CN111940414A - Dry ultrasonic cleaning device and cleaning method - Google Patents
Dry ultrasonic cleaning device and cleaning method Download PDFInfo
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- CN111940414A CN111940414A CN202010892309.1A CN202010892309A CN111940414A CN 111940414 A CN111940414 A CN 111940414A CN 202010892309 A CN202010892309 A CN 202010892309A CN 111940414 A CN111940414 A CN 111940414A
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- cavity
- ultrasonic cleaning
- air inlet
- ultrasonic
- cleaning apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2205/00—Details of machines or methods for cleaning by the use of gas or air flow
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides a dry type ultrasonic cleaning device and a cleaning method, wherein the dry type ultrasonic cleaning device comprises: a housing, one end of which is provided with a sealing flange, and a joint is arranged in the sealing flange; the pressure cavity is arranged in the shell, at least one ultrasonic generator is arranged in the pressure cavity, and the bottom of the ultrasonic generator is provided with a jet slit for jetting airflow to the surface of an object to be cleaned; the air inlet channel is arranged on the upper side of the pressure cavity, communicated with the ultrasonic generator and connected with the air inlet pipe through a joint; and the air pumping units are arranged on two sides of the pressure cavity and are used for collecting impurities swept out of the surface of the object to be cleaned. The invention has high sweeping and cleaning efficiency, can obviously improve the surface cleanliness of the object to be cleaned, and simultaneously avoids a large amount of impurity residues generated after the surface of the object to be cleaned is subjected to wet cleaning treatment.
Description
Technical Field
The invention relates to the technical field of liquid crystal panel cleaning equipment, in particular to a dry type ultrasonic cleaning device and a cleaning method.
Background
At present, wet cleaning is mostly adopted in the liquid crystal industry, but the wet cleaning has a destructive effect on an adhesive layer after gluing, so that the rejection rate is increased; and after rubbing orientation, a large amount of dust particles are generated, and wet cleaning is a waste of resources because wet cleaning requires a large amount of consumables, such as: purified water, other chemicals, etc. When the lining material is sprayed in the production process, the glass plates which do not meet the requirements are easily caused due to improper spraying, and the unqualified glass plates are treated as waste products at present and are relatively wasted. In addition, wet cleaning only cleans the surface, and often does not achieve the ideal effect.
Disclosure of Invention
In order to solve the defects, the invention provides a dry type ultrasonic cleaning device and a cleaning method, the device has high purging and cleaning efficiency, can obviously improve the surface cleanliness of the object to be cleaned, and simultaneously avoids a large amount of impurity residues generated after the surface of the object to be cleaned is subjected to wet type cleaning treatment.
A dry ultrasonic cleaning device, comprising: the sealing device comprises a shell, a sealing flange and a sealing sleeve, wherein one end of the shell is provided with the sealing flange; the pressure cavity is arranged in the shell, a plurality of ultrasonic generators are arranged in the pressure cavity, and the bottoms of the ultrasonic generators are provided with jet slits for jetting airflow to the surface of an object to be cleaned; the air inlet channel is arranged on the upper side of the pressure cavity, the air inlet channel is communicated with the ultrasonic generator, and the air inlet channel is connected with an air inlet pipe through a joint; and the air pumping unit is arranged at two sides of the pressure cavity and is used for collecting impurities swept out of the surface of the object to be cleaned.
In one embodiment of the present invention, the ultrasonic generator is formed by arranging a plurality of groups of cavities.
In one embodiment of the invention, the spray slot is inclined by 10-20 °.
In an embodiment of the present invention, the ultrasonic generator includes a first horizontal cavity, a first vertical flow channel, a second horizontal cavity, a second vertical flow channel, and a third horizontal cavity, which are sequentially connected.
In one embodiment of the present invention, the longitudinal section of the first horizontal cavity is triangular.
In one embodiment of the present invention, the second horizontal cavity and the third horizontal cavity each have a longitudinal sectional shape selected from any one of a rectangle, a circle, an arc, and a trapezoid.
In an embodiment of the present invention, a plurality of ultrasonic generators arranged in parallel are installed in the pressure chamber, a vent hole is respectively disposed between the air inlet channel and each of the ultrasonic generators, and the diameter of the vent hole gradually increases along a direction away from the air inlet pipe.
In an embodiment of the present invention, a plurality of ultrasonic generators are installed in the pressure chamber, and a sealing gasket is disposed between adjacent ultrasonic generators.
In one embodiment of the present invention, the pumping unit includes: at least one vacuum chamber provided at one side of the pressure chamber, the vacuum chamber being parallel to a bottom of the pressure chamber; the bottom of the vacuum cavity is provided with a suction slit respectively; at least one pumping channel arranged above the vacuum cavity and communicated with the vacuum cavity; and the air exhaust assembly is connected with the air exhaust channel through a connecting pipeline respectively and is used for generating negative pressure in the vacuum cavity through the air exhaust channel.
In one embodiment of the present invention, the longitudinal cross-sectional shape of the vacuum chamber is a slanted droplet shape.
In one embodiment of the present invention, the suction slit is inclined toward the pressure chamber, and the inclination angle of the suction slit is 10 to 20 °.
In a second aspect, the present invention further provides a method for cleaning a glass substrate of a liquid crystal display using the dry ultrasonic cleaning apparatus as described above.
In summary, the present invention provides a dry ultrasonic cleaning apparatus and a cleaning method, and the present invention has the following beneficial effects:
(1) the invention adopts the pressure cavity to form an air flow sheet like an air knife to blow the surface of the object to be cleaned, and then the air suction unit is utilized to suck away granular impurities, thereby reducing poor treatment of the object to be cleaned caused by impurity residues. The ultrasonic cleaning device provided by the invention can be used for sweeping and cleaning the surface of an object by utilizing ultrasonic airflow without directly contacting with the object to be cleaned, so that the product is prevented from being damaged.
(2) The invention can remove dust particles with the diameter of 2 mu m or more with the removal rate of more than 99.8 percent.
(3) High-cost consumables such as high-purity gas or chemical solvent are not needed, an additional drying device is not needed, the economic cost is reduced, and the production period is shortened.
(4) The length of the cleaning head can be properly selected according to the size of the glass substrate to be cleaned, and the transverse cleaning performance of the workpiece is kept consistent by the ultrasonic waves which are uniformly distributed along the flow passage outlet streamline.
(5) The performance of the ultrasonic generator is durable, so that the cleaning system only needs to be simply cleaned and maintained after long-term use.
Drawings
Fig. 1 is a schematic perspective view illustrating a dry ultrasonic cleaning apparatus according to an embodiment of the present invention.
Fig. 2 is a bottom view of a dry ultrasonic cleaning apparatus according to an embodiment of the present invention.
Fig. 3 is a front view of the dry ultrasonic cleaning apparatus of fig. 1 with the first sealing flange removed.
FIG. 4 is a front view of FIG. 3 with the first sealing pad removed to provide a dry ultrasonic cleaning device.
Fig. 5 is a schematic perspective view of the ultrasonic generator in fig. 4.
Fig. 6 is a front view of the ultrasonic generator of fig. 4.
Fig. 7 is an explanatory diagram of the relationship between the width of the spray slit and the perpendicular distance of the spray slit from the surface of the object to be cleaned.
Fig. 8 is a surface view of an object to be cleaned under a microscope before cleaning.
Fig. 9 is a surface view of an object to be cleaned under a microscope after cleaning.
In the figure, 1, a housing; 11. a second sealing flange; 12. a first sealing flange; 121. a joint; 13. a first connecting line; 14. a second connecting line; 15. a first gasket; 2. an ultrasonic generator; 21. a hollow shaft; 22. a cavity mounting plate; 231. a first horizontal cavity; 232. a first vertical flow channel; 233. a second horizontal cavity; 234. a second vertical flow channel; 235. a third horizontal cavity; 236. a spray slit; 24. a second gasket; 25. a gasket; 26. an object to be cleaned; 3. an air intake passage; 4. a first vacuum chamber; 5. a first pumping channel; 6. a second vacuum chamber; 7. a second pumping channel.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1 to 4, the present invention provides a dry ultrasonic cleaning device, which is applied to the liquid crystal panel industry and mainly uses ultrasonic airflow to purge and clean the surface of an object. It includes: the air conditioner comprises a shell 1, an air inlet assembly and an air exhaust unit.
Wherein, one end of the shell 1 is provided with a first sealing flange 12, the other end is provided with a second sealing flange 11, and a joint 121 is arranged in the first sealing flange 12. First gaskets 15 are respectively arranged between the first sealing flange 12 and the housing 1 and between the second sealing flange 11 and the housing 1.
The following is a description of the air intake assembly. The intake assembly includes a pressure chamber and an intake passage 3 disposed above and in communication with the pressure chamber. The pressure cavity is arranged in the shell 1, the ultrasonic generator 2 is arranged in the pressure cavity, and the ultrasonic generator 2 is used for enabling airflow sprayed out of the air inlet channel 3 to generate flow-induced oscillation.
The ultrasonic generator 2 is formed by arranging a plurality of groups of cavities. In the present embodiment, as shown in fig. 5 and 6, the ultrasonic generator 2 includes a hollow shaft 21, a cavity mounting plate 22 and a cavity housing, the top of the hollow shaft 21 abuts against the air inlet channel 3, the hollow shaft 21 is communicated with the air inlet channel 3 through a vent hole, and a cavity in the hollow shaft 21 is communicated with the inside of the cavity housing. The cavity mounting plates 22 are arranged on two sides of the cavity shell, and the gaskets 25 are arranged below the outer sides of the cavity mounting plates 22 and play a role in supporting the whole cavity shell, so that the hollow shaft is close to the air vent of the air inlet channel 3, and air leakage of air flow in the movement process is avoided. The cavity shell is internally provided with a first horizontal cavity 231, a first vertical flow channel 232, a second horizontal cavity 233, a second vertical flow channel 234, a third horizontal cavity 235 and a jet slit 236 which are sequentially communicated, air flow passes through the cavity shell to form high-frequency ultrasonic waves and then is jetted from the jet slit 236, the air flow jetted from the jet slit 236 forms an 'air knife' on an object to be cleaned, pollutant particles on the object to be cleaned are separated and suspended in the jetted air, and then the air is sucked and discharged by the air suction unit.
Further, the longitudinal section of the first horizontal cavity 231 is triangular, which is beneficial to gas introduction.
Further, the longitudinal sectional shapes of the second horizontal cavity 233 and the third horizontal cavity 235 are respectively selected from any one of a rectangle, a circle, an arc, and a trapezoid. In the present embodiment, the longitudinal cross-sectional shapes of the second horizontal cavity 233 and the third horizontal cavity 235 are rectangular, and the longitudinal cross-sectional shapes of the second horizontal cavity 233 and the third horizontal cavity 235 may be the same or different. In the present embodiment, the second horizontal cavity 233 and the third horizontal cavity 235 have rectangular longitudinal sectional shapes, respectively.
Further, the ratio of the height of the first horizontal cavity 231 to the height of the first vertical flow channel 232 is (1.2-2): 1, preferably 1.5: 1; the ratio of the height of the first horizontal cavity 231 to the height of the first vertical flow channel 232 is (2.5-4): 1, preferably 3.5: 1. the ratio of the height of the second horizontal cavity 233 to the height of the first vertical flow passage 232 is (0.8-2): 1, preferably 1.2: 1; the ratio of the maximum width of the second horizontal cavity 233 to the height of the first vertical flow passage 232 is (1.5-3.5): 1, preferably 2.5: 1. the ratio of the height of the third horizontal cavity 235 to the height of the second vertical channel 234 is (0.8-2): 1, preferably 1.2: 1; the ratio of the maximum width of the third horizontal cavity 235 to the height of the second vertical channel 234 is (1.5-3.5): 1, preferably 2.5: 1. the ratio of the height of the second horizontal cavity 233 to the height of the third horizontal cavity 235 is 1: (0.8-1.5), preferably 1: 1.1. the preferred proportion of the height and the width among the first horizontal cavity 3223, the first vertical flow channel 3224, the second horizontal cavity 3225, the second vertical flow channel 3226 and the third horizontal cavity 3227 effectively ensures the ultrasonic cleaning effect, and further improves the product yield.
The bottom of the ultrasonic generator 2 is provided with a jet slit 236 for jetting an air stream toward the surface of the object 26 to be cleaned. The spray slits 236 are obliquely arranged, and the inclination angle θ of the spray slits 236 is 10 to 20 °. Preferably, the angle of inclination θ of the spray slit is 12-15 °. The inclination angle of the jet slit can be adjusted according to the actual situation, and the invention belongs to the protection scope of the invention.
Further, as shown in fig. 7, it was found that if the length of the inclination of the jet air flow to the object 26 to be cleaned is S in mm, and the calculated inclination length S is 12 to 16 times the slot width dimension W of the jet slot, the dust removal efficiency is the highest, and a range of S/16 ≦ W ≦ S/12 is obtained, and it is inferred that W, H satisfies the following equation: the dust removal efficiency is best when H/(16 × cos θ) is less than or equal to W < H/(12 × cos θ).
Preferably, H is 2.5 to 3mm, and the size of the slit width W of the ejection slit 236 is further selected according to the above equation.
Further, the average flow velocity of the gas flow from the ejection slit 236 of the pressure chamber to the surface to be cleaned is 80-200m/s, preferably 80-105m/s, 105-.
The ultrasonic generator 2 is provided with a plurality of groups of variable cross-section air flow channels of the cavity, and the air continuously flowing through the flow channels enables the cavity to generate flow-induced oscillation, thereby generating ultrasonic waves with the frequency exceeding 20 KHZ.
In the present embodiment, as shown in fig. 2, a plurality of ultrasonic generators 2 arranged in parallel are installed in the pressure chamber, and the number of the ultrasonic generators 2 is selected according to the size specification of the object to be cleaned. And a second sealing gasket 24 is arranged between the adjacent ultrasonic generators 2 to play a sealing role.
In other embodiments, a vent hole is respectively arranged between the air inlet channel 3 and each ultrasonic generator 2, and the diameter of the vent hole is gradually increased along the direction away from the air inlet pipe, so that the air inlet pressure of each ultrasonic generator 2 is more balanced, and the overall cleaning effect is ensured.
Further, the number of the vent holes is 1, 2 and 3 … … n in sequence along the direction far away from the air inlet pipe, and the diameter difference R' between the adjacent vent holes is 0.4-0.5 mm. For example, the diameter of the ventilation aperture closest to the air inlet tube is 16mm, the diameter of the second ventilation aperture in the direction away from the air inlet tube is 16.4mm, the diameter of the third ventilation aperture is 16.8mm, the diameter of the fourth ventilation aperture is 17.2mm, and so on. Correspondingly, the diameter of the joint of the hollow shaft 21 and the vent hole at the top of each ultrasonic generator 2 is gradually increased correspondingly, and the cavity structure in the hollow shaft 21 is cylindrical or conical.
The pumping assembly is described below. The suction unit is arranged at the side of the pressure chamber and is used for collecting impurities blown off from the surface of the object 26 to be cleaned.
In this embodiment, the pumping unit comprises a first vacuum chamber 4, a second vacuum chamber 6, a first pumping channel 5, a second pumping channel 7 and a pumping assembly. The first vacuum cavity 4 and the second vacuum cavity 6 are respectively and symmetrically arranged at two sides of the pressure cavity, and the first vacuum cavity 4 and the second vacuum cavity 6 are respectively parallel to the bottom of the pressure cavity; the bottoms of the first vacuum cavity 4 and the second vacuum cavity 6 are respectively provided with a suction slit. The first pumping channel 5 and the second pumping channel 7 are respectively arranged above the corresponding vacuum cavities and communicated with the corresponding vacuum cavities. The air extracting component is connected with the first air extracting channel 5 through a first connecting pipeline 13, is connected with the second air extracting channel 7 through a second connecting pipeline 14, and is used for generating negative pressure in the vacuum cavity through the air extracting channel.
Furthermore, the longitudinal section of the vacuum cavity is in an inclined water drop shape, and the width of the vacuum cavity is gradually increased along with the direction of the airflow, so that the particles can quickly enter the vacuum cavity, and meanwhile, the particles are prevented from flying and escaping. The matching of the drop-shaped vacuum cavity and the air extraction unit enables the dust collection rate to reach 100 percent.
The pressure cavity of the ultrasonic cleaning head can generate larger cleaning force on the surface of the glass substrate, particles with the diameter of 2-50 mu m suspended on the surface of an object to be cleaned can be easily cleaned, then the air suction assembly is utilized to suck away granular impurities, poor treatment of the object to be cleaned caused by impurity residues is reduced, and the removal rate reaches 98-99.8%. The object to be cleaned in which the particles of 2 μm were suspended was tested, the surface of the object to be cleaned before cleaning was shown in fig. 8, and the surface of the object to be cleaned after cleaning was shown in fig. 9, and the removal rate reached 99.8%.
In the dry ultrasonic cleaning device, the ultrasonic generator 2 is disposed in the pressure chamber, and is substantially a specially designed variable cross-section air flow channel, and the variable cross-section air flow channel is realized by the arrangement of a plurality of groups of cavities therein, and is finally ejected from the ejection slit 236. The polluted particles adhered to the surface of the object to be cleaned are separated from the surface under the combined action of the high-speed airflow and the ultrasonic wave, then are re-suspended and are sucked away by the vacuum cavity. The structural design of the invention prevents secondary dust raising, ensures that the resuspension particles can be smoothly sucked into the vacuum cavity of the cleaning head, and can realize the removal of the particles on the surface of the object to be cleaned.
The embodiment of the invention also provides a method for cleaning the glass substrate of the liquid crystal display by adopting the dry type ultrasonic cleaning device. The method comprises the steps of cleaning foreign matters on the surface of a glass substrate by the dry ultrasonic cleaning device; the method can be carried out in a mode of causing relative movement between the dry type ultrasonic cleaning device and the glass substrate, namely moving the dry type ultrasonic cleaning device and keeping the glass substrate still; or moving the glass substrate and keeping the dry type ultrasonic cleaning device still; or both, but is not limited thereto.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A dry ultrasonic cleaning apparatus, comprising:
the sealing device comprises a shell, a sealing flange and a sealing sleeve, wherein one end of the shell is provided with the sealing flange;
the pressure cavity is arranged in the shell, a plurality of ultrasonic generators are arranged in the pressure cavity, and the bottoms of the ultrasonic generators are provided with jet slits for jetting airflow to the surface of an object to be cleaned;
the air inlet channel is arranged on the upper side of the pressure cavity, the air inlet channel is communicated with the ultrasonic generator, and the air inlet channel is connected with an air inlet pipe through the joint;
and the air pumping unit is arranged at two sides of the pressure cavity and is used for collecting impurities swept out of the surface of the object to be cleaned.
2. A dry ultrasonic cleaning apparatus as claimed in claim 1, wherein the ultrasonic generator is formed by an array of cavities.
3. A dry ultrasonic cleaning apparatus as claimed in claim 1, wherein the jet slit is inclined at 10-20 °.
4. A dry ultrasonic cleaning apparatus according to claim 1, wherein the ultrasonic generator comprises a first horizontal cavity, a first vertical flow channel, a second horizontal cavity, a second vertical flow channel, and a third horizontal cavity which are connected in this order.
5. A dry ultrasonic cleaning device according to claim 4, wherein the longitudinal section of the first horizontal cavity is triangular.
6. A dry ultrasonic cleaning apparatus according to claim 4, wherein the second horizontal cavity and the third horizontal cavity each have a longitudinal sectional shape selected from any one of a rectangular shape, a circular shape, an arc shape, and a trapezoidal shape.
7. A dry ultrasonic cleaning apparatus according to claim 1, wherein a plurality of ultrasonic generators are installed in parallel in the pressure chamber, and a vent hole is provided between the air inlet channel and each of the ultrasonic generators, and the diameter of the vent hole is gradually increased in a direction away from the air inlet pipe.
8. A dry ultrasonic cleaning apparatus according to claim 1, wherein the air suction unit comprises:
at least one vacuum chamber provided at one side of the pressure chamber, the vacuum chamber being parallel to a bottom of the pressure chamber; the bottom of the vacuum cavity is provided with a suction slit;
at least one pumping channel arranged above the vacuum cavity and communicated with the vacuum cavity;
and the air exhaust assembly is connected with the air exhaust channel through a connecting pipeline respectively and is used for generating negative pressure in the vacuum cavity through the air exhaust channel.
9. The dry ultrasonic cleaning apparatus according to claim 8, wherein the longitudinal sectional shape of the vacuum chamber is a slanted droplet shape.
10. A method for cleaning a glass substrate of a liquid crystal display device by using the dry ultrasonic cleaning apparatus as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010892309.1A CN111940414A (en) | 2020-08-31 | 2020-08-31 | Dry ultrasonic cleaning device and cleaning method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010892309.1A CN111940414A (en) | 2020-08-31 | 2020-08-31 | Dry ultrasonic cleaning device and cleaning method |
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| CN111940414A true CN111940414A (en) | 2020-11-17 |
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| CN202010892309.1A Pending CN111940414A (en) | 2020-08-31 | 2020-08-31 | Dry ultrasonic cleaning device and cleaning method |
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Application publication date: 20201117 |