WO2020090253A1 - 走行車システム - Google Patents
走行車システム Download PDFInfo
- Publication number
- WO2020090253A1 WO2020090253A1 PCT/JP2019/036184 JP2019036184W WO2020090253A1 WO 2020090253 A1 WO2020090253 A1 WO 2020090253A1 JP 2019036184 W JP2019036184 W JP 2019036184W WO 2020090253 A1 WO2020090253 A1 WO 2020090253A1
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- WO
- WIPO (PCT)
- Prior art keywords
- track
- auxiliary
- traveling
- wheel
- gap
- Prior art date
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- 238000010586 diagram Methods 0.000 description 11
- 230000003028 elevating effect Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 3
- RFHAOTPXVQNOHP-UHFFFAOYSA-N fluconazole Chemical compound C1=NC=NN1CC(C=1C(=CC(F)=CC=1)F)(O)CN1C=NC=N1 RFHAOTPXVQNOHP-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
- B61B13/04—Monorail systems
- B61B13/06—Saddle or like balanced type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0478—Storage devices mechanical for matrix-arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/02—Runways, tracks or trackways for trolleys or cranes for underhung trolleys or cranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/08—Constructional features of runway rails or rail mountings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/12—Devices for changing direction of travel or for transferring from one runway to another; Crossings; Combinations of tracks of different gauges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C9/00—Travelling gear incorporated in or fitted to trolleys or cranes
- B66C9/02—Travelling gear incorporated in or fitted to trolleys or cranes for underhung trolleys or cranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C9/00—Travelling gear incorporated in or fitted to trolleys or cranes
- B66C9/04—Travelling gear incorporated in or fitted to trolleys or cranes to facilitate negotiation of curves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C9/00—Travelling gear incorporated in or fitted to trolleys or cranes
- B66C9/16—Travelling gear incorporated in or fitted to trolleys or cranes with means for maintaining alignment between wheels and track
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
- B61B13/04—Monorail systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Definitions
- the present invention relates to a traveling vehicle system.
- a traveling vehicle system that conveys articles such as a semiconductor wafer or a transportation container (FOUP, reticle Pod) containing a reticle by a traveling vehicle is used.
- a traveling vehicle system a system in which a traveling vehicle that holds articles travels along a track laid on the ceiling is known.
- the tracks are arranged in a grid pattern. There has been proposed a configuration in which a traveling vehicle is traveled vertically and horizontally.
- a traveling vehicle system in which a traveling vehicle travels vertically and horizontally, in a configuration in which an accommodating portion for accommodating articles is arranged above a track together with a main body of the traveling vehicle, when loading and unloading articles from a predetermined position below the track Since it is necessary to move the articles up and down using a place where there is no track or between the tracks, the unloading position of the articles is limited. Therefore, a traveling vehicle system has been proposed in which a traveling vehicle is capable of traveling vertically and horizontally along a lattice-shaped orbit while holding articles on the lower side of the orbit (see Patent Document 1).
- the traveling wheels are arranged above the track, while the accommodation portion for the article or the main body of the traveling vehicle is below the track. Is located in. Therefore, the connecting member for connecting the traveling wheel and the housing portion (or the main body portion) is provided so as to extend vertically above and below the track.
- a gap slit
- a gap is provided at the crossing position of the tracks, and the partial track in which the track at the crossing position is divided by the gap is provided.
- the traveling wheels of the traveling vehicle may fall into the gap and give vibrations to the article. Therefore, it is required to suppress this vibration.
- the first auxiliary wheel and the second auxiliary wheel are provided before and after the traveling wheel in the traveling direction to prevent the traveling wheel from falling into the gaps provided in a part of the grid-shaped track. ing.
- the first auxiliary wheel and the second auxiliary wheel are provided to prevent the first auxiliary wheel and the second auxiliary wheel from coming into contact with the track when the traveling wheel is in contact with the traveling surface.
- the respective lower ends of the wheels are arranged to be higher than the lower ends of the traveling wheels.
- the traveling surfaces on which traveling wheels travel may partially overlap in multiple directions. Therefore, in the configuration in which the auxiliary track described in Patent Document 2 is provided on the partial track, the traveling of the traveling vehicle is hindered.
- the present invention eliminates the need for disposing an auxiliary track or the like in which the lower ends of the auxiliary wheels come into contact with the partial tracks while suppressing the traveling wheels from falling into a gap provided in a part of the track.
- the purpose is to do.
- a traveling vehicle system includes a track and a traveling vehicle that travels along the track, and the track has a first gap, a partial track, and a second track in order along a traveling direction of the traveling vehicle.
- the vehicle has a gap, and the driving vehicle rolls on the running surface of the track, and is arranged in the rear direction of the driving wheel that is not in contact with the driving surface and is behind the driving wheel in the vertical direction.
- a first auxiliary wheel whose relative position is fixed, and a second auxiliary wheel which is not in contact with the traveling surface and is arranged on the front side in the traveling direction of the drive wheel and whose relative vertical position relative to the drive wheel is fixed.
- the distance between the rotation axis of the drive wheel and the rotation axis of the first auxiliary wheel in the traveling direction is equal to or greater than the length of the first gap in the traveling direction, and the rotation axis of the driving wheel in the traveling direction and the second axis
- the distance between the auxiliary wheel and the rotation axis is equal to or greater than the length of the second gap in the traveling direction
- a vehicle system which is provided on the front side of the first gap in the traveling direction, has a length in the traveling direction at least equal to the length of the first gap in the traveling direction, and when the drive wheels enter the partial track, A first auxiliary track on which the lower end of the first auxiliary wheel contacts while the lower end of the drive wheel passes through the first gap, and a second gap provided on the front side of the second gap in the traveling direction, and at least the length of the second gap in the traveling direction.
- a second auxiliary track having a length in the same traveling direction as that of the second auxiliary wheel, the lower end of the second auxiliary wheel contacting the lower end of the drive wheel while passing through the second gap when the driving wheel retreats from the partial track; And the second auxiliary wheel does not exist at a position where the second auxiliary wheel contacts while the first auxiliary wheel contacts the first auxiliary track, and the second auxiliary wheel contacts the second auxiliary track. There is no first auxiliary track between the first auxiliary wheel and the first auxiliary wheel.
- first auxiliary wheel and the second auxiliary wheel are arranged so as to be displaced in the rotational axis direction with respect to the drive wheel, and the lower end has a first height higher than the lower end of the drive wheel.
- the two auxiliary tracks may have an upper surface that is provided at a position deviated from the running surface of the track and has a second height higher than the running surface.
- first height and the second height may be the same or substantially the same.
- one or both of the first auxiliary track and the second auxiliary track may be a convex portion provided on the track.
- first auxiliary wheel and the second auxiliary wheel are arranged offset from each other in the rotation axis direction, and the first auxiliary track and the second auxiliary track rotate in correspondence with the first auxiliary wheel and the second auxiliary wheel, respectively. It may be displaced in the axial direction.
- the first auxiliary track is arranged so that the first auxiliary wheel starts contacting when the lower end of the drive wheel reaches the first gap, and the second auxiliary track has the lower end of the drive wheel in the second gap. It may be arranged such that the contact of the second auxiliary wheel begins when the contact is reached.
- the traveling vehicle includes drive wheels on the front side and the rear side in the traveling direction, and the distance between the lower end of the front driving wheel and the lower end of the rear driving wheel in the traveling direction is the traveling direction. It may be set by excluding the range from the length of the partial track in (1) to the length between the front end of the first gap and the front end of the second gap in the traveling direction.
- the traveling vehicle includes a main body portion that is attached to a connecting member that hangs from the rotation shaft of the drive wheels and that is located below the track, and the first gap and the second gap are provided so that the connecting member can pass through.
- the track has a first track provided along the first direction and a second track provided along a second direction orthogonal to the first direction, and the partial track is the first track. May be located at the intersection of the second track and.
- the first auxiliary wheel contacts the first auxiliary track and the second auxiliary wheel does not contact the traveling surface of the track and the second auxiliary track.
- the second auxiliary wheel contacts the second auxiliary track while the lower end of the drive wheel passes through the second gap, and the first auxiliary wheel does not contact the running surface of the track and the second auxiliary track.
- the drive wheel is prevented from falling into the first gap or the second gap by either one of the first auxiliary wheel and the second auxiliary wheel, and the first auxiliary wheel or the second auxiliary wheel is provided in the partial track. It is not necessary to dispose an auxiliary track or the like with which the lower ends of the wheels contact. Therefore, for example, even when the drive surfaces of the drive wheels on the partial track partially overlap in a plurality of directions, the auxiliary track and the like are not arranged on the drive surfaces, so that the drive wheels can smoothly travel on the partial track.
- first auxiliary wheel and the second auxiliary wheel are arranged so as to be displaced in the rotational axis direction with respect to the drive wheel, and the lower end has a first height higher than the lower end of the drive wheel.
- the first auxiliary wheel and the second auxiliary wheel are in the rotational axis direction with respect to the drive wheel.
- first auxiliary track and the second auxiliary track are deviated from the running surface of the track, the first auxiliary track and the second auxiliary track are prevented from riding on the first auxiliary track and the second auxiliary track, and The auxiliary track and the second auxiliary track can be easily arranged.
- the first height and the second height are the same or substantially the same, so that the lower end of the drive wheel is the first gap or the second gap.
- the drive wheels can be prevented from moving up and down from the height of the traveling surface when passing the road, and by maintaining the height of the drive wheels, it is possible to prevent the traveling vehicle from swinging up and down while driving. it can.
- the first auxiliary track and the second auxiliary track are convex portions provided on the track, the first auxiliary track and the second auxiliary track can be provided easily and at low cost.
- first auxiliary wheel and the second auxiliary wheel are arranged so as to be offset from each other in the rotation axis direction, and the first auxiliary track and the second auxiliary track rotate in correspondence with the first auxiliary wheel and the second auxiliary wheel, respectively.
- first auxiliary wheel and the second auxiliary wheel are displaced from each other in the rotational axis direction. Since it is arranged, it is possible to prevent the first auxiliary wheel from coming into contact with the second auxiliary track and the first auxiliary wheel from coming into contact with the second auxiliary track, and it is possible to avoid the occurrence of resistance or vibration during traveling.
- the first auxiliary track is arranged so that the contact of the first auxiliary wheel starts when the lower end of the drive wheel reaches the first gap, and the second auxiliary track has the lower end of the drive wheel in the second gap.
- the contact of the second auxiliary wheel starts when the lower end of the drive wheel reaches the first gap, or the lower end of the drive wheel is reached.
- Contact of the second auxiliary wheel starts when the first auxiliary wheel or the second auxiliary wheel reaches the second clearance.
- the traveling vehicle includes drive wheels on the front side and the rear side in the traveling direction, and the distance between the lower end of the front driving wheel and the lower end of the rear driving wheel in the traveling direction in the traveling direction is In the configuration that is set excluding the range from the length of the partial track in to the length between the front end of the first gap and the front end of the second gap in the traveling direction,
- the distance between the rear drive wheels is set excluding the range from the length of the partial track to the length between the front end of the first gap and the front end of the second gap. Even when the lower end of one of the front and rear drive wheels passes through the first gap or the second gap, the other drive wheel is in contact with the traveling surface of the track, and the traveling drive of the traveling vehicle is performed. It is possible to avoid interruption of power.
- the traveling vehicle includes a main body portion that is attached to a connecting member that hangs from the rotation axis of the drive wheels and that is located below the track, and both the first gap and the second gap are provided so that the connecting member can pass through.
- the traveling vehicle includes the main body portion via the connecting member, and the connecting member can pass through the first gap and the second gap. Therefore, by using the first gap and the second gap, It is possible to form an intersecting portion or a portion for changing the traveling direction at a right angle or the like in the portion.
- the track has a first track provided along the first direction and a second track provided along a second direction orthogonal to the first direction, and the partial track is the first track.
- the traveling vehicle travels on either the first track or the second track because the partial track is arranged at the intersection of the first track and the second track. Even in such a case, it is possible to prevent the drive wheels from coming into contact with the first auxiliary track or the second auxiliary track when passing the intersection, and to prevent unnecessary vibration when the traveling vehicle passes the intersection. It can be avoided.
- FIG. 5 is a side view of the traveling vehicle shown in FIG. 4.
- (A) to (C) are diagrams showing an example of a traveling unit, (A) is a side view, (B) is a front view, and (C) is a top view.
- (A) to (C) are diagrams showing a state in which the traveling unit travels on a track.
- (A) to (C) are diagrams showing a state in which the traveling unit travels on a track.
- (A) to (C) are diagrams showing a state in which the traveling unit travels on a track.
- (A) to (C) are diagrams showing a state in which the traveling unit travels on a track.
- (A) to (C) are diagrams showing a state in which the traveling unit travels on a track.
- (A) to (C) are diagrams showing a state in which the traveling unit travels on a track. It is a figure showing an example of operation which changes a run direction.
- the direction of the arrow in the drawing is the + direction, and the direction opposite to the direction of the arrow is the ⁇ direction.
- the rotation direction around the Y direction is referred to as the ⁇ Y direction.
- the rotation direction with the Z direction as the axis is expressed as ⁇ Z direction.
- the traveling vehicle 1 may travel in the Y direction instead of traveling in the X direction. Further, the traveling vehicle 1 can travel in a direction other than the straight line direction, and may travel on a curved track in a plan view, for example.
- FIG. 1 is a diagram schematically showing an example of the traveling vehicle system SYS according to the present embodiment.
- FIG. 2 is a perspective view showing an example of the traveling vehicle system SYS according to the present embodiment.
- FIG. 3 is a top view showing an example of the orbit R viewed from the + Z direction. In addition, in FIG. 3, a part of the orbit R is shown.
- the traveling vehicle system SYS includes a track R and a traveling vehicle 1 traveling along the track R.
- the traveling vehicle system SYS is, for example, a system for transporting the article M by the traveling vehicle 1 in a clean room of a semiconductor manufacturing factory.
- the traveling vehicle 1 carries an article M (see FIG. 5) such as a FOUP containing a semiconductor wafer or a reticle Pod containing a reticle.
- the traveling vehicle 1 moves along the lattice-shaped track R and conveys the article M.
- a plurality of traveling vehicles 1 may be used. By transporting the articles M by the plurality of traveling vehicles 1, high-density transportation is possible, and the transportation efficiency of the articles M can be improved.
- the traveling vehicle system SYS can also be applied to equipment other than the semiconductor device manufacturing field.
- the track R is a grid-shaped track installed so as to form a grid in plan view, as shown in FIGS. 2 and 3.
- the lattice-shaped orbit is one form of the orbit R.
- the track R is laid on or near the ceiling (not shown) of a building such as a clean room.
- the orbit R has a first orbit R1, a second orbit R2, and a partial orbit R3.
- the first track R1 is provided along the X direction (first direction).
- the second track R2 is provided along the Y direction (second direction).
- the plurality of first orbits R1 and the plurality of second orbits R2 are provided along the directions orthogonal to each other, but are provided so as not to directly intersect with each other.
- the partial trajectory R3 is arranged at the intersection where the first trajectory R1 and the second trajectory R2 intersect.
- the track R is provided along the direction in which the first track R1 and the second track R2 are orthogonal to each other, so that the grid-shaped cells C (sections) are adjacent to each other in plan view.
- the traveling vehicle 1 is formed to have a size that can be accommodated in one cell C in a plan view (see FIG. 2). With this configuration, it is possible to pass the other traveling vehicles 1 traveling on the adjacent tracks R, and when a plurality of traveling vehicles 1 are arranged on the track R, each traveling vehicle 1 interferes with another traveling vehicle 1. The range that can be traveled without is expanded.
- the first track R1, the second track R2, and the partial track R3 are provided in a state of being suspended from the ceiling via a suspension member N (see FIG. 2).
- the suspension member N includes a first portion N1 for suspending the first track R1, a second portion N2 for suspending the second track R2, and a third portion N3 for suspending the partial track R3.
- the first portion N1 and the second portion N2 are respectively provided at two places sandwiching the third portion N3.
- the first orbit R1, the second orbit R2, and the partial orbit R3 are provided along the same or substantially the same horizontal plane (XY plane).
- the track R includes a first clearance D1, a partial track R3, and a second clearance D2 in order along the traveling direction of the traveling vehicle 1 (see FIG. 1).
- the first gap D1 is provided on the side opposite to the traveling direction of the traveling vehicle 1 with respect to the partial track R3 (may be referred to as front side or rear side).
- the second gap D2 is provided on the traveling direction side of the traveling vehicle 1 (sometimes referred to as the front side or the front side) with respect to the partial track R3. Note that the first gap D1 and the second gap D2 are the same gap, and will be appropriately referred to as the gap D when the first gap D1 and the second gap D2 are not distinguished.
- the first gap D1 and the second gap D2 are provided between the first track R1 and the partial track R3, or between the second track R2 and the partial track R3 (see FIG. 2).
- the first gap D1 and the second gap D2 travel when the traveling vehicle 1 travels on the first track R1 and crosses the second track R2, or travels on the second track R2 and crosses the first track R1. It is a portion through which a connecting portion 30 described later, which is a part of the vehicle 1, passes. Therefore, both the first gap D1 and the second gap D2 are provided with a predetermined size (interval) through which the connecting portion 30 can pass.
- the connecting portion 30 can pass through both the first gap D1 and the second gap D2, the first gap D1 and the second gap D2 are used as described later with reference to FIGS. 13 (A) to (C).
- the connecting member 32 of the connecting portion 30 can be turned, it is possible to form a portion in the grid-shaped track in which the traveling direction of the traveling vehicle 1 can be changed.
- the first gap D1 and the second gap D2 will be further described later.
- the first track R1, the second track R2, and the partial track R3 have running surfaces (top surfaces) R1a, R2a, and R3a on which the drive wheels 21 described later run (see FIGS. 2 and 3).
- Two running surfaces R1a and R2a are formed adjacent to each other on the first track R1 and the second track R2.
- the traveling surfaces R1a, R2a, and R3a are provided along the same or substantially the same horizontal plane (XY plane).
- the first track R1 and the second track R2 are respectively provided with a first auxiliary track P1 with which a first auxiliary wheel W1 described later contacts and a second auxiliary track P2 with which the second auxiliary wheel W2 contacts. (See Figure 3).
- the first auxiliary track P1 and the second auxiliary track P2 are formed so as to form a pair.
- the first track R1 is provided with a pair of first auxiliary track P1 and second auxiliary track P2 on the + Y side and the ⁇ Y side of the first track R1, respectively.
- the second track R2 is provided with a pair of first auxiliary track P1 and second auxiliary track P2 on the + X side and the ⁇ X side of the second track R2, respectively.
- the first auxiliary track P1 is provided at the end of the first track R1 on the + X side, and the second auxiliary track P2 is It is provided at the -X side end of the first track R1, and each first auxiliary track P1 is provided on the + Y side with respect to the paired second auxiliary tracks P2. Further, on each of the + X side and the -X side of the second track R2, the first auxiliary track P1 is provided at the + Y side end of the second track R2, and the second auxiliary track P2 is the -Y side of the second track R2.
- each first auxiliary track P1 is provided on the ⁇ X side with respect to the paired second auxiliary tracks P2.
- the first auxiliary track P1 and the second auxiliary track P2 have traveling surfaces (upper surfaces) R4a and R5a (see FIG. 1) with which the first auxiliary wheel W1 and the second auxiliary wheel W2 contact, respectively.
- the traveling surface R4a of the first auxiliary track P1 and the traveling surface R4a of the first auxiliary track P1 are formed to have a second height L2 higher than the traveling surfaces R1a and R2a of the drive wheels 21.
- the second height L2 is set to, for example, several hundred ⁇ m to several mm.
- the traveling surface R4a of the first auxiliary track P1 and the traveling surface R4a of the first auxiliary track P1 may have different heights with respect to the traveling surfaces R1a and R2a of the drive wheels 21.
- the configurations of the first auxiliary track P1 and the second auxiliary track P2 shown in FIG. 3 are examples, and other configurations may be used.
- the first auxiliary trajectory P1 may be provided on the ⁇ Y side with respect to the paired second auxiliary trajectory P2, and in the second trajectory R2, the first auxiliary trajectory P1 forms a pair. It may be provided on the + X side with respect to the second auxiliary track P2.
- the first auxiliary track P1 and the second auxiliary track P2 are convex portions provided on the track R (see FIG. 1).
- Each of the first auxiliary trajectory P1 and the second auxiliary trajectory P2 is a convex portion that projects in the + Z direction with respect to the upper surface (the surface on the + Z side) of the trajectory R.
- the shapes of the first auxiliary track P1 and the second auxiliary track P2 are rectangular in plan view.
- the first auxiliary track P1 and the second auxiliary track P2 may be formed by attaching members to the track R, or may be formed integrally with the track R.
- the first auxiliary track P1 and the second auxiliary track P2 are configured to project a part of the track R to form a convex portion
- the first auxiliary track P1 and the second auxiliary track P2 need to be provided separately from the track R. Since there is no such item, the device configuration can be facilitated.
- the first auxiliary track P1 and the second auxiliary track P2 are convex portions provided on the track R, the first auxiliary track P1 and the second auxiliary track P2 can be provided easily and at low cost.
- the shapes of the first auxiliary track P1 and the second auxiliary track P2 are arbitrary, and for example, the shapes of the first auxiliary track P1 and the second auxiliary track P2 are the first auxiliary wheel W1 and the second auxiliary wheel W1, respectively.
- the end on the side where W2 enters may have a slope or a shape having a guide that restricts the movement of the first auxiliary wheel W1 and the second auxiliary wheel W2 in the direction orthogonal to the traveling direction.
- the traveling vehicle 1 when the traveling vehicle 1 enters and passes in the X direction from the first track R1 with respect to the partial track R3, Since the traveling vehicle 1 may enter and pass in the Y direction from the second trajectory R2 with respect to the trajectory R3, the traveling surface R3a on which the drive wheels 21 of the traveling vehicle 1 travel in the partial trajectory R3 is in the X direction and It partially overlaps in a plurality of Y directions. Therefore, in the configuration in which the first auxiliary track P1 and the second auxiliary track P2 are provided on the partial track R3, the traveling of the traveling vehicle 1 is hindered.
- neither the first auxiliary track P1 nor the second auxiliary track P2 is provided in the partial track R3.
- the first auxiliary track P1 and the second auxiliary track P2 are not provided in the partial track R3, even if the traveling surface R3a of the drive wheel 21 in the partial track R3 partially overlaps in a plurality of directions, the traveling surface R3a Since the first auxiliary track P1 or the second auxiliary track P2 and the like are not arranged, the drive wheels 21 can smoothly travel on the partial track R3.
- the track R includes the first track R1 provided along the first direction and the second track R2 provided along the second direction orthogonal to the first direction, And the partial trajectory R3 is arranged at the intersection of the first trajectory R1 and the second trajectory R2.
- the traveling vehicle 1 since the partial track R3 provided with neither the first auxiliary track P1 nor the second auxiliary track P2 is arranged at the intersection of the first track R1 and the second track R2, the traveling vehicle 1 Whether the vehicle travels on the first track R1 or the second track R2, avoids the drive wheels 21 coming into contact with the first auxiliary track P1 or the second auxiliary track P2 when passing through the intersection. Therefore, it is possible to prevent unnecessary vibration from occurring when the traveling vehicle 1 passes through the intersection.
- FIG. 4 is a perspective view showing an example of a traveling vehicle.
- FIG. 5 is a side view of the traveling vehicle shown in FIG. 4 as seen from the ⁇ Y direction.
- the traveling vehicle 1 includes a main body section 10, a traveling section 20, a connecting section 30 (connecting member), and a control section 50 (see FIG. 5).
- the control unit 50 centrally controls the operation of each unit of the traveling vehicle 1.
- the control unit 50 may be provided in the main body unit 10 or may be provided outside the main body unit 10.
- the main body portion 10 is arranged below the track R (on the ⁇ Z side).
- the main body portion 10 is attached to the connecting portion 30 that hangs from the rotation axis AX3 of the drive wheel 21, and is arranged below the track R.
- the main body 10 is formed in, for example, a rectangular shape in a plan view.
- the main body portion 10 is formed to have a size that fits in one cell C in the grid-shaped trajectory R in a plan view (see FIG. 2). In the case of this configuration, a space is ensured for passing another traveling vehicle 1 traveling on the adjacent first track R1 or second track R2.
- the main body 10 includes an upper unit 17 and a transfer device 18.
- the upper unit 17 is suspended from the traveling unit 20 via the connecting unit 30.
- the upper unit 17 has, for example, a rectangular shape in a plan view, and has four corners on the upper surface 17a (see FIG. 4).
- the transfer device 18 is provided below the upper unit 17.
- the transfer device 18 holds the article M, and transfers the article M between itself and a predetermined position below the track R.
- the transfer device 18 transfers the article M between itself and the shelf or the carry-in / carry-out part of the storage device, or the carry-in / carry-out part of the processing device or the like.
- the transfer device 18 is rotatable about a vertical rotation axis AX1 (see FIG. 5).
- the transfer device 18 includes an article holding unit 13 that holds the article M, an elevating drive unit 14 that elevates and lowers the article holding unit 13 in the vertical direction, a side-out mechanism 11 that moves the elevating drive unit 14, and a side-out mechanism 11. And a rotating portion 12 for holding the.
- the article holding unit 13 holds the flange Ma of the article M to suspend and hold the article M.
- the article holding unit 13 is, for example, a chuck having a claw portion 13a that can move in the horizontal direction, and the article holding unit 13 is moved up below the flange Ma of the article M to raise the article holding unit 13. Hold M.
- the article holding unit 13 is connected to a hanging member 13b such as a wire or a belt.
- the elevating and lowering drive unit 14 is, for example, a hoist, and lowers the article holding unit 13 by feeding the hanging member 13b, and raises the article holding unit 13 by winding the hanging member 13b.
- the elevating / lowering drive unit 14 is controlled by the control unit 50 to lower or raise the article holding unit 13 at a predetermined speed.
- the lifting drive unit 14 is controlled by the control unit 50 and holds the article holding unit 13 at a target height.
- the sideways-out mechanism 11 has, for example, a plurality of movable plates stacked in the Z direction.
- the movable plate is movable in the Y direction.
- An elevating drive unit 14 is attached to the lowermost movable plate. As shown by the chain double-dashed line in FIG. 5, the sideways-out mechanism 11 moves the movable plate by a drive device (not shown) to move the elevating drive unit 14 and the article holding unit 13 attached to the lowermost movable plate in the traveling direction. Can be laid out sideways.
- the rotating unit 12 is provided between the side-out mechanism 11 and the upper unit 17.
- the rotating unit 12 includes a rotating member 12a and a rotation driving unit 12b.
- the rotating member 12a is provided so as to be rotatable around the Z axis.
- the rotating member 12a supports the laterally extending mechanism 11.
- An electric motor or the like is used for the rotation drive unit 12b, and rotates the rotation member 12a in the direction around the rotation axis AX1.
- the rotating unit 12 rotates the rotating member 12a by the driving force from the rotating drive unit 12b, and rotates the sideward mechanism 11 (the elevating drive unit 14 and the article holding unit 13) around the rotation axis AX1.
- the traveling vehicle 1 may be provided with a cover W so as to surround the transfer device 18 and the article M held by the transfer device 18.
- the cover W has a cylindrical shape with an open lower end, and has a shape in which a portion of the laterally extending mechanism 11 where the movable plate projects is cut out.
- the cover W has an upper end attached to the rotating member 12a of the rotating portion 12, and rotates about the axis of the rotation axis AX1 as the rotating member 12a rotates.
- the traveling unit 20 has a drive wheel 21, a first auxiliary wheel W1, and a second auxiliary wheel W2 (see FIG. 5).
- the traveling parts 20 are arranged at four corners of the upper surface 17a of the upper unit 17 (main body part 10), respectively (see FIG. 3).
- the four traveling units 20 have the same configuration. That is, the traveling vehicle 1 includes a total of four traveling units 20 (driving wheels 21, first auxiliary wheels W1, and second auxiliary wheels W2), two in each of the front side and the rear side in the traveling direction.
- the drive wheel 21 of each traveling unit 20 is a drive wheel that is rotationally driven by the drive force of a traveling drive unit 33 described later.
- the configuration is not limited to the configuration in which all of the four drive wheels 21 are rotationally driven by the drive force of the traveling drive unit 33, and a configuration in which some of the four drive wheels 21 are rotationally driven is also possible. That is, some of the four drive wheels 21 may be driven wheels.
- Each traveling unit 20 is provided so as to be able to turn in the ⁇ Z direction about the turning axis AX2 (see FIG. 5). Each traveling unit 20 turns in the ⁇ Z direction by the steering mechanism 34 described later, and as a result, the traveling vehicle 1 can change the traveling direction.
- FIG. 6A to 6C are diagrams showing an example of the traveling unit 20.
- FIG. 6A is a side view seen from the ⁇ Y direction.
- FIG. 6B is a front view seen from the + X direction.
- FIG. 6C is a top view seen from the + Z direction.
- the drive wheel 21, the first auxiliary wheel W1, and the second auxiliary wheel W2 are attached to rotary shafts AX3, AX4, and AX5, respectively, which are connected to a support member 31 of the connecting portion 30 described later (FIG. 6 ( See C)).
- the rotation axes AX3, AX4, AX5 are provided in parallel with the XY plane and in a direction orthogonal to the traveling direction of the traveling vehicle 1.
- the drive wheel 21 rolls on the traveling surfaces R1a, R2a, R3a of the first orbit R1, the second orbit R2, and the partial orbit R3 in the orbit R to drive the traveling vehicle 1.
- the diameter of the drive wheel 21 and the thickness dimension in the direction orthogonal to the traveling direction are not limited and can be set arbitrarily.
- the drive wheel 21 may be subjected to anti-slip processing such as sticking rubber on the peripheral surface that contacts the track R.
- the drive wheels 21 shown in FIGS. 6A to 6C are examples, and other configurations may be used. For example, two or more drive wheels 21 may be provided in one traveling unit 20.
- the distance L3 in the traveling direction between the lower end of the front drive wheel 21 and the lower end of the rear drive wheel 21 in the traveling direction is determined from the length L4 of the partial track R3 in the traveling direction to the first in the traveling direction. It is set excluding the range up to the length L5 between the front end of the first gap D1 and the front end of the second gap D2 (see FIG. 3).
- the first auxiliary wheel W1 is arranged behind the drive wheel 21 in the traveling direction.
- the second auxiliary wheel W2 is arranged on the front side in the traveling direction of the drive wheel 21 (see FIG. 6A).
- the first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged such that when viewed in the direction orthogonal to the traveling direction (from the Y direction in FIG. 6), a part of each overlaps with the drive wheel 21. With this configuration, the traveling unit 20 can be made compact.
- the first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged symmetrically with respect to the vertical center line C1 of the drive wheel 21.
- the diameter of the first auxiliary wheel W1 and the diameter of the second auxiliary wheel W2 are smaller than the diameter of the drive wheel 21.
- the total length of the traveling unit 20 can be shortened, and further, the radius of gyration when the traveling unit 20 turns in the ⁇ Z direction can be reduced.
- the thickness dimension in the direction orthogonal to the traveling direction is smaller than the thickness dimension of the drive wheel 21.
- the track R and the traveling unit 20 can be made compact.
- the diameter and the thickness of each of the first auxiliary wheel W1 and the second auxiliary wheel W2 are set to be the same. In the case of this configuration, parts of the first auxiliary wheel W1 and the second auxiliary wheel W2 can be made common, so that the device cost can be suppressed.
- the diameters and widths of the first auxiliary wheel W1 and the second auxiliary wheel W2 may be different from each other.
- the first auxiliary wheel W1 and the second auxiliary wheel W2 may be subjected to processing for reducing friction on the peripheral surfaces in contact with the track R. In the case of this configuration, since the friction coefficient with respect to the track R is reduced, it is possible to suppress a decrease in the traveling speed of the traveling vehicle 1.
- the first auxiliary wheel W1 and the second auxiliary wheel W2 shown in FIG. 6 are examples, and may have other configurations.
- one or both of the first auxiliary wheel W1 and the second auxiliary wheel W2 may be configured to include two or more wheels, or wheels having a tapered shape with respect to the rotation axis direction may be used.
- the distance L7 between the rotation axis AX3 of the drive wheel 21 and the rotation axis AX4 of the first auxiliary wheel W1 in the traveling direction is set to be the length L8 or more of the first gap D1 in the traveling direction (FIG. 1). reference).
- the distance L9 between the rotation axis AX3 of the drive wheel 21 and the rotation axis AX5 of the second auxiliary wheel W2 in the traveling direction is set to be the length L10 or more of the second gap D2 in the traveling direction (see FIG. 1).
- the second auxiliary track P2 it is possible to prevent the drive wheel 21 from falling into the second gap D2.
- the relative positions of the first auxiliary wheel W1 and the second auxiliary wheel W2 in the vertical direction (Z direction) with respect to the drive wheel 21 are fixed.
- the first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged in non-contact positions with respect to the traveling surfaces R1a, R2a, R3a of the first track R1, the second track R2, and the partial track R3, respectively. ..
- the lower ends of the first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged at positions higher than the lower ends of the drive wheels 21, respectively.
- the first auxiliary wheel W1 is provided such that the lower end of the first auxiliary wheel W1 in the vertical direction is at a height at which it comes into contact with the traveling surface R4a of the first auxiliary track P1.
- the second auxiliary wheel W2 is provided such that the lower end of the second auxiliary wheel W2 in the vertical direction is at a height at which it comes into contact with the traveling surface R5a of the second auxiliary track P2 (see FIG. 1).
- the first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged such that the lower end of the first auxiliary wheel W1 and the lower end of the second auxiliary wheel W2 are higher than the lower end of the drive wheel 21 by a first height L1. (See FIG. 6A).
- the wheel pressure of the drive wheel 21 may not be transmitted to the traveling surface R1a.
- the drive wheel 21 contacts the traveling surface R1a, and the first auxiliary wheel W1 and the second auxiliary wheel W1.
- the first height L1 is set to, for example, several 100 ⁇ m to several mm.
- the height of the lower end of the first auxiliary wheel W1 and the height of the lower end of the second auxiliary wheel W2 may be different.
- the first height L1 and the second height L2 are set to be the same or substantially the same.
- the lower end of the drive wheel 21 passes through the first gap D1 or the second gap D2
- the lower end of the drive wheel 21 is prevented from moving vertically from the height of the traveling surfaces R1a, R2a, R3a. Therefore, by maintaining the height of the drive wheels 21, it is possible to prevent the traveling vehicle 1 from vertically swinging and vibrating during traveling.
- first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged with respect to the drive wheel 21 so as to be offset from each other in the directions of the rotation axes AX4 and AX5 (directions orthogonal to the traveling direction) of the first auxiliary wheel W1.
- the wheel W1 and the second auxiliary wheel W2 are displaced from each other in the directions of the rotation axes AX4 and AX5 (see FIG. 6B).
- the first auxiliary track P1 and the second auxiliary track P2 respectively rotate the drive wheel 21 with respect to the traveling surfaces R1a and R2a of the drive wheel 21 corresponding to the first auxiliary wheel W1 and the second auxiliary wheel W2, respectively.
- the first auxiliary track P1 and the second auxiliary track P2 are arranged offset from each other in the axis AX3 direction (direction orthogonal to the traveling direction), and the first auxiliary wheel W1 and the second auxiliary wheel W2 rotate about axes AX4 and AX5. , They are arranged offset from each other.
- the first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged so as to be offset from the drive wheel 21 in the direction outside the track R (see FIG. 6B). In the case of this configuration, since the drive wheels 21 are arranged inward of the track R, it is possible to prevent the drive wheels 21 from falling off the track R from the side orthogonal to the traveling direction.
- the first auxiliary wheel W1 and the second auxiliary wheel W2 may be arranged so as to be displaced from each other in the direction of the inner side of the track R with respect to the drive wheel 21, or the drive wheel 21 may be different from the traveling direction. It may be arranged at a position sandwiched by the first auxiliary wheel W1 and the second auxiliary wheel W2 in the orthogonal direction.
- the first auxiliary wheel W1 and the second auxiliary wheel W2 are arranged so as to be offset from each other in the directions of the rotation axes AX4 and AX5, and the first auxiliary track P1 and the second auxiliary track P2 are respectively formed as the first auxiliary wheel W1. Also, in the configuration in which the first auxiliary wheel W1 abuts on the second auxiliary track P2 in the configuration in which the first auxiliary wheel W1 is displaced in the directions of the rotation axes AX4 and AX5 corresponding to the second auxiliary wheel W2, and the first auxiliary wheel W1 is It is possible to avoid contact with the second auxiliary track P2 and avoid occurrence of resistance or vibration during traveling.
- first auxiliary wheel W1 and the second auxiliary wheel W2 are displaced with respect to the drive wheel 21 in the directions of the rotation axes AX4 and AX5, and the lower end has a first height L1 higher than the lower end of the drive wheel 21.
- the first auxiliary track P1 and the second auxiliary track P2 are disposed at positions deviated from the traveling surfaces R1a, R2a of the drive wheels 21 and are arranged on the upper surface of the second height L1 higher than the traveling surfaces R1a, R2a.
- the first auxiliary track P1 and the second auxiliary track P2 are formed so as to correspond to the configurations of the first auxiliary wheel W1 and the second auxiliary wheel W2, respectively.
- the first auxiliary track P1 is provided on the front side of the first gap D1 in the traveling direction.
- the first auxiliary track P1 is provided such that when the drive wheel 21 enters the partial track R3, the lower end of the first auxiliary wheel W1 abuts while the lower end of the drive wheel 21 passes through the first gap D1. (See Figure 1).
- the first auxiliary track P1 has at least the same length L12 in the traveling direction as the length L8 in the traveling direction of the first gap D1.
- the length L12 may be set to be several tens mm longer than the length L8.
- the second auxiliary wheel W2 is provided so that the first auxiliary wheel P1 does not exist at the position where the first auxiliary wheel W1 abuts while the second auxiliary wheel W2 abuts the second auxiliary track P2. With this configuration, unnecessary contact between the first auxiliary track P1 and the first auxiliary wheel W1 can be suppressed.
- the second auxiliary track P2 is provided on the front side of the second gap D2 in the traveling direction.
- the second auxiliary track P2 is provided such that the lower end of the second auxiliary wheel W2 abuts while the lower end of the drive wheel 21 passes through the second gap D2 when the driving wheel 21 retreats from the partial track R3.
- the second auxiliary track P2 has at least the same length L13 in the traveling direction as the length L10 in the traveling direction of the second gap D2. The shorter the length of the second auxiliary track P2 is, the more the contact between the second auxiliary track P2 and the second auxiliary wheel W2 is suppressed, and the generation of particles due to the contact can be suppressed.
- the length L13 may be set to be several tens mm longer than the length L10.
- the second auxiliary wheel W2 is provided so that the second auxiliary wheel P2 does not exist at the position where the second auxiliary wheel W2 abuts while the first auxiliary wheel W1 abuts the first auxiliary track P1. With this configuration, unnecessary contact between the second auxiliary track P2 and the second auxiliary wheel W2 can be suppressed.
- the first auxiliary track P1 is arranged such that the first auxiliary wheel W1 starts contacting when the lower end of the drive wheel 21 reaches the first gap D1, and the second auxiliary track P1 is also formed.
- P2 is arranged so that the contact of the second auxiliary wheel W2 starts when the lower end of the drive wheel 21 reaches the second gap D2.
- the traveling vehicle 1 can be supported by the first auxiliary wheel W1 or the second auxiliary wheel W2 at the same time or almost at the same time when the lower end of the drive wheel 21 reaches the first clearance D1 or the second clearance D2.
- the first auxiliary track P1 and the second auxiliary track P2 can be set shorter in the traveling direction.
- FIGS. 7 to 12 are diagrams showing an example of a state in which the traveling unit 20 travels on the track R. 7 to 12,
- (A) is a side view of the traveling unit 20 on the front side in the traveling direction as seen from the -Y direction
- (B) is a top view as seen from the + Z direction of (A).
- .. (C) is a top view of the traveling unit 20 on the front side and the rear side in the traveling direction as viewed from the + Z direction.
- the state shown in FIGS. 7A to 7C is a state in which the traveling vehicle 1 travels on the first track R1 toward the first gap D1 and the traveling unit 20 is located in front of the first gap D1.
- the lower ends of the drive wheels 21 come into contact with the traveling surface R1a.
- the lower end of the first auxiliary wheel W1 and the lower end of the second auxiliary wheel W2 do not come into contact with any of the traveling surface R1a, the first auxiliary track P1, and the second auxiliary track P2.
- the traveling vehicle 1 is supported by the front drive wheel 21 and the rear drive wheel 21 in the traveling direction.
- the state shown in FIGS. 8A to 8C is a state immediately before the lower end of the drive wheel 21 enters the first gap D1.
- the lower ends of the drive wheels 21 are located in front of the first gap D1 and come into contact with the traveling surface R1a. Therefore, the lower end of the drive wheel 21 does not fall into the first gap D1.
- the length L12 of the first auxiliary track P1 is set to be longer than the length L8 of the first gap D1 in the traveling direction, the lower end of the first auxiliary wheel W1 to the first auxiliary track P1 is moved in this state. Contact has begun.
- the first auxiliary track P1 is arranged so that the first auxiliary wheel W1 starts contacting when the lower end of the drive wheel 21 reaches the first gap D1, so in this state, The lower end of the auxiliary wheel W1 does not come into contact with either the first auxiliary track P1 or the second auxiliary track P2. Further, the lower end of the second auxiliary wheel W2 does not come into contact with either the first auxiliary track P1 or the second auxiliary track P2. Further, in the rear traveling unit 20, the lower ends of the drive wheels 21 contact the first track R1, and the lower ends of the first auxiliary wheel W1 and the second auxiliary wheels W2 are the first track R1 and the first track R1. It does not come into contact with either the first auxiliary track P1 or the second auxiliary track P2. Therefore, the traveling vehicle 1 is horizontally supported by the front drive wheel 21 and the rear drive wheel 21 in the traveling direction.
- the states shown in FIGS. 9A to 9C are the states when the lower ends of the drive wheels 21 enter the first gap D1.
- the lower end of the drive wheel 21 is located on the first gap D1, so that the drive wheel 21 does not contact either the first track R1 or the partial track R3.
- the first auxiliary track P1 is arranged so that the first auxiliary wheel W1 starts contacting when the lower end of the drive wheel 21 reaches the first gap D1, so in this state The lower end of the auxiliary wheel W1 contacts the first auxiliary track P1. Therefore, the lower end of the drive wheel 21 does not fall into the first gap D1.
- the second auxiliary track P2 is not arranged at the position where the second auxiliary wheel W2 contacts while the first auxiliary wheel W1 contacts the first auxiliary track P1.
- the lower end of the wheel W2 does not come into contact with any of the running surface R1a, the first auxiliary track P1, and the second auxiliary track P2.
- the lower ends of the drive wheels 21 contact the first track R1, and the lower ends of the first auxiliary wheel W1 and the second auxiliary wheels W2 are the first track R1 and the first track R1. It does not come into contact with either the first auxiliary track P1 or the second auxiliary track P2. Therefore, the traveling vehicle 1 is horizontally supported by the first auxiliary wheel W1 on the front side and the driving wheel 21 on the rear side in the traveling direction.
- the states shown in FIGS. 10A to 10C are the states when the lower ends of the drive wheels 21 enter the partial track R3.
- the lower ends of the drive wheels 21 come into contact with the partial track R3, so that the lower ends of the drive wheels 21 do not fall into the first gap D1.
- the first auxiliary wheel W1 contacts the first auxiliary track P1.
- the second auxiliary track P2 is not arranged at the position where the second auxiliary wheel W2 contacts while the first auxiliary wheel W1 contacts the first auxiliary track P1.
- the lower end of the wheel W2 does not come into contact with any of the first track R1, the first auxiliary track P1, and the second auxiliary track P2.
- the traveling vehicle 1 is horizontally supported by the front drive wheel 21, the first auxiliary wheel W1, and the rear drive wheel 21 in the traveling direction.
- the states shown in FIGS. 11A to 11C are the states when the lower ends of the drive wheels 21 enter the second gap D2.
- the second auxiliary track P2 is arranged such that the contact of the second auxiliary wheel W2 starts when the lower end of the drive wheel 21 reaches the second gap D2.
- the lower end contacts the second auxiliary track P2. Therefore, the lower end of the drive wheel 21 does not fall into the second gap D2.
- the lower end of the first auxiliary wheel W1 does not contact any of the first track R1, the first auxiliary track P1, and the second auxiliary track P2.
- the traveling vehicle 1 is horizontally supported by the second auxiliary wheel W2 on the front side and the drive wheel 21 on the rear side in the traveling direction.
- the states shown in FIGS. 12A to 12C are the states after the lower ends of the drive wheels 21 have exited from the second gap D2.
- the lower ends of the drive wheels 21 come into contact with the first track R1.
- the lower ends of the drive wheels 21 contact the first track R1
- the lower ends of the first auxiliary wheel W1 and the second auxiliary wheels W2 are the first track R1 and the first track R1. It does not come into contact with either the first auxiliary track P1 or the second auxiliary track P2. Therefore, the traveling vehicle 1 is horizontally supported by the front drive wheel 21 and the rear drive wheel 21 in the traveling direction.
- the connecting portion 30 connects the upper unit of the main body portion 10 and the traveling portion 20.
- the connecting portion 30 hangs down from the rotation shaft of the drive wheel 21, and connects the main body portion 10 and the traveling portion 20.
- the connecting portions 30 are provided at the four corner portions of the upper surface 17a of the upper unit 17 (main body portion 10), respectively.
- the main body 10 is suspended by the connecting portion 30 and is arranged below the track R.
- the connecting portion 30 has a supporting member 31 and a connecting member 32.
- the support member 31 rotatably supports the rotation axis AX3 of the drive wheel 21 and the rotation axes AX4 and AX5 of the first auxiliary wheel W1 and the second auxiliary wheel W2.
- the support member 31 holds the relative positions of the drive wheel 21, the first auxiliary wheel W1, and the second auxiliary wheel W2.
- connection member 32 extends downward from the support member 31 and is connected to the upper surface 17 a of the upper unit 17 to hold the upper unit 17.
- the connection member 32 is internally provided with a transmission mechanism that transmits the driving force of the traveling drive unit 33, which will be described later, to the drive wheels 21.
- the transmission mechanism may be configured to use a chain or a belt, or may be configured to use a gear train.
- the connecting member 32 is provided rotatably in the ⁇ Z direction about the turning axis AX2. By rotating the connecting member 32 around the turning axis AX2, the drive wheel 21 can be turned in the ⁇ Z direction.
- a traveling drive unit 33 and a steering mechanism 34 are provided in the connecting unit 30.
- the traveling drive unit 33 is attached to the connection member 32.
- the traveling drive unit 33 is a drive source that drives the drive wheels 21, and for example, an electric motor or the like is used.
- the four drive wheels 21 are driven by the traveling drive unit 33 to become drive wheels.
- the four drive wheels 21 are controlled by the control unit 50 so as to have the same or substantially the same rotation speed.
- the steering mechanism 34 turns the traveling member 20 in the ⁇ Z direction by rotating the connecting member 32 of the connecting portion 30 about the turning axis AX2.
- the traveling direction of the traveling vehicle 1 can be changed from the first direction (X direction) to the second direction (Y direction) or from the second direction to the first direction.
- the steering mechanism 34 has a drive source 35, a pinion gear 36, and a rack 37.
- the drive source 35 is attached to a side surface of the traveling drive unit 33, which is separated from the turning axis AX2.
- As the drive source 35 for example, an electric motor or the like is used.
- the pinion gear 36 is attached to the lower surface side of the drive source 35, and is rotationally driven in the ⁇ Z direction by the drive force generated by the drive source 35.
- the pinion gear 36 has a circular shape in plan view and has a plurality of teeth in the circumferential direction of the outer circumference.
- the rack 37 is fixed to the upper surface 17a of the upper unit 17.
- the racks 37 are provided at the four corners of the upper surface 17a of the upper unit 17, respectively, and are provided in a fan shape around the turning axis AX2 of the traveling unit 20.
- the rack 37 has a plurality of teeth that mesh with the teeth of the pinion gear 36 in the outer circumferential direction.
- the pinion gear 36 and the rack 37 are arranged with their teeth meshing with each other.
- the pinion gear 36 moves in the circumferential direction around the turning axis AX2 along the outer periphery of the rack 37.
- the traveling drive unit 33 and the steering mechanism 34 turn together with the pinion gear 36 in the circumferential direction about the turning axis AX2.
- each of the running parts 20 arranged at the four corners of the upper surface 17a turns about the turning axis AX2 in the ⁇ Z direction within a range of 90 degrees.
- the drive of the steering mechanism 34 is controlled by the control unit 50.
- the control unit 50 may instruct the four traveling units 20 to perform the turning motions at the same timing, or may perform the turning motions at different timings.
- the traveling unit 20 the state where the drive wheels 21 are in contact with one of the first track R1 and the second track R2 is changed to the state of contact with the other. Therefore, the traveling direction of the traveling vehicle 1 can be switched between the first direction (X direction) and the second direction (Y direction).
- 13A to 13C are diagrams showing an operation of changing the traveling direction of the traveling vehicle system SYS from the + Y direction to the + X direction.
- the traveling vehicle system SYS travels in the + Y direction and reaches the position where the main body portion 10 reaches within one section (cell C) of the track R (the four corners are in the partial track R3). Stop at the position you are approaching. That is, the control unit 50 (see FIG. 5) stops the driving of the traveling drive unit 33 at the above-mentioned position based on the position information from the position detection unit (not shown). At this time, the four drive wheels 21 are all in contact with the traveling surface R2a of the second track R2.
- the control unit 50 drives the steering mechanism 34 to turn the coupling unit 30, and causes the traveling units 20 arranged at the four corners to turn the turning axes AX2. Rotate in the ⁇ Z direction as the center.
- the traveling parts 20 and the like that are diagonally turn in the same direction For example, among the four traveling units 20, the upper left traveling unit 20 and the like in the figure and the lower right traveling unit 20 and the like turn clockwise.
- the traveling unit 20 and the like on the upper right and the traveling unit 20 and the like on the lower left in the figure turn counterclockwise.
- Such a turning operation may be performed at the same timing, for example, the upper left and lower right running parts 20 and the like in the figure are first turned at the same time, and then the upper right and lower left running parts are shown in the figure. You may turn at different timings, such as turning 20 etc. simultaneously.
- the control unit 50 stops the driving of the steering mechanism 34 after the traveling units 20 and the like each turn 90 ° in the ⁇ Z direction.
- the traveling vehicle system SYS can travel in the + X direction.
- the traveling vehicle system SYS can also travel in the -X direction. Further, even when the traveling unit 20 or the like turns, the main body unit 10 does not turn. Therefore, the orientation of the main body portion 10 is not changed whether the traveling vehicle system SYS travels in the Y direction or in the X direction.
- the traveling vehicle system SYS of the present embodiment includes the track R and the traveling vehicle 1 that travels along the track R, and the track R is sequentially arranged along the traveling direction of the traveling vehicle 1.
- the traveling vehicle 1 has a first clearance D1, a partial track R3, and a second clearance D2, and the traveling vehicle 1 has drive wheels 21 rolling on the traveling surfaces R1a, R2a, and R3a of the track R and the traveling surfaces R1a and R2a.
- the first auxiliary wheel W1 which is not in contact with R3a and is arranged on the rear side in the traveling direction of the drive wheel 21 and whose vertical relative position to the drive wheel 21 is fixed, and the traveling surfaces R1a, R2a, R3a.
- the second auxiliary wheel W2 which is not in contact with the driving wheel 21 and is arranged on the front side in the traveling direction of the driving wheel 21 and whose vertical relative position to the driving wheel 21 is fixed, and the driving wheel 21 in the traveling direction.
- Between the rotation axis of the first auxiliary wheel W1 and the rotation axis of the first auxiliary wheel W1 7 is equal to or longer than the length L8 of the first gap D1 in the traveling direction, and the gap L9 between the rotation axis of the drive wheel 21 and the rotation axis of the second auxiliary wheel W2 in the traveling direction is the length of the second gap D2 in the traveling direction.
- It is provided on the front side of D2 and has a length in the traveling direction at least equal to the length of the second gap D2 in the traveling direction, and when the drive wheel 21 retreats from the partial track R3, the lower end of the drive wheel 21 is in the second direction.
- the traveling vehicle system SYS is an arbitrary configuration other than the above, and may or may not have a configuration other than the above.
- the first auxiliary wheel W1 is in contact with the first auxiliary track P1 and the second auxiliary wheel W2 is the traveling surface R1a of the track R.
- R2a, R3a and the second auxiliary track P2 are in a non-contact state, and while the lower end of the drive wheel 21 passes through the second gap D2, the second auxiliary wheel W2 abuts on the second auxiliary track P2. Since the auxiliary wheel W1 is in a non-contact state with the traveling surfaces R1a, R2a, R3a of the track R and the second auxiliary track P2, the drive wheel 21 is driven by one of the first auxiliary wheel W1 and the second auxiliary wheel W2.
- first auxiliary wheel W1 and the second auxiliary wheel W2 rotate
- first auxiliary wheel W1 and the second auxiliary wheel W2 may be configured to slip without rotating.
- the configuration in which the main body portion 10 is formed to have a size that fits within one section of the lattice-shaped trajectory R in a plan view has been described as an example, but the configuration is not limited to this configuration.
- the main body 10 may be formed to have a size larger than a section of the track R in a plan view, or may have a shape in which a part of the section of the track R projects.
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Abstract
Description
1…走行車
D…隙間
D1…第1隙間
D2…第2隙間
M…物品
R…軌道
R1…第1軌道
R2…第2軌道
10…本体部
20…走行部
21…駆動輪
D1…第1隙間
D2…第2隙間
P1…第1補助軌道
P2…第2補助軌道
R1…第1軌道
R2…第2軌道
R3…部分軌道
W1…第1補助輪
W2…第2補助輪
Claims (9)
- 軌道と、前記軌道に沿って走行する走行車と、を含み、
前記軌道は、前記走行車の走行方向に沿って順に第1隙間と、部分軌道と、第2隙間とを有し、
前記走行車は、前記軌道の走行面を転動する駆動輪と、前記走行面に対して非接触でありかつ前記駆動輪の走行方向の後方側に配置されて前記駆動輪に対する上下方向の相対位置が固定された第1補助輪と、前記走行面に対して非接触でありかつ前記駆動輪の走行方向の前方側に配置されて前記駆動輪に対する上下方向の相対位置が固定された第2補助輪と、を有し、
前記走行方向における前記駆動輪の回転軸と前記第1補助輪の回転軸との間隔が前記第1隙間の前記走行方向における長さ以上であり、前記走行方向における前記駆動輪の回転軸と前記第2補助輪の回転軸との間隔が前記第2隙間の前記走行方向における長さ以上である、走行車システムであって、
前記走行方向において前記第1隙間の手前側に設けられ、少なくとも前記第1隙間の前記走行方向における長さと同じ前記走行方向の長さを有し、前記駆動輪が前記部分軌道に進入する際に、前記駆動輪の下端が前記第1隙間を通過する間において前記第1補助輪の下端が当接する第1補助軌道と、
前記走行方向において前記第2隙間の先側に設けられ、少なくとも前記第2隙間の前記走行方向における長さと同じ前記走行方向の長さを有し、前記駆動輪が前記部分軌道から退出する際に、前記駆動輪の下端が前記第2隙間を通過する間において前記第2補助輪の下端が当接する第2補助軌道と、を備え、
前記第1補助輪が前記第1補助軌道に当接している間に前記第2補助輪が当接する位置には前記第2補助軌道がなく、
前記第2補助輪が前記第2補助軌道に当接している間に前記第1補助輪が当接する位置には前記第1補助軌道がない、走行車システム。 - 前記第1補助輪及び前記第2補助輪は、前記駆動輪に対して回転軸方向にずれて、かつ下端が前記駆動輪の下端より高い第1高さとなるように配置され、
前記第1補助軌道及び前記第2補助軌道は、前記軌道の前記走行面からずれた位置に設けられて前記走行面より高い第2高さの上面を有する、請求項1に記載の走行車システム。 - 前記第1高さと前記第2高さとは、同一又はほぼ同一である、請求項2に記載の走行車システム。
- 前記第1補助軌道及び前記第2補助軌道の一方又は双方は、前記軌道に設けられる凸部である、請求項2又は請求項3に記載の走行車システム。
- 前記第1補助輪及び前記第2補助輪は、互いに回転軸方向にずれて配置され、
前記第1補助軌道及び前記第2補助軌道は、それぞれ前記第1補助輪及び前記第2補助輪に対応して、前記回転軸方向にずれて配置される、請求項1から請求項4のいずれか一項に記載の走行車システム。 - 前記第1補助軌道は、前記駆動輪の下端が前記第1隙間に達したときに前記第1補助輪の当接が始まるように配置され、
前記第2補助軌道は、前記駆動輪の下端が前記第2隙間に達したときに前記第2補助輪の当接が始まるように配置される、請求項1から請求項5のいずれか一項に記載の走行車システム。 - 前記走行車は、前記走行方向において前方側及び後方側のそれぞれに前記駆動輪を備え、
前記走行方向において前方側の前記駆動輪の下端と後方側の前記駆動輪の下端との前記走行方向における間隔は、前記走行方向における前記部分軌道の長さから、前記走行方向における前記第1隙間の手前側の端部と前記第2隙間の先側の端部との間の長さまでの範囲を除いて設定される、請求項1から請求項5のいずれか一項に記載の走行車システム。 - 前記走行車は、前記駆動輪の回転軸から垂下する連結部材に取り付けられて前記軌道より下方に位置する本体部を備え、
前記第1隙間及び前記第2隙間の双方は、前記連結部材が通過可能に設けられる、請求項1から請求項7のいずれか一項に記載の走行車システム。 - 前記軌道は、第1方向に沿って設けられた第1軌道と、前記第1方向に直交する第2方向に沿って設けられた第2軌道と、を有し、
前記部分軌道は、前記第1軌道と前記第2軌道との交差部分に配置される、請求項1から請求項8のいずれか一項に記載の走行車システム。
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US17/288,938 US12116021B2 (en) | 2018-10-29 | 2019-09-13 | Traveling vehicle system |
EP19878857.2A EP3875331B1 (en) | 2018-10-29 | 2019-09-13 | Vehicle system |
IL282630A IL282630B (en) | 2018-10-29 | 2019-09-13 | Traveling vehicle system |
JP2020554808A JP7040636B2 (ja) | 2018-10-29 | 2019-09-13 | 走行車システム |
SG11202104310QA SG11202104310QA (en) | 2018-10-29 | 2019-09-13 | Traveling vehicle system |
CN201980070858.6A CN112930291B (zh) | 2018-10-29 | 2019-09-13 | 行驶车系统 |
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US12116021B2 (en) | 2024-10-15 |
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CN112930291B (zh) | 2023-08-01 |
TWI799660B (zh) | 2023-04-21 |
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