KR102631705B1 - Blade cover - Google Patents

Abstract

The purpose of the present invention is to improve the cooling effect by efficiently supplying cutting water to the machining point of the cutting blade.
The blade cover 42 covering the cutting blade 41 is provided with a cutting water block 46 that ejects cutting water. The cutting water block communicates with the first cutting water injection port 65 and the second cutting water injection port 66, which spray cutting water toward the outer peripheral end surface of the cutting blade, and the first cutting water injection port, and , the angle formed between the vertical line (CL) passing through the center of the cutting blade and the direction of cutting water sprayed from the first cutting water jet toward the cutting blade center (C) is formed to spray at an angle greater than 35 degrees and less than 45 degrees. A second supply that communicates with the first supply path 68 and the second cutting water injection port, and is formed to spray at right angles to the vertical line passing through the center of the cutting blade and the direction in which the cutting water injected from the second cutting water injection port travels. It is equipped with a furnace (72).

Description

Blade Cover{BLADE COVER}

The present invention relates to a blade cover that sprays cutting water on a cutting blade.

The device is packaged, for example, by a technology called Quad Flat Non-leaded Package (QFN). This technology, called QFN, consists of a metal frame with a thickness of about 150 ㎛ on which a plurality of electrodes are formed along a division line that demarcates the area where the device is placed, and a plurality of electrodes arranged in the area defined by the division line. This means that the device is packaged with a resin layer having a thickness of about 500 ㎛ formed by filling the device and the side where the plurality of devices are arranged with resin.

In a package substrate made of such a QFN, the division line is cut with a cutting blade in a dicing process after the package resin filling process (see, for example, Patent Document 1). By this cutting, adjacent electrodes are separated across the division line, and each device is divided.

Japanese Patent Publication No. 2007-258590

However, in the above-described division, there is a problem in that the electrodes are ductile and extend during cutting, and the distance between adjacent electrodes in each device is shortened, thereby deteriorating the quality of the device. Therefore, the present inventor paid attention to the cutting water sprayed on the cutting blade during processing and came up with an invention that can improve the above problem by increasing the cooling effect of the cutting water.

The present invention was made in consideration of these points, and one of its purposes is to provide a blade cover that can improve the cooling effect by efficiently supplying cutting water to the machining point of the cutting blade.

The blade cover of one aspect of the present invention is a blade cover disposed at the tip of a spindle housing that rotatably supports a spindle having a rotation axis in the Y direction and covering a cutting blade mounted on the spindle through a flange, and the thickness of the cutting blade. It is attached to be adjustable in the Y direction, and is disposed on the side opposite to the side where the cutting water supplied to the cutting blade is scattered by the rotation of the cutting blade, and the cutting water spouts out the cutting water opposite to the outer peripheral end surface of the cutting blade. It is provided with a block, and the cutting water block communicates with the first cutting water injection port and the second cutting water injection port that sprays cutting water toward the outer peripheral end surface of the cutting blade and the cutting blade. A first supply path formed to spray at an angle greater than 35 degrees and less than 45 degrees, where the angle formed between the vertical line passing through the center and the direction of cutting water injected from the first cutting water injection hole toward the center of the cutting blade is greater than 35 degrees and the second cutting water It is characterized by having a second supply path formed so that the cutting water injected from the water jet hole is injected at a right angle to the vertical line communicating with the water jet hole and passing through the center of the cutting blade.

According to this configuration, the cutting water injected from the first cutting water nozzle and the second cutting water nozzle is set at the angle of the above-described first supply path and the second supply path, so cutting water is efficiently supplied to the machining point of the cutting blade. can be supplied. As a result, for example, even when cutting a ductile electrode portion of a workpiece, it is possible to prevent the electrode from extending and shortening the distance between adjacent electrodes, and improves the cooling effect on the cutting blade. The quality of the device after processing can be improved.

According to the present invention, since cutting water is sprayed from the first supply path and the second supply path at different angles, cutting water can be efficiently supplied to the machining point of the cutting blade, thereby improving the cooling effect.

1 is a perspective view of a cutting device according to this embodiment.
Figure 2 is a perspective view of a cutting means according to this embodiment.
Figure 3 is a plan schematic diagram of a cutting means according to an embodiment of the present invention.
Figure 4 is a schematic perspective view of a cutting water block according to this embodiment.
Figure 5 is an explanatory diagram of position adjustment of the supply hole with respect to the cutting blade.
Figure 6 is a plan schematic diagram of a package device.

Hereinafter, this embodiment will be described with reference to the accompanying drawings. 1 is a perspective view of a cutting device according to this embodiment. As shown in FIG. 1, the cutting device 1 moves the workpiece W held on the chuck table 3 on the housing 2 to the cutting means 4 installed above the chuck table 3. It is configured to be processed by. The workpiece W is a package substrate called a QFN substrate and is formed in a rectangular shape. The surface of the workpiece W is divided into a plurality of regions by dividing lines arranged in a grid, and various devices 91 such as IC, LSI, and LED are formed in these divided regions. In addition, the workpiece W is supported on the annular frame 93 via an adhesive tape 92 and carried into the cutting device 1 while accommodated in the cassette 5 .

A rectangular opening (not shown) extending in the It is covered with a waterproof cover (32). Below the waterproof cover 32, a ball screw-type moving mechanism (not shown) is installed to move the chuck table 3 in the X direction. On the surface of the chuck table 3, a holding surface 33 is formed of a porous ceramic material to attract and hold the workpiece W. The holding surface 33 is connected to the suction source through a flow path within the chuck table 3.

The chuck table 3 is reciprocated between a delivery position in the center of the device and a machining position facing the cutting means 4. Figure 1 shows a state in which the chuck table 3 is standing by at the delivery position. In the housing 2, one corner adjacent to the delivery position is lowered to one end, and a placement table 6 is installed at the lowered portion to be able to be raised and lowered. The cassette 5 containing the workpiece W is placed on the placement table 6. By raising and lowering the arrangement table 6 with the cassette 5 disposed, the extraction position and press-in position of the workpiece W in the height direction are adjusted.

At the rear of the placement table 6, a pair of guide rails 7 parallel in the Y direction, and a push-pull mechanism for transporting the workpiece W between the pair of guide rails 7 and the cassette 5 (8) is installed. The conveyance of the workpiece W by the push-pull mechanism 8 is guided by the pair of guide rails 7, and the X-direction of the workpiece W is positioned. The push-pull mechanism 8 not only pulls out the workpiece W before processing from the cassette 5 to the pair of guide rails 7, but also pulls out the workpiece W before processing from the pair of guide rails 7 to the cassette 5. It is configured to press fit the completed workpiece (W). The Y direction of the workpiece W is positioned by the push-pull mechanism 8.

A first transport arm 11 is installed near the pair of guide rails 7 to transport the workpiece W between the guide rail 7 and the chuck table 3. The workpiece W is transported by rotating the L-shaped arm portion 16 when viewed from the top of the first transport arm 11. Additionally, a spinner-type cleaning mechanism 12 is installed behind the chuck table 3 at the delivery position. In the cleaning mechanism 12, cleaning water is sprayed toward the rotating spinner table 17 to clean the workpiece W, and then dry air is sprayed instead of the cleaning water to dry the workpiece W.

On the housing 2, a support 21 is installed to support the cutting means 4. The cutting means 4 is located above the chuck table 3 and is moved in the Y and Z directions by a ball screw type moving mechanism (not shown). The cutting means 4 has a disc-shaped cutting blade 41 installed at the tip of a spindle (not shown). The cutting blade 41 is surrounded by a blade cover 42, and cutting water is sprayed from the blade cover 42 toward the cutting portion. The cutting blade 41 rotates at high speed, and the workpiece W is cut while cutting water is supplied.

A second transport arm 13 is installed on the side 22 of the support 21 to transport the workpiece W between the chuck table 3 and the cleaning mechanism 12. The arm portion 18 of the second conveyance arm 13 extends diagonally forward, and the workpiece W is conveyed by the arm portion 18 moving back and forth. Additionally, a cantilever support portion 24 that supports the imaging unit 14 is provided on the support stand 21 so as to cross the upper part of the movement path of the chuck table 3. The imaging unit 14 protrudes from the lower surface of the cantilever support 24, and the workpiece W is captured by the imaging unit 14. The image captured by the imaging unit 14 is used for alignment of the cutting means 4 and the chuck table 3.

At the frontmost part of the housing 2, input means 26 is installed to receive instructions to each part of the device. Additionally, a monitor 27 is placed on the support stand 21, and images captured by the imaging unit 14, processing conditions, etc. are displayed on the monitor 27. In the cutting device 1 configured as described above, the cutting blade 41 is aligned with the line along which the workpiece W is scheduled to be divided, and cutting water is sprayed toward the cutting blade 41 from various nozzles on the blade cover 42. . Then, the cutting blade 41 is cut into the workpiece W while being cooled and cleaned by cutting water, and the workpiece W is cut along grid-like division lines.

Next, the cutting means will be described in detail with reference to FIGS. 2 and 3. Figure 2 is a perspective view of a cutting means according to this embodiment. Figure 3 is a plan schematic diagram of a cutting means according to an embodiment of the present invention. Meanwhile, A in Figure 3 is a front view of the cutting means, and B in Figure 3 is a side view of the cutting means.

As shown in FIGS. 2 and 3, the cutting means 4 is rotatably mounted on a spindle (not shown) equipped with a cutting blade 41. The spindle has a rotation axis in the Y direction, is rotatably supported by the spindle housing 43, and is disposed at the tip of the spindle housing 43. The cover body 42A of the blade cover 42 is mounted on the spindle housing 43. The outer periphery of the cutting blade 41 is covered by the blade cover 42 except for the lower half. The cutting blade 41 is a hub blade and is configured by forming a cutting edge 52 for cutting the workpiece W on the outer periphery of the hub base 51. The cutting blade 41 is mounted by fastening a ring-shaped fixing nut 53 through a mount flange (not shown) at the tip of the spindle.

The cutting edge 52 is formed into a ring shape by bonding abrasive grains, such as diamond, with a bond material. The cutting edge 52 is formed to have a thickness of about 10 μm to about 500 μm. Meanwhile, in this embodiment, a hub blade is exemplified and explained as the cutting blade 41, but the type of the cutting blade 41 is not particularly limited. As the cutting blade 41, it is also possible to use a washer blade instead of a hub blade.

A blade breakage detector 44 is installed on the upper part of the blade cover 42. The blade breakage detector 44 has a light emitting element and a light receiving element that are opposed to each other so as to fit between the upper part of the cutting blade 41. The light beam emitted from the light emitting element is partially blocked by the tip of the cutting blade 41 and is received by the light receiving element. Therefore, the blade breakage detector 44 detects the state of damage, such as total damage or disintegration, of the cutting blade 41 as the amount of light received (transmittance) in the light receiving element increases. The blade breakage detector 44 has its vertical position relative to the cutting blade 41 adjusted by the adjustment screw 55, and is fixed at the adjusted position by the fixing screw 56.

The blade cover 42 is provided with a cutting water block 45 that is attached to be adjustable in the Z direction behind the cover body 42A in the cutting direction. A pair of cutting water nozzles 61 that are L-shaped when viewed from the side are fixed to the cutting water block 45. Cutting water is supplied to the pair of cutting water nozzles 61 from the supply hose 62 through the cutting water block 45. The pair of cutting water nozzles 61 extend downward from the cutting water block 45 and then extend forward in the cutting direction so as to sandwich the lower part of the cutting blade 41. On the tip side of the pair of cutting water nozzles 61, a plurality of slits 63 are formed on opposing surfaces facing each other with the cutting blades 41 interposed therebetween. Cutting water is sprayed from the side through a plurality of slits 63 to cool and clean the machining point.

Here, the cutting water supplied to the cutting blade 41 scatters backward in the cutting direction as the cutting blade 41 rotates in the direction indicated by arrow S in A in FIG. 3. In order to guide this cutting water backward, a pair of droplet covers 47 are installed on the cutting water block 45. A pair of droplet covers 47 guide coolant and cutting chips scattered by the rotation of the cutting blade 41 to the rear and discharge them to the outside of the blade cover 42.

The blade cover 42 is provided with a cutting water block 46 that is adjustable in the Y direction, which is the thickness direction of the cutting blade 41, in front of the cover body 42A in the cutting direction. The cutting water block 46 is arranged in front of the cutting direction, in other words, on the side opposite to the side where the cutting water supplied to the cutting blade 41 scatters due to the rotation of the cutting blade 41. Accordingly, the cutting water block 46 is disposed opposite to the outer peripheral end surface of the cutting blade 41 in the front of the cutting direction.

Figure 4 is a schematic perspective view of a cutting water block. As shown in FIGS. 3 and 4, the cutting water block 46 is provided with a first cutting machine that sprays cutting water toward the outer peripheral end surface of the cutting blade 41 (not shown in FIG. 4) from the front of the cutting direction. A water injection port 65 and a second cutting water injection port 66 are formed. The first cutting water injection port 65 is located on the + side of the second cutting water injection port 66 in the Z direction, that is, the first cutting water injection port 65 is disposed above the second cutting water injection port 66. . Additionally, the first cutting water injection port 65 and the second cutting water injection port 66 are arranged at positions where their center positions are the same in the Y direction.

The first cutting water injection port 65 is connected to one end of the first supply path 68. The other end of the first supply path 68 is connected to the first flow path 70 extending in the Z direction through the first connection path 69 extending in the Y direction. In addition, the second cutting water injection port 66 is connected to one end of the second supply path 72, and the other end of the second supply path 72 is connected to the second connection path 73 extending in the Y direction. It is connected to a second flow path 74 extending in the Z direction.

As shown in FIG. 3A, the first supply path 68 is formed at an angle that decreases as it moves backward in the cutting direction, and cutting water from the first cutting water injection hole 65 is injected at this angle. . Specifically, the vertical line CL passing through the center C of the cutting blade 41 and the direction of movement of the cutting water sprayed from the first cutting water injection hole 65 toward the center C of the cutting blade 41. The first supply passage 68 is formed so as to spray at an angle θ of greater than 35 degrees and less than 45 degrees. In other words, the extension direction of the first supply path 68 is set to be the same as the direction in which the cutting water travels.

The second supply path 72 is formed at a horizontal angle toward the rear of the cutting direction, and cutting water from the second cutting water injection port 66 is injected at this angle. Specifically, the second supply path 72 is formed so that the vertical line CL passing through the center C of the cutting blade 41 and the direction of movement of the cutting water sprayed from the second cutting water injection hole 66 are sprayed at a right angle. is formed. Cutting water is sprayed onto the cutting blade 41 from the front to the rear in the cutting direction through each cutting water injection port 65, 66, so that the cutting water is drawn into the cutting blade 41 and the machining point is cooled and cleaned.

Here, as shown in B of FIG. 3, the center position of the first cutting water injection port 65 (center line of the first supply path 68) is the position of the second cutting water injection port 66 (center line of the first supply path 68) in the Y direction. 2 center line of the supply path 72] and is formed to be located on the same XZ plane (D).

The first flow path 70 and the second flow path 74 are arranged side by side in the Y direction with a predetermined gap between them. A supply hose 76 (see FIG. 2) is connected to each upper end of the first flow path 70 and the second flow path 74. Cutting water is supplied from the supply hose 76 to the first cutting water injection hole 65 through the first flow path 70, the first connection path 69, and the first supply path 68. In addition, cutting water is supplied from the supply hose 76 to the second cutting water injection hole 66 through the second flow path 74, the second connection path 73, and the second supply path 72.

A visual hole 78 for adjustment of the cutting water block 46 is formed on the front surface 85, which is the outer surface of the cutting water block 46. In the cutting water block 46, a visual path 79 is formed penetrating from the visual hole 78 toward the cutting blade 41. The visual hole 78 and the visible path 79 are formed to have an internal diameter that is visible (eg, 3 mm to 5 mm). The visual path 79 extends so as to be perpendicular to the Y direction when viewed from the top, and is formed between the first flow path 70 and the second flow path 74 in the Y direction and at a position away from them. In addition, the visual path 79 is located between the first connection path 69 and the first supply path 68 and the second connection path 73 and the second supply path 72 in the Z direction, away from them. It is formed to pass through the location. Accordingly, the visual path 79 does not intersect any of the first cutting water injection port 65, the first supply path 68, the first connection path 69, and the first flow path 70, and the second It is formed at a position that does not intersect with any of the cutting water injection port 66, the second supply path 72, the second connection path 73, and the second flow path 74. In addition, the center position of the visual hole 78 (the center line of the visual path 79) coincides with the central position of each cutting water nozzle 65, 66 in the Y direction and is located on the same XZ plane D. It is formed to do so.

In addition, since the cutting water block 46 is penetrated by the visual path 79, the thickness direction of the cutting blade 41 can be viewed through the visual hole 78. Accordingly, the Y direction of the visual hole 78 with respect to the cutting blade 41 is positioned while directly viewing the center of the thickness direction of the cutting blade 41 through the visual hole 78. According to the positioning of the visual hole 78, the position of each cutting water nozzle 65, 66 in the same XZ plane D is also positioned. The visual path 79 extends diagonally downward from the visual hole 78 toward the cutting blade 41 so that the operator can easily confirm it with the naked eye.

The cutting water blocks 45 and 46 are respectively screwed to the cover body 42A. On the side 81 of the cutting water block 45, an elongated hole 82 is formed in the vertical direction. A pair of adjustment screws 83 are inserted through the long hole 82, and by loosening the adjustment screw 83 and moving the cutting water block 45 along the long hole 82, the cutting blade 41 The position of the cutting water nozzle 61 in the Z direction is adjusted. A pair of long holes 86 long in the Y direction are formed on the front surface 85 of the cutting water block 46. An adjusting screw 87 is inserted through each long hole 86, and by loosening the adjusting screw 87 and moving the cutting water block 46 along the long hole 86, the cutting blade 41 is adjusted. The Y-direction position of each cutting water nozzle (65, 66) is adjusted. On the other hand, each long hole 86 is formed at a position away from the first flow path 70 and the second flow path 74 without intersecting them.

With reference to FIG. 5, position adjustment of the cutting water nozzle relative to the cutting blade will be described. Figure 5 is an explanatory diagram of position adjustment of the cutting water jet orifice with respect to the cutting blade according to the present embodiment.

In the initial state shown in A of FIG. 5, the center of each cutting water nozzle 65, 66 is shifted in the Y direction with respect to the center of the thickness direction of the cutting blade 41. Therefore, when cutting water is supplied to the cutting blade 41 from each cutting water injection port 65, 66 in this initial state, the cutting water is not divided into two by the cutting edge 52 of the cutting blade 41. Accordingly, the pressure from the cutting water acts unbalanced on both sides of the cutting blade 41, causing the cutting blade 41 to rattle or tilt, and there is a risk that chipping, etc. may occur during cutting. Additionally, only one of the two sides of the cutting blade 41 is cooled, and there is a risk that abnormal wear may occur.

So, in this embodiment, the center of each cutting water nozzle 65, 66 and the center of the visual hole 78 are formed on the same XZ plane D, and the cutting blade 41 is formed through the visual hole 78. The position of each cutting water nozzle 65, 66 is adjusted while being directly recognized. In this case, each adjustment screw 87 inserted through the pair of long holes 86 is loosened and the cutting water block 46 is adjusted by moving it in the Y direction with respect to the cover body 42A (see Fig. 2). Make it possible. Then, while looking through the visible hole 78, align the center position of the visible hole 78 with the center of the thickness direction of the cutting blade 41, and cut the visible hole 78 with the cutting edge 52 of the cutting blade 41. Position it so that it is divided into two. Then, the cutting water block 46 is fixed by tightening the pair of adjustment screws 87.

As a result, as shown in B of FIG. 5, according to the position adjustment of the visual hole 78, the center of each cutting water nozzle 65, 66 is aligned in the Y direction with respect to the center of the thickness direction of the cutting blade 41. The position is aligned in . In addition, each cutting water injection port 65, 66 is positioned at a position where the cutting blade 41 is divided into two by the cutting edge 52, so that cutting water is uniformly supplied to both sides of the cutting blade 41. Therefore, it is possible to prevent fluctuations in machining quality due to the center of each cutting water nozzle 65, 66 not being located at the center of the cutting blade 41, and the cutting blade 41 is effectively cooled and the cutting blade 41 is cooled. (41) By suppressing rattling or tilting, machining precision can be improved. Meanwhile, in order to facilitate alignment of the visual hole 78 with respect to the cutting blade 41, a mark for alignment, etc. may be attached around the visual hole 78.

By adjusting the above position, the center of the thickness direction of the cutting blade 41 is directly viewed through the viewing hole 78, and the visual hole 78 is divided into two by the cutting edge 52 of the cutting blade 41. Location can be determined. According to the positioning of the visual hole 78, each cutting water nozzle 65, 66 is also positioned with high precision so as to be divided into two by the cutting edge 52 of the cutting blade 41, so that the amount of the cutting blade 41 Cutting water can be supplied evenly to the side. Therefore, the cutting blade 41 can be cooled effectively, the cutting blade 41 does not rattle or tilt, and the cutting precision for the workpiece W can be improved. Additionally, since the center of the cutting blade 41 in the thickness direction can be directly viewed through the viewing hole 78, the position of the cutting water block 46 can be easily adjusted.

Next, with reference to FIG. 1, a method of cutting the workpiece W using the cutting device 1 will be described. First, the workpiece W supported on the annular frame 93 via the adhesive tape 92 is transported as a unit to the chuck table 3 by a transport means (not shown) and held by suction. Subsequently, after aligning the workpiece W, the chuck table 3 is moved in the Additionally, the cutting means 4 is moved in the Y direction and positioned at a position along the line along which the workpiece W is scheduled to be divided.

After positioning as described above, the cutting means 4 is lowered and positioned in the Z direction according to the cutting depth of the workpiece W. After this positioning, the chuck table 3 is moved relative to the cutting blade 41 rotated at high speed in the X direction to form a cutting groove along the division line of the workpiece W. When forming a cutting groove, a cutting water nozzle 61, a first cutting water nozzle 65, and a second cutting water nozzle 66 are provided at the contact area between the cutting blade 41 and the workpiece W (see FIG. 4). ) supplies cutting water from Then, each time a cutting groove is formed, the cutting means 4 is moved in the Y direction corresponding to the pitch interval in the Y direction of the line to be divided, and the same operation is repeated, thereby forming the cutting grooves sequentially.

After forming cutting grooves on all scheduled division lines parallel to the This is formed and the workpiece (W) is cut vertically and horizontally. As a result, individual package devices PD as shown in FIG. 6 are formed from the workpiece W made of a QFN package substrate. Figure 6 is a plan schematic diagram of a package device. In the package device PD, the external electrode portion of each electrode PDa, which serves as an external connection terminal, is exposed on the same surface as the filling resin PDb.

[Example]

As Examples 1 to 4 and Comparative Examples 1 to 11, the cutting water block 46 formed the first supply path 68 and the first cutting water injection hole 65 by changing the angle θ shown in A of FIG. 3. ) was used to conduct the experiment. The correspondence relationship between the angle θ and Examples 1 to 4 and Comparative Examples 1 to 11 is shown in Table 1. In Examples 1 to 4 and Comparative Examples 1 to 11, the angle θ was changed as shown in Table 1 with respect to the cutting device 1 and cutting method of the above embodiment, and the The injection of cutting water was stopped. In addition, other processing conditions were kept the same, and the workpiece W made of the same type of QFN package substrate was cut to form the package device PD.

The package devices (PD) formed in Examples 1 to 4 and Comparative Examples 1 to 11 were evaluated by measuring the distance (d) between electrodes shown in B of FIG. 6. The results are shown in Table 1. The evaluation in Table 1 is ○: within the tolerance value (larger than the tolerance value), △: tolerance value (same or approximately the same as the tolerance value), ×: exceeding the tolerance value (smaller than the tolerance value). The allowable value changes depending on the size and shape of the electrode PDa, the layout, the size and shape of the package device PD, and the performance required for the package device PD.

As can be understood from Table 1, when the angle θ is 35° or more and 45° or less (Examples 1 to 3) and when the angle θ is 90° (Example 4), the distance between electrodes (d) ) was greater than the allowable value, making it possible to realize good processing quality and device quality. The reason is that the cutting blade 41 can efficiently supply cutting water to the machining point in contact with the workpiece W, thereby increasing the cooling effect and preventing the electrode PDa from extending due to ductility. am. In addition, in Examples 1 to 4, the area around the cutting blade 52 is covered with cutting water from the machining point of the cutting blade 41 to the first cutting water injection hole 65, in a so-called co-rotating state. It was confirmed that cutting water could be supplied efficiently.

The angle θ of Examples 1 to 3 includes the angle θ of the first supply path 68 of the above embodiment, and Example 4 includes the angle θ of the second supply path 72 of the above embodiment. ) corresponds to. Therefore, as in the above embodiment, by spraying cutting water from each cutting water injection port 65, 66 through the two supply paths 68, 72, cutting water to the machining point could be supplied more efficiently. . As a result, the cooling effect at the processing point can be further improved, the electrode PDa can be prevented from extending during processing, and the quality of the device after processing can be improved.

Meanwhile, in the present invention, various substrates such as other package substrates, semiconductor device wafers, optical device wafers, semiconductor substrates, inorganic material substrates, and piezoelectric substrates may be used as the substrate to be processed. As the semiconductor device wafer, a silicon wafer or a compound semiconductor wafer after device formation may be used. As the optical device wafer, a sapphire wafer or silicon carbide wafer after device formation may be used. Additionally, a rectangular package substrate such as a CSP (Chip Size Package) substrate may be used as the package substrate, silicon or gallium arsenide, etc. may be used as the semiconductor substrate, and sapphire, ceramics, glass, etc. may be used as the inorganic material substrate.

In addition, in this embodiment, the first flow path 70 and the second flow path 74 of the cutting water block 46 are configured to extend in the Z direction, but the configuration is not limited to this. Each flow path 70, 74 is connected to a supply source such as a supply hose 76 outside the cutting water block 46, and if it does not intersect the visual path 79, its extension direction is inclined with respect to the Z direction. It may be done in a curved shape or extended in a curved shape.

In addition, in this embodiment, the visual path 79 is formed to extend diagonally downward from the visual hole 78 toward the cutting blade 41 so that the operator can easily confirm it with the naked eye, but the configuration is not limited to this. . The extension direction of the visual path 79 is formed on the same

In addition, although embodiments and modifications of the present invention have been described, as other embodiments of the present invention, the above embodiments and modifications may be combined in whole or in part.

In addition, the embodiment of the present invention is not limited to the above-described embodiment, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in a different way due to technological progress or other derived technologies, it may be implemented using that method. Accordingly, the scope of the patent claims covers all embodiments that can be included within the scope of the technical idea of the present invention.

As explained above, the present invention has the effect of efficiently supplying cutting water to the machining point of the cutting blade, and is particularly useful in a cutting device that cuts a workpiece with a cutting blade provided with a thin cutting edge. do.

1: cutting device 41: cutting blade
42: Blade cover 43: Spindle housing
46: cutting water block 52: cutting edge
65: first cutting water nozzle 66: second cutting water nozzle
68: first supply path 72: second supply path
78: Moxy Hole 79: Moxy Hole
C: Center CL: Plumb line
W: Workpiece

Claims (2)

A blade cover disposed at the tip of a spindle housing that rotatably supports a spindle having a rotation axis in the Y direction and covering a cutting blade mounted on the spindle through a flange,
It is attached to be adjustable in the Y direction, which is the thickness direction of the cutting blade, and is disposed on a side opposite to the side where cutting water supplied to the cutting blade scatters due to rotation of the cutting blade, and is opposed to the outer peripheral end surface of the cutting blade. It includes a cutting water block that ejects cutting water toward the
The cutting water block is,
A first cutting water nozzle and a second cutting water nozzle spraying cutting water toward the outer peripheral end surface of the cutting blade,
The angle formed between the vertical line that communicates with the first cutting water nozzle and passes through the center of the cutting blade and the direction of cutting water injected from the first cutting water nozzle toward the center of the cutting blade is 35 degrees. A first supply path that is large and configured to spray at an angle less than 45 degrees,
A second supply path connected to the second cutting water nozzle and formed to spray at right angles to a vertical line passing through the center of the cutting blade and the direction of cutting water injected from the second cutting water nozzle.
A blade cover comprising: The method of claim 1, wherein the cutting water block is:
A visual hole formed on the outer surface of the cutting water block,
A visual path that does not intersect any of the first cutting water injection port and the first supply path, the second cutting water injection port, and the second supply path, and is formed by penetrating from the visual hole to the cutting blade side. Including,
When the cutting water block is moved in the Y direction and positioned so that the visual hole is divided into two by the cutting edge of the cutting blade, the first cutting water nozzle and the second cutting water nozzle are positioned at a position where the cutting water nozzle is divided into two by the cutting blade. A blade cover characterized in that the position is determined.