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WO2008136111A1 - 表面検査装置及び方法 - Google Patents

表面検査装置及び方法 Download PDF

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Publication number
WO2008136111A1
WO2008136111A1 PCT/JP2007/059018 JP2007059018W WO2008136111A1 WO 2008136111 A1 WO2008136111 A1 WO 2008136111A1 JP 2007059018 W JP2007059018 W JP 2007059018W WO 2008136111 A1 WO2008136111 A1 WO 2008136111A1
Authority
WO
WIPO (PCT)
Prior art keywords
data
retrieving
data retrieval
program
retrieval system
Prior art date
Application number
PCT/JP2007/059018
Other languages
English (en)
French (fr)
Inventor
Akihiro Wakabayashi
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/059018 priority Critical patent/WO2008136111A1/ja
Priority to JP2009512842A priority patent/JP4842376B2/ja
Publication of WO2008136111A1 publication Critical patent/WO2008136111A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)

Abstract

　被検体（１０）の表面を検査する表面検査装置（１００）において、パターン（１３２）を有するマスク（１３０）を直線的に照明するライン照明部（１２０）と、被検体の表面に投影された前記マスク（１３０）の前記パターン（１３２）を撮像するラインセンサカメラ（１６０）と、前記ライン照明部（１２０）によって前記被検体の前記表面に投影される照明領域の幅を可変する照明幅可変機構（１４０、１５０）を有することを特徴とする表面検査装置を提供する。
PCT/JP2007/059018 2007-04-26 2007-04-26 表面検査装置及び方法 WO2008136111A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/059018 WO2008136111A1 (ja) 2007-04-26 2007-04-26 表面検査装置及び方法
JP2009512842A JP4842376B2 (ja) 2007-04-26 2007-04-26 表面検査装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059018 WO2008136111A1 (ja) 2007-04-26 2007-04-26 表面検査装置及び方法

Publications (1)

Publication Number Publication Date
WO2008136111A1 true WO2008136111A1 (ja) 2008-11-13

Family

ID=39943233

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/059018 WO2008136111A1 (ja) 2007-04-26 2007-04-26 表面検査装置及び方法

Country Status (2)

Country Link
JP (1) JP4842376B2 (ja)
WO (1) WO2008136111A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075406A (ja) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp 表面欠陥検査方法及びその装置
JP2011076669A (ja) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp 磁気ディスクの両面欠陥検査方法及びその装置
JP2011096305A (ja) * 2009-10-28 2011-05-12 Hitachi High-Technologies Corp 光学式磁気ディスク両面欠陥検査装置及びその方法
WO2018221005A1 (ja) * 2017-05-29 2018-12-06 コニカミノルタ株式会社 表面欠陥検査装置および該方法
JP2021173656A (ja) * 2020-04-27 2021-11-01 学校法人福岡工業大学 画像計測システム、画像計測方法、画像計測プログラムおよび記録媒体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085344A (ja) * 1994-06-15 1996-01-12 Minolta Co Ltd ３次元形状入力装置
JPH11185040A (ja) * 1997-12-24 1999-07-09 Canon Inc 円筒物体の欠陥検査装置および方法並びに記憶媒体
JP2002257528A (ja) * 2001-03-02 2002-09-11 Ricoh Co Ltd 位相シフト法による三次元形状測定装置
JP2004109106A (ja) * 2002-07-22 2004-04-08 Fujitsu Ltd 表面欠陥検査方法および表面欠陥検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085344A (ja) * 1994-06-15 1996-01-12 Minolta Co Ltd ３次元形状入力装置
JPH11185040A (ja) * 1997-12-24 1999-07-09 Canon Inc 円筒物体の欠陥検査装置および方法並びに記憶媒体
JP2002257528A (ja) * 2001-03-02 2002-09-11 Ricoh Co Ltd 位相シフト法による三次元形状測定装置
JP2004109106A (ja) * 2002-07-22 2004-04-08 Fujitsu Ltd 表面欠陥検査方法および表面欠陥検査装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075406A (ja) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp 表面欠陥検査方法及びその装置
JP2011076669A (ja) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp 磁気ディスクの両面欠陥検査方法及びその装置
JP2011096305A (ja) * 2009-10-28 2011-05-12 Hitachi High-Technologies Corp 光学式磁気ディスク両面欠陥検査装置及びその方法
WO2018221005A1 (ja) * 2017-05-29 2018-12-06 コニカミノルタ株式会社 表面欠陥検査装置および該方法
JPWO2018221005A1 (ja) * 2017-05-29 2020-03-26 コニカミノルタ株式会社 表面欠陥検査装置および該方法
JP7021666B2 (ja) 2017-05-29 2022-02-17 コニカミノルタ株式会社 表面欠陥検査装置および該方法
JP2021173656A (ja) * 2020-04-27 2021-11-01 学校法人福岡工業大学 画像計測システム、画像計測方法、画像計測プログラムおよび記録媒体
JP7279882B2 (ja) 2020-04-27 2023-05-23 学校法人福岡工業大学 画像計測システム、画像計測方法、画像計測プログラムおよび記録媒体

Also Published As

Publication number Publication date
JP4842376B2 (ja) 2011-12-21
JPWO2008136111A1 (ja) 2010-07-29

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