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ATE156895T1 - Mikroventil - Google Patents

Mikroventil

Info

Publication number
ATE156895T1
ATE156895T1 AT94916136T AT94916136T ATE156895T1 AT E156895 T1 ATE156895 T1 AT E156895T1 AT 94916136 T AT94916136 T AT 94916136T AT 94916136 T AT94916136 T AT 94916136T AT E156895 T1 ATE156895 T1 AT E156895T1
Authority
AT
Austria
Prior art keywords
microvalve
way
heating elements
diaphragm
diaphragm structure
Prior art date
Application number
AT94916136T
Other languages
English (en)
Inventor
Thomas Lisec
Hans-Joachim Quenzer
Bernd Wagner
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Application granted granted Critical
Publication of ATE156895T1 publication Critical patent/ATE156895T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/04—Circuit elements having moving parts using diaphragms

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Temperature-Responsive Valves (AREA)
  • Micromachines (AREA)
  • Forging (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
AT94916136T 1993-05-27 1994-05-21 Mikroventil ATE156895T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4317676 1993-05-27

Publications (1)

Publication Number Publication Date
ATE156895T1 true ATE156895T1 (de) 1997-08-15

Family

ID=6489068

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94916136T ATE156895T1 (de) 1993-05-27 1994-05-21 Mikroventil

Country Status (6)

Country Link
US (1) US5681024A (de)
EP (1) EP0700485B1 (de)
JP (1) JP3418741B2 (de)
AT (1) ATE156895T1 (de)
DE (2) DE59403742D1 (de)
WO (1) WO1994028318A1 (de)

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Also Published As

Publication number Publication date
DE4418450A1 (de) 1994-12-01
EP0700485B1 (de) 1997-08-13
DE59403742D1 (de) 1997-09-18
WO1994028318A1 (de) 1994-12-08
JP3418741B2 (ja) 2003-06-23
DE4418450C2 (de) 1996-07-25
JPH09501265A (ja) 1997-02-04
EP0700485A1 (de) 1996-03-13
US5681024A (en) 1997-10-28

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Legal Events

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