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WO2003031917A3 - Device for laminar restriction of a fluid, in particular for a flow rate controller - Google Patents

Device for laminar restriction of a fluid, in particular for a flow rate controller Download PDF

Info

Publication number
WO2003031917A3
WO2003031917A3 PCT/FR2002/003423 FR0203423W WO03031917A3 WO 2003031917 A3 WO2003031917 A3 WO 2003031917A3 FR 0203423 W FR0203423 W FR 0203423W WO 03031917 A3 WO03031917 A3 WO 03031917A3
Authority
WO
WIPO (PCT)
Prior art keywords
frusto
fluid
conical portion
flow rate
discharge
Prior art date
Application number
PCT/FR2002/003423
Other languages
French (fr)
Other versions
WO2003031917A2 (en
Inventor
Pascal Rudent
Richard Gozlan
Laurent Chaumette
Original Assignee
Qualiflow S A
Pascal Rudent
Richard Gozlan
Laurent Chaumette
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualiflow S A, Pascal Rudent, Richard Gozlan, Laurent Chaumette filed Critical Qualiflow S A
Priority to AU2002362792A priority Critical patent/AU2002362792A1/en
Publication of WO2003031917A2 publication Critical patent/WO2003031917A2/en
Publication of WO2003031917A3 publication Critical patent/WO2003031917A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)

Abstract

The invention concerns a device for frusto-conical laminar restriction of a fluid, in particular for a mass flow controller. Said device comprises an annular main channel (1) arranged between a frusto-conical portion (2) and the recess (3) of a bore (4), and means for axially positioning the frusto-conical portion (2) within the bore (4), to vary the deflected fluid flow rate. Said means for axially positioning the frusto-conical portion (2) consist of a set of axial spacers (5, 5', 5'') interposed between the ends of the frusto-conical portion (2) and the fluid intake (6) and discharge (7) chambers. The latter are formed by annular gaps arranged with open-worked rings (11, 11') for communicating their internal recess, with respect to the fluid intake (15) and discharge (16) conduits, with the fluid intake (6) and discharge (7) conduits.
PCT/FR2002/003423 2001-10-09 2002-10-08 Device for laminar restriction of a fluid, in particular for a flow rate controller WO2003031917A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002362792A AU2002362792A1 (en) 2001-10-09 2002-10-08 Device for laminar restriction of a fluid, in particular for a flow rate controller

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0112943A FR2830615B1 (en) 2001-10-09 2001-10-09 LAMINARY RESTRICTION DEVICE OF A FLUID, IN PARTICULAR FOR FLOW CONTROLLER
FR01/12943 2001-10-09

Publications (2)

Publication Number Publication Date
WO2003031917A2 WO2003031917A2 (en) 2003-04-17
WO2003031917A3 true WO2003031917A3 (en) 2003-10-02

Family

ID=8868051

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2002/003423 WO2003031917A2 (en) 2001-10-09 2002-10-08 Device for laminar restriction of a fluid, in particular for a flow rate controller

Country Status (3)

Country Link
AU (1) AU2002362792A1 (en)
FR (1) FR2830615B1 (en)
WO (1) WO2003031917A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4193612B2 (en) * 2003-06-30 2008-12-10 オムロン株式会社 Rectifier mounting structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450718A (en) * 1982-04-19 1984-05-29 Advanced Semiconductor Materials N.V. Flow meter including improved laminar flow restrictor device therefor
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
US4524616A (en) * 1983-09-02 1985-06-25 Tylan Corporation Adjustable laminar flow bypass
US5099881A (en) * 1990-08-31 1992-03-31 Nippon Tylan Corporation Flow dividing structure of mass flow controller
US5672821A (en) * 1994-12-12 1997-09-30 Mks Japan, Inc. Laminar flow device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450718A (en) * 1982-04-19 1984-05-29 Advanced Semiconductor Materials N.V. Flow meter including improved laminar flow restrictor device therefor
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
US4524616A (en) * 1983-09-02 1985-06-25 Tylan Corporation Adjustable laminar flow bypass
US5099881A (en) * 1990-08-31 1992-03-31 Nippon Tylan Corporation Flow dividing structure of mass flow controller
US5672821A (en) * 1994-12-12 1997-09-30 Mks Japan, Inc. Laminar flow device

Also Published As

Publication number Publication date
AU2002362792A1 (en) 2003-04-22
WO2003031917A2 (en) 2003-04-17
FR2830615A1 (en) 2003-04-11
FR2830615B1 (en) 2004-01-30

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