Xu et al., 2000 - Google Patents
Process development and fabrication of application-specific microvalvesXu et al., 2000
- Document ID
- 11329732761567131672
- Author
- Xu B
- Castracane J
- Geer R
- Yao Y
- Altemus B
- Publication year
- Publication venue
- Micromachining and Microfabrication Process Technology VI
External Links
Snippet
Process Development and Fabrication of Application Specific Micro-Valves Page 1 Process
Development and Fabrication of Application Specific Micro-Valves Bai Xu*, James Castracane,
Robert Geer, Yahong Yao and Bruce Altemus New York State Center for Advanced Thin Film …
- 238000004519 manufacturing process 0 title abstract description 23
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