Instantaneous: Two Axis Measurement
Instantaneous: Two Axis Measurement
LJ-G Series
INSTANTANEOUS
TWO AXIS MEASUREMENT
2D D IS PL ACE M EN T S EN S O R
Ideal for high accuracy inline/offline measurements
High precision X and Z axis measurement provides an accurate reproduction of surface profiles.
An optimum mode can be selected from among 28 measurement modes to perform the simultaneous
measurement of height, width, cross-sectional area, feature position, and step-height. Furthermore, the system
provides and industry-leading simultaneous measurement of up to eight features.
More complex evaluations can be performed by performing onboard calculations based on extracted values.
sampling speed in its class, 3.8 ms. The LJ-G following the simple menu. Setup via a PC is HEADsetting Trigger settings
Head setting
Pos corr
lens is used to provide the highest accuracy
OUTsetting
HELP
4: Step Height
5: Width
2: Bottom height
Monitor
CA-MP81
Controller
LJ-G5001
2
LJ-G
S E R I E S
Long-range
Mid-range LJ-G200
LJ-G080 Z-axis 200 ± 48 mm
X-axis 62 mm
Z-axis 80 ± 23 mm Z-axis 2 μm
Ultra high X-axis 32 mm X-axis 20 μm
accuracy Z-axis 1 μm
X-axis 10 μm
Ultra high LJ-G030
accuracy Z-axis 30 ± 10 mm
Ultra high LJ-G015
X-axis 22 mm
Z-axis 1 μm
accuracy X-axis 5 μm
Z-axis 15 ± 2.6 mm
mirror reflection X-axis 7 mm
LJ-G015K Z-axis 0.2 μm
X-axis 2.5 μm
Z-axis 15 ± 2.3 mm
X-axis 7 mm
Z-axis 0.2 μm
X-axis 2.5 μm
3
Evolution of the 2D Laser Displacement Sensor
Being a world leader in laser displacement technology, KEYENCE employed the cutting edge concepts developed
for our 1D displacement products for use in a brand new 2D system. With the implementation of this technology we
are able to present a state-of-the-art system based on proven technology.
14.421 10.652
OUT01 GO OUT01 GO
Measure Measure
Program01 ZERO [mm] Program01 ZERO [mm]
30.000mm X : [ 5.000mm/div]
X : [ 10.000mm/div]
OK OUT1 GO
30.000mm X : [ 5.000mm/div]
X : [ 10.000mm/div]
OK OUT1 GO
OUT2 GO OUT2 GO
OUT3 GO Measured OUT3 GO
OUT4 GO point OUT4 GO
step
OUT5 GO OUT5 GO
OUT6 GO OUT6 GO
OUT7 GO OUT7 GO
OUT8 GO OUT8 GO
Reference
ALL OUT ALL OUT
4
LJ-G
S E R I E S
3.256 3.285
OUT01 GO OUT01 GO
Measure Measure
Program01 ZERO [mm] Program01 ZERO [mm]
30.000mm X : [ 5.000mm/div]
X : [ 10.000mm/div]
OK OUT1 GO
30.000mm X : [ 5.000mm/div]
X : [ 10.000mm/div]
OK OUT1 GO
OUT2 GO OUT2 GO
OUT3 GO OUT3 GO
OUT4 GO OUT4 GO
Position
OUT5 GO OUT5 GO
OUT6 GO OUT6 GO
OUT7 GO OUT7 GO
OUT8 GO OUT8 GO
ALL OUT Angle ALL OUT
5
Unique design for high-accuracy measurements
Cylindrical lens Semiconductor laser
PRINCIPLE OF MEASUREMENT
Conventional
Failed measurement
Low
Light receiving elements do not have The edges of the profile are not
enough sensitivity to cover the entire measured as the light intensity is
range of returned intensities. insufficient.
High
Light-receiving
E3-CMOS sensitivity range is
300 times larger
Target object
This function adjusts the sensitivity and laser power of the E3-CMOS to obtain suitable waveform data for each portion of the target that has a different
reflectance. The obtained data is merged as a single composite profile.
Target with an extremely different Sensitivity: Low Sensitivity: Medium Sensitivity: Highest Composite profile
reflectance for each portion
6
LJ-G
S E R I E S
Binary output
USB
I/O
RS-232C
Simple setting and analysis with a PC
Ethernet 2-head input Setting support software: LJ-Navigator (LJ-H1W)
With the optional software package, settings can be
easily configured and data can be saved and analysed
with a PC.
Conventional system
Signal input Waveform detection Profiling Measurement Waveform display Output
Process time
Trg interval
Internal
16 1024 × 2 65536 × 8
ALL OUT Process time
Trg interval
Process time
Trg interval
Process time
Handles up to 160 unique configurations 1024 profiles can be stored 65536 data points can be stored
7
Simple procedure for setup and
high-accuracy measurements
MEASUREMENT MENUS
HEIGHT WIDTH/POSITION
Measures height in a specified range. Measures width/position of a
designated feature.
Average
Bottom
Width
Measured point
Section area
Step
Reference surface
Reference point
Master profile
Angle
Position of
intersection Measurement value
(X, Z coordinate)
8
LJ-G
S E R I E S
ADJUSTMENT
range Measuring
range
provide stable measurements though
the targets are not perfectly arranged or
positioned.
Displacement of target Since the workpiece is not in the The measurement range moves
measurement range, a precise according to the displacement of the
measurement cannot be carried out. workpiece for precise measurement.
TILT CORRECTION
This simplifies the installation of the sensor
ADJUSTMENT
head and eliminates measurement errors.
9
“Easy setup” and “Data storage/analysis” via a PC
Sensor Head
USB
RS-232C
Ethernet
Controller
Easy setup
Just by selecting from an easy to use menu, anyone can easily configure the system with no training.
OUT settings
You can configure up to 8 discrete feature settings.
Data storage
Data storage Profile storage
You can view the measurement data stored in the controller. Data for all 8 Measured profile data is stored in the controller. The measurement value
outputs can be stored, the software provides easy to use overlay, zoom, of any point can be read from the stored data or exported in CSV format.
and various other data analysis functions. For a more detailed analysis,
data can be stored as a CSV file and viewed in Excel.
10
LJ-G
S E R I E S
SPECI FI CATI O N
Controller
Model LJ-G5001 LJ-G5001P
Sensor head compatibility Compatible
3
Number of connectable sensors 2 units max.*
Minimum display unit 0.1 μm*1., 0.001 mm2, 0.01°
Display
Maximum display range ±99999.9 mm, ±999999 mm2, ±99999.9°
Laser remote interlock input Non-voltage input Non-voltage input
Input Trigger input For sensor head A, non-voltage input For sensor head A, voltage input
terminal Timing 1 input
block Auto-zero 1 input Non-voltage input Voltage input
Reset input
Analogue voltage output ±10 V x 2 outputs, out put impedance: 100 Ω
Total judgment output NPN open-collector output PNP open-collector output
Output
Error output NPN open-collector output (N.C.) PNP open-collector output (N.C.)
terminal
Process output NPN open-collector output PNP open-collector output
block
Trigger input enable output
For sensor head A, NPN open-collector output For sensor head A, PNP open-collector output
Adjusted error output
Timing 2 input
Non-voltage input Voltage input
Auto-zero 2 input
Trigger input For sensor head B, non-voltage input For sensor head B, voltage input
Program switching input Non-voltage input, 4 inputs Voltage input, 4 inputs
Memory card save input Non-voltage input Voltage input
Expansion Laser-Off input For sensor head A/B, non-voltage input For sensor head A/B, voltage input
connector 3-level judgment output: OUT1 to OUT8, total judgment output 3-level judgment output: OUT1 to OUT8, total judgment output
Judgment/Binary output*2 Binary output: OUT1 to OUT8 measured data output (21 bits) Binary output: OUT1 to OUT8 measured data output (21 bits)
NPN open-collector output PNP open-collector output
Strobe output NPN open-collector output PNP open-collector output
Trigger input enable output
For sensor head B, non-voltage input For sensor head B, PNP open-collector output
Adjusted error output
Analogue RGB monitor output SVGA (800 x 600 pixels)
RS-232C interface Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)
USB interface In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)
Ethernet interface 100BASE-TX/10BASE-T
Memory card Compatible with NR-M1G (1 GB). (with FAT32)
Sensor heads calculation, Profile adjustment, Filter, Smoothing, Averaging, Position adjustment, OUT name change, Measurement mode selection (Height, position, gap, width, centre position,
section area, intersection, angle, profile comparison, profile tracking), Scaling, Average, Measurement, Measured value alarm, Tolerance setting, Auto-zero, Storage (data/profile), Memory
Major functions
card saving, Program memory, Trigger mode change, Mutual interference prevention, Measuring range change, Calibration, Laser light adjustment, Sampling time setting, Mask, Profile alarm
setting, Inclination adjustment, Height adjustment, Display language switch, Setting support software connection, Trigger pitch/Measuring time display, etc.
Power supply voltage 24 VDC ± 10%, Ripple: 10% (P to P) or less
Ratings
Current consumption 800 mA or less with 1 sensor head/1 A or less with two sensor heads
Environmental Ambient temperature 0 to 50°C
resistance Relative humidity 35 to 85% (No condensation)
Weight Approx. 1050 g
*1. When LJ-G015 or LJ-G015K is connected only. When other sensor heads are connected, the minimum display unit is 1 μm.
*2. Time-sharing output of judgment results or binary measured data.
The rating of the NPN open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max.
The rating of the PNP open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max.
The rating of the non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 1 V or less ON voltage, 1.0 mA or less OFF current)
The rating of the voltage input: 26.4 V maximum rating, 10.8 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 26.4 V maximum rating, 10.8 V or less ON voltage, 1.0 mA or less OFF current)
*3. When mounting two heads, make sure that head A and B are of the same type. Measurement is not possible if two different types of heads are connected.
Sensor head
Model LJ-G015K LJ-G015 LJ-G030 LJ-G080 LJ-G200
Type Specular reflective Diffuse reflective
Reference distance 15 mm 30 mm 80 mm 200 mm
Z-axis (Height) ±2.3 mm ±2.6 mm ±10 mm ±23 mm ±48 mm
Measuring Near 6.5 mm 20 mm 25 mm 51 mm
X-axis
range Reference distance 7.0 mm 22 mm 32 mm 62 mm
(Width)
Far 7.5 mm 25 mm 39 mm 73 mm
Red semiconductor laser
Wavelength 650 nm (Visible light) 655 nm (Visible light)
Light source
Laser Class Class 2 Laser Product (IEC60825-1). Class II Laser Product (FDA (CDRH) Part 1040.10)
Output 0.95 mW
Spot diameter (at reference distance) Approx. 32 μm x 12 mm Approx. 40 μm x 25 mm Approx. 80 μm x 46 mm Approx. 180 μm x 70 mm
Z-axis (Height)*2 0.2 μm 1 μm 1 μm 2 μm
Repeatability*1
X-axis (Width)*3 2.5 μm 5 μm 10 μm 20 μm
Linearity Z-axis (Height)*2 ±0.1% of F.S.
Sampling frequency (Trigger pitch)*4 3.8 ms
Temperature characteristics 0.02% of F.S./°C
Enclosure rating IP67 (IEC60529)
Ambient illumination*5 Incandescent lamp or fluorescent lamp: 5,000 lux max.
Environmental
Ambient temperature 0 to 50°C
resistance
Relative humidity 35 to 85% (No condensation)
Vibration 10 to 55 Hz, multiple amplitude 1.5 mm, two hours in each direction of X, Y and Z
Material Aluminium
Weight Approx. 260 g Approx. 290 g Approx. 350 g Approx. 480 g
*1. The value obtained after 64 times Averaging at the reference distance.
*2. The target is KEYENCE standard object. (White diffusing material). The value is the average of the widths in the Height mode.
*3. The target is ø10 mm pin gauge. The value is the edge in the Position mode after 16 times of the Smoothing.
*4. When the measuring range is the minimum in the initial setting and the smoothing is set to 1.
*5. The illumination on the receiver of the sensor head when targeting an illuminated white paper.
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CO M P O N EN T LIST SELECTI O N G U I D E
Sensor Head
Type Ultra high-accuracy specular target model Ultra high-accuracy model High-accuracy model
Model LJ-G015K LJ-G015 LJ-G030
(mm)
250
200
150
100
50
20 mm width: 20 mm
Measuring range
Measuring range 12.7 mm Measuring range 12.4 mm 30 mm width: 22 mm
15 mm width: 7 mm 15 mm width: 7 mm 30±10 mm 40 mm width: 25 mm
15±2.3 mm 15±2.6 mm
17.3 mm 17.6 mm
Controller Monitor
Controllers
12
LJ-G
S E R I E S
152 mm width: 51 mm
80 ± 23 mm 200 ± 48 mm
32 mm 62 mm
1 µm 2 µm
10 µm 20 µm
13
Dimensional Drawings
Sensor Heads
Unit: mm
ø14
55
LJ-G015K LJ-G015
82.6
34
2 x ø4.4 19.3 20.3
500
(mounting hole)
ø7
9.5
34
2 x ø4.4 68 9.9
(mounting hole) 22
0.7
43.5
82.8
25° 25°
19.5
20.8
48
50°
70
19.5 50°
2.3
15
6.5
7 19.5
2.3
18
1.3
7.5 Z-axis measurement range
15
2.6
19.5
6.5
X-axis measurement range
2.6
7
ø14 ø14
8
7.5 Z-axis measurement range
X-axis measurement range
55 55
Sensor head Sensor head
LJ-G030 LJ-G080
500 500
ø7 ø7
88 8.9 2 x ø4.4 88
2 x ø4.4 42 8.9
34 (mounting hole) 23
(mounting hole)
9
0.7 23 0.7
10
70
70
45° 62
62
4 2
19.5 9
4 24 9
20 30 25°
10 80
22
10 ø14 25
25 Z-axis measurement range
23
32
X-axis measurement range 55
23
Sensor head
39 Z-axis measurement range
LJ-G200 500
ø7 X-axis measurement range
3 x ø4.4 138 4.2
38 114.5
(mounting hole)
27
0.7
76
68
4 9
19
25°
200
51
48
62
48
14
LJ-G
S E R I E S
Controller
Unit: mm
35.9 11.5
153
83.3
65.3
(65) 117
6
4 x M4
Depth: 6
60
80 17
Monitor
Unit: mm
156
172.4 6 34 219.5
+1
0
Effective
display area
Stand
OP-42278
230
236
30°
2-
21.5 66.5
R2
5
.5
111
30°
8
130
210
15
SIN GLE PO INT L ASER D ISPL ACEM ENT SENSO R
Ultra high speed/high accuracy laser displacement sensor
LK-G5000 Series
TRANSPARENT/MIRROR TARGETS
COARSE TARGETS
FINE TARGETS
SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.
The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. WW1-1039
Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies. Unauthorised reproduction of this catalogue is strictly prohibited.
Copyright © 2010 KEYENCE CORPORATION. All rights reserved. LJG-WW-C2-GB 1059-5 600974