REASONS WHY OPTICAL
COMPARATORS ARE USED
FOR INLINE DIMENSIONAL
MEASUREMENTS
Conventionally, the most common method for inline dimensional inspections has been to perform
measurements with a camera (vision system) or a laser scan micrometer
(as an alternative to performing scans, sometimes multiple devices are installed).
However, together with the increased strictness of inspection standards in recent years, there has been
an increase in cases in which inspections cannot be performed using conventional methods.
KEYENCE is proud to present the world’s first inline optical comparator designed to meet the need
for inline dimensional measurement performed with high accuracy in order to achieve 100% inspection.
Inline Optical Comparator measurement principle
The optical system uses a Green LED and telecentric lensing to apply uniform light onto the target.
This light projects an image on the 2D CMOS and the edges between the light and dark areas are detected to allow
measurement at multiple points. Moreover, the motor-less structure and longer life light source provide high durability.
The silhouette of the target is
obtained when it passes through
the measuring range indicated
by the green cylindrical area.
Specifying a desired point on
the silhouette determines the
measured value at that point.
Telecentric receiving lens Light transmitting lens
Mirror Mirror
Target Lens
Lens
Diffusion unit
Receiver Transmitter
CMOS LED
2
2D Applications and Conventional Methods
Measuring the outer diameter at multiple locations P. 4
CONVENTIONAL METHOD 1 Scanning with a laser scan micrometer
CONVENTIONAL METHOD 2 Using multiple sensor heads with a
laser scan micrometer
TM-3000 Series
Measuring the outer diameter of a Measuring the outer Measuring the outer diameter
stepped shaft diameter of an injector of an ampule
Measuring width, interval, position,
and other dimensions at multiple locations P. 6
CONVENTIONAL METHOD 3 Using a camera (image sensor)
TM-3000 Series
Checking the position Measuring the dimensions Measuring the dimensions
of a blade of a pressed part of an engine valve
3
KEYENCE’s Technology and Problems with Conventional Methods
CONVENTIONAL METHOD 1
Scanning with a laser scan micrometer
To measure the outer diameter at multiple points on the target,
the laser scan micrometer must scan the target while it is
moving.
Problems
• If the stage is unstable, the accuracy decreases.
• If the target is inclined, the measured value becomes larger.
• Scanning results in a long cycle time.
CONVENTIONAL METHOD 2
Installing multiple sensor heads of
a laser scan micrometer
To measure the outer diameter at multiple points on the target,
multiple sensor heads of a laser scan micrometer were installed.
Problems
• Increasingthe number of sensor heads leads to an increase in cost.
• This
method is not suited to small parts due to the area between
two sensor heads where measurements are not possible.
PRINCIPLES OF THE CONVENTIONAL LASER SCAN TYPE
A semiconductor laser beam is applied onto a polygon mirror which is rotated by a motor to scan the
measuring range. The time in which the laser beam is interrupted by the target is measured to obtain
the dimension of the target.
Structure Principle Light receiving lens Collimator lens (Fθ lens)
Light-receiving
element Reflecting
Light-receiving
mirror
element
Semiconductor
Motor laser
Target
Edge detection
Polygon mirror Polygon mirror
Motor
Receiver Light-receiving Transmitter
element (for synchronisation)
4
Solutions provided by the TM-3000 Series
The TM-3000 Series measures dimensions on the basis of a 2D image.
M easures with high accuracy even when the target is inclined
Since the TM-3000 Series measures outer
diameter based on a 2D image, information
on the target inclination is obtained.
Using this information, the TM-3000 Series
can measure outer diameters while correcting
the inclination automatically.
C ycle time reductions due to simultaneous measurements of multiple points
Simultaneous measurements of up to 16 items
(from among those shown below) can be
performed on the obtained 2D data.
Outer diameter Step Width Angle
Distance/intersection point Height/position/coordinates
Radius/roundness Pitch
N arrow interval dimension measurements also supported
Measured values can be obtained just by Narrow intervals
specifying an area on the target section in the
captured 2D data.
This enables narrow interval and small part
dimension measurements with high accuracy.
5
KEYENCE’s Technology and Problems with Conventional Methods
CONVENTIONAL METHOD 3
Camera (image sensor)
The target is illuminated and images captured with a camera in order to
measure the dimensions.
Generally speaking, distortion exists in an image when it is captured
Problems 1 with a lens. If such an image is transmitted and measured, the
distortion leads to measurement errors, so the operator has to correct
• Accuracy cannot be guaranteed.
for the distortion in order to perform accurate measurements. The
• Installation
and adjustments are
distortion characteristics vary from lens to lens, so corrections must
difficult.
be performed for each camera. Also, if the camera is misaligned,
the corrections must be performed again after aligning the camera.
In addition, measured values are not traceable to a known standard.
G rid object
Capture Distortion correction
Performed by
the operator
Problems 2
• Techniques
required for measurement with high accuracy.
L ighting
If the incident light is not collimated, light at an angle enters the camera (as shown in the upper-right
figure), which makes it difficult to measure dimensions accurately. Two countermeasures are
effective: (1) increasing the distance to the light source and (2) masking the light.
(1) Increasing the distance (2) Masking the light
to the light source reduces the effect
reduces the effect of of wraparound
wraparound light. light.
L ight-receiving side
The telecentric property is an important element in determining the measurement accuracy.
For general lenses, when the object is far away from the lens, a small image forms. Conversely,
when the object is close to the lens, a large image forms. Consequently, if the distance from the lens
to the target is not uniform, measurements cannot be performed correctly.
With telecentric lenses, even if the distance from the lens to the target changes, the size of the
image does not change, allowing for correct measurements.
6
Solutions provided by the TM-3000 Series
The TM-3000 Series can be delivered with
“calibration certificates!” (From the left: calibration certificate,
inspection record, traceability system diagram)
T olerance when attaching sensor heads
Lens distortion can be eliminated by mounting the lighting (transmitter) and the receiver on an
aluminium base. Even if these devices are installed without a fixed base, the accuracy does not
worsen provided the sensor heads are mounted within the following ranges.
Parallel position misalignment Inclined position misalignment
Receiver Transmitter Receiver Transmitter Receiver Transmitter
Within ±1 mm Within ±0.1° Within ±0.1°
Within ±1 mm Within ±0.1° Within ±0.1°
E quipped with an HUD (High Uniform Diffusion) unit
Collimated light is produced without any unevenness by spreading
LED light uniformly across the entire range.
*HUD unit = High Uniform Diffusion unit
E quipped with a dual telecentric optical system
A dual telecentric optical system is used to receive
collimated light*1 and to ensure that collimated light is
Without a dual telecentric optical system
used*2 for imaging on the light-receiving element. Even if
If the light-receiving element moves due to
the target position or lens position changes, the size of the thermal expansion, the size of the formed image
image that formed on the light-receiving element does not changes.
change, which enables measurements with high accuracy.
Light-receiving element
With a dual telecentric optical system
Even if the light-receiving element moves due to
thermal expansion, the size of the formed image
does not change. To enable measurements with
high accuracy, a dual telecentric optical system is
required.
*1 Collimated light is received. *2 Collimated light is used to form the image.
7
Simultaneous Outer Diameter/Step Measurements of Multiple Points
High-speed 2D Optical Micrometer TM-3000 Series
HEAD CONTROLLER
ø65 mm type head
Measurement range ø65 mm
TM-065
Smallest detectable object 0.5 mm
Repeatability ±0.2 μm
Measurement accuracy ±3 μm
Setting support software
TM-H1
Controller
TM-3001(P)
ø40 mm type head
Measurement range ø40 mm
TM-040
Smallest detectable object 0.3 mm
Repeatability ±0.15 μm Console (accessory) USB cable
Measurement accuracy ±2 μm OP-82125 OP-66844
MONITOR
ø6 mm type head
Measurement range ø6 mm
TM-006
Smallest detectable object 0.04 mm
Repeatability ±0.5 μm
Measurement accuracy ±0.06 μm
8.4" LCD colour monitor Monitor stand
CA-MP81 OP-42278
SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.
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The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. WW11-1086
Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies.
Copyright (c) 2015 KEYENCE CORPORATION. All rights reserved. TMReasonInline-WW-EN-GB 1126-4 600G76
