CN103592979B - Wash liquid stream amount control system and control method - Google Patents
Wash liquid stream amount control system and control method Download PDFInfo
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- CN103592979B CN103592979B CN201210290586.0A CN201210290586A CN103592979B CN 103592979 B CN103592979 B CN 103592979B CN 201210290586 A CN201210290586 A CN 201210290586A CN 103592979 B CN103592979 B CN 103592979B
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Abstract
Present invention is disclosed a kind of wash liquid stream amount control systems, including：The control valve of wash liquid stream warp；Pressure sensor measures the pressure and output pressure value of the cleaning solution for flowing through control valve；Controller, receives the pressure value of pressure sensor output and by the pressure value compared with target pressure value, and current signal is concurrently sent according to comparison result generation, if pressure value is more than target pressure value, smaller current signal is sent, if the pressure value is less than target pressure value, sends larger current signal；I/P converters, it receives the current signal of controller output and there is the compressed air of relevant pressure to control valve conveying, when receiving smaller current signal, I/P converters reduce the pressure for being conveyed to control valve compressed air, when receiving larger current signal, the increase of I/P converters is conveyed to the pressure of control valve compressed air；Measure the flow switch of the flow velocity of cleaning solution；And adjust the needle-valve of the flow velocity of cleaning solution.The invention also discloses wash liquid stream amount control methods.
Description
Technical field
The present invention relates to process for fabrication of semiconductor device more particularly to a kind of wash liquid stream amount control system and controlling parties
Method, the control system and control method being capable of the accurate flows with the control cleaning solution stablized.
Background technology
In process for fabrication of semiconductor device, wafer is highly susceptible to pollute, and micropollutants are such as attached to crystal column surface
Particle, organic residue, metal impurities and wafer surface oxidation object etc. very big damage can be all caused to the performance of semiconductor devices
Evil, and it is smaller and smaller with the characteristic size of semiconductor devices, and hazards of pollutants will be increasing, almost each step
Technique is likely to introduce pollution.Therefore, in order to obtain the semiconductor devices of high quality, it is very necessary to carry out cleaning to wafer
With key.With the fast development of semiconductor technology, currently, there are many cleaning methods, wherein wet-cleaning is a kind of wide
The general cleaning method applied in crystal column surface cleaning.Wet-cleaning usually utilize cleaning solution such as ultra-pure water or it is different at
The chemicals divided comes cleaning wafer surface.Cleaning solution is generally provided in cleaning chamber, is cleaned to wafer in cleaning chamber.
In order to ensure cleaning performance and improve the quality of semiconductor devices, the flow supplied to the cleaning solution in cleaning chamber needs
It accurately and consistently to control, that is to say, that cleaning solution will keep stable flow in transmission process.Traditional wash liquid stream
Amount control system includes several control valves.Under normal circumstances, each cleaning solution transfer passage for being connected to cleaning chamber has one
A control valve controls the flow of the channel cleaning liquid inside.Although being cleaned in each channel of control that the system can be accurate and stable
The flow of liquid, but the control valve of respective numbers is just needed when the roads You Ji cleaning solution transfer passage, due to the price of control valve
Costly, therefore lead to whole system the production cost is very high, meanwhile, the volume of control valve is also larger, needs to occupy prodigious
The inconvenience of the design and installation band of whole system is given in space.
Therefore, under the premise of ensureing that cleaning solution supply is stably and controllable, simplify system design and reduction system cost will
It is a quantum jump in Semiconductor Cleaning Technology field.
Invention content
The object of the present invention is to provide wash liquid stream amount control systems a kind of at low cost and simple in structure.
To achieve the above object, a kind of wash liquid stream amount control system provided by the invention includes：Control valve, wash liquid stream
Through control valve；Pressure sensor measures the pressure and output pressure value of the cleaning solution for flowing through control valve；Controller receives pressure
The pressure value of sensor output and by the pressure value with target pressure value compared with, concurrent power transmission stream letter is generated according to comparison result
Number, if the pressure value is more than target pressure value, controller sends a smaller current signal, if the pressure value is less than goal pressure
Value, controller send a larger current signal；I/P converters, the current signal of reception controller output are simultaneously defeated to control valve
The compressed air with relevant pressure is sent, when I/P converters receive the smaller current signal of controller output, I/P converters
The pressure for being conveyed to control valve compressed air is reduced, when I/P converters receive the larger current signal of controller output, I/P
Converter increase is conveyed to the pressure of control valve compressed air；Flow switch measures the flow velocity for the cleaning solution for flowing into cleaning chamber；And
Needle-valve adjusts the flow velocity for the cleaning solution for flowing into cleaning chamber to target flow rate.
To achieve the above object, another wash liquid stream amount control system provided by the invention includes：Control valve, cleaning solution
Flow through control valve；Pressure sensor measures the pressure and output pressure value of the cleaning solution for flowing through control valve；Controller receives pressure
The pressure value of force snesor output and by the pressure value with target pressure value compared with, concurrent power transmission pressure is generated according to comparison result and is believed
Number, if the pressure value is more than target pressure value, controller sends a smaller voltage signal, if the pressure value is less than goal pressure
Value, controller send a larger voltage signal；U/P converters, the voltage signal of reception controller output are simultaneously defeated to control valve
The compressed air with relevant pressure is sent, when U/P converters receive the smaller voltage signal of controller output, U/P converters
The pressure for being conveyed to control valve compressed air is reduced, when U/P converters receive the larger voltage signal of controller output, U/P
Converter increase is conveyed to the pressure of control valve compressed air；Flow switch measures the flow velocity for the cleaning solution for flowing into cleaning chamber；And
Needle-valve adjusts the flow velocity for the cleaning solution for flowing into cleaning chamber to target flow rate.
It is yet another object of the invention to provide a kind of wash liquid stream amount control methods, include the following steps：
Control valve, pressure sensor, I/P converters and controller are provided and constitute PID closed-loop control systems；
Pressure sensor measurement flows through the pressure and output pressure value of the cleaning solution of control valve；
Controller receives the pressure value of pressure sensor output and by the pressure value compared with target pressure value, according to comparing
As a result it generates and concurrently send current signal, if the pressure value is more than target pressure value, controller sends a smaller current signal, if
The pressure value is less than target pressure value, and controller sends a larger current signal；
I/P converters receive the current signal of controller output and have the compression of relevant pressure empty to control valve conveying
Gas, when I/P converters receive the smaller current signal of controller output, it is empty that the reduction of I/P converters is conveyed to control valve compression
The pressure of gas, when I/P converters receive the larger current signal of controller output, the increase of I/P converters is conveyed to control valve
The pressure of compressed air；
Measure the flow velocity for the cleaning solution for flowing into cleaning chamber；
The flow velocity for the cleaning solution for flowing into cleaning chamber is adjusted to target flow rate.
It is yet another object of the invention to provide another wash liquid stream amount control methods, include the following steps：
Control valve, pressure sensor, U/P converters and controller are provided and constitute PID closed-loop control systems；
Pressure sensor measurement flows through the pressure and output pressure value of the cleaning solution of control valve；
Controller receives the pressure value of pressure sensor output and by the pressure value compared with target pressure value, according to comparing
As a result it generates and concurrently send voltage signal, if the pressure value is more than target pressure value, controller sends a smaller voltage signal, if
The pressure value is less than target pressure value, and controller sends a larger voltage signal；
U/P converters receive the voltage signal of controller output and have the compression of relevant pressure empty to control valve conveying
Gas, when U/P converters receive the smaller voltage signal of controller output, it is empty that the reduction of U/P converters is conveyed to control valve compression
The pressure of gas, when U/P converters receive the larger voltage signal of controller output, the increase of U/P converters is conveyed to control valve
The pressure of compressed air；
Measure the flow velocity for the cleaning solution for flowing into cleaning chamber；
The flow velocity for the cleaning solution for flowing into cleaning chamber is adjusted to target flow rate.
In conclusion wash liquid stream amount control system of the present invention and control method are merely with a control valve, a pressure
Sensor, an I/P converter or U/P converters and a controller constitute clear in PID closed-loop control system adjusting control valves
The pressure of washing lotion.The cleaning solution for flowing through control valve and pressure sensor is divided into several branches, and each branch utilizes a needle-valve
And a flow switch adjusts the flow velocity of cleaning solution in the branch.To have, there are three the wash liquid stream amount control systems of branch to be
Example, the system utilize a control valve, a pressure sensor, an I/P converter or U/P converters, controller, three
A needle-valve and three flow switches supply accurate and regime flow cleaning solution to cleaning chamber.And traditional cleaning solution flow control
System need to use three control valves, three pressure sensors, three I/P converters or three U/P converters, three controllers and
Three flowmeters.In contrast, wash liquid stream amount control system of the present invention can save two control valves, two pressure sensings
Device, two I/P converters or U/P converters, two controllers, and the flow switch that the present invention uses are also than conventionally employed
Flowmeter is cheap.Therefore, cost of the invention can substantially reduce, and the configuration of the present invention is simple.
Description of the drawings
Fig. 1 is the block diagram of the first embodiment of wash liquid stream amount control system of the present invention.
Fig. 2 is the block diagram of the second embodiment of wash liquid stream amount control system of the present invention.
Fig. 3 is the flow chart of the first embodiment of wash liquid stream amount control method of the present invention.
Fig. 4 is the flow chart of the second embodiment of wash liquid stream amount control method of the present invention.
Specific implementation mode
For technology contents, construction feature, institute's reached purpose and effect that the present invention will be described in detail, below in conjunction with embodiment
And schema is coordinated to be described in detail.
Referring to Fig. 1, showing the first embodiment of wash liquid stream amount control system of the present invention.Cleaning solution flow of the present invention
Control system includes a control valve 10, a pressure sensor 20, a controller 40 and an I/P converters 30.Control valve 10, pressure
Sensor 20, controller 40 and I/P converters 30 constitute a PID closed-loop control systems.The measurement of pressure sensor 20 flows through control
The pressure of the cleaning solution of valve 10 simultaneously exports an electric pressure signal.Controller 40 receives the electric pressure signal that pressure sensor 20 exports
Afterwards, it generates and sends a corresponding current signal to I/P converters 30.I/P converters 30 receive the electric current that controller 40 exports
To compressed air of the conveying of control valve 10 with relevant pressure after signal, to the pressure of cleaning solution in adjusting control valve 10.It is logical
The automatic adjustment for crossing PID closed-loop control systems, flowing through the pressure of the cleaning solution of control valve 10 and pressure sensor 20 can keep
In a setting value.
Referring to Fig. 2, showing the second embodiment of wash liquid stream amount control system of the present invention.Cleaning solution flow of the present invention
Control system includes a control valve 10, a pressure sensor 20, a controller 40 and a U/P converters 30'.Control valve 10, pressure
Force snesor 20, controller 40 and U/P converters 30' constitute a PID closed-loop control systems.The measurement of pressure sensor 20 flows through control
The pressure of the cleaning solution of valve 10 processed simultaneously exports an electric pressure signal.Controller 40 receives the pressure telecommunications that pressure sensor 20 exports
After number, generates and send a corresponding voltage signal and give U/P converters 30'.U/P converters 30' receives what controller 40 exported
To compressed air of the conveying of control valve 10 with relevant pressure after voltage signal, to the pressure of cleaning solution in adjusting control valve 10
Power.By the automatic adjustment of PID closed-loop control systems, the pressure for flowing through the cleaning solution of control valve 10 and pressure sensor 20 can
It is maintained at a setting value.
Please continue to refer to Fig. 1 and Fig. 2.The cleaning solution of control valve 10 and pressure sensor 20 is flowed through according to different process demand
Several branches can be divided into, for example, in the first embodiment and the second embodiment, flowing through control valve 10 and pressure sensor 20
Cleaning solution be divided into three branches, each branch includes that a needle-valve 50, a flow switch 60 and one clean chamber 70.Each point
The wash liquid stream of branch flows into cleaning chamber 70 after needle-valve 50 and flow switch 60 and is used for cleaning wafer.Flow in each branch is opened
Close 60 flow velocitys for measuring cleaning solution in the branch.Needle-valve 50 adjusts cleaning solution in the branch according to the flow velocity that flow switch 60 measures
Flow velocity reach the required flow velocity of technique until the flow velocity of cleaning solution in the branch, needle-valve 50 can be hand-operated valve.Preferably,
Each branch further includes a pressure valve 80 for allowing or preventing cleaning solution to flow into cleaning chamber 70.
According to the first embodiment of wash liquid stream amount control system of the present invention, cleaning solution flow of the present invention is briefly described below
The operation principle of control system.Pressure sensor 20 measures the pressure for flowing through 10 cleaning solution of control valve, and the pressure that will be measured in real time
Force value is transferred to controller 40.Controller 40 receives the pressure value and by the pressure value compared with a preset target pressure value,
If Pc>Pt, controller 40 send a smaller current signal to I/P converters 30, and it is defeated that I/P converters 30 receive controller 40
The pressure for being conveyed to 10 compressed air of control valve is reduced after the smaller current signal gone out；If Pc<Pt, controller 40 send one
Larger current signal increases to I/P converters 30, I/P converters 30 after receiving the larger current signal that controller 40 exports
It is conveyed to the pressure of 10 compressed air of control valve；If Pc=Pt, by the flow velocity of cleaning solution current in each branch and a mesh
Mark flow velocity is compared, if Fc=Ft, is completed to the adjusting of cleaning fluid pressure and flow velocity, system will maintain stable state；
If Fc>Ft need to turn the needle-valve 50 in respective branch down, to turn the flow velocity of cleaning solution in respective branch down, at the same time,
The pressure of cleaning solution increases in control valve 10, so as to cause Pc>Pt, controller 40 send a smaller current signal and turn to I/P
Parallel operation 30, I/P converters 30 receive to reduce after the smaller current signal that controller 40 exports and are conveyed to control valve 10 and compress sky
The pressure of gas；If Fc<Ft need to tune up the needle-valve 50 in respective branch, to tune up the flow velocity of cleaning solution in respective branch,
At the same time, in control valve 10 cleaning solution pressure reduction, so as to cause Pc<Pt, controller 40 send a larger electric current letter
Number give I/P converters 30, I/P converters 30 receive controller 40 export larger current signal after increase be conveyed to control valve
The pressure of 10 compressed airs.Wherein, Pc is the pressure of the cleaning solution for flowing through control valve 10 measured in real time, and Pt is goal pressure
Value, Fc are the flow velocity of cleaning solution in the branch measured in real time, and Ft is the target flow rate of cleaning solution in branch.
According to the second embodiment of wash liquid stream amount control system of the present invention, cleaning solution flow of the present invention is briefly described below
The operation principle of control system.Pressure sensor 20 measures the pressure for flowing through 10 cleaning solution of control valve, and the pressure that will be measured in real time
Force value is transferred to controller 40.Controller 40 receives the pressure value and by the pressure value compared with a preset target pressure value,
If Pc>Pt, controller 40 send a smaller voltage signal to U/P converters 30 ', and U/P converters 30' receives controller 40
The pressure for being conveyed to 10 compressed air of control valve is reduced after the smaller voltage signal of output；If Pc<Pt, controller 40 are sent
One larger voltage signal is to U/P converters 30 ', after U/P converters 30' receives the larger voltage signal that controller 40 exports
Increase the pressure for being conveyed to 10 compressed air of control valve；If Pc=Pt, by the flow velocity of cleaning solution current in each branch with
One target flow rate is compared, if Fc=Ft, is completed to the adjusting of cleaning fluid pressure and flow velocity, and system will maintain to stablize
State；If Fc>Ft need to turn the needle-valve 50 in respective branch down, to turn the flow velocity of cleaning solution in respective branch down, with this
Meanwhile the pressure of cleaning solution increases in control valve 10, so as to cause Pc>Pt, controller 40 send a smaller voltage signal to
U/P converters 30 ', U/P converters 30', which receives to reduce after the smaller voltage signal that controller 40 exports, is conveyed to control valve 10
The pressure of compressed air；If Fc<Ft need to tune up the needle-valve 50 in respective branch, to tune up cleaning solution in respective branch
Flow velocity, at the same time, the pressure reduction of cleaning solution in control valve 10, so as to cause Pc<Pt, it is larger that controller 40 sends one
For voltage signal to U/P converters 30 ', U/P converters 30' increases conveying after receiving the larger voltage signal that controller 40 exports
To the pressure of 10 compressed air of control valve.Wherein, Pc is the pressure of the cleaning solution for flowing through control valve 10 measured in real time, and Pt is mesh
Pressure value is marked, Fc is the flow velocity of cleaning solution in the branch measured in real time, and Ft is the target flow rate of cleaning solution in branch.
Referring to Fig. 3, disclosing the first wash liquid stream amount control method of the invention, this method comprises the following steps：
S1, setting flow through the target pressure value of 10 cleaning solution of control valve, are generated simultaneously according to the goal pressure value controller 40
A current signal is sent to I/P converters 30；
S2, I/P converter 30 is conveyed to control valve 10 with certain pressure after receiving the current signal that controller 40 exports
Compressed air；
S3, under the driving of the compressed air with certain pressure, the wash liquid stream with certain pressure passes through control valve 10
Control valve 10；
S4, pressure sensor 20 measures the pressure for the cleaning solution for flowing through control valve 10 in real time, and the pressure value measured is passed
It is defeated by controller 40, controller 40 receives the pressure value and by the pressure value compared with target pressure value, if Pc=Pt, executes
S5 steps；If Pc>Pt, controller 40 send a smaller current signal to I/P converters 30, and I/P converters 30 receive control
The pressure for being conveyed to 10 compressed air of control valve is reduced after the smaller current signal that device 40 processed exports, and returns to S3 steps；Such as
Fruit Pc<Pt, controller 40 send a larger current signal to I/P converters 30, and I/P converters 30 receive controller 40 and export
Larger current signal after increase and be conveyed to the pressure of 10 compressed air of control valve, and return to S3 steps, wherein Pc is real-time
What is measured flows through the pressure of the cleaning solution of control valve 10, and Pt is target pressure value；
The flow velocity of cleaning solution current in each branch is compared by S5 with a target flow rate, if Fc=Ft,
The adjusting of cleaning fluid pressure and flow velocity is completed, system will maintain stable state；If Fc>Ft, by the needle-valve in respective branch
50 turn down, and to turn the flow velocity of cleaning solution in respective branch down, at the same time, the pressure of cleaning solution increases in control valve 10, from
And lead to Pc>Pt returns to S4 steps at this time；If Fc<Ft tunes up the needle-valve 50 in respective branch, to tune up corresponding point
The flow velocity of cleaning solution in branch, at the same time, the pressure reduction of cleaning solution in control valve 10, so as to cause Pc<Pt returns to S4 at this time
Step, wherein Fc is the flow velocity of cleaning solution in the branch measured in real time, and Ft is the target flow rate of cleaning solution in branch.
Referring to Fig. 4, disclosing second of wash liquid stream amount control method of the invention, this method comprises the following steps：
S10, setting flow through the target pressure value of 10 cleaning solution of control valve, are generated simultaneously according to the goal pressure value controller 40
It sends a voltage signal and gives U/P converters 30'；
S20, U/P converter 30' are conveyed to control valve 10 with a level pressure after receiving the voltage signal that controller 40 exports
The compressed air of power；
S30, under the driving of the compressed air with certain pressure, the wash liquid stream with certain pressure passes through control valve 10
Control valve 10；
S40, pressure sensor 20 measures the pressure for the cleaning solution for flowing through control valve 10 in real time, and the pressure value measured is passed
It is defeated by controller 40, controller 40 receives the pressure value and by the pressure value compared with target pressure value, if Pc=Pt, executes
S50 steps；If Pc>Pt, controller 40 send a smaller voltage signal to U/P converters 30 ', and U/P converters 30' is received
The pressure for being conveyed to 10 compressed air of control valve is reduced after the smaller voltage signal that controller 40 exports, and returns to S30 steps；
If Pc<Pt, controller 40 send a larger voltage signal to U/P converters 30 ', and U/P converters 30' receives controller 40
Increase the pressure for being conveyed to 10 compressed air of control valve after the larger voltage signal of output, and return to S30 steps, wherein Pc
For the pressure of the cleaning solution for flowing through control valve 10 measured in real time, Pt is target pressure value；
The flow velocity of cleaning solution current in each branch is compared by S50 with a target flow rate, if Fc=Ft,
The adjusting of cleaning fluid pressure and flow velocity is completed, system will maintain stable state；If Fc>Ft, by the needle-valve in respective branch
50 turn down, and to turn the flow velocity of cleaning solution in respective branch down, at the same time, the pressure of cleaning solution increases in control valve 10, from
And lead to Pc>Pt returns to S40 steps at this time；If Fc<Ft tunes up the needle-valve 50 in respective branch, to tune up corresponding point
The flow velocity of cleaning solution in branch, at the same time, the pressure reduction of cleaning solution in control valve 10, so as to cause Pc<Pt is returned at this time
S40 steps, wherein Fc is the flow velocity of cleaning solution in the branch measured in real time, and Ft is the target flow rate of cleaning solution in branch.
It can be seen from the above, wash liquid stream amount control system of the present invention and control method by PID closed-loop control systems from
It is dynamic to adjust so as to supply accurate and regime flow cleaning solution to cleaning chamber 70.Even if the cleaning solution supply of upstream is unstable
It is fixed, under the automatic adjustment of PID closed-loop control systems, remain able to supply accurate and regime flow cleaning to cleaning chamber 70
Liquid.In addition, the pressure valve 80 in one or several branches opens or closes, under the automatic adjustment of PID closed-loop control systems,
The flow velocity of cleaning solution in other branches is unaffected.
Wash liquid stream amount control system of the present invention and control method are merely with 10, pressure sensors of a control valve
20, an I/P converter 30 or U/P converters 30' and a controller 40 constitute a PI D closed-loop control system adjusting controls
The pressure of cleaning solution in valve 10.Each branch in system is adjusted using a needle-valve 50 and a flow switch 60 in the branch
The flow velocity of cleaning solution.For having the wash liquid stream amount control system there are three branch, which utilizes a control valve 10, one
20, I/P converters 30 of a pressure sensor or U/P converters 30', 40, three needle-valves 50 of a controller and three streams
Amount switch 60 supplies accurate and regime flow cleaning solution to cleaning chamber 70.And traditional wash liquid stream amount control system needs to use
Three I/P converters 30 of pressure sensor 20, three of control valve 10, three or three U/P converters 30', three controllers 40
And three flowmeters.In contrast, wash liquid stream amount control system of the present invention can save two control valves, 10, two pressure and pass
20, two I/P converters 30 of sensor or U/P converters 30', two controllers 40, and the flow switch 60 that the present invention uses
Also cheaper than conventionally employed flowmeter.Therefore, cost of the invention can substantially reduce, and the configuration of the present invention is simple.
In conclusion wash liquid stream amount control system of the present invention and control method pass through the above embodiment and correlative type
Illustrate, oneself is specific, full and accurate to disclose the relevant technologies, and those skilled in the art is allow to implement according to this.And it is described above real
Example is applied to be used only to illustrate the present invention, rather than for limiting the present invention, interest field of the invention should be by the power of the present invention
Profit requires to define.Replacement of change or equivalence element as component number described herein etc. still should all belong to the present invention's
Interest field.
Claims (12)
1. a kind of wash liquid stream amount control system, including：
One control valve, wash liquid stream is through the control valve；
One pressure sensor measures the pressure and output pressure value of the cleaning solution for flowing through the control valve；
One controller receives the pressure value of the pressure sensor output and by the pressure value compared with target pressure value, root
Current signal is concurrently sent according to comparison result generation, if the pressure value is more than target pressure value, it is smaller that the controller sends one
Current signal, if the pressure value is less than target pressure value, the controller sends a larger current signal；
One I/P converter receives the current signal of the controller output and has relevant pressure to control valve conveying
Compressed air, when the I/P converters receive the smaller current signal of controller output, the I/P converters drop
The low pressure for being conveyed to the control valve compressed air, the I/P converters receive the larger electric current of the controller output
When signal, the I/P converters increase is conveyed to the pressure of the control valve compressed air；
The cleaning solution for flowing through the control valve and the pressure sensor is divided into several branches, and each branch's tool is opened there are one flow
Pass, a needle-valve and a cleaning chamber；
The flow switch measures the flow velocity for the cleaning solution for flowing into cleaning chamber；
The needle-valve adjusts the flow velocity of the cleaning solution for flowing into cleaning chamber to target flow rate；
The control valve, pressure sensor, I/P converters and controller constitute PID closed-loop control systems.
2. wash liquid stream amount control system according to claim 1, it is characterised in that：If what the pressure sensor measured
Flow through the cleaning solution of the control valve pressure be equal to target pressure value, then by the flow velocity of cleaning solution current in each branch with
One target flow rate is compared, if the flow velocity of current cleaning solution is equal with target flow rate, to cleaning fluid pressure and stream
The adjusting of speed is completed.
3. wash liquid stream amount control system according to claim 1, it is characterised in that：If what the pressure sensor measured
Flow through the cleaning solution of the control valve pressure be equal to target pressure value, then by the flow velocity of cleaning solution current in each branch with
One target flow rate is compared, if the flow velocity of current cleaning solution is more than target flow rate, the needle-valve in respective branch is turned down,
To turn the flow velocity of cleaning solution in respective branch down, at the same time, the pressure of cleaning solution increases in the control valve, so as to cause
The pressure value that the pressure sensor measures is more than target pressure value, and the controller sends a smaller current signal to described
I/P converters, the I/P converters, which receive to reduce after the smaller current signal of controller output, is conveyed to the control
The pressure of valve compressed air.
4. wash liquid stream amount control system according to claim 1, it is characterised in that：If what the pressure sensor measured
Flow through the cleaning solution of the control valve pressure be equal to target pressure value, then by the flow velocity of cleaning solution current in each branch with
One target flow rate is compared, if the flow velocity of current cleaning solution is less than target flow rate, the needle-valve in respective branch is tuned up,
To tune up the flow velocity of cleaning solution in respective branch, at the same time, the pressure reduction of cleaning solution in the control valve, so as to cause
The pressure value that the pressure sensor measures is less than target pressure value, and the controller sends a larger current signal to described
I/P converters, the I/P converters, which receive to increase after the larger current signal of controller output, is conveyed to the control
The pressure of valve compressed air.
5. wash liquid stream amount control system according to claim 1, it is characterised in that：Each branch also further wraps
Pressure valve is included, for allowing or preventing cleaning solution to flow into the cleaning chamber.
6. a kind of wash liquid stream amount control system, including：
One control valve, wash liquid stream is through the control valve；
One pressure sensor measures the pressure and output pressure value of the cleaning solution for flowing through the control valve；
One controller receives the pressure value of the pressure sensor output and by the pressure value compared with target pressure value, root
Voltage signal is concurrently sent according to comparison result generation, if the pressure value is more than target pressure value, it is smaller that the controller sends one
Voltage signal, if the pressure value is less than target pressure value, the controller sends a larger voltage signal；
One U/P converter receives the voltage signal of the controller output and has relevant pressure to control valve conveying
Compressed air, when the U/P converters receive the smaller voltage signal of controller output, the U/P converters drop
The low pressure for being conveyed to the control valve compressed air, the U/P converters receive the larger voltage of the controller output
When signal, the U/P converters increase is conveyed to the pressure of the control valve compressed air；
The cleaning solution for flowing through the control valve and the pressure sensor is divided into several branches, and each branch's tool is opened there are one flow
Pass, a needle-valve and a cleaning chamber；
The flow switch measures the flow velocity for the cleaning solution for flowing into cleaning chamber；
The needle-valve adjusts the flow velocity of the cleaning solution for flowing into cleaning chamber to target flow rate；
The control valve, pressure sensor, U/P converters and controller constitute PID closed-loop control systems.
7. wash liquid stream amount control system according to claim 6, it is characterised in that：If what the pressure sensor measured
Flow through the cleaning solution of the control valve pressure be equal to target pressure value, then by the flow velocity of cleaning solution current in each branch with
One target flow rate is compared, if the flow velocity of current cleaning solution is equal with target flow rate, to cleaning fluid pressure and stream
The adjusting of speed is completed.
8. wash liquid stream amount control system according to claim 6, it is characterised in that：If what the pressure sensor measured
Flow through the cleaning solution of the control valve pressure be equal to target pressure value, then by the flow velocity of cleaning solution current in each branch with
One target flow rate is compared, if the flow velocity of current cleaning solution is more than target flow rate, the needle-valve in respective branch is turned down,
To turn the flow velocity of cleaning solution in respective branch down, at the same time, the pressure of cleaning solution increases in the control valve, so as to cause
The pressure value that the pressure sensor measures is more than target pressure value, and the controller sends a smaller voltage signal to described
U/P converters, the U/P converters, which receive to reduce after the smaller voltage signal of controller output, is conveyed to the control
The pressure of valve compressed air.
9. wash liquid stream amount control system according to claim 6, it is characterised in that：If what the pressure sensor measured
Flow through the cleaning solution of the control valve pressure be equal to target pressure value, then by the flow velocity of cleaning solution current in each branch with
One target flow rate is compared, if the flow velocity of current cleaning solution is less than target flow rate, the needle-valve in respective branch is tuned up,
To tune up the flow velocity of cleaning solution in respective branch, at the same time, the pressure reduction of cleaning solution in the control valve, so as to cause
The pressure value that the pressure sensor measures is less than target pressure value, and the controller sends a larger voltage signal to described
U/P converters, the U/P converters, which receive to increase after the larger voltage signal of controller output, is conveyed to the control
The pressure of valve compressed air.
10. wash liquid stream amount control system according to claim 6, it is characterised in that：Each branch is also further
Including pressure valve, for allowing or preventing cleaning solution to flow into the cleaning chamber.
11. a kind of wash liquid stream amount control method, includes the following steps：
One control valve, a pressure sensor, an I/P converter and a controller are provided and constitute PID closed-loop controls system
System；
The pressure and output pressure value of the cleaning solution of the control valve are flowed through using the pressure sensor measurement；
The pressure value of the pressure sensor output is received using the controller and by the pressure value compared with target pressure value,
Current signal is concurrently sent according to comparison result generation, if the pressure value is more than target pressure value, it is smaller that the controller sends one
Current signal, if the pressure value is less than target pressure value, the controller sends a larger current signal；
The current signal of the controller output is received using the I/P converters and there is corresponding pressure to control valve conveying
The compressed air of power, when the I/P converters receive the smaller current signal of the controller output, the I/P converters
The pressure for being conveyed to the control valve compressed air is reduced, the I/P converters receive the larger electricity of the controller output
When flowing signal, the I/P converters increase is conveyed to the pressure of the control valve compressed air；
The cleaning solution for flowing through the control valve and the pressure sensor is divided into several branches, there are one cleanings for each branch's tool
Chamber；
Measure the flow velocity for the cleaning solution for flowing into cleaning chamber；
The flow velocity for the cleaning solution for flowing into cleaning chamber is adjusted to target flow rate.
12. a kind of wash liquid stream amount control method, includes the following steps：
One control valve, a pressure sensor, a U/P converter and a controller are provided and constitute PID closed-loop controls system
System；
The pressure and output pressure value of the cleaning solution of the control valve are flowed through using the pressure sensor measurement；
The pressure value of the pressure sensor output is received using the controller and by the pressure value compared with target pressure value,
Voltage signal is concurrently sent according to comparison result generation, if the pressure value is more than target pressure value, it is smaller that the controller sends one
Voltage signal, if the pressure value is less than target pressure value, the controller sends a larger voltage signal；
The voltage signal of the controller output is received using the U/P converters and there is corresponding pressure to control valve conveying
The compressed air of power, when the U/P converters receive the smaller voltage signal of the controller output, the U/P converters
The pressure for being conveyed to the control valve compressed air is reduced, the U/P converters receive the larger electricity of the controller output
When pressing signal, the U/P converters increase is conveyed to the pressure of the control valve compressed air；
The cleaning solution for flowing through the control valve and the pressure sensor is divided into several branches, there are one cleanings for each branch's tool
Chamber；
Measure the flow velocity for the cleaning solution for flowing into cleaning chamber；
The flow velocity for the cleaning solution for flowing into cleaning chamber is adjusted to target flow rate.
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| CN106325335B (en) * | 2015-07-07 | 2018-05-11 | 上海寰球工程有限公司 | A kind of efficient multiphase detection device |
| US10192763B2 (en) * | 2015-10-05 | 2019-01-29 | Applied Materials, Inc. | Methodology for chamber performance matching for semiconductor equipment |
| CN105820949B (en) * | 2016-05-05 | 2018-05-18 | 苏州百源基因技术有限公司 | A kind of instrument for extracting nucleic acid and its injection device and injection device control method |
| CN108172533A (en) * | 2017-12-25 | 2018-06-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | control system, method and wafer cleaning device |
| CN108361553A (en) * | 2018-01-24 | 2018-08-03 | 上海华力微电子有限公司 | A kind of liquid-supplying system and wafer cleaning device |
| CN110531794A (en) * | 2019-08-30 | 2019-12-03 | 北京北方华创微电子装备有限公司 | Fluid pressure control device and method, cleaning solution supplying mechanism |
| CN112864044A (en) * | 2019-11-28 | 2021-05-28 | 上海新微技术研发中心有限公司 | Chemical circulation pipeline flow control system and control method thereof |
| CN112859936A (en) * | 2019-11-28 | 2021-05-28 | 上海新微技术研发中心有限公司 | Chemical circulation pipeline flow control system and control method thereof |
| CN111613526B (en) * | 2020-06-04 | 2021-05-11 | 无锡亚电智能装备有限公司 | Cleaning method based on wafer optimized arrangement |
| CN111940413A (en) * | 2020-08-31 | 2020-11-17 | 合肥市商巨智能装备有限公司 | Ultrasonic cleaning system and cleaning method |
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| GB2162770B (en) * | 1984-08-08 | 1987-10-07 | Bl Tech Ltd | A flow control system |
| US4705067A (en) * | 1986-05-13 | 1987-11-10 | Coffee Curtis L | Electric-to-pressure transducer |
| JP2001221201A (en) * | 2000-02-04 | 2001-08-17 | Yokogawa Electric Corp | Electric-pneumatic positioner |
| JP2003280745A (en) * | 2002-03-25 | 2003-10-02 | Stec Inc | Mass flow controller |
| CN100483286C (en) * | 2004-06-21 | 2009-04-29 | 日立金属株式会社 | Flow controller and its regulation method |
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