-50℃变化到80℃改变温度,按照如图4所示的测量流程和数据分析方法,同时从第一测量通道和第二测量通道获得Y波导器件的各种光学随温度的变化量。The measurement device of the Y-waveguide device is still as shown in Figure 3, and the difference with Embodiment 2 is that another Y-waveguide 2 to be measured connected with the broadband light source 1 and the optical path demodulation device 3 is placed in the temperature control box Inside, change the temperature from -50°C to 80°C, follow the measurement process and data analysis method shown in Figure 4, and simultaneously obtain various optical changes of the Y waveguide device with temperature from the first measurement channel and the second measurement channel quantity.

试验结果表明:输入/输出尾纤与波导芯片的耦合点串音对温度非常敏感,如图8~10所示,分别为Y波导输入尾纤、第一输出通道尾纤、第二输出通道尾纤与波导芯片的功率耦合串音随温度的变化。从图中可以看出,三者变化并不一致,波导输入尾纤串音和第一输出通道尾纤串音变化较大(20dB以上),而第二输出通道尾纤串音变化较小(10dB以内)。串音变化量的大小、最小串音点的温度等与光纤、波导连接处的材料和工艺有关。因此,通过对第一、第二输出通道串音随温度变化曲线的分析,对Y波导材料和工艺的选择和优化具有非常大的指导意义。The test results show that the crosstalk at the coupling point of the input/output pigtail and the waveguide chip is very sensitive to temperature. The power coupling crosstalk between fiber and waveguide chip varies with temperature. It can be seen from the figure that the changes of the three are not consistent. The waveguide input pigtail crosstalk and the first output channel pigtail crosstalk have a large change (above 20dB), while the second output channel pigtail crosstalk has a small change (10dB within). The magnitude of the crosstalk change and the temperature of the minimum crosstalk point are related to the materials and processes of the optical fiber and waveguide connection. Therefore, through the analysis of the curves of crosstalk versus temperature of the first and second output channels, it has great guiding significance for the selection and optimization of Y waveguide materials and processes.

Claims (4)

1. a dual channel optical performance testing device for integrated waveguide manipulator, including high polarization-stable degree wide spectrum light source (1), Integrated waveguide manipulator (2) to be measured, light path demodulating equipment (3), polarization crosstalk detection and recording equipment (4), is characterized in that:
First output channel and second output channel of integrated waveguide manipulator (2) to be measured are connected to light path demodulating equipment (3) the first demodulated interferential instrument and the second demodulated interferential instrument;Polarization crosstalk detection is simultaneously connected with the first demodulation with recording equipment (4) Interferometer and the second demodulated interferential instrument, opto-electronic conversion and signal processing unit (41) are to the first difference in the first demodulated interferential instrument The white light interference signal of the second differential detector output in detector and the second demodulated interferential instrument carries out processing and record simultaneously; Control computer (42) and utilize polarization crosstalk identification and the processing method of built-in integrated waveguide manipulator (2) to be measured, to be measured Waveguide chip extinction ratio between the first output channel of integrated waveguide manipulator (2) and the second output channel, linear birefrigence, insert Enter loss, the absolute value of tail optical fiber cross-talk measure, store and show, to external environment parameters or application parameter change time Performance difference compares and shows.
The dual channel optical performance testing device of a kind of integrated waveguide manipulator the most according to claim 1, its feature exists In: the first described demodulated interferential instrument and the second demodulated interferential instrument: the first demodulated interferential instrument (31) is by the first optical fiber analyzer (301) the first end with the one 2 × 2nd fiber coupler (303) be connected, second end and the 2nd 2 of the one 2 × 2nd fiber coupler First end connection, the 3rd end of the one 2 × 2nd fiber coupler and the 22 × 2nd fiber coupler of × 2 fiber couplers (307) (307) the 4th end is by the first optical fiber circulator (305) connection, the 4th end of the one 2 × 2nd fiber coupler and a DFB Light source (311) connects, and the other end of the first optical fiber circulator (305) connects the first fiber collimating lenses (306), the 22 × 2nd light Second end of fine bonder (307) and three-terminal link the first differential detector;
Second demodulated interferential instrument (32) is identical with the composition of the first demodulated interferential instrument, respectively by the second optical fiber analyzer (321), 32 × 2 fiber couplers (323), the 42 × 2nd fiber coupler (327), the second optical fiber circulator (325), the second optical fiber are accurate Straight lens (326), the second differential detector, the 2nd DFB light source (331) composition.
The dual channel optical performance testing device of a kind of integrated waveguide manipulator the most according to claim 1 and 2, its feature It is: described high polarization-stable degree wide spectrum light source (1), is connected to by first outfan (13) of fiber coupler (12) One photodetector (14);By the second outfan (15) after fibre optic isolater (16), it is connected to the optical fiber polarizer (17).
The dual channel optical performance testing device of a kind of integrated waveguide manipulator the most according to claim 3, its feature exists In: described integrated waveguide manipulator (2) to be measured and high polarization-stable degree wide spectrum light source (1) and the company of light path demodulating equipment (3) The relation of connecing is:
The output polarization maintaining optical fibre (18) of the optical fiber polarizer (17) and the input of integrated waveguide manipulator (2) input channel (2A) to be measured Protecting inclined tail optical fiber (21) countershaft angle is 0~45 °;
Inclined tail optical fiber and first is protected in first output channel (2B) of integrated waveguide manipulator to be measured, the output of the second output channel (2C) The countershaft of inclined tail optical fiber is protected in the input of demodulated interferential instrument and the first optical fiber analyzer of the second demodulated interferential instrument, the second optical fiber analyzer Angle is respectively 0~45 °.
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