WO2020138209A1 - 配線基体、電子部品収納用パッケージおよび電子装置 - Google Patents
配線基体、電子部品収納用パッケージおよび電子装置 Download PDFInfo
- Publication number
- WO2020138209A1 WO2020138209A1 PCT/JP2019/050927 JP2019050927W WO2020138209A1 WO 2020138209 A1 WO2020138209 A1 WO 2020138209A1 JP 2019050927 W JP2019050927 W JP 2019050927W WO 2020138209 A1 WO2020138209 A1 WO 2020138209A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- recess
- wiring substrate
- conductor
- base
- terminal
- Prior art date
Links
- 239000004020 conductor Substances 0.000 claims description 118
- 239000000758 substrate Substances 0.000 claims description 86
- 238000003860 storage Methods 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 18
- 238000005219 brazing Methods 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 9
- 239000003989 dielectric material Substances 0.000 description 9
- 229910052750 molybdenum Inorganic materials 0.000 description 9
- 239000011733 molybdenum Substances 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 229910052721 tungsten Inorganic materials 0.000 description 9
- 239000010937 tungsten Substances 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 5
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 230000008054 signal transmission Effects 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- 229910001182 Mo alloy Inorganic materials 0.000 description 2
- 229910001080 W alloy Inorganic materials 0.000 description 2
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 2
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- 239000011651 chromium Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 2
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
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- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
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- 239000000945 filler Substances 0.000 description 1
- 239000006112 glass ceramic composition Substances 0.000 description 1
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- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/043—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
- H01L23/049—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body the other leads being perpendicular to the base
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
Definitions
- the present disclosure relates to a wiring substrate, a package for storing electronic components, and an electronic device.
- Patent Document 1 describes that an electronic device is composed of a wiring substrate and electronic components such as an LD (Laser Diode) or a PD (Photo Diode).
- LD Laser Diode
- PD Photo Diode
- a wiring substrate includes a substrate and at least one terminal.
- the base body has a first concave portion that is open on the upper surface.
- At least one terminal extends from the first end toward the second end and is located in the first recess.
- the terminal has a first end located inside the first recess and a second end located outside the first recess, and has a diameter-expanded portion inside the first recess.
- An electronic component storage package includes a wiring base and a frame.
- the frame portion is located on the lower surface opposite to the upper surface of the base body.
- An electronic device includes an electronic component and an external board.
- the electronic component is mounted on the lower surface of the base.
- the external substrate has a through hole corresponding to the terminal.
- FIG. 3 is a top perspective view of a wiring substrate according to an embodiment of the present disclosure.
- FIG. 3 is a top perspective view of a wiring substrate according to an embodiment of the present disclosure.
- FIG. 3 is a top perspective view of an electronic component storage package according to an embodiment of the present disclosure.
- FIG. 3 is a top perspective view of an electronic component storage package according to an embodiment of the present disclosure.
- FIG. 3 is a bottom perspective view of an electronic component storage package according to an embodiment of the present disclosure.
- FIG. 3 is a side view of the electronic component storage package according to the embodiment of the present disclosure.
- FIG. 3 is a top perspective view in which a wiring base and an external substrate according to an embodiment of the present disclosure are connected.
- FIG. 3 is a top perspective view in which an electronic component storing package and an external substrate according to an embodiment of the present disclosure are connected.
- FIG. 6 is a top perspective view of an external substrate connected to the electronic component storage package according to the embodiment of the present disclosure.
- the wiring substrate 1 according to an embodiment of the present disclosure will be described below with reference to the drawings.
- the electronic device 100 includes an electronic component storage package 10.
- the electronic component storage package 10 includes a wiring substrate 1.
- the wiring base 1 includes a base 2 and terminals 4.
- the wiring base 1 is configured by arranging the first recess 21, the first signal conductor 3, the terminal 4, and the like on the upper surface of the base 2.
- the base body 2 may have, for example, a circular shape when viewed from above.
- the radius may be 0.5 mm to 5 mm and the height may be 1 mm to 10 mm.
- the circular shape may include a shape in which a part of a circle is cut off when viewed from above.
- the base body 2 may have a rectangular shape when viewed from above.
- the size may be 1 mm ⁇ 1 mm to 10 mm ⁇ 10 mm.
- the base body 2 may be made of a dielectric material. Also.
- the base 2 may be formed by stacking dielectric materials. In addition, in this specification, a laminate of dielectric materials may be referred to as an insulating layer.
- the dielectric material includes, for example, a ceramic material such as an aluminum oxide sintered body, a mullite sintered body, a silicon carbide sintered body, an aluminum nitride sintered body or a silicon nitride sintered body, or a glass ceramic material. Etc. can be used.
- the first recess 21 is located on the upper surface of the base 2.
- the first recess 21 is open on the upper surface.
- the first recess 21 may be formed by forming a recess from the upper surface of the base body 2 toward the lower surface opposite to the upper surface by cutting a molded body or drilling a fired body. Further, when the base body 2 is formed by stacking the dielectric material, even if the first concave portion 21 is formed by cutting out a part of a plurality of dielectrics at the place where the first concave portion 21 is located and stacking them. Good.
- the shape of the first recess 21 may be, for example, circular when viewed from above.
- the size of the radius may be 0.1 mm to 1 mm.
- the first recess 21 may have a rectangular shape or an elliptical shape in which the corners of the rectangular shape are curved when viewed from above.
- the size may be 0.2 mm ⁇ 1 mm to 2 mm ⁇ 10 mm.
- the radius of curvature of the curved portion may be 0.1 mm to 1 mm.
- the first recess 21 may have, for example, a rectangular shape when viewed in a cross section in the direction from the upper surface to the lower surface.
- the depth of the first recess 21 in the direction from the upper surface to the lower surface may be 0.1 mm to 3 mm.
- the first recess 21 may have a taper shape, an inverse taper shape, or a step shape when viewed in a cross section in a direction from the upper surface to the lower surface.
- the terminal 4 has a first end 41 and a second end 42.
- the terminal 4 extends from the first end 41 toward the second end 42.
- the terminal 4 may be rod-shaped.
- the terminal 4 may be located so as to extend in the direction perpendicular to the upper surface of the base 2. Note that the term "vertical" in this specification includes not only the vertical direction but also a case where the vertical direction is slightly inclined due to manufacturing errors. The error may be in the range of -0.1° to +0.1°.
- the terminal 4 has a first end 41 located inside the first recess 21 and a second end 42 located outside the first recess 21, as shown in FIG. 11 or 12.
- the terminal 4 has an enlarged diameter portion 43 in the first recess 21.
- a joining material such as a brazing material applied to the enlarged diameter portion 43 when the terminal 4 is joined in the first concave portion 21. Since the contact area with the wiring substrate 1 increases, the bonding strength between the external substrate 8 such as FPC (Flexible Printed Circuits) and the wiring substrate 1 increases.
- the external substrate 8 and the wiring substrate 1 are connected, since the enlarged diameter portion 43 does not protrude from the opening of the first recess 21, the external substrate 8 does not float (float) from the wiring substrate 1. Excellent connection reliability.
- the first recess 21 may be a brazing material reservoir of the brazing material not used for joining. Therefore, it becomes difficult for the brazing material to protrude onto the upper surface of the wiring substrate 1. As a result, it is possible to reduce the floating of the external substrate 8 from the wiring substrate 1 due to the brazing filler metal that has overflowed.
- the diameter of a portion of the first recess 21 above the opening and close to the opening is used as a reference, and a portion having a diameter larger than that portion is defined as the enlarged diameter portion 43.
- the expanded diameter portion 43 may extend from the first end 41 toward the opening of the first recess 21.
- the expanded diameter portion 43 may include the first end 41.
- the area of the diameter of the expanded diameter portion 43 may be the same as the area of the diameter of the first end 41.
- the area of the diameter of the expanded diameter portion 43 is the area of the cross section orthogonal to the axis of the terminal 4.
- the area of the diameter of the first end 41 is the surface area of the first end 41. Since the area of the diameter of the enlarged diameter portion 43 is the same as the area of the diameter of the first end 41, the joint strength with the connecting conductor 5 can be increased.
- the diameter area of the expanded diameter portion 43 is S1
- the diameter area of the first end 41 is S2.
- the expanded diameter portion 43 may extend from between the first end 41 and the second portion 42 toward the opening of the first recess 21.
- the expanded diameter portion 43 may not include the first end 41.
- the area of the diameter of the expanded diameter portion 43 may be larger than the area of the diameter of the first end 41.
- the length of the terminal 4 may be 1 mm to 10 mm.
- the radius of the expanded diameter portion 43 may be 0.1 mm to 0.8 mm, and the radius other than the expanded diameter portion 43 is 0.05 mm to 0.5 mm. May be
- the terminal 4 may be a metal including iron, for example.
- the terminal 4 is electrically connected to an external power source and supplies electricity to the mounted electronic component 101.
- a plurality of terminals 4 may be provided depending on the design of the wiring substrate 1. When there are a plurality of terminals 4, some terminals 4 may be electrically connected to each other, or each terminal 4 may not be electrically connected to each other.
- the expanded diameter portion 43 may have a stepped shape when viewed in cross section including the axis of the terminal.
- the step is located below the opening of the first recess 21 or in the lower surface direction than the opening. In other words, the expanded diameter portion 43 does not project upward from the opening. Since the expanded diameter portion 43 is step-shaped, it becomes easy to connect the external substrate 8 and the expanded diameter portion 43 of the first recess 21 with a brazing material or the like. As a result, the connection between the terminal 4 and the base 2 becomes more stable.
- a plurality of terminals 4 are located in the first recess 21.
- a plurality of first recesses 21 may be located on the upper surface of the base body 2, and a plurality of terminals 4 may be located in each of the plurality of first recesses 21.
- the connecting conductor 5 is located in the first recess 21 and is connected to the first end 41.
- the connection conductors 5 are located in the first recess 21 by the number of the plurality of terminals 4, and electrically correspond to each of the plurality of terminals 4 in a one-to-one correspondence.
- An insulating layer may be located in a region where the terminal 4 and the connecting conductor 5 are not located.
- the connection conductor 5 may be used, for example, to connect the base 2 and the terminal 4 with a bonding material such as a brazing material.
- the connection conductor 5 may be located so as to surround the outer circumference of the expanded diameter portion 43 when viewed from above.
- the terminal 4 can be easily joined to the connecting conductor 5, and at the time of joining the terminal 4 and the external substrate 8 with a brazing material, Since the brazing material that has flowed into the recess 21 can be received, it is possible to reduce the occurrence of a short circuit between the terminals 4.
- the shape of the connecting conductor 5 may be, for example, rectangular or circular when viewed from above.
- the size may be 0.2 mm ⁇ 0.2 mm to 2 mm ⁇ 2 mm.
- the size of the radius may be 0.1 mm to 1 mm.
- the connecting conductor 5 is made of, for example, a metal material such as gold, silver, copper, nickel, tungsten, molybdenum, or manganese, and is co-fired in the form of a metallized layer or a plated layer on the surface of the uppermost insulating layer, or a metal. It may be plated.
- one terminal 4 is located in the first recess 21.
- the shape of the connection conductor 5 may correspond to the shape of the first recess 21. Since the shape of the connection conductor 5 corresponds to the shape of the first recess 21, the connection region between the base 2 and the terminal 4 can be widened, and as a result, the bonding strength between the terminal 4 and the connection conductor 5 can be increased. Can be raised.
- the first signal conductor 3 is located on the upper surface of the base 2 and extends in the first direction.
- the first signal conductor 3 is separated from the first recess 21 when viewed from above.
- the shape of the first signal conductor 3 may be, for example, a rectangular shape when viewed from above. When the shape of the first signal conductor 3 in a top view is rectangular, the width may be 0.05 mm to 1 mm and the length may be 0.5 mm to 5 mm.
- the first signal conductor 3 may include a metal material such as gold, silver, copper, nickel, tungsten, molybdenum, or manganese.
- the first signal conductor 3 may be co-fired or metal-plated on the upper surface of the substrate 2 in the form of a metallized layer, a plated layer, or the like. Further, the first signal conductor 3 may be located so as to extend in a substantially vertical direction with respect to the upper surface of the base 2. The first signal conductor 3 can be used to transmit a high frequency signal belonging to, for example, the 10 to 60 GHz band.
- the first signal conductors 3 are a pair of first signal conductors 3 and may be positioned in parallel with each other. Since the pair of first signal conductors 3 are positioned in parallel, it is possible to reduce transmission loss when transmitting a high frequency signal.
- a pair of first ground conductors 6 extending in the first direction and sandwiching at least a part of the first signal conductor 3 may be further provided.
- the arrangement of the first signal conductor 3 and the first ground conductor 6 becomes a coplanar structure. Since the first signal conductor 3 and the first ground conductor 6 are arranged in a coplanar structure, a high frequency signal can be smoothly transmitted.
- the first ground conductor 6 is made of, for example, a metal material such as gold, silver, copper, nickel, tungsten, molybdenum, or manganese, and is co-fired on the surface of the uppermost insulating layer in the form of a metallized layer or a plated layer. Alternatively, it may be metal-plated.
- the second ground conductor 61 may be located closer to the center of the upper surface than the first signal conductor 3 in a top view.
- the second ground conductor 61 is connected to the pair of first ground conductors 6.
- the second ground conductor 61 widens the area of the wiring substrate 1 that functions as a ground. As a result, the transmission of the high frequency signal becomes more stable.
- the second ground conductor 61 is made of a metal material such as gold, silver, copper, nickel, tungsten, molybdenum, or manganese, and is co-fired on the surface of the uppermost insulating layer in the form of a metallized layer or a plated layer. It may be metal-plated.
- the first ground conductor 6 does not have to be located on the outer periphery of the base body 2 and beyond the first signal conductor 3 in a top view. Since the first ground conductor 6 is not located on the outer periphery of the base 2 and beyond the first signal conductor 3, the second signal conductor 82 and the first ground are connected when the external substrate 8 and the wiring base 1 are connected. Occurrence of a short circuit due to contact with the conductor 6 can be reduced.
- the tip of the first signal conductor 3 and the outer periphery of the substrate 2 refer to the area A in FIGS. 1 to 4 of the drawings.
- the first ground conductor 6 may be electrically connected to the ground conductor located inside the base 2 by the via 22. Since the first ground conductor 6 is connected to the ground conductor located inside the base 2 through the via 22, the region functioning as the ground can be widened.
- the second ground conductor 61 may be electrically connected to the ground conductor located inside the base 2 by the via 22. By connecting the second ground conductor 61 to the ground conductor located inside the base 2 through the via 22, it is possible to widen the region functioning as the ground.
- the base 2 may further have a second recess 7 located on the outer periphery of the base and beyond the first ground conductor.
- the second concave portion 7 is formed from the upper surface to the side surface, and may be continuously opened on the upper surface and the side surface.
- the base 2 may have a plurality of second recesses 7.
- the second recess 7 may be formed by cutting the base 2 from the upper surface to the side surface by cutting or the like.
- the second recess 7 is formed by cutting a part of a plurality of dielectrics at a position where the second recess 7 is located and stacking the dielectrics. It may be formed.
- the second recess 7 may have, for example, a circular shape, a rectangular shape, or an elliptical shape when viewed from above.
- the size of the radius may be 0.1 mm to 1 mm.
- the size may be 0.2 mm ⁇ 0.2 mm to 2 mm ⁇ 10 mm.
- the third ground conductor 71 may be located on the inner surface of the second recess 7.
- the third ground conductor 71 may be electrically connected to a ground conductor located inside the base 2, for example. Since the third ground conductor 71 is electrically connected to the ground conductor located inside the base body 2, it is possible to widen the region functioning as the ground. As a result, the ground of the high frequency signal transmitted by the first signal conductor 3 is strengthened, and the high frequency characteristics can be improved.
- the third ground conductor 71 is made of a metal material such as gold, silver, copper, nickel, tungsten, molybdenum, or manganese, and is co-fired on the surface of the uppermost insulating layer in the form of a metallized layer or a plated layer. Alternatively, it may be metal-plated.
- the third ground conductor 71 may be electrically connected to the first ground conductor 6 while being connected to the first ground conductor 6. As a result, the region functioning as the ground can be further widened.
- the base body 2 has, for example, a plurality of insulating layers containing an aluminum oxide sintered body, it is manufactured as follows. First, a slurry is prepared by adding and mixing an appropriate organic binder, a solvent and the like to raw material powders such as aluminum oxide and silicon oxide. Next, the formed slurry is subjected to a forming method such as a doctor blade method and formed into a sheet shape to form a plurality of ceramic green sheets.
- notches serving as the first recess 21 and the second recess 7 may be provided at predetermined positions of the ceramic green sheet. Then, a plurality of ceramic green sheets are laminated and pressure-bonded. Finally, the laminated ceramic green sheets are fired in a reducing atmosphere at a temperature of about 1600° C., and are cut or punched to have an appropriate shape to produce the base 2 having a desired shape.
- the first signal conductor 3, the connection conductor 5, the first ground conductor 6, the second ground conductor 61, and the third ground conductor 71 are formed of, for example, a metallized layer containing a high melting point metal such as tungsten, molybdenum, or manganese.
- a metal paste is prepared by kneading a high melting point metal powder together with an organic solvent and a binder. The metal paste is printed on a predetermined portion of the ceramic green sheet by a method such as screen printing.
- the ceramic green sheets printed with the metal paste are stacked, pressure-bonded, and fired.
- the metallized layer is deposited on the base body 2 as the first signal conductor 3, the connection conductor 5, the first ground conductor 6, the second ground conductor 61, and the third ground conductor 71.
- the surfaces of the first signal conductor 3, the connection conductor 5, the first ground conductor 6, the second ground conductor 61, and the third ground conductor 71 may be nickel-plated or gold-plated.
- the wettability of a bonding material such as a brazing material on the surface of the metal layer can be improved.
- the bondability of the external substrate 8 connected to the metal layer can be improved, and the corrosion resistance or weather resistance can be improved.
- through holes are provided at predetermined positions of a plurality of ceramic green sheets, and the metal paste is filled in the through holes. Then, the ceramic green sheets are laminated, pressed, and fired.
- the through holes may be provided by, for example, mechanical punching using a metal pin or drilling such as laser light.
- a means such as vacuum suction may be used together to facilitate the filling of the metal paste.
- the wiring substrate 1 can be manufactured by passing through the above steps.
- An electronic component storage package 10 includes a wiring base 1 and a frame 11.
- the frame 11 may be located on the lower surface of the base 2.
- the frame portion 11 may surround the mounting area of the electronic component 101 on the lower surface of the base body 2.
- the shape of the frame portion 11 may be, for example, a circular shape, a rectangular shape, or an elliptical shape when viewed from the bottom. Further, the frame portion 11 may match the shape of the wiring substrate 1 in a top view.
- the size of the radius may be 1 mm ⁇ 1 mm to 10 mm ⁇ 10 mm.
- the size When the shape of the frame portion 11 in a bottom view is rectangular, the size may be 1 mm ⁇ 1 mm to 10 mm ⁇ 10 mm.
- the height of the frame portion 11 may be 0.5 mm to 5 mm.
- a metal such as iron, copper, nickel, chromium, cobalt, molybdenum, or tungsten can be used.
- the frame portion 11 can be made of an alloy of the above-mentioned metals, for example, a copper-tungsten alloy, a copper-molybdenum alloy, an iron-nickel-cobalt alloy or the like.
- An electronic device 100 includes an electronic component storage package 10, an electronic component 101, and an external board 8.
- the electronic component 101 is mounted in the mounting area on the lower surface of the base 2.
- the electronic component 101 may be, for example, an LD or PD.
- the electronic component 101 may be connected to the first pad 23 and the second pad 24 located on the lower surface of the base 2 by wire bonding or the like.
- the first pad 23 may be electrically connected to the terminal 4.
- the second pad 24 may be electrically connected to the first signal conductor 3.
- the first pad 23 may have, for example, a circular shape when viewed from below.
- the size of the radius may be 0.1 mm to 0.5 mm.
- the number of the first pads 23 may correspond to the number of the terminals 4.
- the second pad 24 may have, for example, a rectangular shape when viewed from above. When the second pad 24 has a rectangular shape in a bottom view, the size thereof may be 0.1 ⁇ 0.1 mm to 1 ⁇ 1 mm.
- the number of second pads 24 may correspond to the number of first signal conductors 3.
- the first pad 23 and the second pad 24 may include a metal material such as gold, silver, copper, nickel, tungsten, molybdenum, or manganese.
- the first pad 23 and the second pad 24 may be co-fired or metal-plated on the surface of the insulating layer in the form of a metallized layer or a plated layer.
- the external substrate 8 has through holes 81 that correspond to the terminals 4 in a one-to-one correspondence, and when the external substrate 8 is connected to the wiring substrate 1, the terminals 4 are inserted into the through holes 81 of the external substrate 8. Is inserted.
- the external board 8 may have an upper surface and a lower surface.
- the through hole 81 may penetrate from the upper surface to the lower surface of the external substrate 8.
- the area of the through hole 81 may be smaller than that of the enlarged diameter portion 43 and may be slightly larger than the size of the cross-sectional area of the second end 42. Since the area of the through hole 81 is smaller than that of the expanded diameter portion 43 and larger than the cross-sectional area of the second end 42, the wiring base 1 and the external substrate 8 can be easily aligned when the terminal 4 is inserted. Therefore, it is possible to reduce the positional deviation of the external substrate 8. As a result, high-frequency signal transmission between the electronic component 101 arranged on the wiring substrate 1 and the external substrate 8 connected to the electronic component 101 can be stably controlled. Further, since the brazing material applied to the expanded diameter portion 43 and the external substrate 8 can be bonded, the bonding strength can be increased.
- the second signal conductor 82 may be located on the lower surface of the external substrate 8.
- the second signal conductor 82 may be in a position in contact with the first signal conductor 3 when connected to the wiring substrate 1. This facilitates electrical connection between the second signal conductor 82 and the first signal conductor 3 and enables efficient signal transmission.
- the external board 8 may be, for example, an FPC.
- a conductive metal such as a copper foil is attached to the upper and lower surfaces of a thin and soft base film having insulation such as polyimide. Then, by etching the conductive metal into a predetermined shape, the external substrate 8 provided with the second signal conductor 82 having a desired shape can be manufactured.
- connection between the external substrate 8 and the wiring substrate 1 is performed by inserting the terminal 4 into the through hole 81 of the external substrate 8 and connecting the expanded diameter portion 43 of the terminal 4 and the lower surface of the external substrate 8 via a bonding material such as a brazing material. And the upper surface of the wiring substrate 1 and the lower surface of the external substrate 8 are closely contacted and connected. At this time, the upper surface of the wiring substrate 1 and the lower surface of the external substrate 8 are connected via a brazing material or the like.
- connection between the external substrate 8 and the wiring substrate 1 may be made by joining not only the lower surface of the external substrate 8 and the expanded diameter portion 43 but also the upper surface of the external substrate 8 and the terminal 4 via a brazing material or the like. As a result, the bonding strength between the wiring substrate 1 and the external substrate 8 can be increased.
- the second signal conductor 82 and the wiring base 1 may be electrically connected via a brazing material or the like.
- the lid may be joined to the frame 11.
- the lid When viewed from the bottom, the lid may have, for example, a circular shape, a rectangular shape, or an elliptical shape. Further, the lid body may match the shape of the base body 2 when viewed from below.
- the lid may be made of a metal containing iron, copper, nickel, chromium, cobalt, molybdenum, or tungsten, for example.
- the lid may use an alloy of the above-mentioned metals, for example, a copper-tungsten alloy, a copper-molybdenum alloy, an iron-nickel-cobalt alloy, or the like.
- the lid can be produced by subjecting an ingot of a metal material to a metal working method such as a rolling working method or a punching working method.
- wiring base 10 electronic component storage package 11: frame 100: electronic device 101: electronic component 2: base 21: first recess 22: via 23: first pad 24: second pad 3: first signal conductor 4: terminal 41: first end 42: second end 43: expanded portion 5: connection conductor 6: first ground conductor 61: second ground conductor 7: second recess 71: third ground conductor 8: external substrate 81 : Through hole 82: Second signal conductor
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Abstract
Description
電子装置100は、電子部品収納用パッケージ10を備える。電子部品収納用パッケージ10は、配線基体1を備える。そして、配線基体1は、基体2、および端子4を備えている。なお、配線基体1は、基体2の上面に、第1凹部21、第1信号導体3、および端子4等が位置することで構成される。
以下に、配線基体1の製造方法の一例について説明する。まず、配線基体1を構成する基体2の製造方法の一例について説明する。基体2が、例えば複数の絶縁層が酸化アルミニウム質焼結体を含む場合であれば、次のようにして作製する。まず、スラリーを、酸化アルミニウムおよび酸化ケイ素等の原料粉末に適当な有機バインダおよび溶剤等を添加混合することで作製する。次に、作製したスラリーにドクターブレード法等の成形法を施し、シート状に成形して複数枚のセラミックグリーンシートを作製する。このとき、セラミックグリーンシートの所定の位置に第1凹部21、および、第2凹部7となる切欠きを設けてもよい。その後、複数枚のセラミックグリーンシートを積層し、圧着する。最後に、この積層されたセラミックグリーンシートを還元雰囲気中で約1600℃の温度で焼成するとともに、切断加工あるいは打ち抜き加工により適当な形状とし、所望の形状の基体2を作製する。
本開示の一実施形態に係る電子部品収納用パッケージ10は、配線基体1と、枠部11と、を備えている。
本開示の一実施形態に係る電子装置100は、電子部品収納用パッケージ10と、電子部品101と、外部基板8と、を備えている。
10:電子部品収納用パッケージ
11:枠部
100:電子装置
101:電子部品
2:基体
21:第1凹部
22:ビア
23:第1パッド
24:第2パッド
3:第1信号導体
4:端子
41:第1端
42:第2端
43:拡径部
5:接続導体
6:第1接地導体
61:第2接地導体
7:第2凹部
71:第3接地導体
8:外部基板
81:貫通孔
82:第2信号導体
Claims (13)
- 上面に開口する第1凹部を有する基体と、前記上面で第1方向に延びる第1信号導体と、第1端から第2端に向かって延びる少なくとも1つの端子と、
前記第1凹部に位置し、前記第1端に繋がる接続導体と、を備え、
前記端子は、
前記第1端が前記第1凹部内、前記第2端が前記第1凹部外に位置しているとともに、前記第1凹部内に拡径部を有する、配線基体。 - 前記拡径部は、
前記端子の軸を含む断面視をした場合、段状である、請求項1に記載の配線基体。 - 前記拡径部は、
前記第1端から前記開口に向かって延びている、請求項1または請求項2に記載の配線基体。 - 前記拡径部の径の面積S1は、前記第1端の径の面積S2よりも大きい、請求項1または請求項2に記載の配線基体。
- 前記第1凹部に、複数の前記端子が位置する、請求項1~請求項4のいずれか1つに記載の配線基体。
- 前記第1凹部を複数有し、複数の前記第1凹部のそれぞれに、前記端子が1つ位置する、請求項1~請求項4のいずれか1つに記載の配線基体。
- 前記接続導体は、
上面視をした場合、前記拡径部の外周を囲んで位置する、請求項1~請求項6のいずれか1つに記載の配線基体。 - 前記第1方向に延び、前記第1信号導体を挟む一対の第1接地導体を有する、請求項1~請求項7のいずれか1つに記載の配線基体。
- 前記第1信号導体よりも前記上面の中心の近くに第2接地導体を有し、
前記第2接地導体は、前記一対の第1接地導体に繋がっている、請求項8に記載の配線基体。 - 前記基体は、
前記基体の外周、かつ、前記第1接地導体の先に位置する第2凹部を有する、請求項8または請求項9に記載の配線基体。 - 前記第2凹部に位置する第3接地導体を有し、
前記第3接地導体は、
前記第1接地導体に繋がっている、請求項10に記載の配線基体。 - 請求項1~請求項11のいずれか1つに記載の配線基体と、
前記上面の反対の下面に位置する枠部と、を備える電子部品収納用パッケージ。 - 請求項12に記載の電子部品収納用パッケージと、
前記下面に実装された電子部品と、
前記端子と対応する貫通孔を有する外部基板と、を備え、
前記端子は、
前記貫通孔に挿入されて位置する、電子装置。
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CN201980055421.5A CN112585743B (zh) | 2018-12-26 | 2019-12-25 | 布线基体、电子部件收纳用封装以及电子装置 |
KR1020217003182A KR102463392B1 (ko) | 2018-12-26 | 2019-12-25 | 배선 기체, 전자부품 수납용 패키지 및 전자장치 |
JP2020563366A JP7027578B2 (ja) | 2018-12-26 | 2019-12-25 | 配線基体、電子部品収納用パッケージおよび電子装置 |
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