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USD658693S1 - Liner for plasma processing apparatus - Google Patents

Liner for plasma processing apparatus Download PDF

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Publication number
USD658693S1
USD658693S1 US29/401,106 US201129401106F USD658693S US D658693 S1 USD658693 S1 US D658693S1 US 201129401106 F US201129401106 F US 201129401106F US D658693 S USD658693 S US D658693S
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US
United States
Prior art keywords
liner
processing apparatus
plasma processing
view
ornamental design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/401,106
Inventor
Kouki Suzuki
Jun Yamashita
Masakazu Ban
Atsushi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BAN, MASAKAZU, SUZUKI, KOUKI, UEDA, ATSUSHI, YAMASHITA, JUN
Application granted granted Critical
Publication of USD658693S1 publication Critical patent/USD658693S1/en
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Description

FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a sectional view taken along line 5-5 of FIG. 2 thereof; and,
FIG. 6 is a perspective view thereof.

Claims (1)

  1. The ornamental design for a liner for plasma processing apparatus, as shown and described.
US29/401,106 2011-03-30 2011-09-07 Liner for plasma processing apparatus Active USD658693S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011007263 2011-03-30
JP2011-007263 2011-03-30

Publications (1)

Publication Number Publication Date
USD658693S1 true USD658693S1 (en) 2012-05-01

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ID=45991333

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/401,106 Active USD658693S1 (en) 2011-03-30 2011-09-07 Liner for plasma processing apparatus

Country Status (2)

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US (1) USD658693S1 (en)
TW (1) TWD156030S (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD796562S1 (en) * 2016-04-11 2017-09-05 Applied Materials, Inc. Plasma outlet liner
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD837754S1 (en) * 2017-04-28 2019-01-08 Applied Materials, Inc. Plasma chamber liner
USD838681S1 (en) * 2017-04-28 2019-01-22 Applied Materials, Inc. Plasma chamber liner
USD842259S1 (en) * 2017-04-28 2019-03-05 Applied Materials, Inc. Plasma chamber liner
USD854067S1 (en) * 2017-03-04 2019-07-16 Sandmarc, LLC. Camera lens adapter
USD895777S1 (en) * 2017-09-20 2020-09-08 Gardner Denver Petroleum Pumps Llc Header ring
US10837556B2 (en) 2017-09-20 2020-11-17 Fardner Denver Petroleum Pumps Llc Packing for a well service pump
USD904066S1 (en) * 2019-09-19 2020-12-08 Georgia-Pacific LLC Core plug
USD909439S1 (en) * 2018-11-30 2021-02-02 Ferrotec (Usa) Corporation Two-piece crucible cover
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus
USD1028712S1 (en) * 2022-01-01 2024-05-28 Abdou Bobb Neck finish of a bottle
USD1052546S1 (en) * 2020-12-10 2024-11-26 Nuflare Technology, Inc. Cover ring of top plate for semiconductor manufacturing apparatus
USD1057559S1 (en) * 2022-05-05 2025-01-14 Abdou Bobb Neck finish of a bottle

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD796562S1 (en) * 2016-04-11 2017-09-05 Applied Materials, Inc. Plasma outlet liner
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD854067S1 (en) * 2017-03-04 2019-07-16 Sandmarc, LLC. Camera lens adapter
USD837754S1 (en) * 2017-04-28 2019-01-08 Applied Materials, Inc. Plasma chamber liner
USD842259S1 (en) * 2017-04-28 2019-03-05 Applied Materials, Inc. Plasma chamber liner
USD838681S1 (en) * 2017-04-28 2019-01-22 Applied Materials, Inc. Plasma chamber liner
USD895777S1 (en) * 2017-09-20 2020-09-08 Gardner Denver Petroleum Pumps Llc Header ring
US10837556B2 (en) 2017-09-20 2020-11-17 Fardner Denver Petroleum Pumps Llc Packing for a well service pump
USD909439S1 (en) * 2018-11-30 2021-02-02 Ferrotec (Usa) Corporation Two-piece crucible cover
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus
USD904066S1 (en) * 2019-09-19 2020-12-08 Georgia-Pacific LLC Core plug
USD1052546S1 (en) * 2020-12-10 2024-11-26 Nuflare Technology, Inc. Cover ring of top plate for semiconductor manufacturing apparatus
USD1028712S1 (en) * 2022-01-01 2024-05-28 Abdou Bobb Neck finish of a bottle
USD1057559S1 (en) * 2022-05-05 2025-01-14 Abdou Bobb Neck finish of a bottle

Also Published As

Publication number Publication date
TWD156030S (en) 2013-09-11

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