CN111940413A - Ultrasonic cleaning system and cleaning method - Google Patents
Ultrasonic cleaning system and cleaning method Download PDFInfo
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- CN111940413A CN111940413A CN202010892286.4A CN202010892286A CN111940413A CN 111940413 A CN111940413 A CN 111940413A CN 202010892286 A CN202010892286 A CN 202010892286A CN 111940413 A CN111940413 A CN 111940413A
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- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 60
- 238000004140 cleaning Methods 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 10
- 239000012535 impurity Substances 0.000 claims abstract description 11
- 238000005086 pumping Methods 0.000 claims description 28
- 238000007789 sealing Methods 0.000 claims description 23
- 239000011521 glass Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004973 liquid crystal related substance Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 abstract description 11
- 230000003749 cleanliness Effects 0.000 abstract description 2
- 238000010408 sweeping Methods 0.000 abstract description 2
- 239000002245 particle Substances 0.000 description 12
- 239000000428 dust Substances 0.000 description 7
- 239000007921 spray Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2205/00—Details of machines or methods for cleaning by the use of gas or air flow
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides an ultrasonic cleaning system and a cleaning method, wherein the ultrasonic cleaning system mainly comprises an air extraction unit and an ultrasonic cleaning head, the air extraction unit comprises an air amplifier and a first air source, the air amplifier is provided with a main air flow inlet, a main air flow outlet and a compressed air flow inlet, the compressed air flow inlet is connected with the first air source through a pipeline, the main air flow outlet is directly connected with the atmosphere, and the main air flow inlet is connected with the ultrasonic cleaning head through a pipeline. The invention has high sweeping and cleaning efficiency, can obviously improve the surface cleanliness of the object to be cleaned, and simultaneously avoids a large amount of impurity residues generated after the surface of the object to be cleaned is subjected to wet cleaning treatment.
Description
Technical Field
The invention relates to the technical field of liquid crystal panel cleaning equipment, in particular to an ultrasonic cleaning system and a cleaning method.
Background
At present, wet cleaning is mostly adopted in the liquid crystal industry, but the wet cleaning has a destructive effect on an adhesive layer after gluing, so that the rejection rate is increased; and after rubbing orientation, a large amount of dust particles are generated, and wet cleaning is a waste of resources because wet cleaning requires a large amount of consumables, such as: purified water, other chemicals, etc. When the lining material is sprayed in the production process, the glass plates which do not meet the requirements are easily caused due to improper spraying, and the unqualified glass plates are treated as waste products at present and are relatively wasted. In addition, wet cleaning only cleans the surface, and often does not achieve the ideal effect.
Disclosure of Invention
In order to solve the defects, the invention provides the ultrasonic cleaning system and the cleaning method, the system has high purging and cleaning efficiency, can obviously improve the surface cleanliness of the object to be cleaned, and simultaneously avoids a large amount of impurity residues generated after the surface of the object to be cleaned is subjected to wet cleaning treatment.
The ultrasonic cleaning system comprises an air pumping unit and an ultrasonic cleaning head, wherein the air pumping unit comprises an air amplifier and a first air source, the air amplifier is provided with a main air flow inlet, a main air flow outlet and a compressed air flow inlet, the compressed air flow inlet is connected with the first air source through a pipeline, the main air flow outlet is directly connected with the atmosphere, and the main air flow inlet is connected with the ultrasonic cleaning head through a pipeline.
In one embodiment of the invention, the air extraction unit further comprises a filter, and the main air flow outlet is connected to the filter through a pipeline.
In an embodiment of the invention, the air pumping unit further includes a first flow type electric proportional valve, a first digital gas flow switch, a first pressure type proportional valve and a first electromagnetic valve, which are sequentially disposed on a pipeline between the air amplifier and the first air source.
In an embodiment of the present invention, the ultrasonic cleaning system further includes a second gas source and a gas inlet unit, the second gas source is connected to the ultrasonic cleaning head through a pipeline, and the gas inlet unit includes a second flow type electric proportional valve, a second digital gas flow switch, a second pressure type proportional valve, and a second electromagnetic valve, which are sequentially disposed on the pipeline between the second gas source and the ultrasonic cleaning head.
In one embodiment of the present invention, the ultrasonic cleaning head includes: the sealing device comprises a shell, a sealing flange and a sealing sleeve, wherein one end of the shell is provided with the sealing flange, and a joint is arranged in the sealing flange; the pressure cavity is arranged in the shell, a plurality of ultrasonic generators are arranged in the pressure cavity, and the bottoms of the ultrasonic generators are provided with jet slits for jetting airflow to the surface of an object to be cleaned; the air inlet channel is arranged on the upper side of the pressure cavity, communicated with the ultrasonic generator and connected with the second electromagnetic valve through the joint; and the air pumping assembly is arranged on the side part of the pressure cavity, is connected with the main air flow inlet of the air amplifier through a pipeline, and is used for collecting impurities swept out of the surface of the object to be cleaned.
In one embodiment of the present invention, the ultrasonic generator is formed by arranging a plurality of groups of cavities.
In one embodiment of the invention, the spray slot is inclined by 10-20 °.
In an embodiment of the present invention, the ultrasonic generator includes a first horizontal cavity, a first vertical flow channel, a second horizontal cavity, a second vertical flow channel, and a third horizontal cavity, which are sequentially connected.
In one embodiment of the present invention, the longitudinal section of the first horizontal cavity is triangular;
in one embodiment of the present invention, the second horizontal cavity and the third horizontal cavity each have a longitudinal sectional shape selected from any one of a rectangle, a circle, an arc, and a trapezoid.
In an embodiment of the present invention, a plurality of ultrasonic generators are installed in the pressure chamber, and a sealing gasket is disposed between adjacent ultrasonic generators.
In one embodiment of the present invention, the air pumping assembly includes: at least one vacuum chamber provided at one side of the pressure chamber, the vacuum chambers being parallel to a bottom of the pressure chamber, respectively; the bottom of the vacuum cavity is provided with a suction slit respectively; and the air pumping channels are respectively arranged above the vacuum cavities and communicated with the vacuum cavities, and the air pumping channels are connected with the air pumping units through pipelines.
In summary, the present invention provides an ultrasonic cleaning system and a cleaning method, and the beneficial effects of the present invention are:
(1) the air amplifier is arranged in the air extraction unit, and a small amount of compressed air is used as a power source to drive surrounding air to flow to form high-pressure and high-speed airflow, so that the air extraction air consumption is greatly reduced, the structure is simple and easy to use, and the use cost of the cleaning equipment is reduced.
(2) The air inlet assembly is adopted to form air flow sheets like an air knife to blow the air flow sheets to the surface of the object to be cleaned, and then the air exhaust assembly is utilized to suck away granular impurities, so that poor treatment of the object to be cleaned caused by impurity residues is reduced. The ultrasonic cleaning device provided by the invention can be used for sweeping and cleaning the surface of an object by utilizing ultrasonic airflow without directly contacting with the object to be cleaned, so that the product is prevented from being damaged.
(3) The invention can remove dust particles with the diameter of 2 mu m or more with the removal rate of more than 99.8 percent.
(4) High-cost consumables such as high-purity gas or chemical solvent are not needed, an additional drying device is not needed, the economic cost is reduced, and the production period is shortened.
(5) The length of the ultrasonic cleaning head can be properly selected according to the size of the glass substrate to be cleaned, and the transverse cleaning performance of the workpiece is kept consistent along the ultrasonic waves distributed along the flow passage outlet streamline in a balanced manner.
(6) The performance of the ultrasonic generator is durable, so that the cleaning system only needs to be simply cleaned and maintained after long-term use.
Drawings
FIG. 1 is a schematic diagram of an ultrasonic cleaning system according to an embodiment of the present invention.
FIG. 2 is a schematic diagram of an ultrasonic cleaning system according to another embodiment of the present invention.
Fig. 3 is a schematic perspective view of an ultrasonic cleaning head according to an embodiment of the present invention.
FIG. 4 is a bottom view of an ultrasonic cleaning head according to an embodiment of the present invention.
Fig. 5 is a front view of the ultrasonic cleaning head of fig. 1 with the first sealing flange removed.
Figure 6 is a front view of figure 3 with the first sealing pad removed to provide an ultrasonic cleaning head.
Fig. 7 is a schematic perspective view of the pressure chamber in fig. 4.
Fig. 8 is a front view of the pressure chamber of fig. 4.
Fig. 9 is an explanatory diagram of the relationship between the width of the spray slit and the perpendicular distance of the spray slit from the surface of the object to be cleaned.
Fig. 10 is a surface view of an object to be cleaned under a microscope before cleaning.
Fig. 11 is a surface view of an object to be cleaned under a microscope after cleaning.
In the figure, 1, a compressed air supply system; 21. a first flow-type electric proportional valve; 22. a first digital gas flow switch; 23. a first pressure type proportional valve; 24. a first solenoid valve; 25. an air amplifier; 26. a first filter; 3. an ultrasonic cleaning head; 31. a housing; 311. a second sealing flange; 312. a first sealing flange; 3121. a joint; 313, 314 and connecting pipelines; 315. a first gasket; 32. an air intake assembly; 321. a pressure chamber; 322. an ultrasonic generator; 3221. a hollow shaft; 3222. a cavity mounting plate; 3223. a first horizontal cavity; 3224. a first vertical flow channel; 3225. a second horizontal cavity; 3226. a second vertical flow channel; 3227. a third horizontal cavity; 3228. a spray slit; 323. an air intake passage; 324. a second gasket; 325. a gasket; 33. an air extraction assembly; 331. a vacuum chamber; 332. an air extraction channel; 35. an object to be cleaned; 41. a second filter; 42. a second flow-type electric proportional valve; 43. a second digital gas flow switch; 44. a second pressure type proportional valve; 45. a second solenoid valve; 5. a first blower; 6. a second blower.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1, the present invention provides an ultrasonic cleaning system, which is applied to the liquid crystal panel industry and mainly uses ultrasonic airflow to purge and clean the surface of an object. It includes: the ultrasonic cleaning device comprises a first air source, an air pumping unit, an air inlet unit, a second air source and an ultrasonic cleaning head 3.
Wherein, the first air source is used for providing compressed air for the air extraction unit.
The air extraction unit comprises an air amplifier 25, a first filter 26, a first flow-type electric proportional valve 21, a first digital gas flow switch 22, a first pressure-type proportional valve 23 and a first solenoid valve 24.
In the present embodiment, the air amplifier 25 is provided with a main air inlet, a main air outlet, and a compressed air inlet, the main air outlet is connected to the first filter 26 via a pipe, and the main air inlet is connected to the ultrasonic cleaning head 3 via a pipe. The air amplifier 25 selected by the invention only uses a small amount of compressed air as a power source to drive the surrounding air to flow to form high-pressure and high-speed airflow, and the flow can reach 50 times of the flow of the compressed air. Only a small positive pressure is needed to be supplied to the air amplifier 25, so that a large negative pressure is formed in the vacuum cavity 331 of the ultrasonic cleaning head 3, the cleaning requirement is met, the gas consumption of the first gas source is greatly saved, and the cleaning cost is reduced.
Preferably, the first filter 26 is connected to the air amplifier 25, and the first filter 26 filters the gas to be exhausted from the air-extracting unit to avoid polluting the production line environment.
An air inlet pipeline of the first flow type electric proportional valve 21 is connected with a first air source, an air outlet pipeline of the first flow type electric proportional valve 21 is connected with an air inlet pipeline of the first digital type air flow switch 22, an air outlet pipeline of the first digital type air flow switch 22 is connected with an air inlet pipeline of the first pressure type proportional valve 23, an air outlet pipeline of the first pressure type proportional valve 23 is connected with an air inlet pipeline of the first electromagnetic valve 24, and an air outlet pipeline of the first electromagnetic valve 24 is connected with a compressed air flow inlet of the air amplifier 25.
In this way, the first flow rate type electro-proportional valve 21 and the first pressure type proportional valve 23 adjust the magnitude of the air flow. In this embodiment, the first flow type electro-proportional valve 21 is disposed upstream of the gas flow direction, so as to ensure that the dual requirements of gas flow and pressure are satisfied. The positions of the first flow rate type electric proportional valve 21 and the first pressure type proportional valve 23 affect the flow rate and pressure of the airflow and the stability of the airflow.
Moreover, the first electromagnetic valve 24 is used to open or close the gas flow pipeline, and the setting position of the first electromagnetic valve 24 can be adjusted according to actual conditions, for example, the electromagnetic valve can be arranged on the pipeline between the first gas source and the first flow rate type electric proportional valve 21, or can be arranged between the gas outlet pipeline of the first flow rate type electric proportional valve 21 and the first digital gas flow switch 22.
Further, the first digital gas flow switch 22 instructs the switches of the system according to the flow rate, and an upper limit or a lower limit needs to be set, when the flow rate reaches the limit value, the first digital gas flow switch 22 sends out a signal or an alarm, and the system will operate or stop.
Furthermore, the first gas source, the first filter 26, the first flow rate type electric proportional valve 21, the first digital gas flow rate switch 22, the first pressure type proportional valve 23 and the first electromagnetic valve 24 are electrically controlled by a PLC controller, so as to realize automatic operation.
The intake unit comprises a second filter 41, a second flow-type electric proportional valve 42, a second digital gas flow switch 43, a second pressure-type proportional valve 44 and a second solenoid valve 45. The air inlet unit provides air flow with appropriate flow and pressure to the ultrasonic cleaning head 3.
The air inlet pipe of the second filter 41 is connected with a second air source, the air outlet pipe of the second filter 41 is connected with the air inlet pipeline of the second flow type electric proportional valve 42, the air outlet pipeline of the second flow type electric proportional valve 42 is connected with the air inlet pipeline of the second digital air flow switch 43, the air outlet pipeline of the second digital air flow switch 43 is connected with the air inlet pipeline of the second pressure type proportional valve 44, the air outlet pipeline of the second pressure type proportional valve 44 is connected with the air inlet pipeline of the second electromagnetic valve 45, and the air outlet pipeline of the second electromagnetic valve 45 is connected with the ultrasonic cleaning head 3.
As such, the second air supply provides compressed air to the intake assembly 32. The second filter 41 filters the compressed air to prevent the air flow from contaminating the object to be cleaned again.
Further, the second flow type electric proportional valve 42 and the second pressure type proportional valve 44 are used for adjusting the magnitude of the intake airflow, and in this embodiment, the second flow type electric proportional valve 42 is disposed upstream of the gas flow direction, so as to ensure that the dual requirements of the gas flow and the pressure are met. The positions of the second flow-type electro-proportional valve 42 and the second pressure-type proportional valve 44 affect the flow rate and pressure of the airflow and the stability of the airflow.
Further, the second solenoid valve 45 is used for opening or closing the air flow line, and the setting position of the first solenoid valve 24 can be adjusted according to actual conditions.
Further, the second digital gas flow switch 43 instructs the switches of the system according to the flow rate, and an upper limit or a lower limit needs to be set, when the flow rate reaches the limit value, the second digital gas flow switch 43 sends out a signal or an alarm, and the system will operate or stop.
Further, the second gas source, the second filter 41, the second flow-type electric proportional valve 42, the second digital gas flow switch 43, the second pressure-type proportional valve 44 and the second electromagnetic valve 45 are electrically controlled by the PLC controller, respectively, so as to realize automatic operation.
In this embodiment, the first air source and the second air source are provided by a clean and dry compressed air supply system 1 of the production line according to a distribution ratio.
In addition, the first air source and the second air source can adopt blowers. In other embodiments, as shown in FIG. 2, the air intake line of the air extraction assembly 33 is connected to the first blower 5 and the air intake line of the air intake assembly 32 is connected to the second blower 6. The first air blower 5 and the second air blower 6 respectively provide air flows with suitable flow rate and pressure for the air suction assembly 33 and the air inlet assembly 32.
The ultrasonic cleaning head 3 will be described in detail below. As shown in fig. 3 to 6, the ultrasonic cleaning head 3 includes: a housing 31, an air inlet assembly 32 and an air outlet assembly. The ultrasonic cleaning head 3 adopts the air inlet assembly 32 to form air flow sheets like an air knife to blow the air flow sheets onto the surface of the object 35 to be cleaned, and then uses the air suction assembly 33 to suck away granular impurities, so that poor treatment of the object 35 to be cleaned caused by impurity residues is reduced.
Wherein, one end of the housing 31 is provided with a first sealing flange 312, the other end is provided with a second sealing flange 311, and a joint 3121 is arranged in the first sealing flange 312. First gaskets 315 are respectively disposed between the first sealing flange 312 and the housing 31, and between the second sealing flange 311 and the housing 31.
The following is a description of the intake assembly 32. The intake assembly 32 includes a pressure chamber 321 and an intake passage 323 disposed above and in communication with the pressure chamber 321. The pressure chamber 321 is disposed in the housing 31, and the ultrasonic generator 322 is installed in the pressure chamber 321, and the ultrasonic generator 322 is used for generating flow-induced oscillation of the gas flow ejected from the gas inlet channel 323.
Further, the ultrasonic generator 322 is formed by several sets of cavities. In this embodiment, as shown in fig. 7 and 8, the ultrasonic generator 322 includes a hollow shaft 3221, a cavity mounting plate 3222 and a cavity housing, the top of the hollow shaft 3221 abuts against the air inlet channel 323, the hollow shaft 3221 is communicated with the air inlet channel 323 through a vent hole, and a cavity in the hollow shaft 3221 is communicated with the inside of the cavity housing. The cavity mounting plates 3222 are disposed on two sides of the cavity housing, and the gasket 325 is disposed below the cavity mounting plates 3222, and the gasket 325 plays a role in supporting the entire cavity housing, so that the hollow shaft 3221 abuts against the air vent of the air intake passage 323, thereby preventing air leakage during movement of the air flow. The cavity shell is internally provided with a first horizontal cavity 3223, a first vertical flow channel 3224, a second horizontal cavity 3225, a second vertical flow channel 3226, a third horizontal cavity 3227 and a jet slit 3228 which are sequentially communicated, air flow passes through the cavity shell to form high-frequency ultrasonic waves and then is jetted from the jet slit 3228, the air flow jetted from the jet slit 3228 forms an air knife on an object to be cleaned, pollutant particles on the object to be cleaned are separated and suspended in the jetted air, and then the air is sucked and exhausted by the air exhaust assembly 33.
Further, the longitudinal section of the first horizontal cavity 3223 is triangular. The longitudinal sectional shapes of the second horizontal cavity 3225 and the third horizontal cavity 3227 are respectively selected from any one of a rectangle, a circle, an arc and a trapezoid. In this embodiment, the second horizontal cavity 3225 and the third horizontal cavity 3227 have rectangular longitudinal cross-sectional shapes, respectively. The longitudinal cross-sectional shapes of the second horizontal cavity 3225 and the third horizontal cavity 3227 may be the same or different. In this embodiment, the longitudinal cross-sectional shapes of the second horizontal cavity 3225 and the third horizontal cavity 3227 are rectangular, respectively.
Further, the ratio of the height of the first horizontal cavity 231 to the height of the first vertical flow channel 232 is (1.2-2): 1, preferably 1.5: 1; the ratio of the height of the first horizontal cavity 231 to the height of the first vertical flow channel 232 is (2.5-4): 1, preferably 3.5: 1. the ratio of the height of the second horizontal cavity 233 to the height of the first vertical flow passage 232 is (0.8-2): 1, preferably 1.2: 1; the ratio of the maximum width of the second horizontal cavity 233 to the height of the first vertical flow passage 232 is (1.5-3.5): 1, preferably 2.5: 1. the ratio of the height of the third horizontal cavity 235 to the height of the second vertical channel 234 is (0.8-2): 1, preferably 1.2: 1; the ratio of the maximum width of the third horizontal cavity 235 to the height of the second vertical channel 234 is (1.5-3.5): 1, preferably 2.5: 1. the ratio of the height of the second horizontal cavity 233 to the height of the third horizontal cavity 235 is 1: (0.8-1.5), preferably 1: 1.1. the preferred proportion of the height and the width among the first horizontal cavity 3223, the first vertical flow channel 3224, the second horizontal cavity 3225, the second vertical flow channel 3226 and the third horizontal cavity 3227 effectively ensures the ultrasonic cleaning effect, and further improves the product yield.
Also, the bottom of the ultrasonic generator 322 is provided with a jet slit 3228 for jetting an air flow toward the surface of the object 35 to be cleaned. The spray slits 3228 are obliquely arranged, and the inclination angle θ of the spray slits 3228 is 10-20 °. Preferably, the inclination angle θ of the ejection slit 3228 is 15 °. The angle of inclination of the spray slit 3228 may be adjusted according to actual conditions, and all fall within the scope of the present invention.
Further, as shown in fig. 9, it was found that if the length of the oblique jet flow reaching the object 35 to be cleaned is S in mm, and the length S of the oblique jet flow calculated to be 12 to 16 times the slot width dimension W of the jet slit 3228, the dust removal efficiency is the highest, i.e., S/16 is not more than W not more than S/12, it is inferred that W, H satisfies the following equation, if the slot width dimension of the jet slit 3228 is W in mm, the vertical distance between the outlet of the jet slit 3228 and the surface of the object 35 to be cleaned is H in mm, and the air flow of the jet slit 3228 is obliquely jetted at an angle θ, and then the fine particles are cleaned, and the length S of the oblique jet flow is calculated to be 12 to 16 times the slot width dimension W of the jet slit 3228: the dust removal efficiency is best when H/(16 × cos θ) is less than or equal to W < H/(12 × cos θ).
Preferably, H is 2.5 to 3mm, and the size of the slit width dimension W of the ejection slit 3228 is further selected according to the above equation.
Further, the average flow velocity of the air flow from the ejection slit 3228 of the pressure chamber 321 to the surface to be cleaned is 80-200m/s, and further preferably, the average flow velocity is 80-105m/s, 110-.
The ultrasonic generator 322 is provided with a plurality of groups of variable cross-section air flow channels of the cavity, and the air continuously flowing through the flow channels enables the cavity to generate flow-induced oscillation, thereby generating ultrasonic waves with the frequency exceeding 20 KHZ.
At least one ultrasonic generator 322 arranged in parallel is installed in the pressure cavity 321, and the number of the ultrasonic generators 322 is selected according to the size specification of the object to be cleaned. In this embodiment, as shown in fig. 4, ten ultrasonic generators 322 arranged in parallel are installed in the pressure chamber 321, each ultrasonic generator 322 independently generates ultrasonic airflow to clean an object to be cleaned, and a second sealing gasket 324 is disposed between adjacent ultrasonic generators 322 to perform sealing and isolating functions.
The air inlet channel 323 is disposed on the upper side of the pressure chamber 321, in this embodiment, air vents with uniform size are respectively disposed between the air inlet channel 323 and each ultrasonic generator 322, and the air inlet channel 323 is communicated with the ultrasonic generators 322 through the air vents, and the air inlet channel 323 is connected with the air inlet pipe through a joint 3121 mounted on the sealing flange.
In other embodiments, a vent hole is respectively arranged between the air inlet channel 323 and each ultrasonic generator 322, and the diameter of the vent hole is gradually increased along the direction away from the air inlet pipe, so that the air inlet pressure of each ultrasonic generator 322 is more balanced, and the overall cleaning effect is ensured.
Further, the number of the vent holes is 1, 2 and 3 … … n in sequence along the direction far away from the air inlet pipe, and the diameter difference R' between the adjacent vent holes is 0.4-0.5 mm. For example, the diameter of the ventilation aperture closest to the air inlet tube is 16mm, the diameter of the second ventilation aperture in the direction away from the air inlet tube is 16.4mm, the diameter of the third ventilation aperture is 16.8mm, the diameter of the fourth ventilation aperture is 17.2mm, and so on. Correspondingly, the diameter of the joint between the hollow shaft 3221 and the vent hole at the top of each ultrasonic generator 322 is gradually increased, and the hollow cavity structure in the hollow shaft 3221 is cylindrical or conical.
Turning now to the pumping assembly, as shown in figure 6, the pumping assembly is located at the side of the pressure chamber 321, the pumping assemblies 33, 34 are connected by conduits to the main gas flow inlet of the air amplifier 25, and the pumping assemblies 33, 34 are used to collect impurities swept from the surface of the object 35 to be cleaned.
In the present embodiment, the pumping assembly 33 comprises two vacuum chambers 331 and two pumping channels 332, respectively. Two vacuum chambers 331 are symmetrically disposed at both sides of the pressure chamber 321, respectively, and each vacuum chamber 331 is parallel to the bottom of the pressure chamber 321; the bottom of each vacuum chamber 331 is provided with a suction slit, respectively. The design of the two vacuum chambers 331 is well protected against escape of dust particles. The two pumping channels 332 are disposed above and in communication with the corresponding vacuum chambers 331, respectively, and the pumping channels 332 are connected to the pumping unit through the connecting lines 313 and 314, respectively, so that the pumping unit can generate a negative pressure in the vacuum chambers 331 through the pumping channels 332.
Further, the vacuum chamber 331 has an inclined droplet shape in a longitudinal sectional shape. The width of the vacuum chamber 331 gradually increases with the direction of the airflow, so that the particles can rapidly enter the vacuum chamber 331 while preventing the particles from flying and escaping. The cooperation of the drop-shaped vacuum chamber 331 and the pumping unit allows the dust collection rate to reach 100%.
The pressure cavity 321 of the ultrasonic cleaning head 3 can generate larger cleaning force on the surface of the glass substrate, particles with the diameter of 2-50 mu m suspended on the surface of an object to be cleaned can be easily cleaned, and then the air extraction assembly 33 is used for absorbing the granular impurities, so that the poor treatment of the object to be cleaned caused by the residual impurities is reduced, and the removal rate reaches 98-99.8%. Such as: the object to be cleaned in which the particles having a diameter of 2 μm are suspended is tested, the surface of the object to be cleaned before cleaning is shown in fig. 10, and the surface of the object to be cleaned after cleaning is shown in fig. 11, and the removal rate of the particles having a diameter of 2 μm reaches 99.8% through program calculation.
In the ultrasonic cleaning system, the ultrasonic generator 322 is disposed in the pressure chamber 321, and is substantially a specially designed variable cross-section air flow channel, and the variable cross-section air flow channel is formed by the arrangement of a plurality of groups of cavities therein, and is finally ejected from the ejection slit 3228. The contaminant particles adhered to the surface of the object to be cleaned are separated from the surface under the combined action of the high-speed air flow and the ultrasonic wave, and then are re-suspended and sucked away by the vacuum chamber 331. The structural design of the invention prevents secondary dust raising, ensures that the resuspension particles can be smoothly sucked into the vacuum cavity of the ultrasonic cleaning head 3, and can realize the removal of the particles on the surface of the object to be cleaned.
The embodiment of the invention also provides a method for cleaning the glass substrate of the liquid crystal display by adopting the ultrasonic cleaning system. The method cleans the foreign matters on the surface of the glass substrate by the ultrasonic cleaning system; the ultrasonic cleaning method can be carried out in a mode of enabling the ultrasonic cleaning head 3 and the glass substrate to generate relative movement, namely, the ultrasonic cleaning head 3 is moved to keep the glass substrate still; or moving the glass substrate to keep the ultrasonic cleaning head 3 still; or both, but is not limited thereto.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The ultrasonic cleaning system is characterized by comprising an air pumping unit and an ultrasonic cleaning head, wherein the air pumping unit comprises an air amplifier and a first air source, the air amplifier is provided with a main air flow inlet, a main air flow outlet and a compressed air flow inlet, the compressed air flow inlet is connected with the first air source through a pipeline, the main air flow outlet is directly connected with the atmosphere, and the main air flow inlet is connected with the ultrasonic cleaning head through a pipeline.
2. The ultrasonic cleaning system of claim 1, wherein the evacuation unit further comprises a filter, and the main airflow outlet is connected to the filter by a conduit.
3. The ultrasonic cleaning system according to claim 1, wherein the pumping unit further comprises a first flow type electric proportional valve, a first digital gas flow switch, a first pressure type proportional valve and a first solenoid valve disposed on a pipeline between the air amplifier and the first gas source.
4. The ultrasonic cleaning system of claim 1, further comprising a second gas source connected to the ultrasonic cleaning head via a pipeline, and a gas inlet unit comprising a second flow-type electric proportional valve, a second digital gas flow switch, a second pressure-type proportional valve, and a second solenoid valve disposed on the pipeline between the second gas source and the ultrasonic cleaning head.
5. The ultrasonic cleaning system of claim 4, wherein the ultrasonic cleaning head comprises:
the sealing device comprises a shell, a sealing flange and a sealing sleeve, wherein one end of the shell is provided with the sealing flange, and a joint is arranged in the sealing flange;
the pressure cavity is arranged in the shell, a plurality of ultrasonic generators are arranged in the pressure cavity, and the bottoms of the ultrasonic generators are provided with jet slits for jetting airflow to the surface of an object to be cleaned;
the air inlet channel is arranged on the upper side of the pressure cavity, communicated with the ultrasonic generator and connected with the second electromagnetic valve through the joint;
and the air pumping assembly is arranged on the side part of the pressure cavity, is connected with the main air flow inlet of the air amplifier through a pipeline, and is used for collecting impurities swept out of the surface of the object to be cleaned.
6. The ultrasonic cleaning system of claim 5, wherein the ultrasonic generator is formed by an array of cavities.
7. The ultrasonic cleaning system of claim 5, wherein the ultrasonic generator comprises a first horizontal cavity, a first vertical flow channel, a second horizontal cavity, a second vertical flow channel, and a third horizontal cavity in sequential communication.
8. The ultrasonic cleaning system of claim 7, wherein the longitudinal cross-section of the first horizontal cavity is triangular;
and/or the longitudinal section shapes of the second horizontal cavity and the third horizontal cavity are respectively selected from any one of rectangle, circle, arc and trapezoid.
9. The ultrasonic cleaning system of claim 5, wherein the pump assembly comprises:
at least one vacuum chamber provided at one side of the pressure chamber, the vacuum chambers being parallel to a bottom of the pressure chamber, respectively; the bottom of the vacuum cavity is provided with a suction slit respectively;
and the air pumping channels are respectively arranged above the vacuum cavities and communicated with the vacuum cavities, and the air pumping channels are connected with the air pumping units through pipelines.
10. A method for cleaning a glass substrate of a liquid crystal display using the ultrasonic cleaning system as claimed in any one of claims 1 to 9.
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| CN202010892286.4A CN111940413A (en) | 2020-08-31 | 2020-08-31 | Ultrasonic cleaning system and cleaning method |
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| CN202010892286.4A CN111940413A (en) | 2020-08-31 | 2020-08-31 | Ultrasonic cleaning system and cleaning method |
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| CN115815195A (en) * | 2022-12-12 | 2023-03-21 | 上海奔曜科技有限公司 | Cleaning device and cleaning method |
| CN118763028A (en) * | 2024-09-02 | 2024-10-11 | 宁波润华全芯微电子设备有限公司 | A vacuum generator assembly and exhaust method for coating and developing equipment |
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