Carlen et al., 2000 - Google Patents
Paraffin actuated surface micromachined valvesCarlen et al., 2000
View PDF- Document ID
- 3916780500971313865
- Author
- Carlen E
- Mastrangelo C
- Publication year
- Publication venue
- Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No. 00CH36308)
External Links
Snippet
A new, active, normally-open blocking microvalve that uses the thermal expansion of a sealed, thin paraffin patch for actuation has been fabricated and tested. The entire structure is batch-fabricated by surface micromachining the actuator and channel materials on top of a …
- 239000012188 paraffin wax 0 title abstract description 32
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated micro-fluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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