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WO2008136111A1 - Data retrieval device, data retrieval system, data retrieving method and data retrieving program - Google Patents

Data retrieval device, data retrieval system, data retrieving method and data retrieving program Download PDF

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Publication number
WO2008136111A1
WO2008136111A1 PCT/JP2007/059018 JP2007059018W WO2008136111A1 WO 2008136111 A1 WO2008136111 A1 WO 2008136111A1 JP 2007059018 W JP2007059018 W JP 2007059018W WO 2008136111 A1 WO2008136111 A1 WO 2008136111A1
Authority
WO
WIPO (PCT)
Prior art keywords
data
retrieving
data retrieval
program
retrieval system
Prior art date
Application number
PCT/JP2007/059018
Other languages
French (fr)
Japanese (ja)
Inventor
Akihiro Wakabayashi
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/059018 priority Critical patent/WO2008136111A1/en
Priority to JP2009512842A priority patent/JP4842376B2/en
Publication of WO2008136111A1 publication Critical patent/WO2008136111A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/50Depth or shape recovery
    • G06T7/521Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)

Abstract

It is an object to provide a surface inspection device (100) to inspect a surface of an object (10) is characterized in comprising a line illuminating unit (120) for linearly illuminating a mask (130) with a pattern (132), a line sensor camera (160) for picking-up the pattern (132) of the mask (130) projected to the surface of the object, and an illumination width variable mechanism (140, 150) for variably changing an illumination width projected to the surface of the object by the line illuminating unit (120).
PCT/JP2007/059018 2007-04-26 2007-04-26 Data retrieval device, data retrieval system, data retrieving method and data retrieving program WO2008136111A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/059018 WO2008136111A1 (en) 2007-04-26 2007-04-26 Data retrieval device, data retrieval system, data retrieving method and data retrieving program
JP2009512842A JP4842376B2 (en) 2007-04-26 2007-04-26 Surface inspection apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059018 WO2008136111A1 (en) 2007-04-26 2007-04-26 Data retrieval device, data retrieval system, data retrieving method and data retrieving program

Publications (1)

Publication Number Publication Date
WO2008136111A1 true WO2008136111A1 (en) 2008-11-13

Family

ID=39943233

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/059018 WO2008136111A1 (en) 2007-04-26 2007-04-26 Data retrieval device, data retrieval system, data retrieving method and data retrieving program

Country Status (2)

Country Link
JP (1) JP4842376B2 (en)
WO (1) WO2008136111A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075406A (en) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp Surface defect inspection method and apparatus of the same
JP2011076669A (en) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp Method and device for inspecting defects on both surfaces of magnetic disk
JP2011096305A (en) * 2009-10-28 2011-05-12 Hitachi High-Technologies Corp Apparatus and method for inspecting surface defect on both sides of optical magnetic disk
WO2018221005A1 (en) * 2017-05-29 2018-12-06 コニカミノルタ株式会社 Surface defect inspection device and method
JP2021173656A (en) * 2020-04-27 2021-11-01 学校法人福岡工業大学 Image measurement system, image measurement method, image measurement program and recording medium

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085344A (en) * 1994-06-15 1996-01-12 Minolta Co Ltd Three-dimensional shape input device
JPH11185040A (en) * 1997-12-24 1999-07-09 Canon Inc Defect inspection device and method for cylindrical object and storage medium
JP2002257528A (en) * 2001-03-02 2002-09-11 Ricoh Co Ltd Three-dimensional shape measuring device by phase shift method
JP2004109106A (en) * 2002-07-22 2004-04-08 Fujitsu Ltd Surface defect inspection method and surface defect inspection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085344A (en) * 1994-06-15 1996-01-12 Minolta Co Ltd Three-dimensional shape input device
JPH11185040A (en) * 1997-12-24 1999-07-09 Canon Inc Defect inspection device and method for cylindrical object and storage medium
JP2002257528A (en) * 2001-03-02 2002-09-11 Ricoh Co Ltd Three-dimensional shape measuring device by phase shift method
JP2004109106A (en) * 2002-07-22 2004-04-08 Fujitsu Ltd Surface defect inspection method and surface defect inspection device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075406A (en) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp Surface defect inspection method and apparatus of the same
JP2011076669A (en) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp Method and device for inspecting defects on both surfaces of magnetic disk
JP2011096305A (en) * 2009-10-28 2011-05-12 Hitachi High-Technologies Corp Apparatus and method for inspecting surface defect on both sides of optical magnetic disk
WO2018221005A1 (en) * 2017-05-29 2018-12-06 コニカミノルタ株式会社 Surface defect inspection device and method
JPWO2018221005A1 (en) * 2017-05-29 2020-03-26 コニカミノルタ株式会社 Surface defect inspection apparatus and method
JP7021666B2 (en) 2017-05-29 2022-02-17 コニカミノルタ株式会社 Surface defect inspection device and its method
JP2021173656A (en) * 2020-04-27 2021-11-01 学校法人福岡工業大学 Image measurement system, image measurement method, image measurement program and recording medium
JP7279882B2 (en) 2020-04-27 2023-05-23 学校法人福岡工業大学 Image measurement system, image measurement method, image measurement program, and recording medium

Also Published As

Publication number Publication date
JPWO2008136111A1 (en) 2010-07-29
JP4842376B2 (en) 2011-12-21

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