WO2009104568A1

WO2009104568A1 - Single-axis drive aligner

Info

Publication number: WO2009104568A1
Application number: PCT/JP2009/052616
Authority: WO
Inventors: 小島健一
Original assignee: Kojima Kenichi
Priority date: 2008-02-18
Filing date: 2009-02-17
Publication date: 2009-08-27
Also published as: JP2009194346A

Abstract

An aligner which has a simple mechanism, can be easily adjusted, occupies less space, and is highly accurate. The minimum distance (δ2) and the maximum distance (δ3) between a rotating axis (5a) and an outer peripheral position of a wafer (4) are measured by a line sensor (3), the difference (δ4) between the minimum and maximum distances (δ2, δ3) is calculated based on data obtained by the measurement, and the rotation of the rotating axis (5a) is stopped at either a state in which the outer peripheral position of the wafer (4) is located at the minimum distance or a state in which the outer peripheral position of the wafer (4) is located at the maximum distance. Then, a first drive section (7) is driven, with a lift pin (6) located at a lowered position, to move the lift pin (6) by half the measured difference (δ4). Then the pin (6) is lifted by drive of a second drive section (8), and a vacuum (9) is operated to convey the wafer (4) in the X-axis direction by half the measured difference (δ4) with the wafer (4) held at the lift pin (6) by a vacuum chuck provided to the lift pin (6).

Description

Single axis drive aligner

The present invention relates to an optical non-contact aligner for semiconductor wafers.

When processing a semiconductor wafer such as forming a semiconductor gate on a semiconductor wafer, the position of the orientation flat cut out in a string shape or the notch cut out in a V shape or U shape always matches the reference rotation position. It is required to be set in the processing stage under the condition of

Therefore, as shown in Patent Document 1, after the orientation flat or notch aligning position is aligned with the reference rotation position by the orientation flat aligning machine or the notch aligning machine, the wafer taken out from the cassette is set on the processing stage. .

In order to efficiently perform this series of processes, one or a plurality of process chambers for performing processes such as etching, sputtering, cleaning, or heating, and an aligning chamber for aligning the semiconductor wafer are provided. A structure connected to a transfer chamber having a transfer robot for transferring is generally adopted.

In the semiconductor device having such a configuration, the semiconductor wafer to be processed is transferred to the aligning chamber by the transfer robot, and after the center position and direction are identified, the transfer is again transferred to the predetermined processing chamber by the transfer robot.

The notch alignment is usually performed by a vacuum suction method, and the holding means for holding the wafer is rotated by vacuum sucking an area from the outer periphery of the wafer to 5 mm, and the notch position is detected during the rotation. The position is adjusted to match the reference rotation position.

As described above, in the conventional optical non-contact type aligner for semiconductor wafers for aligning semiconductor wafers in the aligning chamber, the drive axis is two axes, the X axis and the Y axis, and the spindle is the rotation axis. For example, 4 stepping motors are used for driving, and a positioning sensor is provided for each of the X-axis and Y-axis origin sensors. One sensor and one alignment position sensor are provided. The wafer on the spindle is held by vacuum suction by a vacuum solenoid valve and a vacuum switch.

When the robot hand on which the wafer is placed reaches the center of the turntable (vacuum chuck) at the set height, the turntable rises, receives the wafer, stops at the upper limit position, and simultaneously sucks the vacuum. Next, the robot hand moves backward and returns to the home position, and the wafer (rotary table) rotates at a specified angle, and the line sensor measures the dimensions from the center to the end face before rotation and stops, and releases the vacuum.

Next, lower the turntable to the lower limit position, place the wafer on the lift pins, calculate the center point of the wafer based on the angle and measurement dimensions, and move the X and Y axes respectively at the lower limit position to set the center of the turntable to the wafer center. Move it to the position you think. Next, the turntable is raised, the wafer is sucked and rotated to measure necessary edges and the like, the vacuum is released after completion, the turntable is lowered to the lower limit position, and the robot hand carries out the wafer.

The wafer sizes to be measured are 100 mm, 125 mm, 150 mm, and 200 mm semiconductor wafers, the positioning accuracy is about ± 0.1 mm, and the positioning time from the start to the end of the spindle is about 3 seconds. .

As described above, the conventional optical non-contact aligner for semiconductor wafers has four functions, that is, the turntable rotates, moves up and down, and operates in the X and Y directions, and its mechanism is complicated and therefore adjustment is complicated. It was a thing.

In addition, since the conventional methods indicate the position information divided into the X axis and the Y axis by calculation, the probability of returning to the predetermined position (origin) is low and the position accuracy is also low.

Patent Document 2 discloses an aligner provided in a semiconductor wafer transfer robot that can transfer and align a semiconductor wafer with high accuracy and contribute to a reduction in the area occupied by a semiconductor manufacturing apparatus. According to the aligner provided in the transfer robot disclosed in Patent Document 2, the turntable of the aligner is mounted on the driving body of the transfer robot, and the center position of the semiconductor wafer W detected by the optical sensor by the turntable is the fork. Rotate and stop the semiconductor wafer W so that it is located on the trajectory where it moves, extend and retract the telescopic arm appropriately so that the fork and the center position of the semiconductor wafer W are aligned, and then the turntable descends The semiconductor wafer W is placed on the fork, and the eccentricity of the semiconductor wafer W is corrected.

JP 2000-21596 JP-A-11-343028

The aligner disclosed in Patent Document 2 corrects the amount of eccentricity of the semiconductor wafer W by rotating the semiconductor wafer W so that the center position of the semiconductor wafer W detected by the optical sensor is located on the track where the fork moves. .

However, in such a system, an aligner turntable must be mounted on the driving body of the transfer robot, and this method cannot be applied when aligning a semiconductor wafer by providing an aligning chamber.

Moreover, the conventional aligner is mainly used to align the notch position of the wafer in the cassette by alignment, and an error of several millimeters is not a problem, and there is room for the method of Patent Document 2 in that respect. .

However, if the necessity for improving the alignment accuracy of the aligner, such as precisely observing the wafer end face and the outer peripheral state for the purpose of improving the device yield, will increase dramatically in the future. The contact type aligner and the method described in Patent Document 2 cannot sufficiently meet the needs.

An object of the present invention is to provide an aligner that has a simple mechanism, is not complicated to adjust, is space-saving, and is highly accurate in view of problems in the prior art.

In other words, the aligner of the present invention is configured to measure a rotary table that is rotated by holding a circular positioning target in the X-axis, Y-axis, and Z-axis three-dimensional coordinate space, and a circular positioning target that is held by the rotary table. A detection unit that detects the position of the point in the X-axis direction and a positioning calculation processing unit that performs positioning calculation based on the measurement data of the X-axis direction position of the measurement point measured by the detection unit. Based on this, the circular positioning object is displaced in the X-axis direction to position the circular positioning object with respect to the turntable.

Further, the aligning method of the present invention includes a step of holding a circular positioning target on the rotary table in the X-axis / Y-axis / Z-axis three-dimensional coordinate space, and rotating the circular positioning target held on the rotary table. A step of detecting a position of a circular positioning target measurement point in the X-axis direction, a step of performing a positioning calculation based on measurement data of an X-axis direction position of a circular positioning target measurement point rotating on a turntable, and a positioning calculation Based on the result, the circular positioning target is displaced in the X-axis direction with respect to the turntable and positioned and held.

Holding means for holding the circular object to be positioned and displacing in the X-axis / Z-axis direction may be provided, and the rotating table may be fixed in the X-axis / Y-axis / Z-axis direction.

Holding means for holding the circular object to be positioned and fixing it at least in the X-axis and Y-axis directions may be provided so that the turntable can be displaced in the X-axis direction.

The detection unit may be configured to be displaceable in the X-axis direction.

You may make it the X-axis direction position of the said measurement point be an outer peripheral position of the circular positioning target rotated on a turntable.

A difference δ between the shortest distance and the longest distance between the outer peripheral position of the circular positioning target obtained by the detection unit and the positioning calculation processing unit and the rotation center of the turntable is calculated, and the displacement of the circular positioning target in the X-axis direction is calculated. Can be made to be δ / 2 displacement.

The circular object to be positioned can be a semiconductor wafer.

The detection unit may be an optical non-contact measuring instrument (line sensor).

[Action]

The aligner according to the present invention applies the circular positioning target to the X based on the positioning calculation calculation result based on the measurement data of the X axis direction position of the measurement point measured by the detection unit that detects the X axis direction position of the measurement point of the circular positioning target. Since the circular positioning object is positioned with respect to the turntable by being displaced in the axial direction, the displacement is performed only by movement on a single axis (one axis) in the X-axis direction, so that extremely high control accuracy can be obtained.

In particular, by fixing the turntable and performing only rotation, the height and center position of, for example, a semiconductor wafer that is a circular positioning target remains unchanged, and accuracy when measuring the outer periphery of the wafer or searching for a specific position And reliability will be improved dramatically. In addition, when the position of the turntable for receiving the wafer is fixed, it is not necessary to change the positional relationship between the wafer transfer robot and the turntable of the aligner even when the wafer size is changed.

Further, when the lift pins are moved up and down, the vertical movement is performed regardless of the positioning measurement function, so that it is not necessary to consider the control accuracy of the lift pins up and down movement.

According to the aligner and aligning method of the present invention, it is easy to adjust with a simple mechanism, and high-precision aligning is possible with a space-saving aligner.

First Embodiment FIGS. 1 to 3 show an aligner according to an embodiment of the present invention.

As shown in FIGS. 1 to 3, the aligner 1 according to the embodiment of the present invention includes a turntable 5 that holds a line sensor 3 and a wafer 4 on the upper surface of a frame 2. The turntable 5 has a rotation shaft 5 a, and lift pins 6 that are holding means are disposed at four positions surrounding the turntable 5. Further, the first drive unit 7 and the second drive unit 8 are housed in the internal rules of the frame 2.

The turntable 5 rotates in the circumferential direction of the rotary shaft 5a in the horizontal plane by driving the rotary shaft 5a. However, it does not move in the X-axis direction in the upper horizontal plane, the Y-direction, and the Z-axis direction perpendicular to the horizontal plane in FIG. On the other hand, the lift pin 6 is driven and moved in the X-axis direction by the first drive unit 7 and is lifted and lowered in the Z-axis direction by the drive of the second drive unit 8.

The turntable 5 and lift pins 6 include a vacuum chuck driven by a vacuum (not shown), whereby the wafer 4 is sucked and held by the turntable 5 and lift pins 6.

On the other hand, as shown in FIG. 3, the line sensor 3 is arranged so as to be movable in the direction of the rotation center of the turntable 5, that is, in the X-axis direction, and is operated on one axis fixed in the Y-direction and the Z-axis direction. I do.

In other words, the rotary shaft 5a of the turntable 5 is arranged extending in the Z-axis direction on the X-axis direction, which is the operation direction on one axis of the line sensor 3.

This line sensor 3 is mounted on a precision ball slide (not shown), which is a linear movement mechanism in which steel balls that contact the track at four points are arranged in two rows, thereby performing a stable and highly accurate linear motion. .

Further, the main body 3a is provided with a detection recess 3b formed so as to be cut out in the X-axis direction for sensing, and the height of the intermediate portion in the vertical direction of the detection recess 3b substantially coincides with the upper surface height of the turntable 5. As described above, the line sensor 3 is disposed on the frame 2.

The above-described line sensor 3 and other units are electrically connected to a positioning calculation processing unit configured by a semiconductor substrate unit or a computer (not shown), and control signals are input / output between them.

The aligner 1 according to the embodiment of the present invention has the above-described configuration, and the rotation axis 5a of the turntable 5 and the outer peripheral position of the wafer 4 rotated by the turntable 5 by the X-axis operation on one axis of the line sensor 3 The shortest distance and the longest distance are measured, and the position of the wafer 4 is adjusted based on the measurement data. Here, the shortest distance is a distance that the rotation axis 5a and the outer peripheral position of the wafer 4 are closest to each other in the X-axis direction.

Here, the longest distance is a distance in which the rotation shaft 5a and the wafer 4 outer peripheral position are farthest apart in the X-axis direction.

The aligning process using the aligner 1 according to the embodiment of the present invention will be specifically described below. 14 shows an example of an aligning process according to FIGS.

FIG. 4 shows a state in which the turntable 5 and the lift pins 6 are at their home positions and are waiting for the wafer 4 to be transferred.

First, the lift pins 6 are raised by driving the second drive unit 8, the vacuum is operated, the vacuum chuck provided on the lift pins 6 sucks and holds the wafer 4 transported by a robot arm (not shown), and further sucks the wafer 4. By lowering the lift pins 6 that are held, the wafer 4 is sucked and held by the vacuum chuck provided on the turntable 5 (FIGS. 5 and 6).

In this state, as shown in FIG. 8 (a), the arrangement with the position adjusted is not particularly performed, and the center position of the wafer 4 and the center position of the rotation shaft 5a indicated by the solid line in FIG. .

A displacement distance (hereinafter referred to as “deviation distance”) between the rotation shaft 5a and the center position of the wafer 4 is denoted as δ1.

At that time, the line sensor 3 for detecting the outer peripheral position of the wafer 4 is moved to a predetermined position in the X-axis direction at the time of determining the wafer size to be measured or processed (FIG. 7), and is fixed after the movement. When the wafer size is changed, the movement is performed again. The predetermined position of the line sensor 3 is a position where the outer periphery of the wafer 4 to be measured coincides with the center of the measurement range of the line sensor 3 based on the calculated radius calculated from the calculation result based on the wafer size.

By setting the position of the line sensor 3 in this way, the center shifts, and the difference between the longest and shortest distances of the wafer is maximized due to the positional shift between the rotation shaft 5a and the center position of the wafer 4. It becomes possible to do.

For convenience of the following description, the wafer 4 indicated by a solid line in FIG. 8 shows a state where the rotation axis 5a and the outer peripheral position of the wafer 4 are the shortest distance when measured by the line sensor 3.

Further, the wafer 4 indicated by an imaginary line in FIG. 8A shows a case where the wafer 4 is precisely adjusted, and the center position thereof coincides with the center position of the rotating shaft 5a.

As shown in FIG. 8B, the wafer 4 held by the turntable 5 rotates as indicated by an imaginary line with the rotation shaft 5a as a core. The rotating direction of the rotating shaft 5a and the rotating direction of the wafer 4 are indicated by arrows on the drawing.

The solid line wafer 4 shown in FIG. 8C shows a state where the rotation axis 5a and the outer peripheral position of the wafer 4 are at the shortest distance, and the imaginary line wafer 4 shows a state where the rotation axis 5a and the outer peripheral position of the wafer 4 are at the longest distance.

In this state, a difference δ4 between the shortest distance δ2 and the longest distance δ3 is calculated based on the measurement data of the shortest distance δ2 and the longest distance δ3 between the rotation axis 5a measured by the line sensor 3 and the outer peripheral position of the wafer 4. 1/2 of the measured dimension difference δ4 and the deviation distance δ1 shown in FIG.

As shown in FIG. 9, in the second step, the rotation of the rotating shaft 5a is stopped and the rotation of the wafer 4 held by the turntable 5 is in a state where the outer peripheral position of the wafer 4 is the shortest distance or the outer peripheral position of the wafer 4 is the longest. Stop in either of the distance states.

Next, the first drive unit 7 is driven while the lift pin 6 is in the lowered position, and the first drive unit 7 is moved by a half of the measurement dimension difference δ4. The lift pin 6 is moved up by the drive of the second drive unit 8, and the vacuum 9 is operated to operate the lift pin 6 The wafer 4 is sucked and held by the vacuum chuck provided in (FIGS. 10 and 11).

Thereafter, the lift pin 6 drives the first drive unit 7 to return to the home position and descend (FIGS. 12 and 13).

In the above steps, the wafer 4 in a stopped state is held by the lift pins 6 and is transported in the X-axis direction by a half of the measured dimension difference δ4.

When the wafer 4 is stopped in a state where the outer peripheral position of the wafer 4 is the shortest distance, the transfer direction is the direction from the rotating shaft 5a toward the line sensor 3, and the outer peripheral position of the wafer 4 is the longest distance. Is stopped from the line sensor 3 toward the rotating shaft 5a.

The wafer 4 that is precisely positioned and held with respect to the turntable 5 in the above process is rotated, and necessary edges and the like are measured.

After the measurement is completed, the lift pins 6 are raised and transferred to a robot hand (not shown), and the wafer 4 is unloaded by the robot hand.

In the above process, the wafer 4 is transported in the required direction by 1/2 of the measurement dimension difference δ4, so that 1/2 of the measurement dimension difference δ4 and the deviation distance δ1 shown in FIG. Therefore, the deviation of the deviation distance δ1 between the rotation shaft 5a and the center of the wafer 4 is eliminated, the rotation shaft 5a and the center position of the wafer 4 coincide with each other, and the two are positioned precisely.

Therefore, according to the aligner 1 of this embodiment, the position of the wafer transfer robot or the like can be changed even when the size of the wafer 4 is changed by disposing the turntable 5 that receives the wafer 4 and performs rotation work at a fixed position. Since there is no need to change the relationship, the height and center position of the wafer 4 can be precisely positioned and held, so the position accuracy and reliability when measuring the outer periphery of the wafer 4 or searching for a specific position, etc. And can be improved dramatically.

Further, since the turntable 5 is fixed, the movement of the lift pin 6 movable in the Z-axis direction and the X-axis direction does not interfere with the measurement by the line sensor 3, and the lift pin 6 is positioned in the Z-axis direction. A control mechanism or the like is not required.

In addition, the wafer 4 is transported and moved only in the X-axis direction except for the rotation operation, the Y-direction movement is not performed, and it is not necessary to consider movement control in the Y-direction, so that high control accuracy can be obtained.

Further, when particularly necessary, it is easy to forcibly return the members such as the turntable 5 and the lift pins 6 to the home position.

14 and 15 show another example of the alignment process performed using the aligner 1 according to the embodiment of the present invention.

As shown in FIG. 14A, the wafer 4 rotation state and the wafer 4 rotation stop state in the state where the wafer 4 outer peripheral position shown in FIG. 15 is the longest distance are different from the process examples shown in FIGS. .

As shown in FIG. 14A, the center position of the wafer 4 indicated by the solid line is shifted from the rotation axis 5a in both the X-axis direction and the Y-direction.

In the drawing, an X-axis direction deviation distance δ1 and a Y-direction deviation distance δ5 indicate a positional deviation distance between the rotation shaft 5a and the wafer 4 center position.

Also in this case, the shortest distance δ2 and the longest distance between the rotating shaft 5a of the turntable 5 and the outer peripheral position of the wafer 4 rotated by the turntable 5 are rotated as in the process example shown in FIGS. δ3 is measured, and the position of the wafer 4 is adjusted based on the measurement data.

15A and 15B show a state in which the rotation of the wafer 4 is stopped in a state where the outer peripheral position of the wafer 4 is the longest distance. As shown in FIG. 15C, the X directed from the line sensor 3 to the rotation shaft 5a. By simply transporting the wafer 4 in the axial direction, the deviation of the X-axis direction deviation distance δ1 and the Y-direction deviation distance δ5 between the rotation axis 5a and the center of the wafer 4 is eliminated, so that the rotation axis 5a and the center position of the wafer 4 are located. They are coincident and are positioned precisely with respect to each other.

In the above embodiment, the wafer 4 mounted on the turntable 5 is rotated, the longest point and the shortest point are measured by the line sensor 3, and it is confirmed that the sum matches the diameter of the wafer 4. Therefore, it can be determined that the operation state is in a steady state based on the fact that the diameter matches the diameter of the wafer 4.

In this case, when the longest point and the shortest point are measured and the sum does not coincide with the diameter of the wafer 4, a singular point such as a notch on the wafer 4 may be the cause. In that case, the wafer 4 is further rotated by a specified angle on the turntable 5 and stopped, and a predetermined distance is moved in the X-axis direction while the lift pins 6 are lowered, and the lift pins 6 are lifted to raise the wafer. 4, the lift pin 6 is moved to the home position while the lift pin 6 is moved down, and the lift pin 6 is lowered and placed on the turntable 5, whereby the measurement point leaves the singular point of the wafer 4, and the above embodiment is performed again. By performing the alignment operation in this step, the wafer 4 can be positioned.

[Second Embodiment]

FIGS. 16 to 23 show process examples of the second embodiment of the aligner and aligning method of the present invention.

The second embodiment is different from the first embodiment shown in FIGS. 8 to 15 in that the turntable 5 can be displaced in the XZ-axis direction and the lift pin 6 is fixed in the X-axis / Y-axis directions. .

By doing so, the cycle speed can be made faster in the second embodiment than in the first embodiment. In the present embodiment, the home position of the turntable 5 is the lowest point, and the rotation shaft 5a is set at the same position as the center position of the lift pin.

FIG. 16 shows a state in which the turntable 5 and the lift pins 6 are in the home position in the second embodiment.

First, the wafer 4 is transferred to the rotating shaft 5 a of the turntable 5 at a set height by a robot hand (not shown). In this state, the turntable 5 is raised, and the wafer 4 is held by the vacuum chuck (FIGS. 17 and 19A).

As the robot hand moves backward and returns to the home position, the wafer 4 is rotated by the turntable 5 and the shortest distance δ2 and the longest distance δ3 of the outer periphery of the wafer 4 are measured by the line sensor 3 (FIGS. 18 and 19B).

After the measurement, the rotation of the wafer 4 is stopped (FIG. 19C). The stop position is a position where the distance between the outer peripheral position of the wafer 4 and the rotation shaft 5a of the turntable 5 is the longest distance δ3 or the shortest distance δ2.

Next, the turntable 5 is lowered and the wafer 4 is held by the lift pins 6 (FIG. 21). In this state, the rotary table 5 moves along the X-axis direction by 1/2 of the measurement dimension difference δ4 while keeping the lowered position, and ascends and holds the wafer 4 by the vacuum chuck (FIGS. 22 and 23). Thereafter, the turntable 5 returns to the home position (FIG. 24), rotates with the wafer 4 held by the turntable 5 and measures necessary edges and the like. After the measurement is completed, the wafer 4 is unloaded by the robot hand.

The displacement direction in which the rotary table 5 moves along the X-axis direction by ½ of the measurement dimension difference δ4 while being in the lowered position is the shortest distance between the wafer 4 and the outer peripheral position of the wafer 4 as in the first embodiment. If the wafer 4 is stopped in a state where the outer peripheral position of the wafer 4 is the longest distance, the wafer 4 is displaced toward the line sensor 3. Thereby, the center position of the rotating shaft 5a and the wafer 4 is precisely positioned.

It is an aligner model perspective view of one embodiment of the present invention. It is (a) top view, (b) side view, (c) front view of the aligner shown in FIG. It is (a) top view which shows the operation | movement aspect of the aligner shown in FIG. 1, (b) Other top views. It is a model perspective view which shows the home position in the operation | movement aspect of the aligner of 1st embodiment of this invention. It is a model perspective view which shows the other operation | movement aspect of the aligner of 1st embodiment of this invention. It is a model perspective view which shows the further another operation | movement aspect of the aligner of 1st embodiment of this invention. It is a model perspective view which shows another operation | movement aspect of the aligner of 1st embodiment of this invention. It is (a) top view, (b) side view, and (c) front view for showing the operation mode of the aligner of the first embodiment of the present invention. It is the other (a) top view, (b) side view, and (c) front view for showing the operation mode of the aligner of the first embodiment of the present invention. It is a model perspective view which shows the other operation | movement aspect of the aligner of 1st embodiment of this invention. It is a model perspective view which shows the further another operation | movement aspect of the aligner of 1st embodiment of this invention. It is a model perspective view which shows another operation | movement aspect of the aligner of 1st embodiment of this invention. It is a model perspective view which shows the other operation | movement aspect of the aligner of 1st embodiment of this invention. It is another (a) top view for demonstrating the operation | movement aspect of the aligner of 1st embodiment of this invention, (b) Side view, (c) Front view. It is still another (a) plan view, (b) side view, and (c) front view for illustrating the operation mode of the aligner of the first embodiment of the present invention. It is a model perspective view which shows the operation | movement aspect of the aligner of 2nd embodiment of this invention. It is a model perspective view which shows the other operation | movement aspect of the aligner of 2nd embodiment of this invention. It is a model perspective view which shows the further another operation | movement aspect of the aligner of 2nd embodiment of this invention. It is (a) top view, (b) side view, and (c) front view for showing the operation mode of the aligner of a second embodiment of the present invention. It is the other (a) top view, (b) side view, and (c) front view for showing the operation mode of the aligner of the second embodiment of the present invention. It is a model perspective view which shows another operation | movement aspect of the aligner of 2nd embodiment of this invention. It is a model perspective view which shows another operation | movement aspect of the aligner of 2nd embodiment of this invention. It is a model perspective view which shows another operation | movement aspect of the aligner of 2nd embodiment of this invention. It is a model perspective view which shows the further another operation | movement aspect of the aligner of 2nd embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Aligner, 3 ... Line sensor, 5 ... Turntable, 6 ... Lift pin, 4 ... Wafer, (delta) 1 ... X-axis direction deviation distance, (delta) 5 ... Y-direction deviation distance , Δ2 ... shortest distance, δ3 ... longest distance, δ4 ... difference in measurement dimensions

Claims

The X-axis / Y-axis / Z-axis three-dimensional coordinate space holds the circular positioning target and makes it possible to rotate, and the X-axis position of the measurement point of the circular positioning target held on the rotary base A detection unit for detecting, and a positioning calculation processing unit for performing positioning calculation based on measurement data of the position in the X-axis direction of the measurement point measured by the detection unit. An aligner that is displaced in the axial direction to position a circular positioning target with respect to a turntable.
The aligner according to claim 1, wherein holding means for holding the circular object to be positioned and displacing in the X-axis / Z-axis direction is provided, and the turntable is fixed in the X-axis / Y-axis / Z-axis direction.
The aligner according to claim 1, wherein holding means for holding the circular object to be positioned and fixing at least in the X-axis and Y-axis directions is provided, and the turntable is displaceable in the X-axis direction.
The aligner according to any one of claims 1 to 3, wherein the detection unit is displaceable in the X-axis direction.
The aligner according to any one of claims 1 to 4, wherein a position of the measurement point in the X-axis direction is an outer peripheral position of a circular positioning target that rotates on a turntable.
A difference δ between the shortest distance and the longest distance between the outer peripheral position of the circular positioning target obtained by the detection unit and the positioning calculation processing unit and the rotation center of the turntable is calculated, and the displacement of the circular positioning target in the X-axis direction is calculated. The aligner according to claim 5, wherein is a δ / 2 displacement.
The aligner according to any one of claims 1 to 6, wherein the circular object to be positioned is a semiconductor wafer.
The aligner according to any one of claims 1 to 7, wherein the detection unit is an optical non-contact measuring instrument (line sensor).
The step of holding the circular positioning target on the turntable in the X-axis / Y-axis / Z-axis three-dimensional coordinate space, and the measurement point X of the circular positioning target by rotating the circular positioning target held on the turntable A step of detecting the position in the axial direction, a step of performing positioning calculation based on the measurement data of the X-axis direction position of the measurement point of the circular positioning target rotating on the turntable, and rotating the circular positioning target based on the positioning calculation result An aligning method comprising a step of displacing, positioning, and holding the base in the X-axis direction.
The aligning method according to claim 9, wherein the rotating table is fixed in the X-axis / Y-axis / Z-axis directions, and the holding means for displacing the circular object to be positioned in the Z-axis direction is displaced in the X-axis direction.
The aligning method according to claim 9, wherein holding means for holding the circular object to be positioned is fixed in the X-axis / Y-axis directions, and the turntable is displaced in the X-axis direction.
The aligning method according to any one of claims 9 to 11, wherein the detector is displaced in the X-axis direction.
The aligning method according to any one of claims 9 to 12, wherein a position of the measurement point in the X-axis direction is an outer peripheral position of a circular positioning target that is rotated by a turntable.
The difference δ between the shortest distance and the longest distance between the outer peripheral position of the circular positioning target obtained by the detection step and the positioning calculation step and the rotation center of the turntable is calculated, and the rotation is started from the longest distance outer peripheral position of the circular positioning target. The aligning method according to claim 13, wherein the circular object to be positioned is displaced by δ / 2 toward the center of rotation of the table.
The aligning method according to any one of claims 9 to 14, wherein the circular object to be positioned is a semiconductor wafer.