TWI777040B - Blade cover - Google Patents

Abstract

[Problem] It is possible to efficiently supply cutting water to the processing point of the cutting blade and improve the cooling effect. [Solution] The blade cover covering the cutting blade is provided with a cutting water configuration group that sprays cutting water. The cutting water configuration group includes: a first cutting water jetting port and a second cutting water jetting port for jetting cutting water toward the outer peripheral end face of the cutting blade; The angle formed by the vertical line at the center of the blade and the traveling direction of the cutting water jetted from the first cutting water jetting port toward the center of the cutting blade is formed at an angle larger than 35 degrees and smaller than 45 degrees for jetting; and The second supply path communicates with the second cutting water jetting port, and is formed so that the vertical line passing through the center of the cutting blade and the traveling direction of the cutting water jetted from the second cutting water jetting port are at right angles.

Description

Blade cover

Field of Invention The present invention relates to a blade cover for jetting cutting water to a cutting blade.

Background of the Invention Devices can be packaged, for example, by a technique known as QFN (Quad Flat Non-leaded Package). This technology, called QFN, is a technique of encapsulating a device by forming a metal frame, a plurality of devices, and a resin layer. The metal frame is formed along a predetermined dividing line that divides the area where the device is arranged. A plurality of electrodes with a thickness of about 150 μm, the plurality of devices are arranged in the area demarcated by the predetermined dividing lines, and the resin layer is formed by filling the resin on the side where the plurality of devices are arranged, and has a thickness of is about 500 μm.

In the dicing step after the resin filling step of the package on the package substrate made of such a QFN, the line to be divided is diced by a dicing blade (see, for example, Patent Document 1). By this dicing, adjacent electrodes can be separated by sandwiching the planned dividing line, and can be divided into individual devices. prior art literature Patent Literature

Patent Document 1: Japanese Patent Laid-Open No. 2007-258590

Summary of Invention The problem to be solved by the invention However, in the above-mentioned division, there is a problem in that the electrodes are stretched during the dicing, and the distance between the adjacent electrodes in each device is shortened, and the quality of the device is degraded. Then, the inventors of the present application have come up with an invention that can improve the above-mentioned problems by focusing on the cutting water jetted to the cutting blade during processing, and improving the cooling effect by the cutting water.

The present invention has been made in view of the above-mentioned problems, and one of the objects thereof is to provide a blade cover which can efficiently supply cutting water to the processing point of the cutting blade and improve the cooling effect. means of solving problems

A blade cover of one aspect of the present invention covers a cutting blade disposed at the front end of a main shaft housing and installed on the main shaft through a flange, wherein the main shaft has a rotation axis in the Y direction, and the main shaft casing It is to rotatably support the aforementioned spindle, and the aforementioned blade cover is characterized by: A cutting water configuration group is provided which is attached so as to be adjustable in the thickness direction of the cutting blade, that is, in the Y direction, and is arranged in a position where the cutting water supplied to the cutting blade is scattered due to the rotation of the cutting blade. The side is the opposite side, and the cutting water is sprayed toward the outer peripheral end face of the cutting blade, The aforementioned cutting water composition group has: The first cutting water jetting port and the second cutting water jetting port jet cutting water toward the outer peripheral end face of the cutting blade; The first supply path communicates with the first cutting water jetting port, and is formed at an angle formed by the vertical line passing through the center of the cutting blade and the traveling direction of the cutting water jetted from the first cutting water jetting port toward the center of the cutting blade spray at an angle greater than 35 degrees and less than 45 degrees; and The second supply path communicates with the second cutting water jetting port, and is formed so that the vertical line passing through the center of the cutting blade and the traveling direction of the cutting water jetted from the second cutting water jetting port are at right angles.

According to such a configuration, since the cutting water jetted from the first cutting water jetting port and the second cutting water jetting port is set at the angle of the above-mentioned first supply path and the second supply path, it is possible to efficiently supply the cutting water to the machining point of the cutting blade. Thereby, even in the case of cutting the ductile electrode portion of the workpiece, for example, the electrode can be prevented from being stretched and the distance between the adjacent electrodes can be shortened, and the cutting blade can be improved in The cooling effect is improved, and the quality of the processed device is improved. Invention effect

According to the present invention, since the cutting water is jetted from the first supply path and the second supply path having different angles, the cutting water can be efficiently supplied to the machining point of the cutting blade, thereby enhancing the cooling effect.

Form for carrying out the invention Hereinafter, the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of the cutting device of the present embodiment. As shown in FIG. 1 , the cutting device 1 is configured to process the workpiece W held by the table 3 on the casing 2 by the cutting unit 4 provided above the table 3 . The workpiece W is formed in a rectangular shape using a package substrate called a QFN substrate. The front surface of the workpiece W is partitioned into a plurality of regions by arranging dividing lines arranged in a grid, and various devices 91 such as ICs, LSIs, and LEDs are formed in the partitioned regions. Moreover, the to-be-processed object W is supported by the ring-shaped frame 93 through the adhesive tape 92, and is carried into the dicing apparatus 1 in the state accommodated in the cassette 5.

A rectangular opening (not shown) extending in the X direction is formed on the upper surface of the casing 2 , and the opening is a movable plate 31 movable together with the work clamp 3 and a accordion-shaped waterproof cover 32 covered. A ball screw type moving mechanism (not shown) for moving the work clamp table 3 in the X direction is provided under the waterproof cover 32 . A holding surface 33 for attracting and holding the workpiece W is formed on the front surface of the table 3 by a porous ceramic material. The holding surface 33 is connected to the suction source through the flow path in the table 3 .

The work clamp table 3 reciprocates between a transfer position in the center of the device and a processing position facing the cutting assembly 4 . FIG. 1 shows a state in which the work clamp table 3 is in a standby state at the transfer position. In the housing 2, a corner portion adjacent to the handover position is lowered by one step, and a mounting table 6 is provided at the lowered portion so as to be able to rise and fall. The cassette 5 in which the workpiece W is accommodated can be placed on the placement table 6 . By raising and lowering the mounting table 6 in the state where the cassette 5 is mounted, the drawing-in position and the pushing-in position of the workpiece W can be adjusted in the height direction.

A pair of guide rails 7 parallel to the Y direction, and a push-pull mechanism 8 for conveying the workpiece W between the pair of guide rails 7 and the cassette 5 are provided behind the placement table 6 . The conveyance of the workpiece W by the push-pull mechanism 8 is guided by the pair of guide rails 7 , and the workpiece W can be positioned in the X direction. The push-pull mechanism 8 is configured to push the processed workpiece W into the cassette 5 from the pair of guide rails 7 in addition to pulling out the unprocessed workpiece W from the cassette 5 to the pair of guide rails 7 . The workpiece W can be positioned in the Y direction by the push-pull mechanism 8 .

A first conveyance arm 11 is provided near the pair of guide rails 7 , and the first conveyance arm 11 conveys the workpiece W between the guide rails 7 and the table 3 . The L-shaped arm portion 16 of the first conveyance arm 11 conveys the workpiece W in a convoluted manner. In addition, a rotary cleaning mechanism 12 is provided behind the table 3 at the transfer position. In the washing mechanism 12, after washing the workpiece W by spraying washing water toward the rotating rotary table 17, the workpiece W may be dried by spraying dry air instead of the washing water.

A support table 21 for supporting the cutting assembly 4 is provided on the housing 2 . The cutting assembly 4 is positioned above the work chuck 3 and can be moved in the Y direction and the Z direction by a ball screw type moving mechanism (not shown). The cutting unit 4 has a disc-shaped cutting blade 41 provided at the front end of a main shaft (not shown). The cutting blade 41 is covered around by a blade cover 42, and cutting water can be sprayed from the blade cover 42 toward the cutting part. The workpiece W can be cut while rotating the cutting blade 41 at a high speed and supplying cutting water.

A second conveyance arm 13 capable of conveying the workpiece W between the table 3 and the cleaning mechanism 12 is provided on the side surface 22 of the support table 21 . The arm portion 18 of the second conveyance arm 13 extends obliquely forward, and the arm portion 18 conveys the workpiece W so as to move forward and backward. In addition, the support table 21 is provided with a cantilever support portion 24 which is formed so as to cross above the moving path of the work chuck 3 and supports the imaging portion 14 . The imaging portion 14 protrudes from the lower surface of the cantilever support portion 24 , and the workpiece W can be photographed by the imaging portion 14 . The photographed image formed by the photographing unit 14 can be used for the calibration of the cutting assembly 4 and the work table 3 .

An input assembly 26 for receiving instructions to various parts of the device is provided at the frontmost part of the casing 2 . In addition, a monitor 27 is placed on the support table 21 , and an image captured by the imaging unit 14 , processing conditions, and the like can be displayed on the monitor 27 . In the dicing device 1 thus constituted, the dicing blade 41 can be positioned on the predetermined dividing line of the workpiece W, and cutting water can be jetted toward the dicing blade 41 from various nozzles of the blade cover 42 . Then, the dicing blade 41 is cut into the workpiece W while being cooled and washed with dicing water, and the workpiece W is cut along the grid-like dividing lines.

Next, the cutting unit will be described in detail with reference to FIGS. 2 and 3 . FIG. 2 is a perspective view of the cutting assembly of the present embodiment. FIG. 3 is a schematic plan view of the cutting assembly of the present embodiment. 3A is a front view of the cutting unit, and FIG. 3B is a side view of the cutting unit.

As shown in FIGS. 2 and 3 , the cutting assembly 4 is rotatably mounted on a spindle (not shown) on which the cutting blade 41 is mounted. The main shaft has a rotation axis in the Y direction, is rotatably supported by the main shaft case 43 , and is disposed at the front end of the main shaft case 43 . A cover body 42A of the blade cover 42 is mounted on the spindle housing 43 . The outer periphery of the cutting blade 41 is covered by the blade cover 42 except for the lower half. The cutting blade 41 is a hub type blade, and is configured by providing a cutting edge 52 for cutting the workpiece W on the outer periphery of the hub base 51 . The cutting blade 41 is installed so that the annular fixing nut 53 can be locked through a mounting flange (not shown) at the front end of the main shaft.

The cutting edge 52 is formed in an annular shape by bonding abrasive grains such as diamond with a binder, for example. The cutting edge 52 is formed with a thickness of about 10 μm to about 500 μm. In addition, in this embodiment, although the hub type blade was demonstrated as the cutting blade 41, the kind of the cutting blade 41 is not particularly limited. As the cutting blade 41, a washer type blade may be used instead of the hub type blade.

A blade breakage detector 44 is provided on the upper portion of the blade cover 42 . The blade breakage detector 44 has a light-emitting element and a light-receiving element arranged to face each other so as to sandwich the upper portion of the dicing blade 41 . The light beam emitted from the light emitting element is partially blocked by the front end of the cutting blade 41 and received by the light receiving element. Thereby, the blade breakage detector 44 detects the overall breakage of the dicing blade 41 or a broken state such as a chip in accordance with an increase in the amount of light received (transmittance) in the light receiving element. The blade breakage detector 44 is adjusted up and down relative to the cutting blade 41 by the adjustment screw 55 , and is fixed at the adjusted position by the fixing screw 56 .

The blade cover 42 includes a cutting water configuration group 45 which is attached to the rear of the cover body 42A in the cutting direction so as to be adjustable in the Z direction. A pair of L-shaped cutting water nozzles 61 in a side view are fixed to the cutting water configuration group 45 . Cutting water is supplied from the supply hose 62 to the pair of cutting water nozzles 61 through the cutting water constituting group 45 . The pair of cutting water nozzles 61 extend downward from the cutting water configuration group 45 and then extend forward in the cutting direction so as to sandwich the lower portion of the cutting blade 41 . On the front end sides of the pair of cutting water nozzles 61 , a plurality of slits 63 are formed on the facing surfaces facing each other while sandwiching the cutting blade 41 . The cooling and cleaning of the processing point can be performed by jetting cutting water from the side through the plurality of slits 63 .

Here, the cutting water supplied to the cutting blade 41 scatters backward in the cutting direction when the cutting blade 41 rotates in the direction indicated by the arrow S in FIG. 3A . In order to guide the above-mentioned cutting water to the rear, a pair of spray caps 47 are provided in the cutting water structure group 45 . The pair of spray caps 47 guide the cooling water and cutting chips scattered by the rotation of the cutting blade 41 to the rear, and discharge them to the outside of the blade cover 42 .

The blade cover 42 includes a cutting water configuration group 46 which is installed in front of the cover body 42A in the cutting direction so as to be adjustable in the Y direction, which is the thickness direction of the cutting blade 41 . The cutting water configuration group 46 is disposed forward in the cutting direction, in other words, on the opposite side to the side where the cutting water supplied to the cutting blade 41 is scattered due to the rotation of the cutting blade 41 . Therefore, the cutting water configuration group 46 is arranged to face the outer peripheral end surface in the forward cutting direction of the cutting blade 41 .

4 is a schematic perspective view of a cutting water configuration group. As shown in FIGS. 3 and 4 , the cutting water configuration group 46 is provided with a first cutting water jetting port 65 for jetting cutting water from the front in the cutting direction toward the outer peripheral end face of the cutting blade 41 (not shown in FIG. 4 ), and the The second cutting water jetting port 66 . The first cutting water jetting port 65 is on the + side of the second cutting water jetting port 66 in the Z direction, that is, the first cutting water jetting port 65 is disposed above the second cutting water jetting port 66 . Moreover, the center position of the 1st cutting water injection port 65 and the 2nd cutting water injection port 66 is arrange|positioned so that it may become the same position in the Y direction.

The first cutting water jet port 65 communicates with one end of the first supply path 68 . The other end of the first supply path 68 communicates with the first flow path 70 extending in the Z direction through the first connecting path 69 extending in the Y direction. In addition, the second cutting water jetting port 66 communicates with one end of the second supply path 72, and the other end of the second supply path 72 communicates with the second supply path 72 extending in the Z direction through the second connecting path 73 extending in the Y direction. The second flow path 74 .

As shown in FIG. 3A , the first supply path 68 is formed at an angle that descends toward the rear in the cutting direction, and the cutting water from the first cutting water jetting port 65 is jetted at this angle. Specifically, the first supply path 68 is formed by the vertical line CL passing through the center C of the cutting blade 41 and the traveling direction of the cutting water jetted from the first cutting water jetting port 65 toward the center C of the cutting blade 41 The angle θ is larger than 35 degrees and smaller than 45 degrees for injection. In other words, the extending direction of the first supply path 68 is set in the same direction as the traveling direction of the cutting water.

The second supply path 72 is formed at a horizontal angle toward the rear in the cutting direction, and the cutting water from the second cutting water jetting port 66 is jetted at this angle. Specifically, the second supply path 72 is formed so that the vertical line CL passing through the center C of the dicing blade 41 and the traveling direction of the cutting water jetted from the second cutting water jetting port 66 are at right angles to spray. The cutting water can be drawn into the cutting blade 41 to cool and clean the processing point by spraying the cutting water toward the cutting blade 41 from the front toward the rear in the cutting direction through the cutting water injection ports 65 and 66 .

Here, as shown in FIG. 3B , the center position of the first cutting water jetting port 65 (the center line of the first supply path 68 ) is formed so that Centerlines) coincide in the Y direction and lie on the same XZ plane D.

The first flow path 70 and the second flow path 74 are arranged and arranged at predetermined intervals in the Y direction. A supply hose 76 (see FIG. 2 ) is connected to each upper end of the first flow path 70 and the second flow path 74 . The cutting water can be supplied to the first cutting water jetting port 65 from the supply hose 76 through the first flow path 70 , the first connecting path 69 , and the first supply path 68 . Moreover, the cutting water can be supplied to the second cutting water jetting port 66 from the supply hose 76 through the second flow path 74 , the second connecting path 73 , and the second supply path 72 .

In the front surface 85 which becomes the outer side surface of the cutting water structure group 46, the viewing hole 78 for adjustment of the cutting water structure group 46 is formed. In the cutting water configuration group 46 , a visual path 79 is formed penetrating from the visual hole 78 to the side of the cutting blade 41 . The viewing hole 78 and the viewing path 79 are formed to have an inner diameter (eg, 3 mm to 5 mm) of such a degree that they can be visually recognized. The visual path 79 extends so as to be orthogonal to the Y direction in the top view, and is located between the first flow path 70 and the second flow path 74 in the Y direction, and is formed at a position away from them. Moreover, the visual path 79 is formed between the 1st connection path 69 and the 1st supply path 68, and the 2nd connection path 73 and the 2nd supply path 72 in the Z direction, and is formed so that it may pass through the position distant from them. Therefore, the visual path 79 is formed so as not to intersect with any of the first cutting water jetting port 65 , the first supply path 68 , the first connecting path 69 , and the first flow path 70 , nor intersecting the second cutting water jetting At the position of any one of the port 66 , the second supply path 72 , the second connection path 73 , and the second flow path 74 . In addition, the center position of the viewing hole 78 (the center line of the viewing path 79 ) is formed to be located on the same XZ plane D so as to coincide with the center positions of the respective cutting water jetting ports 65 and 66 in the Y direction.

Moreover, since the cutting water structure group 46 is penetrated by the visual path 79, it becomes possible to visually recognize the thickness direction of the cutting blade 41 through the visual hole 78. Accordingly, the position in the Y direction with respect to the viewing hole 78 of the cutting blade 41 can be positioned while the center in the thickness direction of the cutting blade 41 is directly visually recognized through the viewing hole 78 . The positions of the respective cutting water jetting ports 65 and 66 in the same XZ plane D can also be positioned along with the positioning of the sight holes 78 . The visual path 79 extends obliquely downward from the visual hole 78 toward the cutting blade 41 so that the operator can easily see it.

The cutting water constituent groups 45 and 46 are respectively screwed and fixed to the cover body 42A. On the side surface 81 of the cutting water configuration group 45, a long hole 82 that is long in the vertical direction is formed. A pair of adjustment screws 83 are inserted through the long holes 82 , so that the adjustment screws 83 can be loosened and the cutting water forming group 45 can be moved along the long holes 82 to adjust the Z direction of the cutting water nozzle 61 relative to the cutting blade 41 . Location. A pair of long holes 86 long in the Y direction are formed on the front surface 85 of the cutting water configuration group 46 . Adjustment screws 87 are inserted through the elongated holes 86 , so that the adjustment screws 87 are loosened and the cutting water forming group 46 is moved along the elongated holes 86 , so that the respective cutting water jetting ports 65 and 66 can be adjusted relative to the cutting blade 41 . position in the Y direction. In addition, each long hole 86 is formed in the position which does not intersect with the 1st flow path 70 and the 2nd flow path 74 and is distant.

5 , the position adjustment of the cutting water jetting port with respect to the cutting blade will be described. FIG. 5 is an explanatory view of the positional adjustment of the cutting water jetting port with respect to the cutting blade according to the present embodiment.

In the initial state shown in FIG. 5A , the center of each of the cutting water jetting ports 65 and 66 is displaced in the Y direction with respect to the center in the thickness direction of the cutting blade 41 . Accordingly, when the cutting water is supplied to the cutting blade 41 from the respective cutting water jetting ports 65 and 66 as it is in this initial state, the cutting edge 52 of the cutting blade 41 cannot bisect the cutting water. Accordingly, the pressure from the cutting water acts on both side surfaces of the cutting blade 41 in an unbalanced manner, and the cutting blade 41 is shaken or tilted, and there is a possibility that the cutting blade 41 may be broken during cutting. Moreover, among the both side surfaces of the dicing blade 41, only one side is cooled, which may cause abnormal wear.

Therefore, in the present embodiment, the center of each of the cutting water jetting ports 65 and 66 and the center of the viewing hole 78 are provided on the same XZ plane D, and the cutting blade 41 is directly visually recognized through the viewing hole 78 for each cutting. The water jet ports 65 and 66 are position-adjusted. In this case, the adjustment screws 87 inserted into the pair of long holes 86 are loosened, and the cutting water composition group 46 is moved in the Y direction with respect to the cover body 42A (see FIG. 2 ) to form a Adjustable. Then, while peeking through the viewing hole 78 , the center position of the viewing hole 78 is aligned with the center in the thickness direction of the cutting blade 41 , and the cutting edge 52 of the cutting blade 41 is positioned to bisect the viewing hole 78 . Then, the cutting water forming group 46 can be fixed by locking a pair of adjusting screws 87 .

Thereby, as shown in FIG. 5B , the center of each of the cutting water jetting ports 65 and 66 can be aligned in the Y direction with respect to the center of the cutting blade 41 in the thickness direction along with the positional adjustment of the viewing hole 78 . Then, each cutting water jetting port 65, 66 can be positioned at a position bisected by the cutting edge 52 of the cutting blade 41, and the cutting water can be uniformly supplied to both sides of the cutting blade 41. According to this, it is possible to prevent the occurrence of variation in processing quality caused by the fact that the centers of the respective cutting water jetting ports 65 and 66 are not positioned at the center of the cutting blade 41 , and it is possible to effectively cool the cutting blade 41 and suppress the cutting blade 41 . Shake or tilt to improve machining accuracy. In addition, in order to facilitate the alignment of the viewing hole 78 with respect to the cutting blade 41 , a positioning mark or the like may be added around the viewing hole 78 .

By the above-described position adjustment, the viewing hole 78 can be positioned so that the cutting edge 52 of the cutting blade 41 bisects the cutting blade 41 while directly visually recognizing the center of the cutting blade 41 in the thickness direction. Since the respective cutting water jetting ports 65 and 66 can be precisely positioned so as to be bisected by the cutting edge 52 of the cutting blade 41 in accordance with the positioning of the viewing hole 78 , it is possible to uniformly bisect both sides of the cutting blade 41 Supply cutting water. Accordingly, the cutting blade 41 can be effectively cooled, and the cutting blade 41 will not be shaken or tilted, and the cutting accuracy of the workpiece W can be improved. In addition, since the center in the thickness direction of the cutting blade 41 can be directly visually recognized through the viewing hole 78, the positional adjustment of the cutting water configuration group 46 can be easily performed.

Next, the cutting method of the workpiece W by the cutting device 1 described above will be described with reference to FIG. 1 . First, the workpiece W supported by the annular frame 93 through the adhesive tape 92 is conveyed to the table 3 as a unit by a conveyance unit (not shown), and is sucked and held. Next, after aligning the workpiece W, the table 3 is moved in the X direction, and the workpiece W is approached and positioned below the cutting unit 4 serving as the cutting area. Furthermore, the cutting unit 4 is moved in the Y direction and positioned at a position corresponding to the line to be divided into the workpiece W. As shown in FIG.

After positioning as described above, the cutting unit 4 is lowered and positioned in the Z direction according to the cutting depth of the workpiece W. After this positioning, the table 3 is relatively moved in the X direction with respect to the cutting blade 41 rotating at a high speed, and a cutting groove is formed along the dividing line of the workpiece W. When the dicing groove is formed, cutting water is supplied from the cutting water nozzle 61 , the first cutting water jetting port 65 and the second cutting water jetting port 66 (see FIG. 4 ) to the contact portion between the cutting blade 41 and the workpiece W. . Then, every time a dicing groove is formed, the dicing element 4 is moved in the Y direction by a pitch interval in the Y direction of the line to be divided, and the same operation is repeated to sequentially form dicing grooves.

After all the cutting grooves are formed on the planned dividing line parallel to the X direction, the work chuck 3 is rotated by 90° through the θ table (not shown) to perform the same cutting as above, and all the dividing lines can be divided. All the predetermined lines form cutting grooves to cut the workpiece W vertically and horizontally. Thereby, the packaged devices PD shown in FIG. 6 can be formed one by one from the workpiece W composed of the package substrate formed of QFN. 6 is a schematic plan view of a packaged device. In the package device PD, the external electrode portions of the respective electrodes PDa serving as external connection terminals are exposed on the same plane as the filling resin PDb. [Example]

As Examples 1 to 4 and Comparative Examples 1 to 11, the angle θ shown in FIG. 3A was changed, and experiments were performed using the cutting water configuration group 46 forming the first supply path 68 and the first cutting water jetting port 65 . Table 1 shows the correspondence between the angle θ and Examples 1 to 4 and Comparative Examples 1 to 11. In Examples 1 to 4 and Comparative Examples 1 to 11, the cutting device 1 and the cutting method of the above-described embodiment were changed as shown in Table 1 while the angle θ was changed, and the jetting of cutting water from the second supply path 72 was stopped. In addition, other processing conditions were set to be the same, and the to-be-processed object W comprised by the package substrate formed of the same kind of QFN was diced, and the package device PD was formed.

[Table 1]

For the packaged devices PD formed in Examples 1 to 4 and Comparative Examples 1 to 11, the inter-electrode distance d shown in FIG. 6B was measured and evaluated. The results are shown in Table 1. The evaluations in Table 1 are formed as follows: ○: within the allowable value (larger than the allowable value), Δ: the allowable value (same or approximately the same as the allowable value), and ×: outside the allowable value (smaller than the allowable value). The allowable value varies according to the size or shape of the electrode PDa, the arrangement, the size or shape of the packaged device PD, and the performance required for the packaged device PD.

As can be understood from Table 1, when the angle θ is 35° or more and 45° or less (Examples 1 to 3), and when the angle θ is 90° (Example 4), the inter-electrode distance d changes. If the ratio is larger than the allowable value, good processing quality and device quality can be achieved. The reason for this is that cutting water can be efficiently supplied to the processing point where the cutting blade 41 contacts the workpiece W to improve the cooling effect, so that the electrode PDa can be prevented from being stretched due to ductility. In addition, in Examples 1 to 4, it was confirmed that from the machining point of the cutting blade 41 to the first cutting water jetting port 65, a so-called driven rotation is formed in which the periphery of the cutting edge 52 is covered with cutting water. state, and the cutting water can be supplied efficiently.

The angle θ of Examples 1 to 3 is an example including the angle θ of the first supply path 68 of the above-described embodiment, and Example 4 is an example corresponding to the second supply path 72 of the above-described embodiment. Accordingly, as in the above-described embodiment, by spraying the cutting water from the respective cutting water jetting ports 65 and 66 through the two supply paths 68 and 72, the supply of the cutting water to the processing point can be performed more efficiently. In this way, the cooling effect at the processing point can be further improved, the electrode PDa can be prevented from being stretched during processing, and the quality of the device after processing can be improved.

Furthermore, in the present invention, as the substrate to be processed, various substrates such as other package substrates, semiconductor device wafers, optical device wafers, semiconductor substrates, inorganic material substrates, and piezoelectric substrates can also be used. As the semiconductor device wafer, a silicon wafer or a compound semiconductor wafer after device formation can also be used. As the optical device wafer, a sapphire wafer or a silicon carbide wafer after device formation can also be used. Further, as the package substrate, a rectangular package substrate such as a CSP (Chip Size Package) substrate may be used, silicon, gallium arsenide, or the like may be used as a semiconductor substrate, and sapphire, ceramic, glass, or the like may be used as an inorganic material substrate.

In addition, in the present embodiment, the first flow channel 70 and the second flow channel 74 of the cutting water configuration group 46 are configured to extend in the Z direction, but it is not limited to this configuration. Each of the flow paths 70 and 74 is a supply source connected to the supply hose 76 and the like outside the cutting water configuration group 46, and as long as it does not intersect the visual path 79, the extending direction may be a direction inclined with respect to the Z direction, Alternatively, it may be extended in a curved shape.

In addition, in the present embodiment, in order to make it easier for the operator to see, the viewing path 79 is formed to extend obliquely downward from the viewing hole 78 toward the cutting blade 41 , but it is not limited to this configuration. The extension direction of the visual path 79 may be formed on the same XZ plane as the respective cutting water jetting ports 65 and 66 and not intersect with the cutting water supply route, and may extend in the horizontal direction, for example.

In addition, although the embodiment and modification of the present invention have been described, as another embodiment of the present invention, the above-described embodiment and modification may be combined in whole or in part.

In addition, the embodiment of the present invention is not limited to the above-described embodiment, and various changes, substitutions, and deformations can be made within the scope of not departing from the spirit of the technical idea of the present invention. In addition, if the technical idea of the present invention can be realized in other ways through technological progress or other derived technologies, this method can also be used to implement. Therefore, the scope of the patent application covers all the embodiments that can be included in the scope of the technical idea of the present invention. industrial availability

As described above, the present invention has the effect of efficiently supplying cutting water to the processing point of the cutting blade, and is particularly useful for a cutting device for cutting a workpiece with a cutting blade having a thin cutting edge of.

1‧‧‧Cutting device 2‧‧‧Shell 3‧‧‧Working table 4‧‧‧Cutting components 5‧‧‧Cassette 6‧‧‧Place table 7‧‧‧Guide 8‧‧‧Push-pull mechanism 11‧‧‧The first conveying arm 12‧‧‧Cleaning mechanism 13‧‧‧Second conveying arm 14‧‧‧Photography Department 16, 18‧‧‧arm 17‧‧‧Rotary table 21‧‧‧Support 22、81‧‧‧Side 24‧‧‧Cantilever support 26‧‧‧Input Components 27‧‧‧Monitor 31‧‧‧Mobile Board 32‧‧‧Waterproof cover 33‧‧‧Maintaining surface 41‧‧‧Cutting blades 42‧‧‧Blade cover 42A‧‧‧Cap body 43‧‧‧Spindle housing 44‧‧‧Blade breakage detector 45, 46‧‧‧Cut water composition group 47‧‧‧Droplet cover 51‧‧‧Wheel Abutment 52‧‧‧Cutting edge 53‧‧‧Fixing Nut 55, 83, 87‧‧‧Adjustment screw 56‧‧‧Fixing screws 61‧‧‧Cutting water nozzle 62, 76‧‧‧Supply hose 63‧‧‧Slit 65‧‧‧First cutting water jet 66‧‧‧Second cutting water jet 68‧‧‧First supply path 69‧‧‧First Link Path 70‧‧‧First flow path 72‧‧‧Second supply path 73‧‧‧Second Link Path 74‧‧‧Second stream 78‧‧‧Sight hole 79‧‧‧Visual path 82, 86‧‧‧long hole 85‧‧‧Front surface 91‧‧‧Devices 92‧‧‧Attaching tape 93‧‧‧Ring frame C‧‧‧ Center CL‧‧‧Plumb line D‧‧‧XZ plane d‧‧‧Distance between electrodes PD‧‧‧packaged device PDa‧‧‧electrode PDb‧‧‧filling resin S‧‧‧arrow W‧‧‧Processing θ‧‧‧angle X, Y, Z‧‧‧ directions

FIG. 1 is a perspective view of the cutting device of the present embodiment. FIG. 2 is a perspective view of the cutting assembly of the present embodiment. FIG. 3 is a schematic plan view of the cutting assembly of the present embodiment. FIG. 4 is a schematic perspective view of the cutting water configuration group of the present embodiment. FIG. 5 is an explanatory diagram of position adjustment of the supply hole with respect to the cutting blade. 6 is a schematic plan view of a packaged device.

4‧‧‧Cutting components

41‧‧‧Cutting blades

42‧‧‧Blade cover

42A‧‧‧Cap body

45, 46‧‧‧Cut water composition group

47‧‧‧Droplet cover

52‧‧‧Cutting edge

61‧‧‧Cutting water nozzle

63‧‧‧Slit

65‧‧‧First cutting water jet

66‧‧‧Second cutting water jet

68‧‧‧First supply path

69‧‧‧First Link Path

70‧‧‧First flow path

72‧‧‧Second supply path

73‧‧‧Second Link Path

74‧‧‧Second stream

78‧‧‧Sight hole

79‧‧‧Visual path

81‧‧‧Side

82, 86‧‧‧long hole

83, 87‧‧‧Adjustment screw

85‧‧‧Front surface

C‧‧‧ Center

CL‧‧‧Plumb line

D‧‧‧XZ plane

S‧‧‧arrow

θ‧‧‧angle

X, Y, Z‧‧‧ directions

Claims (2)

A blade cover covers a cutting blade arranged on the front end of a main shaft housing and is installed on the main shaft through a flange, wherein the main shaft has a rotation axis in the Y direction, and the main shaft housing rotatably supports the cutting blade. The spindle, the aforementioned blade cover is characterized by: A cutting water configuration group is provided which is attached so as to be adjustable in the thickness direction of the cutting blade, that is, in the Y direction, and is arranged in a manner that is connected to the cutting water supplied to the cutting blade due to the rotation of the cutting blade. The side that scatters is the opposite side, and the cutting water is sprayed toward the outer peripheral end face of the cutting blade, The aforementioned cutting water composition group has: The first cutting water jetting port and the second cutting water jetting port jet cutting water toward the outer peripheral end face of the cutting blade; The first supply path communicates with the first cutting water jetting port, and is formed by a vertical line passing through the center of the cutting blade and the traveling direction of the cutting water jetted from the first cutting water jetting port toward the center of the cutting blade is formed at an angle greater than 35 degrees and less than 45 degrees for spraying; and The second supply path communicates with the second cutting water jetting port, and is formed so that the vertical line passing through the center of the cutting blade and the traveling direction of the cutting water jetted from the second cutting water jetting port are at right angles to each other. injection. The blade cover of claim 1, wherein the aforementioned cutting water composition group has: a sight hole, formed on the outer side of the cutting water group; and The visual path does not intersect any of the first cutting water jetting port and the first supply path, the second cutting water jetting port and the second supply path, and penetrates from the visual hole to the cutting blade side to form, When the cutting water composition group is moved in the Y direction and positioned so that the visual hole is bisected by the cutting edge of the cutting blade, the first cutting water jetting port and the second cutting water jetting port are positioned. At the position where the bisected bisector is formed with the cutting blade.

Images