TWI809659B - Double-sided adhesive sheet with backing - Google Patents

Abstract

The present invention provides a double-sided adhesive sheet with a liner, which is a double-sided adhesive sheet with a liner on both sides, and any liner is peeled off first, and the double-sided adhesive sheet remains only on the other liner . The double-sided adhesive sheet with liner of the present invention includes a double-sided adhesive sheet, a first liner releasably disposed directly on one side of the double-sided adhesive sheet, and a first liner releasably disposed directly on the double-sided adhesive sheet. Second liner on the other side of the sheet.

Description

Double-sided adhesive sheet with backing

The invention relates to a double-sided adhesive sheet with a liner.

Heretofore, double-sided adhesive sheets have been used in various cases. The double-sided adhesive sheet can express adhesiveness on both sides through the adhesive layer. In such a double-sided adhesive sheet, protective layers (hereinafter, also referred to as liners) such as release paper and release liner are releasably arranged on the adhesive surface until it is used.

The above-mentioned liner is arranged on both sides of the double-sided adhesive sheet. When one liner is peeled off, a part of the double-sided adhesive sheet component (essentially the adhesive layer component) will adhere to the liner on the peeled side (the liner is first peeled off) ), sometimes the phenomenon that the double-sided adhesive sheet is kept separately on the two liners (unintentional separation phenomenon). When this unintentional separation phenomenon occurs, the double-sided adhesive sheet cannot be attached smoothly, or even if attached, an appearance defect may occur (for example, patent document 1).

Regarding the above-mentioned problems, there is known a technique of providing a difference in the peeling force of the two liners to the adhesive sheet. With this technology, when a liner is peeled off, the double-sided adhesive sheet remains on the side of the liner with a higher release force, thereby preventing unwanted separation.

On the other hand, re-peelability may be required for a double-sided adhesive sheet. The re-peelability is imparted to only one side of the double-sided adhesive sheet, or is imparted to both sides in such a manner that it can be expressed at different points of time. For example, double-sided adhesive sheets in which one side loses adhesiveness due to external stimuli (such as heating, ultraviolet radiation, etc.) are known as adhesive sheets that can be suitably used as temporary fixing materials during processing of electronic parts and the like. Such a double-sided adhesive sheet can be used in such a way that the surface that loses its adhesiveness due to external stimuli is placed on the side of the workbench, an adherend such as electronic parts is placed on the other side, and the adherend is processed, etc., and thereafter , the double-sided adhesive sheet was peeled off from the workbench by an external stimulus. Thereby, the electronic component can be used for a subsequent process in the state which fixed the adhesive sheet.

Taking the above-mentioned double-sided adhesive sheet with releasability as a representative example, in the double-sided adhesive sheet with different adhesion and/or peeling mechanisms on both sides, there is a sequential relationship between the side to be bonded, and sometimes The peeling order of the liners arranged on both sides will be specified. In this case, the liner arranged on the side to be bonded first must be peeled off with a lower peeling force than the other liner. However, in the above-mentioned "technique of setting difference in peeling force between two liners and adhesive sheets", it is not necessarily possible to make the liner arranged on the surface to be bonded first be peeled off with a low peel force, and it is not effective. the application of the technology. prior art literature patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2003-201452

[Problem to be solved by the invention]

The present invention is completed in order to solve the above-mentioned previous problems. Its purpose is to provide a double-sided adhesive sheet with a liner, which is a double-sided adhesive sheet with a liner on both sides, and any liner is peeled off first. , the double-sided adhesive sheet remains only on the other liner. [Technical means to solve the problem]

The double-sided adhesive sheet with a liner of the present invention comprises: a double-sided adhesive sheet; a first liner, which is releasably disposed directly on one side of the double-sided adhesive sheet; and a second liner, which is releasable directly arranged on the other side of the double-sided adhesive sheet; the double-sided adhesive sheet has a first adhesive layer arranged in contact with the first liner, and the first adhesive layer contains thermally expandable Ball, the peeling force of the first liner to the double-sided adhesive sheet is 0.001 N/50 mm to 2 N/50 mm, the third power of the thickness of the first liner and the modulus of elasticity of the first liner The product (I) is 1×10 ^-7 ~ 1×10 ^-2 (N/m), and the product (II) of the third power of the thickness of the second gasket and the modulus of elasticity of the second gasket is 1× 10 ^-7 ~ 1×10 ^-2 (N/m), the product (I) of the third power of the thickness of the first liner and the modulus of elasticity of the first liner, three times the thickness of the second liner square and the product (II) of the modulus of elasticity of the second liner, and the total of all layers of the product of the cube of the thickness of the single layer of each layer of the double-sided adhesive sheet and the product of the modulus of elasticity of the single layer (III) satisfy The relationship between (1) and (2) below. 0.001≤(I)/{(II)＋(III)}≤1500・・・(1) 0.001≤(II)/{(I)＋(III)}≤1500・・・(2) In one embodiment wherein, the double-sided adhesive sheet includes the first adhesive layer, the substrate, and the second adhesive layer in this order. In one embodiment, the total (III) of all the layers constituting the product of the single-layer thickness cubed and the single-layer elastic modulus of each layer constituting the above-mentioned double-sided adhesive sheet is 1×10 ^-6 Nm to 1×10 ^-1 Nm. In one embodiment, the product (I) of the cube of the thickness of the first liner and the modulus of elasticity of the first liner, the cube of the thickness of the second liner and the elasticity of the second liner The product (II) of the modulus and the sum of all the layers (III) of the product of the cube of the single-layer thickness of each layer constituting the above-mentioned double-sided adhesive sheet and the product of the single-layer elastic modulus satisfy the relationship of the following (3). 0.001≤{(I)+(II)}/(III)≤1500・・・(3) In one embodiment, the first spacer and/or the second spacer are obtained by fluorescent X-ray analysis The intensity of Si-Kα rays is 0.01-500 kcps. In one embodiment, at least one layer among the layers constituting the double-sided adhesive sheet is a colored layer. In one embodiment, the thickness of the first spacer and/or the second spacer is 10 μm˜100 μm. In one embodiment, the thickness of the first liner is different from the thickness of the second liner. In one embodiment, the first adhesive layer and/or the second adhesive layer include an acrylic adhesive. In one embodiment, the acrylic adhesive includes an acrylic polymer including a structural unit derived from a monomer having an active hydrogen group. In one embodiment, the content of the structural unit derived from the monomer having an active hydrogen group is 0.1% by weight to 20% by weight relative to the total structural units constituting the above-mentioned acrylic polymer. In one embodiment, the absolute value of the difference between the release force of the first liner to the double-sided adhesive sheet and the release force of the second liner to the double-sided adhesive sheet is 0.5 N/50 mm or less. In one embodiment, the double-sided adhesive sheet with a liner is in the form of a roll. In one embodiment, the above-mentioned double-sided adhesive sheet with a liner is used as a sheet for temporarily fixing a semiconductor chip when manufacturing a CSP (Chip Size/Scale Package, chip-level package). In one embodiment, the above-mentioned double-sided adhesive sheet with a liner is used as a sheet for temporarily fixing a semiconductor chip when manufacturing WLP (Wafer Level Package, Wafer Level Package). In one embodiment, the double-sided adhesive sheet with a liner is used for processing including the step of first peeling off the second liner. [Effect of Invention]

According to the present invention, it is possible to provide a double-sided adhesive sheet with a liner, which has a liner on both sides, and any liner is peeled off first, and the double-sided adhesive sheet remains only on the other liner.

A. Outline of double-sided adhesive sheet with liner FIG. 1 is a schematic cross-sectional view of a double-sided adhesive sheet with liner according to one embodiment of the present invention. The double-sided adhesive sheet 100 with liner includes the double-sided adhesive sheet 10, the first liner 20 that is directly disposed on one side of the double-sided adhesive sheet 10 in a peelable manner, and the first liner 20 that is directly disposed on the double-sided adhesive sheet The second gasket 30 on the other side of the material 10. By arranging the first liner 20 and the second liner 30, it is possible to protect the adhesive layer from contamination, etc., or to prevent sticking of roll-shaped or sheet-shaped double-sided adhesive sheets.

The double-sided adhesive sheet 10 is a sheet exhibiting adhesiveness on both sides. The double-sided adhesive sheet 10 includes at least the first adhesive layer 11 arranged so as to be in contact with the first liner 20 . The first adhesive layer 11 contains heat-expandable microspheres. The adhesive layer containing heat-expandable microspheres expands or foams the heat-expandable microspheres by heating to produce unevenness on the adhesive surface, resulting in reduced or lost adhesive force. The double-sided adhesive sheet 10 provided with such an adhesive layer 11 can be easily peeled off by heating.

The double-sided adhesive sheet may be a single layer (that is, may be composed of only the first adhesive layer), or may be a laminate composed of a plurality of layers. In one embodiment, as shown in FIG. 1 , a double-sided adhesive sheet 10 includes a first adhesive layer 11 , a base material 12 , and a second adhesive layer 13 in this order. With such a configuration, various adhesives can be used, and various methods such as extrusion, coating, and coating can be selected as the method for forming the adhesive layer, and are effective.

The peel force of the first liner and the second liner to the double-sided adhesive sheet is 0.001 N/50 mm to 2 N/50 mm. Also, the product (I) of the cube of the thickness of the first spacer and the modulus of elasticity of the first spacer is 1×10 ^-7 to 1×10 ^-2 (N/m). Also, the product (II) of the third power of the thickness of the second spacer and the modulus of elasticity of the second spacer is 1×10 ^-7 to 1×10 ^-2 (N/m). Also, the product (I) of the cube of the thickness of the first gasket and the modulus of elasticity of the first gasket, the product of the cube of the thickness of the second gasket and the modulus of elasticity of the second gasket (II) ), and the sum of all layers (III) of the product of the cube of the single-layer thickness of each layer constituting the double-sided adhesive sheet and the product of the single-layer elastic modulus satisfies the following relations (1) and (2). 0.001≤(I)/{(II)＋(III)}≤1500・・・(1) 0.001≤(II)/{(I)＋(III)}≤1500・・・(2)

According to the present invention, focusing on the characteristics of the liner and constituting it in the above manner, it is possible to provide that any liner is peeled off first, and the double-sided adhesive sheet remains only on the other liner, that is, the unintentional separation phenomenon is prevented. Double-sided adhesive sheet with backing. The liner of the present invention has excellent operability in stripping, and has the following characteristics: (i) easy to drag (easy to catch) the end of the liner (peel off the liner first); (ii) can be pulled up by a small part Get the opportunity to peel off; (iii) The back angle of the liner when the liner is peeled off (preferably 90°-180°, more preferably 120°-180°, more preferably 135°-180°, and more preferably 150° to 180°, especially 165° to 180°) are not easily changed during the peeling operation. When the liner is peeled off in the above manner, the force (peeling stress) acting by the peeling operation concentrates on the peeling portion of the release liner (the portion where the liner peeled off from the adhesive layer is in contact with the adhesive layer). As a result, the force required for peeling can be reduced, and the adhesive layer at the peeling part can be prevented from being broken and the liner that needs to be peeled off can be poorly peeled off, so that the double-sided adhesive sheet remains only on one of the liners.

In general, an adhesive layer containing heat-expandable microspheres sometimes has a raised portion on the surface, and when the liner is peeled off, the peeling stress tends to concentrate easily. Therefore, the adhesive layer containing heat-expandable microspheres also has The double-sided adhesive sheet with liner of the present invention having the above effects is useful.

The above "(I)/{(II)+(III)}" is preferably 0.0035-250, more preferably 0.0035-150, still more preferably 0.0035-100, especially preferably 0.0035-30. The above "(II)/{(I)+(III)}" is preferably 0.003-500, more preferably 0.0035-300, still more preferably 0.0035-150, especially preferably 0.0035-130. If it is such a range, the said effect will become remarkable. Furthermore, "the sum of all layers (III) of the product of the cube of the single layer thickness of each layer constituting the double-sided adhesive sheet and the product of the elastic modulus of the single layer" is calculated for each layer constituting the double-sided adhesive sheet The product (x1, x2, ...) of the third power of the thickness and the elastic modulus of the single layer, and the value obtained by summing the products (x1, x2, ...) in each layer. For example, when the double-sided adhesive sheet has a first adhesive layer, a substrate, and a second adhesive layer, the product of the cube of the thickness of the first adhesive layer and the modulus of elasticity of the first adhesive layer (x1), the product of the cube of the thickness of the substrate and the elastic modulus of the substrate (x2), and the cube of the thickness of the second adhesive layer and the product of the elastic modulus of the second adhesive layer (x3) The total (x1+x2+x3) is equivalent to "the total of all the layers (III) of the product of the cube of the single-layer thickness of each layer constituting the double-sided adhesive sheet and the single-layer elastic modulus". Also, when the double-sided adhesive sheet has a first adhesive layer, a primer layer, a substrate, and a second adhesive layer, the cube of the thickness of the first adhesive layer and the elasticity of the first adhesive layer The product of the modulus (x1), the product of the cube of the thickness of the undercoat layer and the elastic modulus of the primer layer (x2), the product of the cube of the thickness of the substrate and the elastic modulus of the substrate (x3), and the 2 The sum of the product (x1+x2+x3+x4) of the cube of the thickness of the adhesive layer and the modulus of elasticity of the second adhesive layer (x4) is equivalent to "the cube of the single-layer thickness of each layer constituting the double-sided adhesive sheet and the single-layer The sum of all the layers of the product of the modulus of elasticity (III)".

In one embodiment, the product (I) of the cube of the thickness of the first gasket and the modulus of elasticity of the first gasket, the cube of the thickness of the second gasket and the modulus of elasticity of the second gasket The product (II) of the double-sided adhesive sheet and the sum of all the layers (III) of the product of the cube of the single layer thickness of each layer constituting the double-sided adhesive sheet and the product of the single layer elastic modulus satisfy the following relationship (3). 0.001≤{(I)＋(II)}/(III)≤1500・・・(3) According to such a constitution, a double-sided adhesive sheet with a liner and a double-sided adhesive sheet which are easy to cut and hardly warp when cut can be obtained. This effect is particularly useful in a double-sided adhesive sheet provided with a first adhesive layer containing heat-expandable microspheres. {(I)+(II)}/(III) is more preferably 0.005-1000, still more preferably 0.015-500, especially preferably 0.015-300, most preferably 0.015-250.

In one embodiment, when using the above-mentioned double-sided adhesive sheet with a liner, first, the second liner is peeled off. More specifically, the above-mentioned double-sided adhesive sheet with liner can be used in the following manner: first, the second liner is peeled off, and the adherend (such as an electronic component) is attached to the exposed adhesive surface (such as the second adhesive Layer surface), after that, the first liner is peeled off, and the surface of the first adhesive layer is bonded to another adherend (such as a pedestal). In such an embodiment, the adherend (for example, an electronic component) is temporarily fixed to the stand via a double-sided adhesive sheet; the adherend is subjected to a specific process; thereafter, the first adhesive layer is heated to If the adhesive force decreases, the double-sided adhesive sheet with the adherend is peeled off from the pedestal.

B. First liner and second liner Typically, the above-mentioned first liner and second liner include a liner base material and a release treatment layer disposed on at least one side of the liner base material. The 1st liner and the 2nd liner are arrange|positioned so that the said release process layer may become a double-sided adhesive sheet side. In addition, the 1st spacer and the 2nd spacer may have the same structure, and may respectively have a different structure.

As mentioned above, the peeling force of a 1st liner with respect to a double-sided adhesive sheet is 0.001 N/50 mm - 2 N/50 mm. The peel force of the first liner to the double-sided adhesive sheet is preferably 0.01 N/50 mm to 1.5 N/50 mm, more preferably 0.05 N/50 mm to 1 N/50 mm, and most preferably 0.1 N/50 mm. 50 mm to 0.8 N/50 mm. By setting the release force of the liner to the double-sided adhesive sheet within the above-mentioned range, the liner will not be peeled off excessively, and the end surface pull can be quickly performed when the liner is peeled off, and the heat-expandable microspheres can be prevented from being released from the second side. 1 Adhesive layer peeled off. Furthermore, the peeling force of the first liner to the double-sided adhesive sheet (and the peeling force of the second liner to the double-sided adhesive sheet) means that the liner is attached to the double-sided adhesive sheet in an environment of 23°C. The double-sided adhesive sheet of the surface-adhesive sheet is peeled (peeling angle: 180°, peeling speed (stretching speed): 300 mm/min) and the resulting adhesive force is measured. The release force of the liner to the double-sided adhesive sheet can be adjusted by any appropriate method such as the composition of the adhesive layer, the type of the liner, and the surface treatment of the liner.

As mentioned above, the peeling force of a 2nd liner with respect to a double-sided adhesive sheet is 0.001 N/50 mm - 2 N/50 mm. The peeling force of the second liner to the double-sided adhesive sheet is preferably 0.01 N/50 mm to 1.5 N/50 mm, more preferably 0.05 N/50 mm to 1 N/50 mm, especially preferably 0.1 N/50 mm 50 mm to 0.8 N/50 mm.

The peeling force of the first liner to the double-sided adhesive sheet and the peeling force of the second liner to the double-sided adhesive sheet may be the same or different. In one embodiment, the absolute value of the difference between the peeling force of the first liner to the double-sided adhesive sheet and the peeling force of the second liner to the double-sided adhesive sheet is preferably 0.5 N/50 mm or less, more preferably It is 0.4 N/50 mm or less, more preferably 0.2 N/50 mm or less. According to the present invention, even if there is no difference in the release force between the first liner and the second liner, any liner can be peeled off first, and the double-sided adhesive sheet can only remain on the other liner. Adhesive sheet on both sides of the pad.

The thickness of the first spacer is preferably 5 μm to 250 μm, more preferably 10 μm to 200 μm, further preferably 20 to 150 μm, and most preferably 30 to 100 μm. If it is within such a range, it can be used as a liner which is excellent in visibility and can easily maintain the peeling angle (folding angle) at the time of peeling. In addition, it is possible to obtain a liner that is easy to wind up when rolled into a roll and that prevents the liner from being separated from the adhesive layer during punching (so-called "bulging"). In one embodiment, the thickness of the first spacer is 10 μm˜100 μm.

The thickness of the second spacer is preferably 5 μm to 250 μm, more preferably 10 μm to 200 μm, still more preferably 20 to 150 μm, most preferably 30 to 100 μm. In one embodiment, the thickness of the second spacer is 10 μm˜100 μm.

The thickness of the first liner and the thickness of the second liner may be the same or different. In one embodiment, the thickness of the first liner is different from the thickness of the second liner. By using liners of different thicknesses, it is easy to identify which liners should be peeled off.

The modulus of elasticity of the first gasket (essentially the gasket base material) is 500 MPa to 5000 MPa, more preferably 500 MPa to 4000 MPa, still more preferably 700 MPa to 4000 MPa. Within this range, it is possible to obtain a liner that is excellent in handleability, easy to wind up when rolled into a roll, and prevents the liner from separating from the adhesive layer during punching (so-called "bulging"). In the description, the so-called elastic modulus refers to the elastic modulus obtained by nano-indentation method under the environment of 23°C. The elastic modulus obtained by the nano-indentation method refers to the following elastic modulus: when the indenter is pressed into the sample (it can be a gasket substrate), the load and pressure on the indenter are continuously measured when the indenter is loaded and unloaded. The penetration depth can be obtained from the obtained load-indentation depth curve. The measurement conditions of the elastic modulus obtained by the nanoindentation method are described below.

The modulus of elasticity of the second gasket (essentially the gasket base material) is 500 MPa to 5000 MPa, more preferably 500 MPa to 4000 MPa, still more preferably 700 MPa to 4000 MPa. The modulus of elasticity of the first gasket and the modulus of elasticity of the second gasket may be the same or different.

As described above, the product (I) of the cube of the thickness of the first spacer and the modulus of elasticity of the first liner is 1×10 ^-7 to 1×10 ^-2 (N/m). The product (I) is preferably 1×10 ^-6 to 5×10 ^-3 (N/m), more preferably 5×10 ^-6 to 2×10 ^-3 (N/m). Within this range, a liner that is easy to fold back and can easily maintain the peeling angle (folding angle) at the time of peeling can be obtained.

As described above, the product (II) of the third power of the thickness of the second spacer and the modulus of elasticity of the second spacer is 1×10 ^-7 to 1×10 ^-2 (N/m). The product (II) is preferably 1×10 ^-6 to 5×10 ^-3 (N/m), more preferably 5×10 ^-6 to 2×10 ^-3 (N/m), most preferably 5× 10 ^-6 to 1.5×10 ^-3 (N/m), preferably 5×10 ^-6 to 1.308×10 ^-3 . Within this range, a liner that is easy to fold back and can easily maintain the peeling angle (folding angle) at the time of peeling can be obtained. The above-mentioned "product (I)" of the first liner and the above-mentioned "product (II)" of the second liner may be the same or different.

The pad base mentioned above may be made of any suitable material. As the base material of the gasket, for example, besides plastic films and sheets, various sheets such as paper, cloth, non-woven fabric, metal foil or their plastic laminates, and laminates of plastics can be used. Among them, a plastic film or a plastic sheet (hereinafter referred to as a plastic film) is most preferable from the viewpoint of workability or cost. As the raw material of the plastic film, it can be selected according to needs in terms of strength, heat resistance, and the like. For example, polyethylene (PE), polypropylene (PP), ethylene-propylene copolymer, ethylene-vinyl acetate copolymer (EVA) and other olefin-based resins that use α-olefin as a monomer component; polyparaphenylene Polyethylene dicarboxylate (PET), polyethylene naphthalate (PEN), polybutylene terephthalate (PBT) and other polyesters; polyvinyl chloride (PVC); polyphenylene sulfide (PPS); Amide-based resins such as polyamide (nylon), wholly aromatic polyamide (aromatic polyamide); polyetheretherketone (PEEK), polyimide, polyetherimide, polystyrene, acrylic Department of resin, etc. These raw materials can be used individually or in combination of 2 or more types. Also, as the plastic film, any one of an unstretched film, a uniaxially oriented film, and a biaxially oriented film can be used. In addition, these films may be laminated films including two or more film layers, and films in which lubricants such as inert particles are appropriately added may also be used from the viewpoint of handleability.

Any appropriate treatment can be adopted as the treatment for forming the above-mentioned release treatment layer. In one embodiment, the release treatment layer is a silicone treatment layer. As the polysiloxane, a reactive polysiloxane-based compound whose main component is dimethylpolysiloxane and has a functional group required for crosslinking (hardening) can be preferably used. The reason for this is that it can be applied to a film in a low-molecular state, and it can be hardened after application to form a peeling treatment layer that is resistant to friction and the like. As the functional group of the reactive polysiloxane compound, for example, a vinyl group, an epoxy group, an alkoxy group, an isocyanate group, etc. may be mentioned.

The silicone-treated layer can be formed, for example, by diluting the above-mentioned reactive silicone-based compound in a solvent or the like to adjust the concentration, applying it with a gravure coater or the like, and heating it. By heating, the solvent drying and hardening reactions are promoted. Here, it is preferable to use together a catalyst that accelerates the curing reaction. As the catalyst, for example, metal complexes such as platinum, palladium, rhodium, zirconium, and tin, organic bases such as amines, and organic acids such as acetic acid can be used.

In one embodiment, the above-mentioned first liner and/or second liner (essentially the release treatment layer of each liner) has an intensity of Si-Kα rays obtained by fluorescent X-ray analysis of 0.01 to 500 kcps (Preferably, it is 0.5-250 kcps, More preferably, it is 1.0-150 kcps, More preferably, it is 1.05-100 kcps). If it is within such a range, the liner can be peeled off from the adhesive layer with a small force, so it is easy to pick up one end of the liner quickly and slightly. In addition, the adhesion between the liner and the adhesive layer becomes sufficient, and unnecessary peeling of the liner can be prevented. The intensity of the above-mentioned Si-Kα ray obtained by fluorescent X-ray analysis is as follows: the Si intensity of the peeling treatment agent layer and the non-release treatment agent layer were measured respectively by fluorescence X-ray analysis, and the intensity of the self-release treatment agent layer Calculated by subtracting the strength of the non-peeling treatment agent layer. Furthermore, the strength can be adjusted by, for example, controlling the release treatment layer formation conditions such as the coating amount, concentration, coating speed, and drying of the release treatment agent.

In one embodiment, the first liner and the second liner are of different colors. The double-sided adhesive sheet with a liner constituted as described above can be obtained, for example, by coloring any liner (for example, liner base material). If the two liners are made of different colors, the front and back of the double-sided adhesive sheet with the liner become clear, and the liner to be peeled off can be easily identified.

C. Double-sided adhesive sheet As described above, the double-sided adhesive sheet includes the first adhesive layer. In one embodiment, a double-sided adhesive sheet is equipped with a 1st adhesive layer, a base material, and a 2nd adhesive layer in this order. In one embodiment, the double-sided adhesive sheet further includes a primer layer disposed between the first adhesive layer and the substrate. If a primer layer is provided, a double-sided adhesive sheet excellent in followability to an adherend can be obtained. In addition, if the first adhesive layer containing heat-expandable microspheres is heated, deformation will occur when the heat-expandable microspheres expand in the thickness direction, but the primer layer suppresses the expansion in the direction of the substrate. Deformation improves peelability.

When laminating the first adhesive layer of the above-mentioned double-sided adhesive sheet to polyethylene terephthalate, the initial adhesive force at 23°C is preferably 0.5 N/20 mm or more, more preferably 0.5 N/20 mm mm to 20 N/20 mm, and more preferably 0.5 N/20 mm to 15 N/20 mm. If it is such a range, for example, a double-sided adhesive sheet effectively used as a temporary fixing sheet for manufacturing electronic components can be obtained. In this specification, the initial adhesive force refers to the adhesive force in the state where the adhesive force has not been reduced due to the expansion of the heat-expandable microspheres, and means the adhesive force in the state where the heat history above 50°C has not been experienced. In addition, the adhesive force refers to the adhesive force measured by the method based on JIS Z 0237:2000 (lamination condition: 2 kg roller back and forth once, peeling speed: 300 mm/min, peeling angle 180°).

When the first adhesive layer of the above-mentioned double-sided adhesive sheet is bonded to polyethylene terephthalate, the adhesive force is preferably reduced to below 0.2 N/20 mm (preferably 0.1 N/20 mm) by heating. mm or less). The heating temperature is preferably from 90°C to 300°C, more preferably from 100°C to 280°C.

When laminating the second adhesive layer of the above-mentioned double-sided adhesive sheet to polyethylene terephthalate, the adhesive force at 23°C is preferably 0.5 N/20 mm or more, more preferably 0.5 N/20 mm ~20 N/20 mm, and more preferably 0.5 N/20 mm~15 N/20 mm.

The thickness of the double-sided adhesive sheet is preferably from 3 μm to 300 μm, more preferably from 5 μm to 150 μm, and still more preferably from 10 μm to 100 μm.

The sum of all the layers (III) of the product of the cube of the single layer thickness of each layer constituting the above-mentioned double-sided adhesive sheet and the product of the single layer elastic modulus is preferably 1×10 ^-6 Nm to 1×10 ^-1 Nm, more preferably 5×10 ^-6 Nm to 5×10 ^-2 , more preferably 5×10 ^-6 Nm to 3×10 ^-2 . If it is within such a range, a double-sided adhesive sheet having high self-supporting properties, excellent lamination workability, and excellent flexibility can be obtained. This effect is particularly useful in a double-sided adhesive sheet provided with a first adhesive layer containing heat-expandable microspheres.

In one embodiment, at least one layer among the layers constituting the double-sided adhesive sheet is a colored layer. When there are plural colored layers, it is preferable that the colors are different from each other. With these configurations, the front and back sides of the double-sided adhesive sheet with liner become clear, and the liner to be peeled can be easily identified. Furthermore, coloring refers to the state of absorbing and/or reflecting any or all of light in the visible light region (250 nm to 700 nm) of light. Any appropriate method can be adopted as a method of coloring any layer.

Pigments, dyes, and the like can be used as the above-mentioned colorant. As the above-mentioned pigments, for example, as organic pigments, acrylic pigments, azo pigments, polyazo pigments, anthraquinone pigments, quinacridone pigments, isoindoline pigments, isoindoline pigments, Ketone pigments, phthalocyanine pigments, perylene pigments, DPP (Diketopyrrolo-pyrrole, diketopyrrolopyrrole) pigments, fluorescent pigments, condensed polycyclic pigments, colored resin particles, etc.; examples of inorganic pigments include: Known pigments such as carbon black, synthetic silica, chromium oxide, iron oxide, titanium oxide, zinc sulfide, calcined pigment, and natural mica. The dye may, for example, be an acid dye, a reactive dye, a direct dye, a disperse dye, a cationic dye or a polymer dye. As the ink, commercially available items such as "NB300" manufactured by Dainichi Seika Chemical Co., Ltd. can also be used. Furthermore, coloring can also be performed by mixing a colorant in the adhesive layer. Also, when the composition of the adhesive layer is microphase-separated into, for example, a hydrophilic composition and a hydrophobic composition, etc., and has a microstructure with a size around the wavelength of visible light, there is also a phenomenon of coloring corresponding to the size, so-called In the case of structural color, it is also possible to use coloring that utilizes this phenomenon.

C-1. The first adhesive layer As described above, the first adhesive layer contains heat-expandable microspheres. The first adhesive layer may further contain an adhesive.

As an adhesive agent which comprises a 1st adhesive agent layer, an acrylic adhesive agent, a rubber adhesive agent, a silicone adhesive agent etc. are mentioned. Among them, an acrylic adhesive can be preferably used. In addition, an active energy ray-curable acrylic adhesive (hereinafter referred to as an active energy ray-curable adhesive) can also be used as the adhesive. The details of the adhesive are described in, for example, Japanese Patent Laid-Open No. 2015-168711. The description of this publication is incorporated in this specification as a reference.

(acrylic adhesive) In one embodiment, an acrylic adhesive is used as the adhesive. Examples of the aforementioned acrylic adhesives include ones using, as a base polymer, an acrylic polymer (homopolymer or copolymer) using one or more alkyl (meth)acrylates as a monomer component. Acrylic adhesive, etc.

Specific examples of the above-mentioned alkyl (meth)acrylate include: methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, isopropyl (meth)acrylate , Butyl (meth)acrylate, Isobutyl (meth)acrylate, Second butyl (meth)acrylate, Tertiary butyl (meth)acrylate, Amyl (meth)acrylate, (Meth) Hexyl acrylate, heptyl (meth)acrylate, octyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, isooctyl (meth)acrylate, nonyl (meth)acrylate, ( Isononyl methacrylate, Decyl (meth)acrylate, Isodecyl (meth)acrylate, Undecyl (meth)acrylate, Lauryl (meth)acrylate, (Meth)acrylate ) Tridecyl acrylate, Myristyl (meth)acrylate, Pentadecyl (meth)acrylate, Hexadecyl (meth)acrylate, Heptadecyl (meth)acrylate C1-20 alkyl (meth)acrylates such as octadecyl (meth)acrylate, nonadecyl (meth)acrylate, eicosyl (meth)acrylate, etc. Among them, the alkyl (meth)acrylate having a linear or branched alkyl group with a carbon number of 4 to 20 (more preferably 6 to 20, especially preferably 8 to 18) is preferred, more preferably 2-Ethylhexyl (meth)acrylate.

In order to improve cohesion, heat resistance, crosslinkability, etc., the above-mentioned acrylic polymer may optionally contain units corresponding to other monomer components that can be copolymerized with the above-mentioned alkyl (meth)acrylate. Examples of such monomer components include carboxyl group-containing compounds such as acrylic acid, methacrylic acid, carboxyethyl acrylate, carboxypentyl acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid. Monomer; acid anhydride monomers such as maleic anhydride and itaconic anhydride; hydroxyethyl (meth)acrylate, hydroxypropyl (meth)acrylate, hydroxybutyl (meth)acrylate, hydroxy (meth)acrylate Hydroxyl-containing monomers such as hexyl ester, hydroxyoctyl (meth)acrylate, hydroxydecyl (meth)acrylate, hydroxylauryl (meth)acrylate, (4-hydroxymethylcyclohexyl)methyl methacrylate; Styrenesulfonic acid, allylsulfonic acid, 2-(meth)acrylamide-2-methylpropanesulfonic acid, (meth)acrylamidopropanesulfonic acid, sulfopropyl (meth)acrylate, ( Meth)acryloxynaphthalenesulfonic acid and other sulfonic acid-containing monomers; (meth)acrylamide, N,N-dimethyl(meth)acrylamide, N-butyl(meth)propylene Amide, N-methylol(meth)acrylamide, N-methylolpropane(meth)acrylamide and other (N-substituted) amido monomers; (meth)aminoethyl acrylate , N, N-dimethylaminoethyl (meth)acrylate, tertiary butylaminoethyl (meth)acrylate and other (meth)acrylic acid aminoalkyl monomers; (meth)methacrylate Alkoxyalkyl (meth)acrylate monomers such as oxyethyl ester and ethoxyethyl (meth)acrylate; N-cyclohexylmaleimide, N-isopropylcis-butyl Maleimide-based monomers such as olefinic imide, N-laurylmaleimide, N-phenylmaleimide, etc.; N-methyliconimide , N-Ethyl Iconimide, N-Butyl Iconimide, N-Octyl Iconimide, N-2-Ethylhexyl Iconimide, N-Cyclohexyl Iconimide Iconimide-based monomers such as imide and N-lauryl iconimide; N-(meth)acryloxymethylene succinimide, N-(meth)acryl -6-oxyhexamethylene succinimide, N-(meth)acryl-8-oxyoctamethylene succinimide and other succinimide monomers; vinyl acetate, acrylic acid Vinyl Acetate, N-Vinylpyrrolidone, Methylvinylpyrrolidone, Vinylpyridine, Vinylpiperidine, Vinylpyrimidine, Vinylpiperidine, Vinylpyrrolidone, Vinylpyrrole, Vinylazole , Vinyl azole, vinyl morpholine, N-vinyl carboxamides, styrene, α-methyl styrene, N-vinyl caprolactam and other vinyl monomers; acrylonitrile, methacrylic Cyanoacrylate monomers such as nitrile; acrylic monomers containing epoxy groups such as glycidyl (meth)acrylate; polyethylene glycol (meth)acrylate, polypropylene glycol (meth)acrylate, (meth) ) Diol-based acrylate monomers such as methoxyethylene glycol acrylate, methoxypolypropylene glycol (meth)acrylate; tetrahydrofurfuryl (meth)acrylate, fluorine (meth)acrylate, polysiloxane ( Acrylate-based monomers such as methacrylates with heterocycles, halogen atoms, silicon atoms, etc.; hexanediol di(meth)acrylate, (poly)ethylene glycol di(meth)acrylate, (poly) ) propylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, pentaerythritol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate Acrylate, dipentaerythritol hexa(meth)acrylate, epoxy acrylate, polyester acrylate, urethane acrylate and other multifunctional monomers; isoprene, butadiene, isobutylene and other olefinic monomers body; vinyl ether monomers such as vinyl ether, etc. These monomer components can be used individually or in combination of 2 or more types. Among the above, carboxyl-containing monomers (especially preferably acrylic acid) or hydroxyl-containing monomers (especially preferably hydroxyethyl (meth)acrylate) are more preferred. The content of structural units derived from carboxyl group-containing monomers is preferably 0.1% by weight to 10% by weight, more preferably 0.5% by weight to 5% by weight, and especially preferably 1% by weight, relative to the total structural units constituting the acrylic polymer % to 4% by weight. Furthermore, the content of the structural unit derived from the hydroxyl-containing monomer is preferably 0.1% by weight to 20% by weight, more preferably 0.5% by weight to 10% by weight, and especially preferably 1% by weight to 7% by weight. In addition, in this specification, (meth)acryl means acryl and/or methacryl.

In one embodiment, the acrylic polymer includes a structural unit derived from a monomer having an active hydrogen group. By including structural units derived from monomers with active hydrogen groups, acrylic polymers will undergo microphase separation, and light of wavelengths in the visible region will be scattered and colored (milky white to light yellow), so it is easy to recognize the lining pulled up pad ends.

The content of the above-mentioned structural units derived from monomers having active hydrogen groups is preferably 0.1% by weight to 20% by weight, more preferably 0.5% by weight to 10% by weight, and especially Preferably, it is 1% by weight to 7% by weight. As a monomer which has an active hydrogen group, (meth)acrylic acid, 2-hydroxyethyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, etc. are mentioned, for example.

The above-mentioned acrylic adhesive may contain any appropriate additives as needed. Examples of such additives include: crosslinking agents, tackifiers, plasticizers (such as trimellitic acid ester plasticizers, pyromellitic acid ester plasticizers, etc.), pigments, dyes, fillers, etc. agent, anti-aging agent, conductive material, antistatic agent, ultraviolet absorber, light stabilizer, peeling regulator, softener, surfactant, flame retardant, antioxidant, etc.

Examples of the cross-linking agent contained in the acrylic adhesive include isocyanate-based cross-linking agents, epoxy-based cross-linking agents, melamine-based cross-linking agents, peroxide-based cross-linking agents, and urea-based cross-linking agents. Linking agent, metal alkoxide-based cross-linking agent, metal chelate-based cross-linking agent, metal salt-based cross-linking agent, carbodiimide-based cross-linking agent, oxazoline-based cross-linking agent, aziridine-based Crosslinking agent, amine crosslinking agent, etc. Among them, an isocyanate-based crosslinking agent or an epoxy-based crosslinking agent is preferable.

Specific examples of the above-mentioned isocyanate-based crosslinking agent contained in the above-mentioned acrylic adhesive include: lower aliphatic polyisocyanates such as butylene diisocyanate and hexamethylene diisocyanate; cyclopentyl diisocyanate; , cyclohexyl diisocyanate, isophorone diisocyanate and other alicyclic isocyanates; 2,4-toluene diisocyanate, 4,4'-diphenylmethane diisocyanate, xylylene diisocyanate and other aromatic isocyanates; Trimethylolpropane/toluene diisocyanate trimer adduct (manufactured by Japan Polyurethane Industry Co., Ltd., trade name "Coronate L"), trimethylolpropane/hexamethylene diisocyanate trimer adduct (Japan Polyurethane Industry Co., Ltd., trade name "Coronate HL"), isocyanurate body of hexamethylene diisocyanate (Nippon Polyurethane Industry Co., Ltd., trade name "Coronate HX") and other isocyanate adducts. The content of the isocyanate-based crosslinking agent can be set to any appropriate amount according to the required adhesive force, and is typically 0.1 to 20 parts by weight, more preferably 0.5 to 10 parts by weight, relative to 100 parts by weight of the base polymer. parts by weight.

Examples of the epoxy-based crosslinking agent contained in the acrylic adhesive include N,N,N',N'-tetraglycidyl-m-xylylenediamine, diglycidylaniline, 1,3-bis(N,N-glycidylaminomethyl)cyclohexane (manufactured by Mitsubishi Gas Chemical Co., trade name "Tetrad C"), 1,6-hexanediol diglycidyl ether (Kyoei manufactured by Kyoeisha Chemical Co., Ltd., trade name "Epolight 1600"), neopentyl glycol diglycidyl ether (manufactured by Kyoeisha Chemical Co., Ltd., trade name "Epolight 1500NP"), ethylene glycol diglycidyl ether (manufactured by Kyoeisha Chemical Co., Ltd., trade name "Epolight40E"), propylene glycol diglycidyl ether (manufactured by Kyoeisha Chemical Co., Ltd., trade name "Epolight70P"), polyethylene glycol diglycidyl ether (manufactured by NOF Corporation, trade name "EPIOL E-400") , polypropylene glycol diglycidyl ether (manufactured by NOF Corporation, trade name "EPIOL P-200"), sorbitol polyglycidyl ether (manufactured by Nagase ChemteX, trade name "Denacol EX-611"), glycerol polyglycidol Ether (manufactured by Nagase ChemteX Company, trade name "Denacol EX-314"), pentaerythritol polyglycidyl ether, polyglycerol polyglycidyl ether (manufactured by Nagase ChemteX Company, trade name "Denacol EX-512"), polysorbate Glycidyl ether, trimethylolpropane polyglycidyl ether, diglycidyl adipate, diglycidyl phthalate, tris(2-hydroxyethyl) isocyanurate triglycidyl ester, isophthalic acid Phenol diglycidyl ether, bisphenol-S-diglycidyl ether, epoxy resin with more than 2 epoxy groups in the molecule, etc. The content of the epoxy-based crosslinking agent can be set to any appropriate amount according to the required adhesive force, with respect to 100 parts by weight of the base polymer, typically 0.01 to 10 parts by weight, more preferably 0.03 to 10 parts by weight 5 parts by weight.

Any appropriate tackifier is used as the tackifier contained in the acrylic adhesive. As the tackifier, for example, tackifier resin is used. Specific examples of the tackifying resin include: rosin-based tackifying resins (such as unmodified rosin, modified rosin, rosin phenolic resins, rosin ester resins, etc.), terpene-based tackifying resins (such as terpene olefin-based resin, terpene-phenol-based resin, styrene-modified terpene-based resin, aromatic-modified terpene-based resin, hydrogenated terpene-based resin), hydrocarbon-based tackifying resin (such as aliphatic hydrocarbon resin, Cyclic hydrocarbon resins, aromatic hydrocarbon resins (such as styrene resins, xylene resins, etc.), aliphatic and aromatic petroleum resins, aliphatic and alicyclic petroleum resins, hydrogenated hydrocarbon resins, benzofuran resins, coumarone-indene resins, etc.), phenolic adhesive resins (such as alkanol resins, xylene formaldehyde resins, resole resins, novolaks, etc.), ketone adhesive resins, polyamide Adhesive resin, epoxy adhesive resin, elastic adhesive resin, etc. Among them, rosin-based tackifying resins, terpene-based tackifying resins, or hydrocarbon-based tackifying resins (styrene-based resins, etc.) are preferable. The tackifier can be used alone or in combination of two or more. The added amount of the above-mentioned tackifier is preferably 5 to 100 parts by weight, more preferably 10 to 50 parts by weight, based on 100 parts by weight of the base polymer.

(heat-expandable microspheres) As the heat-expandable microspheres, any appropriate heat-expandable microspheres can be used as long as they are expandable or foamable by heating. As the above-mentioned heat-expandable microspheres, for example, microspheres obtained by enclosing a material that is easily expanded by heating in an elastic shell can be used. Such heat-expandable microspheres can be produced by any appropriate method, such as coacervation method, interfacial polymerization method and the like.

Examples of substances that are easily expanded by heating include propane, propylene, butene, n-butane, isobutane, isopentane, neopentane, n-pentane, n-hexane, isohexane, heptane, Octane, petroleum ether, halides of methane, tetraalkylsilanes and other low-boiling liquids; azodicarbonamide, which is vaporized by thermal decomposition, etc.

Examples of the material constituting the shell include: nitrile monomers such as acrylonitrile, methacrylonitrile, α-chloroacrylonitrile, α-ethoxyacrylonitrile, and fumaronitrile; acrylic acid, methacrylic acid, Carboxylic acid monomers such as itaconic acid, maleic acid, fumaric acid, and citraconic acid; vinylidene chloride; vinyl acetate; methyl (meth)acrylate, ethyl (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate, tert-butyl (meth)acrylate, iso-(meth)acrylate, cyclohexyl (meth)acrylate, (meth) (meth)acrylates such as benzyl acrylate and β-carboxyethyl acrylate; styrene monomers such as styrene, α-methylstyrene, and chlorostyrene; acrylamides, substituted acrylamides, methyl Polymers composed of amide monomers such as acrylamide and substituted methacrylamide. The polymer composed of these monomers may be a homopolymer or a copolymer. Examples of such copolymers include: vinylidene chloride-methyl methacrylate-acrylonitrile copolymer, methyl methacrylate-acrylonitrile-methacrylonitrile copolymer, methyl methacrylate-acrylonitrile Copolymer, acrylonitrile-methacrylonitrile-itaconic acid copolymer, etc.

As the heat-expandable microspheres, an inorganic foaming agent or an organic foaming agent can be used. As an inorganic foaming agent, ammonium carbonate, ammonium bicarbonate, sodium bicarbonate, ammonium nitrite, sodium borohydroxide, various azides, etc. are mentioned, for example. Moreover, as an organic foaming agent, for example: Chlorofluoroalkane compounds such as trichloromonofluoromethane and dichloromonofluoromethane; Azobisisobutyronitrile, azodicarbonamide, barium azo Azo compounds such as dicarboxylates; p-toluenesulfonylhydrazine, diphenylsulfonyl-3,3'-disulfonylhydrazine, 4,4'-oxybis(benzenesulfonylhydrazine), allyl Hydrazine compounds such as bis(sulfonyl hydrazine); semicarbazide compounds such as p-toluenesulfonyl semiurea and 4,4'-oxybis(benzenesulfonyl semicarbazide); 5-morpholinyl- 1,2,3,4-Thiatriazole and other triazole compounds; N,N'-Dinitrosopentamethylenetetramine, N,N'-Dimethyl-N,N'-Dinitroso N-nitroso compounds such as p-phthalamide, etc.

The particle size of the thermally expandable microspheres before heating is preferably from 0.5 μm to 80 μm, more preferably from 5 μm to 45 μm, further preferably from 10 μm to 20 μm, especially preferably from 10 μm to 15 μm. Therefore, if the average particle size is used to describe the particle size of the thermally expandable microspheres before heating, it is preferably 6 μm to 45 μm, more preferably 15 μm to 35 μm. The above-mentioned particle size and average particle size are values obtained by the particle size distribution measurement method in the laser scattering method.

The heat-expandable microspheres preferably have a moderate strength that does not break until the volume expansion ratio becomes preferably 5 times or more, more preferably 7 times or more, and further preferably 10 times or more. In the case of using such heat-expandable microspheres, the adhesive force can be efficiently reduced by heat treatment.

The content ratio of the heat-expandable microspheres in the above-mentioned pressure-sensitive adhesive layer can be appropriately set according to the required reduction of the pressure-sensitive adhesive force and the like. The content ratio of the heat-expandable microspheres is, for example, 1 to 150 parts by weight, preferably 10 to 130 parts by weight, and more preferably 25 to 100 parts by weight relative to 100 parts by weight of the base polymer forming the adhesive layer. 100 parts by weight.

The arithmetical surface roughness Ra of the first adhesive layer before the heat-expandable microspheres expand (that is, before heating) is preferably 500 nm or less, more preferably 400 nm or less, and still more preferably 300 nm or less. In the adhesive layer containing heat-expandable microspheres, there may be cases where raised portions are generated due to heat-expandable microspheres, but as long as the surface roughness before heating is within the above range, peeling can be obtained without causing liner peeling It is a double-sided adhesive sheet that can peel off the liner in the event of unfavorable situations such as cracking or unintentional separation of the adhesive layer due to stress concentration on the raised portion, and has excellent adhesion to the adherend. The arithmetical surface roughness Ra can be determined by, for example, the thickness of the first adhesive layer, the surface smoothness of the substrate when the first adhesive layer formed on the substrate is transferred to form a double-sided adhesive sheet, the first adhesive Drying conditions and the like at the time of layer formation are adjusted.

The thickness of the first adhesive layer is preferably 5 μm to 70 μm, more preferably 10 μm to 60 μm, further preferably 15 μm to 55 μm, most preferably 20 μm to 50 μm. Within this range, a double-sided adhesive sheet excellent in liner peeling operability, operability at the time of lamination, adhesiveness, smoothness, and deformability at the time of heating can be obtained. In one embodiment, the thickness of the first adhesive layer is 23 μm˜47 μm. If it is such a range, the double-sided adhesive sheet suitable especially when using an adherend as a base board of CSP or WLP from a viewpoint of the smoothness of the surface of an adhesive layer can be obtained.

The modulus of elasticity of the first adhesive layer is preferably from 0.001 MPa to 10 MPa, more preferably from 0.01 MPa to 8 MPa. Within this range, a double-sided adhesive sheet excellent in liner peeling operability, operability at the time of lamination, adhesiveness, smoothness, and deformability at the time of heating can be obtained. In one embodiment, the modulus of elasticity of the first adhesive layer is preferably 0.05 MPa-4 MPa, more preferably 0.1 MPa-3 MPa. If it is such a range, the double-sided adhesive sheet suitable especially when using an adherend as a base board of CSP or WLP from the viewpoint of the smoothness of the surface of an adhesive layer can be obtained.

C-2. Second adhesive layer The above-mentioned second adhesive layer may contain any appropriate adhesive. As an adhesive agent which comprises a 2nd adhesive agent layer, an acrylic adhesive agent, a rubber adhesive agent, a silicone adhesive agent etc. are mentioned. Among them, an acrylic adhesive can be preferably used. In addition, an active energy ray-curable acrylic adhesive (hereinafter referred to as an active energy ray-curable adhesive) can also be used as the adhesive. The details of the adhesive are described in, for example, Japanese Patent Laid-Open No. 2015-168711. The description of this publication is incorporated in this specification as a reference.

In one embodiment, the second adhesive layer includes the acrylic adhesive described in Section C-1. As described above, the acrylic adhesive contains an acrylic polymer as a base polymer. In one embodiment, the acrylic polymer includes a structural unit derived from a monomer having an active hydrogen group. The content of the above-mentioned structural units derived from monomers having active hydrogen groups is preferably 0.1% by weight to 20% by weight, more preferably 0.5% by weight to 10% by weight, and especially Preferably, it is 1% by weight to 7% by weight.

The thickness of the second adhesive layer is preferably 1 μm to 50 μm, more preferably 2 μm to 60 μm, further preferably 3 μm to 35 μm, most preferably 5 μm to 35 μm. Within such a range, a double-sided adhesive sheet excellent in liner peeling operability, operability at the time of lamination, adhesiveness, and smoothness can be obtained. In one embodiment, the thickness of the second adhesive layer is preferably 2 μm˜35 μm, more preferably 3 μm˜25 μm. If it is within such a range, a double-sided adhesive sheet suitable especially when the adherend is used for a semiconductor wafer of CSP or WLP can be obtained from the viewpoint of embedability to the uneven surface and suppression of gaps.

The modulus of elasticity of the second adhesive layer is preferably from 0.001 MPa to 10 MPa, more preferably from 0.01 MPa to 8 MPa. Within such a range, a double-sided adhesive sheet excellent in liner peeling operability, operability at the time of lamination, adhesiveness, and smoothness can be obtained. In one embodiment, the elastic modulus of the second adhesive layer is preferably 0.05 MPa-4 MPa, more preferably 0.1 MPa-3 MPa. If it is such a range, the double-sided adhesive sheet suitable especially when using an adherend to the semiconductor wafer of CSP or WLP from a viewpoint of embedding property with respect to an uneven|corrugated surface can be obtained. Furthermore, when the second adhesive layer contains an active energy ray-curable adhesive, the second adhesive layer is cured by irradiation of active energy rays, and its modulus of elasticity is preferably 1 MPa to 200 MPa. , more preferably 5 MPa to 150 MPa, further preferably 10 MPa to 100 MPa.

C-3. Primer coat The above primer layer contains any suitable adhesive. Examples of the adhesive constituting the undercoat layer include acrylic adhesives, rubber adhesives, and silicone adhesives. Among them, an acrylic adhesive can be preferably used. In addition, an active energy ray-curable acrylic adhesive (hereinafter referred to as an active energy ray-curable adhesive) can also be used as the adhesive. As the adhesive constituting the undercoat layer, it is preferable to use the same adhesive as the adhesive constituting the above-mentioned first adhesive layer.

The thickness of the undercoat layer is preferably from 1 μm to 40 μm, more preferably from 5 μm to 35 μm, and still more preferably from 10 μm to 30 μm. If it is within such a range, a double-sided adhesive sheet having excellent liner peeling operability and suppressing the influence of thermally expandable microspheres on the substrate side when heated can be obtained.

The modulus of elasticity of the above primer layer is preferably from 0.001 MPa to 10 MPa, more preferably from 0.01 MPa to 8 MPa, more preferably from 0.5 MPa to 5 MPa. If it is within such a range, a double-sided adhesive sheet having excellent liner peeling operability and suppressing the influence of thermally expandable microspheres on the substrate side when heated can be obtained. Furthermore, when the undercoat layer contains an active energy ray-curable adhesive, the undercoat layer is hardened by irradiation of active energy rays, and its modulus of elasticity is preferably 1 MPa to 200 MPa, more preferably It is 5 MPa to 150 MPa, and more preferably, it is 10 MPa to 100 MPa.

C-4. Substrate The above-mentioned substrate can be made of any suitable material. As the substrate, for example, besides plastic film and plastic sheet, various sheets such as paper, cloth, non-woven fabric, metal foil, or their plastic laminates, and laminates of plastics can be used. Among them, a plastic film or a plastic sheet (hereinafter referred to as a plastic film) is most preferable from the viewpoints of workability and cost. As the raw material of the plastic film, it can be selected according to needs in terms of strength, heat resistance, and the like. For example, polyethylene (PE), polypropylene (PP), ethylene-propylene copolymer, ethylene-vinyl acetate copolymer (EVA) and other olefin-based resins that use α-olefin as a monomer component; polyparaphenylene Polyethylene dicarboxylate (PET), polyethylene naphthalate (PEN), polybutylene terephthalate (PBT) and other polyesters; polyvinyl chloride (PVC); polyphenylene sulfide (PPS); Amide-based resins such as polyamide (nylon), wholly aromatic polyamide (aromatic polyamide); polyetheretherketone (PEEK), polyimide, polyetherimide, polystyrene, acrylic Department of resin, etc. These raw materials can be used individually or in combination of 2 or more types. In addition, as the plastic film, any one of an unstretched film, a uniaxially oriented film, and a biaxially oriented film may be used. In addition, these films may be laminated films including two or more film layers, and films in which lubricants such as inert particles are appropriately added may also be used from the viewpoint of handleability.

The thickness of the above substrate is preferably less than 200 μm, more preferably 1 μm to 200 μm, further preferably 5 μm to 200 μm, especially preferably 10 μm to 200 μm, most preferably 20 μm to 200 μm, most preferably Preferably, it is 30 μm to 200 μm. If it is within such a range, a base material excellent in liner peelability, strength, softness, flexibility, bending resistance, etc. can be obtained.

The modulus of elasticity of the base material is preferably from 500 MPa to 5000 MPa, more preferably from 500 MPa to 4000 MPa, and still more preferably from 700 MPa to 4000 MPa. If it is within such a range, a base material excellent in liner peelability, strength, softness, flexibility, bending resistance, etc. can be obtained.

The above-mentioned substrates may also be subjected to surface treatment. As the surface treatment, for example, corona treatment, chromic acid treatment, ozone exposure, flame exposure, high-voltage electric shock exposure, ionizing radiation treatment, coating treatment with a primer, etc. may be mentioned.

In order to improve the recognition of the end face of the pad, and to improve the grip between the base material and the adhesive layer, the base material may be printed with ink or the like. As the ink, "NB300" manufactured by Dainichi Seika Chemical Co., Ltd., etc. can be used.

C-5. Manufacturing method of double-sided adhesive sheet The above-mentioned double-sided adhesive sheet can be produced by any appropriate method. As the production method of the double-sided adhesive sheet of the present invention, for example, a method of directly coating a composition containing an adhesive on a substrate; or coating a composition containing an adhesive on any appropriate substrate A method of applying and transferring the formed coating layer to a substrate, etc. Also, a laminate formed by coating a liner with a composition containing an adhesive (first liner/first adhesive layer, second adhesive layer/second liner) can be attached to A double-sided adhesive sheet with a liner is obtained by using the method of the base material. Compositions comprising an adhesive may comprise any suitable solvent.

The first adhesive layer can be formed by coating a composition comprising heat-expandable microspheres, an adhesive, and any appropriate solvent on a substrate. Alternatively, after spreading the heat-expandable microspheres on the adhesive coating layer, the heat-expandable microspheres may be embedded in the adhesive using a laminator or the like to form an adhesive layer containing the heat-expandable microspheres.

When the double-sided adhesive sheet has the aforementioned undercoat layer, the undercoat layer can be formed, for example, by applying a composition (adhesive) for forming the undercoat layer on the substrate or the first adhesive layer.

Any appropriate coating method can be adopted as the coating method of the above-mentioned adhesive. For example, each layer can be formed by drying after coating. As a coating method, the coating method using a multi-function coater, a die coater, a gravure coater, an applicator, etc. is mentioned, for example. As a drying method, natural drying, heat drying, etc. are mentioned, for example. In the case of heat drying, the heating temperature can be set to any appropriate temperature according to the characteristics of the substance to be dried.

D. Application The above-mentioned double-sided adhesive sheet with a liner can be suitably used as a temporary fixing sheet when processing any appropriate member (for example, electronic parts such as semiconductor chips). In one embodiment, the above-mentioned double-sided adhesive sheet with a liner can be used as a sheet for temporarily fixing semiconductor chips when manufacturing CSP (Chip Size/Scale Package) or WLP (Wafer Level Package). In one embodiment, the double-sided adhesive sheet with a liner is used for processing including the step of first peeling off the second liner.

In one embodiment, the double-sided adhesive sheet with a liner is in the form of a roll. [Example]

Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited by these Examples. In addition, in the examples, "parts" and "%" are based on weight unless otherwise specified.

[Manufacturing example 1] Manufacture of spacer a (thickness: 12 μm) Addition silicone treatment agent (manufactured by Shin-Etsu Silicones, main agent "KS-774": 100 parts by weight, catalyst "CAT PL-3": 0.4 parts by weight) was dissolved in a mixture of heptane and hexane In a solvent (mixing weight ratio 1:1), prepare a peeling treatment agent solution in which the concentration of the treatment agent is adjusted to 0.9%. Next, the above release treatment agent solution was coated on one side of a PET film (manufactured by Toray Corporation, trade name "Lumirror S10", thickness 12 μm) using a gravure method, and dried in a hot air oven to obtain a liner a with a thickness of 12 μm . The Si-Kα ray intensity of the obtained gasket was 13 (kcps) (the measurement method will be described below).

[Manufacturing example 2] Manufacture of gasket b (thickness: 75 μm) A spacer b with a thickness of 75 μm was obtained in the same manner as in Production Example 1 except that a PET film with a thickness of 75 μm (manufactured by Toray Corporation, trade name “Lumirror S10”) was used. The Si-Kα ray intensity of the obtained spacer was 80 (kcps).

[Manufacturing example 3] Manufacture of spacer c (thickness: 38 μm) A spacer c with a thickness of 38 μm was obtained in the same manner as in Production Example 1 except that a PET film with a thickness of 38 μm (manufactured by Toray Corporation, trade name “Lumirror S10”) was used. The Si-Kα ray intensity of the obtained spacer was 3.2 (kcps).

[Manufacturing example 4] Manufacture of pad d (thickness: 50 μm) A spacer d with a thickness of 50 μm was obtained in the same manner as in Production Example 1 except that a PET film with a thickness of 50 μm (manufactured by Toray Corporation, trade name “Lumirror S10”) was used. The Si-Kα ray intensity of the obtained spacer was 35 (kcps).

[Manufacturing example 5] Manufacture of spacer e (thickness: 26 μm) A spacer e with a thickness of 26 μm was obtained in the same manner as in Production Example 1 except that an olefin film with a thickness of 26 μm (manufactured by Toray Corporation, trade name “Torayfan”) was used instead of the PET film. The Si-Kα ray intensity of the obtained spacer was 12 (kcps).

[Manufacturing example 6] Spacer f (thickness: 38 μm) A PET film (manufactured by Mitsubishi Plastics Corporation, trade name "MRF38") having a thickness of 38 μm with a peeling layer was prepared as a liner f. The Si-Kα ray intensity of the gasket is 18 (kcps).

[Manufacturing example 7] Manufacture of gasket g (thickness: 25 μm) A spacer g having a thickness of 25 μm was obtained in the same manner as in Production Example 1 except that a PET film with a thickness of 25 μm (manufactured by Toray Corporation, trade name “Lumirror S10”) was used instead of the PET film. The Si-Kα ray intensity of the obtained spacer was 1.1 (kcps).

[Manufacturing Example 8] Manufacture of spacer h (thickness: 5 μm) A spacer h with a thickness of 5 μm was obtained in the same manner as in Production Example 1 except that a PET film with a thickness of 5 μm (manufactured by Toray Corporation, trade name “Lumirror S10”) was used. The Si-Kα ray intensity of the obtained spacer was 1.0 (kcps).

[Manufacture Example 9] Manufacture of spacer i (thickness: 75 μm) A spacer i with a thickness of 75 μm was obtained in the same manner as in Production Example 1 except that an olefin film with a thickness of 75 μm (manufactured by Toray Corporation, trade name “Torayfan”) was used instead of the PET film. The Si-Kα ray intensity of the obtained spacer was 13 (kcps).

[Production Example 10] Production of Base Polymer 1 Add 70 parts of ethyl acrylate, 3 parts of butyl acrylate, 30 parts of 2-ethylhexyl acrylate, 5 parts of methyl methacrylate, 3.5 parts of 2-hydroxyethyl acrylate, and After adding 0.2 parts of benzoyl peroxide, it was heated to obtain a toluene solution of an acrylic copolymer (polymer 1). Furthermore, 3.1% by weight of the repeating units derived from the monomers constituting Polymer 1 were repeating units derived from monomers having an active hydrogen group.

[Production Example 11] Production of Base Polymer 2 Add 50 parts of butyl acrylate, 50 parts of ethyl acrylate, 5 parts of acrylic acid, 0.2 parts of 2-hydroxyethyl acrylate, and 0.2 parts of benzoyl peroxide as a polymerization initiator to toluene and heat to obtain an acrylic Copolymer (Polymer 2) in Toluene. Furthermore, 4.9% by weight of the repeating units derived from the monomers constituting Polymer 2 were repeating units derived from monomers having an active hydrogen group.

[Production Example 12] Production of Base Polymer 3 70 parts of methyl acrylate, 2 parts of butyl acrylate, 30 parts of 2-ethylhexyl acrylate, 10 parts of acrylic acid, and 0.2 parts of benzoyl peroxide as a polymerization initiator were added to ethyl acetate, followed by heating to obtain Acrylic Copolymer (Polymer 3) in Ethyl Acetate. Furthermore, 8.9% by weight of repeating units derived from monomers constituting polymer 3 were repeating units derived from monomers having an active hydrogen group.

[Production Example 13] Production of Base Polymer 4 Add 50 moles of butyl acrylate, 50 moles of ethyl acrylate, 24 moles of 2-hydroxyethyl acrylate, and benzoyl peroxide as a polymerization initiator (relative to butyl acrylate, ethyl acrylate, etc. and a total of 100 parts of 2-hydroxyethyl acrylate is 0.2 part) and heated to obtain a toluene solution of an acrylic copolymer (polymer 4). Furthermore, 19.6% by weight of repeating units derived from monomers constituting polymer 4 were repeating units derived from monomers having an active hydrogen group.

[Production Example 14] Production of Base Polymer 5 Add 50 moles of butyl acrylate, 50 moles of ethyl acrylate, 24 moles of 2-hydroxyethyl acrylate, and benzoyl peroxide as a polymerization initiator (relative to butyl acrylate, ethyl acrylate, etc. and a total of 100 parts of 2-hydroxyethyl acrylate is 0.2 part) and then heated to obtain a copolymer solution. After adding 2-isocyanatoacrylate ethyl in an amount corresponding to 78 mol% of the hydroxyl group derived from 2-hydroxyethyl acrylate in the solution to the copolymer solution, heat it to make methacrylic acid 2- Isocyanatoethyl was added to the hydroxyl group derived from the 2-hydroxyethyl acrylate to obtain a toluene solution of an acrylic copolymer (polymer 5) having a methacrylic group in its side chain. Furthermore, 3.4% by weight of the repeating units derived from the monomers constituting Polymer 5 were repeating units derived from monomers having an active hydrogen group.

[Example 1] (Preparation of base coat/substrate laminate) A mixed solution A obtained by mixing a toluene solution of polymer 1 (polymer 1: 100 parts) and 3 parts of an isocyanate-based crosslinking agent (manufactured by Nippon Polyurethane Co., Ltd., trade name "Coronate L") was prepared. Using Lumirror S10 (thickness: 25 μm) manufactured by Toray Co., Ltd. as a substrate, the above-mentioned mixed solution A was coated on one side with an applicator so that the thickness after solvent evaporation (drying) became 13 μm, and then, The solvent was evaporated (dried), and a primer layer/substrate laminate was obtained. (Preparation of the first liner/first adhesive layer (including heat-expandable microspheres) laminate) Toluene solution of polymer 1 (polymer 1: 100 parts), 1.5 parts of isocyanate crosslinking agent (manufactured by Nippon Polyurethane Co., Ltd., trade name "Coronate L"), crosslinking auxiliary agent (manufactured by Tokyo Seiki Chemical Co., Ltd., commercial product) were prepared. "OL-1") 0.05 parts, adhesion imparting resin (manufactured by Sumitomo Bakelite Co., Ltd., trade name "Sumilite PR12603") 10 parts, heat-expandable microspheres (manufactured by Matsumoto Yushi Pharmaceutical Co., Ltd., trade name "FN-180SSD") 30 parts 0.5 part of a coloring agent (manufactured by Dainichi Seika Kogyo Co., Ltd., trade name "DYMICS SZ-7510 GREEN") and a mixed solution B obtained by mixing 0.5 part. The above-mentioned mixed solution B was applied to the release treatment agent-applied surface of the liner a so that the thickness after the solvent evaporated (dried) became 35 μm. Thereafter, the solvent was volatilized (dried) to obtain a first liner/first adhesive laminate. (1st liner/1st adhesive layer (including heat-expandable microspheres)/undercoat layer/substrate laminate) Laminate the first liner/first adhesive laminate and the base coat/substrate laminate in such a way that the first adhesive layer and the base coat face each other to obtain the first liner/first adhesive layer (Contains heat-expandable microspheres)/undercoat layer/substrate laminate. (Production of the 2nd adhesive layer/2nd liner laminate) Toluene solution of polymer 1 (polymer 1: 100 parts), 1.5 parts of isocyanate crosslinking agent (manufactured by Nippon Polyurethane Co., Ltd., trade name "Coronate L"), crosslinking auxiliary agent (manufactured by Tokyo Seiki Chemical Co., Ltd., commercial product) were prepared. A mixed solution C obtained by mixing 0.05 parts of "OL-1") and 10 parts of a plasticizer (manufactured by DIC Corporation, trade name "Monocizer W700"). The above-mentioned mixed solution C was applied to the release treatment agent-applied surface of the liner b so that the thickness after the solvent evaporated (dried) became 10 μm. Thereafter, the solvent was volatilized (dried) to obtain a second adhesive layer/second liner laminate. (Production of double-sided adhesive sheet with backing) The first liner/first adhesive layer (containing thermally expandable microspheres)/undercoat layer/substrate laminate and the second adhesive layer/second liner laminate are paired with the substrate and the second adhesive layer. Laminate in the same way to obtain a double-sided adhesive sheet with a liner (the first liner/double-sided adhesive sheet (the first adhesive layer (containing thermally expandable microspheres)/undercoat layer/substrate/second Adhesive layer)/Second liner).

[Examples 2-18, 20-23, Comparative Example 1] A double-sided adhesive sheet with a liner was obtained in the same manner as in Example 1 except that the component composition of each layer was shown in Tables 1 to 4. The content of each component is as follows. ＜Crosslinking agent＞ Tetrad C: Mitsubishi Gas Chemical Co., Ltd., trade name "Tetrad C", epoxy-based crosslinking agent ＜Adhesion imparting agent＞ Sumilite PR12603: Manufactured by Sumitomo Bakelite Co., Ltd., trade name "Sumilite Resin PR12603" S145: Manufactured by Yasuhara Chemical Co., Ltd., trade name "YS POLYSTERS 145" ＜Heat-expandable microspheres＞ F-30D: Matsumoto Yushi Pharmaceutical Co., Ltd., trade name "Matsumoto Microsphere F-30D", foaming (expansion) start temperature: 70°C to 80°C, maximum expansion temperature: 110°C to 120°C, average particle diameter: 10 μm ~18 μm FN-180SSD: Matsumoto Yushi Pharmaceutical Co., Ltd., trade name "Matsumoto Microsphere FN-180SSD", foaming (expansion) start temperature: 135°C to 150°C, maximum expansion temperature: 165°C to 180°C, average particle diameter: 15 μm ~25 μm F-230D: Matsumoto Yushi Pharmaceutical Co., Ltd., trade name "Matsumoto Microsphere F-230D" F-50D: Manufactured by Matsumoto Yushi Pharmaceutical Co., Ltd., trade name "Matsumoto Microsphere F-50D" ＜Coloring agent＞ DYMICS SZ-7200 RED: Manufactured by Dainichi Seika Co., Ltd., trade name "DYMICS SZ-7200 RED"

[Example 19] (Preparation of undercoat layer/substrate laminate) A toluene solution of polymer 4 (polymer 4: 100 parts), ultraviolet curable urethane as an active energy ray reactive oligomer 40 parts of ester acrylate (UV7620EA: manufactured by Nippon Synthetic Chemicals Co., Ltd., trade name "Ultraviolet UV-7620EA"), 0.5 parts of epoxy-based crosslinking agent (manufactured by Mitsubishi Gas Chemical Co., Ltd., trade name "Tetrad C"), and energy rays Three parts of a polymerization initiator (manufactured by BASF JAPAN, trade name "Irgacure 651") were mixed to prepare a liquid mixture. Further, the same solvent (toluene) as the solvent in the mixed liquid was added to the mixed liquid, and the viscosity was adjusted to a viscosity that was easy to apply, thereby obtaining the mixed liquid A'. The blue printing ink CVL-PR (manufactured by DIC GRAPHICS Co., Ltd.) was prepared to be coated (solid printing) on Lumirror S10 (thickness 50 μm) made by Toray Co. μm) as the base material. The above-mentioned mixed solution A' was applied to one side of the substrate using an applicator, and then the solvent was evaporated (dried) to obtain a laminate including a primer layer and a precursor layer/substrate. (Preparation of the first liner/first adhesive layer (including heat-expandable microspheres) laminate) Polymer 4 in toluene solution (polymer 4: 100 parts), ultraviolet rays as active energy ray reactive oligomer 40 parts of hardening urethane acrylate (UV7620EA: manufactured by Nippon Synthetic Chemicals Co., Ltd., trade name "Ultraviolet UV-7620EA"), epoxy-based crosslinking agent (manufactured by Mitsubishi Gas Chemical Co., Ltd., trade name "Tetrad C") 0.5 parts, 3 parts of an energy ray polymerization initiator (manufactured by BASF JAPAN, trade name "Irgacure 651"), and 30 parts of heat-expandable microspheres (manufactured by Matsumoto Yushi Pharmaceutical Co., Ltd., trade name "F-30D") were mixed. Prepare the mixture. Further, the same solvent (toluene) as the solvent in the mixed liquid was added to the mixed liquid, and the viscosity was adjusted to a viscosity that was easy to coat, and the mixed liquid B' was obtained. The above-mentioned mixed solution B' was applied to the release treatment agent-applied surface of the liner c. Thereafter, the solvent was volatilized (dried) to obtain a laminate including the precursor layer of the first liner/first adhesive layer. (Preparation of the first liner/first adhesive layer (containing heat-expandable microspheres)/undercoat layer/substrate laminate) The laminate including the first liner/first adhesive layer and the precursor layer containing The laminate of the precursor layer of the primer layer/substrate is bonded in such a way that the precursor layer of the first adhesive layer and the precursor layer of the primer layer face each other to obtain a precursor layer comprising the first liner/the first adhesive layer (Contains heat-expandable microspheres)/Primer layer Precursor layer/Substrate laminate. (Preparation of the second adhesive layer/second liner laminate) Preparation of polymer 5 in toluene solution (polymer 1: 100 parts), isocyanate crosslinking agent (manufactured by Nippon Polyurethane Co., Ltd., trade name "Coronate L") ) and 3 parts of an energy ray polymerization initiator (manufactured by BASF JAPAN, trade name "Irgacure 651"). The above-mentioned mixed solution C' was applied to the release treatment agent-applied surface of the liner f. Thereafter, the solvent was volatilized (dried) to obtain a laminate of the precursor layer/second spacer including the second adhesive layer. (Production of Double-sided Adhesive Sheet with Liner) A laminate comprising the first liner/precursor layer of the first adhesive layer (including thermally expandable microspheres)/precursor layer of the primer layer/substrate and the laminate containing The laminate of the precursor layer of the second adhesive layer/the second liner is bonded in such a way that the base material and the precursor layer of the second adhesive layer face each other. Thereafter, each precursor layer was irradiated with ultraviolet rays with a cumulative light quantity of 300 mJ/cm ² using an ultraviolet irradiation machine (manufactured by Nitto Seiki Co., Ltd., trade name "UM810 (high-pressure mercury lamp light source)"). A double-sided adhesive sheet with liner was obtained in the above manner (the first liner/double-sided adhesive sheet (the first adhesive layer (containing heat-expandable microspheres; thickness: 25 μm)/undercoat layer (25 μm) /substrate/2nd adhesive layer (10 μm))/2nd spacer).

[evaluate] The double-sided adhesive sheet with a liner obtained in Examples and Comparative Examples was used for the following evaluation. The results are shown in Tables 1-5. (1) Evaluation of liner peeling operabilitya Attach a double-sided adhesive sheet (50 mm×100 mm) with a liner to the metal plate via a double-sided tape (manufactured by Nitto Denko Co., Ltd., trade name "No. 500") so that the first liner is on the upper side (SUS304 plate, thickness 3 mm) to prepare the measurement sample (a). In addition, a double-sided adhesive sheet (50 mm×100 mm) with a liner (50 mm×100 mm) was bonded to the second liner via a double-sided adhesive tape (manufactured by Nitto Denko Co., Ltd., trade name "No. 500"). A metal plate (SUS304 plate, thickness 3 mm) was used to prepare the measurement sample (b). For the measurement sample (a) and the measurement sample (b), the operation of pulling and folding the upper liner by hand is performed in an environment of 23°C/65%RH, and the liner peeling operability is evaluated according to the following criteria evaluate. Excellent (○ in the table): Can be folded back within 30 seconds. Good (△ in the table): Although it took more than 30 seconds, it was still possible to turn back. Unacceptable (× in the table): The adhesive layer was broken or useless swelling (peeling) occurred before the folding back, and the result was not classified as "excellent" or "good". (2) Evaluation of liner peeling operabilityb A measurement sample (a) and a measurement sample (b) were prepared in the same manner as in (1) above. With respect to the measurement sample (a) and the measurement sample (b), the liner peeling workability was evaluated by the following operation in an environment of 23° C./65% RH. Adhesive tape (manufactured by Nichiban Corporation, trade name "Sellotape (registered trademark) No. 405" (industrial use, width 18 mm)) was attached to the upper side as shown in Fig. Pad, prepare test sample (c). The measurement sample (c) was installed in a tensile testing machine (trade name "Shimadzu Autograph AG-120kN" manufactured by Shimadzu Corporation) with a constant temperature bath. Afterwards, stretch the above-mentioned adhesive tape along the longitudinal direction (the right direction of the paper surface) under the conditions of setting the peeling angle of 180°, the fixing force, and the peeling speed of 300 mm/min, and observe the separation of the upper liner from the double-sided adhesive sheet , and evaluated on the basis of the following criteria. Excellent (○ in the table): The upper liner was peeled while maintaining the peeling angle of 180°. Good (△ in the table): The peeling angle of 180° could not be maintained, but the liner on the upper side was still peeled off. Unqualified (× in the table): The adhesive layer is broken, and there are unintentional separation phenomena such as peeling of the lower liner/adhesive layer interface. (3) Reel winding test A double-sided adhesive sheet with a liner having a length of 2 m x a width of 0.3 m was wound around a tube with an outer peripheral diameter of 5 cm so that the second liner was on the outside. At this time, the two ends of the double-sided adhesive sheet with liner are made of end tape (manufactured by Nichiban Corporation, trade name "Sellotape (registered trademark) No. 405" (industrial use, width 18 m), 20 mm x 18 mm )seal. The double-sided adhesive sheet with liner wound up on the tube as above was stored in an environment of 40° C./50% RH for 72 hours. Thereafter, the appearance of the double-sided adhesive sheet with a liner was visually confirmed, and the roll windability was evaluated on the following criteria. Excellent (○ in the table): No change in appearance before and after storage Good (△ in the table): Although an appearance change was observed to the extent that the end tape was raised, the winding was not slow. Unqualified (× in the table): Winding is slow, peeling of tape at the end is confirmed, and liner peeling is confirmed (4) Liner peel force Peel off the second liner from the double-sided adhesive sheet (50 mm×180 mm) with liner, and stick the second adhesive layer through double-sided tape (manufactured by Nitto Denko Co., Ltd., trade name "No. 500") Fit the metal plate (SUS304 plate, thickness: 3 mm) to prepare a measurement sample. This measurement sample was set in a tensile testing machine (trade name "Shimadzu Autograph AG-120kN" manufactured by Shimadzu Corporation) with a constant temperature bath, and left to stand for 30 minutes. Then, in the environment of 23°C/55%RH, the first liner was peeled from the double-sided adhesive sheet under the conditions of peeling angle: 180° and peeling speed (stretching speed): 300 mm/min, and the second liner was measured. 1 Peel force of liner. In addition, the first liner was peeled off from the double-sided adhesive sheet (50 mm×180 mm) with liner, and the first adhesive was attached via a double-sided tape (manufactured by Nitto Denko Co., Ltd., trade name "No. 500"). The layer was attached to a metal plate (SUS304 plate, thickness: 3 mm) to prepare a measurement sample, and the peeling force of the second liner was measured in the same way as above. (5) modulus of elasticity Cut the double-sided adhesive sheet with a liner along the thickness direction with a microtome, observe the cut surface visually or with an optical microscope to identify each layer, and measure the thickness of the layers that constitute the double-sided adhesive sheet with a liner m indenter modulus of elasticity. Furthermore, the elastic modulus of the first adhesive layer is the elastic modulus of the region where thermally expandable microspheres do not exist. Use the software (triboscan) attached to the measuring device to perform numerical processing on the displacement-load hysteresis curve obtained by pressing the probe (indenter) against the measuring object, thereby obtaining the elastic modulus (the average value of 3 measurements). The nanoindentation apparatus and measurement conditions are as follows. Apparatus and measurement conditions ・Apparatus: Nanoindenter; Triboindenter manufactured by Hysitron Inc. Measuring method: single indentation method Measuring temperature: 25°C Pressing speed: about 1000 nm/sec Indentation depth: about 800 nm Probe: made of diamond, Berkovich type (triangular pyramid type) (6) Thickness Cut the double-sided adhesive sheet with a liner in the thickness direction with a trimming knife, and after performing Pt-Pd sputtering treatment, observe the cut surface with a S3400N low-vacuum scanning electron microscope (SEM) manufactured by Hitachi High-Tech Co., Ltd. And measure the thickness. The measurement conditions of SEM observation are as follows ・Observation image: ESED image ・Acceleration voltage: 10 kV ・Magnification: 600 times In addition, when the interface of the constituent layers is not clear, the following Raman spectrum measurement is used to determine the interface of the layer and then measure the thickness. (Raman spectrometry) ・Excitation wavelength: 532 nm ・Measurement wave number range: 300～3600 cm-1 ・Raster: 600 gr/mm ・Objective lens: ×100 ・Measurement time: 0.2 sec/1 spectrum ・Measurement range: 20×40 μm ・Number of measurements: 100×200 points ・Detector: EMCCD (7) Determination of Si-Kα ray intensity of gasket Fluorescent X-ray analysis was performed on 100 sites randomly selected from the surface of the liner (peeling-treated surface). More specifically, the Si-Kα ray intensity (i) of the surface of the liner in contact with the adhesive layer (the surface coated with the release treatment agent) and the surface not in contact with the adhesive layer ( Intensity (ii) of the Si-Kα ray on the surface not coated with the peeling treatment agent), the absolute value of the value obtained by subtracting the value of (ii) from the value of (i) is obtained, and the value is measured at 100 points The average value is taken as the Si-Kα ray intensity of the gasket. In addition, the intensity of the Si-Kα ray is the intensity at a wavelength of 7.125 angstroms in the measurement performed with the following equipment. Device: ZSX100e made by Rigaku Analysis area: 30 mmϕ Analytical element: Si Analytical crystallization: RX4 Output: 50 kV, 70 mA

[Table 1] Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 2nd liner 2nd liner liner b liner a liner d liner d liner c liner i Material PET PET PET PET PET Olefin Thickness (μm) 75 12 50 50 38 75 Elastic modulus (MPa) 3100 3100 3100 3100 3100 800 2nd Adhesive Layer base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 3 3 3 3 3 3 Crosslinking Auxiliary OL-1 OL-1 OL-1 OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 0.05 0.05 0.05 Plasticizer Monocizer W700 Monocizer W700 Monocizer W700 Monocizer W700 Monocizer W700 Monocizer W700 Plasticizer deployment amount (parts by weight) 10 10 10 10 10 10 Adhesion Imparting Resin Adhesion-imparting resin formulation amount (parts by weight) Thickness (μm) 10 10 10 10 10 10 Elastic modulus (MPa) 2.50 2.50 2.50 2.50 2.50 2.50 Substrate Material PET PET PET PET PET Olefin Thickness (μm) 25 25 25 75 25 25 Elastic modulus (MPa) 3100 3100 3100 3100 3100 800 Primer base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 3 3 3 3 3 3 Thickness (μm) 13 13 13 13 13 13 Elastic modulus (MPa) 1.20 1.20 1.20 1.20 1.20 1.20 1st adhesive layer (containing heat-expandable microspheres) base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 1.5 1.5 1.5 1.5 1.5 1.5 Crosslinking Auxiliary OL-1 OL-1 OL-1 OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 0.05 0.05 0.05 Adhesion Imparting Resin Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Adhesion-imparting resin formulation amount (parts by weight) 10 10 10 10 10 10 heat-expandable microspheres FN-180SSD FN-180SSD FN-180SSD FN-180SSD FN-180SSD FN-180SSD Heat-expandable microsphere deployment amount (weight part) 30 30 30 30 30 30 Colorant DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN Coloring agent deployment amount (weight part) 0.5 0.5 0.5 0.5 0.5 0.5 Thickness (μm) 35 35 35 35 35 35 Elastic modulus (MPa) 1.00 1.00 1.00 1.00 1.00 1.00 1st liner 1st liner liner a liner b liner c liner c liner d liner e Material PET PET PET PET PET Olefin Thickness (μm) 12 75 38 38 50 26 Elastic modulus (MPa) 3100 3100 3100 3100 3100 800 evaluate Peel force of the second liner (N/50 mm) 0.02 0.03 0.02 0.02 0.03 0.02 Peel force of the first liner (N/50 mm) 0.37 0.33 0.35 0.35 0.34 0.36 The product of the third power of the thickness of the first liner and the modulus of elasticity of the first liner (I) 5.3568E-06 0.001307813 0.000170103 0.000170103 0.0003875 1.40608E-05 The product of the third power of the thickness of the second liner and the modulus of elasticity of the second liner (II) 0.001307813 5.3568E-06 0.0003875 0.0003875 0.000170103 0.0003375 The total of all layers of the product of the single layer thickness cubed and the single layer elastic modulus of each layer constituting the double-sided adhesive sheet (III) 4.84855E-05 4.84855E-05 4.84855E-05 0.001307861 4.84855E-05 1.2548E-05 (I)＋(III) 5.384E-05 1.356E-03 2.186E-04 1.478E-03 4.360E-04 2.661E-05 (II)＋(III) 1.356E-03 5.384E-05 4.360E-04 1.695E-03 2.186E-04 3.500E-04 (I)/{(II)＋(III)} 3.950E-03 2.429E+01 3.902E-01 1.003E-01 1.773E+00 4.017E-02 (II)/{(I)＋(III)} 2.429E+01 3.950E-03 1.773E+00 2.622E-01 3.902E-01 1.268E+01 {(I)＋(II)}/(III) 2.708E+01 2.708E+01 1.150E+01 4.263E-01 1.150E+01 2.802E+01 Liner peeling workability evaluation a/measurement sample (a) △ △ ○ ○ ○ △ Liner release workability evaluation a/measurement sample (b) △ △ ○ ○ ○ △ Liner release workability evaluation b/measurement sample (a) △ △ ○ ○ ○ △ Liner release workability evaluation b/measurement sample (b) △ △ ○ ○ ○ △ Roll take-up test △ △ ○ ○ ○ △

[Table 2] Example 7 Example 8 Example 9 Example 10 Example 11 Example 12 2nd liner 2nd liner liner i liner d liner b liner b Pad f liner b Material Olefin PET PET PET PET PET Thickness (μm) 75 50 75 75 38 75 Elastic modulus (MPa) 800 3100 3100 3100 3100 3100 2nd Adhesive Layer base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 3 3 3 1.55 1.1 1.8 Crosslinking Auxiliary OL-1 OL-1 OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 0.05 0.05 Plasticizer Monocizer W700 Monocizer W700 Monocizer W700 Plasticizer deployment amount (parts by weight) 10 10 10 Adhesion Imparting Resin Sumilite PR12603 Sumilite PR12603 Adhesion-imparting resin formulation amount (parts by weight) 5 5 Thickness (μm) 10 15 10 10 10 5 Elastic modulus (MPa) 2.50 2.50 2.50 1.00 0.90 1.00 Substrate Material PET PET PET PET PET PET Thickness (μm) 25 38 38 38 38 38 Elastic modulus (MPa) 3100 3100 3100 3100 3100 3100 Primer base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 3 3 3 3.1 2.9 1 Thickness (μm) 13 13 13 13 13 25 Elastic modulus (MPa) 1.20 1.20 1.20 1.21 1.19 0.50 1st adhesive layer (containing heat-expandable microspheres) base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 1.5 1.5 1.5 1.5 1.5 1.5 Crosslinking Auxiliary OL-1 OL-1 OL-1 OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 0.05 0.05 0.05 Adhesion Imparting Resin Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Adhesion-imparting resin formulation amount (parts by weight) 10 10 10 10 10 10 heat-expandable microspheres FN-180SSD FN-180SSD FN-180SSD FN-180SSD F-230D FN-180SSD Heat-expandable microsphere deployment amount (weight part) 30 30 30 30 30 30 Colorant DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7200RED DYMICS SZ-7510 GREEN Coloring agent deployment amount (weight part) 0.5 0.5 0.5 0.5 0.4 0.5 Thickness (μm) 35 45 35 35 35 25 Elastic modulus (MPa) 1.00 1.00 1.00 1.00 1.00 0.50 1st liner 1st liner liner e Pad f Pad f Pad f Pad f Pad f Material Olefin PET PET PET PET PET Thickness (μm) 26 38 38 38 38 38 Elastic modulus (MPa) 800 3100 3100 3100 3100 3100 evaluate Peel force of the second liner (N/50 mm) 0.02 0.02 0.02 0.4 0.3 0.4 Peel force of the first liner (N/50 mm) 0.36 0.36 0.35 0.07 0.1 0.3 The product of the third power of the thickness of the first liner and the modulus of elasticity of the first liner (I) 1.40608E-05 0.000170103 0.000170103 0.000170103 0.000170103 0.000170103 The product of the third power of the thickness of the second liner and the modulus of elasticity of the second liner (II) 0.0003375 0.0003875 0.001307813 0.001307813 0.000170103 0.001307813 The total of all layers of the product of the single layer thickness cubed and the single layer elastic modulus of each layer constituting the double-sided adhesive sheet (III) 4.84855E-05 0.000170205 0.000170151 0.00017015 0.00017015 0.000170119 (I)＋(III) 6.255E-05 3.403E-04 3.403E-04 3.403E-04 3.403E-04 3.402E-04 (II)＋(III) 3.860E-04 5.577E-04 1.478E-03 1.478E-03 3.403E-04 1.478E-03 (I)/{(II)＋(III)} 3.643E-02 3.050E-01 1.151E-01 1.151E-01 4.999E-01 1.151E-01 (II)/{(I)＋(III)} 5.396E+00 1.139E+00 3.844E+00 3.844E+00 4.999E-01 3.844E+00 {(I)＋(II)}/(III) 7.251E+00 3.276E+00 8.686E+00 8.686E+00 1.999E+00 8.688E+00 Liner peeling workability evaluation a/measurement sample (a) △ ○ △ △ ○ △ Liner release workability evaluation a/measurement sample (b) △ ○ ○ ○ ○ ○ Liner release workability evaluation b/measurement sample (a) △ ○ △ △ ○ △ Liner release workability evaluation b/measurement sample (b) △ ○ ○ ○ ○ ○ Roll take-up test △ △ △ △ ○ △

[table 3] Example 13 Example 14 Example 15 Example 16 Example 17 Example 18 2nd liner 2nd liner liner d Pad f Pad f Pad f Pad f liner a Material PET PET PET PET PET PET Thickness (μm) 50 38 38 38 38 12 Elastic modulus (MPa) 3100 3100 3100 3100 3100 3100 2nd Adhesive Layer base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 0.5 2.95 2.95 2.95 2.95 3 Crosslinking Auxiliary OL-1 OL-1 OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 0.05 0.05 Plasticizer Monocizer W700 Monocizer W700 Monocizer W700 Monocizer W700 Monocizer W700 Plasticizer deployment amount (parts by weight) 10 10 10 10 10 Adhesion Imparting Resin Sumilite PR12603 Adhesion-imparting resin formulation amount (parts by weight) 5 Thickness (μm) 3 10 10 10 10 10 Elastic modulus (MPa) 0.20 0.50 0.50 0.50 0.50 2.50 Substrate Material PET PET PET PET PET PET Thickness (μm) 38 38 50 100 188 75 Elastic modulus (MPa) 3100 3100 3100 3100 3100 3100 Primer base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 1 1 1 1 1 3 Thickness (μm) 25 25 25 25 25 13 Elastic modulus (MPa) 0.50 0.50 0.50 0.50 0.50 1.20 1st adhesive layer (containing heat-expandable microspheres) base polymer Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 1 1 1 1 1 1 Crosslinking Auxiliary OL-1 OL-1 OL-1 OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 0.05 0.05 0.05 Adhesion Imparting Resin Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Sumilite PR12603 Adhesion-imparting resin formulation amount (parts by weight) 10 10 10 10 10 10 heat-expandable microspheres FN-180SSD F-50D F-50D F-50D F-50D FN-180SSD Heat-expandable microsphere deployment amount (weight part) 30 30 30 30 30 30 Colorant DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN Coloring agent deployment amount (weight part) 0.5 0.5 0.5 0.5 0.5 0.5 Thickness (μm) 25 25 25 25 25 35 Elastic modulus (MPa) 0.50 0.50 0.50 0.50 0.50 1.00 1st liner 1st liner Pad f Pad f Pad f Pad f Pad f liner g Material PET PET PET PET PET PET Thickness (μm) 38 38 38 38 38 25 Elastic modulus (MPa) 3100 3100 3100 3100 3100 3100 evaluate Peel force of the second liner (N/50 mm) 0.4 0.49 0.49 0.49 0.49 0.06 Peel force of the first liner (N/50 mm) 0.3 0.49 0.49 0.49 0.49 0.36 The product of the third power of the thickness of the first liner and the modulus of elasticity of the first liner (I) 0.000170103 0.000170103 0.000170103 0.000170103 0.000170103 4.84375E-05 The product of the third power of the thickness of the second liner and the modulus of elasticity of the second liner (II) 0.0003875 0.000170103 0.000170103 0.000170103 0.000170103 5.3568E-06 The total of all layers of the product of the single layer thickness cubed and the single layer elastic modulus of each layer constituting the double-sided adhesive sheet (III) 0.000170119 0.000170119 0.000387516 0.003100016 0.020598499 0.001307861 (I)＋(III) 3.402E-04 3.402E-04 5.576E-04 3.270E-03 2.077E-02 1.356E-03 (II)＋(III) 5.576E-04 3.402E-04 5.576E-04 3.270E-03 2.077E-02 1.313E-03 (I)/{(II)＋(III)} 3.051E-01 5.000E-01 3.051E-01 5.202E-02 8.190E-03 3.688E-02 (II)/{(I)＋(III)} 1.139E+00 5.000E-01 3.051E-01 5.202E-02 8.190E-03 3.950E-03 {(I)＋(II)}/(III) 3.278E+00 2.000E+00 8.779E-01 1.097E-01 1.652E-02 4.113E-02 Liner peeling workability evaluation a/measurement sample (a) ○ ○ ○ ○ ○ ○ Liner release workability evaluation a/measurement sample (b) ○ ○ ○ ○ ○ ○ Liner release workability evaluation b/measurement sample (a) ○ ○ ○ ○ ○ ○ Liner release workability evaluation b/measurement sample (b) ○ ○ ○ ○ ○ ○ Roll take-up test ○ ○ ○ ○ ○ ○

[Table 4] Example 19 Example 20 Example 21 Example 22 Example 23 Comparative example 1 2nd liner 2nd liner Pad f liner b liner b liner d liner d liner b Material PET PET PET PET PET PET Thickness (μm) 38 75 75 50 50 75 Elastic modulus (MPa) 3100 3100 3100 3100 3100 3100 2nd Adhesive Layer base polymer Polymer 5 Polymer 1 Polymer 1 Polymer 2 Polymer 3 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Coronate L Coronate L Coronate L Tetrad C Tetrad C Coronate L Crosslinking agent deployment amount (weight part) 0.2 2.95 3 0.8 1.2 2.9 Crosslinking Auxiliary OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 Active energy ray (UV) polymerization initiator Irgacure 651 Active energy ray (ultraviolet) polymerization initiator compounding amount (parts by weight) 3 Plasticizer Monocizer W700 Monocizer W700 Monocizer W700 Plasticizer deployment amount (parts by weight) 10 10 10 Adhesion Imparting Resin YS POLYSTER S145 YS POLYSTER S145 Adhesion-imparting resin formulation amount (parts by weight) 5 5 Thickness (μm) 10 10 10 5 5 10 Elastic modulus (MPa) 64.00 0.50 2.50 0.70 0.90 0.48 Substrate Material PET (Blue Lumirror S10) PET PET PET PET PET Thickness (μm) 50 188 12 38 38 5 Elastic modulus (MPa) 3100 3100 3100 3100 3100 3100 Primer base polymer Polymer 4 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Tetrad C Coronate L Coronate L Coronate L Coronate L Coronate L Crosslinking agent deployment amount (weight part) 0.5 1 3 3 3 1 Active energy ray (UV) reactive compound UV-7620EA Active energy ray (ultraviolet) reactive compound compounding amount (parts by weight) 40 Active energy ray (UV) polymerization initiator Irgacure 651 Active energy ray (ultraviolet) polymerization initiator compounding amount (parts by weight) 3 Thickness (μm) 25 25 25 13 13 25 Elastic modulus (MPa) 89.00 0.50 1.20 1.20 1.20 0.50 1st adhesive layer (containing heat-expandable microspheres) base polymer Polymer 4 Polymer 1 Polymer 1 Polymer 2 Polymer 2 Polymer 1 Basic polymer formulation amount (parts by weight) 100 100 100 100 100 100 crosslinking agent Tetrad C Coronate L Coronate L Tetrad C Tetrad C Coronate L Crosslinking agent deployment amount (weight part) 0.5 1 1.5 0.8 0.8 0.95 Crosslinking Auxiliary OL-1 OL-1 OL-1 Amount of cross-linking aids formulated (parts by weight) 0.05 0.05 0.05 Active energy ray (UV) reactive compound UV-7620EA Active energy ray (ultraviolet) reactive compound compounding amount (parts by weight) 40 Active energy ray (UV) polymerization initiator Irgacure 651 Active energy ray (ultraviolet) polymerization initiator compounding amount (parts by weight) 3 Adhesion Imparting Resin Sumilite PR12603 Sumilite PR12603 YS POLYSTER S145 YS POLYSTER S145 Sumilite PR12603 Adhesion-imparting resin formulation amount (parts by weight) 10 10 5 5 10 heat-expandable microspheres F-30D F-50D F-100VSD F-100VSD F-100VSD F-100VSD Heat-expandable microsphere deployment amount (weight part) 30 30 30 30 30 30 Colorant DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN DYMICS SZ-7510 GREEN Coloring agent deployment amount (weight part) 0.5 0.5 0.5 0.5 Thickness (μm) 25 25 25 35 35 25 Elastic modulus (MPa) 89.00 0.50 1.00 1.00 1.00 0.49 1st liner 1st liner liner c liner b liner a Pad f Pad f Pad h Material PET PET PET PET PET PET Thickness (μm) 38 75 12 38 38 5 Elastic modulus (MPa) 3100 3100 3100 3100 3100 3100

[table 5] Example 19 Example 20 Example 21 Example 22 Example 23 Comparative example 1 evaluate Peel force of the second liner (N/50 mm) 0.002 0.45 0.02 0.15 0.15 0.02 Peel force of the first liner (N/50 mm) 0.001 0.42 0.38 0.6 0.6 0.7 The product of the third power of the thickness of the first liner and the modulus of elasticity of the first liner (I) 0.000170103 0.001307813 5.3568E-06 0.000170103 0.000170103 3.875E-07 The product of the third power of the thickness of the second liner and the modulus of elasticity of the second liner (II) 0.000170103 0.001307813 0.001307813 0.0003875 0.0003875 0.001307813 The total of all layers of the product of the single layer thickness cubed and the single layer elastic modulus of each layer constituting the double-sided adhesive sheet (III) 0.000390345 0.020598499 5.39368E-06 0.000170149 0.000170149 4.03449E-07 (I)＋(III) 5.604E-04 2.191E-02 1.075E-05 3.403E-04 3.403E-04 7.909E-07 (II)＋(III) 5.604E-04 2.191E-02 1.313E-03 5.576E-04 5.576E-04 1.308E-03 (I)/{(II)＋(III)} 3.035E-01 5.970E-02 4.079E-03 3.050E-01 3.050E-01 2.962E-04 (II)/{(I)＋(III)} 3.035E-01 5.970E-02 1.217E+02 1.139E+00 1.139E+00 1.653E+03 {(I)＋(II)}/(III) 8.716E-01 1.270E-01 2.435E+02 3.277E+00 3.277E+00 3.243E+03 Liner peeling workability evaluation a/measurement sample (a) ○ ○ ○ ○ ○ △ Liner release workability evaluation a/measurement sample (b) ○ ○ △ ○ ○ x Liner release workability evaluation b/measurement sample (a) ○ △ △ ○ ○ Not tested Liner release workability evaluation b/measurement sample (b) ○ △ △ ○ ○ Not tested Roll take-up test ○ x △ ○ ○ Not tested

10: Double-sided adhesive sheet 11: The first adhesive layer 12: Substrate 13: The second adhesive layer 20: 1st liner 30: 2nd liner 100: Adhesive sheet

Fig. 1 is a schematic sectional view of a double-sided adhesive sheet with a liner according to an embodiment of the present invention. Fig. 2 is a plan view illustrating evaluation b of liner peeling workability in Examples.

10: Double-sided adhesive sheet

11: The first adhesive layer

12: Substrate

13: The second adhesive layer

20: 1st liner

30: 2nd liner

100: Adhesive sheet

Claims (16)

A double-sided adhesive sheet with a liner, comprising: a double-sided adhesive sheet; a first liner, which is releasably disposed directly on one side of the double-sided adhesive sheet; and a second liner, which is releasable directly arranged on the other side of the double-sided adhesive sheet; the double-sided adhesive sheet has a first adhesive layer arranged in contact with the first liner, and the first adhesive layer contains thermally expandable Ball, the peeling force of the first liner to the double-sided adhesive sheet is 0.001N/50mm~2N/50mm, the product of the third power of the thickness of the first liner and the modulus of elasticity of the first liner (I ) is 1×10 ^-7 ~1×10 ^-2 (N/m), the product (II) of the third power of the thickness of the second liner and the modulus of elasticity of the second liner is 1×10 ^-7 ~1×10 ^-2 (N/m), the product (I) of the cube of the thickness of the first liner and the modulus of elasticity of the first liner, the cube of the thickness of the second liner and the The product (II) of the modulus of elasticity of the second liner, and the sum of all the layers (III) of the product of the cube of the single-layer thickness of each layer constituting the double-sided adhesive sheet and the product of the elastic modulus of the single layer satisfy the following ( The relationship between 1) and (2):

The double-sided adhesive sheet with a liner according to claim 1, wherein the double-sided adhesive sheet includes the first adhesive layer, the base material, and the second adhesive layer in sequence. The double-sided adhesive sheet with a liner as claimed in claim 1 or 2, wherein the sum of all layers (III) of the product of the cube of the single-layer thickness and the single-layer elastic modulus of each layer constituting the above-mentioned double-sided adhesive sheet is 1×10 ^-6 Nm~1×10 ^-1 Nm. The double-sided adhesive sheet with a liner as claimed in claim 1 or 2, wherein the product (I) of the cube of the thickness of the first liner and the modulus of elasticity of the first liner, the The product (II) of the cube of the thickness and the elastic modulus of the second liner, and the product of the cube of the single-layer thickness of each layer constituting the above-mentioned double-sided adhesive sheet and the product of the elastic modulus of the single layer ( III) Satisfy the following relationship (3):

The double-sided adhesive sheet with a liner according to claim 1 or 2, wherein the Si-Kα ray intensity of the first liner and/or the second liner obtained by fluorescent X-ray analysis is 0.01~500kcps. The double-sided adhesive sheet with a liner according to claim 1 or 2, wherein at least one of the layers constituting the double-sided adhesive sheet is a colored layer. The double-sided adhesive sheet with a liner according to claim 1 or 2, wherein the thickness of the first liner and/or the second liner is 10 μm to 100 μm. The double-sided adhesive sheet with a liner according to claim 1 or 2, wherein the thickness of the first liner is different from that of the second liner. The double-sided adhesive sheet with a liner according to claim 1 or 2, wherein the first adhesive layer and/or the second adhesive layer include an acrylic adhesive. The double-sided adhesive sheet with a liner according to claim 9, wherein the acrylic adhesive comprises an acrylic polymer, and the acrylic polymer comprises a structural unit derived from a monomer having an active hydrogen group. The double-sided adhesive sheet with a liner as claimed in claim 10, wherein the content of the above-mentioned structural unit derived from a monomer having an active hydrogen group is 0.1% by weight to 20% by weight relative to the total structural units constituting the above-mentioned acrylic polymer %. The double-sided adhesive sheet with a liner as claimed in claim 1 or 2, wherein the difference between the peeling force of the first liner on the double-sided adhesive sheet and the peeling force of the second liner on the double-sided adhesive sheet The absolute value is 0.5N/50mm or less. The double-sided adhesive sheet with liner as claimed in claim 1 or 2 is in the form of a roll. The double-sided adhesive sheet with a liner as claimed in claim 1 or 2, which is used as a sheet for temporarily fixing semiconductor chips when manufacturing CSP (Chip Size/Scale Package). The double-sided adhesive sheet with a liner as claimed in claim 1 or 2 is used as a sheet for temporarily fixing semiconductor chips when manufacturing WLP (Wafer Level Package). The double-sided adhesive sheet with a liner according to claim 1 or 2, which is used for processing including the step of peeling off the second liner first.