[go: up one dir, main page]

AU2001277984A1 - Small internal volume fluid mass flow control apparatus - Google Patents

Small internal volume fluid mass flow control apparatus

Info

Publication number
AU2001277984A1
AU2001277984A1 AU2001277984A AU7798401A AU2001277984A1 AU 2001277984 A1 AU2001277984 A1 AU 2001277984A1 AU 2001277984 A AU2001277984 A AU 2001277984A AU 7798401 A AU7798401 A AU 7798401A AU 2001277984 A1 AU2001277984 A1 AU 2001277984A1
Authority
AU
Australia
Prior art keywords
control apparatus
flow control
mass flow
internal volume
fluid mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001277984A
Inventor
Daniel T Mudd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fugasity Corp
Original Assignee
Fugasity Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fugasity Corp filed Critical Fugasity Corp
Publication of AU2001277984A1 publication Critical patent/AU2001277984A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87338—Flow passage with bypass
    • Y10T137/87354—Including flowmeter

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Flow Control (AREA)
AU2001277984A 2000-07-25 2001-07-24 Small internal volume fluid mass flow control apparatus Abandoned AU2001277984A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22055800P 2000-07-25 2000-07-25
US60220558 2000-07-25
PCT/US2001/023265 WO2002008845A1 (en) 2000-07-25 2001-07-24 Small internal volume fluid mass flow control apparatus

Publications (1)

Publication Number Publication Date
AU2001277984A1 true AU2001277984A1 (en) 2002-02-05

Family

ID=22824015

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001277984A Abandoned AU2001277984A1 (en) 2000-07-25 2001-07-24 Small internal volume fluid mass flow control apparatus

Country Status (3)

Country Link
US (1) US6561218B2 (en)
AU (1) AU2001277984A1 (en)
WO (1) WO2002008845A1 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6962164B2 (en) 2001-04-24 2005-11-08 Celerity Group, Inc. System and method for a mass flow controller
US6918882B2 (en) * 2001-10-05 2005-07-19 Scimed Life Systems, Inc. Guidewire with stiffness blending connection
ATE312640T1 (en) * 2001-10-05 2005-12-15 Boston Scient Ltd COMPOSITE GUIDE WIRE
CN100354610C (en) * 2002-07-19 2007-12-12 迅捷公司 Flow sensor
US7073392B2 (en) * 2002-07-19 2006-07-11 Celerity, Inc. Methods and apparatus for pressure compensation in a mass flow controller
US7043374B2 (en) 2003-03-26 2006-05-09 Celerity, Inc. Flow sensor signal conversion
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7237570B2 (en) * 2004-09-23 2007-07-03 Praxair Technology, Inc. Gas cylinder dispensing valve
US7340918B1 (en) * 2005-11-08 2008-03-11 The United States Of America As Represented By The Secretary Of The Navy Magnetostrictive drive of refrigeration systems
US7469878B1 (en) 2006-09-01 2008-12-30 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Magnetostrictive valve assembly
TW200834275A (en) * 2006-09-05 2008-08-16 Celerity Inc Multi-gas flow device
US20080308285A1 (en) * 2007-01-03 2008-12-18 Fm Global Technologies, Llc Corrosion resistant sprinklers, nozzles, and related fire protection components and systems
US8607886B2 (en) 2007-01-03 2013-12-17 Fm Global Technologies, Llc Combined plug and sealing ring for sprinkler nozzle and related methods
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
WO2014040002A2 (en) 2012-09-10 2014-03-13 Mudd Daniel T Pressure based mass flow controller
EP2964341A2 (en) * 2013-03-07 2016-01-13 Tyco Fire Products LP Corrosion resistant nozzle
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6230900B2 (en) * 2013-12-19 2017-11-15 東京エレクトロン株式会社 Substrate processing equipment
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN107761076A (en) * 2017-09-28 2018-03-06 中国科学院重庆绿色智能技术研究院 A retractable gas source device for vacuum equipment
US11899477B2 (en) 2021-03-03 2024-02-13 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Family Cites Families (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2666297A (en) 1950-03-14 1954-01-19 Elmer C Skousgaard Container and discharge valve therefor
US3335748A (en) 1964-09-15 1967-08-15 Henry B Peter Adjustable control for metered flow
US3271994A (en) 1965-04-19 1966-09-13 Jered Ind Inc Fluid flow comparator for use in calibrating fluid flow orifices
US3559482A (en) 1968-11-27 1971-02-02 Teledyne Inc Fluid flow measuring apparatus
US3570807A (en) 1969-01-14 1971-03-16 Bell Aerospace Corp Electromechanical control valve
US3841520A (en) 1969-04-04 1974-10-15 Airco Inc Flame arresting vent valve
US3807456A (en) 1970-06-25 1974-04-30 Trw Inc Hydraulic controller including rotary valve
US3814541A (en) 1971-11-24 1974-06-04 Delta Controls Ltd Fluid supply apparatus
US3910113A (en) 1972-11-20 1975-10-07 William R Brown Method of selectively varying the differential output and overall performance characteristics of a proportional differential pressure producing fluid flow device
US4026657A (en) 1974-09-05 1977-05-31 Textron, Inc. Sintered spherical articles
US4015626A (en) 1976-01-22 1977-04-05 Thordarson, Inc. Constant flow valve for low flow rates
US4096746A (en) 1977-02-25 1978-06-27 The Perkin-Elmer Corporation Flow controller-flow sensor assembly for gas chromatographs and the like
US4275752A (en) 1978-09-22 1981-06-30 Collier Nigel A Fluid flow apparatus and method
US4203465A (en) 1979-03-27 1980-05-20 General Motors Corporation Precision pressure control valve
US4253156A (en) 1979-06-22 1981-02-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Automatic flowmeter calibration system
DE2929389C2 (en) 1979-07-20 1984-05-17 Machinefabriek Mokveld B.V., 2800 Gouda Control valve
US4315523A (en) 1980-03-06 1982-02-16 American Flow Systems, Inc. Electronically controlled flow meter and flow control system
EP0061856B1 (en) 1981-04-01 1987-08-26 LUCAS INDUSTRIES public limited company Measurement of air mass flow into an internal combustion engine
US4462915A (en) 1981-09-23 1984-07-31 Oil Process Systems, Inc. Method and system for filtering cooking oil
AT381571B (en) 1982-11-15 1986-11-10 Oemv Ag DEVICE FOR STAGE PRESSURE RELEASE WHEN RELAXING, IN PARTICULAR, HOT GASES
FR2543321B1 (en) 1983-03-22 1985-08-16 Electricite De France DEVICE FOR CONTROLLING A FLOW OF FLUID, ESPECIALLY RADIOACTIVE FLUID
US4576043A (en) 1984-05-17 1986-03-18 Chevron Research Company Methods for metering two-phase flow
US4687020A (en) 1985-05-17 1987-08-18 Doyle James H Fluid mass flow controller
US4669052A (en) 1985-07-02 1987-05-26 Motorola, Inc. Apparatus and method for calibrating a sensor
DE3538828A1 (en) 1985-10-31 1987-05-07 Druva Gmbh BASIC FITTINGS, PARTICULARLY AS PART OF A PRESSURE REDUCER
US4718443A (en) 1987-02-06 1988-01-12 Conoco Inc. Mass flowmeter apparatus
US5100551A (en) 1987-03-27 1992-03-31 Pall Corporation Segmented filter disc with slotted support and drainage plate
GB8711931D0 (en) 1987-05-20 1987-06-24 British Petroleum Co Plc Filtration/coalescence
CA1309954C (en) 1987-07-29 1992-11-10 Yasuo Yamada Deaerator for particulates
GB8720356D0 (en) 1987-08-28 1987-10-07 Thorn Emi Flow Measurement Ltd Fluid meter
US4918995A (en) 1988-01-04 1990-04-24 Gas Research Institute Electronic gas meter
US4858643A (en) 1988-03-14 1989-08-22 Unit Instruments, Inc. Fluid flow stabilizing apparatus
US4796651A (en) 1988-03-30 1989-01-10 LeRoy D. Ginn Variable gas volume flow measuring and control methods and apparatus
NL9000339A (en) 1990-02-13 1991-09-02 System Engineering & Component PRESSURE DROP REDUCTION DEVICE, AND VALVE FITTED WITH A PRESSURE DROP REDUCTION DEVICE.
US5419133A (en) 1989-09-05 1995-05-30 Schneider; Edward T. High speed thermochemical actuator
US5080131A (en) * 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
DE3936619A1 (en) * 1989-11-03 1991-05-08 Man Nutzfahrzeuge Ag METHOD FOR INJECTING A FUEL INTO THE COMBUSTION CHAMBER OF AN AIR COMPRESSING, SELF-IGNITION ENGINE, AND APPARATUS FOR CARRYING OUT THIS METHOD
JPH03156509A (en) 1989-11-14 1991-07-04 Stec Kk Mass flow controller
WO1991011647A1 (en) 1990-02-01 1991-08-08 Powers Kelly B Valve body ceramic liners
US5142483A (en) 1990-04-24 1992-08-25 Caltechnix Corporation Pressure regulating system for positive shut-off pressure controller
US5237523A (en) 1990-07-25 1993-08-17 Honeywell Inc. Flowmeter fluid composition and temperature correction
US5100100A (en) 1990-09-12 1992-03-31 Mks Instruments, Inc. Fluid control and shut off valve
US5052363A (en) 1990-10-22 1991-10-01 Ford Motor Company EGR control valve having ceramic elements
US5583282A (en) 1990-12-14 1996-12-10 Millipore Investment Holdings Limited Differential gas sensing in-line monitoring system
US5138869A (en) 1990-12-14 1992-08-18 Novapure Corporation In-line detector system for real-time determination of impurity concentration in a flowing gas stream
US5062446A (en) 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
JPH07111367B2 (en) 1991-02-26 1995-11-29 ディーエクスエル・インターナショナル・インコーポレーテッド Flow rate sensor and its inspection method
US5359878A (en) 1991-02-26 1994-11-01 Dxl International, Inc. Apparatus and method for in-line calibration verification of mass flow meters
US5114447A (en) 1991-03-12 1992-05-19 Mott Metallurgical Corporation Ultra-high efficiency porous metal filter
WO1992021006A2 (en) 1991-05-17 1992-11-26 Unit Instruments, Inc. Method and apparatus for translating a mass flow meter signal
US5311762A (en) 1991-12-16 1994-05-17 Dxl Usa Flow sensor calibration
DE69212129T2 (en) 1991-12-18 1997-01-23 Pierre Delajoud Mass flow meter with constricting element
US5187972A (en) 1992-01-17 1993-02-23 Clean Air Engineering, Inc. Gas monitor
US5190068A (en) 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
US5297427A (en) 1992-09-03 1994-03-29 Alicat Scientific, Inc. Wide-range laminar flowmeter
US5329966A (en) 1993-03-08 1994-07-19 Vici Metronics Incorporated Gas flow controller
EP0627256B1 (en) 1993-06-04 1996-12-04 Millipore Corporation High-efficiency metal filter element and process for the manufacture thereof
US5511585A (en) 1994-03-31 1996-04-30 The Lee Company Method and device for providing fluid resistance within a flow passageway
US5624409A (en) 1994-06-10 1997-04-29 Fluidsense Corporation Variable-pulse dynamic fluid flow controller
US5730181A (en) 1994-07-15 1998-03-24 Unit Instruments, Inc. Mass flow controller with vertical purifier
US5549272A (en) 1994-08-11 1996-08-27 Johnson Service Company Combination pressure pulsation damper and check valve depressor
US5542284A (en) 1994-10-18 1996-08-06 Queen's University At Kingston Method and instrument for measuring differential oxygen concentration between two flowing gas streams
US5660207A (en) * 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US6026847A (en) * 1995-10-11 2000-02-22 Reinicke; Robert H. Magnetostrictively actuated valve
US5804717A (en) 1996-04-05 1998-09-08 Mks Instruments, Inc. Mass flow transducer having extended flow rate measurement range
US5868159A (en) 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
JP3580645B2 (en) 1996-08-12 2004-10-27 忠弘 大見 Pressure type flow controller
US5944048A (en) 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5918616A (en) 1996-11-15 1999-07-06 Sanfilippo; James J. Apparatus and method of controlling gas flow
US5865205A (en) 1997-04-17 1999-02-02 Applied Materials, Inc. Dynamic gas flow controller
US5904170A (en) 1997-05-14 1999-05-18 Applied Materials, Inc. Pressure flow and concentration control of oxygen/ozone gas mixtures
US5917066A (en) 1997-07-16 1999-06-29 Mott Metallurgical Corporation Inline ultra-high efficiency filter
US5970801A (en) 1997-12-30 1999-10-26 Bear Medical Systems, Inc. Variable orifice flow sensor
US6080219A (en) 1998-05-08 2000-06-27 Mott Metallurgical Corporation Composite porous media
US5988211A (en) 1998-07-06 1999-11-23 Randolph W. Cornell I.V. flow controller
US6152162A (en) 1998-10-08 2000-11-28 Mott Metallurgical Corporation Fluid flow controlling
US6119710A (en) 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction

Also Published As

Publication number Publication date
US20020014206A1 (en) 2002-02-07
WO2002008845A1 (en) 2002-01-31
US6561218B2 (en) 2003-05-13

Similar Documents

Publication Publication Date Title
AU2001277984A1 (en) Small internal volume fluid mass flow control apparatus
AU2001276555A1 (en) Flow control device
AU2003903386A0 (en) Fluid flow control device
AU2002223901A1 (en) Microfluidic flow control
AU2001293198A1 (en) Body fluid flow control method and device
AU2003203917A1 (en) Body Fluid Flow Control Method and Device
EP1430243A4 (en) Flow control device
AU2001271057A1 (en) Fluid cutoff valve device
AU2002352931A1 (en) Flow development chamber
EP1167847B8 (en) Flow control valve
AU2001280425A1 (en) Device for effecting a flow of liquid medium
AU2002222208A1 (en) Flow limiting apparatus
AU2002223903A1 (en) Inlet for microfluidic devices
AU3290100A (en) Volume flow measuring device
AU2001280522A1 (en) Extended range proportional flow valve method
AU2000272638A1 (en) Fluid flow machine
AU2001274335A1 (en) Fluid flow measurements
GB2372519B (en) Fluid flow control apparatus
GB2402735B (en) Flow control device
AU4091701A (en) Flow control apparatus
AU2001258951A1 (en) Device for controlling a flow of fluid
AU2002349817A1 (en) Flow control device for fluids
AU2001290050A1 (en) Fluid control valve
AU2002230001A1 (en) Fluid flow control apparatus
AU2002321611A1 (en) Fluid flow control apparatus