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How To Measure: Understanding

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0% found this document useful (0 votes)
51 views24 pages

How To Measure: Understanding

Keyence 2

Uploaded by

Larry Hare
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 24

How to Measure

UNDERSTANDING
DISPLACEMENT SENSORS/
MEASUREMENT SYSTEMS

Thickness

Radius (R)/
Inner Diameter

Meandering Warpage and Flatness Gap/Clearance

Eccentricity Width Profile 3D Shape

Stroke Height/Step Run-out/Vibration Outer Diameter Angle Positioning


KEYENCE has been providing displacement sensors/measurement systems in a variety of industries. During our efforts to help
customers improve their business operations, they say 2 things;

"With all the different types of displacement sensors and measurement systems, it's difficult to make the right choice."

If you choose systems that are not suited for the application, this will lead to increased costs and an increase in operating man-hours,
which should be avoided.
This Support Guide introduces correct measurement methods by specific application such as "thickness," "outer diameter" and "shape,"
and suggests the optimum equipment for specific applications to solve customers' troubles such as those above.

A P P L I C AT I O N S

Various measurements are possible when using displacement sensors/measurement systems. The optimum way to measure differs according to
the type of target to be measured and installation space.

Thickness Width Height/Step Outer Diameter

P. 4, 5 P. 6 P. 7 P. 8

Stroke Run-out/Vibration Eccentricity Warpage and Flatness

P. 9 P. 10 P. 11 P. 12

Radius (R)/
Angle Gap/Clearance Meandering
Inner Diameter

P. 13 P. 14 P. 15 P. 16

Positioning Profile 3D Shape

P. 17 P. 18 P. 19

2
TYPES OF DISPLACEMENT SENSORS/MEASUREMENT SYSTEMS

In this Support Guide, we introduce applications using the following four categories of systems.

REFLECTIVE LASER REFLECTIVE PROFILE THRUBEAM OPTICAL


DISPLACEMENT SENSORS DISPLACEMENT SENSORS MICROMETER

CL Series
• Multi-color confocal method
• Not affected by material or color
• Linearity ±0.09 μm
LJ-V Series LS Series
• 2D triangulation method • 1D telecentric optical method
• Multi-point measurement using line laser • Long life design with no moving parts
• World’s fastest capture rate of • Fastest sampling rate in its class 16 kHz
64000 images/second

THRUBEAM 2D DIMENSION
MEASUREMENT SYSTEM
LK-G Series
• Triangulation method
• World's fastest sampling rate of 392 kHz
• 12 sensor heads can be connected

LT Series TM Series
SI Series
• Confocal method • 2D telecentric optical method
• Spectral interference
• Spot ø2 μm ø0.000079" • World-first inline profile projector
• Ultra-high resolution of 1 nm
• High performance for thin film • Simultaneous measurement of up to
• ø2 mm ø0.08" microprocess
measurement 16 points possible
sensor head

RELATED DOCUMENTS

These documents can be downloaded from the KEYENCE web site.

DISPLACEMENT SENSORS/ SENSORS/


MEASUREMENT SYSTEMS DISPLACEMENT SENSORS
SELECTION GUIDE BEGINNERS GUIDE
This introduces everything from First off, what's a sensor?
measurement principles to methods of What is a displacement sensor?
selecting sensors and systems. This guide provides answers to the
questions!

3
How to Measure "Thickness - Sheet Form"

Thickness
Measuring measurement of
A A Measuring
between roll transparent targets
1 transparent film

B Measuring B Measuring
above roll opaque targets

Thickness
measurement of

2
plastic sheet

Thickness measurement
after roll press

A Space in direction of
movement of target 3
B No space in direction of
movement of target

Thickness measurement of
rubber sheet

REFLECTIVE LASER REFLECTIVE LASER


1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS

When light is directed at a transparent Thickness is measured by passing a target between two
target, light is reflected from the top and sensor heads.
bottom surfaces. Thickness is measured by
identifying reflected light from the top and
bottom surfaces. Install sensors so that
they are opposite each
other on the top and
Target run-out is absorbed
bottom surfaces of the
since the distance (A+B) is
target.
fixed even if the target moves
up or down.

A
C
B

Thickness t = C - (A+B)
Top surface (No.1 peak)
Transparent glass
bottom surface (No.2 peak)
This is automatically calculated by
POINT POINT the controller.

SELECTION OF DISPLACEMENT SENSORS IS IMPORTANT Optical-axis alignment and span adjustment are important to ensure that A+B is fixed
even if the target runs out in the vertical direction.
• Does the displacement sensor have enough range to see both the top and bottom
surface?
• Check to see if stable measurement is possible even if the reflectance of the top and
bottom surfaces is different.

4
How to Measure "Thickness - Components"

Thickness
measurement of
A Measuring transparent targets
1 coated film

B Measuring opaque targets

Thickness measurement of
sealing material

A Measuring step from a reference 5


B Measuring in air

Thickness
measurement of

2 wafers

THRUBEAM 2D DIMENSION REFLECTIVE LASER REFLECTIVE PROFILE


3 MEASUREMENT SYSTEM 4 DISPLACEMENT SENSORS 5 DISPLACEMENT SENSORS

Sensor heads are installed so that the top Thickness is measured by the difference in Thickness is found by simultaneously
surfaces of the roller and target are projected height when the target is wound around (i.e. measuring the base surface and target using a
as a single plane on the captured image. held in close contact against) the roller with 2D laser displacement sensor and measuring
Thickness is found by measuring the step the roller surface taken as the zero point. the step from the obtained shape.
height.

B
A (Zero point)

Obtained shape
Thickness t = A-B

Roller run-out is automatically canceled.


(when timing sensor is used)
POINT POINT

Error occurs when there is a gap between the target


The thickness of both transparent and opaque targets can be measured. Since the thickness of targets is measured in and the base surface.
reference to the roller, ensure that no clearance is formed between the roller and the target.
1. Use a base surface having high precision such as
surface plate.
2. Use vacuum contact or magnetic contact.
Improving adhesion to perform measurements is
important.
5
How to Measure "Width"

Width measurement
of electrode foil
A Sheet form 1
B Other targets

Width measurement
of elastomer
A Narrow widths 2
B Wide widths

Width measurement
of building material

3 board

THRUBEAM OPTICAL REFLECTIVE PROFILE REFLECTIVE LASER


1 MICROMETER 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

Narrow targets can be measured using a The profile shape across the laser line is Width is measured by passing a target
single sensor head. In the case of wide obtained and width is measured from that between two sensor heads.
targets, use two sensor heads to detect the shape.
edge positions on the left and right to measure
the width.
Run-out is absorbed since
the distance (A+B) is fixed Width
even if there is target run-out
to the left or right.
C A L B
L C
A B
Width L = C - (A+B) Position (XZ coordinates)
Length L = C - (A+B)
Run-out is absorbed since
This is automatically Width and position are measured at the distance (A+B) is fixed
This is automatically
calculated by the specified conditions. even if there is target run-out
calculated by the controller.
controller. to the left or right.

POINT POINT POINT

• Higher precision measurement than reflective models The width of locations where laser light does not penetrate The end face of the target must be an area wider than
is possible. through can also be measured since the measurement the measurement spot. Optical-axis alignment and span
system is a reflective model. The width of the specified adjustment are important to ensure that A+B is fixed even if
• Even transparent targets can be measured stably by location can be measured correctly even if the target shifts the workpiece runs out to the left and right.
changing the detection threshold values of the target. out of position to the left and right.

6
How to Measure "Height and Step"

Height measurement
of dispenser
A Measuring height at 1 point
1
B Measuring height at 2 points (step)

Height measurement of
Distance between measured connector terminal
A Measuring
A
locations is short from above 2
B Distance between measured B Measuring
locations is long from side

Step measurement of
electrode terminal

Height measurement
of vehicle

REFLECTIVE LASER REFLECTIVE PROFILE THRUBEAM 2D DIMENSION


1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 MEASUREMENT SYSTEM

To measure the height of one point, measure The profile shape across the laser line is The stepped section of the target is projected,
with a reflective laser displacement sensor. obtained and step is measured from that and the step amount of two specified locations
shape. is found.

Measurement point

X Step

Reference point

The difference in height between the


measurement point and the reference
point is measured.
The distance to the location where the laser is incident is
measured to high precision.

POINT POINT POINT

The height of multiple locations can be measured by Even if the target is tilted, step can be measured Even if the shaft is tilted, step can be measured
using multiple sensor heads or by moving a single accurately if the sensor head is provided with the accurately if the sensor head is provided with the
sensor head. alignment adjustment function. alignment adjustment function. Measurement is not
affected by the color of the target surface.

7
How to Measure "Outer Diameter"

Outer diameter
measurement of
Measuring the outer diameter high-speed wire
A Thin targets A
at one location 1
B Thick targets Measuring the outer diameter
B
at multiple locations

Outer diameter
measurement

2 of injectors at
multiple points

Outer diameter
measurement of

3 large steel pipes

THRUBEAM OPTICAL THRUBEAM 2D DIMENSION THRUBEAM OPTICAL


1 MICROMETER 2 MEASUREMENT SYSTEM 3 MICROMETER

The target is passed through collimated light The outer diameter of multiple points and mini- Outer diameter is measured by passing a
to measure the size of its shadow. mum and maximum values of specified ranges target between two sensor heads.
can be measured since a 2D optical projection
method is used.

A
Receiver Measurement target
Transmitter

D C

Focal distance

Outer diameter D = C - (A+B)

This is automatically
calculated by the controller.

POINT POINT POINT

• Outer diameter can be measured to high precision by Outer diameter values can be measured correctly by the It is important to adjust the parallelism of the two
selecting the measurement system best suited to the position correction function even if the target is tilted. measurement systems to prevent values from changing if the
diameter you want to measure. target moves to the left and right.
• A faster sampling cycle ensures stable measurement
even if there is target run-out.

8
How to Measure "Stroke"

Measuring the camera


module stroke
A Measuring from above
1
B Measuring from side

Measuring sheet
frame behavior
A Using a 2D laser
displacement sensor 2
B Using a thrubeam
sensor

Measuring blade
edge behavior

REFLECTIVE LASER REFLECTIVE PROFILE THRUBEAM 2D DIMENSION


1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 MEASUREMENT SYSTEM

The sensor head is installed in the stroke The stroke amount is measured by emitting the The stroke amount is measured by finding the
direction to measure the distance to the target. laser from the side and measuring the position position of the specified point from the image
of the target end face. obtained by the 2D optical projection method.

Stroke amount

Distance

Time
Stroke amount

POINT POINT POINT

• The stroke amount can be measured at high speed with • Stroke can be measured even if the target surface is Stroke amounts can be measured correctly by the
precision. not flat. position correction function even if the target shifts to the
left and right.
• Models capable of measuring long stroke amounts are • Movement on both the left and right sides also can be
also available. measured simultaneously.

9
How to Measure "Run-out/Vibration"

Run-out measurement of
HDD surface
A Surface run-out of rotating bodies 1
B Other run-out/vibration

Vibration measurement
of ultrasonic welding

A Using a 1D laser displacement sensor 2 machine

B Using a 2D laser displacement sensor

Residual vibration
measurement of

3
robot

REFLECTIVE LASER REFLECTIVE LASER REFLECTIVE PROFILE


1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

Height fluctuations at a single point on a Height fluctuations at a single point are The laser is emitted on the target and the
circumference are captured at a fast sampling captured at a fast sampling rate by a reflective height of the characteristic point (e.g. peak
rate by a reflective displacement sensor. displacement sensor. point) is detected from the obtained shape to
measure the run-out amount.

(V) Judgment output

Surface Start of measurement


End of measurement
run-out
Max. value
Direction of rotation
Timing signal

Run-out amount

Min. value
Sampling time
ON
OFF
(t)

POINT POINT POINT

• Amplitude increases the further away from the rotation • The peak-to-peak value of the run-out amount is found • If the peak point shifts to the left and right, the peak cannot
center, which makes fluctuations in height easier to using peak-to-peak hold or a similar function. be captured at all times if you are measuring with a 1D laser
capture. displacement sensor. The peak point can be tracked at all
• Measurement must be performed at a sampling speed of times by using a 2D laser displacement sensor.
• Measurement must be performed at a sampling rate of at least ten times the oscillation frequency.
at least ten times the oscillation frequency. • Measurement must be performed at a sampling rate of at
least ten times the oscillation frequency.

10
How to Measure "Eccentricity"

Eccentricity
measurement of high
A Using a triangulation sensor 1 precision roller

B Using a thrubeam sensor

Eccentricity
measurement of

A Measuring at one point 2 motor shaft

B Measuring at multiple points

Eccentricity
measurement of

3 sponge roller

REFLECTIVE LASER THRUBEAM OPTICAL THRUBEAM 2D DIMENSION


1 DISPLACEMENT SENSORS 2 MICROMETER 3 MEASUREMENT SYSTEM

The laser is pointed at the apex of the circle to Fluctuations in the edge positions of the roll The eccentricity is measured by finding
capture fluctuations in distance by high-speed are captured by high-speed sampling. fluctuations at the position of the specified
sampling. multiple points from the image obtained by the
2D optical projection method.

Run-out amount

(V) Judgment output

Start of measurement
End of measurement
Max. value
Timing signal

Run-out amount

Min. value
Sampling time
ON
OFF
(t)

POINT POINT POINT

• Measurement must be performed at a sampling speed • The peak-to-peak value of the run-out amount is found • The run-out of V grooves and protrusions in the
of at least ten times the rotation speed. using peak-to-peak hold or a similar function. circumference can be measured.
• Error increases as the shaft becomes smaller in • Measurement must be performed at a sampling speed • The run-out of a point at a predetermined distance
diameter since the apex position shifts to the left and of at least ten times the rotation speed. from the end can be measured.
right due to eccentricity.

11
How to Measure "Warpage and Flatness"

Flatness measurement
of chassis
A Using multiple sensor heads 1
B Using a single sensor head

Warpage measurement
of substrate
A Using a 1D laser displacement sensor 2
B Using a 2D laser displacement sensor

Warpage measurement
of material pieces

REFLECTIVE LASER REFLECTIVE LASER REFLECTIVE 2D LASER


1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

Warpage and flatness are measured by The target or sensor heads are moved, and The laser is emitted to measure warpage from
calculating height data obtained respectively warpage or flatness is measured from the the obtained shape.
from multiple installed sensor heads. height data of each point.

Calculates variance between reference point and all Calculates variance between reference point and all
measurement points. measurement points.

Measured value 1 = B - (A+C) / 2... Measured value 1 = B - (A+C) / 2...

Calculates variance between MIN and MAX values Calculates variance between MIN and MAX values
within measurement points. within measurement points.

Peak
Warpage amount

Bottom

Measured value 1 = MAX (A,B,C...) - MIN (A,B,C...)... Measured value 1 = MAX (A,B,C...) - MIN (A,B,C...)...

POINT POINT POINT

• Measurement error caused by chattering when the • Costs can be reduced since only one head is used. Warpage can be measured without moving the sensor head.
sensor head is moved does not occur.
• Chattering when sensor heads are moved causes
• The inspection cycle time is fast since the sensor head measurement error.
is not moved.
• A mechanism for moving sensor heads is required.
• A mechanism for moving the sensor head is not
required.
12
How to Measure "Angle"

A Using a 2D laser displacement sensor 1


B Using a thrubeam sensor

Angle measurement of bevel during welding

Angle measurement of drill tip

REFLECTIVE PROFILE THRUBEAM 2D DIMENSION


1 DISPLACEMENT SENSORS 2 MEASUREMENT SYSTEM

The profile shape across the laser line is obtained and angle is The angle of multiple specified points is measured from the image
measured from that shape. obtained by the 2D optical projection method.

Angle

Tilt from virtual line

Angle

Point of intersection
(X, Z coordinates)

POINT POINT

• The angle can be measured by one head. Outer diameter, step, and other parameters can also be measured at the same time as the
angles of multiple locations.
• The angle does not need to be computed externally.

13
How to Measure "Gap/Clearance"

Gap measurement of
touch panel

A Gap measurement of transparent target 1


B Gap measurement of roll

Gap measurement
between rolls

A Using a thrubeam sensor 2


B Using a 2D laser displacement sensor

Gap measurement of rolls


and blades

REFLECTIVE LASER THRUBEAM OPTICAL REFLECTIVE PROFILE


1 DISPLACEMENT SENSORS 2 MICROMETER 3 DISPLACEMENT SENSORS

Gaps of transparent objects can be measured. The gap size is found by measuring the width The laser is emitted to measure the width from
Light is emitted from the laser mounted above of the transmitted light. the obtained shape as a gap.
to achieve a reflection from each surface of the
transparent target.

No.1 surface
Transparent body
No.2 surface

Inflection point

Received-light wave pattern on


transparent body
t
256
No.1 No.2 No.3 No.4
224 surface surface surface surface
Gap
192
Gap
No.1 surface 160
Received light

128
No.2 surface
96

No.3 surface 64
Width
32
No.4 surface
0
Near Far

POINT POINT POINT

SELECTION OF THE SENSOR HEAD • Roll run-out and gap can be measured simultaneously. • Gaps can be measured correctly by the position correction
IS IMPORTANT function even if the target is tilted.
• Installation space is required on both the left and right
• Is a minimum gap or greater provided so that the two sides. • Both the gap and step at the end face can also be measured.
surfaces can be identified?
• Can measurement be performed stably even if the two
surfaces have different reflectance?
14
How to Measure "Meandering"

Meandering
measurement of
sheet

A Using a thrubeam sensor


1
B Using a 2D laser displacement sensor

Meandering measurement
of sheet

THRUBEAM OPTICAL REFLECTIVE PROFILE


1 MICROMETER 2 DISPLACEMENT SENSORS

The fluctuations of edge positions of the target passing The laser is emitted to measure the fluctuations of the edge
between sensors is measured. positions from the obtained shape.

Edge

Meandering amount

Time

POINT POINT

Even transparent targets can be measured stably by changing the detection threshold • Both meandering amount and height fluctuations can be measured simultaneously.
values of the target.
• Meandering can be measured with the sensors positioned away from the target.

15
How to Measure "Radius (R)/Inner Diameter"

Radius
measurement of
A Radius (R) measurement 1 drum seaming

B Inner diameter measurement

Inner diameter
measurement of

A Ring-shaped 2 bearing

B Cylindrical

Measuring inside
diameter of metal

3 pipe

REFLECTIVE PROFILE THRUBEAM 2D DIMENSION REFLECTIVE LASER


1 DISPLACEMENT SENSORS 2 MEASUREMENT SYSTEM 3 DISPLACEMENT SENSORS

The laser is emitted to measure radius (R) from The inner radius is measured from the image The optical axes of two heads are refracted
the obtained shape. obtained by the 2D optical projection method. 90° by a prism to measure inside apertures.

Center of aperture

The approximate R is
measured from the data in
the specified arc area. Diameter

The R of the free-form shape and the coordinates


of the center position of the specified point are
measured.

POINT POINT POINT

Radius (R) can be measured directly without having to The radius can be measured correctly using a position The optical axes of the two heads form a single line and
calculate the approximate R externally. correction function even if the target shifts out of the heads also pass through the centre of the aperture.
position. Rotate the target to measure equal pitch angle when
taking circular measurements.

16
How to Measure "Positioning"

Positioning of liquid
crystal substrate
A Measuring by thrubeam models 1
B Measuring by reflective models

Positioning of
high-precision stage
A Using a 1D laser
displacement sensor 2
B Using a 2D laser
displacement sensor

Positioning of board

THRUBEAM OPTICAL REFLECTIVE LASER REFLECTIVE PROFILE


1 MICROMETER 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

The edge positions of a fluctuating target The laser is emitted from the target movement The laser is emitted to measure the position of
passing between sensors is measured. direction to measure the distance to the target. the target from the obtained shape.

POINT POINT POINT

Even transparent targets can be measured by changing • Selective use of sensor heads enables long ranges to Position measurement can be performed with the sensor
the detection threshold values of the target. be measured and controlled. head installed perpendicular to the target's direction of
movement.
• Savings in space can be achieved by using a
microhead model displacement sensor.

17
How to Measure "Shapes - 2D"

Profile
measurement
of aluminum fin

A Using a 1D laser displacement sensor


1
B Using a 2D laser displacement sensor

Profile
measurement of
tire tread groove

REFLECTIVE LASER REFLECTIVE PROFILE


1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS

Shapes are measured by moving the target or sensor head to accu- The profile shape across the laser line is obtained. High-speed
mulate height data. sampling enables detection even when the target is moved.

LJ-V

Z axis
Xa
x is

POINT POINT

• Shapes can be measured at a precision higher than 2D laser displacement sensors. • The shape can be measured without moving the sensor head and target.
• A mechanism for moving the sensor head and target is required. • The shape of large targets can be measured by installing multiple sensor heads.
• Chattering when the sensor head or target is moved causes measurement error.

18
How to Measure "Shapes - 3D"

A Measuring inline 1
B Measuring offline

Profile measurement of conrod

Profile measurement of solder

REFLECTIVE PROFILE REFLECTIVE LASER DISPLACEMENT SENSOR +


1 DISPLACEMENT SENSORS 2 X-Y STAGE

A 3D shape can be constructed by acquiring and overlaying multiple 3D shapes can be measured to high precision by combining a 1D
profiles at locations throughout the part. laser displacement sensor with an X-Y stage.

Profile shape 3D shape

POINT POINT

The fastest sampling speed in the world achieves measurement of the entire shape inline. • Selective use of sensor heads enables shapes of various heights to be measured.
• The shape of transparent 3D objects also can be measured.

19
APPLICATION EXAMPLES

THICKNESS/WIDTH MEASUREMENT

Thickness measurement of motor core Thickness measurement of coating film Width measurement of rectangular wires
lamination

OUTER DIAMETER MEASUREMENT

Outer diameter measurement of wafers Outer diameter measurement of ultra thin Outer diameter measurement of feed rollers
wires

GAP/CLEARANCE MEASUREMENT

Gap measurement of doors Gap measurement of touch panel Gap measurement of rollers and blades

20
R U N - O U T / V I B R AT I O N / E C C E N T R I C I T Y M E A S U R E M E N T

Run-out measurement of disk rotors Run-out measurement of coating rolls Vibration measurement of speakers

HEIGHT/STEP MEASUREMENT

Height measurement of dispenser nozzles Lifting measurement of valve cotters Step/length measurement of injectors

WA R PA G E / F L AT N E S S M E A S U R E M E N T

Warpage measurement of building material Warpage measurement of glass substrates Warpage measurement of pressed parts
boards

21
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DIRECT SALES KEYENCE incorporates direct sales


rather than having distributors or sales
VALUE ADDED KEYENCE sells a broad range of
products, enabling comprehensive
NETWORK agents. Our technically trained sales PRODUCTS support for a wide range of equipment
engineers have extensive product across all industry sectors.
knowledge along with application and
industry experience. Find your solution efficiently and avoid
Customers can expect on-site support to having to consult with multiple vendors.
quickly solve applications, saving
invaluable time.

OTHER COMPANIES CONVENTIONAL SALES

Solution Providers The Customer

Company [A]
Hours Days Weeks Sensors
?
Company [B]
Laser Marking

Customer Distributor Sales Agent Sensor Company [C]


Manufacturer Barcode Readers

Onsite line operations stall while waiting for support


Company [D]
Vision Systems

You need direct access to the people that can provide you with quick and Consulting with and managing multiple solution providers is
practical solutions. troublesome and time consuming.

KEYENCE KEYENCE

DIRECT SUPPORT JUST ONE COMPANY TO CONTACT

Question
The Customer

Sensors Expert
Customer
Laser Marking Expert
The Right
Barcode Readers Expert
Solution
Vision Systems Expert
and more.

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22
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builders in many countries and can
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Company
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23
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