CN106643507B - A kind of Three-coordinate measurer and method based on binary channels point-diffraction interference - Google Patents
A kind of Three-coordinate measurer and method based on binary channels point-diffraction interference Download PDFInfo
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- CN106643507B CN106643507B CN201710077177.5A CN201710077177A CN106643507B CN 106643507 B CN106643507 B CN 106643507B CN 201710077177 A CN201710077177 A CN 201710077177A CN 106643507 B CN106643507 B CN 106643507B
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention discloses the Three-coordinate measurers based on binary channels point-diffraction interference, are divided into transmitted light and reflected light by the first polarization splitting prism including the laser that polarization laser issues, along the transmission optical propagation direction, are provided with third polarization splitting prism；Quarter-wave plate, reflective mirror are disposed with along the reflected light travels direction；The second polarization splitting prism is additionally provided with after first polarization splitting prism along the direction of propagation of the reflected light after reflecting mirror reflects；Along the direction of propagation of light, the sub-micron pore size optical fiber that is respectively arranged with a pair of of fiber coupler after second polarization splitting prism and third polarization splitting prism and is connect with the light coupling device.In addition, the invention also discloses a kind of three-coordinate measuring methods based on binary channels point-diffraction interference.Using the present invention, the high-acruracy survey on three directions is realized, improves a precision for diffraction three-dimensional measurement.
Description
Technical field
The present invention relates to a diffraction three-dimensional field of measuring technique, spy is standby to be related to a kind of three based on binary channels point-diffraction interference
Coordinate measuring set and method.
Background technique
In order to reach modern manufacturing industry for Product Precision increasingly higher demands, many high-precision absolute displacements measurement side
Method is used among the production of daily measurement accuracy and high efficiency measurement.Three-dimensional coordinate measurement mainly uses three coordinates at present
Measuring machine and laser tracker.Three-coordinates measuring machine is widely fitted as a kind of efficient absolute displacement measuring system
Work for high accuracy positioning, dimensional measurement and reproduction product etc..
Currently, three coordinate measuring machine needs expensive high-precision exclusive guideway, the marble measurement of high flatness is flat
Platform.When real-time measurement, needs for part to be measured to be placed on measuring table, measured by sensor, do not have portability.Closely
Nian Lai, point-diffraction interference technology are rapidly developed, and preferable reality has been obtained in high-precision optical detection field
With.Especially with the development of optic fibre manufacture process and pin hole processing technology, 2-3 μm of magnitude even smaller szie can get
Point diffraction source, promote the fast development and application of point-diffraction interference measuring technique well.In point-diffraction interference technology,
Obtaining ideal spherical face wavefront using diffraction principle can achieve the resolution ratio of diffraction limit performance, once can as reference wavefront
It obtains better than in 10-4The measuring basis of λ (wavelength X=632.8nm) magnitude, and make detection accuracy that there is preferable reproducibility.
Point-diffraction interferometer itself is not limited by guide rail, and directly avoids the error of conventional dry interferometer Plays mirror introducing, is spread out with point
Shooting method obtains high-precision standard spherical surface, provides support for the measurement of higher precision.
Currently, point-diffraction interference measuring system with an optical fiber to realize three-dimensional absolute displacement measuring system, in x and y
It is low to there is a problem of caused by sensitivity is different that there are precision on being parallel to stripe direction in both direction.
Summary of the invention
It is an object of the invention to provide a kind of Three-coordinate measurer and method based on binary channels point-diffraction interference, improves
The precision of measurement.
In order to solve the problems existing in the prior art, the present invention provides a kind of three coordinates survey based on binary channels point-diffraction interference
Measure device, the device include: sending of the polarization laser along the polarization laser optical propagation direction on be additionally provided with polarization
Amici prism, which is characterized in that the laser is divided into transmitted light and reflected light by polarization splitting prism, along the transmitted light
The direction of propagation is provided with third polarization splitting prism；Quarter-wave plate, anti-is disposed with along the reflected light travels direction
Light microscopic；Along the direction of propagation of the reflected light after reflecting mirror reflects, after the polarization splitting prism, it is additionally provided with
Two Amici prisms；Along the direction of propagation of light, a pair of of light is respectively arranged with after first Amici prism and third Amici prism
Fine coupler and the sub-micron pore size optical fiber being connect with the fiber coupler.
The technical program is additionally provided with the second Amici prism and third Amici prism after polarization splitting prism, sets accordingly
Two pairs of sub-micron pore size optical fiber have been set, therefore three-dimensional coordinate can have been obtained in diffraction exit end, have improved the precision of measurement.
Wherein, further includes: measuring probe is connect with the beam projecting end of every sub-micron pore size optical fiber, every for obtaining
The emergent light of two sub-micron pore size optical fiber is in the offset laterally or longitudinally generated；
Detector is set to after measuring probe along the direction of propagation of light, for acquiring the interference of two o'clock diffractive spherical wavefront
Striped.
Measuring probe is arranged at the beam projecting end of sub-micron pore size optical fiber in the technical program, and is obtained by measuring probe
Emergent light horizontal and vertical generation offset, and by detector acquire interference fringe, so that the analysis for the later period provides
Condition.
It wherein, further include phase shifter, the phase shifter is connect with the reflecting mirror.Movement by phase shifter to reflecting mirror
Multiple groups interference fringe can be obtained, and then improves the precision of measurement.
Wherein, the phase shifter is piezoelectric phase-shifter.
It wherein, further include analysis processing device, the processing unit is computer, and the computer installation is in the phase shift
Between device and the detector.
Wherein, the fast axis direction of the quarter-wave plate and X-axis be in angle of 45 degrees.
Wherein, the pixel of the detector is 1920 × 1080, and corresponding horizontal and vertical Pixel Dimensions are all 5.5 μm.
The present invention also provides a kind of three-coordinate measuring method based on binary channels point-diffraction interference, this method packets accordingly
Include: the laser that polarization laser issues enters polarization spectro rib border and is divided into transmitted light and reflected light, and the transmitted light is by the
Three polarizing prisms are coupled into first group of sub-micron pore size optical fiber by laser couplers；The reflected light passes through reflecting mirror
Reflection, after the second Amici prism, be coupled into second group of sub-micron pore size optical fiber by laser couplers；
Alternately open one in the optical fiber and second group of sub-micron pore size optical fiber in first group of sub-micron pore size optical fiber
Root optical fiber makes the emergent light for two optical fiber opened generate the point diffraction ball for representing lateral shift or vertical misalignment in measuring probe
Before surface wave, and then interference fringe is generated in detector plane.
In addition, further includes:
Computer control piezoelectricity phase shifter repeatedly moves reflecting mirror, to change the light between two o'clock diffraction ball wavefront
Path difference；
Detector acquires multiple corresponding interference fringes in real time, and the interference fringe image of the acquisition is sent to calculating
Machine.
In addition, further includes:
The two o'clock diffractive spherical wavefront interference fringe that computer acquires detector in real time is demodulated using five step Phase-shifting algorithms
Out in interference field on detector plane arbitrary point phase distribution；
Computer solves to obtain the three-dimensional seat of pairs of sub-micron pore size optical fiber point-diffraction exit end using intelligent optimization algorithm
Target optimal solution.
The embodiment of the present invention is not provided only with polarization splitting prism, is additionally provided with the second Amici prism and third light splitting rib
Mirror, and the second Amici prism and third Amici prism are connect by a pair of of fiber coupler with sub-micron pore size optical fiber respectively,
It is just provided with two pairs of sub-micron pore size optical fiber in detection device of the invention in this way, that is, is provided with four sub-micron pore size optical fiber,
The high-acruracy survey on three directions is realized simultaneously, improves a precision for diffraction three-dimensional measurement.
Detailed description of the invention
Fig. 1 is a kind of a kind of signal of embodiment of the Three-coordinate measurer based on binary channels point-diffraction interference of the present invention
Figure；
Fig. 2 is a kind of a kind of process of embodiment of the three-coordinate measuring method based on binary channels point-diffraction interference of the present invention
Schematic diagram；
Fig. 3 is homographic solution when connecting the present invention is based on the optical fiber of the three-coordinate measuring method of binary channels point-diffraction interference to G1
Phase schematic diagram after package；
Fig. 4 is when a kind of optical fiber of the three-coordinate measuring method based on binary channels point-diffraction interference of the present invention connects G2 pair
Phase schematic diagram after answering unpacking；
Fig. 5 is a kind of binary channels point-diffraction interference of the three-coordinate measuring method based on binary channels point-diffraction interference of the present invention
Instrument absolute displacement measurement model；
Fig. 6 is that a kind of three-coordinate measuring method based on binary channels point-diffraction interference of the present invention is corresponding to measurement target
Measurement sensitivity when various rotation positions on the direction x and y.
Wherein: 1, polarization laser, 2, first half wave plates, 3, polarization splitting prism, 4, quarter-wave plate
Reflecting mirror, 5, reflecting mirror, 6, phase shifter, the 7, second Amici prism, the 8, first fiber coupler, the 9, second fiber coupler, 10,
First sub-micron pore size optical fiber, the 11, second sub-micron pore size optical fiber, the 12, second half wave plate, 13, third Amici prism,
14, third polarization fiber coupler, the 15, the 4th polarization fiber coupler, 16, third sub-micron pore size optical fiber, the 17, the 4th sub-micro
Metre hole diameter optical fiber, 18, measuring probe, 19, detector, 20, computer.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing.
With reference to Fig. 1, a kind of a kind of implementation of the Three-coordinate measurer based on binary channels point-diffraction interference of the figure present invention
The schematic diagram of example, which includes: 1, first half wave plate 2, polarization splitting prism 3, a quarter of polarization laser
Wave plate 4, reflecting mirror 5, piezoelectric phase-shifter 6, the second Amici prism 7, the first fiber coupler 8, the second fiber coupler 9,
First sub-micron pore size optical fiber 10, the second sub-micron pore size optical fiber 11, the second half wave plate 12, third Amici prism 13,
Third fiber coupler 14, the 4th fiber coupler 15, third sub-micron pore size optical fiber 16, the 4th sub-micron pore size optical fiber 17,
Measuring probe 18, ccd detector 19, computer 20；Line with the arrow indicates that optical fiber, line indication circuit not with the arrow connect in figure
Wiring.Polarization laser 1 can use He-Ne polarization laser, the fast axis direction and x-axis folder at 45 ° of quarter-wave plate 4
Displacement resolution height and the high piezoelectric phase-shifter of frequency response can be used in angle, phase shifter 6, and reflecting mirror 5 and 6 end face of phase shifter connect
It connects, the pixel number of ccd detector 10 is 1920 × 1080, and corresponding horizontal and vertical Pixel Dimensions are all 5.5 μm.Measuring probe 18
It is connected with the first sub-micron pore size optical fiber SF1 10, the 4th sub-micron pore size optical fiber SF2 17, the second sub-micron pore size optical fiber SF3
11 and third sub-micron pore size optical fiber SF4 16.First sub-micron pore size optical fiber SF1 10 is outgoing with 18 interconnecting piece of measuring probe
End, the other end are connected with the first fiber coupler 8；4th sub-micron pore size optical fiber SF2 17 is with 18 interconnecting piece of measuring probe
End is penetrated, the other end is connected with the 4th fiber coupler 15；Second sub-micron pore size optical fiber SF3 11 and 18 interconnecting piece of measuring probe
For exit end, the other end is connected with the second fiber coupler 9；Third sub-micron pore size optical fiber SF4 16 is connect with measuring probe 18
Portion is exit end, and the other end is connected with third fiber coupler 14.
The laser that polarization laser 1 issues is adjusted first half wave plate 2 of light intensity, injects polarization spectro rib
Mirror 3 is divided into transmitted light p and reflected light s.Wherein a branch of reflected light s is reached on reflecting mirror 5 after quarter-wave plate 4, through anti-
It penetrates the reflected smooth s ' of mirror 5 and transmission is successively divided by quarter-wave plate 4, polarization splitting prism 3, the second Amici prism 7
Light pSF1 and reflected light sSF3, transmitted light pSF1 reach first fiber coupler 8 and are coupled to the first sub-micron pore size optical fiber 10
On, reflected light sSF3 reaches the second fiber coupler 9 and is coupled on the second sub-micron pore size optical fiber 11, and two optical fiber connectors generate
Point diffractive spherical wavefront is as detection wavefront W1；Another through Beam p passes through second half wave for being used to finely tune light intensity
Piece 12 reaches third Amici prism 13 and is divided into transmitted light pSF4 and reflected light sSF2, and reflected light sSF2 reaches the 4th fiber coupler
15 are coupled on the 4th sub-micron pore size optical fiber 17, and transmitted light pSF4 reaches third fiber coupler 14 and is coupled to third sub-micro
On metre hole diameter optical fiber 16, two-beam fibre end generates point diffractive spherical wavefront as reference wavefront W2.The data of ccd detector 19
Delivery outlet is connect with the data input port for calculating 20, and ccd detector 19 is acquired to spheric wave front W1's and spheric wave front W2 in real time
Interference pattern is transferred to computer 20.The data output of computer 20 is connect with the data input port of phase shifter 6, and computer 20 is controlled
Phase shifter 6 processed.6 end face mobile mirror 5 of phase shifter, the reflected light s ' needed.
It should be noted that the first sub-micron pore size optical fiber 10 mentioned herein and the second sub-micron pore size optical fiber 11 claim jointly
For first group of sub-micron pore size optical fiber；Third sub-micron pore size optical fiber 16 and the 4th sub-micron pore size optical fiber 17 are collectively referenced as second
Group sub-micron pore size optical fiber.
Illustrate another aspect of the present invention below.
With reference to Fig. 2, which is a kind of a kind of embodiment of three coordinate methods based on binary channels point-diffraction interference of the present invention
Flow diagram, include the following steps:
Step s11, the laser that polarization laser issues enters polarization spectro rib border and is divided into transmitted light and reflected light, described
Transmitted light is coupled into first group of sub-micron pore size optical fiber by laser couplers by third Amici prism；The reflected light
After the reflection of reflecting mirror, the second Amici prism, second group of sub-micron pore size optical fiber is coupled by laser couplers；
When specific implementation, polarization He-Ne laser 1 issues the laser that light wavelength lambda is 632.8nm, by first two points
One of wave plate 2 obtain the linearly polarized light in different polarization direction, be divided into transmitted light p and reflected light using polarization splitting prism 3
s.Wherein a branch of reflected light s is reached after the quarter-wave plate 4 of a fast axis direction and x-axis angle at 45 ° and is mounted on pressure
On reflecting mirror 5 on electric phase shifter 6, through the reflected smooth s ' of reflecting mirror 5, second by saturating again after quarter-wave plate 4
It crosses the second Amici prism 7 of arrival of polarization splitting prism 3 and is divided into transmitted light pSF1 and reflected light sSF3, transmitted light pSF1 reaches first
A fiber coupler 8 is coupled on first sub-micron pore size optical fiber 10, and reflected light sSF3 reaches second 9 coupling of fiber coupler
It closes onto second sub-micron pore size optical fiber 11, two optical fiber connectors generate point diffractive spherical wavefront as detection wavefront W1；Separately
Through Beam p reaches third Amici prism 13 by second half wave plate 12 and is divided into transmitted light pSF4 and reflected light
SSF2, reflected light sSF2 reach third fiber coupler 14 and are coupled on third root sub-micron pore size optical fiber 16, transmitted light pSF4
It reaches the 4th fiber coupler 15 to be coupled on the 4th sub-micron pore size optical fiber 15, two optical fiber connectors generate point diffractive spherical wave
It is preceding to be used as reference wavefront W2.
Step s12 is alternately opened in the optical fiber and second group of Asia metre hole diameter optical fiber in first group of Asia metre hole diameter optical fiber
An optical fiber, generate the emergent light for two optical fiber opened in measuring probe and represent the point of lateral shift or vertical misalignment and spread out
Spheric wave front is penetrated, and then generates interference fringe in detector plane；
When specific implementation, optical fiber is first opened to G1 (SF1 and SF2), closes optical fiber to G2 (SF3 and SF4), two sub-micron pores
Diameter optical fiber generates lateral shift on measuring probe 18 respectively, is formed in real time in 19 plane of ccd detector and measurement to be measured is visited
The corresponding two o'clock diffractive spherical wavefront interference fringe of first 18 3 coordinate value.
Step s13, computer control piezoelectricity phase shifter repeatedly moves reflecting mirror, to change two o'clock diffraction ball wavefront
Between optical path difference；When specific implementation, repeatedly movement is carried out to reflecting mirror 5 using the control piezoelectricity phase shifter 6 of computer 20 to change
Become the optical path difference between two o'clock diffractive spherical wavefront, and acquisition lateral shift corresponds to interference pattern in real time using ccd detector 19.It closes
Black out fibre opens optical fiber to G2 (SF3 and SF4), repeats aforesaid operations, it is corresponding dry to obtain vertical misalignment to G1 (SF1 and SF2)
Relate to figure.
Step s14, detector acquires multiple corresponding interference fringes in real time, and the interference fringe image of the acquisition is sent out
It send to computer.
Step s15, the two o'clock diffractive spherical wavefront interference fringe that computer acquires detector in real time utilize five step phase shifts
Algorithm demodulates the phase distribution of arbitrary point on detector plane in interference field；And it solves to obtain in pairs using intelligent optimization algorithm
The optimal solution of the three-dimensional coordinate of sub-micron pore size optical fiber point-diffraction exit end.It is lateral shift and vertical misalignment with reference to Fig. 3 and Fig. 4
The phase distribution figure that corresponding interference pattern demodulates, as shown, the direction x phase change is greater than the direction y, the side y when longitudinal when lateral
It is greater than the direction x to phase change.
As shown in figure 5, the spherical coordinates of measuring probe and the rectangular coordinate system mathematical model of system are established, wherein (a) is indicated
Space is measured, (b) indicates auxiliary spherical surface coordinate system；The center of pixel coverage is as selected calculating point region using on detector plane
Centre coordinate, choose at least six pixel coordinate and its corresponding phase establish overdetermined nonlinear equation, then utilize
The three-dimensional coordinate that particle swarm algorithm rapid solving obtains two sub-micron pore size optical fiber point-diffraction exit end center O ' is respectively
(5.056,5.717,115.056) mm and (5.486,5.072,114.768) mm.
To only one optical fiber time synchronization system model analysis, the phase of the upper arbitrary point P of CCDFor
As shown in Fig. 5 (b), CCD plane is xoy plane, and central point O is the origin of rectangular coordinate system.R1, r2 are respectively
Distance of the P point to two fiber exit end faces.As shown in Fig. 5 (a), SF1 and SF2 on probe are two diffraction source (sub-micros
The exit end of metre hole diameter optical fiber), spacing distance is d between them.With the midpoint O ' (x of SF1 and SF20, y0, z0) it is that origin is established
The auxiliary spherical coordinate system of probe, wherein θ and σ is respectively azimuth and polar angle.
It is corresponding with phaseIn the partial derivative (DS of the phase difference in the direction x and yx, DSy) be
Analysis obtains Fig. 6 and shows when corresponding to measurement target around various rotation positions (polar angle) of z-axis on x and the direction y
Measurement sensitivity, wherein azimuth be 90 °.As shown in Fig. 2, when polar angle is 0 °, the survey of the direction x (perpendicular to edge direction)
Measure sensitivity DSxMuch larger than the measurement sensitivity DS of the direction y (being parallel to edge direction)y；And DSxAnd DSyAs polar angle increases
It respectively reduces and increases.The difference of the measurement sensitivity in quadrature transverse direction may cause the measurement accuracy in certain transverse directions
It is low.
It is obtained by analysis, chooses the x coordinate at corresponding sub-micron pore size fiber exit end when only optical fiber connects G1, only
The y-coordinate at corresponding sub-micron pore size fiber exit end when optical fiber connects G2, corresponding Asia when optical fiber is to G1 and G2
Three-dimensional coordinate of the average value of the z coordinate at micron pore size fiber exit end as measuring probe, finally synthesize (5.056,5.072,
114.912) mm realizes the high-acruracy survey of the three-dimensional coordinate of measured target.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (6)
1. a kind of Three-coordinate measurer based on binary channels point-diffraction interference, which is characterized in that including polarization laser, first
A half wave plate, polarization splitting prism, quarter-wave plate, reflecting mirror, phase shifter, the second Amici prism, the first optical fiber
Coupler, the second fiber coupler, the first sub-micron pore size optical fiber, the second sub-micron pore size optical fiber, the second half wave plate,
Third Amici prism, third fiber coupler, the 4th fiber coupler, third sub-micron pore size optical fiber, the 4th sub-micron pore size
Optical fiber, measuring probe, ccd detector, computer, the phase shifter are piezoelectric phase-shifter；
Measuring probe is connected with the first sub-micron pore size optical fiber SF1, the 4th sub-micron pore size optical fiber SF2, the second sub-micron pore size
Optical fiber SF3 and third sub-micron pore size optical fiber SF4, the first sub-micron pore size optical fiber SF1 and measuring probe interconnecting piece are exit end,
The other end is connected with the first fiber coupler；4th sub-micron pore size optical fiber SF2 and measuring probe interconnecting piece are exit end, another
End is connected with the 4th fiber coupler；Second sub-micron pore size optical fiber SF3 and measuring probe interconnecting piece are exit end, the other end
It is connected with the second fiber coupler；Third sub-micron pore size optical fiber SF4 and measuring probe interconnecting piece are exit end, other end connection
There is third fiber coupler；
The laser that polarization laser issues is adjusted first half wave plate of light intensity, injects polarization splitting prism and is divided into
Transmitted light p and reflected light s is reflected back wherein a branch of reflected light s is reached on reflecting mirror after quarter-wave plate through reflecting mirror
The light s ' come is successively divided into transmitted light pSF1 and reflected light by quarter-wave plate, polarization splitting prism, the second Amici prism
SSF3, transmitted light pSF1 reach first fiber coupler and are coupled on the first sub-micron pore size optical fiber, and reflected light sSF3 is reached
Second fiber coupler is coupled on the second sub-micron pore size optical fiber, and two optical fiber connectors generate point diffractive spherical wavefront as inspection
Survey wavefront W1；Another through Beam p passes through second half wave plate for being used to finely tune light intensity and reaches third Amici prism point
At transmitted light pSF4 and reflected light sSF2, reflected light sSF2 reaches the 4th fiber coupler and is coupled to the 4th sub-micron pore size optical fiber
On, transmitted light pSF4 reaches third fiber coupler and is coupled on third sub-micron pore size optical fiber, and two-beam fibre end generates
Point diffractive spherical wavefront is connected as reference wavefront W2, the data output of CCD detector and the data input port of computer,
The interference pattern that ccd detector is acquired to spheric wave front W1 and spheric wave front W2 in real time is transferred to computer, and the data of computer are defeated
Outlet is connect with the data input port of phase shifter, and computer controls phase shifter, and phase shifter end face mobile mirror is needed
Reflected light s '.
2. the Three-coordinate measurer based on binary channels point-diffraction interference described in any one of according to claim 1, feature
It is, the fast axis direction and X-axis of the quarter-wave plate are in angle of 45 degrees.
3. the Three-coordinate measurer based on binary channels point-diffraction interference according to any one of claim 2, feature
It is, the pixel of the detector is 1920 × 1080, and corresponding horizontal and vertical Pixel Dimensions are all 5.5 μm.
4. a kind of three-coordinate measuring method based on binary channels point-diffraction interference, for described in claim 1 a kind of based on double
The Three-coordinate measurer of channel point-diffraction interference, which comprises the steps of:
The laser that polarization laser issues enters polarization spectro rib border and is divided into transmitted light and reflected light, and the transmitted light is by the
Three polarizing prisms are coupled into first group of sub-micron pore size optical fiber by laser couplers；The reflected light passes through reflecting mirror
Reflection, after the second Amici prism, be coupled into second group of sub-micron pore size optical fiber by laser couplers；
Alternately open a light in the optical fiber and second group of sub-micron pore size optical fiber in first group of sub-micron pore size optical fiber
Fibre makes the emergent light for two optical fiber opened generate the point diffractive spherical wave for representing lateral shift or vertical misalignment in measuring probe
Before, and then interference fringe is generated in detector plane.
5. the three-coordinate measuring method according to claim 4 based on binary channels point-diffraction interference, which is characterized in that also wrap
It includes:
Computer control piezoelectricity phase shifter repeatedly moves reflecting mirror, to change the light path between two o'clock diffraction ball wavefront
Difference；
Detector acquires multiple corresponding interference fringes in real time, and the interference fringe image of the acquisition is sent to computer.
6. the three-coordinate measuring method according to claim 5 based on binary channels point-diffraction interference, which is characterized in that also wrap
It includes:
Computer demodulates two o'clock diffractive spherical wavefront interference fringe that detector acquires in real time using five step Phase-shifting algorithms dry
Relate to the phase distribution of arbitrary point on detector plane in field；
Computer solves to obtain the three-dimensional coordinate of pairs of sub-micron pore size optical fiber point-diffraction exit end using intelligent optimization algorithm
Optimal solution.
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| CN108253897B (en) * | 2017-12-29 | 2020-03-03 | 浙江省计量科学研究院 | Large-range high-precision point diffraction interference three-dimensional coordinate measuring method |
| CN109341523B (en) * | 2018-10-08 | 2020-08-14 | 中国计量大学 | A method for leveling the probe end face of a point diffraction interference three-coordinate measuring device |
| CN110146154B (en) * | 2019-05-05 | 2021-04-16 | 中国计量大学 | Point diffraction interference device and method for object vibration measurement |
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