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TWI856858B - Method for bonding electronic component and method for manufacturing led display - Google Patents

Method for bonding electronic component and method for manufacturing led display Download PDF

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Publication number
TWI856858B
TWI856858B TW112141907A TW112141907A TWI856858B TW I856858 B TWI856858 B TW I856858B TW 112141907 A TW112141907 A TW 112141907A TW 112141907 A TW112141907 A TW 112141907A TW I856858 B TWI856858 B TW I856858B
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substrate
electronic component
target substrate
electronic components
carrier substrate
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TW112141907A
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Chinese (zh)
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TW202412980A (en
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廖建碩
林清儒
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麥科先進股份有限公司
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Abstract

A method for bonding electronic component including the following steps is provided: providing a carrier substrate having a carrying surface on which the electronic component to be bonded is disposed; providing a target substrate having a bonded position; positioning the carrier substrate and the target substrate with the carrying surface facing the bonded position; making the carrier substrate and the target substrate move toward each other until the electronic component be in contact with the bonded position; applying a plurality of flexible pushes to a non-carrying surface of the carrier substrate or to a non-bonded position of the target substrate, in order for the electronic component on the carrying substrate to attain a more complete contact with the bonded position of the target substrate; applying a thermal energy to bond the electronic component onto the bonded position of the target substrate from the carrier substrate.

Description

焊接電子元件之方法及製造LED顯示器之方法Method for welding electronic components and method for manufacturing LED display

本發明是有關於一種方法,且特別是有關於一種焊接電子元件之方法及製造LED顯示器之方法。The present invention relates to a method, and in particular to a method for welding electronic components and a method for manufacturing an LED display.

在電子產品的製造過程中,常會有相關的轉移步驟。舉例而言,在發光二極體顯示面板(LED display)的製造過程中,常會先藉由取放裝置(Pick-and-place apparatus)將發光二極體置於薄膜電晶體陣列基板(TFT array substrate)上。然而,藉由前述的取放裝置或前述的轉移步驟,可能較難致使被轉移物更密切地靠近。In the manufacturing process of electronic products, there are often related transfer steps. For example, in the manufacturing process of LED display panels, the LEDs are often placed on the thin film transistor array substrate (TFT array substrate) by a pick-and-place apparatus. However, it may be difficult to bring the transferred objects closer together by the aforementioned pick-and-place apparatus or the aforementioned transfer steps.

本發明提供一種焊接電子元件之方法,其至少可以使對應的承載基板和目標基板更密切地靠近。The present invention provides a method for welding electronic components, which can at least bring a corresponding carrier substrate and a target substrate closer together.

本發明的焊接電子元件之方法包括以下步驟:提供承載基板,承載基板之表面上係黏固有電子元件;提供目標基板,目標基板之表面上係具有焊接位置;於電子元件及/或焊接位置上施予焊料;使承載基板黏固有電子元件之表面與目標基板具有焊接位置之表面相對,並使承載基板與目標基板相互靠近,直至電子元件頂抵至焊接位置;依序施加複數個撓性推力於承載基板未黏固有電子元件之表面或目標基板未具有焊接位置之表面,使承載基板和目標基板更密切地靠近;以及施加熱能熔融焊料,使電子元件焊固於目標基板之焊接位置上。The method for soldering electronic components of the present invention comprises the following steps: providing a carrier substrate, on the surface of which the electronic components are bonded; providing a target substrate, on the surface of which the soldering position is provided; applying solder to the electronic components and/or the soldering position; making the surface of the carrier substrate on which the electronic components are bonded face the surface of the target substrate on which the soldering position is provided, and bringing the carrier substrate and the target substrate closer to each other until the electronic components are against the soldering position; sequentially applying a plurality of flexible thrusts to the surface of the carrier substrate on which the electronic components are not bonded or to the surface of the target substrate on which the soldering position is not provided, so as to bring the carrier substrate and the target substrate closer together; and applying heat energy to melt the solder, so that the electronic components are soldered to the soldering position of the target substrate.

基於上述,在本發明的用以轉移電子元件之裝置及焊接電子元件之方法中,可以藉由複數個撓性推力,而至少可以使對應的承載基板和目標基板更密切地靠近。Based on the above, in the device for transferring electronic components and the method for welding electronic components of the present invention, a plurality of flexible thrusts can be used to at least bring the corresponding carrier substrate and the target substrate closer together.

以下實施例的內容是為了說明而非限制。並且,可省略對熟知裝置、方法及材料之描述以免模糊對本發明之各種原理之描述。本文所使用之方向術語(例如,上、下)僅參看所繪圖式使用或對應之習慣用語,且不意欲暗示絕對定向。因此,除非有特別的說明,使用的方向用語是用來說明並非用來限制本發明。並且,為了清楚表示不同圖式之間的方向關係,於部份的圖示中示例性以卡氏座標系統(Cartesian coordinate system;即XYZ直角坐標系統)來表示對應的方向,但本發明不以此為限。The contents of the following embodiments are for illustrative purposes only and are not intended to be limiting. Furthermore, descriptions of well-known devices, methods, and materials may be omitted to avoid blurring the description of the various principles of the present invention. The directional terms (e.g., up, down) used herein refer only to the customary terms used or corresponding to the diagrams, and are not intended to imply an absolute orientation. Therefore, unless otherwise specified, the directional terms used are used to illustrate and are not intended to limit the present invention. Furthermore, in order to clearly indicate the directional relationship between different diagrams, the Cartesian coordinate system (i.e., the XYZ rectangular coordinate system) is used as an example in some of the diagrams to indicate the corresponding directions, but the present invention is not limited thereto.

另外,除非內容清楚地指示,否則單數形式「一」、「一個」、「該」或未特別表示數量的形式可以包括一個或多數個的形式,即,包括「至少一個」。In addition, unless the content clearly indicates otherwise, the singular forms "a", "an", "the" or forms without specific quantity indications may include one or more forms, that is, including "at least one".

在部分的附圖中,為了清楚起見,可能放大、縮小或省略繪示了部分的元件或膜層。類似的構件以相同的標號表示,且具有類似的功能、材質或形成方式,並省略描述。本發明所屬技術領域中具有通常知識者將顯而易見的是,藉由實施例的內容及對應的圖示說明,可以在脫離本文所揭示特定細節的其他實施例中實踐本發明。In some of the drawings, for the sake of clarity, some elements or film layers may be enlarged, reduced or omitted. Similar components are represented by the same reference numerals and have similar functions, materials or formation methods, and the description is omitted. It will be obvious to those with ordinary knowledge in the technical field to which the present invention belongs that, through the content of the embodiments and the corresponding illustrations, the present invention can be implemented in other embodiments that deviate from the specific details disclosed herein.

圖1至圖4是依照本發明的一實施例的一種用以轉移電子元件之裝置或焊接電子元件之方法的部分側視示意圖。圖5是依照本發明的一實施例的一種用以轉移電子元件之裝置或焊接電子元件之方法的部分側視示意圖。舉例而言,圖5可以是對應於圖1中區域R1的放大圖。圖6是依照本發明的一實施例的一種用以轉移電子元件之裝置的部分上視示意圖。舉例而言,圖6可以是對應於圖1、圖2、圖3及/或圖4的上視示意圖。圖7A是依照本發明的一實施例的一種用以轉移電子元件之裝置的部分構件連接示意圖。圖7B是依照本發明的一實施例的一種用以轉移電子元件之裝置的部分構件連接示意圖。Fig. 1 to Fig. 4 are partial side schematic diagrams of a device for transferring electronic components or a method for welding electronic components according to an embodiment of the present invention. Fig. 5 is a partial side schematic diagram of a device for transferring electronic components or a method for welding electronic components according to an embodiment of the present invention. For example, Fig. 5 may be an enlarged view corresponding to area R1 in Fig. 1. Fig. 6 is a partial top schematic diagram of a device for transferring electronic components according to an embodiment of the present invention. For example, Fig. 6 may be a top schematic diagram corresponding to Fig. 1, Fig. 2, Fig. 3 and/or Fig. 4. Fig. 7A is a partial component connection schematic diagram of a device for transferring electronic components according to an embodiment of the present invention. Fig. 7B is a partial component connection schematic diagram of a device for transferring electronic components according to an embodiment of the present invention.

請參照圖1,裝置100可被用以轉移電子元件190。裝置100包括第一平台110、第二平台120、驅動機構150(標示於圖7A或圖7B)以及撓性推力產生機構130。第一平台110可用以承載承載基板181。第二平台120可用以承載目標基板182。驅動機構150可使第一平台110和第二平台120相互靠近及遠離。撓性推力產生機構130可以設置於鄰近第一平台110或第二平台120處。當藉由驅動機構150而使第一平台110和第二平台120相互靠近時,撓性推力產生機構130可以向第一平台110和第二平台120的方向產生複數個撓性推力。另外,為求清楚表示,於圖1或其他類似之圖示中並未一一標示所有的電子元件190。1 , the device 100 can be used to transfer an electronic component 190. The device 100 includes a first platform 110, a second platform 120, a driving mechanism 150 (indicated in FIG. 7A or FIG. 7B ), and a flexible thrust generating mechanism 130. The first platform 110 can be used to support a support substrate 181. The second platform 120 can be used to support a target substrate 182. The driving mechanism 150 can make the first platform 110 and the second platform 120 approach each other and move away from each other. The flexible thrust generating mechanism 130 can be disposed near the first platform 110 or the second platform 120. When the first platform 110 and the second platform 120 are brought close to each other by the driving mechanism 150, the flexible thrust generating mechanism 130 can generate a plurality of flexible thrusts in the direction of the first platform 110 and the second platform 120. In addition, for the sake of clarity, not all electronic components 190 are labeled one by one in FIG. 1 or other similar diagrams.

在一實施例中,如圖7A所示,第一平台110可以移動地連接(movably connected)至驅動機構150;且/或,如圖7B所示,第二平台120可以移動地連接至驅動機構150。驅動機構150例如包括對應的馬達、齒輪、傳輸皮帶、傳輸鏈條、螺紋桿或其他適於使第一平台110及/或第二平台120移動的構件。如此一來,藉由驅動機構150的致動,而使第一平台110向第二平台120的方向移動,且/或使第二平台120向第一平台110的方向移動。In one embodiment, as shown in FIG. 7A , the first platform 110 may be movably connected to a driving mechanism 150; and/or, as shown in FIG. 7B , the second platform 120 may be movably connected to the driving mechanism 150. The driving mechanism 150 may include, for example, corresponding motors, gears, transmission belts, transmission chains, threaded rods, or other components suitable for moving the first platform 110 and/or the second platform 120. In this way, by actuating the driving mechanism 150, the first platform 110 moves toward the second platform 120, and/or the second platform 120 moves toward the first platform 110.

在一實施例中,第一平台110的表面110b上(於圖1或其他類似圖式中的下方)可以具有對應的撓性膜(如:第一撓性膜141或第二撓性膜142)。撓性膜的一部分可以藉由對應的環狀固定件145而被固定於第一平台110的表面110b。前述的固定件145可以為單一的構件;或是,一個或多個的扣件、一個或多個的卡件、一個或多個的押件、一個或多個的鎖件及/或上述之組合。於撓性膜被前述固定件145圍繞的部分區域與第一平台110之間的空間可以與適當的氣體管線連通。因此,若藉由前述的氣體管線向前述的空間充氣,則可以使前述的空間內的氣壓上升及/或使前述的空間脹大。反之,若藉由前述的氣體管線向前述的空間抽氣,則可以使前述的空間內的氣壓下降及/或使前述的空間縮小。如此一來,藉由上述的方式可以構成對應的囊袋。舉例而言,撓性膜141可以構成第一囊袋131的一部分;且/或,撓性膜142可以構成第二囊袋132的一部分。In one embodiment, a corresponding flexible film (e.g., first flexible film 141 or second flexible film 142) may be provided on the surface 110b of the first platform 110 (below in FIG. 1 or other similar figures). A portion of the flexible film may be fixed to the surface 110b of the first platform 110 by a corresponding annular fixing member 145. The aforementioned fixing member 145 may be a single component; or, one or more fasteners, one or more clamps, one or more pressing members, one or more locks and/or a combination thereof. The space between the partial area of the flexible film surrounded by the aforementioned fixing member 145 and the first platform 110 may be connected to an appropriate gas pipeline. Therefore, if the aforementioned space is inflated by the aforementioned gas pipeline, the air pressure in the aforementioned space can be increased and/or the aforementioned space can be expanded. Conversely, if the aforementioned space is evacuated by the aforementioned gas pipeline, the air pressure in the aforementioned space can be decreased and/or the aforementioned space can be shrunk. In this way, a corresponding bag can be constructed in the above manner. For example, the flexible membrane 141 can constitute a part of the first bag 131; and/or, the flexible membrane 142 can constitute a part of the second bag 132.

在一實施例中,撓性推力產生機構130可以包含通氣裝置136。通氣裝置136可以藉由適當的氣體管線而連通於抽氣幫浦。藉由抽氣幫浦的抽氣,可以使承載基板181被承載於第一平台110。氣體管線可以包括對應的閥,閥可以調整氣體的流量或流速。In one embodiment, the flexible thrust generating mechanism 130 may include a ventilation device 136. The ventilation device 136 may be connected to a vacuum pump via an appropriate gas pipeline. Through the vacuum pump, the supporting substrate 181 may be supported on the first platform 110. The gas pipeline may include a corresponding valve, and the valve may adjust the flow rate or flow velocity of the gas.

舉例而言,請參照圖5,通氣裝置136可以置於一撓性膜142(如:第二囊袋132的一部分)上。藉由抽氣幫浦的抽氣,可以使前述撓性膜142與承載基板181之間的空隙G的氣壓小於環境氣壓。如此一來,可以使承載基板181被承載於第一平台110上(於圖1或其他類似圖式中的下方)。另外,於抽氣狀態下的通氣裝置136可以被稱為抽氣裝置。For example, referring to FIG. 5 , the ventilation device 136 can be placed on a flexible film 142 (e.g., a portion of the second bag 132). By exhausting air with the exhaust pump, the air pressure in the gap G between the flexible film 142 and the supporting substrate 181 can be made lower than the ambient air pressure. In this way, the supporting substrate 181 can be supported on the first platform 110 (below in FIG. 1 or other similar figures). In addition, the ventilation device 136 in the exhaust state can be referred to as an exhaust device.

在一實施例中,承載基板181的表面181b上(於圖1或其他類似圖式中的下方)可以黏固有電子元件190。電子元件190於後續的步驟中可以被轉移。也就是說,電子元件190可以是暫時性地被黏固於承載基板181的表面181b上(於圖1或其他類似圖式中的下方)。舉例而言,承載基板181的表面181b與電子元件190之間可以具有離型膜(release film)(未繪示),但本發明不限於此。In one embodiment, an electronic component 190 may be adhered to the surface 181b of the carrier substrate 181 (below in FIG. 1 or other similar figures). The electronic component 190 may be transferred in a subsequent step. In other words, the electronic component 190 may be temporarily adhered to the surface 181b of the carrier substrate 181 (below in FIG. 1 or other similar figures). For example, a release film (not shown) may be provided between the surface 181b of the carrier substrate 181 and the electronic component 190, but the present invention is not limited thereto.

在一實施例中,電子元件190可以包括發光二極體(LED)晶片。In one embodiment, the electronic component 190 may include a light emitting diode (LED) chip.

在一實施例中,目標基板182的表面182a上(於圖1或其他類似圖式中的上方)可以具有對應的焊接位置182c。目標基板182的焊接位置182c可以對應於電子元件190。舉例而言,目標基板182的焊接位置182c可以對應於電子元件190上的焊料192。另外,為求清楚表示,於圖1或其他類似之圖示中並未一一標示所有的焊接位置182c;或是,省略標示部分或全部的焊接位置182c。In one embodiment, the target substrate 182 may have a corresponding soldering position 182c on the surface 182a (the upper side in FIG. 1 or other similar figures). The soldering position 182c of the target substrate 182 may correspond to the electronic component 190. For example, the soldering position 182c of the target substrate 182 may correspond to the solder 192 on the electronic component 190. In addition, for the sake of clarity, not all soldering positions 182c are marked one by one in FIG. 1 or other similar figures; or, some or all of the soldering positions 182c are omitted.

在一實施例中,電子元件190上可以被施予焊料192(標示於圖5)。在一未繪示的實施例中,相同或相似於焊料192的焊料可以被施予於目標基板182的焊接位置182c上。In one embodiment, solder 192 (shown in FIG. 5 ) may be applied to electronic component 190 . In an embodiment not shown, solder that is the same as or similar to solder 192 may be applied to soldering location 182 c of target substrate 182 .

在一實施例中,目標基板182可以具有對應的線路(未繪示)。舉例而言,目標基板182的焊接位置182c可以具有對應的連接墊(contact pad)。在一實施例中,目標基板182可以包括薄膜電晶體(thin film transistor,TFT)基板。In one embodiment, the target substrate 182 may have a corresponding circuit (not shown). For example, the welding position 182c of the target substrate 182 may have a corresponding contact pad. In one embodiment, the target substrate 182 may include a thin film transistor (TFT) substrate.

請參照圖1至圖2,使承載基板181黏固有電子元件190之表面181b與目標基板182具有焊接位置182c之表面182a相對,並使承載基板181與目標基板182相互靠近,直至電子元件190頂抵至焊接位置182c。舉例而言,使承載基板181黏固有電子元件190之表面181b與目標基板182具有焊接位置182c之表面182a面對面(face to face);然後,可以藉由驅動機構150而使承載基板181與目標基板182彼此相互靠近,直至電子元件190上的焊料192頂抵至目標基板182上的焊接位置182c。Referring to FIG. 1 and FIG. 2, the surface 181b of the carrier substrate 181 on which the electronic component 190 is adhered is made to face the surface 182a of the target substrate 182 having the soldering position 182c, and the carrier substrate 181 and the target substrate 182 are brought close to each other until the electronic component 190 hits the soldering position 182c. For example, the surface 181b of the carrier substrate 181 on which the electronic component 190 is adhered is made to face the surface 182a of the target substrate 182 having the soldering position 182c; then, the carrier substrate 181 and the target substrate 182 can be brought close to each other by the driving mechanism 150 until the solder 192 on the electronic component 190 hits the soldering position 182c on the target substrate 182.

在一實施例中,當藉由驅動機構150而使第一平台110和第二平台120相互靠近時,可以向第一平台110和第二平台120的方向產生複數個撓性推力。舉例而言,撓性推力產生機構130可以包括第一囊袋131及充氣裝置135。充氣裝置135例如可以包括對應的充氣幫浦及對應的氣體管路135d。氣體管路135d可以連通於充氣幫浦與第一囊袋131。如此一來,可以藉由充氣裝置135對對應的第一囊袋131充氣,以產生對應的撓性推力。In one embodiment, when the first platform 110 and the second platform 120 are brought closer to each other by the driving mechanism 150, a plurality of flexible thrusts can be generated in the direction of the first platform 110 and the second platform 120. For example, the flexible thrust generating mechanism 130 may include a first bladder 131 and an inflation device 135. The inflation device 135 may include, for example, a corresponding inflation pump and a corresponding gas pipeline 135d. The gas pipeline 135d may be connected to the inflation pump and the first bladder 131. In this way, the corresponding first bladder 131 may be inflated by the inflation device 135 to generate a corresponding flexible thrust.

在一實施例中,第一囊袋131的數量可以為複數個。舉例而言,如圖6所示,第一囊袋131可以包括第一囊袋131A、第一囊袋131B、第一囊袋131C、第一囊袋131D、第一囊袋131E、第一囊袋131F、第一囊袋131G、第一囊袋131H、第一囊袋131I、第一囊袋131J、第一囊袋131K、第一囊袋131L、第一囊袋131M、第一囊袋131N及第一囊袋131O。第一囊袋131的數量僅需複數個即可,於本發明並不加以限制。In one embodiment, the number of the first pouches 131 may be plural. For example, as shown in FIG6 , the first pouches 131 may include a first pouch 131A, a first pouch 131B, a first pouch 131C, a first pouch 131D, a first pouch 131E, a first pouch 131F, a first pouch 131G, a first pouch 131H, a first pouch 131I, a first pouch 131J, a first pouch 131K, a first pouch 131L, a first pouch 131M, a first pouch 131N, and a first pouch 131O. The number of the first pouches 131 only needs to be plural, and is not limited in the present invention.

於一方向上,複數個第一囊袋131中的多個可以並列。舉例而言,沿著第一方向X,第一囊袋131A、第一囊袋131B、第一囊袋131C、第一囊袋131D及第一囊袋131E可以並列。在一實施例中,複數個第一囊袋131可以呈陣列狀排列。In one direction, a plurality of the first pouches 131 may be arranged in parallel. For example, along the first direction X, the first pouches 131A, 131B, 131C, 131D, and 131E may be arranged in parallel. In one embodiment, the plurality of first pouches 131 may be arranged in an array.

在一實施例中,對對應的第一囊袋131充氣的順序可以沿著承載基板181或目標基板182之一側邊向相對前述側邊之另一側邊依序且/或分別施加。In one embodiment, the order of inflating the corresponding first pouches 131 may be applied sequentially and/or separately along one side of the carrier substrate 181 or the target substrate 182 toward another side opposite to the aforementioned side.

舉例而言,請進一步地參照圖6,可以對第一囊袋131A、131F、131K充氣;然後,對第一囊袋131B、131G、131L充氣;然後,對第一囊袋131C、131H、131M充氣;然後,對第一囊袋131D、131I、131N充氣;然後,對第一囊袋131E、131J、131O充氣。簡單來說,可以沿著第一方向X,依序地且/或分別地對對應的第一囊袋131充氣。For example, please further refer to FIG. 6 , the first bags 131A, 131F, and 131K may be inflated; then the first bags 131B, 131G, and 131L may be inflated; then the first bags 131C, 131H, and 131M may be inflated; then the first bags 131D, 131I, and 131N may be inflated; then the first bags 131E, 131J, and 131O may be inflated. In short, the corresponding first bags 131 may be inflated sequentially and/or separately along the first direction X.

舉例而言,請進一步地參照圖6,可以對第一囊袋131A、131B、131C、131D、131E充氣;然後,對第一囊袋131F、131G、131H、131I、131J充氣;然後,對第一囊袋131K、131L、131M、131N、131O充氣。簡單來說,可以沿著第二方向Y,依序地且/或分別地對對應的第一囊袋131充氣。For example, please further refer to FIG. 6 , the first bags 131A, 131B, 131C, 131D, and 131E may be inflated; then, the first bags 131F, 131G, 131H, 131I, and 131J may be inflated; then, the first bags 131K, 131L, 131M, 131N, and 131O may be inflated. In short, the corresponding first bags 131 may be inflated sequentially and/or separately along the second direction Y.

在一實施例中,對對應的第一囊袋131充氣的順序可以沿著承載基板181或目標基板182之一角落向相對前述角落之另一角落依序且/或分別施加。In one embodiment, the order of inflating the corresponding first bags 131 can be applied sequentially and/or separately along one corner of the carrier substrate 181 or the target substrate 182 toward another corner opposite to the aforementioned corner.

舉例而言,請進一步地參照圖6,可以對第一囊袋131A充氣;然後,對第一囊袋131B、131F充氣;然後,對第一囊袋131C、131G、131K充氣;然後,對第一囊袋131D、131H、131L充氣;然後,對第一囊袋131E、131I、131M充氣;然後,對第一囊袋131J、131N充氣;然後,對第一囊袋131O充氣。For example, please further refer to Figure 6. The first bag 131A can be inflated; then, the first bags 131B and 131F can be inflated; then, the first bags 131C, 131G, and 131K can be inflated; then, the first bags 131D, 131H, and 131L can be inflated; then, the first bags 131E, 131I, and 131M can be inflated; then, the first bags 131J and 131N can be inflated; then, the first bag 131O can be inflated.

在一實施例中,對對應的第一囊袋131充氣的順序可以從承載基板181或目標基板182之中央位置處向外依序且/或分別施加。In one embodiment, the order of inflating the corresponding first pouches 131 may be applied sequentially and/or separately from the center of the carrier substrate 181 or the target substrate 182 outward.

舉例而言,請進一步地參照圖6,可以對第一囊袋131H充氣;然後,對第一囊袋131B、131C、131D、131G、131I、131L、131M、131N充氣;然後,對第一囊袋131A、131F、131K、131E、131J、131O充氣。For example, please further refer to Figure 6, the first bag 131H can be inflated; then, the first bags 131B, 131C, 131D, 131G, 131I, 131L, 131M, and 131N can be inflated; then, the first bags 131A, 131F, 131K, 131E, 131J, and 131O can be inflated.

在一實施例中,藉由前述對第一囊袋131充氣的方式,可以使承載基板181和目標基板182可以更密切地靠近;且/或,可以提升電子元件190頂抵至焊接位置182c之後,承載基板181及/或目標基板182的平整度。In one embodiment, by inflating the first bag 131 as described above, the carrier substrate 181 and the target substrate 182 can be brought closer together; and/or the flatness of the carrier substrate 181 and/or the target substrate 182 can be improved after the electronic component 190 is pressed against the welding position 182c.

請繼續參照圖2,撓性推力產生機構130可以更包括包覆於複數個第一囊袋131之外的第二囊袋132。在藉由複數個第一囊袋131施加複數個撓性推力之後,可以進一步地藉由對第二囊袋132充氣的方式,使第二囊袋132產生施加至承載基板181及/或目標基板182的撓性推力,使承載基板181和目標基板182可以更密切地靠近;且/或,可以提升電子元件190頂抵至焊接位置182c之後,承載基板181及/或目標基板182的平整度。Please continue to refer to FIG. 2 , the flexible thrust generating mechanism 130 may further include a second bag 132 wrapped around the plurality of first bags 131. After the plurality of flexible thrusts are applied by the plurality of first bags 131, the second bag 132 may be further inflated to generate a flexible thrust applied to the support substrate 181 and/or the target substrate 182, so that the support substrate 181 and the target substrate 182 may be brought closer together; and/or, the flatness of the support substrate 181 and/or the target substrate 182 may be improved after the electronic component 190 is pressed against the welding position 182c.

舉例而言,通氣裝置136可以藉由適當的氣體管線(未繪示)而連通於充氣幫浦(未繪示)。藉由充氣幫浦的充氣,可以對第二囊袋132充氣。於充氣狀態下的通氣裝置136可以被稱為充氣裝置135。又舉例而言,對第二囊袋132的充氣方式可以類似於對第一囊袋131的充氣方式。For example, the ventilation device 136 can be connected to an inflation pump (not shown) through an appropriate gas line (not shown). By inflating the inflation pump, the second bag 132 can be inflated. The ventilation device 136 in the inflated state can be referred to as the inflation device 135. For another example, the inflation method for the second bag 132 can be similar to the inflation method for the first bag 131.

值得注意的是,於此時(如:圖2所繪示的狀態),電子元件190基本上仍未焊固於目標基板182之焊接位置182c上。It is worth noting that at this time (eg, the state shown in FIG. 2 ), the electronic component 190 is still substantially not soldered to the soldering position 182 c of the target substrate 182 .

請參照圖2至圖3,於藉由多個第一囊袋131及/或第二囊袋132以施加複數個撓性推力,而使承載基板181和目標基板182更密切地靠近(如:圖2所繪示的狀態)之後,可以如圖3所示地藉由熱能產生機構160施加熱能。焊料192可以受到足夠的熱能而熔融。如此一來,於停止熱能的施加而使熔融的焊料192冷卻之後,可使電子元件190焊固於目標基板182之焊接位置182c上。Referring to FIG. 2 and FIG. 3 , after the support substrate 181 and the target substrate 182 are brought closer together (e.g., as shown in FIG. 2 ) by applying a plurality of flexible thrusts through the plurality of first bags 131 and/or the second bags 132, heat energy can be applied through the heat energy generating mechanism 160 as shown in FIG. 3 . The solder 192 can be melted by receiving sufficient heat energy. In this way, after the application of heat energy is stopped and the molten solder 192 is cooled, the electronic component 190 can be soldered to the soldering position 182c of the target substrate 182.

在一實施例中,熱能產生機構160可以包括雷射光束產生機構161。雷射光束產生機構161可以設置於鄰近於第一平台110或第二平台120處。並且,雷射光束產生機構161可向第一平台110及第二平台120之方向產生雷射光束L。In one embodiment, the heat energy generating mechanism 160 may include a laser beam generating mechanism 161. The laser beam generating mechanism 161 may be disposed adjacent to the first platform 110 or the second platform 120. Furthermore, the laser beam generating mechanism 161 may generate a laser beam L in the direction of the first platform 110 and the second platform 120.

在一實施例中,雷射光束L可以更照射至承載基板181的表面181b與電子元件190之間的離型膜(若有);或是,熱能可以熱傳導至承載基板181的表面181b與電子元件190之間的離型膜(若有)。離型膜(若有)在被光照射及/或受熱後的黏性或結合力可能會降低。如此一來,可以在後續的步驟中可以容易地使電子元件190自承載基板181分離。In one embodiment, the laser beam L may further irradiate the release film (if any) between the surface 181b of the carrier substrate 181 and the electronic element 190; or, the heat energy may be thermally transferred to the release film (if any) between the surface 181b of the carrier substrate 181 and the electronic element 190. The viscosity or bonding force of the release film (if any) may be reduced after being irradiated with light and/or heated. In this way, the electronic element 190 can be easily separated from the carrier substrate 181 in the subsequent steps.

以圖3為例,雷射光束產生機構161可以設置於鄰近於第二平台120處(如:圖3所示地於第二平台120的下方)。第二平台120的材質可適於使雷射光束L穿透(如:雷射光束L的穿透率為50%以上;較佳為70%以上;更佳為80%以上)。舉例而言,第二平台120的材質可以包括玻璃、透光塑膠(如:壓克力),但本發明不限於此。又舉例而言,雷射光束L可以包括綠光雷射或紅外光雷射,但本發明不限於此。雷射光束L的種類及第二平台120的材質可以相互地配合,以使雷射光束產生機構161所產生雷射光束L可以穿透第二平台120。Taking FIG. 3 as an example, the laser beam generating mechanism 161 can be disposed adjacent to the second platform 120 (e.g., below the second platform 120 as shown in FIG. 3 ). The material of the second platform 120 can be suitable for allowing the laser beam L to penetrate (e.g., the penetration rate of the laser beam L is greater than 50%; preferably greater than 70%; and more preferably greater than 80%). For example, the material of the second platform 120 can include glass or light-transmitting plastic (e.g., acrylic), but the present invention is not limited thereto. For another example, the laser beam L can include a green laser or an infrared laser, but the present invention is not limited thereto. The type of the laser beam L and the material of the second platform 120 can cooperate with each other so that the laser beam L generated by the laser beam generating mechanism 161 can penetrate the second platform 120.

值得注意的是,本發明對於雷射光束產生機構161的形式或數量;及/或,雷射光束L的波長範圍並未特別加以限定,只要雷射光束產生機構161所產生的雷射光束L其照射至焊料192所產生的熱能可以適於將焊料192熔融即可。It is worth noting that the present invention does not specifically limit the form or quantity of the laser beam generating mechanism 161; and/or the wavelength range of the laser beam L, as long as the laser beam L generated by the laser beam generating mechanism 161 irradiates the solder 192 and generates heat energy suitable for melting the solder 192.

請參照圖3至圖4,於使電子元件190焊固於目標基板182之焊接位置182c上之後,可以藉由驅動機構150的致動,而使第一平台110與第二平台120彼此遠離。3 and 4 , after the electronic component 190 is soldered to the soldering position 182 c of the target substrate 182 , the first platform 110 and the second platform 120 can be moved away from each other by actuating the driving mechanism 150 .

在本實施例中,於使電子元件190焊固於目標基板182之焊接位置182c上之後,可以如前所述地藉由抽氣幫浦的抽氣,而使承載基板181被承載於第一平台110上(於圖1或其他類似圖式中的下方)。如此一來,於第一平台110與第二平台120彼此遠離時,可以使焊固於目標基板182上的電子元件190與承載基板181相分離,以使電子元件190自承載基板181被轉移至目標基板182。In this embodiment, after the electronic component 190 is soldered to the soldering position 182c of the target substrate 182, the carrier substrate 181 can be carried on the first platform 110 (at the bottom in FIG. 1 or other similar figures) by exhausting the gas by the exhaust pump as described above. In this way, when the first platform 110 and the second platform 120 are separated from each other, the electronic component 190 soldered to the target substrate 182 can be separated from the carrier substrate 181, so that the electronic component 190 can be transferred from the carrier substrate 181 to the target substrate 182.

在一實施例中,前述轉移電子元件(如:電子元件190)之方法可適用於發光二極體顯示器之製造。舉例而言,若目標基板182為薄膜電晶體基板(如:薄膜電晶體陣列基板(TFT array substrate)),且電子元件190為發光二極體晶片,則於圖4中於第二平台120上所示的結構可以為發光二極體顯示器的一部分或全部。In one embodiment, the aforementioned method of transferring electronic components (such as electronic component 190) can be applied to the manufacture of LED displays. For example, if the target substrate 182 is a thin film transistor substrate (such as a thin film transistor array substrate (TFT array substrate)), and the electronic component 190 is a LED chip, then the structure shown on the second platform 120 in FIG. 4 can be a part or all of the LED display.

綜上所述,藉由本發明用以轉移電子元件之裝置以及焊接電子元件之方法,可適於將承載基板上的電子元件轉移至目標基板上。In summary, the device for transferring electronic components and the method for soldering electronic components of the present invention can be used to transfer electronic components on a carrier substrate to a target substrate.

100:裝置 110:第一平台 110b:表面 120:第二平台 130:撓性推力產生機構 131、131A、131B、131C、131D、131E、131F、131G、131H、131I、131J、131K、131L、131M、131N、131O:第一囊袋 132:第二囊袋 135:充氣裝置 135d:氣體管路 136:通氣裝置 141:撓性膜 142:撓性膜 145:固定件 150:驅動機構 160:熱能產生機構 161:雷射光束產生機構 181:承載基板 181b:表面 182:目標基板 182a:表面 182c:焊接位置 190:電子元件 192:焊料 L:雷射光束 G:空隙 R1:區域 X、Y、Z:方向 100: device 110: first platform 110b: surface 120: second platform 130: flexible thrust generating mechanism 131, 131A, 131B, 131C, 131D, 131E, 131F, 131G, 131H, 131I, 131J, 131K, 131L, 131M, 131N, 131O: first bladder 132: second bladder 135: inflation device 135d: gas pipeline 136: ventilation device 141: flexible membrane 142: flexible membrane 145: fixing member 150: driving mechanism 160: heat energy generating mechanism 161: laser beam generating mechanism 181: Carrier substrate 181b: Surface 182: Target substrate 182a: Surface 182c: Soldering position 190: Electronic component 192: Solder L: Laser beam G: Gap R1: Region X, Y, Z: Direction

圖1至圖4是依照本發明的一實施例的一種用以轉移電子元件之裝置或焊接電子元件之方法的部分側視示意圖。 圖5是依照本發明的一實施例的一種用以轉移電子元件之裝置或焊接電子元件之方法的部分側視示意圖。 圖6是依照本發明的一實施例的一種用以轉移電子元件之裝置的部分上視示意圖。 圖7A是依照本發明的一實施例的一種用以轉移電子元件之裝置的部分構件連接示意圖。 圖7B是依照本發明的一實施例的一種用以轉移電子元件之裝置的部分構件連接示意圖。 Figures 1 to 4 are partial side schematic diagrams of a device for transferring electronic components or a method for welding electronic components according to an embodiment of the present invention. Figure 5 is a partial side schematic diagram of a device for transferring electronic components or a method for welding electronic components according to an embodiment of the present invention. Figure 6 is a partial top schematic diagram of a device for transferring electronic components according to an embodiment of the present invention. Figure 7A is a partial component connection schematic diagram of a device for transferring electronic components according to an embodiment of the present invention. Figure 7B is a partial component connection schematic diagram of a device for transferring electronic components according to an embodiment of the present invention.

100:裝置 100:Device

110:第一平台 110: First platform

110b:表面 110b: Surface

120:第二平台 120: Second platform

130:撓性推力產生機構 130: Flexible thrust generating mechanism

131:第一囊袋 131: First pouch

132:第二囊袋 132: Second pouch

135:充氣裝置 135: Inflatable device

135d:氣體管路 135d: Gas pipeline

136:通氣裝置 136: Ventilation device

141:撓性膜 141: Flexible membrane

142:撓性膜 142: Flexible membrane

145:固定件 145:Fixer

160:熱能產生機構 160: Heat energy generating mechanism

161:雷射光束產生機構 161: Laser beam generating mechanism

181:承載基板 181: Carrier substrate

182:目標基板 182: Target substrate

190:電子元件 190: Electronic components

L:雷射光束 L: Laser beam

X、Y、Z:方向 X, Y, Z: direction

Claims (8)

一種焊接電子元件之方法,其包括: 提供一承載基板,該承載基板之一表面上係黏固有一電子元件; 提供一目標基板,該目標基板之一表面上係具有一焊接位置; 於該電子元件及/或該焊接位置上施予一焊料; 使該承載基板黏固有電子元件之表面與該目標基板具有焊接位置之表面相對,並使該承載基板與該目標基板相互靠近,直至該電子元件頂抵至該焊接位置; 依序施加複數個撓性推力於該承載基板未黏固有電子元件之表面或該目標基板未具有焊接位置之表面,使該承載基板和該目標基板更密切地靠近;以及 施加一熱能熔融該焊料,使該電子元件焊固於該目標基板之焊接位置上。 A method for soldering electronic components, comprising: providing a carrier substrate, on one surface of which an electronic component is bonded; providing a target substrate, on one surface of which a soldering position is provided; applying a solder to the electronic component and/or the soldering position; making the surface of the carrier substrate on which the electronic component is bonded face the surface of the target substrate on which the soldering position is provided, and bringing the carrier substrate and the target substrate closer to each other until the electronic component abuts against the soldering position; sequentially applying a plurality of flexible thrusts to the surface of the carrier substrate on which the electronic component is not bonded or the surface of the target substrate on which the soldering position is not provided, so as to bring the carrier substrate and the target substrate closer together; and applying heat to melt the solder, so that the electronic component is soldered to the soldering position of the target substrate. 如請求項1所述的焊接電子元件之方法,其中該複數個撓性推力係從該承載基板或該目標基板之中央位置處向外依序施加。A method for soldering electronic components as described in claim 1, wherein the plurality of flexible thrusts are applied sequentially outward from a central position of the carrier substrate or the target substrate. 如請求項1所述的焊接電子元件之方法,其中該複數個撓性推力係從該承載基板或該目標基板之一側邊向相對該側邊之另一側邊依序施加。A method for soldering electronic components as described in claim 1, wherein the plurality of flexible thrusts are applied sequentially from one side of the carrier substrate or the target substrate to another side opposite to the side. 如請求項1所述的焊接電子元件之方法,其中該撓性推力係由一氣囊所產生。A method for welding electronic components as described in claim 1, wherein the flexible thrust is generated by an air bag. 如請求項1所述的焊接電子元件之方法,其中該熱能係由一雷射光束所產生。A method for welding electronic components as described in claim 1, wherein the heat energy is generated by a laser beam. 如請求項1所述的焊接電子元件之方法,其中該目標基板係為一薄膜電晶體(TFT)基板。A method for welding electronic components as described in claim 1, wherein the target substrate is a thin film transistor (TFT) substrate. 如請求項1所述的焊接電子元件之方法,其中該電子元件係為一發光二極體(LED)晶片。A method for welding electronic components as described in claim 1, wherein the electronic component is a light emitting diode (LED) chip. 一種製造LED顯示器之方法,其係包括使用如請求項7之方法焊接LED晶片。A method for manufacturing an LED display, comprising soldering LED chips using the method of claim 7.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201109673A (en) * 2009-06-02 2011-03-16 Tokyo Electron Ltd Probe card
TWM621980U (en) * 2021-10-18 2022-01-01 台灣愛司帝科技股份有限公司 Apparatus for transferring electronic components

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201109673A (en) * 2009-06-02 2011-03-16 Tokyo Electron Ltd Probe card
TWM621980U (en) * 2021-10-18 2022-01-01 台灣愛司帝科技股份有限公司 Apparatus for transferring electronic components

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