TWI744286B - Radiation-sensitive composition, optical filter, laminate, pattern forming method, solid-state imaging element, image display device, and infrared sensor - Google Patents
Radiation-sensitive composition, optical filter, laminate, pattern forming method, solid-state imaging element, image display device, and infrared sensor Download PDFInfo
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- TWI744286B TWI744286B TW106105672A TW106105672A TWI744286B TW I744286 B TWI744286 B TW I744286B TW 106105672 A TW106105672 A TW 106105672A TW 106105672 A TW106105672 A TW 106105672A TW I744286 B TWI744286 B TW I744286B
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Images
Classifications
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/05—Function characteristic wavelength dependent
- G02F2203/055—Function characteristic wavelength dependent wavelength filtering
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/11—Function characteristic involving infrared radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8057—Optical shielding
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Liquid Crystal (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
本發明提供一種可形成紅外線遮蔽性良好且矩形性優異的圖案的感放射線性組成物。所述感放射線性組成物包含近紅外線吸收劑、樹脂、自由基聚合性化合物、以及光自由基聚合起始劑,且於700nm~1000nm的範圍內具有最大吸收波長,最大吸收波長下的吸光度Amax、與波長550nm下的吸光度A550的比即吸光度Amax/吸光度A550為50~500,樹脂包含具有酸基的樹脂,自由基聚合性化合物與具有酸基的樹脂的質量比為自由基聚合性化合物/具有酸基的樹脂=0.3~0.7。 The present invention provides a radiation-sensitive composition that can form a pattern with good infrared shielding properties and excellent rectangularity. The radiation-sensitive composition includes a near-infrared absorber, a resin, a radical polymerizable compound, and a photo-radical polymerization initiator, and has a maximum absorption wavelength in the range of 700 nm to 1000 nm, and the absorbance at the maximum absorption wavelength Amax , The ratio of the absorbance A550 to the absorbance A550 at a wavelength of 550nm, that is, the absorbance Amax/absorbance A550 is 50~500, the resin contains a resin having an acid group, and the mass ratio of a radical polymerizable compound to a resin having an acid group is a radical polymerizable compound/ Resin with acid group=0.3~0.7.
Description
本發明是有關於一種感放射線性組成物、光學濾波器、積層體、圖案形成方法、固體攝像元件、圖像顯示裝置及紅外線感測器。 The invention relates to a radiation-sensitive composition, an optical filter, a laminate, a pattern forming method, a solid-state imaging element, an image display device, and an infrared sensor.
於攝影機(video camera)、數位相機(digital still camera)、附照相機功能的行動電話等中,一直使用作為彩色圖像的固體攝像元件的電荷耦合元件(Charge Coupled Device,CCD)或互補式金屬氧化膜半導體(Complementary Metal Oxide Semiconductor,CMOS)。該些固體攝像元件於其光接收部中使用對紅外線具有感度的矽光二極體(silicon photodiode),故有時使用近紅外線截止濾波器進行視感度修正。 In video cameras, digital still cameras, mobile phones with camera functions, etc., Charge Coupled Devices (CCD) or complementary metal oxides have been used as solid-state imaging elements for color images. Film semiconductor (Complementary Metal Oxide Semiconductor, CMOS). These solid-state imaging devices use silicon photodiodes that are sensitive to infrared in their light receiving parts, so they sometimes use a near-infrared cut filter for visual sensitivity correction.
關於近紅外線截止濾波器,已知有為了提高紅外線遮蔽性而使用包含近紅外線吸收劑的感放射線性組成物來製造的方法。例如,於專利文獻1中記載有使用包含吡咯并吡咯化合物的感放射線性組成物來製造近紅外線截止濾波器等。於專利文獻2中記載有使用包含氧化鎢銫等的感放射線性組成物來製造近紅外線截止濾波器等。於專利文獻3中記載有使用包含萘酞青色素等的感放射線性組成物來製造近紅外線截止濾波器等。 Regarding the near-infrared cut filter, a method of manufacturing it using a radiation-sensitive composition containing a near-infrared absorber in order to improve infrared shielding properties is known. For example, Patent Document 1 describes the use of a radiation-sensitive composition containing a pyrrolopyrrole compound to produce a near-infrared cut filter and the like. Patent Document 2 describes the use of a radiation-sensitive composition containing cesium tungsten oxide to produce a near-infrared cut filter and the like. Patent Document 3 describes the use of a radiation-sensitive composition containing naphthalocyanine and the like to produce a near-infrared cut filter and the like.
[專利文獻1]日本專利特開2014-191190號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2014-191190
[專利文獻2]日本專利特開2013-137337號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2013-137337
[專利文獻3]日本專利特開2014-224921號公報 [Patent Document 3] Japanese Patent Laid-Open No. 2014-224921
先前,將近紅外線截止濾波器用作平坦化膜。近年來,關於近紅外線截止濾波器,亦正研究形成圖案而使用。例如,正研究於近紅外線截止濾波器的圖案上形成彩色濾波器的各畫素(例如,紅色畫素、藍色畫素、綠色畫素等)來使用。當製造此種積層體時,理想的是近紅外線截止濾波器的圖案的矩形性良好。若近紅外線截止濾波器的圖案的矩形性良好,則當在近紅外線截止濾波器的圖案上形成彩色濾波器的各畫素而形成積層體時,可抑制空隙的產生或混色等。 Previously, a near-infrared cut filter was used as a flattening film. In recent years, near-infrared cut filters have also been studied for pattern formation and use. For example, it is being studied to use each pixel (for example, red pixel, blue pixel, green pixel, etc.) forming a color filter on the pattern of the near-infrared cut filter. When manufacturing such a laminate, it is desirable that the pattern of the near-infrared cut filter has good rectangularity. If the pattern of the near-infrared cut filter has good rectangularity, when the pixels of the color filter are formed on the pattern of the near-infrared cut filter to form a laminate, the generation of voids, color mixing, and the like can be suppressed.
然而,根據本發明者等人的研究可知,與形成使用包含彩色著色劑的著色組成物的彩色濾波器等的畫素圖案等的情況相比,於使用包含近紅外線吸收劑的感放射線性組成物來形成圖案的情況下,矩形性容易變差。另外,先前廣為人知的包含近紅外線吸收劑的感放射線性組成物並非假定形成圖案而使用的組成物。另外,先前公知的感放射線性組成物不可謂矩形性充分,期望矩形性的進一步提高。 However, according to research conducted by the inventors, it has been found that, compared with the case of forming a pixel pattern such as a color filter using a coloring composition containing a color colorant, it is better than a radiation-sensitive composition containing a near-infrared absorber. In the case of forming a pattern with an object, the rectangularity tends to be deteriorated. In addition, the previously widely known radiation-sensitive composition containing a near-infrared absorber is not a composition that is used assuming that it is patterned. In addition, the conventionally known radiation-sensitive composition cannot be said to have sufficient rectangularity, and further improvement of the rectangularity is desired.
因而,本發明的目的在於提供一種可形成紅外線遮蔽性良好且矩形性優異的圖案的感放射線性組成物。另外,本發明的目的在於提供一種光學濾波器、積層體、圖案形成方法、固體攝像元件、圖像顯示裝置及紅外線感測器。 Therefore, an object of the present invention is to provide a radiation-sensitive composition that can form a pattern with good infrared shielding properties and excellent rectangularity. In addition, an object of the present invention is to provide an optical filter, a laminate, a pattern forming method, a solid-state imaging device, an image display device, and an infrared sensor.
根據所述情況,本發明者等人進行了努力研究,結果發現,藉由使用後述的感放射線性組成物,可達成所述目的,從而完成了本發明。本發明提供以下內容。 Based on the circumstances, the inventors of the present invention conducted diligent studies, and as a result, found that the above-mentioned object can be achieved by using the radiation-sensitive composition described later, and the present invention has been completed. The present invention provides the following.
<1>一種感放射線性組成物,其包含近紅外線吸收劑、樹脂、自由基聚合性化合物以及光自由基聚合起始劑,且感放射線性組成物於700nm~1000nm的範圍內具有最大吸收波長,最大吸收波長下的吸光度Amax、與波長550nm下的吸光度A550的比即吸光度Amax/吸光度A550為50~500,樹脂包含具有酸基的樹脂,自由基聚合性化合物與具有酸基的樹脂的質量比為自由基聚合性化合物/具有酸基的樹脂=0.3~0.7。 <1> A radiation-sensitive composition comprising a near-infrared absorber, a resin, a radical polymerizable compound, and a photo-radical polymerization initiator, and the radiation-sensitive composition has a maximum absorption wavelength in the range of 700nm~1000nm , The ratio of the absorbance Amax at the maximum absorption wavelength to the absorbance A550 at the wavelength of 550nm, that is, the absorbance Amax/absorbance A550 is 50 to 500. The resin contains resins with acid groups, and the mass of radical polymerizable compounds and resins with acid groups The ratio is a radical polymerizable compound/resin having an acid group=0.3 to 0.7.
<2>如<1>所述的感放射線性組成物,其中樹脂包含鹼可溶性樹脂,且自由基聚合性化合物與鹼可溶性樹脂的質量比為自由基聚合性化合物/鹼可溶性樹脂=0.3~0.7。 <2> The radiation-sensitive composition according to <1>, wherein the resin includes an alkali-soluble resin, and the mass ratio of the radical polymerizable compound to the alkali-soluble resin is radical polymerizable compound/alkali-soluble resin=0.3~0.7 .
<3>如<1>或<2>所述的感放射線性組成物,其中光自由基聚合起始劑包含肟化合物。 <3> The radiation-sensitive composition according to <1> or <2>, wherein the photoradical polymerization initiator contains an oxime compound.
<4>如<1>或<2>所述的感放射線性組成物,其中光自由基聚合起始劑包含肟化合物與α-胺基酮化合物。 <4> The radiation-sensitive composition according to <1> or <2>, wherein the photoradical polymerization initiator includes an oxime compound and an α-aminoketone compound.
<5>如<1>至<4>中任一項所述的感放射線性組成物,其中自由基聚合性化合物為包含酸基的自由基聚合性化合物。 <5> The radiation-sensitive composition according to any one of <1> to <4>, wherein the radical polymerizable compound is a radical polymerizable compound containing an acid group.
<6>如<1>至<5>中任一項所述的感放射線性組成物,其進而包含鏈轉移劑。 <6> The radiation-sensitive composition according to any one of <1> to <5>, which further contains a chain transfer agent.
<7>如<1>至<6>中任一項所述的感放射線性組成物,其進而包含紫外線吸收劑。 <7> The radiation-sensitive composition according to any one of <1> to <6>, which further contains an ultraviolet absorber.
<8>如<1>至<7>中任一項所述的感放射線性組成物,其中近紅外線吸收劑包含選自有機顏料及無機顏料中的至少一種。 <8> The radiation-sensitive composition according to any one of <1> to <7>, wherein the near-infrared absorber contains at least one selected from organic pigments and inorganic pigments.
<9>如<1>至<7>中任一項所述的感放射線性組成物,其中於感放射線性組成物的總固體成分中含有20質量%以上的近紅外線吸收劑。 <9> The radiation-sensitive composition according to any one of <1> to <7>, wherein the total solid content of the radiation-sensitive composition contains 20% by mass or more of a near-infrared absorber.
<10>一種光學濾波器,其使用如<1>至<9>中任一項所述的感放射線性組成物。 <10> An optical filter using the radiation-sensitive composition according to any one of <1> to <9>.
<11>如<10>所述的光學濾波器,其中光學濾波器為近紅外線截止濾波器或紅外線透過濾波器。 <11> The optical filter according to <10>, wherein the optical filter is a near infrared cut filter or an infrared transmission filter.
<12>如<10>或<11>所述的光學濾波器,其進而具有抗反射膜。 <12> The optical filter according to <10> or <11>, which further has an anti-reflection film.
<13>一種積層體,其具有使用如<1>至<9>中任一項所述的感放射線性組成物的近紅外線截止濾波器、與包含彩色著色 劑的彩色濾波器。 <13> A laminate having a near-infrared cut filter using the radiation-sensitive composition as described in any one of <1> to <9>, and a layer containing color Color filter of the agent.
<14>一種圖案形成方法,其包括:使用如<1>至<9>中任一項所述的感放射線性組成物而於支撐體上形成感放射線性組成物層的步驟;以圖案狀對感放射線性組成物層進行曝光的步驟;以及將未曝光部顯影去除而形成圖案的步驟。 <14> A pattern forming method, comprising: using the radiation-sensitive composition as described in any one of <1> to <9> to form a radiation-sensitive composition layer on a support; The step of exposing the radiation-sensitive composition layer; and the step of developing and removing the unexposed part to form a pattern.
<15>如<14>所述的圖案形成方法,其於將未曝光部顯影去除後進而包括進行曝光的步驟。 <15> The pattern forming method as described in <14>, which further includes a step of exposing after developing and removing the unexposed part.
<16>一種固體攝像元件,其具有如<10>至<12>中任一項所述的光學濾波器。 <16> A solid-state imaging element having the optical filter according to any one of <10> to <12>.
<17>一種圖像顯示裝置,其具有如<10>至<12>中任一項所述的光學濾波器。 <17> An image display device having the optical filter according to any one of <10> to <12>.
<18>一種紅外線感測器,其具有如<10>至<12>中任一項所述的光學濾波器。 <18> An infrared sensor having the optical filter according to any one of <10> to <12>.
根據本發明,可提供一種可形成紅外線遮蔽性良好且矩形性優異的圖案的感放射線性組成物。另外,本發明可提供一種光學濾波器、積層體、圖案形成方法、固體攝像元件、圖像顯示裝置及紅外線感測器。 According to the present invention, it is possible to provide a radiation-sensitive composition that can form a pattern with good infrared shielding properties and excellent rectangularity. In addition, the present invention can provide an optical filter, a laminate, a pattern forming method, a solid-state imaging device, an image display device, and an infrared sensor.
110:固體攝像元件 110: solid-state image sensor
111:近紅外線截止濾波器 111: Near infrared cut filter
112:彩色濾波器 112: Color filter
114:紅外線透過濾波器 114: Infrared transmission filter
115:微透鏡 115: Micro lens
116:平坦化層 116: Planarization layer
hν:入射光 hν: incident light
圖1為表示紅外線感測器的一實施形態的概略圖。 Fig. 1 is a schematic diagram showing an embodiment of an infrared sensor.
以下,對本發明的內容進行詳細說明。 Hereinafter, the content of the present invention will be described in detail.
本說明書中,所謂「~」,是以包含其前後所記載的數值作為下限值及上限值的含義來使用。 In this specification, the term "~" is used to include the numerical values described before and after it as the lower limit and the upper limit.
本說明書中的基(原子團)的表述中,未記載經取代及未經取代的表述包含不具有取代基的基(原子團),並且亦包含具有取代基的基(原子團)。例如,所謂「烷基」,不僅包含不具有取代基的烷基(未經取代的烷基),而且亦包含具有取代基的烷基(經取代的烷基)。 In the expression of the group (atomic group) in this specification, the expression that does not describe substituted and unsubstituted includes a group (atomic group) that does not have a substituent, and also includes a group (atomic group) having a substituent. For example, the "alkyl group" includes not only an unsubstituted alkyl group (unsubstituted alkyl group) but also a substituted alkyl group (substituted alkyl group).
本說明書中,所謂「曝光」,只要無特別說明,則不僅包含利用光的曝光,而且利用電子束、離子束等粒子束的描繪亦包含於曝光中。另外,作為曝光中所使用的光,通常可列舉:水銀燈的明線光譜、準分子雷射所代表的遠紫外線、極紫外線(極紫外(Extreme Ultraviolet,EUV)光)、X射線、電子束等光化射線或放射線。 In this specification, the term "exposure", unless otherwise specified, includes not only exposure using light, but also drawing using particle beams such as electron beams and ion beams. In addition, as the light used in the exposure, generally, the bright-line spectrum of a mercury lamp, extreme ultraviolet light represented by excimer lasers, extreme ultraviolet light (Extreme Ultraviolet (EUV) light), X-rays, electron beams, etc. Actinic rays or radiation.
本說明書中,「(甲基)丙烯酸酯」表示丙烯酸酯及甲基丙烯酸酯,「(甲基)丙烯酸」表示丙烯酸及甲基丙烯酸,「(甲基)丙烯醯基」表示丙烯醯基及甲基丙烯醯基。 In this specification, "(meth)acrylate" means acrylate and methacrylate, "(meth)acrylic" means acrylic and methacrylic acid, and "(meth)acryloyl" means acryloyl and methacrylic acid. Base acrylic acid base.
本說明書中,重量平均分子量及數量平均分子量被定義為藉由凝膠滲透層析法(Gel Permeation Chromatography,GPC)而測定的聚苯乙烯換算值。 In this specification, the weight average molecular weight and the number average molecular weight are defined as polystyrene conversion values measured by Gel Permeation Chromatography (GPC).
所謂近紅外線,是指最大吸收波長區域為波長700nm~2500nm的光(電磁波)。 The so-called near-infrared rays refer to light (electromagnetic waves) with a wavelength of 700nm to 2500nm in the maximum absorption wavelength region.
本說明書中,「步驟」這一用語不僅是指獨立的步驟,即便於無法與其他步驟明確地加以區分的情況下,只要達成該步驟的所期望的作用,則亦包含於本用語中。 In this specification, the term "step" not only refers to an independent step, but even when it cannot be clearly distinguished from other steps, as long as the desired effect of the step is achieved, it is included in this term.
<感放射線性組成物> <Radiation Sensing Composition>
本發明的感放射線性組成物(以下,亦稱為組成物)為包含近紅外線吸收劑、樹脂、自由基聚合性化合物、以及光自由基聚合起始劑的感放射線性組成物,感放射線性組成物於700nm~1000nm的範圍內具有最大吸收波長,最大吸收波長下的吸光度Amax、與波長550nm下的吸光度A550的比即吸光度Amax/吸光度A550為50~500,樹脂包含具有酸基的樹脂,自由基聚合性化合物與具有酸基的樹脂的質量比為自由基聚合性化合物/具有酸基的樹脂=0.3~0.7。 The radiation-sensitive composition of the present invention (hereinafter also referred to as the composition) is a radiation-sensitive composition containing a near-infrared absorber, a resin, a radical polymerizable compound, and a photo-radical polymerization initiator. The composition has a maximum absorption wavelength in the range of 700nm~1000nm. The ratio of the absorbance Amax at the maximum absorption wavelength to the absorbance A550 at a wavelength of 550nm, that is, the absorbance Amax/absorbance A550 is 50 to 500. The resin contains a resin with an acid group. The mass ratio of the radical polymerizable compound to the resin having an acid group is radical polymerizable compound/resin having an acid group=0.3 to 0.7.
藉由使用所述的感放射線性組成物,可形成具有優異的紅外線遮蔽性、且矩形性優異的圖案。本發明的感放射線性組成物包含近紅外線吸收劑,且所述吸光度Amax/吸光度A550為50~500,因此可形成紅外線遮蔽性優異的圖案。而且,藉由以質量比計以自由基聚合性化合物/具有酸基的樹脂=0.3~0.7的比例包含自由基聚合性化合物與具有酸基的樹脂,可形成矩形性優異的圖案。即,於使用本發明的感放射線性組成物來形成圖案的情況下,當介隔遮罩而進行曝光時,可提高遮罩周邊部的感放射線性組成物的硬化性。而且,藉由將自由基聚合性化合物/具有酸基的樹脂 設為0.3以上,圖案的下部側(膜的支撐體側)不易變得較設計值細,從而可抑制底切(懸伸形狀)的產生。另外,藉由將自由基聚合性化合物/具有酸基的樹脂設為0.7以下,圖案的上部側(膜的表面側)不易變得較設計值細,從而可抑制過度切削(正錐形狀)的產生。因此可形成矩形性優異的圖案。進而,藉由以質量比計以自由基聚合性化合物/具有酸基的樹脂=0.3~0.7的比例包含自由基聚合性化合物與具有酸基的樹脂,亦可抑制圖案形成時的殘渣的產生。 By using the radiation-sensitive composition described above, a pattern having excellent infrared shielding properties and excellent rectangularity can be formed. The radiation-sensitive composition of the present invention contains a near-infrared absorber, and the absorbance Amax/absorbance A550 is 50 to 500, so it can form a pattern with excellent infrared shielding properties. Furthermore, by including a radical polymerizable compound and a resin having an acid group in a ratio of radical polymerizable compound/resin having an acid group=0.3 to 0.7 in terms of mass ratio, a pattern with excellent rectangularity can be formed. That is, when the radiation-sensitive composition of the present invention is used to form a pattern, when the mask is interposed and exposed, the curability of the radiation-sensitive composition at the periphery of the mask can be improved. Moreover, by combining radically polymerizable compounds/resins with acid groups When it is set to 0.3 or more, the lower side of the pattern (the support side of the film) is less likely to become smaller than the design value, and the generation of undercuts (overhanging shapes) can be suppressed. In addition, by setting the radical polymerizable compound/resin having an acid group to 0.7 or less, the upper side of the pattern (the surface side of the film) is less likely to become smaller than the design value, thereby suppressing overcutting (positive cone shape) produce. Therefore, a pattern with excellent rectangularity can be formed. Furthermore, by including a radical polymerizable compound and a resin having an acid group in a ratio of radical polymerizable compound/resin having an acid group=0.3 to 0.7 in terms of mass ratio, the generation of residues during pattern formation can also be suppressed.
感放射線性組成物於700nm~1000nm的範圍內具有最大吸收波長,更佳為於720nm~980nm的範圍內具有最大吸收波長,進而佳為於740nm~960nm的範圍內具有最大吸收波長。另外,本發明的感放射線性組成物的吸光度Amax/吸光度A550為50~500,較佳為70~450,更佳為100~400。所述吸光度的條件可藉由任意手段達成,藉由調整近紅外線吸收劑的種類及含量,可較佳地達成所述吸光度的條件。 The radiation-sensitive composition has a maximum absorption wavelength in the range of 700 nm to 1000 nm, more preferably has a maximum absorption wavelength in the range of 720 nm to 980 nm, and more preferably has a maximum absorption wavelength in the range of 740 nm to 960 nm. In addition, the absorbance Amax/absorbance A550 of the radiation-sensitive composition of the present invention is 50 to 500, preferably 70 to 450, and more preferably 100 to 400. The absorbance condition can be achieved by any means. By adjusting the type and content of the near-infrared absorber, the absorbance condition can be better achieved.
某波長λ下的吸光度Aλ可藉由以下的式子來定義。 The absorbance Aλ at a certain wavelength λ can be defined by the following formula.
Aλ=-log(Tλ) Aλ=-log(Tλ)
Aλ為波長λ下的吸光度,Tλ為波長λ下的透過率。 Aλ is the absorbance at the wavelength λ, and Tλ is the transmittance at the wavelength λ.
本發明中,吸光度的值較佳為使用感放射線性組成物而製造的膜中的值。吸光度可使用先前公知的分光光度計而測定。 In the present invention, the value of absorbance is preferably a value in a film produced using a radiation-sensitive composition. The absorbance can be measured using a previously known spectrophotometer.
本發明的感放射線性組成物的較佳態樣之一為進而包含鏈轉移劑。根據該態樣,可促進感放射線性組成物的曝光時的膜表面的硬化。因此,可抑制曝光時的膜厚的減少等,從而容易形成矩形性更優異的圖案。 One of the preferable aspects of the radiation-sensitive composition of the present invention is to further include a chain transfer agent. According to this aspect, the hardening of the film surface at the time of exposure of the radiation-sensitive composition can be promoted. Therefore, it is possible to suppress the reduction of the film thickness during exposure, etc., and it is easy to form a pattern with more excellent rectangularity.
另外,本發明的感放射線性組成物的較佳態樣之一為進而包含紫外線吸收劑。根據該態樣,當介隔遮罩對本發明的感放射線性組成物進行曝光時,可提高遮罩周邊部的感放射線性組成物的硬化性。因此,容易形成矩形性更優異的圖案。 In addition, one of the preferable aspects of the radiation-sensitive composition of the present invention further contains an ultraviolet absorber. According to this aspect, when the radiation-sensitive composition of the present invention is exposed to the barrier mask, the curability of the radiation-sensitive composition at the periphery of the mask can be improved. Therefore, it is easy to form a pattern with more excellent rectangularity.
另外,本發明的感放射線性組成物的較佳態樣之一為包含肟化合物與α-胺基酮化合物作為光自由基聚合起始劑。根據該態樣,藉由併用利用能量移動的自由基產生,圖案的上部側(膜的表面側)不易變得較設計值細,可抑制過度切削的產生,從而可提高矩形性。 In addition, one of the preferred aspects of the radiation-sensitive composition of the present invention is to include an oxime compound and an α-aminoketone compound as a photo-radical polymerization initiator. According to this aspect, the combined use of energy-moving radical generation prevents the upper side of the pattern (the surface side of the film) from becoming thinner than the design value, suppresses the occurrence of overcutting, and improves the rectangularity.
以下,對本發明的感放射線性組成物的各成分進行說明。 Hereinafter, each component of the radiation-sensitive composition of the present invention will be described.
<<近紅外線吸收劑>> <<Near Infrared Absorbent>>
本發明的感放射線性組成物(以下,亦稱為本發明的組成物)含有近紅外線吸收劑。再者,本發明中,近紅外線吸收劑是指於近紅外區域(較佳為波長700nm~1300nm的範圍,進而佳為波長700nm~1000nm的範圍)具有吸收的材料。 The radiation-sensitive composition of the present invention (hereinafter, also referred to as the composition of the present invention) contains a near-infrared absorber. Furthermore, in the present invention, the near-infrared absorber refers to a material that has absorption in the near-infrared region (preferably in the range of 700 nm to 1300 nm in wavelength, and more preferably in the range of 700 nm to 1000 nm in wavelength).
近紅外線吸收劑較佳為含有在700nm~1000nm的範圍內具有最大吸收波長,最大吸收波長下的吸光度Amax、與波長550nm下的吸光度A550的比即吸光度Amax/吸光度A550為50~500的 近紅外線吸收化合物(以下,亦稱為近紅外線吸收化合物A)。另外,當使用於總固體成分中含有26質量%的近紅外線吸收化合物A的組成物來形成膜厚0.7μm的膜時,近紅外線吸收化合物A較佳為所述膜中的吸光度Amax/吸光度A550滿足50~500的分光特性的化合物。上限更佳為450以下,進而佳為400以下。下限更佳為70以上,進而佳為100以上。根據該態樣,容易製造可見透明性與紅外線遮蔽性優異的圖案。 The near-infrared absorber preferably contains one having a maximum absorption wavelength in the range of 700 nm to 1000 nm, the absorbance Amax at the maximum absorption wavelength, and the absorbance A550 at a wavelength of 550 nm, that is, the absorbance Amax/absorbance A550 of 50 to 500 Near-infrared absorbing compound (hereinafter, also referred to as near-infrared absorbing compound A). In addition, when a composition containing 26% by mass of the near-infrared absorbing compound A in the total solid content is used to form a film with a thickness of 0.7 μm, the near-infrared absorbing compound A is preferably absorbance Amax/absorbance A550 in the film A compound that satisfies the spectral characteristics of 50 to 500. The upper limit is more preferably 450 or less, and still more preferably 400 or less. The lower limit is more preferably 70 or more, and still more preferably 100 or more. According to this aspect, it is easy to produce a pattern excellent in visible transparency and infrared shielding properties.
近紅外線吸收化合物A可為顏料及染料的任一種。就容易形成矩形性優異的圖案的理由而言,較佳為顏料。另外,顏料可為有機顏料,亦可為無機顏料。就分光特性的觀點而言,較佳為有機顏料。 The near-infrared absorbing compound A may be any of pigments and dyes. Since it is easy to form a pattern excellent in rectangularity, a pigment is preferable. In addition, the pigment may be an organic pigment or an inorganic pigment. From the viewpoint of spectral characteristics, organic pigments are preferred.
再者,本發明中,所謂顏料,是指難以溶解於特定的溶劑的化合物。例如,相對於23℃的丙二醇單甲醚乙酸酯、丙二醇單甲醚、環己酮、環戊酮及二乙二醇單丁醚乙酸酯的任一溶劑,顏料的溶解度較佳為0.1質量%以下,更佳為0.01質量%以下。 Furthermore, in the present invention, the term "pigment" refers to a compound that is difficult to dissolve in a specific solvent. For example, with respect to any solvent of propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, cyclohexanone, cyclopentanone, and diethylene glycol monobutyl ether acetate at 23°C, the solubility of the pigment is preferably 0.1 % By mass or less, more preferably 0.01% by mass or less.
若近紅外線吸收化合物A為於700nm~1000nm的範圍內具有最大吸收波長、所述吸光度Amax/吸光度A550為50~500的化合物,則並無特別限定。例如可列舉:吡咯并吡咯化合物、花青化合物、方酸內鎓鹽化合物、酞青化合物、萘酞青化合物、苝化合物、部花青化合物、克酮鎓化合物、氧雜菁化合物、二亞銨化合物、二硫醇化合物、三芳基甲烷化合物、吡咯亞甲基化合物、偶氮甲鹼化合物、蒽醌化合物及二苯并呋喃酮化合物等。其 中,較佳為吡咯并吡咯化合物、花青化合物、方酸內鎓鹽化合物、酞青化合物、萘酞青化合物及苝化合物,更佳為吡咯并吡咯化合物、花青化合物及方酸內鎓鹽化合物,進而佳為吡咯并吡咯化合物。 If the near-infrared absorbing compound A is a compound having a maximum absorption wavelength in the range of 700 nm to 1000 nm, and the absorbance Amax/absorbance A550 is 50 to 500, it is not particularly limited. Examples include: pyrrolopyrrole compounds, cyanine compounds, squaraine compounds, phthalocyanine compounds, naphthalocyanine compounds, perylene compounds, merocyanine compounds, croconium compounds, oxonine compounds, diiminium Compounds, dithiol compounds, triarylmethane compounds, pyrromethene compounds, azomethine compounds, anthraquinone compounds, dibenzofuranone compounds, etc. That Among them, pyrrolopyrrole compounds, cyanine compounds, squaraine compounds, phthalocyanine compounds, naphthalocyanine compounds, and perylene compounds are preferred, and pyrrolopyrrole compounds, cyanine compounds, and squaraine compounds are more preferred. The compound is more preferably a pyrrolopyrrole compound.
另外,近紅外線吸收化合物A亦可使用IRA828、IRA842、IRA848、IRA850、IRA851、IRA866、IRA870、IRA884(依西頓(Exiton)公司製造),SDO-C33(有本化學工業(股)製造),艾斯卡拉(EX color)IR-14、艾斯卡拉(EX color)IR-10A、艾斯卡拉(EX color)TX-EX-801B、艾斯卡拉(EX color)TX-EX-805K、艾斯卡拉(EX color)TX-EX-815K(日本觸媒(股)製造),詩格瑙斯(Shigenox)NIA-8041、詩格瑙斯(Shigenox)NIA-8042、詩格瑙斯(Shigenox)NIA-814、詩格瑙斯(Shigenox)NIA-820、詩格瑙斯(Shigenox)NIA-839(發科路化工(Hakkol Chemical)(股)製造),依普伊特(Epolite)V-63、依普萊特(Epolight)3801、依普萊特(Epolight)3036(依普林(EPOLIN)公司製造),PRO-JET825LDI(富士軟片(Fujifilm)(股)製造),NK-3027、NKX-113、NKX-1199、SMP-363、SMP-387、SMP-388、SMP-389(林原(股)製造),YKR-3070(三井化學(股)製造)等。 In addition, IRA828, IRA842, IRA848, IRA850, IRA851, IRA866, IRA870, IRA884 (manufactured by Exiton), SDO-C33 (manufactured by Yumoto Chemical Industry Co., Ltd.) can also be used for near-infrared absorbing compound A, Escala (EX color) IR-14, Escala (EX color) IR-10A, Escala (EX color) TX-EX-801B, Escala (EX color) TX-EX-805K, ES Kara (EX color) TX-EX-815K (manufactured by Nippon Shokubai Co., Ltd.), Shigenox NIA-8041, Shigenox NIA-8042, Shigenox NIA -814, Shigenox NIA-820, Shigenox NIA-839 (manufactured by Hakkol Chemical (stock)), Epolite V-63, Epolight 3801, Epolight 3036 (manufactured by EPOLIN), PRO-JET825LDI (manufactured by Fujifilm (stock)), NK-3027, NKX-113, NKX -1199, SMP-363, SMP-387, SMP-388, SMP-389 (manufactured by Hayashibara Co., Ltd.), YKR-3070 (manufactured by Mitsui Chemicals Co., Ltd.), etc.
近紅外線吸收劑的所述近紅外線吸收化合物A的含量較佳為60質量%以上。上限可設為100質量%,亦可設為90質量%以下,抑或可設為80質量%以下。下限較佳為70質量%以上,更佳為80質量%以上,進而佳為90質量%以上。 The content of the near-infrared absorbing compound A of the near-infrared absorbing agent is preferably 60% by mass or more. The upper limit may be 100% by mass, 90% by mass or less, or 80% by mass or less. The lower limit is preferably 70% by mass or more, more preferably 80% by mass or more, and still more preferably 90% by mass or more.
近紅外線吸收劑的顏料的含量較佳為80質量%以上,更佳為90質量%以上,進而佳為95質量%以上。上限亦可設為100質量%。 The content of the pigment of the near-infrared absorber is preferably 80% by mass or more, more preferably 90% by mass or more, and still more preferably 95% by mass or more. The upper limit can also be set to 100% by mass.
相對於本發明的組成物的總固體成分,本發明的組成物中的近紅外線吸收劑的含量較佳為20質量%以上。上限較佳為60質量%以下,更佳為50質量%以下。藉由設為該範圍內,可形成具有優異的紅外線遮蔽性且矩形性優異的圖案。再者,於近紅外線吸收劑僅包含所述近紅外線吸收化合物A的情況下,近紅外線吸收劑的含量相當於近紅外線吸收化合物A的含量。另外,於近紅外線吸收劑含有近紅外線吸收化合物A與後述的其他近紅外線吸收化合物的情況下,近紅外線吸收化合物A與後述的其他近紅外線吸收化合物的合計量為近紅外線吸收劑的含量。 The content of the near-infrared absorber in the composition of the present invention is preferably 20% by mass or more with respect to the total solid content of the composition of the present invention. The upper limit is preferably 60% by mass or less, and more preferably 50% by mass or less. By setting it within this range, a pattern having excellent infrared shielding properties and excellent rectangularity can be formed. In addition, in the case where the near-infrared absorbing agent contains only the near-infrared absorbing compound A, the content of the near-infrared absorbing agent corresponds to the content of the near-infrared absorbing compound A. In addition, when the near-infrared absorbing agent contains the near-infrared absorbing compound A and another near-infrared absorbing compound described later, the total amount of the near-infrared absorbing compound A and the other near-infrared absorbing compound described later is the content of the near-infrared absorbing agent.
相對於本發明的組成物的總固體成分,本發明的組成物中的近紅外線吸收化合物A的含量較佳為20質量%以上。上限較佳為60質量%以下,更佳為50質量%以下。藉由設為該範圍內,可形成具有優異的紅外線遮蔽性且矩形性優異的圖案。 The content of the near-infrared absorbing compound A in the composition of the present invention is preferably 20% by mass or more with respect to the total solid content of the composition of the present invention. The upper limit is preferably 60% by mass or less, and more preferably 50% by mass or less. By setting it within this range, a pattern having excellent infrared shielding properties and excellent rectangularity can be formed.
(吡咯并吡咯化合物) (Pyrrolopyrrole compound)
本發明中,吡咯并吡咯化合物較佳為下述式(I)所表示的化合物。下述化合物較佳為具有所述吸光度比的化合物。 In the present invention, the pyrrolopyrrole compound is preferably a compound represented by the following formula (I). The following compounds are preferably compounds having the aforementioned absorbance ratio.
[化1]
式(I)中,A1及A2分別獨立地表示雜芳基,B1及B2分別獨立地表示-BR1R2基,R1及R2分別獨立地表示取代基,R1與R2可相互鍵結而形成環,C1及C2分別獨立地表示烷基、芳基、或雜芳基,D1及D2分別獨立地表示取代基。 In formula (I), A 1 and A 2 each independently represent a heteroaryl group, B 1 and B 2 each independently represent a -BR 1 R 2 group, R 1 and R 2 each independently represent a substituent, R 1 and R 2 may be bonded to each other to form a ring, C 1 and C 2 each independently represent an alkyl group, an aryl group, or a heteroaryl group, and D 1 and D 2 each independently represent a substituent.
式(I)中,A1及A2分別獨立地表示雜芳基。A1與A2可為相同的基,亦可為不同的基。A1與A2較佳為相同的基。 In formula (I), A 1 and A 2 each independently represent a heteroaryl group. A 1 and A 2 may be the same group or different groups. A 1 and A 2 are preferably the same group.
雜芳基較佳為單環或縮合環,且較佳為單環或縮合數為2~8的縮合環,更佳為單環或縮合數為2~4的縮合環。構成雜芳基的雜原子的個數較佳為1~3。構成雜芳基的雜原子較佳為氮原子、氧原子或硫原子。構成雜芳基的碳原子的個數較佳為3~30,更佳為3~18,進而佳為3~12,特佳為3~10。雜芳基較佳為5員環或6員環。 The heteroaryl group is preferably a monocyclic ring or a condensed ring, and is preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 8, more preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 4. The number of heteroatoms constituting the heteroaryl group is preferably 1 to 3. The hetero atom constituting the heteroaryl group is preferably a nitrogen atom, an oxygen atom or a sulfur atom. The number of carbon atoms constituting the heteroaryl group is preferably 3-30, more preferably 3-18, still more preferably 3-12, and particularly preferably 3-10. The heteroaryl group is preferably a 5-membered ring or a 6-membered ring.
雜芳基較佳為下述式(A-1)所表示的基及下述式(A-2)所表示的基。 The heteroaryl group is preferably a group represented by the following formula (A-1) and a group represented by the following formula (A-2).
[化2]
式(A-1)中,X1分別獨立地表示O、S、NRX1或CRX2RX3,RX1~RX3分別獨立地表示氫原子或取代基,R3及R4分別獨立地表示氫原子或取代基,R3與R4可相互鍵結而形成環。*表示與式(I)的鍵結位置。 In formula (A-1), X 1 each independently represents O, S, NR X1 or CR X2 R X3 , R X1 to R X3 each independently represent a hydrogen atom or a substituent, and R 3 and R 4 each independently represent A hydrogen atom or a substituent, R 3 and R 4 may be bonded to each other to form a ring. * Indicates the bonding position with formula (I).
R3、R4及RX1~RX3所表示的取代基可列舉:烷基、烯基、芳基、雜芳基、烷氧基、芳氧基、雜芳氧基、醯基、烷氧基羰基、芳氧基羰基、雜芳氧基羰基、醯氧基、胺基、醯基胺基、烷氧基羰基胺基、芳氧基羰基胺基、雜芳氧基羰基胺基、磺醯基胺基、胺磺醯基、胺甲醯基、烷硫基、芳硫基、雜芳硫基、烷基磺醯基、芳基磺醯基、雜芳基磺醯基、烷基亞磺醯基、芳基亞磺醯基、雜芳基亞磺醯基、脲基、磷酸醯胺基、巰基、磺基、羧基、硝基、羥胺酸基、亞磺酸基、肼基、亞胺基、矽烷基、羥基、鹵素原子、氰基等,較佳為烷基、芳基及鹵素原子。 The substituents represented by R 3 , R 4 and R X1 to R X3 include alkyl groups, alkenyl groups, aryl groups, heteroaryl groups, alkoxy groups, aryloxy groups, heteroaryloxy groups, acyl groups, and alkoxy groups. Carbonyl, aryloxycarbonyl, heteroaryloxycarbonyl, acyloxy, amino, acylamino, alkoxycarbonylamino, aryloxycarbonylamino, heteroaryloxycarbonylamino, sulfonamide Amino group, sulfamylsulfonyl, carbamethanyl, alkylthio, arylthio, heteroarylthio, alkylsulfonyl, arylsulfonyl, heteroarylsulfonyl, alkylsulfinyl Amino, arylsulfinyl, heteroarylsulfinyl, ureido, phosphate amide, sulfhydryl, sulfo, carboxy, nitro, hydroxylamine, sulfinate, hydrazine, imine Groups, silyl groups, hydroxyl groups, halogen atoms, cyano groups, etc., preferably alkyl groups, aryl groups, and halogen atoms.
烷基的碳數較佳為1~20,更佳為1~15,進而佳為1~8。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。烷基可具有取代基,亦可未經取代。作為取代基,可列舉所述基,例如可列舉鹵素原子、芳基等。 The carbon number of the alkyl group is preferably 1-20, more preferably 1-15, and still more preferably 1-8. The alkyl group may be any of linear, branched, and cyclic, and is preferably linear or branched. The alkyl group may have a substituent or may be unsubstituted. Examples of the substituent include the above-mentioned groups, for example, a halogen atom, an aryl group, and the like.
芳基的碳數較佳為6~30,更佳為6~20,進而佳為6~12。 芳基可具有取代基,亦可未經取代。作為取代基,可列舉所述基,例如可列舉鹵素原子、烷基等。 The carbon number of the aryl group is preferably 6-30, more preferably 6-20, and still more preferably 6-12. The aryl group may have a substituent or may be unsubstituted. Examples of the substituent include the above-mentioned groups, for example, a halogen atom, an alkyl group, and the like.
鹵素原子可列舉:氟原子、氯原子、溴原子、碘原子等。 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
R3與R4鍵結而形成的環較佳為芳香族環。於R3與R4形成環的情況下,作為式(A-1)所表示的基,可列舉下述的(A-1-1)所表示的基、(A-1-2)所表示的基等。 The ring formed by bonding R 3 and R 4 is preferably an aromatic ring. When R 3 and R 4 form a ring, the group represented by the formula (A-1) includes the group represented by the following (A-1-1) and the group represented by (A-1-2)的基等。 The base and so on.
式中,X1分別獨立地表示O、S、NRX1或CRX2RX3,RX1~RX3分別獨立地表示氫原子或取代基,R101~R109分別獨立地表示氫原子或取代基。*表示與式(I)的鍵結位置。 In the formula, X 1 each independently represents O, S, NR X1 or CR X2 R X3 , R X1 ~R X3 each independently represents a hydrogen atom or a substituent, and R 101 ~R 109 each independently represents a hydrogen atom or a substituent . * Indicates the bonding position with formula (I).
式(A-2)中,Y1~Y4分別獨立地表示N或CRY1,Y1~Y4的至少兩個為CRY1,RY1表示氫原子或取代基,鄰接的RY1彼此可相互鍵結而形成環。*表示與式(I)的鍵結位置。 In formula (A-2), Y 1 to Y 4 independently represent N or CR Y1 , at least two of Y 1 to Y 4 are CR Y1 , R Y1 represents a hydrogen atom or a substituent, and adjacent R Y1 may be mutually exclusive Bonded to each other to form a ring. * Indicates the bonding position with formula (I).
RY1所表示的取代基可列舉所述取代基,較佳為烷基、芳基及鹵素原子。烷基的碳數較佳為1~20,更佳為1~15,進而佳為 1~8。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。烷基可具有取代基,亦可未經取代。作為取代基,可列舉所述取代基,例如可列舉鹵素原子、芳基等。 The substituent represented by R Y1 includes the above-mentioned substituents, and an alkyl group, an aryl group, and a halogen atom are preferable. The carbon number of the alkyl group is preferably 1-20, more preferably 1-15, and still more preferably 1-8. The alkyl group may be any of linear, branched, and cyclic, and is preferably linear or branched. The alkyl group may have a substituent or may be unsubstituted. Examples of the substituent include the above-mentioned substituents, for example, a halogen atom, an aryl group, and the like.
芳基的碳數較佳為6~30,更佳為6~20,進而佳為6~12。芳基可具有取代基,亦可未經取代。作為取代基,可列舉所述取代基,例如可列舉鹵素原子、烷基等。 The carbon number of the aryl group is preferably 6-30, more preferably 6-20, and still more preferably 6-12. The aryl group may have a substituent or may be unsubstituted. Examples of the substituent include the above-mentioned substituents, for example, a halogen atom, an alkyl group, and the like.
鹵素原子可列舉:氟原子、氯原子、溴原子、碘原子等。 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Y1~Y4的至少兩個為CRY1,鄰接的RY1彼此可相互鍵結而形成環。鄰接的RY1彼此鍵結而形成的環較佳為芳香族環。於鄰接的RY1彼此形成環的情況下,作為式(A-2)所表示的基,可列舉下述的(A-2-1)~(A-2-5)所表示的基等。 At least two of Y 1 to Y 4 are CR Y1 , and adjacent R Y1 may be bonded to each other to form a ring. The ring formed by bonding adjacent R Y1 to each other is preferably an aromatic ring. When adjacent R Y1 form a ring with each other, the group represented by the following (A-2-1) to (A-2-5) etc. can be mentioned as a group represented by formula (A-2).
式中,R201~R227分別獨立地表示氫原子或取代基,*表示與式(I)的鍵結位置。 In the formula, R 201 to R 227 each independently represent a hydrogen atom or a substituent, and * represents a bonding position to the formula (I).
作為A1及A2的具體例,可列舉以下。以下中,Bu表示丁基。*表示與式(I)的鍵結位置。 Specific examples of A 1 and A 2 include the following. In the following, Bu means butyl. * Indicates the bonding position with formula (I).
[化6]
式(I)中,B1及B2分別獨立地表示-BR1R2基,R1及R2分別獨立地表示取代基。R1與R2可相互鍵結而形成環。作為取代基,可列舉所述A1及A2中說明的基,較佳為鹵素原子、烷基、烯基、烷氧基、芳基或雜芳基,更佳為鹵素原子、芳基或雜芳基,進而佳為芳基或雜芳基。R1與R2可為相同的基,亦可為不同的基。R1與R2較佳為相同的基。另外,B1與B2可為相同的基,亦可為不同的基。B1與B2較佳為相同的基。 In formula (I), B 1 and B 2 each independently represent a -BR 1 R 2 group, and R 1 and R 2 each independently represent a substituent. R 1 and R 2 may be bonded to each other to form a ring. Examples of the substituent include the groups described in A 1 and A 2 above, and are preferably a halogen atom, an alkyl group, an alkenyl group, an alkoxy group, an aryl group, or a heteroaryl group, and more preferably a halogen atom, an aryl group, or a heteroaryl group. The heteroaryl group is more preferably an aryl group or a heteroaryl group. R 1 and R 2 may be the same group or different groups. R 1 and R 2 are preferably the same group. In addition, B 1 and B 2 may be the same group or different groups. B 1 and B 2 are preferably the same group.
鹵素原子較佳為氟原子、氯原子、溴原子、碘原子,特佳為氟原子。 The halogen atom is preferably a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom, and particularly preferably a fluorine atom.
烷基的碳數較佳為1~40。下限例如更佳為3以上。上限例如更佳為30以下,進而佳為25以下。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。 The carbon number of the alkyl group is preferably 1-40. The lower limit is more preferably 3 or more, for example. The upper limit is, for example, more preferably 30 or less, and still more preferably 25 or less. The alkyl group may be any of linear, branched, and cyclic, and is preferably linear or branched.
烯基的碳數較佳為2~40。下限例如更佳為3以上,進而佳為5以上,進一步佳為8以上,特佳為10以上。上限更佳為35以下,進而佳為30以下。烯基可為直鏈、分支、環狀的任一種。 The carbon number of the alkenyl group is preferably 2-40. The lower limit is, for example, more preferably 3 or more, still more preferably 5 or more, still more preferably 8 or more, and particularly preferably 10 or more. The upper limit is more preferably 35 or less, and still more preferably 30 or less. The alkenyl group may be any of linear, branched, and cyclic.
烷氧基的碳數較佳為1~40。下限例如更佳為3以上。上限 例如更佳為30以下,進而佳為25以下。烷氧基可為直鏈、分支、環狀的任一種。 The carbon number of the alkoxy group is preferably 1-40. The lower limit is more preferably 3 or more, for example. Upper limit For example, it is more preferably 30 or less, and still more preferably 25 or less. The alkoxy group may be any of linear, branched, and cyclic.
芳基的碳數較佳為6~20,更佳為6~12。芳基可具有取代基,亦可未經取代。作為取代基,可列舉:烷基、烷氧基、鹵素原子等。關於該些的詳細情況,可列舉所述者。 The carbon number of the aryl group is preferably 6-20, more preferably 6-12. The aryl group may have a substituent or may be unsubstituted. As a substituent, an alkyl group, an alkoxy group, a halogen atom, etc. are mentioned. Regarding these details, the above-mentioned ones can be cited.
雜芳基可為單環亦可為多環。構成雜芳基的雜原子的個數較佳為1~3。構成雜芳基的雜原子較佳為氮原子、氧原子或硫原子。構成雜芳基的碳原子的個數較佳為3~30,更佳為3~18,進而佳為3~12,特佳為3~5。雜芳基較佳為5員環或6員環。雜芳基可具有取代基,亦可未經取代。作為取代基,可列舉:烷基、烷氧基、鹵素原子等。關於該些的詳細情況,可列舉所述者。 Heteroaryl groups may be monocyclic or polycyclic. The number of heteroatoms constituting the heteroaryl group is preferably 1 to 3. The hetero atom constituting the heteroaryl group is preferably a nitrogen atom, an oxygen atom or a sulfur atom. The number of carbon atoms constituting the heteroaryl group is preferably 3-30, more preferably 3-18, still more preferably 3-12, and particularly preferably 3-5. The heteroaryl group is preferably a 5-membered ring or a 6-membered ring. The heteroaryl group may have a substituent or may be unsubstituted. As a substituent, an alkyl group, an alkoxy group, a halogen atom, etc. are mentioned. Regarding these details, the above-mentioned ones can be cited.
-BR1R2基的R1與R2亦可相互鍵結而形成環。例如可列舉下述(B-1)~(B-4)所示的結構等。以下中,R表示取代基,Ra1~Ra4分別獨立地表示氫原子或取代基,m1~m3分別獨立地表示0~4的整數,*表示與式(I)的鍵結位置。作為R及Ra1~Ra4所表示的取代基,可列舉R1及R2中說明的取代基,較佳為鹵素原子及烷基。 R 1 and R 2 of the -BR 1 R 2 group may be bonded to each other to form a ring. For example, the structures shown in the following (B-1) to (B-4), etc. are mentioned. In the following, R represents a substituent, Ra1 to Ra4 each independently represent a hydrogen atom or a substituent, m1 to m3 each independently represent an integer of 0 to 4, and * represents a bonding position with formula (I). As the substituent groups R and R a1 ~ R a4 represented substitution described in the second group include R 1 and R, it is preferably an alkyl group and a halogen atom.
[化7]
作為B1及B2的具體例,可列舉以下。以下中,Me表示甲基,Bu表示丁基。*表示與式(I)的鍵結位置。 As specific examples of B 1 and B 2 , the following can be cited. In the following, Me represents a methyl group, and Bu represents a butyl group. * Indicates the bonding position with formula (I).
式(I)中,C1及C2分別獨立地表示烷基、芳基、或雜 芳基。C1與C2可為相同的基,亦可為不同的基。C1與C2較佳為相同的基。C1及C2較佳為分別獨立地為芳基、或雜芳基,更佳為芳基。 In formula (I), C 1 and C 2 each independently represent an alkyl group, an aryl group, or a heteroaryl group. C 1 and C 2 may be the same group or different groups. C 1 and C 2 are preferably the same group. Preferably, C 1 and C 2 are each independently an aryl group or a heteroaryl group, and more preferably an aryl group.
烷基的碳數較佳為1~40,更佳為1~30,特佳為1~25。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支,特佳為分支。 The carbon number of the alkyl group is preferably 1-40, more preferably 1-30, and particularly preferably 1-25. The alkyl group may be any of linear, branched, and cyclic, preferably linear or branched, and particularly preferably branched.
芳基較佳為碳數6~20的芳基,更佳為碳數6~12的芳基。特佳為苯基或萘基。 The aryl group is preferably an aryl group having 6 to 20 carbons, and more preferably an aryl group having 6 to 12 carbons. Particularly preferred is phenyl or naphthyl.
雜芳基可為單環亦可為多環。構成雜芳基的雜原子的個數較佳為1~3。構成雜芳基的雜原子較佳為氮原子、氧原子或硫原子。構成雜芳基的碳原子的個數較佳為3~30,更佳為3~18,進而佳為3~12。 Heteroaryl groups may be monocyclic or polycyclic. The number of heteroatoms constituting the heteroaryl group is preferably 1 to 3. The hetero atom constituting the heteroaryl group is preferably a nitrogen atom, an oxygen atom or a sulfur atom. The number of carbon atoms constituting the heteroaryl group is preferably 3-30, more preferably 3-18, and still more preferably 3-12.
所述烷基、芳基及雜芳基可具有取代基,亦可未經取代。較佳為具有取代基。 The alkyl group, aryl group, and heteroaryl group may have a substituent or may be unsubstituted. It preferably has a substituent.
作為取代基,可列舉:可包含氧原子的烴基、胺基、醯基胺基、烷氧基羰基胺基、芳氧基羰基胺基、雜芳氧基羰基胺基、磺醯基胺基、胺磺醯基、胺甲醯基、烷硫基、芳硫基、雜芳硫基、烷基磺醯基、芳基磺醯基、雜芳基磺醯基、烷基亞磺醯基、芳基亞磺醯基、雜芳基亞磺醯基、脲基、磷酸醯胺基、巰基、磺基、羧基、硝基、羥胺酸基、亞磺酸基、肼基、亞胺基、矽烷基、羥基、鹵素原子、氰基等。 Examples of the substituent include: a hydrocarbon group that may contain an oxygen atom, an amino group, an acylamino group, an alkoxycarbonylamino group, an aryloxycarbonylamino group, a heteroaryloxycarbonylamino group, a sulfonylamino group, Aminosulfonyl, carbamethanyl, alkylthio, arylthio, heteroarylthio, alkylsulfonyl, arylsulfonyl, heteroarylsulfonyl, alkylsulfinyl, aromatic Sulfinyl group, heteroaryl sulfinyl group, ureido group, phosphate amide group, sulfhydryl group, sulfo group, carboxyl group, nitro group, hydroxylamino acid group, sulfinic acid group, hydrazine group, imino group, silyl group , Hydroxyl, halogen atom, cyano group, etc.
作為鹵素原子,可列舉:氟原子、氯原子、溴原子、碘 原子等。 Examples of halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine. Atom etc.
作為烴基,可列舉:烷基、烯基、芳基等。 As a hydrocarbon group, an alkyl group, an alkenyl group, an aryl group, etc. are mentioned.
烷基的碳數較佳為1~40。下限更佳為3以上,進而佳為5以上,進一步佳為8以上,特佳為10以上。上限更佳為35以下,進而佳為30以下。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支,特佳為分支。分支的烷基的碳數較佳為3~40。下限例如更佳為5以上,進而佳為8以上,進一步佳為10以上。上限更佳為35以下,進而佳為30以下。分支的烷基的分支數例如較佳為2~10,更佳為2~8。 The carbon number of the alkyl group is preferably 1-40. The lower limit is more preferably 3 or more, still more preferably 5 or more, still more preferably 8 or more, and particularly preferably 10 or more. The upper limit is more preferably 35 or less, and still more preferably 30 or less. The alkyl group may be any of linear, branched, and cyclic, preferably linear or branched, and particularly preferably branched. The carbon number of the branched alkyl group is preferably 3-40. The lower limit is, for example, more preferably 5 or more, still more preferably 8 or more, and still more preferably 10 or more. The upper limit is more preferably 35 or less, and still more preferably 30 or less. The number of branches of the branched alkyl group is preferably 2-10, and more preferably 2-8, for example.
烯基的碳數較佳為2~40。下限例如更佳為3以上,進而佳為5以上,進一步佳為8以上,特佳為10以上。上限更佳為35以下,進而佳為30以下。烯基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支,特佳為分支。分支的烯基的碳數較佳為3~40。下限例如更佳為5以上,進而佳為8以上,進一步佳為10以上。上限更佳為35以下,進而佳為30以下。分支的烯基的分支數較佳為2~10,更佳為2~8。 The carbon number of the alkenyl group is preferably 2-40. The lower limit is, for example, more preferably 3 or more, still more preferably 5 or more, still more preferably 8 or more, and particularly preferably 10 or more. The upper limit is more preferably 35 or less, and still more preferably 30 or less. The alkenyl group may be any of linear, branched, and cyclic, preferably linear or branched, and particularly preferably branched. The carbon number of the branched alkenyl group is preferably 3-40. The lower limit is, for example, more preferably 5 or more, still more preferably 8 or more, and still more preferably 10 or more. The upper limit is more preferably 35 or less, and still more preferably 30 or less. The number of branches of the branched alkenyl group is preferably 2-10, more preferably 2-8.
芳基的碳數較佳為6~30,更佳為6~20,進而佳為6~12。 The carbon number of the aryl group is preferably 6-30, more preferably 6-20, and still more preferably 6-12.
作為包含氧原子的烴基,可列舉-L-Rx1所表示的基。 As a hydrocarbon group containing an oxygen atom, the group represented by -LR x1 is mentioned.
L表示-O-、-CO-、-COO-、-OCO-、-(ORx2)m-或-(Rx2O)m-。Rx1表示烷基、烯基或芳基。Rx2表示伸烷基或伸芳基。m表示2以上的整數,m個Rx2可相同亦可不同。 L represents -O-, -CO-, -COO-, -OCO-, -(OR x2 ) m -or -(R x2 O) m -. R x1 represents an alkyl group, an alkenyl group or an aryl group. R x2 represents an alkylene group or an arylene group. m represents an integer of 2 or more, and m pieces of R x2 may be the same or different.
L較佳為-O-、-(ORx2)m-或-(Rx2O)m-,更佳為-O-。 L is preferably -O-, -(OR x2 ) m -or -(R x2 O) m -, more preferably -O-.
Rx1所表示的烷基、烯基、芳基的含義與所述者相同,較佳範圍亦相同。Rx1較佳為烷基或烯基,更佳為烷基。 The meanings of the alkyl group, alkenyl group, and aryl group represented by R x1 are the same as those described above, and the preferred ranges are also the same. R x1 is preferably an alkyl group or an alkenyl group, more preferably an alkyl group.
Rx2所表示的伸烷基的碳數較佳為1~20,更佳為1~10,進而佳為1~5。伸烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。Rx2所表示的伸芳基的碳數較佳為6~20,更佳為6~12。Rx2較佳為伸烷基。 The number of carbon atoms in the alkylene group represented by R x2 is preferably from 1 to 20, more preferably from 1 to 10, and still more preferably from 1 to 5. The alkylene group may be linear, branched, and cyclic, and is preferably linear or branched. The carbon number of the arylene group represented by R x2 is preferably 6-20, more preferably 6-12. R x2 is preferably an alkylene group.
m表示2以上的整數,較佳為2~20,更佳為2~10。 m represents an integer of 2 or more, preferably 2-20, more preferably 2-10.
烷基、芳基及雜芳基可具有的取代基較佳為具有分支烷基結構的基。另外,取代基較佳為可包含氧原子的烴基,更佳為包含氧原子的烴基。包含氧原子的烴基較佳為-O-Rx1所表示的基。Rx1較佳為烷基或烯基,更佳為烷基,特佳為分支的烷基。即,取代基更佳為烷氧基,特佳為分支的烷氧基。藉由取代基為烷氧基,容易獲得耐熱性及耐光性優異的膜。烷氧基的碳數較佳為1~40。 下限例如更佳為3以上,進而佳為5以上,進一步佳為8以上,特佳為10以上。上限更佳為35以下,進而佳為30以下。烷氧基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支,特佳為分支。分支的烷氧基的碳數較佳為3~40。下限例如更佳為5以上,進而佳為8以上,進一步佳為10以上。上限更佳為35以下,進而佳為30以下。分支的烷氧基的分支數較佳為2~10,更佳為2~8。 The substituent that the alkyl group, aryl group, and heteroaryl group may have is preferably a group having a branched alkyl structure. In addition, the substituent is preferably a hydrocarbon group that may contain an oxygen atom, and more preferably a hydrocarbon group that contains an oxygen atom. The hydrocarbon group containing an oxygen atom is preferably a group represented by -OR x1. R x1 is preferably an alkyl group or an alkenyl group, more preferably an alkyl group, and particularly preferably a branched alkyl group. That is, the substituent is more preferably an alkoxy group, and particularly preferably a branched alkoxy group. When the substituent is an alkoxy group, it is easy to obtain a film having excellent heat resistance and light resistance. The carbon number of the alkoxy group is preferably 1-40. The lower limit is, for example, more preferably 3 or more, still more preferably 5 or more, still more preferably 8 or more, and particularly preferably 10 or more. The upper limit is more preferably 35 or less, and still more preferably 30 or less. The alkoxy group may be any of linear, branched, and cyclic, preferably linear or branched, and particularly preferably branched. The carbon number of the branched alkoxy group is preferably 3-40. The lower limit is, for example, more preferably 5 or more, still more preferably 8 or more, and still more preferably 10 or more. The upper limit is more preferably 35 or less, and still more preferably 30 or less. The number of branches of the branched alkoxy group is preferably 2-10, more preferably 2-8.
作為C1及C2的具體例,可列舉以下。以下中,Me表示甲基,Bu表示丁基。*表示與式(I)的鍵結位置。另外,亦可 較佳地使用以下的光學異構體。 As specific examples of C 1 and C 2 , the following can be cited. In the following, Me represents a methyl group, and Bu represents a butyl group. * Indicates the bonding position with formula (I). In addition, the following optical isomers can also be preferably used.
[化10]
式(I)中,D1及D2分別獨立地表示取代基。D1與D2可為相同的基,亦可為不同的基。D1與D2較佳為相同的基。 In formula (I), D 1 and D 2 each independently represent a substituent. D 1 and D 2 may be the same group or different groups. D 1 and D 2 are preferably the same group.
作為取代基,例如可列舉:烷基、烯基、芳基、雜芳基、烷氧基、芳氧基、雜芳氧基、醯基、烷氧基羰基、芳氧基羰基、雜芳氧基羰基、醯氧基、胺基、醯基胺基、烷氧基羰基胺基、芳氧基羰基胺基、雜芳氧基羰基胺基、磺醯基胺基、胺磺醯基、胺甲醯基、烷硫基、芳硫基、雜芳硫基、烷基磺醯基、芳基磺醯基、雜芳基磺醯基、烷基亞磺醯基、芳基亞磺醯基、雜芳基亞磺醯基、脲基、磷酸醯胺基、巰基、磺基、羧基、硝基、羥胺酸基、亞磺酸基、肼基、亞胺基、矽烷基、羥基、鹵素原子、氰基等。D1及D2較佳為拉電子性基。 Examples of substituents include alkyl, alkenyl, aryl, heteroaryl, alkoxy, aryloxy, heteroaryloxy, acyl, alkoxycarbonyl, aryloxycarbonyl, and heteroaryloxy. Carbonyl group, acyloxy group, amine group, acylamino group, alkoxycarbonylamino group, aryloxycarbonylamino group, heteroaryloxycarbonylamino group, sulfonylamino group, sulfamoylamino group, sulfamoyl group, carbamate Acetyl, alkylthio, arylthio, heteroarylthio, alkylsulfonyl, arylsulfonyl, heteroarylsulfonyl, alkylsulfinyl, arylsulfinyl, hetero Arylsulfinyl group, ureido group, phosphoamido group, mercapto group, sulfo group, carboxyl group, nitro group, hydroxyl amino acid group, sulfinic acid group, hydrazine group, imino group, silyl group, hydroxyl group, halogen atom, cyanide Base and so on. D 1 and D 2 are preferably electron withdrawing groups.
哈米特(Hammett)的取代基常數σp值(sigma para value)為正的取代基作為拉電子基而發揮作用。本發明中,可例示哈米特的σp值為0.2以上的取代基作為拉電子基。σp值較佳為0.25以上,更佳為0.3以上,特佳為0.35以上。上限並無特別限制,較佳為0.80以下。作為拉電子基的具體例,可列舉:氰基(0.66)、羧基(-COOH:0.45)、烷氧基羰基(例如,-COOMe:0.45)、芳氧基羰基(例如,-COOPh:0.44)、胺甲醯基(例如,-CONH2:0.36)、烷基羰基(例如,-COMe:0.50)、芳基羰基(例如,-COPh:0.43)、烷基磺醯基(例如,-SO2Me:0.72)、芳基磺醯基(例如,-SO2Ph:0.68)等。較佳為氰基、烷基羰基、烷基磺醯基及芳基磺醯基,更佳為氰基。此處,Me表示甲基,Ph表示苯基,括弧內的數值為σp值。關於哈米特的σp值,可參考日本專利特開2009-263614號公報的段落編號0024~段落編號0025,將該內容併入至本說明書中。 The substituent whose substituent constant σ p value (sigma para value) of Hammett is positive functions as an electron withdrawing group. In the present invention, a substituent having Hammett's σ p value of 0.2 or more can be exemplified as the electron withdrawing group. The σ p value is preferably 0.25 or more, more preferably 0.3 or more, and particularly preferably 0.35 or more. The upper limit is not particularly limited, but it is preferably 0.80 or less. Specific examples of electron withdrawing groups include: cyano (0.66), carboxyl (-COOH: 0.45), alkoxycarbonyl (for example, -COOMe: 0.45), and aryloxycarbonyl (for example, -COOPh: 0.44) , Carboxamide (for example, -CONH 2 : 0.36), alkylcarbonyl (for example, -COMe: 0.50), arylcarbonyl (for example, -COPh: 0.43), alkylsulfonyl (for example, -SO 2 Me: 0.72), arylsulfonyl (for example, -SO 2 Ph: 0.68), and the like. Preferred are cyano, alkylcarbonyl, alkylsulfonyl and arylsulfonyl, and more preferred is cyano. Here, Me represents a methyl group, Ph represents a phenyl group, and the value in parentheses is the σ p value. Regarding the σ p value of Hammett, reference can be made to paragraph numbers 0024 to 0025 of JP 2009-263614 A, and this content is incorporated into this specification.
作為D1及D2的具體例,可列舉以下。*表示與式(I)的鍵結位置。 As specific examples of D 1 and D 2 , the following can be cited. * Indicates the bonding position with formula (I).
吡咯并吡咯化合物較佳為下述式(II)所表示的化合物、或下述式(III)所表示的化合物。根據該態樣,容易形成紅外線遮蔽性及耐光性優異的圖案。 The pyrrolopyrrole compound is preferably a compound represented by the following formula (II) or a compound represented by the following formula (III). According to this aspect, it is easy to form a pattern excellent in infrared shielding properties and light resistance.
式(II)中,X1及X2分別獨立地表示O、S、NRX1或CRX2RX3,RX1~RX3分別獨立地表示氫原子或取代基,R3~R6分別獨立地表示氫原子或取代基,R3與R4、或R5與R6可相互鍵結而形成環,B1及B2分別獨立地表示-BR1R2基,R1及R2分別獨立地表示取代基,R1與R2可相互鍵結而形成環,C1及C2分別獨立地表示烷基、芳基、或雜芳基,D1及D2分別獨立地表示取代基。 In formula (II), X 1 and X 2 each independently represent O, S, NR X1 or CR X2 R X3 , R X1 to R X3 each independently represent a hydrogen atom or a substituent, and R 3 to R 6 each independently Represents a hydrogen atom or a substituent, R 3 and R 4 , or R 5 and R 6 may be bonded to each other to form a ring, B 1 and B 2 each independently represent a -BR 1 R 2 group, and R 1 and R 2 are each independent Represents a substituent, R 1 and R 2 may be bonded to each other to form a ring, C 1 and C 2 each independently represent an alkyl group, an aryl group, or a heteroaryl group, and D 1 and D 2 each independently represent a substituent.
式(II)的B1、B2、C1、C2、D1及D2的含義與式(I) 的B1、B2、C1、C2、D1及D2相同,較佳範圍亦相同。式(II)的X1、X2及R3~R6的含義與所述式(A-1)的X1、R3及R4相同,較佳範圍亦相同。 B of formula (II) is 1, B 2, C 1, C 2, B D 1 and D meaning as in formula (I) is 2 to 1, B 2, C 1, C 2, the same D. 1 and D 2, more The optimal range is also the same. X 1 , X 2 and R 3 to R 6 in formula (II) have the same meanings as X 1 , R 3 and R 4 in formula (A-1), and the preferred ranges are also the same.
式(III)中,Y1~Y8分別獨立地表示N或CRY1,Y1~Y4的至少兩個為CRY1,Y5~Y8的至少兩個為CRY1,RY1表示氫原子或取代基,鄰接的RY1彼此可相互鍵結而形成環,B1及B2分別獨立地表示-BR1R2基,R1及R2分別獨立地表示取代基,R1與R2可相互鍵結而形成環,C1及C2分別獨立地表示烷基、芳基、或雜芳基,D1及D2分別獨立地表示取代基。 In formula (III), Y 1 to Y 8 independently represent N or CR Y1 , at least two of Y 1 to Y 4 are CR Y1 , at least two of Y 5 to Y 8 are CR Y1 , and R Y1 represents hydrogen Atoms or substituents, adjacent R Y1 may bond to each other to form a ring, B 1 and B 2 each independently represent a -BR 1 R 2 group, R 1 and R 2 each independently represent a substituent, R 1 and R 2 may be bonded to each other to form a ring, C 1 and C 2 each independently represent an alkyl group, an aryl group, or a heteroaryl group, and D 1 and D 2 each independently represent a substituent.
式(III)的B1、B2、C1、C2、D1及D2的含義與式(I)的B1、B2、C1、C2、D1及D2相同,較佳範圍亦相同。式(III)的Y1~Y8的含義與所述式(A-2)的Y1~Y4相同,較佳範圍亦相同。 B of formula (III) is 1, B 2, C 1, C 2, B D 1 and D meaning as in formula (I) is 2 to 1, B 2, C 1, same as C 2, D 1 and D 2, more The optimal range is also the same. The meanings of Y 1 to Y 8 in the formula (III) are the same as those of Y 1 to Y 4 in the formula (A-2), and the preferred ranges are also the same.
作為吡咯并吡咯化合物的具體例,可列舉下述化合物。以下的結構式中,Ph表示苯基,Me表示甲基,Bu表示丁基。另外,作為吡咯并吡咯化合物的具體例,亦可列舉日本專利特開2009-263614號公報的段落編號0049~段落編號0058中記載的化合物,將該內容併入至本說明書中。 As specific examples of the pyrrolopyrrole compound, the following compounds can be cited. In the following structural formulas, Ph represents a phenyl group, Me represents a methyl group, and Bu represents a butyl group. In addition, as specific examples of the pyrrolopyrrole compound, the compounds described in paragraph number 0049 to paragraph number 0058 of JP 2009-263614 A can also be cited, and this content is incorporated in this specification.
[化13]
(方酸內鎓鹽化合物) (Squaraine ylide compound)
本發明中,方酸內鎓鹽化合物較佳為下述式(1)所表示的化合物。下述化合物較佳為具有所述吸光度比的化合物。 In the present invention, the squaraine ylide compound is preferably a compound represented by the following formula (1). The following compounds are preferably compounds having the aforementioned absorbance ratio.
式(1)中,A1及A2分別獨立地表示芳基、雜芳基或下述通式(2)所表示的基;
式(2)中,Z1表示形成含氮雜環的非金屬原子團,R2表示烷基、烯基或芳烷基,d表示0或1,波浪線表示與式(1)的連結鍵。 In the formula (2), Z 1 represents a non-metal atomic group forming a nitrogen-containing heterocyclic ring, R 2 represents an alkyl group, an alkenyl group or an aralkyl group, d represents 0 or 1, and a wavy line represents a bond with the formula (1).
式(1)中的A1及A2分別獨立地表示芳基、雜芳基或式(2)所表示的基,較佳為式(2)所表示的基。 A 1 and A 2 in the formula (1) each independently represent an aryl group, a heteroaryl group, or a group represented by the formula (2), and are preferably a group represented by the formula (2).
A1及A2所表示的芳基的碳數較佳為6~48,更佳為6~24,特佳為6~12。作為具體例,可列舉苯基、萘基等。 The carbon number of the aryl group represented by A 1 and A 2 is preferably 6 to 48, more preferably 6 to 24, and particularly preferably 6 to 12. As a specific example, a phenyl group, a naphthyl group, etc. are mentioned.
A1及A2所表示的雜芳基較佳為5員環或6員環。另外,雜芳基較佳為單環或縮合環,且較佳為單環或縮合數為2~8的縮合環,更佳為單環或縮合數為2~4的縮合環,進而佳為單環或縮合數為2或3的縮合環。作為雜環基中所含的雜原子,可例示氮原子、氧原子、硫原子,較佳為氮原子、硫原子。雜原子的個數較佳為1~3,更佳為1~2。具體而言可列舉自含有氮原子、氧原子及硫原子的至少一者的5員環或6員環等單環、多環芳香族環衍生的雜芳基等。 The heteroaryl group represented by A 1 and A 2 is preferably a 5-membered ring or a 6-membered ring. In addition, the heteroaryl group is preferably a monocyclic ring or a condensed ring, and is preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 8, more preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 4, and more preferably A single ring or a condensed ring with a condensation number of 2 or 3. As the hetero atom contained in the heterocyclic group, a nitrogen atom, an oxygen atom, and a sulfur atom can be exemplified, and a nitrogen atom and a sulfur atom are preferable. The number of heteroatoms is preferably 1-3, more preferably 1-2. Specifically, a heteroaryl group derived from a monocyclic or polycyclic aromatic ring such as a 5-membered ring or a 6-membered ring containing at least one of a nitrogen atom, an oxygen atom, and a sulfur atom, etc. can be cited.
芳基及雜芳基亦可具有取代基。於芳基及雜芳基具有兩個以上的取代基的情況下,多個取代基可相同亦可不同。 The aryl group and heteroaryl group may have a substituent. When the aryl group and the heteroaryl group have two or more substituents, a plurality of substituents may be the same or different.
作為取代基,可列舉:鹵素原子、氰基、硝基、烷基、烯基、炔基、芳基、雜芳基、芳烷基、-OR10、-COR11、-COOR12、-OCOR13、-NR14R15、-NHCOR16、-CONR17R18、-NHCONR19R20、-NHCOOR21、-SR22、-SO2R23、-SO2OR24、-NHSO2R25或-SO2NR26R27。R10~R27分別獨立地表示氫原子、烷基、烯基、炔基、芳基、雜芳基、或芳烷基。再者,於-COOR12的R12為氫原子的情況下(即,羧基),氫原子可解離,亦可為鹽的狀態。另外,於-SO2OR24的R24為氫原子的情況下(即,磺基),氫原子可解離,亦可為鹽的狀態。 Examples of substituents include halogen atoms, cyano groups, nitro groups, alkyl groups, alkenyl groups, alkynyl groups, aryl groups, heteroaryl groups, aralkyl groups, -OR 10 , -COR 11 , -COOR 12 , and -OCOR 13 , -NR 14 R 15 , -NHCOR 16 , -CONR 17 R 18 , -NHCONR 19 R 20 , -NHCOOR 21 , -SR 22 , -SO 2 R 23 , -SO 2 OR 24 , -NHSO 2 R 25 or -SO 2 NR 26 R 27 . R 10 to R 27 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, a heteroaryl group, or an aralkyl group. Furthermore, in the case where R 12 of -COOR 12 is a hydrogen atom (that is, a carboxyl group), the hydrogen atom may be dissociated and may be in the state of a salt. In addition, when R 24 of -SO 2 OR 24 is a hydrogen atom (that is, a sulfo group), the hydrogen atom may be dissociated or may be in the form of a salt.
作為鹵素原子,可列舉:氟原子、氯原子、溴原子、碘原子。 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
烷基的碳數較佳為1~20,更佳為1~15,進而佳為1 ~8。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。 The carbon number of the alkyl group is preferably 1-20, more preferably 1-15, and still more preferably 1 ~8. The alkyl group may be any of linear, branched, and cyclic, and is preferably linear or branched.
烯基的碳數較佳為2~20,更佳為2~12,特佳為2~8。烯基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。 The carbon number of the alkenyl group is preferably 2-20, more preferably 2-12, particularly preferably 2-8. The alkenyl group may be any of linear, branched, and cyclic, and is preferably linear or branched.
炔基的碳數較佳為2~40,更佳為2~30,特佳為2~25。炔基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。 The carbon number of the alkynyl group is preferably 2-40, more preferably 2-30, particularly preferably 2-25. The alkynyl group may be linear, branched, and cyclic, and is preferably linear or branched.
芳基的碳數較佳為6~30,更佳為6~20,進而佳為6~12。 The carbon number of the aryl group is preferably 6-30, more preferably 6-20, and still more preferably 6-12.
芳烷基的烷基部分與所述烷基相同。芳烷基的芳基部分與所述芳基相同。芳烷基的碳數較佳為7~40,更佳為7~30,進而佳為7~25。 The alkyl part of the aralkyl group is the same as the alkyl group. The aryl part of the aralkyl group is the same as the aryl group. The carbon number of the aralkyl group is preferably 7-40, more preferably 7-30, and still more preferably 7-25.
雜芳基較佳為單環或縮合環,且較佳為單環或縮合數為2~8的縮合環,更佳為單環或縮合數為2~4的縮合環。構成雜芳基的環的雜原子的個數較佳為1~3。構成雜芳基的環的雜原子較佳為氮原子、氧原子或硫原子。雜芳基較佳為5員環或6員環。構成雜芳基的環的碳原子的個數較佳為3~30,更佳為3~18,進而更佳為3~12。 The heteroaryl group is preferably a monocyclic ring or a condensed ring, and is preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 8, more preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 4. The number of heteroatoms constituting the ring of the heteroaryl group is preferably 1-3. The hetero atom constituting the ring of the heteroaryl group is preferably a nitrogen atom, an oxygen atom or a sulfur atom. The heteroaryl group is preferably a 5-membered ring or a 6-membered ring. The number of carbon atoms constituting the ring of the heteroaryl group is preferably 3-30, more preferably 3-18, and still more preferably 3-12.
烷基、烯基、炔基、芳烷基、芳基及雜芳基可具有取代基,亦可未經取代。作為取代基,可列舉所述取代基。 The alkyl group, alkenyl group, alkynyl group, aralkyl group, aryl group, and heteroaryl group may have a substituent or may be unsubstituted. Examples of the substituent include the above-mentioned substituents.
其次,對A1及A2所表示的式(2)所表示的基進行說明。 Next, the group represented by the formula (2) represented by A 1 and A 2 will be described.
式(2)中,R2表示烷基、烯基或芳烷基,較佳為烷基。 In the formula (2), R 2 represents an alkyl group, an alkenyl group or an aralkyl group, preferably an alkyl group.
烷基的碳數較佳為1~30,更佳為1~20,進而佳為1~12,特佳為2~8。 The carbon number of the alkyl group is preferably 1-30, more preferably 1-20, still more preferably 1-12, particularly preferably 2-8.
烯基的碳數較佳為2~30,更佳為2~20,進而佳為2~12。 The carbon number of the alkenyl group is preferably 2-30, more preferably 2-20, and still more preferably 2-12.
烷基及烯基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。 The alkyl group and the alkenyl group may be linear, branched, and cyclic, and are preferably linear or branched.
芳烷基的碳數較佳為7~30,更佳為7~20。 The carbon number of the aralkyl group is preferably 7-30, more preferably 7-20.
式(2)中,由Z1形成的含氮雜環較佳為5員環或6員環。另外,含氮雜環較佳為單環或縮合環,且較佳為單環或縮合數為2~8的縮合環,更佳為單環或縮合數為2~4的縮合環,進而更佳為縮合數為2或3的縮合環。含氮雜環除氮原子以外亦可包含硫原子。另外,含氮雜環亦可具有取代基。作為取代基,可列舉所述取代基。例如,較佳為鹵素原子、烷基、羥基、胺基、醯基胺基,更佳為鹵素原子及烷基。鹵素原子較佳為氯原子。烷基的碳數較佳為1~30,更佳為1~20,進而佳為1~12。烷基較佳為直鏈或分支。 In formula (2), the nitrogen-containing heterocyclic ring formed by Z 1 is preferably a 5-membered ring or a 6-membered ring. In addition, the nitrogen-containing heterocyclic ring is preferably a monocyclic ring or a condensed ring, and is preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 8, more preferably a monocyclic ring or a condensed ring with a condensation number of 2 to 4, and still more Preferred is a condensed ring having a condensation number of 2 or 3. The nitrogen-containing heterocyclic ring may contain a sulfur atom in addition to the nitrogen atom. In addition, the nitrogen-containing heterocyclic ring may have a substituent. Examples of the substituent include the above-mentioned substituents. For example, a halogen atom, an alkyl group, a hydroxyl group, an amino group, and an acylamino group are preferable, and a halogen atom and an alkyl group are more preferable. The halogen atom is preferably a chlorine atom. The carbon number of the alkyl group is preferably 1-30, more preferably 1-20, and still more preferably 1-12. The alkyl group is preferably linear or branched.
式(2)所表示的基較佳為下述式(3)或式(4)所表示的基。 The group represented by the formula (2) is preferably a group represented by the following formula (3) or (4).
[化21]
式(3)及式(4)中,R11表示烷基、烯基或芳烷基,R12表示取代基,於m為2以上的情況下,R12彼此可連結而形成環,X表示氮原子、或CR13R14,R13及R14分別獨立地表示氫原子或取代基,m表示0~4的整數,波浪線表示與式(1)的連結鍵。 In formulas (3) and (4), R 11 represents an alkyl group, an alkenyl group or an aralkyl group, R 12 represents a substituent, and when m is 2 or more, R 12 can be linked to each other to form a ring, and X represents Nitrogen atom or CR 13 R 14 , R 13 and R 14 each independently represent a hydrogen atom or a substituent, m represents an integer of 0 to 4, and a wavy line represents a bond with formula (1).
式(3)及式(4)中的R11的含義與式(2)中的R2相同,較佳範圍亦相同。 The meaning of R 11 in formula (3) and formula (4) is the same as that of R 2 in formula (2), and the preferred range is also the same.
式(3)及式(4)中的R12表示取代基。作為取代基,可列舉所述式(1)中說明的取代基。例如,較佳為鹵素原子、烷基、羥基、胺基、醯基胺基,更佳為鹵素原子、烷基。鹵素原子較佳為氯原子。烷基的碳數較佳為1~30,更佳為1~20,進而佳為1~12。烷基較佳為直鏈或分支。 R 12 in formula (3) and formula (4) represents a substituent. As a substituent, the substituent demonstrated in the said formula (1) is mentioned. For example, a halogen atom, an alkyl group, a hydroxyl group, an amino group, and an acylamino group are preferable, and a halogen atom and an alkyl group are more preferable. The halogen atom is preferably a chlorine atom. The carbon number of the alkyl group is preferably 1-30, more preferably 1-20, and still more preferably 1-12. The alkyl group is preferably linear or branched.
於m為2以上的情況下,R12彼此可連結而形成環。作為環,可列舉脂環(非芳香性的烴環)、芳香環、雜環等。環可為單環,亦可為多環。作為取代基彼此連結而形成環時的連結基,可列舉 選自由-CO-、-O-、-NH-、二價脂肪族基、二價芳香族基、二價不飽和鏈式烴基及該些的組合所組成的群組中的二價連結基。例如,較佳為R12彼此連結而形成苯環。 When m is 2 or more, R 12 can be connected to each other to form a ring. Examples of the ring include an alicyclic ring (non-aromatic hydrocarbon ring), aromatic ring, heterocyclic ring, and the like. The ring can be a single ring or multiple rings. As the linking group when the substituents are connected to each other to form a ring, there may be selected from -CO-, -O-, -NH-, a divalent aliphatic group, a divalent aromatic group, a divalent unsaturated chain hydrocarbon group, and the The divalent linking group in the group formed by the combination of these. For example, it is preferable that R 12 are connected to each other to form a benzene ring.
式(3)中的X表示氮原子、或CR13R14,R13及R14分別獨立地表示氫原子或取代基。作為取代基,可列舉所述式(1)中說明的取代基。例如可列舉烷基等。烷基的碳數較佳為1~20,更佳為1~10,進而佳為1~5,特佳為1~3,最佳為1。烷基較佳為直鏈或分支,特佳為直鏈。 X in the formula (3) represents a nitrogen atom or CR 13 R 14 , and R 13 and R 14 each independently represent a hydrogen atom or a substituent. As a substituent, the substituent demonstrated in the said formula (1) is mentioned. For example, an alkyl group etc. can be mentioned. The carbon number of the alkyl group is preferably from 1 to 20, more preferably from 1 to 10, further preferably from 1 to 5, particularly preferably from 1 to 3, and most preferably from 1. The alkyl group is preferably linear or branched, particularly preferably linear.
m表示0~4的整數,較佳為0~2。 m represents an integer of 0-4, preferably 0-2.
再者,式(1)中,陽離子如以下般非定域化地存在。 In addition, in formula (1), cations exist in a non-localized manner as follows.
方酸內鎓鹽染料較佳為下述式(5)所表示的化合物。 The squaraine ylide dye is preferably a compound represented by the following formula (5).
環A及環B分別獨立地表示芳香環或雜芳香環,XA及XB分別獨立地表示取代基,GA及GB分別獨立地表示取代基,kA表示0~nA的整數,kB表示0~nB的整數,nA及nB分別表示可取代於環A或環B的最大整數,XA與GA、XB與GB可相互鍵結而形成環,於GA及GB分別存在多個的情況下,亦可相互鍵結而形成環結構。 Rings A and B each independently represent an aromatic ring or a heteroaromatic ring, X A and X B each independently represent a substituent group, G A and G B independently represents a substituent group, kA represents 0 to an integer of nA, kB represents An integer from 0 to nB, nA and nB respectively represent the largest integers that can be substituted in ring A or ring B. X A and G A , X B and G B can be bonded to each other to form a ring, which exists in G A and G B respectively In the case of a plurality of them, they may be bonded to each other to form a ring structure.
GA及GB分別獨立地表示取代基。作為取代基,可列舉所述式(1)中說明的取代基。 G A and G B independently represents a substituent group. As a substituent, the substituent demonstrated in the said formula (1) is mentioned.
XA及XB分別獨立地表示取代基。取代基可列舉所述式(1)中說明的取代基,較佳為具有活性氫的基,更佳為-OH、-SH、-COOH、-SO3H、-NRX1RX2、-NHCORX1、-CONRX1RX2、-NHCONRX1RX2、-NHCOORX1、-NHSO2RX1、-B(OH)2及-PO(OH)2,進而佳為-OH、-SH及-NRX1RX2。 X A and X B each independently represent a substituent. Examples of the substituent include the substituents described in the formula (1), preferably having active hydrogen, more preferably -OH, -SH, -COOH, -SO 3 H, -NR X1 R X2 , -NHCOR X1 , -CONR X1 R X2 , -NHCONR X1 R X2 , -NHCOOR X1 , -NHSO 2 R X1 , -B(OH) 2 and -PO(OH) 2 , more preferably -OH, -SH and -NR X1 R X2 .
RX1及RX2分別獨立地表示氫原子或取代基。作為取代基,可列舉:烷基、烯基、炔基、芳基、或雜芳基,較佳為烷基。烷基較佳為直鏈或分支。關於烷基、烯基、炔基、芳基及雜芳基的詳細情況,與所述取代基一欄中說明的範圍相同。 R X1 and R X2 each independently represent a hydrogen atom or a substituent. Examples of the substituent include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, or a heteroaryl group, and an alkyl group is preferred. The alkyl group is preferably linear or branched. The details of the alkyl group, alkenyl group, alkynyl group, aryl group, and heteroaryl group are the same as those described in the column of the substituent.
環A及環B分別獨立地表示芳香環或雜芳香環。 Ring A and ring B each independently represent an aromatic ring or a heteroaromatic ring.
芳香環及雜芳香環可為單環,亦可為縮合環。 The aromatic ring and heteroaromatic ring may be a single ring or a condensed ring.
作為芳香環及雜芳香環的具體例,可列舉:苯環、萘環、戊搭烯環、茚環、薁環、庚搭烯環、苯并二茚環、苝環、稠五苯環、 苊萘(acenaphthene)環、菲環、蒽環、稠四苯環、環、三伸苯環、茀環、聯苯環、吡咯環、呋喃環、噻吩環、咪唑環、噁唑環、噻唑環、吡啶環、吡嗪環、嘧啶環、噠嗪環、吲哚嗪環、吲哚環、苯并呋喃環、苯并噻吩環、異苯并呋喃環、喹嗪環、喹啉環、酞嗪環、萘啶環、喹噁啉環、喹噁唑啉環、異喹啉環、咔唑環、啡啶環、吖啶環、啡啉環、噻蒽環、苯并哌喃環、呫噸環、啡噁噻環、啡噻嗪環及啡嗪環,較佳為苯環或萘環。 Specific examples of aromatic rings and heteroaromatic rings include benzene ring, naphthalene ring, pentene ring, indene ring, azulene ring, heptene ring, benzobiindene ring, perylene ring, fused pentabenzene ring, Acenaphthene ring, phenanthrene ring, anthracene ring, fused tetraphenyl ring, Ring, trimethylene ring, pyridine ring, biphenyl ring, pyrrole ring, furan ring, thiophene ring, imidazole ring, oxazole ring, thiazole ring, pyridine ring, pyrazine ring, pyrimidine ring, pyridazine ring, indoleazine Ring, indole ring, benzofuran ring, benzothiophene ring, isobenzofuran ring, quinazine ring, quinoline ring, phthalazine ring, naphthyridine ring, quinoxaline ring, quinoxazoline ring, iso Quinoline ring, carbazole ring, phenanthridine ring, acridine ring, phenanthroline ring, thianthracene ring, benzopyran ring, xanthene ring, phenoxathi ring, phenanthrazine ring and phenanthrazine ring, preferably It is a benzene ring or a naphthalene ring.
芳香族環可未經取代,亦可具有取代基。作為取代基,可列舉所述式(1)中說明的取代基。 The aromatic ring may be unsubstituted or may have a substituent. As a substituent, the substituent demonstrated in the said formula (1) is mentioned.
XA與GA、XB與GB可相互鍵結而形成環,於GA及GB分別存在多個的情況下,亦可相互鍵結而形成環。 X A and G A, X B and G B may be bonded to each other to form a ring to form a ring, G A and G B in the case where there are a plurality of, may be bonded to each other.
環較佳為5員環或6員環。環可為單環,亦可為多環。 The ring is preferably a 5-membered ring or a 6-membered ring. The ring can be a single ring or multiple rings.
於XA與GA、XB與GB、GA彼此或GB彼此鍵結而形成環的情況下,該些可直接鍵結而形成環,亦可經由選自由伸烷基、-CO-、-O-、-NH-、-BR-及該些的組合所組成的群組中的二價連結基鍵結而形成環。較佳為XA與GA、XB與GB、GA彼此或GB彼此經由-BR-鍵結而形成環。 When X A and G A , X B and G B , G A or G B are bonded to each other to form a ring, these may be directly bonded to form a ring, or may be selected from alkylene, -CO The divalent linking group in the group consisting of -, -O-, -NH-, -BR- and combinations of these bonds to form a ring. Preferably, X A and G A , X B and G B , G A or G B are bonded to each other via -BR- to form a ring.
R表示氫原子或取代基。作為取代基,可列舉所述式(1)中說明的取代基,較佳為烷基或芳基。 R represents a hydrogen atom or a substituent. Examples of the substituent include the substituents described in the above formula (1), and an alkyl group or an aryl group is preferred.
kA表示0~nA的整數,kB表示0~nB的整數,nA表示可取代於A環的最大整數,nB表示可取代於B環的最大整數。 kA represents an integer from 0 to nA, kB represents an integer from 0 to nB, nA represents the largest integer that can be substituted for the A ring, and nB represents the largest integer that can be substituted for the B ring.
kA及kB較佳為分別獨立地為0~4,更佳為0~2,特佳為0 ~1。 kA and kB are preferably 0-4 independently of each other, more preferably 0-2, particularly preferably 0 ~1.
作為方酸內鎓鹽染料的一實施形態,可列舉下述式(6)所表示的化合物。該化合物的耐熱性優異。 As an embodiment of the squarylium ylide dye, a compound represented by the following formula (6) can be cited. The compound has excellent heat resistance.
式中,R1及R2分別獨立地表示取代基,R3及R4分別獨立地表示氫原子、或烷基,X1及X2分別獨立地表示-O-、或-N(R5)-,R5表示氫原子、烷基、芳基或雜芳基,Y1~Y4分別獨立地表示取代基,Y1與Y2、及Y3與Y4亦可相互鍵結而形成環,Y1~Y4於分別具有多個的情況下,亦可相互鍵結而形成環,p及s分別獨立地表示0~3的整數,q及r分別獨立地表示0~2的整數。 In the formula, R 1 and R 2 each independently represent a substituent, R 3 and R 4 each independently represent a hydrogen atom or an alkyl group, and X 1 and X 2 each independently represent -O- or -N (R 5 )-, R 5 represents a hydrogen atom, an alkyl group, an aryl group or a heteroaryl group, Y 1 to Y 4 each independently represent a substituent, and Y 1 and Y 2 , and Y 3 and Y 4 can also be formed by bonding to each other Ring, Y 1 ~ Y 4 may be bonded to each other to form a ring when there are multiple, respectively, p and s each independently represent an integer from 0 to 3, and q and r each independently represent an integer from 0 to 2 .
R1、R2、Y1~Y4所表示的取代基可列舉所述式(1)中說明的取代基。 Examples of the substituents represented by R 1 , R 2 , and Y 1 to Y 4 include the substituents described in the above formula (1).
R3及R4較佳為分別獨立地為氫原子、甲基或乙基,更佳為氫原子或甲基,特佳為氫原子。 R 3 and R 4 are preferably each independently a hydrogen atom, a methyl group or an ethyl group, more preferably a hydrogen atom or a methyl group, and particularly preferably a hydrogen atom.
X1及X2分別獨立地表示-O-、或-N(R5)-。X1與X2可相同亦可不同,較佳為相同。 X 1 and X 2 each independently represent -O- or -N(R 5 )-. X 1 and X 2 may be the same or different, and are preferably the same.
R5表示氫原子、烷基、芳基或雜芳基。 R 5 represents a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group.
R5較佳為氫原子、烷基或芳基。R5所表示的烷基、芳基及雜芳基可未經取代,亦可具有取代基。作為取代基,可列舉所述式(1)中說明的取代基。 R 5 is preferably a hydrogen atom, an alkyl group or an aryl group. The alkyl group, aryl group, and heteroaryl group represented by R 5 may be unsubstituted or may have a substituent. As a substituent, the substituent demonstrated in the said formula (1) is mentioned.
烷基的碳數較佳為1~20,更佳為1~10,進而佳為1~4,特佳為1~2。烷基可為直鏈、分支的任一種。 The carbon number of the alkyl group is preferably from 1 to 20, more preferably from 1 to 10, further preferably from 1 to 4, and particularly preferably from 1 to 2. The alkyl group may be either linear or branched.
芳基的碳數較佳為6~20,更佳為6~12。 The carbon number of the aryl group is preferably 6-20, more preferably 6-12.
雜芳基可為單環亦可為多環。構成雜芳基的環的雜原子的個數較佳為1~3。構成雜芳基的環的雜原子較佳為氮原子、氧原子或硫原子。構成雜芳基的環的碳原子的個數較佳為3~30,更佳為3~18,進而佳為3~12。 Heteroaryl groups may be monocyclic or polycyclic. The number of heteroatoms constituting the ring of the heteroaryl group is preferably 1-3. The hetero atom constituting the ring of the heteroaryl group is preferably a nitrogen atom, an oxygen atom or a sulfur atom. The number of carbon atoms constituting the ring of the heteroaryl group is preferably 3-30, more preferably 3-18, and still more preferably 3-12.
作為方酸內鎓鹽化合物的具體例,可列舉以下所示的化合物。另外,可列舉日本專利特開2011-208101號公報的段落編號0044~段落編號0049中記載的化合物,將該內容併入至本說明書中。 As a specific example of a squarylium ylide compound, the compound shown below can be mentioned. In addition, the compounds described in paragraph number 044 to paragraph number 0049 of JP 2011-208101 A can be cited, and the content is incorporated in this specification.
[化25]
(花青化合物) (Cyanine compound)
本發明中,花青化合物較佳為下述式(C)所表示的化合物。下述化合物較佳為具有所述吸光度比的化合物。 In the present invention, the cyanine compound is preferably a compound represented by the following formula (C). The following compounds are preferably compounds having the aforementioned absorbance ratio.
式(C)[化26]
式(C)中,Z1及Z2分別獨立地為形成可縮環的5員或6員的含氮雜環的非金屬原子團,R101及R102分別獨立地表示烷基、烯基、炔基、芳烷基或芳基,L1表示具有奇數個次甲基的次甲基鏈,a及b分別獨立地為0或1,於a為0的情況下,碳原子與氮原子藉由雙鍵而鍵結,於b為0的情況下,碳原子與氮原子藉由單鍵而鍵結,於式中的Cy所表示的部位為陽離子部的情況下,X1表示陰離子,c表示用以取得電荷的平衡而所需的個數,於式中的Cy所表示的部位為陰離子部的情況下,X1表示陽離子,c表示用以取得電荷的平衡而所需的個數,於式中的Cy所表示的部位的電荷在分子內中和的情況下,c為0。 In the formula (C), Z 1 and Z 2 are each independently a non-metallic atomic group forming a 5-membered or 6-membered nitrogen-containing heterocyclic ring that forms a condensable ring, and R 101 and R 102 each independently represent an alkyl group, an alkenyl group, Alkynyl, aralkyl, or aryl, L 1 represents a methine chain with an odd number of methine groups, a and b are each independently 0 or 1, and when a is 0, the carbon atom and the nitrogen atom It is bonded by a double bond. When b is 0, the carbon atom and the nitrogen atom are bonded by a single bond. When the part represented by Cy in the formula is a cation part, X 1 represents an anion, and c It represents the number required to balance the charge. In the case where the part represented by Cy in the formula is the anion part, X 1 represents a cation, and c represents the number required to balance the charge. When the electric charge at the part represented by Cy in the formula is neutralized in the molecule, c is zero.
式(C)中,Z1及Z2分別獨立地表示形成可縮環的5員或6員的含氮雜環的非金屬原子團。於含氮雜環中,其他雜環、芳香族環或脂肪族環亦可進行縮合。含氮雜環較佳為5員環。進 而佳為於5員的含氮雜環上縮合有苯環或萘環的結構。作為含氮雜環的具體例,可列舉:噁唑環、異噁唑環、苯并噁唑環、萘并噁唑環、噁唑并咔唑環、噁唑并二苯并呋喃環、噻唑環、苯并噻唑環、萘并噻唑環、假吲哚環、苯并假吲哚環、咪唑環、苯并咪唑環、萘并咪唑環、喹啉環、吡啶環、吡咯并吡啶環、氟吡咯環、吲哚嗪環、咪唑并喹噁啉環、喹噁啉環等,較佳為喹啉環、假吲哚環、苯并假吲哚環、苯并噁唑環、苯并噻唑環、苯并咪唑環,特佳為假吲哚環、苯并噻唑環、苯并咪唑環。含氮雜環及縮合於其的環可具有取代基。作為取代基,可列舉式(1)中說明的取代基。 In the formula (C), Z 1 and Z 2 each independently represent a non-metal atomic group forming a 5-membered or 6-membered nitrogen-containing heterocyclic ring that forms a condensable ring. In the nitrogen-containing heterocycle, other heterocycles, aromatic rings or aliphatic rings may also be condensed. The nitrogen-containing heterocyclic ring is preferably a 5-membered ring. Furthermore, a structure in which a benzene ring or a naphthalene ring is condensed to a 5-membered nitrogen-containing heterocyclic ring is preferable. Specific examples of nitrogen-containing heterocycles include: oxazole ring, isoxazole ring, benzoxazole ring, naphthoxazole ring, oxazocarbazole ring, oxazolodibenzofuran ring, thiazole Ring, benzothiazole ring, naphthiazole ring, indole ring, benzoindole ring, imidazole ring, benzimidazole ring, naphthimidazole ring, quinoline ring, pyridine ring, pyrrolopyridine ring, fluorine Pyrrole ring, indoleazine ring, imidazoquinoxaline ring, quinoxaline ring, etc., preferably quinoline ring, indole ring, benzoindole ring, benzoxazole ring, benzothiazole ring , Benzimidazole ring, particularly preferably indole ring, benzothiazole ring, and benzimidazole ring. The nitrogen-containing heterocyclic ring and the ring condensed thereon may have a substituent. As a substituent, the substituent demonstrated in Formula (1) can be mentioned.
式(C)中,R101及R102分別獨立地表示烷基、烯基、炔基、芳烷基或芳基。 In formula (C), R 101 and R 102 each independently represent an alkyl group, an alkenyl group, an alkynyl group, an aralkyl group, or an aryl group.
烷基的碳數較佳為1~20,進而佳為1~12,特佳為1~8。烷基可為直鏈、分支、環狀的任一種。 The carbon number of the alkyl group is preferably 1-20, more preferably 1-12, and particularly preferably 1-8. The alkyl group may be any of linear, branched, and cyclic.
烯基的碳數較佳為2~20,進而佳為2~12,特佳為2~8。烯基可為直鏈、分支、環狀的任一種。 The carbon number of the alkenyl group is preferably 2-20, more preferably 2-12, particularly preferably 2-8. The alkenyl group may be any of linear, branched, and cyclic.
炔基的碳數較佳為2~20,進而佳為2~12,特佳為2~8。炔基可為直鏈、分支、環狀的任一種。 The carbon number of the alkynyl group is preferably 2-20, more preferably 2-12, and particularly preferably 2-8. The alkynyl group may be any of linear, branched, and cyclic.
芳基的碳數較佳為6~25,進而佳為6~15,最佳為6~10。芳基可未經取代,亦可具有取代基。 The carbon number of the aryl group is preferably 6-25, more preferably 6-15, most preferably 6-10. The aryl group may be unsubstituted or may have a substituent.
芳烷基的烷基部分與所述烷基相同。芳烷基的芳基部分與所述芳基相同。芳烷基的碳數較佳為7~40,更佳為7~30,進而佳 為7~25。 The alkyl part of the aralkyl group is the same as the alkyl group. The aryl part of the aralkyl group is the same as the aryl group. The carbon number of the aralkyl group is preferably 7-40, more preferably 7-30, and still more preferably It is 7~25.
烷基、烯基、炔基、芳烷基及芳基可具有取代基,亦可未經取代。作為取代基,可列舉:鹵素原子、羥基、羧基、磺基、烷氧基、胺基等,較佳為羧基及磺基,特佳為磺基。羧基及磺基的氫原子可解離,亦可為鹽的狀態。 The alkyl group, alkenyl group, alkynyl group, aralkyl group, and aryl group may have a substituent or may be unsubstituted. As a substituent, a halogen atom, a hydroxyl group, a carboxyl group, a sulfo group, an alkoxy group, an amino group, etc. are mentioned, A carboxyl group and a sulfo group are preferable, and a sulfo group is especially preferable. The hydrogen atoms of the carboxyl group and the sulfo group may be dissociated, or may be in the form of a salt.
式(C)中,L1表示具有奇數個次甲基的次甲基鏈。L1較佳為具有3個、5個或7個次甲基的次甲基鏈。 In formula (C), L 1 represents a methine chain having an odd number of methine groups. L 1 is preferably a methine chain having 3, 5 or 7 methine groups.
次甲基可具有取代基。具有取代基的次甲基較佳為中央的(間位的)次甲基。作為取代基的具體例,可列舉Z1及Z2的含氮雜環可具有的取代基、及下述式(a)所表示的基等。另外,次甲基鏈的兩個取代基亦可鍵結而形成5員環或6員環。 The methine group may have a substituent. The substituted methine group is preferably a central (meta) methine group. As a specific example of a substituent, the substituent which the nitrogen-containing heterocyclic ring of Z 1 and Z 2 may have, the group represented by following formula (a), etc. are mentioned. In addition, the two substituents of the methine chain may be bonded to form a 5-membered ring or a 6-membered ring.
式(a)中,*表示與次甲基鏈的連結部,A1表示-O-。 In the formula (a), * represents a connection part with a methine chain, and A 1 represents -O-.
式(C)中,a及b分別獨立地為0或1。於a為0的情況下,碳原子與氮原子藉由雙鍵而鍵結,於b為0的情況下,碳原子與氮原子藉由單鍵而鍵結。a及b較佳為均為0。再者,於a及b均為0的情況下,式(C)如以下般表示。 In formula (C), a and b are independently 0 or 1, respectively. When a is 0, the carbon atom and the nitrogen atom are bonded by a double bond, and when b is 0, the carbon atom and the nitrogen atom are bonded by a single bond. Both a and b are preferably 0. In addition, when both a and b are 0, the formula (C) is expressed as follows.
式(C)中,於式中的Cy所表示的部位為陽離子部的情況下,X1表示陰離子,c表示用以取得電荷的平衡而所需的個數。作為陰離子的例子,可列舉:鹵化物離子(Cl-、Br-、I-)、對甲苯磺酸根離子、乙基硫酸根離子、PF6 -、BF4 -、ClO4 -、三(鹵代烷基磺醯基)甲基化物陰離子(例如,(CF3SO2)3C-)、二(鹵代烷基磺醯基)醯亞胺陰離子(例如(CF3SO2)2N-)、四氰基硼酸鹽陰離子等。 In the formula (C), when the part represented by Cy in the formula is a cationic part, X 1 represents an anion, and c represents the number required to balance the charges. Examples of the anions include: halide ions (Cl -, Br -, I -), p-toluenesulfonate ion, ethyl sulfate ion, PF 6 -, BF 4 - , ClO 4 -, tris (haloalkyl sulfo acyl) methide anion (e.g., (CF 3 SO 2) 3 C -), bis (sulfo-haloalkyl acyl) acyl imide anion (e.g. (CF 3 SO 2) 2 N -), tetracyanoquinodimethane Borate anions and so on.
式(C)中,於式中的Cy所表示的部位為陰離子部的情況下,X1表示陽離子,c表示用以取得電荷的平衡而所需的個數。作為陽離子,可列舉:鹼金屬離子(Li+、Na+、K+等)、鹼土金屬離子(Mg2+、Ca2+、Ba2+、Sr2+等)、過渡金屬離子(Ag+、Fe2+、Co2+、Ni2+、Cu2+、Zn2+等)、其他金屬離子(Al3+等)、銨離子、三乙基銨離子、三丁基銨離子、吡啶鎓離子、四丁基銨離子、胍鎓離子、四甲基胍鎓離子、二氮雜雙環十一烯鎓離子等。陽離子較佳為Na+、K+、Mg2+、Ca2+、Zn2+、二氮雜雙環十一烯鎓離子。 In the formula (C), when the part represented by Cy in the formula is an anion part, X 1 represents a cation, and c represents the number required to balance the charges. Examples of cations include alkali metal ions (Li + , Na + , K +, etc.), alkaline earth metal ions (Mg 2+ , Ca 2+ , Ba 2+ , Sr 2+, etc.), transition metal ions (Ag + , Fe 2+ , Co 2+ , Ni 2+ , Cu 2+ , Zn 2+ etc.), other metal ions (Al 3+ etc.), ammonium ion, triethylammonium ion, tributylammonium ion, pyridinium ion , Tetrabutylammonium ion, guanidinium ion, tetramethylguanidinium ion, diazabicycloundecenium ion, etc. The cation is preferably Na + , K + , Mg 2+ , Ca 2+ , Zn 2+ , diazabicycloundecenium ion.
式(C)中,於式中的Cy所表示的部位的電荷在分子內中和的情況下,X1不存在。即,c為0。 In the formula (C), when the electric charge at the site represented by Cy in the formula is neutralized in the molecule, X 1 does not exist. That is, c is 0.
花青化合物亦較佳為下述式(C-1)~式(C-3)所表示 的化合物。 The cyanine compound is also preferably represented by the following formula (C-1) ~ formula (C-3) compound of.
式中,R1A、R2A、R1B及R2B分別獨立地表示烷基、烯基、炔基、芳烷基或芳基,L1A及L1B分別獨立地表示具有奇數個次甲基的次甲基鏈,Y1及Y2各自獨立地表示-S-、-O-、-NRX1-或-CRX2RX3-, RX1、RX2及RX3各自獨立地表示氫原子或烷基,V1A、V2A、V1B及V2B分別獨立地表示取代基,m1及m2分別獨立地表示0~4,於式中的Cy所表示的部位為陽離子部的情況下,X1表示陰離子,c表示用以取得電荷的平衡而所需的個數,於式中的Cy所表示的部位為陰離子部的情況下,X1表示陽離子,c表示用以取得電荷的平衡而所需的個數,於式中的Cy所表示的部位的電荷在分子內中和的情況下,X1不存在。 In the formula, R 1A , R 2A , R 1B and R 2B each independently represent an alkyl, alkenyl, alkynyl, aralkyl or aryl group, and L 1A and L 1B each independently represent an odd number of methine groups Methylene chain, Y 1 and Y 2 each independently represent -S-, -O-, -NR X1 -or -CR X2 R X3 -, R X1 , R X2, and R X3 each independently represent a hydrogen atom or an alkane Group, V 1A , V 2A , V 1B and V 2B each independently represent a substituent, m1 and m2 each independently represent 0 to 4, and when the part represented by Cy in the formula is a cationic part, X 1 represents Anion, c represents the number required to balance the charge. In the case where the part represented by Cy in the formula is the anion part, X 1 represents a cation, and c represents the number required to balance the charge When the electric charge at the site represented by Cy in the formula is neutralized in the molecule, X 1 does not exist.
R1A、R2A、R1B及R2B所表示的基的含義與式(C)的R101及R102中說明的烷基、烯基、炔基、芳烷基及芳基相同,較佳範圍亦相同。該些基可未經取代,亦可具有取代基。作為取代基,可列舉:鹵素原子、羥基、羧基、磺基、烷氧基、胺基等,較佳為羧基及磺基,特佳為磺基。羧基及磺基的氫原子可解離,亦可為鹽的狀態。於R1A、R2A、R1B及R2B表示烷基的情況下,更佳為直鏈的烷基。 The meanings of the groups represented by R 1A , R 2A , R 1B and R 2B are the same as the alkyl, alkenyl, alkynyl, aralkyl and aryl groups described in R 101 and R 102 of formula (C), preferably The scope is also the same. These groups may be unsubstituted or substituted. As a substituent, a halogen atom, a hydroxyl group, a carboxyl group, a sulfo group, an alkoxy group, an amine group, etc. are mentioned, A carboxyl group and a sulfo group are preferable, and a sulfo group is especially preferable. The hydrogen atoms of the carboxyl group and the sulfo group may be dissociated, or may be in the form of a salt. When R 1A , R 2A , R 1B and R 2B represent an alkyl group, it is more preferably a linear alkyl group.
Y1及Y2各自獨立地表示-S-、-O-、-NRX1-或-CRX2RX3-,較佳為-NRX1-。RX1、RX2及RX3各自獨立地表示氫原子或烷基,較佳為烷基。烷基的碳數較佳為1~10,更佳為1~5,特佳為1~3。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支,特佳為直鏈。烷基特佳為甲基或乙基。 Y 1 and Y 2 each independently represent -S-, -O-, -NR X1 -or -CR X2 R X3 -, preferably -NR X1 -. R X1 , R X2 and R X3 each independently represent a hydrogen atom or an alkyl group, and an alkyl group is preferred. The carbon number of the alkyl group is preferably from 1 to 10, more preferably from 1 to 5, and particularly preferably from 1 to 3. The alkyl group may be any of linear, branched, and cyclic, preferably linear or branched, and particularly preferably linear. The alkyl group is particularly preferably a methyl group or an ethyl group.
L1A及L1B的含義與式(C)的L1相同,較佳範圍亦相 同。 The meanings of L 1A and L 1B are the same as L 1 in formula (C), and the preferred ranges are also the same.
V1A、V2A、V1B及V2B所表示的取代基可列舉所述取代基,較佳範圍亦相同。 Examples of the substituents represented by V 1A , V 2A , V 1B and V 2B include the above-mentioned substituents, and the preferred ranges are also the same.
m1及m2分別獨立地表示0~4,較佳為0~2。 m1 and m2 each independently represent 0-4, preferably 0-2.
X1所表示的陰離子及陽離子與式(C)的X1中說明的範圍相同,較佳範圍亦相同。 Cation and the anion of formula X (C) 1 X 1 in the same range as indicated below, preferred ranges are also the same.
作為花青化合物的具體例,可列舉以下所示的化合物。另外,可列舉日本專利特開2015-172004號公報及日本專利特開2015-172102號公報中記載的化合物。 As a specific example of a cyanine compound, the compound shown below can be mentioned. In addition, the compounds described in Japanese Patent Laid-Open No. 2015-172004 and Japanese Patent Laid-Open No. 2015-172102 can be cited.
[化30]
[化31]
(其他近紅外線吸收化合物) (Other near-infrared absorbing compounds)
近紅外線吸收劑亦可進而包含所述近紅外線吸收化合物A以外的近紅外線吸收化合物(亦稱為其他近紅外線吸收化合物)。 The near-infrared absorbing agent may further include near-infrared absorbing compounds (also referred to as other near-infrared absorbing compounds) other than the near-infrared absorbing compound A.
其他近紅外線吸收化合物可為顏料,亦可為染料。就容易形成矩形性優異的圖案的理由而言,較佳為顏料。另外,顏料可為無機顏料,亦可為有機顏料。 Other near-infrared absorbing compounds may be pigments or dyes. Since it is easy to form a pattern excellent in rectangularity, a pigment is preferable. In addition, the pigment may be an inorganic pigment or an organic pigment.
作為其他近紅外線吸收化合物,例如可列舉:酞青化合物、萘酞青化合物、苝化合物、部花青化合物、克酮鎓化合物、氧雜菁化合物、二亞銨化合物、二硫醇化合物、三芳基甲烷化合物、吡咯亞甲基化合物、偶氮甲鹼化合物、蒽醌化合物及二苯并呋喃酮化合物等。作為酞青化合物,可列舉酞青氧鈦顏料等。另外,酞青化合物、萘酞青化合物、二亞銨化合物及克酮鎓化合物亦可使用日本專利特開2010-111750號公報的段落編號0010~段落編號0081中揭示的化合物,將該內容併入至本說明書中。另外,亦可使用IRA868(依西頓(Exiton)公司製造)、IRG-068(日本化藥(股)製造)等。 Examples of other near-infrared absorbing compounds include phthalocyanine compounds, naphthalocyanine compounds, perylene compounds, merocyanine compounds, crotonium compounds, oxonine compounds, diiminium compounds, dithiol compounds, and triaryl groups. Methane compounds, pyrromethene compounds, azomethine compounds, anthraquinone compounds, dibenzofuranone compounds, etc. As a phthalocyanine compound, a phthalocyanine titanyl pigment etc. are mentioned. In addition, the phthalocyanine compound, the naphthalocyanine compound, the diiminium compound, and the croconium compound can also use the compounds disclosed in paragraph number 0010 to paragraph number 0081 of JP 2010-111750 A, and this content is incorporated. To this manual. In addition, IRA868 (manufactured by Exiton), IRG-068 (manufactured by Nippon Kayaku Co., Ltd.), etc. can also be used.
另外,作為其他近紅外線吸收化合物,亦可使用無機顏料。就紅外線遮蔽性更優異的方面而言,無機顏料較佳為金屬氧化物粒子或金屬粒子。作為金屬氧化物粒子,例如可列舉:氧化銦錫(Indium Tin Oxide,ITO)粒子、氧化銻錫(Antimony Tin Oxide,ATO)粒子、氧化鋅(ZnO)粒子、摻鋁氧化鋅(Al-doped ZnO)粒子、摻氟二氧化錫(F-doped SnO2)粒子、摻鈮二氧化鈦(Nb-doped TiO2)粒子等。作為金屬粒子,例如可列舉:銀(Ag)粒子、金(Au)粒子、銅(Cu)粒子、鎳(Ni)粒子等。無機顏料的形狀並無特別限制,不限於球狀、非球狀,亦可為片狀、線 狀、管狀。 In addition, as other near-infrared absorbing compounds, inorganic pigments may also be used. In terms of more excellent infrared shielding properties, the inorganic pigment is preferably metal oxide particles or metal particles. Examples of metal oxide particles include: indium tin oxide (ITO) particles, antimony tin oxide (ATO) particles, zinc oxide (ZnO) particles, and aluminum-doped zinc oxide (Al-doped ZnO) particles. ) Particles, fluorine-doped tin dioxide (F-doped SnO 2 ) particles, niobium-doped titanium dioxide (Nb-doped TiO 2 ) particles, etc. Examples of metal particles include silver (Ag) particles, gold (Au) particles, copper (Cu) particles, nickel (Ni) particles, and the like. The shape of the inorganic pigment is not particularly limited, and is not limited to a spherical shape or a non-spherical shape, and may be a flake shape, a linear shape, or a tube shape.
另外,作為無機顏料,亦可使用氧化鎢系化合物,具體而言,較佳為下述式(W-1)所表示的氧化鎢系化合物。 In addition, as the inorganic pigment, a tungsten oxide-based compound may also be used. Specifically, a tungsten oxide-based compound represented by the following formula (W-1) is preferred.
MxWyOz...(W-1) M x W y O z . . . (W-1)
M表示金屬,W表示鎢,O表示氧。 M represents metal, W represents tungsten, and O represents oxygen.
0.001≦x/y≦1.1 2.2≦z/y≦3.0 0.001≦x/y≦1.1 2.2≦z/y≦3.0
作為M所表示的金屬,可列舉:鹼金屬、鹼土金屬、Zr、Cr、Mn、Fe、Ru、Co、Rh、Ir、Ni、Pd、Pt、Cu、Ag、Au、Zn、Cd、Al、Ga、In、Tl、Sn、Pb、Ti、Nb、V、Mo、Ta、Re、Be、Hf、Os、Bi,較佳為鹼金屬,更佳為Rb或Cs,特佳為Cs。M的金屬可為一種,亦可為兩種以上。 Examples of metals represented by M include alkali metals, alkaline earth metals, Zr, Cr, Mn, Fe, Ru, Co, Rh, Ir, Ni, Pd, Pt, Cu, Ag, Au, Zn, Cd, Al, Ga, In, Tl, Sn, Pb, Ti, Nb, V, Mo, Ta, Re, Be, Hf, Os, Bi are preferably alkali metals, more preferably Rb or Cs, particularly preferably Cs. The metal of M may be one type or two or more types.
藉由x/y為0.001以上,可充分地遮蔽紅外線,藉由x/y為1.1以下,可更可靠地避免於氧化鎢系化合物中生成雜質相。 When x/y is 0.001 or more, infrared rays can be sufficiently shielded, and when x/y is 1.1 or less, it is possible to more reliably avoid the generation of impurity phases in the tungsten oxide compound.
藉由z/y為2.2以上,可進一步提高作為材料的化學穩定性,藉由z/y為3.0以下,可充分地遮蔽紅外線。 When z/y is 2.2 or more, the chemical stability of the material can be further improved, and when z/y is 3.0 or less, infrared rays can be sufficiently shielded.
作為氧化鎢系化合物的具體例,可列舉:Cs0.33WO3、Rb0.33WO3、K0.33WO3、Ba0.33WO3等,較佳為Cs0.33WO3或 Rb0.33WO3,進而佳為Cs0.33WO3。 Specific examples of tungsten oxide compounds include: Cs 0.33 WO 3 , Rb 0.33 WO 3 , K 0.33 WO 3 , Ba 0.33 WO 3, etc., preferably Cs 0.33 WO 3 or Rb 0.33 WO 3 , and more preferably Cs 0.33 WO 3 .
氧化鎢系化合物例如可作為住友金屬礦山(股)製造的YMF-02、YMS-01A-2等鎢微粒子的分散物而獲取。 The tungsten oxide-based compound can be obtained as a dispersion of tungsten fine particles such as YMF-02 and YMS-01A-2 manufactured by Sumitomo Metal Mining Co., Ltd., for example.
無機顏料的平均粒徑較佳為800nm以下,更佳為400nm以下,進而佳為200nm以下。藉由無機顏料的平均粒徑為此種範圍,可使可見光區域中的透光性變得更可靠。就避免光散射的觀點而言,平均粒徑越小越佳,但就製造時的處理容易性等理由而言,無機顏料的平均粒徑的下限為1nm以上。 The average particle diameter of the inorganic pigment is preferably 800 nm or less, more preferably 400 nm or less, and still more preferably 200 nm or less. When the average particle diameter of the inorganic pigment is in this range, the light transmittance in the visible light region can be made more reliable. From the viewpoint of avoiding light scattering, the smaller the average particle size is, the better, but for reasons such as ease of handling during production, the lower limit of the average particle size of the inorganic pigment is 1 nm or more.
於近紅外線吸收劑含有其他近紅外線吸收化合物的情況下,相對於近紅外線吸收化合物A的100質量份,其他近紅外線吸收化合物的含量較佳為0.1質量份~80質量份,更佳為5質量份~60質量份,進而佳為10質量份~40質量份。 When the near-infrared absorbing agent contains other near-infrared absorbing compounds, the content of the other near-infrared absorbing compounds is preferably 0.1 to 80 parts by mass, more preferably 5 parts by mass relative to 100 parts by mass of the near-infrared absorbing compound A Parts to 60 parts by mass, more preferably 10 parts by mass to 40 parts by mass.
<<彩色著色劑>> <<Color Colorant>>
本發明的組成物可含有彩色著色劑。本發明中,所謂彩色著色劑,是指白色著色劑及黑色著色劑以外的著色劑。彩色著色劑較佳為於波長400nm以上且未滿650nm的範圍內具有吸收的著色劑。本發明中,彩色著色劑可為顏料,亦可為染料。 The composition of the present invention may contain a coloring agent. In the present invention, the term "color coloring agent" refers to coloring agents other than white coloring agent and black coloring agent. The coloring agent is preferably a coloring agent that has absorption in the range of 400 nm or more and less than 650 nm in wavelength. In the present invention, the coloring agent may be a pigment or a dye.
顏料較佳為有機顏料,可列舉以下者。但是,本發明中可使用的顏料並不限定於該些。 The pigment is preferably an organic pigment, and the following can be cited. However, the pigments that can be used in the present invention are not limited to these.
染料索引(Colour Index,C.I.)顏料黃(Pigment Yellow)1、C.I.顏料黃2、C.I.顏料黃3、C.I.顏料黃4、C.I.顏料黃5、C.I.顏料黃6、C.I.顏料黃10、C.I.顏料黃11、C.I.顏料黃12、C.I.顏料黃 13、C.I.顏料黃14、C.I.顏料黃15、C.I.顏料黃16、C.I.顏料黃17、C.I.顏料黃18、C.I.顏料黃20、C.I.顏料黃24、C.I.顏料黃31、C.I.顏料黃32、C.I.顏料黃34、C.I.顏料黃35、C.I.顏料黃35:1、C.I.顏料黃36、C.I.顏料黃36:1、C.I.顏料黃37、C.I.顏料黃37:1、C.I.顏料黃40、C.I.顏料黃42、C.I.顏料黃43、C.I.顏料黃53、C.I.顏料黃55、C.I.顏料黃60、C.I.顏料黃61、C.I.顏料黃62、C.I.顏料黃63、C.I.顏料黃65、C.I.顏料黃73、C.I.顏料黃74、C.I.顏料黃77、C.I.顏料黃81、C.I.顏料黃83、C.I.顏料黃86、C.I.顏料黃93、C.I.顏料黃94、C.I.顏料黃95、C.I.顏料黃97、C.I.顏料黃98、C.I.顏料黃100、C.I.顏料黃101、C.I.顏料黃104、C.I.顏料黃106、C.I.顏料黃108、C.I.顏料黃109、C.I.顏料黃110、C.I.顏料黃113、C.I.顏料黃114、C.I.顏料黃115、C.I.顏料黃116、C.I.顏料黃117、C.I.顏料黃118、C.I.顏料黃119、C.I.顏料黃120、C.I.顏料黃123、C.I.顏料黃125、C.I.顏料黃126、C.I.顏料黃127、C.I.顏料黃128、C.I.顏料黃129、C.I.顏料黃137、C.I.顏料黃138、C.I.顏料黃139、C.I.顏料黃147、C.I.顏料黃148、C.I.顏料黃150、C.I.顏料黃151、C.I.顏料黃152、C.I.顏料黃153、C.I.顏料黃154、C.I.顏料黃155、C.I.顏料黃156、C.I.顏料黃161、C.I.顏料黃162、C.I.顏料黃164、C.I.顏料黃166、C.I.顏料黃167、C.I.顏料黃168、C.I.顏料黃169、C.I.顏料黃170、C.I.顏料黃171、C.I.顏料黃172、C.I.顏料黃173、C.I.顏料黃174、C.I.顏料黃175、C.I.顏料黃176、C.I.顏料黃177、C.I.顏料黃179、C.I.顏料黃180、C.I.顏料黃181、C.I.顏料黃182、 C.I.顏料黃185、C.I.顏料黃187、C.I.顏料黃188、C.I.顏料黃193、C.I.顏料黃194、C.I.顏料黃199、C.I.顏料黃213、C.I.顏料黃214等(以上為黃色顏料),C.I.顏料橙(Pigment Orange)2、C.I.顏料橙5、C.I.顏料橙13、C.I.顏料橙16、C.I.顏料橙17:1、C.I.顏料橙31、C.I.顏料橙34、C.I.顏料橙36、C.I.顏料橙38、C.I.顏料橙43、C.I.顏料橙46、C.I.顏料橙48、C.I.顏料橙49、C.I.顏料橙51、C.I.顏料橙52、C.I.顏料橙55、C.I.顏料橙59、C.I.顏料橙60、C.I.顏料橙61、C.I.顏料橙62、C.I.顏料橙64、C.I.顏料橙71、C.I.顏料橙73等(以上為橙色顏料),C.I.顏料紅(Pigment Red)1、C.I.顏料紅2、C.I.顏料紅3、C.I.顏料紅4、C.I.顏料紅5、C.I.顏料紅6、C.I.顏料紅7、C.I.顏料紅9、C.I.顏料紅10、C.I.顏料紅14、C.I.顏料紅17、C.I.顏料紅22、C.I.顏料紅23、C.I.顏料紅31、C.I.顏料紅38、C.I.顏料紅41、C.I.顏料紅48:1、C.I.顏料紅48:2、C.I.顏料紅48:3、C.I.顏料紅48:4、C.I.顏料紅49、C.I.顏料紅49:1、C.I.顏料紅49:2、C.I.顏料紅52:1、C.I.顏料紅52:2、C.I.顏料紅53:1、C.I.顏料紅57:1、C.I.顏料紅60:1、C.I.顏料紅63:1、C.I.顏料紅66、C.I.顏料紅67、C.I.顏料紅81:1、C.I.顏料紅81:2、C.I.顏料紅81:3、C.I.顏料紅83、C.I.顏料紅88、C.I.顏料紅90、C.I.顏料紅105、C.I.顏料紅112、C.I.顏料紅119、C.I.顏料紅122、C.I.顏料紅123、C.I.顏料紅144、C.I.顏料紅146、C.I.顏料紅149、C.I.顏 料紅150、C.I.顏料紅155、C.I.顏料紅166、C.I.顏料紅168、C.I.顏料紅169、C.I.顏料紅170、C.I.顏料紅171、C.I.顏料紅172、C.I.顏料紅175、C.I.顏料紅176、C.I.顏料紅177、C.I.顏料紅178、C.I.顏料紅179、C.I.顏料紅184、C.I.顏料紅185、C.I.顏料紅187、C.I.顏料紅188、C.I.顏料紅190、C.I.顏料紅200、C.I.顏料紅202、C.I.顏料紅206、C.I.顏料紅207、C.I.顏料紅208、C.I.顏料紅209、C.I.顏料紅210、C.I.顏料紅216、C.I.顏料紅220、C.I.顏料紅224、C.I.顏料紅226、C.I.顏料紅242、C.I.顏料紅246、C.I.顏料紅254、C.I.顏料紅255、C.I.顏料紅264、C.I.顏料紅270、C.I.顏料紅272、C.I.顏料紅279等(以上為紅色顏料),C.I.顏料綠(Pigment Green)7、C.I.顏料綠10、C.I.顏料綠36、C.I.顏料綠37、C.I.顏料綠58、C.I.顏料綠59等(以上為綠色顏料),C.I.顏料紫(Pigment Violet)1、C.I.顏料紫19、C.I.顏料紫23、C.I.顏料紫27、C.I.顏料紫32、C.I.顏料紫37、C.I.顏料紫42等(以上為紫色顏料),C.I.顏料藍(Pigment Blue)1、C.I.顏料藍2、C.I.顏料藍15、C.I.顏料藍15:1、C.I.顏料藍15:2、C.I.顏料藍15:3、C.I.顏料藍15:4、C.I.顏料藍15:6、C.I.顏料藍16、C.I.顏料藍22、C.I.顏料藍60、C.I.顏料藍64、C.I.顏料藍66、C.I.顏料藍79、C.I.顏料藍80等(以上為藍色顏料)。 Dye Index (Colour Index, CI) Pigment Yellow 1, CI Pigment Yellow 2, CI Pigment Yellow 3, CI Pigment Yellow 4, CI Pigment Yellow 5, CI Pigment Yellow 6, CI Pigment Yellow 10, CI Pigment Yellow 11 , CI Pigment Yellow 12, CI Pigment Yellow 13. CI Pigment Yellow 14, CI Pigment Yellow 15, CI Pigment Yellow 16, CI Pigment Yellow 17, CI Pigment Yellow 18, CI Pigment Yellow 20, CI Pigment Yellow 24, CI Pigment Yellow 31, CI Pigment Yellow 32, CI Pigment Yellow 34. CI Pigment Yellow 35, CI Pigment Yellow 35:1, CI Pigment Yellow 36, CI Pigment Yellow 36:1, CI Pigment Yellow 37, CI Pigment Yellow 37:1, CI Pigment Yellow 40, CI Pigment Yellow 42, CI Pigment Yellow 43, CI Pigment Yellow 53, CI Pigment Yellow 55, CI Pigment Yellow 60, CI Pigment Yellow 61, CI Pigment Yellow 62, CI Pigment Yellow 63, CI Pigment Yellow 65, CI Pigment Yellow 73, CI Pigment Yellow 74, CI Pigment Yellow 77, CI Pigment Yellow 81, CI Pigment Yellow 83, CI Pigment Yellow 86, CI Pigment Yellow 93, CI Pigment Yellow 94, CI Pigment Yellow 95, CI Pigment Yellow 97, CI Pigment Yellow 98, CI Pigment Yellow 100, CI Pigment Yellow 101, CI Pigment Yellow 104, CI Pigment Yellow 106, CI Pigment Yellow 108, CI Pigment Yellow 109, CI Pigment Yellow 110, CI Pigment Yellow 113, CI Pigment Yellow 114, CI Pigment Yellow 115, CI Pigment Yellow 116, CI Pigment Yellow 117, CI Pigment Yellow 118, CI Pigment Yellow 119, CI Pigment Yellow 120, CI Pigment Yellow 123, CI Pigment Yellow 125, CI Pigment Yellow 126, CI Pigment Yellow 127, CI Pigment Yellow 128, CI Pigment Yellow 129, CI Pigment Yellow 137, CI Pigment Yellow 138, CI Pigment Yellow 139, CI Pigment Yellow 147, CI Pigment Yellow 148, CI Pigment Yellow 150, CI Pigment Yellow 151, CI Pigment Yellow 152, CI Pigment Yellow 153, CI Pigment Yellow 154, CI Pigment Yellow 155, CI Pigment Yellow 156, CI Pigment Yellow 161, CI Pigment Yellow 162, CI Pigment Yellow 164, CI Pigment Yellow 166, CI Pigment Yellow 167, CI Pigment Yellow 168, CI Pigment Yellow 169, CI Pigment Yellow 170, CI Pigment Yellow 171, CI Pigment Yellow 172, CI Pigment Yellow 173, CI Pigment Yellow 174, CI Pigment Yellow 175, CI Pigment Yellow 176, CI Pigment Yellow 177, CI Pigment Yellow 179, CI Pigment Yellow 180, CI Pigment Yellow 181, CI Pigment Yellow 182, CI Pigment Yellow 185, CI Pigment Yellow 187, CI Pigment Yellow 188, CI Pigment Yellow 193, CI Pigment Yellow 194, CI Pigment Yellow 199, CI Pigment Yellow 213, CI Pigment Yellow 214, etc. (the above are yellow pigments), CI Pigment Orange (Pigment Orange)2, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 16, CI Pigment Orange 17:1, CI Pigment Orange 31, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 48, CI Pigment Orange 49, CI Pigment Orange 51, CI Pigment Orange 52, CI Pigment Orange 55, CI Pigment Orange 59, CI Pigment Orange 60, CI Pigment Orange 61, CI Pigment Orange 62, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, etc. (the above are orange pigments), CI Pigment Red 1, CI Pigment Red 2, CI Pigment Red 3, CI Pigment Red 4, CI Pigment Red 5, CI Pigment Red 6, CI Pigment Red 7, CI Pigment Red 9, CI Pigment Red 10, CI Pigment Red 14, CI Pigment Red 17, CI Pigment Red 22, CI Pigment Red 23, CI Pigment Red 31, CI Pigment Red 38, CI Pigment Red 41, CI Pigment Red 48:1, CI Pigment Red 48: 2, CI Pigment Red 48: 3, CI Pigment Red 48: 4, CI Pigment Red 49, CI Pigment Red 49:1, CI Pigment Red 49:2, CI Pigment Red 52:1, CI Pigment Red 52:2, CI Pigment Red 53:1, CI Pigment Red 57:1, CI Pigment Red 60:1, CI Pigment Red 63:1, CI Pigment Red 66, CI Pigment Red 67, CI Pigment Red 81:1, CI Pigment Red 81: 2, CI Pigment Red 81: 3, CI Pigment Red 83, CI Pigment Red 88, CI Pigment Red 90, CI Pigment Red 105, CI Pigment Red 112, CI Pigment Red 119, CI Pigment Red 122, CI Pigment Red 123, CI Pigment Red 144, CI Pigment Red 146, CI Pigment Red 149, CI Pigment Red Material Red 150, CI Pigment Red 155, CI Pigment Red 166, CI Pigment Red 168, CI Pigment Red 169, CI Pigment Red 170, CI Pigment Red 171, CI Pigment Red 172, CI Pigment Red 175, CI Pigment Red 176, CI Pigment Red 177, CI Pigment Red 178, CI Pigment Red 179, CI Pigment Red 184, CI Pigment Red 185, CI Pigment Red 187, CI Pigment Red 188, CI Pigment Red 190, CI Pigment Red 200, CI Pigment Red 202, CI Pigment Red 206, CI Pigment Red 207, CI Pigment Red 208, CI Pigment Red 209, CI Pigment Red 210, CI Pigment Red 216, CI Pigment Red 220, CI Pigment Red 224, CI Pigment Red 226, CI Pigment Red 242, CI Pigment Red 246, CI Pigment Red 254, CI Pigment Red 255, CI Pigment Red 264, CI Pigment Red 270, CI Pigment Red 272, CI Pigment Red 279, etc. (the above are red pigments), CI Pigment Green 7. CI Pigment Green 10, CI Pigment Green 36, CI Pigment Green 37, CI Pigment Green 58, CI Pigment Green 59, etc. (the above are green pigments), CI Pigment Violet 1, CI Pigment Violet 19, CI Pigment Violet 23 , CI Pigment Violet 27, CI Pigment Violet 32, CI Pigment Violet 37, CI Pigment Violet 42, etc. (the above are purple pigments), CI Pigment Blue 1, CI Pigment Blue 2, CI Pigment Blue 15, CI Pigment Blue 15:1, CI Pigment Blue 15:2, CI Pigment Blue 15:3, CI Pigment Blue 15:4, CI Pigment Blue 15:6, CI Pigment Blue 16, CI Pigment Blue 22, CI Pigment Blue 60, CI Pigment Blue 64. CI Pigment Blue 66, CI Pigment Blue 79, CI Pigment Blue 80, etc. (the above are blue pigments).
該些有機顏料可單獨使用或者將各種有機顏料組合使用。 These organic pigments can be used alone or in combination of various organic pigments.
染料並無特別限制,可使用公知的染料。作為化學結構,可使用吡唑偶氮系、苯胺基偶氮系、三苯基甲烷系、蒽醌系、蒽吡啶酮系、苯亞甲基系、氧雜菁系、吡唑并三唑偶氮系、吡啶酮偶氮系、花青系、啡噻嗪系、吡咯并吡唑偶氮甲鹼(pyrrolopyrazole azomethine)系、呫噸系、酞青系、苯并吡喃系、靛藍系、吡咯亞甲基系等染料。另外,亦可使用該些染料的多聚體。另外,亦可使用日本專利特開2015-028144號公報、日本專利特開2015-34966號公報中記載的染料。 The dye is not particularly limited, and known dyes can be used. As the chemical structure, pyrazole azo series, anilino azo series, triphenylmethane series, anthraquinone series, anthrapyridone series, benzylidene series, oxacyanine series, pyrazolotriazole series can be used. Nitrogen series, pyridone azo series, cyanine series, phenothiazine series, pyrrolopyrazole azomethine series, xanthene series, phthalocyanine series, benzopyran series, indigo series, pyrrole Dyes such as methylene series. In addition, multimers of these dyes can also be used. In addition, the dyes described in Japanese Patent Laid-Open No. 2015-028144 and Japanese Patent Laid-Open No. 2015-34966 can also be used.
<<透過紅外區域的光的至少一部分且遮蔽可見區域的光的有色材料(遮蔽可見光的有色材料)>> <<Colored material that transmits at least a part of light in the infrared region and shields light in the visible region (colored material that shields visible light)>>
本發明的組成物亦可含有透過紅外區域的光的至少一部分且遮蔽可見區域的光的有色材料(以下,亦稱為遮蔽可見光的有色材料)。 The composition of the present invention may also contain a colored material that transmits at least a part of light in the infrared region and shields light in the visible region (hereinafter, also referred to as a colored material that shields visible light).
遮蔽可見光的有色材料較佳為滿足以下的(1)及(2)的至少一個的要件,進而佳為滿足(1)的要件。 The colored material that shields visible light preferably satisfies at least one of the following requirements (1) and (2), and more preferably satisfies the requirement (1).
(1):包含兩種以上的彩色著色劑的態樣。 (1): An aspect containing two or more color colorants.
(2):包含有機系黑色著色劑的態樣。 (2): An aspect containing an organic black colorant.
<<顏料衍生物>> <<Pigment Derivatives>>
本發明的組成物於包含顏料的情況下,可進而含有顏料衍生物。顏料衍生物較佳為具有顏料的一部分經酸性基、鹼性基或鄰苯二甲醯亞胺甲基取代而成的結構的化合物,進而佳為下述式(B1)所表示的顏料衍生物。 When the composition of the present invention contains a pigment, it may further contain a pigment derivative. The pigment derivative is preferably a compound having a structure in which a part of the pigment is substituted with an acidic group, a basic group, or a phthaliminomethyl group, and more preferably a pigment derivative represented by the following formula (B1) .
式(B1)中,P表示色素結構,L表示單鍵或連結基,X表示酸性基、鹼性基、具有鹽結構的基或鄰苯二甲醯亞胺基,m表示1以上的整數,n表示1以上的整數,於m為2以上的情況下,多個L及X可相互相同亦可不同,於n為2以上的情況下,多個X可相互相同亦可不同。 In formula (B1), P represents a dye structure, L represents a single bond or a linking group, X represents an acidic group, a basic group, a group having a salt structure, or a phthalimide group, and m represents an integer of 1 or more, n represents an integer of 1 or more, and when m is 2 or more, a plurality of L and X may be the same as or different from each other, and when n is 2 or more, a plurality of X may be the same or different from each other.
式(B1)中,P表示色素結構,較佳為選自吡咯并吡咯色素結構、二酮基吡咯并吡咯色素結構、喹吖啶酮色素結構、蒽醌色素結構、二蒽醌色素結構、苯并異吲哚色素結構、噻嗪靛藍色素結構、偶氮色素結構、喹酞酮色素結構、酞青色素結構、萘酞青色素結構、二噁嗪色素結構、苝色素結構、紫環酮色素結構、苯并咪唑酮色素結構、苯并噻唑色素結構、苯并咪唑色素結構及苯并噁唑色素結構中的至少一種,進而佳為選自吡咯并吡咯色素結構、二酮基吡咯并吡咯色素結構、喹吖啶酮色素結構及苯并咪唑酮色素結構中的至少一種,特佳為吡咯并吡咯色素結構。 In formula (B1), P represents a pigment structure, preferably selected from the group consisting of pyrrolopyrrole pigment structure, diketopyrrolopyrrole pigment structure, quinacridone pigment structure, anthraquinone pigment structure, dianthraquinone pigment structure, benzene Diisoindole pigment structure, thiazide indigo pigment structure, azo pigment structure, quinophthalone pigment structure, phthalocyanine pigment structure, naphthalocyanine pigment structure, dioxazine pigment structure, perylene pigment structure, perylene pigment structure , At least one of benzimidazolone pigment structure, benzothiazole pigment structure, benzimidazole pigment structure and benzoxazole pigment structure, and more preferably selected from pyrrolopyrrole pigment structure, diketopyrrolopyrrole pigment structure , At least one of quinacridone pigment structure and benzimidazolone pigment structure, particularly preferably pyrrolopyrrole pigment structure.
另外,P所表示的色素結構較佳為源自近紅外線吸收化合物的色素結構,更佳為與近紅外線吸收劑中所含的近紅外線吸收化合物共通的骨架的色素結構。例如,於使用吡咯并吡咯化合物作為近紅外線吸收化合物的情況下,P所表示的色素結構較佳為吡咯 并吡咯色素結構。 In addition, the dye structure represented by P is preferably a dye structure derived from a near-infrared absorbing compound, and more preferably a dye structure having a skeleton common to the near-infrared absorbing compound contained in the near-infrared absorbing agent. For example, in the case of using a pyrrolopyrrole compound as a near-infrared absorbing compound, the pigment structure represented by P is preferably pyrrole The structure of pyrrole pigment.
式(B1)中,L表示單鍵或連結基。連結基較佳為包括1個~100個碳原子、0個~10個氮原子、0個~50個氧原子、1個~200個氫原子及0個~20個硫原子的基,可未經取代亦可進而具有取代基。 In the formula (B1), L represents a single bond or a linking group. The linking group is preferably a group including 1 to 100 carbon atoms, 0 to 10 nitrogen atoms, 0 to 50 oxygen atoms, 1 to 200 hydrogen atoms, and 0 to 20 sulfur atoms. Substitution may further have a substituent.
式(B1)中,X表示酸性基、鹼性基、具有鹽結構的基或鄰苯二甲醯亞胺基。 In the formula (B1), X represents an acidic group, a basic group, a group having a salt structure, or a phthalimide group.
作為顏料衍生物的具體例,可列舉下述化合物。另外,亦可使用日本專利特開昭56-118462號公報、日本專利特開昭63-264674號公報、日本專利特開平1-217077號公報、日本專利特開平3-9961號公報、日本專利特開平3-26767號公報、日本專利特開平3-153780號公報、日本專利特開平3-45662號公報、日本專利特開平4-285669號公報、日本專利特開平6-145546號公報、日本專利特開平6-212088號公報、日本專利特開平6-240158號公報、日本專利特開平10-30063號公報、日本專利特開平10-195326號公報、國際公開WO2011/024896號手冊的段落編號0086~段落編號0098、國際公開WO2012/102399號手冊的段落編號0063~段落編號0094等中記載的化合物,將該內容併入至本說明書中。 As specific examples of pigment derivatives, the following compounds can be cited. In addition, Japanese Patent Laid-Open No. 56-118462, Japanese Patent Laid-Open No. 63-264674, Japanese Patent Laid-Open No. 1-217077, Japanese Patent Laid-Open No. 3-9961, and Japanese Patent Kaihei No. 3-26767, Japanese Patent Laid-open No. 3-153780, Japanese Patent Laid-Open No. 3-45662, Japanese Patent Laid-Open No. 4-285669, Japanese Patent Laid-Open No. 6-145546, Japanese Patent Japanese Patent Publication No. 6-212088, Japanese Patent Publication No. 6-240158, Japanese Patent Publication No. 10-30063, Japanese Patent Publication No. 10-195326, International Publication No. WO2011/024896, paragraph numbers 0086~paragraphs No. 0098, Paragraph No. 0063 to Paragraph No. 0094 of International Publication WO2012/102399 Handbook, etc., are incorporated into this specification.
[化33]
[化34]
[化35]
[化36]
[化37]
於本發明的組成物含有顏料衍生物的情況下,相對於組成物中所含的顏料100質量份,顏料衍生物的含量較佳為1質量份~50質量份。下限值較佳為3質量份以上,更佳為5質量份以上。上限值較佳為40質量份以下,更佳為30質量份以下。若顏料衍生物的含量為所述範圍,則可提高顏料的分散性,且可效率良好地抑制粒子的凝聚。顏料衍生物可僅為一種,亦可為兩種以上,於為兩種以上的情況下,較佳為合計量成為所述範圍。 When the composition of the present invention contains a pigment derivative, the content of the pigment derivative is preferably 1 part by mass to 50 parts by mass relative to 100 parts by mass of the pigment contained in the composition. The lower limit is preferably 3 parts by mass or more, more preferably 5 parts by mass or more. The upper limit is preferably 40 parts by mass or less, more preferably 30 parts by mass or less. If the content of the pigment derivative is in the above range, the dispersibility of the pigment can be improved, and the aggregation of particles can be efficiently suppressed. There may be only one type of pigment derivative, or two or more types. In the case of two or more types, the total amount is preferably within the above range.
<<自由基聚合性化合物>> <<radical polymerizable compound>>
本發明的組成物含有自由基聚合性化合物(以下,亦稱為聚合性化合物)。聚合性化合物只要為可藉由自由基的作用而聚合的化合物即可,並無特別限定。聚合性化合物較佳為具有1個以上的含有乙烯性不飽和鍵的基等自由基聚合性基的化合物,更佳為具有2個以上的自由基聚合性基的化合物,進而佳為具有3個以上的自由基聚合性基。自由基聚合性基的個數的上限例如較佳為15個以下,更佳為6個以下。作為具有乙烯性不飽和鍵的基,可列舉乙烯基、苯乙烯基、(甲基)烯丙基、(甲基)丙烯醯基等,較佳為(甲基)丙烯醯基。 The composition of the present invention contains a radical polymerizable compound (hereinafter also referred to as a polymerizable compound). The polymerizable compound is not particularly limited as long as it is a compound that can be polymerized by the action of radicals. The polymerizable compound is preferably a compound having one or more radical polymerizable groups such as a group containing an ethylenically unsaturated bond, more preferably a compound having two or more radical polymerizable groups, and more preferably three The above radical polymerizable group. The upper limit of the number of radically polymerizable groups is, for example, preferably 15 or less, and more preferably 6 or less. Examples of the group having an ethylenically unsaturated bond include a vinyl group, a styryl group, a (meth)allyl group, a (meth)acryloyl group, and the like, and a (meth)acryloyl group is preferred.
聚合性化合物可為單體、聚合物的任一形態,較佳為單體。單體型的聚合性化合物的分子量較佳為200~3000。分子量的上限較佳為2500以下,進而佳為2000以下。分子量的下限較佳為250以上,進而佳為300以上。 The polymerizable compound may be in any form of a monomer or a polymer, and is preferably a monomer. The molecular weight of the monomeric polymerizable compound is preferably 200 to 3000. The upper limit of the molecular weight is preferably 2500 or less, and more preferably 2000 or less. The lower limit of the molecular weight is preferably 250 or more, more preferably 300 or more.
作為聚合性化合物的例子,可參考日本專利特開2013-253224號公報的段落編號0033~段落編號0034的記載,將該內容併入至本說明書中。所述化合物較佳為乙烯氧基改質季戊四醇四丙烯酸酯(市售品為NK酯(NK Ester)ATM-35E;新中村化學工業(股)製造)、二季戊四醇三丙烯酸酯(市售品為卡亞拉得(KAYARAD)D-330;日本化藥(股)製造)、二季戊四醇四丙烯酸酯(市售品為卡亞拉得(KAYARAD)D-320;日本化藥(股)製造)、二季戊四醇五(甲基)丙烯酸酯(市售品為卡亞拉得(KAYARAD)D-310;日本化藥(股)製造)、二季戊四醇六(甲基)丙烯酸酯(市售品為卡亞拉得(KAYARAD)DPHA,日本化藥(股)製造;A-DPH-12E,新中村化學工業(股)製造)、及該些的(甲基)丙烯醯基介隔乙二醇殘基、丙二醇殘基而鍵結的結構的化合物。另外,亦可使用該些的寡聚物類型。另外,可參考日本專利特開2013-253224號公報的段落編號0034~段落編號0038的聚合性化合物的記載,將該內容併入至本說明書中。另外,可列舉日本專利特開2012-208494號公報的段落編號0477(相對應的美國專利申請公開第2012/0235099號說明書的[0585])中記載的聚合性單體等,將該些內容併入至本說明書中。 As an example of a polymerizable compound, the description of paragraph number 0033 to paragraph number 0034 of JP 2013-253224 A can be referred to, and this content is incorporated into this specification. The compound is preferably ethyleneoxy-modified pentaerythritol tetraacrylate (the commercial product is NK Ester (NK Ester) ATM-35E; manufactured by Shinnakamura Chemical Industry Co., Ltd.), and dipentaerythritol triacrylate (commercial product is KAYARAD D-330; manufactured by Nippon Kayaku Pharmaceutical Co., Ltd.), dipentaerythritol tetraacrylate (commercially available product is KAYARAD D-320; manufactured by Nippon Kayaku Pharmaceutical Co., Ltd.), Dipentaerythritol penta(meth)acrylate (commercially available product is Kayarad (KAYARAD) D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa(meth)acrylate (commercially available product is Kayarad) KAYARAD DPHA, manufactured by Nippon Kayaku Co., Ltd.; A-DPH-12E, manufactured by Shinnakamura Chemical Industry Co., Ltd., and these (meth)acrylic acid residues, A compound with a structure that is bonded to propylene glycol residues. In addition, these oligomer types can also be used. In addition, the description of the polymerizable compound of paragraph number 0034 to paragraph number 0038 of JP 2013-253224 A can be referred to, and the content can be incorporated into this specification. In addition, the polymerizable monomers described in paragraph No. 0477 (corresponding US Patent Application Publication No. 2012/0235099 Specification [0585]) of Japanese Patent Laid-Open No. 2012-208494 can be cited, and these contents are combined Into this manual.
另外,較佳為二甘油環氧乙烷(Ethylene Oxide,EO)改質(甲基)丙烯酸酯(市售品為M-460;東亞合成(股)製造)。季戊四醇四丙烯酸酯(新中村化學工業(股)製造,A-TMMT)、1,6-己二醇二丙烯酸酯(日本化藥(股)製造,卡亞拉得(KAYARAD)HDDA)亦較佳。亦可使用該些的寡聚物類型。例如可列舉RP-1040(日本化藥(股)製造)等。 In addition, diglycerol ethylene oxide (EO) modified (meth)acrylate (a commercially available product is M-460; manufactured by Toagosei Co., Ltd.) is preferred. Pentaerythritol tetraacrylate (manufactured by Shinnakamura Chemical Industry Co., Ltd., A-TMMT), 1,6-hexanediol diacrylate (manufactured by Nippon Kayaku Co., Ltd., KAYARAD HDDA) are also preferred . These oligomer types can also be used. For example, RP-1040 (manufactured by Nippon Kayaku Co., Ltd.) and the like can be mentioned.
作為聚合性化合物,亦可具有羧基、磺酸基、磷酸基等酸基,例如可較佳地列舉具有酸基的乙烯性不飽和化合物類。具有酸基的聚合性化合物可利用將多官能醇的一部分羥基(甲基)丙烯酸酯化,使酸酐與殘餘的羥基進行加成反應而形成羧基等的方法來獲得。另外,亦可使非芳香族羧酸酐等與所述羥基反應而導入酸基。作為非芳香族羧酸酐的具體例,可列舉:四氫鄰苯二甲酸酐、烷基化四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、烷基化六氫鄰苯二甲酸酐、丁二酸酐、馬來酸酐。 As a polymerizable compound, you may have acidic groups, such as a carboxyl group, a sulfonic acid group, a phosphoric acid group, For example, the ethylenically unsaturated compound which has an acidic group can be mentioned suitably. The polymerizable compound having an acid group can be obtained by a method such as esterifying a part of the hydroxyl group (meth)acrylate of the polyfunctional alcohol, and subjecting an acid anhydride to the remaining hydroxyl group to undergo an addition reaction to form a carboxyl group. In addition, a non-aromatic carboxylic anhydride or the like may be reacted with the hydroxyl group to introduce an acid group. Specific examples of non-aromatic carboxylic acid anhydrides include: tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and alkylated hexahydrophthalic anhydride , Succinic anhydride, maleic anhydride.
具有酸基的聚合性化合物較佳為脂肪族多羥基化合物與不飽和羧酸的酯,更佳為使非芳香族羧酸酐與脂肪族多羥基化合物的未反應的羥基進行反應而加成酸基的聚合性化合物,進而佳為於所述酯中脂肪族多羥基化合物為季戊四醇及二季戊四醇中的至少一者的化合物。作為市售品,可列舉:阿羅尼斯(Aronix)M-510、M-520(東亞合成(股)製造),CBX-0、CBX-1(新中村化學工業(股)製造)等。具有酸基的聚合性化合物的酸價較佳為0.1mgKOH/g~40mgKOH/g。下限較佳為5mgKOH/g以上。上 限較佳為30mgKOH/g以下。 The polymerizable compound having an acid group is preferably an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and more preferably a non-aromatic carboxylic acid anhydride and an unreacted hydroxyl group of the aliphatic polyhydroxy compound are reacted to add an acid group The polymerizable compound of is more preferably a compound in which the aliphatic polyhydroxy compound in the ester is at least one of pentaerythritol and dipentaerythritol. As a commercially available product, Aronix M-510, M-520 (manufactured by Toagosei Co., Ltd.), CBX-0, CBX-1 (manufactured by Shinnakamura Chemical Industry Co., Ltd.), etc. can be cited. The acid value of the polymerizable compound having an acid group is preferably 0.1 mgKOH/g to 40 mgKOH/g. The lower limit is preferably 5 mgKOH/g or more. superior The limit is preferably 30 mgKOH/g or less.
具有酸基的聚合性化合物較佳為下述通式(1)所表示的化合物。 The polymerizable compound having an acid group is preferably a compound represented by the following general formula (1).
通式(1)(A)n1-L-(Ac)n2 General formula (1)(A) n1 -L-(Ac) n2
(通式(1)中,A表示羥基,L為至少包含碳原子及氫原子的(n1+n2)價的基,Ac表示(甲基)丙烯醯氧基。n1表示1以上的整數,n2表示1以上的整數) (In the general formula (1), A represents a hydroxyl group, L is a (n1+n2) valence group containing at least carbon atoms and hydrogen atoms, and Ac represents a (meth)acryloxy group. n1 represents an integer of 1 or more, n2 Represents an integer greater than 1)
A所表示的酸基可列舉羧基、磺基、磷酸基等,較佳為羧基。 The acid group represented by A includes a carboxyl group, a sulfo group, a phosphoric acid group, etc., and a carboxyl group is preferred.
L表示至少包含碳原子及氫原子的(n1+n2)價的基。例如可列舉:-CH2-、-O-、-S-、-C(=O)-、-COO-、-NR-、-CONR-、-OCO-、-SO-、-SO2-及將該些的兩個以上連結而形成的基。此處,R分別獨立地表示氫原子、烷基、芳基、或雜芳基。L較佳為至少包含-CH2-的基。構成L的碳原子的個數較佳為3~100,更佳為6~50。 L represents a (n1+n2) valence group containing at least a carbon atom and a hydrogen atom. For example: -CH 2 -, -O-, -S-, -C(=O)-, -COO-, -NR-, -CONR-, -OCO-, -SO-, -SO 2 -and A group formed by connecting two or more of these. Here, R each independently represents a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group. L is preferably a group containing at least -CH 2 -. The number of carbon atoms constituting L is preferably 3-100, more preferably 6-50.
n1較佳為1或2,更佳為1。n2較佳為1~6,更佳為2~5。 n1 is preferably 1 or 2, more preferably 1. n2 is preferably 1~6, more preferably 2~5.
具有酸基的聚合性化合物較佳為下述通式(11)或通式(12)所表示的化合物。 The polymerizable compound having an acid group is preferably a compound represented by the following general formula (11) or (12).
[化38]
通式(11)中,R1、T1及X1各自獨立地表示作為R1、T1、或X1而以下所示的基的任一個。n表示0~14的整數。 In the general formula (11), R 1 , T 1, and X 1 each independently represent any of the groups shown below as R 1 , T 1 , or X 1. n represents an integer from 0 to 14.
通式(12)中,Z1及G1各自獨立地表示作為Z1或G1 而以下所示的基的任一個。W1的含義與通式(11)中R1或X1所表示的基相同,存在6個的W1中的3個以上表示與R1中列舉的基相同的基,1個以上表示與X1中列舉的基相同的基。p表示0~14的整數。 In the general formula (12), Z 1 and G 1 each independently represent any of the groups shown below as Z 1 or G 1. Yl same meaning as W 1 of formula (11) wherein R 1 or X 1 represented by the presence of six or more 1 and W 3 represents the same group as the group exemplified in R 1, represents one or more The groups listed in X 1 are the same groups. p represents an integer from 0 to 14.
於通式(11)或通式(12)所表示的化合物中,更佳為使用季戊四醇衍生物及二季戊四醇衍生物中的至少一者。 Among the compounds represented by general formula (11) or general formula (12), it is more preferable to use at least one of a pentaerythritol derivative and a dipentaerythritol derivative.
關於聚合性化合物,具有己內酯結構的化合物亦為較佳態樣。作為具有己內酯結構的化合物,只要於分子內具有己內酯結構,則並無特別限定,例如可列舉藉由將三羥甲基乙烷、二-三羥甲基乙烷、三羥甲基丙烷、二-三羥甲基丙烷、季戊四醇、二季戊四醇、三季戊四醇、甘油(glycerin)、二丙三醇(diglycerol)、三羥甲基三聚氰胺等多元醇與(甲基)丙烯酸及ε-己內酯加以酯化而獲得的ε-己內酯改質多官能(甲基)丙烯酸酯。作為具有己內酯結構的化合物,可參考日本專利特開2013-253224號公報的段落編 號0042~段落編號0045的記載,將該內容併入至本說明書中。具有己內酯結構的化合物例如可列舉:作為卡亞拉得(KAYARAD)DPCA系列而由日本化藥(股)市售的DPCA-20、DPCA-30、DPCA-60、DPCA-120等;沙多瑪(Sartomer)公司製造的作為具有四個伸乙氧基鏈的四官能丙烯酸酯的SR-494、作為具有三個伸異丁氧基鏈的三官能丙烯酸酯的TPA-330等。 Regarding the polymerizable compound, a compound having a caprolactone structure is also a preferable aspect. The compound having a caprolactone structure is not particularly limited as long as it has a caprolactone structure in the molecule. Polyols such as methyl propane, di-trimethylolpropane, pentaerythritol, dipentaerythritol, tripentaerythritol, glycerin, diglycerol, trimethylol melamine, etc. and (meth)acrylic acid and ε-hexane Ε-caprolactone obtained by esterification of lactone is modified into a multifunctional (meth)acrylate. As a compound having a caprolactone structure, refer to the paragraphs in Japanese Patent Laid-Open No. 2013-253224 The description of No. 0042~Paragraph No. 0045 is incorporated into this manual. Examples of compounds having a caprolactone structure include: DPCA-20, DPCA-30, DPCA-60, DPCA-120, etc., which are commercially available from Nippon Kayaku Co., Ltd. as the KAYARAD DPCA series; SR-494, which is a tetrafunctional acrylate having four ethoxylated chains, and TPA-330, which is a trifunctional acrylate having three isobutoxy chains, manufactured by Sartomer Corporation.
關於聚合性化合物,如日本專利特公昭48-41708號公報、日本專利特開昭51-37193號公報、日本專利特公平2-32293號公報、日本專利特公平2-16765號公報中所記載的胺基甲酸酯丙烯酸酯類,或日本專利特公昭58-49860號公報、日本專利特公昭56-17654號公報、日本專利特公昭62-39417號公報、日本專利特公昭62-39418號公報中記載的具有環氧乙烷系骨架的胺基甲酸酯化合物類亦較佳。另外,可使用日本專利特開昭63-277653號公報、日本專利特開昭63-260909號公報、日本專利特開平1-105238號公報中所記載的於分子內具有胺基結構或硫醚結構的加成聚合性化合物類。 Regarding polymerizable compounds, as described in Japanese Patent Publication No. 48-41708, Japanese Patent Publication No. 51-37193, Japanese Patent Publication No. 2-32293, and Japanese Patent Publication No. 2-16765 Urethane acrylates, or Japanese Patent Publication No. 58-49860, Japanese Patent Publication No. 56-17654, Japanese Patent Publication No. 62-39417, Japanese Patent Publication No. 62-39418 The described urethane compounds having an ethylene oxide-based skeleton are also preferable. In addition, the structures described in Japanese Patent Laid-Open No. 63-277653, Japanese Patent Laid-Open No. 63-260909, and Japanese Patent Laid-Open No. 1-105238 that have an amino group structure or a thioether structure in the molecule can be used. Of addition polymerizable compounds.
作為市售品,可列舉:胺基甲酸酯寡聚物UAS-10、UAB-140(山陽國策紙漿(Sanyo Kokusaku Pulp)(股)製造),UA-7200(新中村化學工業(股)製造),DPHA-40H(日本化藥(股)製造),UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600、萊特丙烯酸酯(Light Acrylate)DCP-A(共榮社化學(股)製造)等。 Commercial products include: urethane oligomer UAS-10, UAB-140 (manufactured by Sanyo Kokusaku Pulp (stock)), UA-7200 (manufactured by Shinnakamura Chemical Industry Co., Ltd.) ), DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA-306T, UA-306I, AH-600, T-600, AI-600, Light Acrylate DCP-A ( Kyoeisha Chemical Co., Ltd.), etc.
另外,聚合性化合物可較佳地使用阿羅尼斯(Aronix)M-215、M-305、M-313、M-315(東亞合成(股)製造),SR-368(沙多瑪(Sartomer)公司製造),A-9300(新中村化學工業(股)製造)等異氰脲酸環氧乙烷(EO)改質單體。 In addition, the polymerizable compound can preferably use Aronix M-215, M-305, M-313, M-315 (manufactured by Toagosei Co., Ltd.), SR-368 (Sartomer) Company manufacture), A-9300 (manufactured by Shinnakamura Chemical Industry Co., Ltd.) and other isocyanuric acid ethylene oxide (EO) modified monomers.
本發明的組成物中,於組成物的總固體成分中,聚合性化合物的含量較佳為10質量%~35質量%。下限較佳為12質量%以上,更佳為14質量%以上。上限較佳為33質量%以下,更佳為30質量%以下。 In the composition of the present invention, the content of the polymerizable compound in the total solid content of the composition is preferably 10% by mass to 35% by mass. The lower limit is preferably 12% by mass or more, more preferably 14% by mass or more. The upper limit is preferably 33% by mass or less, more preferably 30% by mass or less.
<<光自由基聚合起始劑>> <<Photo-radical polymerization initiator>>
本發明的組成物含有光自由基聚合起始劑(以下,亦稱為光聚合起始劑)。光聚合起始劑並無特別限制,可自公知的光聚合起始劑中適宜選擇。例如較佳為對紫外線區域至可見區域的光線具有感光性者。光聚合起始劑較佳為光自由基聚合起始劑。另外,光聚合起始劑較佳為含有至少一種於約300nm~800nm(更佳為330nm~500nm)的範圍內具有至少約50的莫耳吸光係數的化合物。 The composition of the present invention contains a radical photopolymerization initiator (hereinafter, also referred to as a photopolymerization initiator). The photopolymerization initiator is not particularly limited, and can be appropriately selected from known photopolymerization initiators. For example, it is preferable to have sensitivity to light from an ultraviolet region to a visible region. The photopolymerization initiator is preferably a photoradical polymerization initiator. In addition, the photopolymerization initiator preferably contains at least one compound having a molar absorption coefficient of at least about 50 in the range of about 300 nm to 800 nm (more preferably, 330 nm to 500 nm).
作為光聚合起始劑,例如可列舉:鹵化烴衍生物(例如,具有三嗪骨架者、具有噁二唑骨架者等)、醯基氧化膦等醯基膦化合物、六芳基聯咪唑、肟衍生物等肟化合物、有機過氧化物、硫化合物、酮化合物、芳香族鎓鹽、酮肟醚、胺基苯乙酮化合物、羥基苯乙酮等。作為具有三嗪骨架的鹵化烴化合物,例如可列舉:若林等著,「日本化學學會通報(Bull.Chem.Soc.Japan)」,42, 2924(1969)中記載的化合物,英國專利1388492號說明書中記載的化合物,日本專利特開昭53-133428號公報中記載的化合物,德國專利3337024號說明書中記載的化合物,F.C.謝弗(F.C.Schaefer)著的「有機化學期刊(J.Org.Chem.)」,29,1527(1964)中記載的化合物,日本專利特開昭62-58241號公報中記載的化合物,日本專利特開平5-281728號公報中記載的化合物,日本專利特開平5-34920號公報中記載的化合物,美國專利第4212976號說明書中所記載的化合物等。 As the photopolymerization initiator, for example, halogenated hydrocarbon derivatives (for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.), acylphosphine compounds such as phosphine oxide, hexaarylbiimidazole, oxime Oxime compounds such as derivatives, organic peroxides, sulfur compounds, ketone compounds, aromatic onium salts, ketoxime ethers, aminoacetophenone compounds, hydroxyacetophenone, etc. Examples of halogenated hydrocarbon compounds having a triazine skeleton include: Wakabayashi et al., "Bulletin of the Chemical Society of Japan (Bull. Chem. Soc. Japan)", 42, The compound described in 2924 (1969), the compound described in British Patent No. 1388492, the compound described in Japanese Patent Laid-Open No. 53-133428, the compound described in German Patent No. 3337024, FC Schaefer (FC Schaefer "Journal of Organic Chemistry (J.Org.Chem.)", 29, 1527 (1964), the compound described in Japanese Patent Laid-Open No. 62-58241, Japanese Patent Laid-Open No. 5-281728 The compound described in Japanese Patent Laid-Open No. 5-34920, the compound described in the specification of U.S. Patent No. 4,212,976, and the like.
另外,就曝光感度的觀點而言,較佳為選自由三鹵甲基三嗪化合物、苄基二甲基縮酮化合物、α-羥基酮化合物、α-胺基酮化合物、醯基膦化合物、氧化膦化合物、茂金屬化合物、肟化合物、三芳基咪唑二聚體、鎓化合物、苯并噻唑化合物、二苯甲酮化合物、苯乙酮化合物及其衍生物、環戊二烯-苯-鐵錯合物及其鹽、鹵甲基噁二唑化合物、3-芳基取代香豆素化合物所組成的群組中的化合物。另外,亦可使用2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑(市售品為B-CIM,保土谷化學工業(股)製造)等。 In addition, from the viewpoint of exposure sensitivity, it is preferably selected from the group consisting of trihalomethyl triazine compounds, benzyl dimethyl ketal compounds, α-hydroxy ketone compounds, α-amino ketone compounds, phosphine compounds, Phosphine oxide compounds, metallocene compounds, oxime compounds, triarylimidazole dimers, onium compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and their derivatives, cyclopentadiene-benzene-iron compound Compounds and their salts, halomethyl oxadiazole compounds, and 3-aryl substituted coumarin compounds. In addition, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole (commercially available product is B-CIM, guarantee Tsuchiya Chemical Industry Co., Ltd.), etc.
作為α-胺基酮化合物,可列舉下述式(AK-1)所表示的化合物。 As an α-amino ketone compound, the compound represented by following formula (AK-1) is mentioned.
[化42]
式中,Ar表示經-SR13或-N(R7E)(R8E)取代的苯基,R13表示氫原子或烷基。 In the formula, Ar represents a phenyl group substituted with -SR 13 or -N(R 7E )(R 8E ), and R 13 represents a hydrogen atom or an alkyl group.
R1D及R2D分別獨立地表示碳數1~8的烷基。R1D與R21D可相互鍵結而構成碳數2~9的伸烷基。 R 1D and R 2D each independently represent an alkyl group having 1 to 8 carbon atoms. R 1D and R 21D may be bonded to each other to form an alkylene group with 2-9 carbon atoms.
R1D及R2D所表示的烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。 The alkyl group represented by R 1D and R 2D may be linear, branched, and cyclic, and is preferably linear or branched.
R1D及R2D所表示的烷基可未經取代,亦可具有取代基。作為取代基,可列舉:芳基、雜環基、硝基、氰基、鹵素原子、-ORY1、-SRY1、-CORY1、-COORY1、-OCORY1、-NRY1RY2、-NHCORY1、-CONRY1RY2、-NHCONRY1RY2、-NHCOORY1、-SO2RY1、-SO2ORY1、-NHSO2RY1等。RY1及RY2分別獨立地表示氫原子、烷基、芳基或雜環基。該些中,R1D及R2D所表示的烷基的取代基較佳為芳基。特佳為R1D及R2D的任一者為未經取代的烷基,另一者為經芳基取代的烷基。 The alkyl group represented by R 1D and R 2D may be unsubstituted or may have a substituent. Examples of substituents include aryl groups, heterocyclic groups, nitro groups, cyano groups, halogen atoms, -OR Y1 , -SR Y1 , -COR Y1 , -COOR Y1 , -OCOR Y1 , -NR Y1 R Y2 ,- NHCOR Y1 , -CONR Y1 R Y2 , -NHCONR Y1 R Y2 , -NHCOOR Y1 , -SO 2 R Y1 , -SO 2 OR Y1 , -NHSO 2 R Y1 and so on. R Y1 and R Y2 each independently represent a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group. Among these, the substituent of the alkyl group represented by R 1D and R 2D is preferably an aryl group. It is particularly preferable that any one of R 1D and R 2D is an unsubstituted alkyl group, and the other is an alkyl group substituted with an aryl group.
鹵素原子可列舉:氟原子、氯原子、溴原子、碘原子等。 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
RY1及RY2所表示的烷基的碳數較佳為1~20。烷基可為直鏈、分支、環狀的任一種,較佳為直鏈或分支。 The number of carbon atoms in the alkyl group represented by R Y1 and R Y2 is preferably 1-20. The alkyl group may be any of linear, branched, and cyclic, and is preferably linear or branched.
作為取代基的芳基以及RY1及RY2所表示的芳基的碳數較佳 為6~20,更佳為6~15,進而佳為6~10。芳基可為單環,亦可為縮合環。 The number of carbon atoms in the aryl group as a substituent and the aryl group represented by R Y1 and R Y2 is preferably 6-20, more preferably 6-15, and still more preferably 6-10. The aryl group may be a single ring or a condensed ring.
RY1及RY2所表示的雜環基較佳為5員環或6員環。雜環基可為單環,亦可為縮合環。構成雜環基的碳原子的個數較佳為3~30,更佳為3~18,進而佳為3~12。構成雜環基的雜原子的個數較佳為1~3。構成雜環基的雜原子較佳為氮原子、氧原子或硫原子。 The heterocyclic group represented by R Y1 and R Y2 is preferably a 5-membered ring or a 6-membered ring. The heterocyclic group may be a monocyclic ring or a condensed ring. The number of carbon atoms constituting the heterocyclic group is preferably 3-30, more preferably 3-18, and still more preferably 3-12. The number of heteroatoms constituting the heterocyclic group is preferably 1 to 3. The hetero atom constituting the heterocyclic group is preferably a nitrogen atom, an oxygen atom or a sulfur atom.
R3D及R4D分別獨立地表示氫原子、碳數1~12的烷基、經碳數1~4的烷氧基取代的碳數2~4的烷基、或碳數3~5的烯基。R3D與R4D可相互鍵結而形成環。 R 3D and R 4D each independently represent a hydrogen atom, an alkyl group with 1 to 12 carbons, an alkyl group with 2 to 4 carbons substituted by an alkoxy group with 1 to 4 carbons, or an alkene with 3 to 5 carbons. base. R 3D and R 4D may be bonded to each other to form a ring.
R7E及R8E分別獨立地表示氫原子、碳數1~12的烷基、經碳數1~4的烷氧基取代的碳數2~4的烷基、或碳數3~5的烯基。R7E與R8E可相互鍵結而形成環。 R 7E and R 8E each independently represent a hydrogen atom, an alkyl group with 1 to 12 carbons, an alkyl group with 2 to 4 carbons substituted by an alkoxy group with 1 to 4 carbons, or an alkene with 3 to 5 carbons. base. R 7E and R 8E may be bonded to each other to form a ring.
作為式(AK-1)所表示的化合物的例子,可列舉:2-甲基-1-苯基-2-嗎啉基丙烷-1-酮、2-甲基-1-[4-(己基)苯基]-2-嗎啉基丙烷-1-酮、2-乙基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1、2-(二甲基胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮等。 Examples of the compound represented by the formula (AK-1) include: 2-methyl-1-phenyl-2-morpholinopropan-1-one, 2-methyl-1-[4-(hexyl )Phenyl)-2-morpholinylpropane-1-one, 2-ethyl-2-dimethylamino-1-(4-morpholinylphenyl)-butanone-1, 2-benzyl -2-Dimethylamino-1-(4-morpholinylphenyl)-butanone-1, 2-(dimethylamino)-2-[(4-methylphenyl)methyl] -1-[4-(4-morpholinyl)phenyl]-1-butanone and the like.
作為α-胺基酮化合物的市售品,可列舉:豔佳固(IRGACURE)907、豔佳固(IRGACURE)369及豔佳固(IRGACURE)379(商品名,均為巴斯夫(BASF)公司製造)等。 Commercial products of α-amino ketone compounds include: IRGACURE 907, IRGACURE 369, and IRGACURE 379 (trade names, all manufactured by BASF) )Wait.
光聚合起始劑亦可較佳地使用α-羥基酮化合物及醯基 膦化合物。作為α-羥基酮化合物,可使用豔佳固(IRGACURE)184、達羅卡(DAROCUR)1173、豔佳固(IRGACURE)500、豔佳固(IRGACURE)2959、豔佳固(IRGACURE)127(商品名,均為巴斯夫(BASF)公司製造)。作為醯基膦化合物,可使用作為市售品的豔佳固(IRGACURE)819或豔佳固(IRGACURE)TPO(商品名,均為巴斯夫(BASF)公司製造)。 The photopolymerization initiator can also preferably use α-hydroxy ketone compounds and acyl groups Phosphine compounds. As α-hydroxy ketone compounds, IRGACURE 184, DAROCUR 1173, IRGACURE 500, IRGACURE 2959, IRGACURE 127 (commodity products) can be used as α-hydroxy ketone compounds. Names, all manufactured by BASF (BASF). As the phosphine compound, commercially available IRGACURE 819 or IRGACURE TPO (trade names, both manufactured by BASF) can be used.
光聚合起始劑亦較佳為使用肟化合物。作為肟化合物的具體例,可使用日本專利特開2001-233842號公報中記載的化合物、日本專利特開2000-80068號公報中記載的化合物、日本專利特開2006-342166號公報中記載的化合物、日本專利特開2016-21012號公報中記載的化合物。 The photopolymerization initiator is also preferably an oxime compound. As specific examples of the oxime compound, the compound described in Japanese Patent Laid-Open No. 2001-233842, the compound described in Japanese Patent Laid-Open No. 2000-80068, and the compound described in Japanese Patent Laid-Open No. 2006-342166 can be used. , The compound described in Japanese Patent Laid-Open No. 2016-21012.
本發明中,作為可較佳地使用的肟化合物,例如可列舉:3-苯甲醯氧基亞胺基丁烷-2-酮、3-乙醯氧基亞胺基丁烷-2-酮、3-丙醯氧基亞胺基丁烷-2-酮、2-乙醯氧基亞胺基戊烷-3-酮、2-乙醯氧基亞胺基-1-苯基丙烷-1-酮、2-苯甲醯氧基亞胺基-1-苯基丙烷-1-酮、3-(4-甲苯磺醯氧基)亞胺基丁烷-2-酮及2-乙氧基羰氧基亞胺基-1-苯基丙烷-1-酮等。另外,亦可列舉「英國化學會志-普爾金會刊II(J.C.S.Perkin II)」((1979年)第1653-1660頁)、「英國化學會志-普爾金會刊II(J.C.S.Perkin II)」((1979年)第156-162頁)、「光聚合物科學與技術期刊(Journal of Photopolymer Science and Technology)」((1995年)第202-232頁)、日本專利特開2000-66385號公報中記載的化合物、日本專利特開2000-80068號 公報、日本專利特表2004-534797號公報、日本專利特開2006-342166號公報的各公報中記載的化合物等。市售品中亦可較佳地使用豔佳固(IRGACURE)OXE01(巴斯夫(BASF)公司製造)、豔佳固(IRGACURE)OXE02(巴斯夫(BASF)公司製造)。另外,可使用TR-PBG-304(常州強力電子新材料有限公司製造)、艾迪科阿克魯茲(Adeka Arkls)NCI-930(艾迪科(ADEKA)(股)製造)。 In the present invention, as an oxime compound that can be preferably used, for example, 3-benzyloxyiminobutan-2-one, 3-acetoxyiminobutan-2-one , 3-Propyloxyiminobutan-2-one, 2-acetoxyiminopentane-3-one, 2-acetoxyimino-1-phenylpropane-1 -Ketone, 2-benzyloxyimino-1-phenylpropan-1-one, 3-(4-toluenesulfonyloxy)iminobutan-2-one and 2-ethoxy Carbonyloxyimino-1-phenylpropan-1-one and the like. In addition, you can also list "The Journal of the British Chemical Society-Pulkin II (JCSPerkin II)" ((1979) pages 1653-1660), "The Journal of the British Chemical Society-Pulkin II (JCSPerkin II)" '' ((1979) pages 156-162), "Journal of Photopolymer Science and Technology" ((1995) pages 202-232), Japanese Patent Laid-Open No. 2000-66385 The compound described in the bulletin, Japanese Patent Laid-Open No. 2000-80068 The compounds described in the gazettes, Japanese Patent Application Publication No. 2004-534797, and Japanese Patent Application Publication No. 2006-342166, etc. Among the commercially available products, IRGACURE OXE01 (manufactured by BASF Corporation) and IRGACURE OXE02 (manufactured by BASF Corporation) can also be preferably used. In addition, TR-PBG-304 (manufactured by Changzhou Qiangli Electronic New Materials Co., Ltd.), Adeka Arkls NCI-930 (manufactured by ADEKA (stock)) can be used.
另外,作為所述記載以外的肟化合物,亦可使用於咔唑環的N位連結有肟的日本專利特表2009-519904號公報中記載的化合物、於二苯甲酮部位導入有雜取代基的美國專利第7626957號公報中記載的化合物、於色素部位導入有硝基的日本專利特開2010-15025號公報及美國專利公開2009-292039號公報中記載的化合物、國際公開2009/131189號公報中記載的酮肟化合物、於同一分子內含有三嗪骨架與肟骨架的美國專利7556910號公報中記載的化合物、於405nm下具有最大吸收波長且對g射線光源具有良好的感度的日本專利特開2009-221114號公報中記載的化合物、日本專利特開2014-137466號公報的段落編號0076~段落編號0079中所記載的化合物等。 In addition, as an oxime compound other than the above description, the compound described in Japanese Patent Publication No. 2009-519904 in which an oxime is linked to the N position of the carbazole ring, and a heterosubstituent group introduced into the benzophenone site can also be used. The compound described in U.S. Patent No. 7626957, the compound described in Japanese Patent Laid-Open No. 2010-15025 and U.S. Patent Publication No. 2009-292039, and International Publication No. 2009/131189, in which a nitro group is introduced into the pigment site The ketoxime compound described in U.S. Patent No. 7556910, which contains a triazine skeleton and an oxime skeleton in the same molecule, has a maximum absorption wavelength at 405 nm and has good sensitivity to g-ray light sources in Japanese Patent Laid-Open The compound described in 2009-221114 A, the compound described in paragraph number 0076 to paragraph number 0079 of JP 2014-137466 A, and the like.
較佳為例如可參考日本專利特開2013-29760號公報的段落編號0274~段落編號0275,並將該內容併入至本說明書中。 Preferably, for example, Paragraph No. 0274 to Paragraph No. 0275 of JP 2013-29760 A can be referred to, and the content can be incorporated into this specification.
具體而言,肟化合物較佳為下述式(OX-1)所表示的化合物。肟化合物可為肟的N-O鍵為(E)體的肟化合物,亦可為肟的N-O 鍵為(Z)體的肟化合物,抑或可為(E)體與(Z)體的混合物。 Specifically, the oxime compound is preferably a compound represented by the following formula (OX-1). The oxime compound can be an oxime compound in which the N-O bond of the oxime is an (E) body, or the N-O of the oxime The oxime compound whose bond is a (Z) body, or it may be a mixture of (E) body and (Z) body.
式(OX-1)中,R及B各自獨立地表示一價取代基,A表示二價有機基,Ar表示芳基。 In formula (OX-1), R and B each independently represent a monovalent substituent, A represents a divalent organic group, and Ar represents an aryl group.
式(OX-1)中,R所表示的一價取代基較佳為一價的非金屬原子團。 In formula (OX-1), the monovalent substituent represented by R is preferably a monovalent non-metal atomic group.
作為一價的非金屬原子團,可列舉:烷基、芳基、醯基、烷氧基羰基、芳氧基羰基、雜環基、烷硫基羰基、芳硫基羰基等。另外,該些基亦可具有一個以上的取代基。另外,所述取代基亦可進一步經其他取代基取代。 Examples of the monovalent non-metal atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, an arylthiocarbonyl group, and the like. In addition, these groups may have one or more substituents. In addition, the substituent may be further substituted with other substituents.
作為取代基,可列舉:鹵素原子、芳氧基、烷氧基羰基或芳氧基羰基、醯氧基、醯基、烷基、芳基等。 Examples of the substituent include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, an aryl group, and the like.
式(OX-1)中,B所表示的一價取代基較佳為芳基、雜環基、芳基羰基、或雜環羰基。該些基可具有一個以上的取代基。作為取代基,可例示所述取代基。 In the formula (OX-1), the monovalent substituent represented by B is preferably an aryl group, a heterocyclic group, an arylcarbonyl group, or a heterocyclic carbonyl group. These groups may have more than one substituent. As the substituent, the above-mentioned substituents can be exemplified.
式(OX-1)中,A所表示的二價有機基較佳為碳數1~12的伸烷基、伸環烷基、伸炔基。該些基可具有一個以上的取代基。作為取代基,可例示所述取代基。 In the formula (OX-1), the divalent organic group represented by A is preferably an alkylene group, cycloalkylene group, or alkynylene group having 1 to 12 carbon atoms. These groups may have more than one substituent. As the substituent, the above-mentioned substituents can be exemplified.
本發明中亦可使用具有茀環的肟化合物作為光聚合起始劑。作為具有茀環的肟化合物的具體例,可列舉日本專利特開2014-137466號公報中記載的化合物。將該內容併入至本說明書中。 In the present invention, an oxime compound having a sulphur ring can also be used as a photopolymerization initiator. As a specific example of the oxime compound which has a sulphur ring, the compound described in Unexamined-Japanese-Patent No. 2014-137466 is mentioned. Incorporate this content into this manual.
本發明中亦可使用具有氟原子的肟化合物作為光聚合起始劑。作為具有氟原子的肟化合物的具體例,可列舉日本專利特開2010-262028號公報中記載的化合物、日本專利特表2014-500852號公報中記載的化合物24、化合物36~化合物40、日本專利特開2013-164471號公報中記載的化合物(C-3)等。將該內容併入至本說明書中。 In the present invention, an oxime compound having a fluorine atom can also be used as a photopolymerization initiator. Specific examples of the oxime compound having a fluorine atom include the compound described in Japanese Patent Laid-Open No. 2010-262028, the compound 24 described in the Japanese Patent Publication No. 2014-500852, the compound 36 to the compound 40, and the Japanese Patent The compound (C-3) described in JP 2013-164471 A, etc. Incorporate this content into this manual.
本發明中可使用具有硝基的肟化合物作為光聚合起始劑。具有硝基的肟化合物亦較佳為設為二聚體。作為具有硝基的肟化合物的具體例,可列舉日本專利特開2013-114249號公報的段落編號0031~段落編號0047、日本專利特開2014-137466號公報的段落編號0008~段落編號0012、段落編號0070~段落編號0079中所記載的化合物、日本專利4223071號公報的段落編號0007~段落編號0025中所記載的化合物、艾迪科阿克魯茲(Adeka Arkls)NCI-831(艾迪科(ADEKA)(股)製造)。 In the present invention, an oxime compound having a nitro group can be used as a photopolymerization initiator. The oxime compound having a nitro group is also preferably used as a dimer. Specific examples of the oxime compound having a nitro group include paragraph numbers 0031 to 0047 of Japanese Patent Laid-Open No. 2013-114249, paragraph numbers 0008 to paragraph number 0012 of Japanese Patent Laid-Open No. 2014-137466, and paragraphs. No. 0070 ~ Paragraph No. 0079 The compound described in Paragraph No. 0007 of Japanese Patent No. 4223071 ~ Paragraph No. 0025 The compound described in Paragraph No. 0025, Adeka Arkls NCI-831 (ADEKA) (Stock) Manufacturing).
以下示出本發明中可較佳地使用的肟化合物的具體例,但本發明並不限定於該些。 Specific examples of oxime compounds that can be preferably used in the present invention are shown below, but the present invention is not limited to these.
[化44]
[化45]
肟化合物較佳為於350nm~500nm的波長區域具有最大吸收波長的化合物,更佳為於360nm~480nm的波長區域具有最大吸收波長的化合物,特佳為365nm及405nm的吸光度高的化合物。 The oxime compound is preferably a compound having a maximum absorption wavelength in a wavelength region of 350 nm to 500 nm, more preferably a compound having a maximum absorption wavelength in a wavelength region of 360 nm to 480 nm, and particularly preferably a compound having high absorbance at 365 nm and 405 nm.
就感度的觀點而言,肟化合物的365nm或405nm下的莫耳吸光係數較佳為1,000~300,000,更佳為2,000~300,000,特佳為5,000~200,000。化合物的莫耳吸光係數的測定可使用公知的方法,具體而言,例如較佳為藉由紫外可見分光光度計(瓦里安(Varian)公司製造的凱里-5分光光度計(Cary-5 spectrophotometer))且使用乙酸乙酯溶媒並於0.01g/L的濃度下 進行測定。 From the viewpoint of sensitivity, the molar absorption coefficient at 365 nm or 405 nm of the oxime compound is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, and particularly preferably 5,000 to 200,000. The molar absorption coefficient of the compound can be measured by a known method. Specifically, for example, an ultraviolet-visible spectrophotometer (Cary-5 spectrophotometer manufactured by Varian) is preferred. )) and use ethyl acetate solvent and at a concentration of 0.01g/L Perform the measurement.
光聚合起始劑亦較佳為包含肟化合物與α-胺基酮化合物。藉由併用兩者,容易形成顯影性提高、矩形性優異的圖案。於併用肟化合物與α-胺基酮化合物的情況下,相對於肟化合物100質量份,α-胺基酮化合物較佳為50質量份~600質量份,更佳為150質量份~400質量份。 The photopolymerization initiator also preferably contains an oxime compound and an α-aminoketone compound. By using both together, it is easy to form a pattern with improved developability and excellent rectangularity. When the oxime compound and the α-amino ketone compound are used in combination, the α-amino ketone compound is preferably 50 parts by mass to 600 parts by mass, more preferably 150 parts by mass to 400 parts by mass relative to 100 parts by mass of the oxime compound .
相對於本發明的組成物的總固體成分,光聚合起始劑的含量較佳為0.1質量%~50質量%,更佳為0.5質量%~30質量%,進而佳為1質量%~20質量%。於該範圍內可獲得更良好的感度與圖案形成性。本發明的組成物可僅包含一種光聚合起始劑,亦可包含兩種以上。於包含兩種以上的情況下,較佳為其合計量成為所述範圍。 Relative to the total solid content of the composition of the present invention, the content of the photopolymerization initiator is preferably 0.1% by mass to 50% by mass, more preferably 0.5% by mass to 30% by mass, and still more preferably 1% by mass to 20% by mass %. Within this range, better sensitivity and pattern formability can be obtained. The composition of the present invention may include only one type of photopolymerization initiator, or may include two or more types. When two or more types are contained, it is preferable that the total amount falls within the said range.
<<樹脂>> <<Resin>>
本發明的組成物含有樹脂。樹脂例如以使顏料等分散於組成物中的用途、黏合劑的用途調配。再者,將主要用以使顏料等分散的樹脂亦稱為分散劑。其中,樹脂的此種用途為一例,亦可出於此種用途以外的目的來使用。 The composition of the present invention contains a resin. The resin is formulated for the purpose of dispersing pigments and the like in the composition and the use of a binder, for example. In addition, the resin mainly used for dispersing pigments etc. is also called a dispersing agent. Among them, such use of the resin is an example, and it can also be used for purposes other than such use.
本發明中,樹脂使用包含具有酸基的樹脂者。作為酸基,可列舉:羧基、磷酸基、磺酸基、酚性羥基等,較佳為羧基。具有酸基的樹脂例如可用作後述的鹼可溶性樹脂或分散劑。 In the present invention, the resin includes a resin having an acid group. As an acid group, a carboxyl group, a phosphoric acid group, a sulfonic acid group, a phenolic hydroxyl group, etc. are mentioned, Preferably it is a carboxyl group. A resin having an acid group can be used, for example, as an alkali-soluble resin or dispersant described later.
樹脂的重量平均分子量(Mw)較佳為2,000~2,000,000。上限較佳為1,000,000以下,更佳為500,000以下。下限較佳為3,000 以上,更佳為5,000以上。另外,於為環氧樹脂的情況下,環氧樹脂的重量平均分子量(Mw)較佳為100以上,更佳為200~2,000,000。上限較佳為1,000,000以下,更佳為500,000以下。下限較佳為100以上,更佳為200以上。 The weight average molecular weight (Mw) of the resin is preferably 2,000 to 2,000,000. The upper limit is preferably 1,000,000 or less, more preferably 500,000 or less. The lower limit is preferably 3,000 Above, more preferably 5,000 or above. In addition, in the case of an epoxy resin, the weight average molecular weight (Mw) of the epoxy resin is preferably 100 or more, more preferably 200 to 2,000,000. The upper limit is preferably 1,000,000 or less, more preferably 500,000 or less. The lower limit is preferably 100 or more, more preferably 200 or more.
(鹼可溶性樹脂) (Alkali-soluble resin)
本發明的組成物較佳為含有鹼可溶性樹脂作為樹脂。藉由本發明的組成物含有鹼可溶性樹脂,顯影性及圖案形成性得到提高。 The composition of the present invention preferably contains an alkali-soluble resin as the resin. When the composition of the present invention contains an alkali-soluble resin, developability and pattern formability are improved.
鹼可溶性樹脂可自具有促進鹼可溶性的基的樹脂中適宜選擇。 The alkali-soluble resin can be appropriately selected from resins having a group that promotes alkali solubility.
鹼可溶性樹脂的重量平均分子量(Mw)較佳為5,000~100,000。另外,鹼可溶性樹脂的數量平均分子量(Mn)較佳為1,000~20,000。鹼可溶性樹脂的酸價較佳為30mgKOH/g~500mgKOH/g。下限更佳為50mgKOH/g以上,進而佳為70mgKOH/g以上。上限更佳為400mgKOH/g以下,進而佳為200mgKOH/g以下,特佳為150mgKOH/g以下,最佳為120mgKOH/g以下。 The weight average molecular weight (Mw) of the alkali-soluble resin is preferably 5,000 to 100,000. In addition, the number average molecular weight (Mn) of the alkali-soluble resin is preferably 1,000 to 20,000. The acid value of the alkali-soluble resin is preferably 30 mgKOH/g to 500 mgKOH/g. The lower limit is more preferably 50 mgKOH/g or more, and still more preferably 70 mgKOH/g or more. The upper limit is more preferably 400 mgKOH/g or less, further preferably 200 mgKOH/g or less, particularly preferably 150 mgKOH/g or less, and most preferably 120 mgKOH/g or less.
作為鹼可溶性樹脂,就耐熱性的觀點而言,較佳為多羥基苯乙烯系樹脂、聚矽氧烷系樹脂、丙烯酸系樹脂、丙烯醯胺系樹脂、丙烯酸/丙烯醯胺共聚物樹脂,就控制顯影性的觀點而言,較佳為丙烯酸系樹脂、丙烯醯胺系樹脂、丙烯酸/丙烯醯胺共聚物樹脂。 As the alkali-soluble resin, from the viewpoint of heat resistance, polyhydroxy styrene resins, polysiloxane resins, acrylic resins, acrylamide resins, and acrylic/acrylamide copolymer resins are preferred. From the viewpoint of controlling developability, acrylic resins, acrylamide resins, and acrylic/acrylamide copolymer resins are preferred.
作為促進鹼可溶性的基(以下,亦稱為酸基),例如可列舉:羧基、磷酸基、磺酸基、酚性羥基等,較佳為於有機溶劑中可溶 且可藉由弱鹼性水溶液顯影者,特佳為羧基。酸基可僅為一種,亦可為兩種以上。 Examples of groups that promote alkali solubility (hereinafter also referred to as acid groups) include carboxyl groups, phosphoric acid groups, sulfonic acid groups, phenolic hydroxyl groups, etc., and are preferably soluble in organic solvents. And it can be developed by weak alkaline aqueous solution, especially preferably carboxyl group. The acid group may be only one type or two or more types.
鹼可溶性樹脂較佳為於側鏈具有羧基的聚合物,可列舉:甲基丙烯酸共聚物、丙烯酸共聚物、衣康酸共聚物、巴豆酸共聚物、馬來酸共聚物、部分酯化馬來酸共聚物、酚醛清漆型樹脂、以及於側鏈具有羧基的酸性纖維素衍生物、於具有羥基的聚合物中加成酸酐而成的聚合物。尤其,較佳的是將(甲基)丙烯酸和可與其進行共聚的其他單體的共聚物作為鹼可溶性樹脂。作為可與(甲基)丙烯酸進行共聚的其他單體,可列舉:(甲基)丙烯酸烷基酯、(甲基)丙烯酸芳基酯、乙烯基化合物等。作為(甲基)丙烯酸烷基酯及(甲基)丙烯酸芳基酯,可列舉:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸己酯、(甲基)丙烯酸辛酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸甲苯酯、(甲基)丙烯酸萘酯、(甲基)丙烯酸環己酯、甲基丙烯酸縮水甘油酯、甲基丙烯酸四氫糠酯等,作為乙烯基化合物,可列舉:苯乙烯、α-甲基苯乙烯、乙烯基甲苯、丙烯腈、乙酸乙烯酯、N-乙烯基吡咯啶酮、聚苯乙烯巨分子單體、聚甲基丙烯酸甲酯巨分子單體等,作為日本專利特開平10-300922號公報中記載的N位取代馬來醯亞胺單體,可列舉:N-苯基馬來醯亞胺、N-環己基馬來醯亞胺等。再者,該些可與(甲基)丙烯酸進行共聚的其他單體可僅為一種,亦可為兩種以上。 The alkali-soluble resin is preferably a polymer having a carboxyl group in the side chain, and examples thereof include methacrylic acid copolymers, acrylic acid copolymers, itaconic acid copolymers, crotonic acid copolymers, maleic acid copolymers, and partially esterified maleic acid. An acid copolymer, a novolak type resin, and an acidic cellulose derivative having a carboxyl group in a side chain, and a polymer obtained by adding an acid anhydride to a polymer having a hydroxyl group. In particular, it is preferable to use a copolymer of (meth)acrylic acid and another monomer copolymerizable therewith as the alkali-soluble resin. Examples of other monomers copolymerizable with (meth)acrylic acid include alkyl (meth)acrylate, aryl (meth)acrylate, vinyl compounds, and the like. Examples of alkyl (meth)acrylate and aryl (meth)acrylate include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, and (meth)acrylate. Butyl acrylate, isobutyl (meth)acrylate, amyl (meth)acrylate, hexyl (meth)acrylate, octyl (meth)acrylate, phenyl (meth)acrylate, (meth)acrylic acid Benzyl ester, toluene (meth)acrylate, naphthyl (meth)acrylate, cyclohexyl (meth)acrylate, glycidyl methacrylate, tetrahydrofurfuryl methacrylate, etc., as vinyl compounds, can be Examples: styrene, α-methylstyrene, vinyl toluene, acrylonitrile, vinyl acetate, N-vinylpyrrolidone, polystyrene macromonomers, polymethyl methacrylate macromonomers, etc. Examples of the N-substituted maleimide monomers described in Japanese Patent Laid-Open No. 10-300922 include N-phenylmaleimide, N-cyclohexylmaleimide, and the like. Furthermore, these other monomers that can be copolymerized with (meth)acrylic acid may be only one type or two or more types.
鹼可溶性樹脂可較佳地使用(甲基)丙烯酸苄酯/(甲基)丙烯酸共聚物、(甲基)丙烯酸苄酯/(甲基)丙烯酸/(甲基)丙烯酸2-羥基乙酯共聚物、包含(甲基)丙烯酸苄酯/(甲基)丙烯酸/其他單體的多元共聚物。另外,亦可較佳地使用將(甲基)丙烯酸2-羥基乙酯共聚而成者、日本專利特開平7-140654號公報中記載的(甲基)丙烯酸2-羥基丙酯/聚苯乙烯巨分子單體/甲基丙烯酸苄酯/甲基丙烯酸共聚物、丙烯酸2-羥基-3-苯氧基丙酯/聚甲基丙烯酸甲酯巨分子單體/甲基丙烯酸苄酯/甲基丙烯酸共聚物、甲基丙烯酸2-羥基乙酯/聚苯乙烯巨分子單體/甲基丙烯酸甲酯/甲基丙烯酸共聚物、甲基丙烯酸2-羥基乙酯/聚苯乙烯巨分子單體/甲基丙烯酸苄酯/甲基丙烯酸共聚物等。另外,作為市售品,例如亦可使用FF-426(藤倉化成(股)製造)等。 Alkali-soluble resin can preferably use benzyl (meth)acrylate/(meth)acrylic acid copolymer, benzyl (meth)acrylate/(meth)acrylic acid/(meth)acrylic acid 2-hydroxyethyl copolymer , A multi-element copolymer containing benzyl (meth)acrylate/(meth)acrylic acid/other monomers. In addition, a copolymer of 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate/polystyrene described in Japanese Patent Laid-Open No. 7-140654 can also be preferably used. Macromonomer/benzyl methacrylate/methacrylic acid copolymer, 2-hydroxy-3-phenoxypropyl acrylate/polymethyl methacrylate macromonomer/benzyl methacrylate/methacrylic acid Copolymer, 2-hydroxyethyl methacrylate/polystyrene macromonomer/methyl methacrylate/methacrylic acid copolymer, 2-hydroxyethyl methacrylate/polystyrene macromonomer/formaldehyde Benzyl acrylate/methacrylic acid copolymer, etc. In addition, as a commercially available product, for example, FF-426 (manufactured by Fujikura Kasei Co., Ltd.) or the like can also be used.
鹼可溶性樹脂亦較佳為包含將單體成分聚合而成的聚合物,所述單體成分包含下述式(ED1)所示的化合物及下述式(ED2)所表示的化合物(以下,有時亦將該些化合物稱為「醚二聚體」)中的至少一者。 The alkali-soluble resin also preferably contains a polymer obtained by polymerizing monomer components, the monomer components including a compound represented by the following formula (ED1) and a compound represented by the following formula (ED2) (hereinafter, These compounds are also referred to as at least one of "ether dimers").
式(ED1)中,R1及R2分別獨立地表示氫原子或可具 有取代基的碳數1~25的烴基。 In the formula (ED1), R 1 and R 2 each independently represent a hydrogen atom or an optionally substituted hydrocarbon group having 1 to 25 carbon atoms.
式(ED2)中,R表示氫原子或碳數1~30的有機基。作為式(ED2)的具體例,可參考日本專利特開2010-168539號公報的記載。 In formula (ED2), R represents a hydrogen atom or an organic group having 1 to 30 carbon atoms. As a specific example of the formula (ED2), reference can be made to the description in Japanese Patent Laid-Open No. 2010-168539.
式(ED1)中,R1及R2所表示的可具有取代基的碳數1~25的烴基並無特別限制,例如可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第三丁基、第三戊基、硬脂基、月桂基、2-乙基己基等直鏈狀或分支狀的烷基;苯基等芳基;環己基、第三丁基環己基、二環戊二烯基、三環癸烷基、異冰片基、金剛烷基、2-甲基-2-金剛烷基等脂環式基;1-甲氧基乙基、1-乙氧基乙基等經烷氧基取代的烷基;苄基等經芳基取代的烷基等。該些之中,就耐熱性的方面而言,特佳為甲基、乙基、環己基、苄基等不易因酸或熱而脫離的一級碳或二級碳的取代基。 In the formula (ED1), the optionally substituted hydrocarbon group with 1 to 25 carbons represented by R 1 and R 2 is not particularly limited, and examples thereof include methyl, ethyl, n-propyl, isopropyl, and n-propyl. Butyl, isobutyl, tertiary butyl, tertiary pentyl, stearyl, lauryl, 2-ethylhexyl and other linear or branched alkyl groups; phenyl and other aryl groups; cyclohexyl, the first Alicyclic groups such as tributylcyclohexyl, dicyclopentadienyl, tricyclodecyl, isobornyl, adamantyl, 2-methyl-2-adamantyl, etc.; 1-methoxyethyl , 1-ethoxyethyl and other alkyl substituted by alkoxy; benzyl and other alkyl substituted by aryl, etc. Among these, in terms of heat resistance, a substituent of a primary carbon or a secondary carbon, such as a methyl group, an ethyl group, a cyclohexyl group, and a benzyl group, which is not easily removed by acid or heat, is particularly preferred.
作為醚二聚體的具體例,例如可參考日本專利特開2013-29760號公報的段落編號0317,將該內容併入至本說明書中。醚二聚體可僅為一種,亦可為兩種以上。 As a specific example of the ether dimer, for example, paragraph number 0317 of JP 2013-29760 A can be referred to, and this content is incorporated in this specification. There may be only one type of ether dimer, or two or more types.
鹼可溶性樹脂亦可包含源自下述式(X)所示的化合物的重複單元。 Alkali-soluble resin may also contain the repeating unit derived from the compound represented by following formula (X).
式(X)中,R1表示氫原子或甲基,R2表示碳數2~10的伸烷基,R3表示氫原子或可包含苯環的碳數1~20的烷基。n表示1~15的整數。 In the formula (X), R 1 represents a hydrogen atom or a methyl group, R 2 represents an alkylene group having 2 to 10 carbon atoms, and R 3 represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms that may contain a benzene ring. n represents an integer of 1-15.
所述式(X)中,R2的伸烷基的碳數較佳為2~3。另外,R3的烷基的碳數為1~20,更佳為1~10,R3的烷基可包含苯環。作為R3所表示的包含苯環的烷基,可列舉苄基、2-苯基(異)丙基等。 In the formula (X), the carbon number of the alkylene group of R 2 is preferably 2-3. Moreover, the carbon number of the alkyl group of R 3 is 1-20, More preferably, it is 1-10, and the alkyl group of R 3 may contain a benzene ring. Examples of the alkyl group containing a benzene ring represented by R 3 include a benzyl group, a 2-phenyl(iso)propyl group, and the like.
鹼可溶性樹脂亦可使用接枝共聚物。再者,本發明中,所謂接枝共聚物是指具有接枝鏈的樹脂。另外,所謂接枝鏈,表示自聚合物的主鏈的根部直至從主鏈分支的基的末端為止。 Alkali-soluble resins can also use graft copolymers. In addition, in the present invention, the so-called graft copolymer refers to a resin having a graft chain. In addition, the term “graft chain” means from the root of the main chain of the polymer to the end of the group branched from the main chain.
接枝共聚物較佳為具有除氫原子以外的原子數為40~10000的範圍的接枝鏈的樹脂。另外,每一條接枝鏈的除氫原子以外的原子數較佳為40~10000,更佳為50~2000,進而佳為60~500。 The graft copolymer is preferably a resin having a graft chain in the range of 40 to 10,000 atoms other than hydrogen atoms. In addition, the number of atoms other than hydrogen atoms in each grafted chain is preferably 40 to 10,000, more preferably 50 to 2,000, and still more preferably 60 to 500.
作為接枝共聚物的主鏈結構,可列舉:(甲基)丙烯酸樹 脂、聚酯樹脂、聚胺基甲酸酯樹脂、聚脲樹脂、聚醯胺樹脂、聚醚樹脂等。其中,較佳為(甲基)丙烯酸樹脂。為了使接枝部位與溶劑的相互作用性提昇並藉此提高分散性,接枝共聚物的接枝鏈較佳為具有聚(甲基)丙烯酸、聚酯、或聚醚的接枝鏈,更佳為具有聚酯或聚醚的接枝鏈。 As the main chain structure of the graft copolymer, one can cite: (meth)acrylic resin Grease, polyester resin, polyurethane resin, polyurea resin, polyamide resin, polyether resin, etc. Among them, (meth)acrylic resin is preferred. In order to improve the interaction between the grafting site and the solvent and thereby improve the dispersibility, the graft chain of the graft copolymer preferably has a graft chain of poly(meth)acrylic acid, polyester, or polyether, and more Preferably, it has a graft chain of polyester or polyether.
接枝共聚物較佳為包含下述式(1)~式(4)的任一者所表示的重複單元。 The graft copolymer preferably contains a repeating unit represented by any of the following formulas (1) to (4).
式(1)~式(4)中,W1、W2、W3及W4分別獨立地表示氧原子或NH,X1、X2、X3、X4及X5分別獨立地表示氫原子、一價基,Y1、Y2、Y3及Y4分別獨立地表示二價連結基,Z1、Z2、Z3及Z4分別獨立地表示一價基,R3表示伸烷基,R4表示氫原子或一價基,n、m、p及q分別獨立地表示1~500的整數,j及k分別獨立地表示2~8的整數。式(3)中,當p為2~500時,存在多個的R3可相互相同亦可不同。式(4)中,當q為2~500時, 存在多個的X5及R4可相互相同亦可不同。 In formulas (1) to (4), W 1 , W 2 , W 3 and W 4 each independently represent an oxygen atom or NH, and X 1 , X 2 , X 3 , X 4 and X 5 each independently represent hydrogen Atom, monovalent group, Y 1 , Y 2 , Y 3 and Y 4 each independently represent a divalent linking group, Z 1 , Z 2 , Z 3 and Z 4 each independently represent a monovalent group, R 3 represents an alkane R 4 represents a hydrogen atom or a monovalent group, n, m, p, and q each independently represent an integer of 1 to 500, and j and k each independently represent an integer of 2 to 8. In formula (3), when p is 2 to 500, multiple R 3 may be the same as or different from each other. In formula (4), when q is 2 to 500, X 5 and R 4 that are present in plural may be the same or different from each other.
W1、W2、W3及W4較佳為氧原子。 W 1 , W 2 , W 3 and W 4 are preferably oxygen atoms.
X1、X2、X3、X4及X5較佳為分別獨立地為氫原子或碳數1~12的烷基,更佳為氫原子或甲基,特佳為甲基。 X 1 , X 2 , X 3 , X 4 and X 5 are each independently a hydrogen atom or an alkyl group having 1 to 12 carbons, more preferably a hydrogen atom or a methyl group, and particularly preferably a methyl group.
Y1、Y2、Y3及Y4分別獨立地表示二價連結基。作為二價連結基,可列舉:包含-CO-、-O-、-NH-、伸烷基、伸芳基及該些的組合的基。 Y 1 , Y 2 , Y 3 and Y 4 each independently represent a divalent linking group. As a divalent linking group, the group containing -CO-, -O-, -NH-, an alkylene group, an arylene group, and a combination of these can be mentioned.
Z1、Z2、Z3及Z4所表示的一價基的結構並無特別限定。例如可列舉:烷基、羥基、烷氧基、芳氧基、雜芳氧基、烷基硫醚基、芳基硫醚基、雜芳基硫醚基及胺基等。 The structure of the monovalent group represented by Z 1 , Z 2 , Z 3 and Z 4 is not particularly limited. For example, an alkyl group, a hydroxyl group, an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkyl sulfide group, an aryl sulfide group, a heteroaryl sulfide group, an amino group, etc. are mentioned.
式(1)~式(4)中,n、m、p及q分別獨立地為1~500的整數。另外,式(1)及式(2)中,j及k分別獨立地表示2~8的整數。就分散穩定性、顯影性的觀點而言,式(1)及式(2)中的j及k較佳為4~6的整數,最佳為5。 In formula (1) to formula (4), n, m, p, and q are each independently an integer of 1 to 500. In addition, in formula (1) and formula (2), j and k each independently represent an integer of 2-8. From the viewpoint of dispersion stability and developability, j and k in formula (1) and formula (2) are preferably an integer of 4 to 6, and most preferably 5.
式(3)中,R3表示伸烷基,較佳為碳數1~10的伸烷基,更佳為碳數2或3的伸烷基。當p為2~500時,存在多個的R3可相互相同亦可不同。 In the formula (3), R 3 represents an alkylene group, preferably an alkylene group having 1 to 10 carbon atoms, and more preferably an alkylene group having 2 or 3 carbon atoms. When p is 2 to 500, multiple R 3 may be the same as or different from each other.
式(4)中,R4表示氫原子或一價基。R4較佳為氫原子、烷基、芳基、或雜芳基,更佳為氫原子、或烷基。式(4)中,當q為2~500時,存在多個的X5及R4可相互相同亦可不同。 In formula (4), R 4 represents a hydrogen atom or a monovalent group. R 4 is preferably a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group, and more preferably a hydrogen atom or an alkyl group. In formula (4), when q is 2 to 500, X 5 and R 4 that exist in plural may be the same as or different from each other.
關於所述式的詳細情況,可參考日本專利特開2012-255128號公報的段落編號0025~段落編號0069的記載,將 所述內容併入至本說明書中。 For the details of the formula, refer to the descriptions of paragraph numbers 0025 to 0069 in Japanese Patent Laid-Open No. 2012-255128, and The content is incorporated into this specification.
作為鹼可溶性樹脂的具體例,可列舉以下。 As a specific example of alkali-soluble resin, the following can be mentioned.
鹼可溶性樹脂可參考日本專利特開2012-208494號公報的段落編號0558~段落編號0571(相對應的美國專利申請公開第2012/0235099號說明書的[0685]~[0700])的記載,將該些內容併入至本說明書中。另外,亦可使用日本專利特開2012-32767號公報的段落編號0029~段落編號0063中記載的共聚物(B)及實施例中所使用的鹼可溶性樹脂、日本專利特開2012-208474號公報的段落編號0088~段落編號0098中記載的黏合劑樹脂及實施例中所使用的黏合劑樹脂、日本專利特開2012-137531號公報的段落編號0022~段落編號0032中記載的黏合劑樹脂及實施例中所使用的黏合劑樹脂、日本專利特開2013-024934號公報的段落編號0132~段落編號0143中記載的黏合劑樹脂及實施例中所使用的黏合劑樹脂、日本專利特開2011-242752號公報的段落編號0092~段落編號0098中記載的黏合劑樹脂及實施例中所使用的黏合劑樹脂、日本專利特開2012-032770號公報的段落編號0030~段落編號0072中記載的黏合劑樹脂。將該些內容併入至本說明書中。 Alkali-soluble resins can refer to paragraphs 0558 to 0571 of Japanese Patent Laid-Open No. 2012-208494 (corresponding U.S. Patent Application Publication No. 2012/0235099 [0685] to [0700]). These contents are incorporated into this manual. In addition, the copolymer (B) described in paragraph number 0029 to paragraph number 0063 of JP 2012-32767 A, the alkali-soluble resin used in the examples, and Japanese Patent Laid-Open No. 2012-208474 can also be used. The adhesive resin described in paragraph number 0088 to paragraph number 0098 and the adhesive resin used in the examples, and the adhesive resin described in paragraph number 0022 to paragraph number 0032 of Japanese Patent Laid-Open No. 2012-137531 and implementation The adhesive resin used in the examples, the adhesive resin described in paragraph numbers 0132 to 0143 of Japanese Patent Laid-Open No. 2013-024934, and the adhesive resin used in the examples, Japanese Patent Laid-Open No. 2011-242752 The adhesive resin described in paragraph number 0092 to paragraph number 0098 and the adhesive resin used in the examples, and the adhesive resin described in paragraph number 0030 to paragraph number 0072 of Japanese Patent Laid-Open No. 2012-032770 . These contents are incorporated into this manual.
亦可於鹼可溶性樹脂中使用具有聚合性基的鹼可溶性樹脂。作為聚合性基,可列舉(甲基)烯丙基、(甲基)丙烯醯基等。具有聚合性基的鹼可溶性樹脂中,於側鏈含有聚合性基的鹼可溶性樹脂等有用。作為含有聚合性基的鹼可溶性樹脂,可列舉:戴娜爾(Dianal)NR系列(三菱麗陽(股)製造)、佛陀瑪(Photomer)6173(含有COOH的聚胺基甲酸酯丙烯酸系寡聚物,鑽石三葉草有限公司(Diamond Shamrock Co.,Ltd.)製造)、比斯克(Biscoat)R-264、KS抗蝕劑(KS Resist)106(均為大阪有機化學工業(股)製造)、賽庫洛瑪(Cyclomer)P系列(例如,ACA230AA)、普拉賽爾(Placcel)CF200系列(均為大賽璐(Daicel)(股)製造)、艾巴克力(Ebecryl)3800(大賽璐UCB(Daicel UCB)(股)製造)、壓克力庫亞(Acrycure)RD-F8(日本觸媒(股)製造)等。 Alkali-soluble resins having polymerizable groups may also be used for alkali-soluble resins. As a polymerizable group, a (meth)allyl group, a (meth)acryloyl group, etc. are mentioned. Among alkali-soluble resins having polymerizable groups, alkali-soluble resins containing polymerizable groups in the side chain and the like are useful. Examples of alkali-soluble resins containing polymerizable groups include: Dianal NR series (manufactured by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (polyurethane acrylic oligomer containing COOH) Polymer, Diamond Shamrock Co., Ltd. (manufactured by Diamond Shamrock Co., Ltd.), Biscoat R-264, KS Resist 106 (all manufactured by Osaka Organic Chemical Industry Co., Ltd.), Cyclomer P series (for example, ACA230AA), Placcel CF200 series (all manufactured by Daicel (stock)), Ebecryl 3800 (Dacell UCB ( Daicel UCB (Stock), Acrycure RD-F8 (Nippon Shokubai Co., Ltd.), etc.
(分散劑) (Dispersant)
本發明的組成物可含有樹脂形式的分散劑。於使用顏料的情況下,特佳為包含分散劑。分散劑可列舉酸性分散劑(酸性樹脂)、鹼性分散劑(鹼性樹脂)。分散劑較佳為至少包含酸性分散劑,更佳為僅為酸性分散劑。藉由分散劑至少包含酸性分散劑,顏料的分散性提高,可獲得優異的顯影性,故可利用光微影較佳地進行圖案形成。再者,所謂分散劑僅為酸性分散劑,例如酸性分散劑於分散劑的總質量中的含量較佳為99質量%以上,亦可設為99.9質量%以上。 The composition of the present invention may contain a dispersant in the form of a resin. In the case of using a pigment, it is particularly preferable to include a dispersant. Examples of the dispersant include acidic dispersants (acidic resins) and basic dispersants (alkaline resins). The dispersant preferably contains at least an acidic dispersant, and more preferably only an acidic dispersant. When the dispersant contains at least an acidic dispersant, the dispersibility of the pigment is improved, and excellent developability can be obtained. Therefore, photolithography can be used for better pattern formation. In addition, the so-called dispersant is only an acidic dispersant. For example, the content of the acidic dispersant in the total mass of the dispersant is preferably 99% by mass or more, and may be 99.9% by mass or more.
此處,所謂酸性分散劑(酸性樹脂),表示酸基的量多 於鹼性基的量的樹脂。當將酸基的量與鹼性基的量的合計量設為100莫耳%時,酸性分散劑(酸性樹脂)較佳為酸基的量佔70莫耳%以上的樹脂,更佳為實質上僅包含酸基的樹脂。酸性分散劑(酸性樹脂)所具有的酸基較佳為羧基。 Here, the so-called acidic dispersant (acidic resin) means that the amount of acid groups is large The amount of the resin in the basic group. When the total amount of the amount of acid groups and the amount of basic groups is set to 100 mol%, the acidic dispersant (acidic resin) is preferably a resin in which the amount of acid groups occupies 70 mol% or more, and more preferably is substantial. The above resin contains only acid groups. The acid group possessed by the acidic dispersant (acid resin) is preferably a carboxyl group.
另外,所謂鹼性分散劑(鹼性樹脂),表示鹼性基的量多於酸基的量的樹脂。當將酸基的量與鹼性基的量的合計量設為100莫耳%時,鹼性分散劑(鹼性樹脂)較佳為鹼性基的量佔50莫耳%以上的樹脂。鹼性分散劑所具有的鹼性基較佳為胺基。 In addition, the so-called basic dispersant (basic resin) refers to a resin in which the amount of basic groups is greater than the amount of acid groups. When the total amount of the amount of acid groups and the amount of basic groups is 100 mol%, the basic dispersant (alkaline resin) is preferably a resin in which the amount of basic groups accounts for 50 mol% or more. The basic group possessed by the basic dispersant is preferably an amino group.
酸性分散劑(酸性樹脂)的酸價較佳為40mgKOH/g~105mgKOH/g,更佳為50mgKOH/g~105mgKOH/g,進而佳為60mgKOH/g~105mgKOH/g。 The acid value of the acidic dispersant (acid resin) is preferably 40mgKOH/g~105mgKOH/g, more preferably 50mgKOH/g~105mgKOH/g, and still more preferably 60mgKOH/g~105mgKOH/g.
用作分散劑的樹脂較佳為包含具有酸基的重複單元。藉由樹脂包含具有酸基的重複單元,當藉由光微影形成圖案時,可進一步減少畫素的基底上所產生的殘渣。 The resin used as a dispersant preferably contains a repeating unit having an acid group. Since the resin contains repeating units with acid groups, when the pattern is formed by photolithography, the residue generated on the pixel substrate can be further reduced.
另外,用作分散劑的樹脂亦較佳為接枝共聚物。接枝共聚物藉由接枝鏈而具有與溶劑的親和性,因此顏料的分散性、以及經時後的分散穩定性優異。另外,組成物中,藉由接枝鏈的存在而具有與聚合性化合物或鹼可溶性樹脂等的親和性,因此可於鹼顯影中難以產生殘渣。接枝共聚物可列舉所述鹼可溶性樹脂中說明的包含式(1)~式(4)的任一者所表示的重複單元的樹脂。例如可列舉下述樹脂。另外,亦可將以下樹脂用作鹼可溶性樹脂。 In addition, the resin used as a dispersant is also preferably a graft copolymer. The graft copolymer has affinity with the solvent due to the graft chain, and therefore the dispersibility of the pigment and the dispersion stability over time are excellent. In addition, the composition has affinity with polymerizable compounds, alkali-soluble resins, etc. due to the presence of graft chains, and therefore it is difficult to generate residues during alkali development. Examples of the graft copolymer include resins containing repeating units represented by any one of formula (1) to formula (4) described in the alkali-soluble resin. For example, the following resins can be mentioned. In addition, the following resins can also be used as alkali-soluble resins.
[化51]
分散劑亦可使用於主鏈及側鏈的至少一者包含氮原子的寡聚亞胺(oligoimine)系樹脂。寡聚亞胺系樹脂較佳為具有含有基X的重複單元與側鏈、且於主鏈及側鏈的至少一者具有鹼性氮原子的樹脂,所述基X含有具有pKa 14以下的官能基的部分結構,所述側鏈包含原子數40~10,000的側鏈Y。所謂鹼性氮原子,只要為呈鹼性的氮原子,則並無特別限制。 The dispersant can also be used in oligoimine resins in which at least one of the main chain and the side chain contains a nitrogen atom. The oligoimine-based resin is preferably a resin having a repeating unit and a side chain containing a group X, and at least one of the main chain and the side chain has a basic nitrogen atom, and the group X contains a functional group having a pKa of 14 or less. The partial structure of the group, the side chain includes a side chain Y with 40 to 10,000 atoms. The basic nitrogen atom is not particularly limited as long as it is a basic nitrogen atom.
寡聚亞胺系樹脂例如可列舉包含式(I-1)所表示的重複單元、式(I-2)所表示的重複單元及式(I-2a)所表示的重複單元中的至少任一者的樹脂等。 The oligoimine-based resin may include at least any one of the repeating unit represented by formula (I-1), the repeating unit represented by formula (I-2), and the repeating unit represented by formula (I-2a), for example. The resin and so on.
R1及R2各自獨立地表示氫原子、鹵素原子或烷基(較佳為碳數1~6)。a各自獨立地表示1~5的整數。*表示重複單元間的連結部。 R 1 and R 2 each independently represent a hydrogen atom, a halogen atom, or an alkyl group (preferably having 1 to 6 carbon atoms). a represents an integer of 1 to 5 independently of each other. * Indicates the connection between the repeating units.
R8及R9為含義與R1相同的基。 R 8 and R 9 have the same meaning as R 1.
L為單鍵、伸烷基(較佳為碳數1~6)、伸烯基(較佳為碳數2~6)、伸芳基(較佳為碳數6~24)、伸雜芳基(較佳為碳數1~6)、亞胺基(較佳為碳數0~6)、醚基、硫醚基、羰基、或該些的組合中的連結基。其中,較佳為單鍵或-CR5R6-NR7-(亞胺基成為X或Y)。此處,R5、R6各自獨立地表示氫原子、鹵素原子、烷基(較佳為碳數1~6)。R7為氫原子或碳數1~6的烷基。 L is a single bond, alkylene (preferably carbon number 1 to 6), alkenylene (preferably carbon number 2 to 6), arylene group (preferably carbon number 6 to 24), heteroarylene Group (preferably carbon number 1 to 6), imino group (preferably carbon number 0 to 6), ether group, thioether group, carbonyl group, or linking group in a combination of these. Among them, a single bond or -CR 5 R 6 -NR 7- (imino group becomes X or Y) is preferred. Here, R 5 and R 6 each independently represent a hydrogen atom, a halogen atom, and an alkyl group (preferably carbon number 1 to 6). R 7 is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
La為與CR8CR9及N一起形成環結構的結構部位,較佳為與CR8CR9的碳原子一併形成碳數3~7的非芳香族雜環的結構部位。更佳為與CR8CR9的碳原子及N(氮原子)一併形成5員~7員的非芳香族雜環的結構部位,進而佳為形成5員的非芳香族雜環的結構部位,特佳為形成吡咯啶的結構部位。該結構部位亦可進而具有烷基等取代基。 La is a structural part that forms a ring structure together with CR 8 CR 9 and N, and is preferably a structural part that forms a non-aromatic heterocyclic ring with 3 to 7 carbons together with the carbon atom of CR 8 CR 9. It is more preferable to form a 5-member to 7-membered non-aromatic heterocyclic structure site together with the carbon atom of CR 8 CR 9 and N (nitrogen atom), and it is more preferable to form a 5-membered non-aromatic heterocyclic structure site , It is particularly preferred to form the structural part of pyrrolidine. This structural part may further have substituents, such as an alkyl group.
X表示含有具有pKa 14以下的官能基的部分結構的基。 X represents a group containing a partial structure having a functional group having pKa 14 or less.
Y表示原子數40~10,000的側鏈。 Y represents a side chain with 40 to 10,000 atoms.
所述樹脂(寡聚亞胺系樹脂)亦可進而含有選自式(I-3)、式(I-4)及式(I-5)所表示的重複單元中的一種以上作為共聚成分。藉由所述樹脂包含此種重複單元,可進一步提高顏料的分散性能。 The resin (oligoimine-based resin) may further contain one or more selected from repeating units represented by formula (I-3), formula (I-4), and formula (I-5) as a copolymerization component. Since the resin contains such a repeating unit, the dispersibility of the pigment can be further improved.
[化53]
R1、R2、R8、R9、L、La、a及*的含義與式(I-1)、式(I-2)、式(I-2a)中的規定相同。 R 1, R 2, R 8 , R 9,, the same provisions of the formula (I-2a) L, L a, a * and the meanings of formula (I-1), formula (I-2).
Ya表示具有陰離子基的原子數40~10,000的側鏈。式(I-3)所表示的重複單元可藉由向於主鏈部具有一級胺基或二級胺基的樹脂中添加具有與胺反應而形成鹽的基的寡聚物或聚合物並使其反應而形成。 Ya represents a side chain with 40 to 10,000 atoms having an anionic group. The repeating unit represented by the formula (I-3) can be made by adding an oligomer or polymer having a group that reacts with an amine to form a salt to a resin having a primary or secondary amine group in the main chain. It is formed by reaction.
關於所述寡聚亞胺系樹脂,可參考日本專利特開2012-255128號公報的段落編號0102~段落編號0166的記載,將所述內容併入至本說明書中。作為寡聚亞胺系樹脂的具體例,例如可列舉以下。另外,可使用日本專利特開2012-255128號公報的段落編號0168~段落編號0174中記載的樹脂。 Regarding the oligoimine-based resin, reference can be made to the description of paragraph number 0102 to paragraph number 0166 of JP 2012-255128 A, and the content is incorporated into this specification. As a specific example of an oligoimine resin, the following can be mentioned, for example. In addition, the resins described in paragraph numbers 0168 to 0174 of JP 2012-255128 A can be used.
分散劑亦可使用包含下述式(P1)所表示的重複單元的樹脂。 The dispersant may also use a resin containing a repeating unit represented by the following formula (P1).
式(P1)中,R1表示氫或甲基,R2表示伸烷基,Z表示含氮雜環結構。 In the formula (P1), R 1 represents hydrogen or methyl, R 2 represents an alkylene group, and Z represents a nitrogen-containing heterocyclic structure.
R2所表示的伸烷基並無特別限定,例如可較佳地列舉:亞甲基、伸乙基、三亞甲基、四亞甲基、六亞甲基、2-羥基伸丙基、亞甲氧基、伸乙氧基、亞甲氧基羰基、亞甲硫基等,更佳為亞甲基、亞甲氧基、亞甲氧基羰基、亞甲硫基。 The alkylene group represented by R 2 is not particularly limited. For example, preferred examples include: methylene, ethylene, trimethylene, tetramethylene, hexamethylene, 2-hydroxypropylene, ethylene Methoxy, ethyleneoxy, methyleneoxycarbonyl, methylenethio, etc., more preferably methylene, methyleneoxy, methyleneoxycarbonyl, methylenethio.
Z所表示的含氮雜環結構例如可列舉具有吡啶環、吡嗪環、嘧啶環、吡咯環、咪唑環、三唑環、四唑環、吲哚環、喹啉環、吖啶環、啡噻嗪環、啡噁嗪環、吖啶酮環、蒽醌環、苯并咪唑結構、苯并三唑結構、苯并噻唑結構、環狀醯胺結構、環狀脲結構及環狀醯亞胺結構者。該些中,作為Z所表示的含氮雜環結構,較佳為下述式(P2)或式(P3)所表示的結構。 The nitrogen-containing heterocyclic structure represented by Z includes, for example, a pyridine ring, a pyrazine ring, a pyrimidine ring, a pyrrole ring, an imidazole ring, a triazole ring, a tetrazole ring, an indole ring, a quinoline ring, an acridine ring, and a phenanthrene ring. Thiazine ring, phenoxazine ring, acridone ring, anthraquinone ring, benzimidazole structure, benzotriazole structure, benzothiazole structure, cyclic amide structure, cyclic urea structure and cyclic imide Structurer. Among these, the nitrogen-containing heterocyclic structure represented by Z is preferably a structure represented by the following formula (P2) or formula (P3).
[化56]
式中,X為單鍵、選自由伸烷基(例如,亞甲基、伸乙基、伸丙基、三亞甲基、四亞甲基等)、-O-、-S-、-NR-及-C(=O)-所組成的群組中的任一者。再者,此處,R表示氫原子或烷基。該些中,X較佳為單鍵、亞甲基、-O-、-C(=O)-,特佳為-C(=O)-。 In the formula, X is a single bond, selected from alkylene (for example, methylene, ethylene, propylene, trimethylene, tetramethylene, etc.), -O-, -S-, -NR- And any one of the group consisting of -C(=O)-. In addition, here, R represents a hydrogen atom or an alkyl group. Among these, X is preferably a single bond, methylene, -O-, -C(=O)-, and particularly preferably -C(=O)-.
式中,環A、環B及環C分別獨立地表示芳香環。作為芳香環,例如可列舉:苯環、萘環、茚環、薁環、茀環、蒽環、吡啶環、吡嗪環、嘧啶環、吡咯環、咪唑環、吲哚環、喹啉環、吖啶環、啡噻嗪環、啡噁嗪環、吖啶酮環、蒽醌環等,其中,較佳為苯環、萘環、蒽環、吡啶環、啡噁嗪環、吖啶環、啡噻嗪環、吖啶酮環、蒽醌環,特佳為苯環、萘環、吡啶環。 In the formula, ring A, ring B, and ring C each independently represent an aromatic ring. Examples of the aromatic ring include benzene ring, naphthalene ring, indene ring, azulene ring, pyridine ring, anthracene ring, pyridine ring, pyrazine ring, pyrimidine ring, pyrrole ring, imidazole ring, indole ring, quinoline ring, Acridine ring, phenanthrazine ring, phenanthrazine ring, acridone ring, anthraquinone ring, etc., among which benzene ring, naphthalene ring, anthracene ring, pyridine ring, phenanthrazine ring, acridine ring, Phthiazine ring, acridone ring, anthraquinone ring, particularly preferably benzene ring, naphthalene ring and pyridine ring.
作為式(P1)所表示的重複單元的具體例,例如可列舉以下。除此以外,可參考日本專利特開2008-009426號公報的段落編號0023的記載,將該內容併入至本說明書中。 As a specific example of the repeating unit represented by formula (P1), the following can be mentioned, for example. In addition, the description of paragraph number 0023 of JP 2008-009426 A can be referred to, and the content can be incorporated into this specification.
[化57]
作為包含式(P1)所表示的重複單元與其他重複單元的樹脂的具體例,可列舉以下。 As a specific example of the resin containing the repeating unit represented by Formula (P1) and another repeating unit, the following can be mentioned.
分散劑亦可作為市售品而獲取,作為此種具體例,可列舉:楠本化成(股)製造的「DA-7301」;畢克化學(BYKChemie)公司製造的「迪斯帕畢克(Disperbyk)-101(聚醯胺胺磷酸鹽)、107(羧酸酯)、110(包含酸基的共聚物)、111(磷酸系分散劑)、130(聚醯胺)、161、162、163、164、165、166、170(高分子共聚物)」;畢克化學(BYKChemie)公司製造的「畢克(BYK)-P104、P105(高分子量不飽和多羧酸)」;埃夫卡(EFKA)公司製造的「埃夫卡(EFKA)4047、4050~4165(聚胺基甲酸酯系)、埃夫卡(EFKA) 4330~4340(嵌段共聚物)、4400~4402(改質聚丙烯酸酯)、5010(聚酯醯胺)、5765(高分子量多羧酸鹽)、6220(脂肪酸聚酯)、6745(酞青衍生物)、6750(偶氮顏料衍生物)」;味之素精細化學(Ajinomoto Fine-Techno)(股)製造的「阿吉斯帕(Ajisper)PB821、PB822、PB880、PB881」;共榮社化學(股)製造的「弗洛蘭(Flowlen)TG-710(胺基甲酸酯寡聚物)」、「珀利弗洛(Polyflow)No.50E、No.300(丙烯酸系共聚物)」;楠本化成(股)製造的「帝司巴隆(Disparlon)KS-860、873SN、874、#2150(脂肪族多元羧酸)、#7004(聚醚酯)、DA-703-50、DA-705、DA-725」;花王(股)製造的「戴默爾(Demol)RN、N(萘磺酸福馬林縮聚物)、MS、C、SN-B(芳香族磺酸福馬林縮聚物)」;花王(股)製造的「荷摩蓋諾爾(Homogenol)L-18(高分子多羧酸)」;花王(股)製造的「艾瑪爾根(Emulgen)920、930、935、985(聚氧伸乙基壬基苯基醚)」;花王(股)製造的「阿塞他明(Acetamin)86(硬脂基胺乙酸酯)」;日本路博潤(Lubrizol)(股)製造的「索爾斯帕斯(Solsperse)5000(酞青衍生物)、22000(偶氮顏料衍生物)、13240(聚酯胺)、3000、12000、17000、20000、27000(於末端部具有功能部的高分子)、24000、28000、32000、38500(接枝型高分子)」;日光化學(Nikko Chemicals)(股)製造的「尼考爾(Nikkol)T106(聚氧伸乙基脫水山梨糖醇單油酸酯)、MYS-IEX(聚氧伸乙基單硬脂酸酯)」;川研精化(Kawaken Fine Chemicals)(股)製造的「西諾科特(Hinoact)T-8000E」;信越化學工業(股) 製造的「有機矽氧烷聚合物KP341」;森下產業(股)製造的「埃夫卡(EFKA)-46、埃夫卡(EFKA)-47、埃夫卡(EFKA)-47EA、埃夫卡(EFKA)聚合物100、埃夫卡(EFKA)聚合物400、埃夫卡(EFKA)聚合物401、埃夫卡(EFKA)聚合物450」;聖諾普科(San Nopco)(股)製造的「迪斯帕斯愛德(Disperse Aid)6、迪斯帕斯愛德(Disperse Aid)8、迪斯帕斯愛德(Disperse Aid)15、迪斯帕斯愛德(Disperse Aid)9100」;艾迪科(ADEKA)(股)製造的「艾迪科普魯洛尼克(Adeka Pluronic)L31、F38、L42、L44、L61、L64、F68、L72、P95、F77、P84、F87、P94、L101、P103、F108、L121、P-123」;以及三洋化成(股)製造的「伊歐奈特(Ionet)S-20」等。 Dispersants can also be obtained as commercially available products. Specific examples of this include: "DA-7301" manufactured by Kusumoto Chemical Co., Ltd.; "Disperbyk" manufactured by BYK Chemie. )-101 (polyamide phosphate), 107 (carboxylate), 110 (acid group-containing copolymer), 111 (phosphate-based dispersant), 130 (polyamide), 161, 162, 163, 164, 165, 166, 170 (polymer copolymer)"; "BYK-P104, P105 (high molecular weight unsaturated polycarboxylic acid)" manufactured by BYK Chemie; EFKA (EFKA) ) EFKA (EFKA) 4047, 4050-4165 (polyurethane series), EFKA (EFKA) manufactured by the company 4330-4340 (block copolymer), 4400-4402 (modified polyacrylate), 5010 (polyesteramide), 5765 (high molecular weight polycarboxylate), 6220 (fatty acid polyester), 6745 (phthalocyanine) Derivatives), 6750 (Azo pigment derivatives)"; "Ajisper PB821, PB822, PB880, PB881" manufactured by Ajinomoto Fine-Techno (Stock); Kyoeisha "Flowlen TG-710 (urethane oligomer)", "Polyflow No.50E, No.300 (acrylic copolymer)" manufactured by Chemical Co., Ltd. ; "Disparlon (Disparlon) KS-860, 873SN, 874, #2150 (aliphatic polycarboxylic acid), #7004 (polyether ester), DA-703-50, DA- 705, DA-725"; "Demol RN, N (formalin naphthalenesulfonate condensation polymer), MS, C, SN-B (aromatic formalin sulfonate condensation polymer) manufactured by Kao Co., Ltd. "; "Homogenol L-18 (polymer polycarboxylic acid)" manufactured by Kao (Stock); "Emulgen (Emulgen) 920, 930, 935, 985 () manufactured by Kao (Stock) Polyoxyethylene nonyl phenyl ether"; "Acetamin 86 (stearyl amine acetate)" manufactured by Kao; manufactured by Lubrizol (Stock) in Japan Solsperse 5000 (phthalocyanine derivative), 22000 (azo pigment derivative), 13240 (polyester amine), 3000, 12000, 17000, 20000, 27000 (functional part at the end) Polymer), 24000, 28000, 32000, 38500 (grafted polymer)"; "Nikkol T106 (polyoxyethylene sorbitan) manufactured by Nikko Chemicals (stock) Monooleate), MYS-IEX (polyoxyethylene monostearate)"; "Hinoact T-8000E" manufactured by Kawaken Fine Chemicals (stock); Shin-Etsu Chemical Industry Co., Ltd. "Organosiloxane polymer KP341" manufactured by Morishita Industry Co., Ltd. "EFKA-46, EFKA-47, EFKA-47EA, EFKA (EFKA) polymer 100, EFKA polymer 400, EFKA polymer 401, EFKA polymer 450"; manufactured by San Nopco (Stock) "Disperse Aid 6, Disperse Aid 8, Disperse Aid 15, Disperse Aid 9100" ; "Adeka Pluronic (Adeka Pluronic) L31, F38, L42, L44, L61, L64, F68, L72, P95, F77, P84, F87, P94, L101) manufactured by ADEKA (stock) , P103, F108, L121, P-123"; and "Ionet S-20" manufactured by Sanyo Chemical Co., Ltd. etc.
本發明的組成物的自由基聚合性化合物與樹脂的質量比為自由基聚合性化合物/樹脂=0.3~0.7。所述質量比的下限較佳為0.35以上,更佳為0.4以上。所述質量比的上限較佳為0.65以下,更佳為0.6以下。若所述質量比為所述範圍,則可形成矩形性優異的圖案。 The mass ratio of the radical polymerizable compound to the resin of the composition of the present invention is radical polymerizable compound/resin=0.3 to 0.7. The lower limit of the mass ratio is preferably 0.35 or more, more preferably 0.4 or more. The upper limit of the mass ratio is preferably 0.65 or less, more preferably 0.6 or less. If the mass ratio is in the above range, a pattern excellent in rectangularity can be formed.
本發明的組成物的自由基聚合性化合物與具有酸基的樹脂的質量比較佳為自由基聚合性化合物/具有酸基的樹脂=0.3~0.7。所述質量比的下限較佳為0.35以上,更佳為0.4以上。所述質量比的上限較佳為0.65以下,更佳為0.6以下。若所述質量比為所述範圍,則可形成矩形性優異的圖案。 The mass ratio of the radical polymerizable compound and the resin having an acid group of the composition of the present invention is preferably that the radical polymerizable compound/resin having an acid group=0.3 to 0.7. The lower limit of the mass ratio is preferably 0.35 or more, more preferably 0.4 or more. The upper limit of the mass ratio is preferably 0.65 or less, more preferably 0.6 or less. If the mass ratio is in the above range, a pattern excellent in rectangularity can be formed.
本發明的組成物的自由基聚合性化合物與鹼可溶性樹 脂的質量比較佳為自由基聚合性化合物/鹼可溶性樹脂=0.3~0.7。所述質量比的下限較佳為0.35以上,更佳為0.4以上。所述質量比的上限較佳為0.65以下,更佳為0.6以下。若所述質量比為所述範圍,則可形成矩形性優異的圖案。 Radical polymerizable compound and alkali-soluble resin of the composition of the present invention The better quality of the fat is radical polymerizable compound/alkali-soluble resin=0.3~0.7. The lower limit of the mass ratio is preferably 0.35 or more, more preferably 0.4 or more. The upper limit of the mass ratio is preferably 0.65 or less, more preferably 0.6 or less. If the mass ratio is in the above range, a pattern excellent in rectangularity can be formed.
本發明的組成物中,相對於本發明的組成物的總固體成分,樹脂的含量較佳為14質量%~70質量%。下限較佳為17質量%以上,更佳為20質量%以上。上限較佳為56質量%以下,更佳為42質量%以下。 In the composition of the present invention, the content of the resin is preferably 14% by mass to 70% by mass relative to the total solid content of the composition of the present invention. The lower limit is preferably 17% by mass or more, more preferably 20% by mass or more. The upper limit is preferably 56% by mass or less, and more preferably 42% by mass or less.
本發明的組成物中,相對於本發明的組成物的總固體成分,具有酸基的樹脂的含量較佳為14質量%~70質量%。下限較佳為17質量%以上,更佳為20質量%以上。上限較佳為56質量%以下,更佳為42質量%以下。 In the composition of the present invention, the content of the resin having an acid group is preferably 14% by mass to 70% by mass relative to the total solid content of the composition of the present invention. The lower limit is preferably 17% by mass or more, more preferably 20% by mass or more. The upper limit is preferably 56% by mass or less, and more preferably 42% by mass or less.
本發明的組成物中,相對於本發明的組成物的總固體成分,鹼可溶性樹脂的含量較佳為14質量%~70質量%。下限較佳為17質量%以上,更佳為20質量%以上。上限較佳為56質量%以下,更佳為42質量%以下。 In the composition of the present invention, the content of the alkali-soluble resin is preferably 14% by mass to 70% by mass relative to the total solid content of the composition of the present invention. The lower limit is preferably 17% by mass or more, more preferably 20% by mass or more. The upper limit is preferably 56% by mass or less, and more preferably 42% by mass or less.
<<鏈轉移劑>> <<Chain transfer agent>>
本發明的組成物較佳為含有鏈轉移劑。根據該態樣,可藉由圖案形成時的曝光來促進膜表面(圖案表面)的硬化。因此,可抑制曝光時的膜厚的減少等,從而容易形成矩形性更優異的圖案。 The composition of the present invention preferably contains a chain transfer agent. According to this aspect, the hardening of the film surface (pattern surface) can be promoted by exposure at the time of pattern formation. Therefore, it is possible to suppress the reduction of the film thickness during exposure, etc., and it is easy to form a pattern with more excellent rectangularity.
作為鏈轉移劑,可列舉N,N-二烷基胺基苯甲酸烷基酯或硫醇化合物等,較佳為硫醇化合物。硫醇化合物較佳為於分子內 具有兩個以上(較佳為2個~8個,更佳為3個~6個)硫醇基的化合物。作為硫醇化合物的具體例,可列舉:2-巰基苯并噻唑、2-巰基苯并噁唑、2-巰基苯并咪唑、N-苯基巰基苯并咪唑、1,3,5-三(3-巰基丁氧基乙基)-1,3,5-三嗪-2,4,6(1H,3H,5H)-三酮等具有雜環的硫醇化合物、季戊四醇四(3-巰基丁酸酯)、1,4-雙(3-巰基丁醯氧基)丁烷等脂肪族系的硫醇化合物等。另外,亦較佳為使用下述化合物。另外,作為鏈轉移劑的市售品,可列舉:PEMP(長瀨產業(股)製造,硫醇化合物)、桑塞拉(sanceler)M(三新化學工業(股)製造,硫醇化合物)、卡蘭茨(Karenz)MT BD1(昭和電工(股)製造,硫醇化合物)等。 Examples of the chain transfer agent include N,N-dialkylaminobenzoic acid alkyl esters, thiol compounds, and the like, and thiol compounds are preferred. The thiol compound is preferably intramolecular A compound having two or more (preferably 2 to 8, more preferably 3 to 6) thiol groups. Specific examples of thiol compounds include: 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzimidazole, N-phenylmercaptobenzimidazole, 1,3,5-tris( 3-mercaptobutoxyethyl)-1,3,5-triazine-2,4,6(1H,3H,5H)-trione and other thiol compounds with heterocycles, pentaerythritol tetra(3-mercaptobutane) Aliphatic thiol compounds such as acid ester), 1,4-bis(3-mercaptobutanoyloxy)butane, etc. In addition, the following compounds are also preferably used. In addition, as commercial products of the chain transfer agent, PEMP (manufactured by Nagase Sangyo Co., Ltd., thiol compound), Sanceler M (manufactured by Sanshin Chemical Co., Ltd., thiol compound) , Karenz (Karenz) MT BD1 (manufactured by Showa Denko Co., Ltd., mercaptan compound) and so on.
相對於組成物的總固體成分,鏈轉移劑的含量較佳為0.2質量%~5.0質量%,更佳為0.4質量%~3.0質量%。 Relative to the total solid content of the composition, the content of the chain transfer agent is preferably 0.2% by mass to 5.0% by mass, more preferably 0.4% by mass to 3.0% by mass.
相對於自由基聚合性化合物的100質量份,鏈轉移劑的含量較佳為1質量份~40質量份,更佳為2質量份~20質量份。 The content of the chain transfer agent is preferably 1 part by mass to 40 parts by mass, and more preferably 2 parts by mass to 20 parts by mass relative to 100 parts by mass of the radically polymerizable compound.
<<具有環氧基的化合物>> <<Compounds with epoxy groups>>
本發明的組成物亦可含有具有環氧基的化合物。作為具有環氧基的化合物,可列舉:單官能或多官能縮水甘油醚化合物、或者多官能脂肪族縮水甘油醚化合物等。另外,亦可使用具有脂環式環氧基的化合物。 The composition of the present invention may also contain a compound having an epoxy group. Examples of the compound having an epoxy group include monofunctional or polyfunctional glycidyl ether compounds, or polyfunctional aliphatic glycidyl ether compounds. In addition, compounds having an alicyclic epoxy group may also be used.
具有環氧基的化合物可列舉於一分子內具有一個以上環氧基的化合物,較佳為具有兩個以上環氧基的化合物。環氧基較佳為於一分子內具有1個~100個。環氧基的上限例如亦可設為10個以下,亦可設為5個以下。環氧基的下限較佳為2個以上。 Examples of the compound having an epoxy group include compounds having one or more epoxy groups in one molecule, and compounds having two or more epoxy groups are preferred. The epoxy group preferably has 1 to 100 in one molecule. The upper limit of epoxy groups may be 10 or less, for example, and may be 5 or less. The lower limit of epoxy groups is preferably 2 or more.
具有環氧基的化合物的環氧當量(=具有環氧基的化合物的分子量/環氧基的個數)較佳為500g/當量以下,更佳為100g/當量~400g/當量,進而佳為100g/當量~300g/當量。 The epoxy equivalent of the epoxy-containing compound (= the molecular weight of the epoxy-containing compound/the number of epoxy groups) is preferably 500 g/equivalent or less, more preferably 100 g/equivalent to 400 g/equivalent, and more preferably 100g/equivalent to 300g/equivalent.
具有環氧基的化合物可為低分子化合物(例如,分子量未滿2000,進而分子量未滿1000),亦可為高分子化合物(macromolecule)(例如,分子量為1000以上,於聚合物的情況下,重量平均分子量為1000以上)的任一種。具有環氧基的化合物的重量平均分子量較佳為200~100000,更佳為500~50000。重量平均分子量的上限較佳為10000以下,更佳為5000以下,進 而佳為3000以下。 The compound having an epoxy group may be a low-molecular compound (for example, the molecular weight is less than 2000, and the molecular weight is less than 1000), or a macromolecule (for example, the molecular weight is 1000 or more, in the case of a polymer, The weight average molecular weight is 1000 or more). The weight average molecular weight of the compound having an epoxy group is preferably 200 to 100,000, more preferably 500 to 50,000. The upper limit of the weight average molecular weight is preferably 10000 or less, more preferably 5000 or less, and The best value is 3000 or less.
具有環氧基的化合物亦可使用日本專利特開2013-011869號公報的段落編號0034~段落編號0036、日本專利特開2014-043556號公報的段落編號0147~段落編號0156、日本專利特開2014-089408號公報的段落編號0085~段落編號0092中所記載的化合物。將該些內容併入至本說明書中。作為市售品,例如雙酚A型環氧樹脂為jER825、jER827、jER828、jER834、jER1001、jER1002、jER1003、jER1055、jER1007、jER1009、jER1010(以上為三菱化學(股)製造),艾比克隆(EPICLON)860、艾比克隆(EPICLON)1050、艾比克隆(EPICLON)1051、艾比克隆(EPICLON)1055(以上為迪愛生(DIC)(股)製造)等,雙酚F型環氧樹脂為jER806、jER807、jER4004、jER4005、jER4007、jER4010(以上為三菱化學(股)製造),艾比克隆(EPICLON)830、艾比克隆(EPICLON)835(以上為迪愛生(DIC)(股)製造),LCE-21、RE-602S(以上為日本化藥(股)製造)等,苯酚酚醛清漆型環氧樹脂為jER152、jER154、jER157S70、jER157S65(以上為三菱化學(股)製造),艾比克隆(EPICLON)N-740、艾比克隆(EPICLON)N-770、艾比克隆(EPICLON)N-775(以上為迪愛生(DIC)(股)製造)等,甲酚酚醛清漆型環氧樹脂為艾比克隆(EPICLON)N-660、艾比克隆(EPICLON)N-665、艾比克隆(EPICLON)N-670、艾比克隆(EPICLON)N-673、艾比克隆(EPICLON)N-680、艾比克隆(EPICLON)N-690、艾比克 隆(EPICLON)N-695(以上為迪愛生(DIC)(股)製造),EOCN-1020(日本化藥(股)製造)等,脂肪族環氧樹脂為艾迪科樹脂(ADEKA RESIN)EP-4080S、艾迪科樹脂(ADEKA RESIN)EP-4085S、艾迪科樹脂(ADEKA RESIN)EP-4088S(以上為艾迪科(ADEKA)(股)製造),賽羅西德(Celloxide)2021P、賽羅西德(Celloxide)2081、賽羅西德(Celloxide)2083、賽羅西德(Celloxide)2085、EHPE3150、艾波利得(EPOLEAD)PB 3600、艾波利得(EPOLEAD)PB 4700(以上為大賽璐(Daicel)(股)製造),丹納考爾(Denacol)EX-212L、EX-214L、EX-216L、EX-321L、EX-850L(以上為長瀨化成(Nagase ChemteX)(股)製造)等。除此以外,亦可列舉:艾迪科樹脂(ADEKA RESIN)EP-4000S、艾迪科樹脂(ADEKA RESIN)EP-4003S、艾迪科樹脂(ADEKA RESIN)EP-4010S、艾迪科樹脂(ADEKA RESIN)EP-4011S(以上為艾迪科(ADEKA)(股)製造),NC-2000、NC-3000、NC-7300、XD-1000、EPPN-501、EPPN-502(以上為艾迪科(ADEKA)(股)製造),jER1031S(三菱化學(股)製造),OXT-221(東亞合成(股)製造)等。 The compound having an epoxy group can also use paragraph numbers 0034 to 0036 of Japanese Patent Laid-Open No. 2013-011869, paragraph numbers 0147 to 0156 of Japanese Patent Laid-Open No. 2014-043556, and Japanese Patent Laid-Open No. 2014 -089408, Paragraph No. 0085 to Paragraph No. 0092 of the compound. These contents are incorporated into this manual. As commercially available products, for example, bisphenol A epoxy resins are jER825, jER827, jER828, jER834, jER1001, jER1002, jER1003, jER1055, jER1007, jER1009, jER1010 (the above are manufactured by Mitsubishi Chemical Corporation), Abbecron ( EPICLON 860, EPICLON 1050, EPICLON 1051, EPICLON 1055 (the above are manufactured by DIC (stock)), etc. The bisphenol F epoxy resin is jER806, jER807, jER4004, jER4005, jER4007, jER4010 (manufactured by Mitsubishi Chemical Corporation), EPICLON 830, EPICLON 835 (manufactured by DIC Corporation) , LCE-21, RE-602S (manufactured by Nippon Kayaku Co., Ltd.), etc., phenol novolac type epoxy resin is jER152, jER154, jER157S70, jER157S65 (manufactured by Mitsubishi Chemical Co., Ltd.), Abikron (EPICLON) N-740, Epiclon (EPICLON) N-770, Epiclon (EPICLON) N-775 (the above are manufactured by DIC (Stock)), etc. The cresol novolac type epoxy resin is EPICLON N-660, EPICLON N-665, EPICLON N-670, EPICLON N-673, EPICLON N-680, EPICLON N-690, EPICLON EPICLON N-695 (the above is manufactured by DIC), EOCN-1020 (manufactured by Nippon Kayaku Co., Ltd.), etc. The aliphatic epoxy resin is ADEKA RESIN EP -4080S, ADEKA RESIN EP-4085S, ADEKA RESIN EP-4088S (the above are manufactured by ADEKA (stock)), Celloxide 2021P, Celloxide 2081, Celloxide 2083, Celloxide 2085, EHPE3150, EPOLEAD PB 3600, EPOLEAD PB 4700 (The above is the competition Daicel (Stock), Denacol EX-212L, EX-214L, EX-216L, EX-321L, EX-850L (the above are manufactured by Nagase ChemteX (Stock) )Wait. In addition to this, you can also list: ADEKA RESIN EP-4000S, ADEKA RESIN EP-4003S, ADEKA RESIN EP-4010S, ADEKA RESIN RESIN) EP-4011S (the above are manufactured by ADEKA (stock)), NC-2000, NC-3000, NC-7300, XD-1000, EPPN-501, EPPN-502 (the above are ADEKA ( ADEKA) (manufactured by Mitsubishi Chemical Co., Ltd.), jER1031S (manufactured by Mitsubishi Chemical Co., Ltd.), OXT-221 (manufactured by Toagosei Co., Ltd.), etc.
具有環氧基的化合物亦可使用日本專利特開2009-265518號公報的段落編號0045等中所記載的化合物。 As the compound having an epoxy group, the compound described in paragraph number 0045 of JP 2009-265518 A, etc. can also be used.
於組成物的總固體成分中,具有環氧基的化合物的含量較佳為0.5質量%~20質量%。下限較佳為1質量%以上,更佳為2質量%以上。上限較佳為15質量%以下,更佳為10質量%以下。 In the total solid content of the composition, the content of the compound having an epoxy group is preferably 0.5% by mass to 20% by mass. The lower limit is preferably 1% by mass or more, more preferably 2% by mass or more. The upper limit is preferably 15% by mass or less, more preferably 10% by mass or less.
<<溶劑>> <<Solvent>>
本發明的組成物可含有溶劑。作為溶劑,可列舉有機溶劑。溶劑只要滿足各成分的溶解性或組成物的塗佈性,則基本上並無特別限制,較佳為考慮組成物的塗佈性、安全性來選擇。 The composition of the present invention may contain a solvent. As the solvent, organic solvents can be cited. The solvent is basically not particularly limited as long as it satisfies the solubility of each component or the coatability of the composition, and it is preferably selected in consideration of the coatability and safety of the composition.
作為有機溶劑的例子,例如可列舉以下者。作為酯類,例如可列舉:乙酸乙酯、乙酸正丁酯、乙酸異丁酯、乙酸環己酯、甲酸戊酯、乙酸異戊酯、丙酸丁酯、丁酸異丙酯、丁酸乙酯、丁酸丁酯、乳酸甲酯、乳酸乙酯、烷氧基乙酸烷基酯(例如,烷氧基乙酸甲酯、烷氧基乙酸乙酯、烷氧基乙酸丁酯(例如,甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯等))、3-烷氧基丙酸烷基酯類(例如,3-烷氧基丙酸甲酯、3-烷氧基丙酸乙酯等(例如,3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯等))、2-烷氧基丙酸烷基酯類(例:2-烷氧基丙酸甲酯、2-烷氧基丙酸乙酯、2-烷氧基丙酸丙酯等(例如,2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯))、2-烷氧基-2-甲基丙酸甲酯及2-烷氧基-2-甲基丙酸乙酯(例如,2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-甲基丙酸乙酯等)、丙酮酸甲酯、丙酮酸乙酯、丙酮酸丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、2-氧代丁酸甲酯、2-氧代丁酸乙酯等。作為醚類,例如可列舉:二乙二醇二甲醚、四氫呋喃、乙二醇單甲醚、乙二醇單乙醚、甲基溶纖劑乙酸酯、乙基溶纖劑乙酸酯、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單丁醚、二乙二醇單丁醚乙酸酯、丙二醇單甲 醚、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、丙二醇單丙醚乙酸酯等。作為酮類,例如可列舉:甲基乙基酮、環己酮、環戊酮、2-庚酮、3-庚酮等。作為芳香族烴類,例如可列舉:甲苯、二甲苯等。其中,作為溶劑的芳香族烴類(苯、甲苯、二甲苯、乙基苯等)有因環境方面等的理由而較佳為減少的情況(例如,相對於有機溶劑總量而可設為50質量ppm以下,亦可設為10質量ppm以下,抑或可設為1質量ppm以下)。 As an example of an organic solvent, the following can be mentioned, for example. Examples of esters include ethyl acetate, n-butyl acetate, isobutyl acetate, cyclohexyl acetate, pentyl formate, isoamyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate Ester, butyl butyrate, methyl lactate, ethyl lactate, alkyl alkoxy acetate (for example, methyl alkoxyacetate, ethyl alkoxyacetate, butyl alkoxyacetate (for example, methoxy Methyl ethoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, etc.), 3-alkoxypropionic acid alkyl esters (for example, Methyl 3-alkoxypropionate, ethyl 3-alkoxypropionate, etc. (for example, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, 3-ethoxypropionic acid Methyl ester, 3-ethoxy ethyl propionate, etc.)), 2-alkoxy propionic acid alkyl esters (e.g. 2-alkoxy methyl propionate, 2-alkoxy ethyl propionate, Propyl 2-alkoxypropionate, etc. (for example, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, 2-ethoxypropionic acid Methyl ester, ethyl 2-ethoxypropionate)), methyl 2-alkoxy-2-methylpropionate and ethyl 2-alkoxy-2-methylpropionate (for example, 2-methyl Methyl oxy-2-methylpropionate, ethyl 2-ethoxy-2-methylpropionate, etc.), methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetylacetate, Ethyl acetate, methyl 2-oxobutyrate, ethyl 2-oxobutyrate, etc. As ethers, for example, diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, two Ethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, diethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether Ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, etc. As ketones, methyl ethyl ketone, cyclohexanone, cyclopentanone, 2-heptanone, 3-heptanone, etc. are mentioned, for example. Examples of aromatic hydrocarbons include toluene and xylene. Among them, the aromatic hydrocarbons (benzene, toluene, xylene, ethylbenzene, etc.) used as solvents are preferably reduced due to environmental reasons (for example, it can be set to 50 relative to the total amount of organic solvents). Mass ppm or less, may also be 10 mass ppm or less, or may be 1 mass ppm or less).
有機溶劑可單獨使用一種,亦可將兩種以上組合使用。於將兩種以上的有機溶劑組合使用的情況下,較佳為包含選自3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙基溶纖劑乙酸酯、乳酸乙酯、二乙二醇二甲醚、乙酸丁酯、3-甲氧基丙酸甲酯、2-庚酮、環己酮、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚及丙二醇單甲醚乙酸酯中的兩種以上的混合溶液。 One kind of organic solvent may be used alone, or two or more kinds may be used in combination. When two or more organic solvents are used in combination, they are preferably selected from the group consisting of methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, and lactic acid. Ethyl ester, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, ethyl carbitol acetate, butyl carbitol acetate A mixed solution of two or more of esters, propylene glycol monomethyl ether, and propylene glycol monomethyl ether acetate.
本發明中,較佳為使用金屬含量少的溶劑,溶劑的金屬含量例如較佳為10質量ppb以下。亦可視需要使用質量ppt級的溶劑,此種高純度溶劑例如是由東洋合成工業(股)提供(化學工業日報,2015年11月13日)。 In the present invention, it is preferable to use a solvent with a small metal content, and the metal content of the solvent is preferably 10 mass ppb or less, for example. It is also possible to use ppt-level solvents as needed. Such high-purity solvents are, for example, provided by Toyo Gosei Kogyo Co., Ltd. (Chemical Industry Daily, November 13, 2015).
作為自溶劑去除金屬等雜質的方法,例如可列舉蒸餾(分子蒸餾或薄膜蒸餾等)或使用過濾器的過濾。使用過濾器的過濾中的過濾器孔徑較佳為孔尺寸(pore size)10nm以下,更佳為5nm以下,進而佳為3nm以下。作為過濾器的材質,較佳為聚四氟乙烯製、聚乙烯製、尼龍製的過濾器。 As a method of removing impurities such as metals from the solvent, for example, distillation (molecular distillation, thin film distillation, etc.) or filtration using a filter can be cited. The pore size of the filter in filtration using a filter is preferably 10 nm or less, more preferably 5 nm or less, and still more preferably 3 nm or less. As the material of the filter, a filter made of polytetrafluoroethylene, polyethylene, or nylon is preferable.
溶劑可包含異構體(相同原子種類與數且不同結構的化合物)。另外,異構體可僅包含一種,亦可包含多種。 The solvent may include isomers (compounds with the same atomic type and number and different structures). In addition, the isomer may include only one type or multiple types.
本發明中,有機溶劑的過氧化物的含有率較佳為0.8mmol/L以下,更佳為實質上不含過氧化物。 In the present invention, the peroxide content of the organic solvent is preferably 0.8 mmol/L or less, and more preferably substantially free of peroxide.
相對於組成物的總量,溶劑的含量較佳為10質量%~90質量%,更佳為20質量%~80質量%,進而佳為25質量%~75質量%。 The content of the solvent relative to the total amount of the composition is preferably 10% by mass to 90% by mass, more preferably 20% by mass to 80% by mass, and still more preferably 25% by mass to 75% by mass.
<<矽烷偶合劑>> <<Silane Coupling Agent>>
本發明的組成物可進而含有矽烷偶合劑。再者,本發明中,矽烷偶合劑為與所述聚合性化合物不同的成分。本發明中,矽烷偶合劑是指具有水解性基與其以外的官能基的矽烷化合物。另外,所謂水解性基,是指直接鍵結於矽原子,並可藉由水解反應及縮合反應的至少任一者而產生矽氧烷鍵的取代基。作為水解性基,例如可列舉:鹵素原子、烷氧基、醯氧基等,較佳為烷氧基。即,矽烷偶合劑較佳為具有烷氧基矽烷基的化合物。另外,水解性基以外的官能基較佳為於與樹脂間形成相互作用或鍵結而顯示親和性的基。例如可列舉:(甲基)丙烯醯基、苯基、巰基、環氧基、氧雜環丁基,較佳為(甲基)丙烯醯基及環氧基。即,矽烷偶合劑較佳為具有烷氧基矽烷基與(甲基)丙烯醯基及環氧基中的至少一者的化合物。矽烷偶合劑可列舉日本專利特開2009-288703號公報的段落編號0018~段落編號0036中記載的化合物、日本專利特開2009-242604號公報的段落編號0056~段落編號0066中記載的化 合物,將該內容併入至本說明書中。 The composition of the present invention may further contain a silane coupling agent. Furthermore, in the present invention, the silane coupling agent is a component different from the above-mentioned polymerizable compound. In the present invention, the silane coupling agent refers to a silane compound having a hydrolyzable group and other functional groups. In addition, the hydrolyzable group refers to a substituent that is directly bonded to a silicon atom and can generate a siloxane bond by at least one of a hydrolysis reaction and a condensation reaction. As a hydrolyzable group, a halogen atom, an alkoxy group, an acyloxy group, etc. are mentioned, for example, Preferably it is an alkoxy group. That is, the silane coupling agent is preferably a compound having an alkoxysilyl group. In addition, the functional group other than the hydrolyzable group is preferably a group that forms an interaction or bond with the resin to show affinity. For example, a (meth)acryloyl group, a phenyl group, a mercapto group, an epoxy group, and an oxetanyl group are mentioned, and a (meth)acryloyl group and an epoxy group are preferable. That is, the silane coupling agent is preferably a compound having at least one of an alkoxysilyl group, a (meth)acryloyl group, and an epoxy group. The silane coupling agent includes the compounds described in paragraph number 0018 to paragraph number 0036 of JP 2009-288703, and the compounds described in paragraph number 0056 to paragraph number 0006 of JP 2009-242604. The content is incorporated into this specification.
相對於組成物的總固體成分,矽烷偶合劑的含量較佳為0.01質量%~15.0質量%,更佳為0.05質量%~10.0質量%。矽烷偶合劑可僅為一種,亦可為兩種以上。於為兩種以上的情況下,較佳為合計量成為所述範圍。 The content of the silane coupling agent is preferably 0.01% by mass to 15.0% by mass, and more preferably 0.05% by mass to 10.0% by mass relative to the total solid content of the composition. The silane coupling agent may be only one type or two or more types. In the case of two or more types, it is preferable that the total amount falls within the above-mentioned range.
<<界面活性劑>> <<Surface Active Agent>>
就進一步提昇塗佈性的觀點而言,本發明的組成物亦可含有各種界面活性劑。作為界面活性劑,可使用氟系界面活性劑、非離子系界面活性劑、陽離子系界面活性劑、陰離子系界面活性劑、矽酮系界面活性劑等各種界面活性劑。 From the viewpoint of further improving coatability, the composition of the present invention may contain various surfactants. As the surfactant, various surfactants such as fluorine surfactants, nonionic surfactants, cationic surfactants, anionic surfactants, and silicone surfactants can be used.
藉由於所述組成物中含有氟系界面活性劑,製備成塗佈液時的液體特性(特別是流動性)進一步提高,可進一步改善塗佈厚度的均勻性或省液性。即,於使用應用了含有氟系界面活性劑的組成物的塗佈液來形成膜的情況下,被塗佈面與塗佈液的界面張力下降,對於被塗佈面的潤濕性得到改善,對於被塗佈面的塗佈性提高。因此,可更佳地進行厚度不均小的厚度均勻的膜形成。 Since the composition contains a fluorine-based surfactant, the liquid properties (especially fluidity) when the coating liquid is prepared are further improved, and the uniformity of the coating thickness or the liquid-saving property can be further improved. That is, in the case of forming a film using a coating liquid applied with a composition containing a fluorine-based surfactant, the interfacial tension between the coated surface and the coating liquid decreases, and the wettability to the coated surface is improved , Improve the coatability to the coated surface. Therefore, it is possible to more preferably form a film with a small thickness unevenness and a uniform thickness.
氟系界面活性劑中的氟含有率較佳為3質量%~40質量%,更佳為5質量%~30質量%,特佳為7質量%~25質量%。氟含有率為該範圍內的氟系界面活性劑就塗佈膜的厚度的均勻性或省液性的方面而言有效,於組成物中的溶解性亦良好。 The fluorine content in the fluorine-based surfactant is preferably 3% by mass to 40% by mass, more preferably 5% by mass to 30% by mass, and particularly preferably 7% by mass to 25% by mass. The fluorine-based surfactant having a fluorine content within this range is effective in terms of uniformity of the thickness of the coating film and liquid-saving properties, and its solubility in the composition is also good.
作為氟系界面活性劑,具體而言可列舉日本專利特開 2014-41318號公報的段落編號0060~段落編號0064(相對應的國際公開WO2014/17669號手冊的段落編號0060~段落編號0064)等中記載的界面活性劑、日本專利特開2011-132503號公報的段落編號0117~段落編號0132中記載的界面活性劑,將該些內容併入至本說明書中。作為氟系界面活性劑的市售品,例如可列舉:美佳法(Megafac)F171、美佳法(Megafac)F172、美佳法(Megafac)F173、美佳法(Megafac)F176、美佳法(Megafac)F177、美佳法(Megafac)F141、美佳法(Megafac)F142、美佳法(Megafac)F143、美佳法(Megafac)F144、美佳法(Megafac)R30、美佳法(Megafac)F437、美佳法(Megafac)F475、美佳法(Megafac)F479、美佳法(Megafac)F482、美佳法(Megafac)F554、美佳法(Megafac)F780(以上為迪愛生(DIC)(股)製造),弗洛德(Fluorad)FC430、弗洛德(Fluorad)FC431、弗洛德(Fluorad)FC171(以上為住友3M(Sumitomo 3M)(股)製造),沙福隆(Surflon)S-382、沙福隆(Surflon)SC-101、沙福隆(Surflon)SC-103、沙福隆(Surflon)SC-104、沙福隆(Surflon)SC-105、沙福隆(Surflon)SC1068、沙福隆(Surflon)SC-381、沙福隆(Surflon)SC-383、沙福隆(Surflon)S393、沙福隆(Surflon)KH-40(以上為旭硝子(股)製造),波利佛斯(PolyFox)PF636、PF656、PF6320、PF6520、PF7002(歐諾法(OMNOVA)公司製造)等。 Specific examples of fluorine-based surfactants include Japanese Patent Laid-Open Surfactant described in paragraph number 0060 to paragraph number 0064 of 2014-41318 (corresponding to international publication WO2014/17669 manual paragraph number 0060 to paragraph number 0064), etc., Japanese Patent Laid-Open No. 2011-132503 Surfactant described in paragraph number 0117~paragraph number 0132, and these contents are incorporated into this specification. Commercial products of fluorine-based surfactants include, for example, Megafac F171, Megafac F172, Megafac F173, Megafac F176, Megafac F177, Megafac F141, Megafac F142, Megafac F143, Megafac F144, Megafac R30, Megafac F437, Megafac F475, Megafac Megafac F479, Megafac F482, Megafac F554, Megafac F780 (manufactured by DIC (shares) above), Fluorad FC430, Flo Fluorad FC431, Fluorad FC171 (the above are manufactured by Sumitomo 3M (stock)), Surflon S-382, Surflon SC-101, Saffron Surflon SC-103, Surflon SC-104, Surflon SC-105, Surflon SC1068, Surflon SC-381, Surflon Surflon) SC-383, Surflon (Surflon) S393, Surflon (Surflon) KH-40 (the above are manufactured by Asahi Glass Co., Ltd.), PolyFox (PolyFox) PF636, PF656, PF6320, PF6520, PF7002 ( OMNOVA (manufactured by OMNOVA), etc.
氟系界面活性劑亦可使用嵌段聚合物。例如可列舉日本 專利特開2011-89090號公報中所記載的化合物。作為氟系界面活性劑,亦可較佳地使用包含源自具有氟原子的(甲基)丙烯酸酯化合物的重複單元、與源自具有兩個以上(較佳為五個以上)伸烷氧基(較佳為伸乙氧基、伸丙氧基)的(甲基)丙烯酸酯化合物的重複單元的含氟高分子化合物。下述化合物亦可作為本發明中所使用的氟系界面活性劑而例示。 Block polymers can also be used for fluorine-based surfactants. For example, Japan The compound described in Japanese Patent Laid-Open No. 2011-89090. As the fluorine-based surfactant, a repeating unit derived from a (meth)acrylate compound having a fluorine atom and a repeating unit derived from a (meth)acrylate compound having two or more (preferably five or more) alkoxy groups can also be preferably used. A fluorine-containing polymer compound which is a repeating unit of a (meth)acrylate compound (preferably an ethoxy group or a propoxy group). The following compounds can also be exemplified as the fluorine-based surfactant used in the present invention.
所述化合物的重量平均分子量較佳為3,000~50,000,例如為14,000。所述化合物中,表示重複單元的比例的%為質量%。 The weight average molecular weight of the compound is preferably 3,000 to 50,000, for example, 14,000. In the compound,% representing the ratio of repeating units is mass %.
另外,氟系界面活性劑亦可使用於側鏈具有乙烯性不飽和基的含氟聚合體。作為具體例,可列舉日本專利特開2010-164965號公報的段落編號0050~段落編號0090及段落編號0289~段落編號0295中所記載的化合物,例如迪愛生(DIC)(股)製造的美佳法(Megafac)RS-101、RS-102、RS-718K、RS-72-K等。氟系界面活性劑亦可使用日本專利特開2015-117327號公報的段落編號0015~段落編號0158中記載的化合物。 In addition, the fluorine-based surfactant can also be used in a fluorine-containing polymer having an ethylenically unsaturated group in the side chain. As a specific example, Japanese Patent Laid-Open No. 2010-164965, Paragraph No. 0050 to Paragraph No. 0090 and Paragraph No. 0289 to Paragraph No. 0295 of the compounds described in Japanese Patent Laid-Open No. 2010-164965, for example, Mijia method manufactured by DIC Co., Ltd. (Megafac) RS-101, RS-102, RS-718K, RS-72-K, etc. As the fluorine-based surfactant, the compounds described in paragraph number 0015 to paragraph number 0158 of JP 2015-117327 A can also be used.
作為非離子系界面活性劑,可列舉:丙三醇、三羥甲基丙烷、三羥甲基乙烷以及該些的乙氧基化物及丙氧基化物(例如,丙三醇丙氧基化物、丙三醇乙氧基化物等)、聚氧伸乙基月桂基醚、聚氧伸乙基硬脂基醚、聚氧伸乙基油烯基醚、聚氧伸乙基辛基苯基醚、聚氧伸乙基壬基苯基醚、聚乙二醇二月桂酸酯、聚乙二醇二硬脂酸酯、脫水山梨糖醇脂肪酸酯、普魯洛尼克(Pluronic)L10、L31、L61、L62、10R5、17R2、25R2(巴斯夫(BASF)公司製造),特托羅尼克(Tetronic)304、701、704、901、904、150R1(巴斯夫(BASF)公司製造),索爾斯帕斯(Solsperse)20000(日本路博潤(Lubrizol)(股)製造),NCW-101、NCW-1001、NCW-1002(和光純藥工業(股)製造),皮奧寧(Pionin)D-6112、D-6112-W、D-6315(竹本油脂(股)製造),奧璐芬(Olfine)E1010、薩非諾爾(Surfynol)104、400、440(日信化學工業(股)製造)等。 Examples of nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane, and these ethoxylates and propoxylates (for example, glycerol propoxylates). , Glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenyl ether , Polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester, Pluronic L10, L31, L61, L62, 10R5, 17R2, 25R2 (manufactured by BASF), Tetronic 304, 701, 704, 901, 904, 150R1 (manufactured by BASF), Sols Pass (Solsperse) 20000 (manufactured by Lubrizol (Stock) in Japan), NCW-101, NCW-1001, NCW-1002 (manufactured by Wako Pure Chemical Industries, Ltd.), Pionin D-6112, D-6112-W, D-6315 (manufactured by Takemoto Oil Co., Ltd.), Olfine E1010, Surfynol 104, 400, 440 (manufactured by Nissin Chemical Industry Co., Ltd.), etc.
作為陽離子系界面活性劑,可列舉:有機矽氧烷聚合物KP341(信越化學工業(股)製造),(甲基)丙烯酸系(共)聚合體珀利弗洛(Polyflow)No.75、No.90、No.95(共榮社化學(股)製造),W001(裕商(股)製造)等。 Examples of cationic surfactants include organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth)acrylic (co)polymer Polyflow No. 75, No. .90, No.95 (manufactured by Kyoeisha Chemical Co., Ltd.), W001 (manufactured by Yushang Co., Ltd.), etc.
作為陰離子系界面活性劑,可列舉:W004、W005、W017(裕商(股)製造),桑德(Sanded)BL(三洋化成(股)製造)等。 Examples of the anionic surfactant include W004, W005, and W017 (manufactured by Yushang Co., Ltd.), Sanded BL (manufactured by Sanyo Chemical Co., Ltd.), and the like.
作為矽酮系界面活性劑,例如可列舉:東麗矽酮(Toray Silicone)DC3PA、東麗矽酮(Toray Silicone)SH7PA、東麗矽酮 (Toray Silicone)DC11PA、東麗矽酮(Toray Silicone)SH21PA、東麗矽酮(Toray Silicone)SH28PA、東麗矽酮(Toray Silicone)SH29PA、東麗矽酮(Toray Silicone)SH30PA、東麗矽酮(Toray Silicone)SH8400(以上為東麗道康寧(Toray Dow Corning)(股)製造),TSF-4440、TSF-4300、TSF-4445、TSF-4460、TSF-4452(以上為邁圖高新材料(Momentive Performance Materials)公司製造),KP341、KF6001、KF6002(以上為信越矽酮(Shinetsu silicone)股份有限公司製造),畢克(BYK)307、畢克(BYK)323、畢克(BYK)330(以上為畢克化學(BYKChemie)公司製造)等。 Examples of silicone-based surfactants include Toray Silicone DC3PA, Toray Silicone SH7PA, Toray Silicone (Toray Silicone) DC11PA, Toray Silicone SH21PA, Toray Silicone SH28PA, Toray Silicone SH29PA, Toray Silicone SH30PA, Toray Silicone (Toray Silicone) SH8400 (the above is manufactured by Toray Dow Corning (stock)), TSF-4440, TSF-4300, TSF-4445, TSF-4460, TSF-4452 (the above is Momentive Performance Materials), KP341, KF6001, KF6002 (the above are manufactured by Shinetsu silicone Co., Ltd.), BYK 307, BYK 323, BYK 330 (above For BYK Chemie (manufactured by BYK Chemie), etc.
界面活性劑可僅使用一種,亦可組合兩種以上。 Only one type of surfactant may be used, or two or more types may be combined.
相對於組成物的總固體成分,界面活性劑的含量較佳為0.001質量%~2.0質量%,更佳為0.005質量%~1.0質量%。 The content of the surfactant relative to the total solid content of the composition is preferably 0.001% by mass to 2.0% by mass, more preferably 0.005% by mass to 1.0% by mass.
<<紫外線吸收劑>> <<Ultraviolet absorber>>
本發明的組成物較佳為含有紫外線吸收劑。 The composition of the present invention preferably contains an ultraviolet absorber.
紫外線吸收劑可列舉共軛二烯系化合物及二酮化合物,較佳為共軛二烯系化合物。共軛二烯系化合物更佳為下述式(UV-1)所表示的化合物。 Examples of the ultraviolet absorber include conjugated diene compounds and diketone compounds, and conjugated diene compounds are preferred. The conjugated diene compound is more preferably a compound represented by the following formula (UV-1).
式(UV-1)中,R1及R2各自獨立地表示氫原子、碳原子數1~20的烷基、或碳原子數6~20的芳基,R1與R2可相互相同亦可不同,不存在同時表示氫原子的情況。 In the formula (UV-1), R 1 and R 2 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms, and R 1 and R 2 may be the same as each other. It may be different, and there is no case where hydrogen atoms are represented at the same time.
R1及R2可與R1及R2所鍵結的氮原子一起形成環狀胺基。作為環狀胺基,例如可列舉:哌啶基、嗎啉基、吡咯啶基、六氫氮雜基、哌嗪基等。 R 1 and R 2 can form a cyclic amino group together with the nitrogen atom to which R 1 and R 2 are bonded. As a cyclic amino group, a piperidinyl group, a morpholinyl group, a pyrrolidinyl group, a hexahydroazepine group, a piperazinyl group etc. are mentioned, for example.
R1及R2較佳為各自獨立地為碳原子數1~20的烷基,更佳為碳原子數1~10的烷基,進而佳為碳原子數1~5的烷基。 Preferably, R 1 and R 2 are each independently an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 10 carbon atoms, and still more preferably an alkyl group having 1 to 5 carbon atoms.
R3及R4表示拉電子基。此處,拉電子基為哈米特的取代基常數σp值(以下,簡稱為「σp值」)為0.20以上且1.0以下的拉電子基。較佳為σp值為0.30以上且0.8以下的拉電子基。 R 3 and R 4 represent an electron withdrawing group. Here, the electron withdrawing group is an electron withdrawing group whose substituent constant σ p value (hereinafter referred to as "σ p value") of Hammett is 0.20 or more and 1.0 or less. Preferably, it is an electron withdrawing group having a σ p value of 0.30 or more and 0.8 or less.
R3較佳為選自氰基、-COOR5、-CONHR5、-COR5、-SO2R5中的基。R4較佳為選自氰基、-COOR6、-CONHR6、-COR6、-SO2R6中的基。R5及R6各自獨立地表示碳原子數1~20的烷基、或碳原子數6~20的芳基。 R 3 is preferably a group selected from cyano, -COOR 5 , -CONHR 5 , -COR 5 , and -SO 2 R 5 . R 4 is preferably a group selected from cyano, -COOR 6 , -CONHR 6 , -COR 6 , and -SO 2 R 6 . R 5 and R 6 each independently represent an alkyl group having 1 to 20 carbon atoms or an aryl group having 6 to 20 carbon atoms.
R3及R4較佳為醯基、胺甲醯基、烷氧基羰基、芳氧基羰基、氰基、硝基、烷基磺醯基、芳基磺醯基、磺醯氧基、胺磺醯基,更佳為醯基、胺甲醯基、烷氧基羰基、芳氧基羰基、氰基、烷基磺醯基、芳基磺醯基、磺醯氧基、胺磺醯基。另外,R3及R4可相互鍵結而形成環狀拉電子基。作為R3及R4相互鍵結而形成的環狀拉電子基,例如可列舉包含兩個羰基的6員環。 R 3 and R 4 are preferably acyl group, carbamethanyl group, alkoxycarbonyl group, aryloxycarbonyl group, cyano group, nitro group, alkylsulfonyl group, arylsulfonyl group, sulfonyloxy group, amine The sulfonyl group is more preferably an acyl group, carbamethanyl group, alkoxycarbonyl group, aryloxycarbonyl group, cyano group, alkylsulfonyl group, arylsulfonyl group, sulfonyloxy group, and sulfasulfonyl group. In addition, R 3 and R 4 may be bonded to each other to form a cyclic electron withdrawing group. Examples of the cyclic electron withdrawing group formed by bonding R 3 and R 4 to each other include a 6-membered ring containing two carbonyl groups.
所述的R1、R2、R3及R4的至少一個亦可經由連結基而形成由與乙烯基鍵結的單體導出的聚合物的形式。亦可為與其他單體的共聚物。 At least one of the aforementioned R 1 , R 2 , R 3 and R 4 may also be in the form of a polymer derived from a monomer bonded to a vinyl group via a linking group. It can also be a copolymer with other monomers.
作為式(UV-1)所示的紫外線吸收劑的具體例,可列舉下述化合物。式(UV-1)所示的紫外線吸收劑的取代基的說明可參考WO2009/123109號公報的段落編號0024~段落編號0033(相對應的美國專利申請公開第2011/0039195號說明書的[0040]~[0059])的記載,將該些內容併入至本說明書中。式(UV-1)所表示的化合物的較佳具體例可參考WO2009/123109號公報的段落編號0034~段落編號0037(相對應的美國專利申請公開第2011/0039195號說明書的[0060])的例示化合物(1)~例示化合物(14)的記載,將該些內容併入至本說明書中。作為式(UV-1)所示的紫外線吸收劑的市售品,例如可列舉UV503(大東化學(股)製造)等。 As specific examples of the ultraviolet absorber represented by the formula (UV-1), the following compounds can be cited. For the description of the substituent of the ultraviolet absorber represented by formula (UV-1), please refer to paragraph number 0024 to paragraph number 0033 of WO2009/123109 (corresponding U.S. Patent Application Publication No. 2011/0039195 [0040] ~[0059]), these contents are incorporated into this manual. For preferred specific examples of the compound represented by the formula (UV-1), refer to paragraph number 0034 to paragraph number 0037 of WO2009/123109 (corresponding U.S. Patent Application Publication No. 2011/0039195 Specification [0060]) The description of exemplified compound (1) to exemplified compound (14) is incorporated into this specification. As a commercial item of the ultraviolet absorber represented by Formula (UV-1), UV503 (made by Daito Chemical Co., Ltd.) etc. are mentioned, for example.
用作紫外線吸收劑的二酮化合物較佳為下述式(UV-2)所表示的化合物。 The diketone compound used as the ultraviolet absorber is preferably a compound represented by the following formula (UV-2).
式(UV-2)中,R101及R102各自獨立地表示取代基,m1及m2分別獨立地表示0~4。取代基可列舉:烷基、烯基、芳基、雜芳基、烷氧基、芳氧基、雜芳氧基、醯基、烷氧基羰基、芳氧基羰基、雜芳氧基羰基、醯氧基、胺基、醯基胺基、烷氧基羰基胺基、芳氧基羰基胺基、雜芳氧基羰基胺基、磺醯基胺基、胺磺醯基、胺甲醯基、烷硫基、芳硫基、雜芳硫基、烷基磺醯基、芳基磺醯基、雜芳基磺醯基、烷基亞磺醯基、芳基亞磺醯基、雜芳基亞磺醯基、脲基、磷酸醯胺基、巰基、磺基、羧基、硝基、羥胺酸基、亞磺酸基、肼基、亞胺基、矽烷基、羥基、鹵素原子、氰基等,較佳為烷基及烷氧基。 In formula (UV-2), R 101 and R 102 each independently represent a substituent, and m1 and m2 each independently represent 0 to 4. Substituents include alkyl, alkenyl, aryl, heteroaryl, alkoxy, aryloxy, heteroaryloxy, acyl, alkoxycarbonyl, aryloxycarbonyl, heteroaryloxycarbonyl, Amino groups, amino groups, acylamino groups, alkoxycarbonylamino groups, aryloxycarbonylamino groups, heteroaryloxycarbonylamino groups, sulfonylamino groups, sulfamsulfonylamino groups, carbamethanyl groups, Alkylthio, arylthio, heteroarylthio, alkylsulfonyl, arylsulfonyl, heteroarylsulfonyl, alkylsulfinyl, arylsulfinyl, heteroarylsulfonyl Sulfonyl, ureido, phosphoamido, sulfhydryl, sulfo, carboxyl, nitro, hydroxylamine, sulfinic acid, hydrazine, imino, silyl, hydroxyl, halogen, cyano, etc., Preferred are alkyl and alkoxy.
烷基的碳數較佳為1~20。烷基可列舉直鏈、分支、環狀,較佳為直鏈或分支,更佳為分支。 The carbon number of the alkyl group is preferably 1-20. The alkyl group may be linear, branched, and cyclic, preferably linear or branched, and more preferably branched.
烷氧基的碳數較佳為1~20。烷氧基可列舉直鏈、分支、環狀,較佳為直鏈或分支,更佳為分支。 The carbon number of the alkoxy group is preferably 1-20. The alkoxy group may be linear, branched, and cyclic, preferably linear or branched, and more preferably branched.
較佳為R101及R102的一者為烷基、另一者為烷氧基的組合。 Preferably, one of R 101 and R 102 is an alkyl group, and the other is a combination of an alkoxy group.
m1及m2分別獨立地表示0~4。m1及m2較佳為分別獨立 地為0~2,更佳為0~1,特佳為1。 m1 and m2 independently represent 0 to 4, respectively. m1 and m2 are preferably independent The ground is 0~2, more preferably 0~1, particularly preferably 1.
作為式(UV-2)所表示的化合物,可列舉下述化合物。 Examples of the compound represented by formula (UV-2) include the following compounds.
紫外線吸收劑亦可使用尤比娜璐(Uvinul)A(巴斯夫(BASF)公司製造)。另外,紫外線吸收劑可使用胺基二烯化合物、水楊酸酯化合物、二苯甲酮化合物、苯并三唑化合物、丙烯腈化合物、三嗪化合物等紫外線吸收劑,作為具體例,可列舉日本專利特開2013-68814號中記載的化合物。作為苯并三唑化合物,亦可使用三芳(Miyoshi)油脂(股)製造的MYUA系列(化學工業日報,2016年2月1日)。 As the ultraviolet absorber, Uvinul A (manufactured by BASF) can also be used. In addition, ultraviolet absorbers such as amino diene compounds, salicylate compounds, benzophenone compounds, benzotriazole compounds, acrylonitrile compounds, and triazine compounds can be used as ultraviolet absorbers. Specific examples include Japan The compound described in Patent Laid-Open No. 2013-68814. As the benzotriazole compound, MYUA series manufactured by Miyoshi Oils & Fats Co., Ltd. (Chemical Industry Daily, February 1, 2016) can also be used.
相對於本發明的組成物的總固體成分,紫外線吸收劑的含量較佳為0.01質量%~10質量%,更佳為0.01質量%~5質量%。 The content of the ultraviolet absorber is preferably 0.01% by mass to 10% by mass, and more preferably 0.01% by mass to 5% by mass relative to the total solid content of the composition of the present invention.
相對於聚合性化合物的100質量份,紫外線吸收劑較佳為含有5質量份~100質量份。上限較佳為80質量份以下,更佳為60質量份以下。下限較佳為10質量份以上,更佳為20質量份以上。 The ultraviolet absorber preferably contains 5 parts by mass to 100 parts by mass with respect to 100 parts by mass of the polymerizable compound. The upper limit is preferably 80 parts by mass or less, more preferably 60 parts by mass or less. The lower limit is preferably 10 parts by mass or more, more preferably 20 parts by mass or more.
<<聚合抑制劑>> <<Polymerization inhibitor>>
本發明的組成物為了於組成物的製造中或保存中,阻止聚合 性化合物的不需要的熱聚合,亦可含有聚合抑制劑。作為聚合抑制劑,例如可列舉:含有酚系羥基的化合物類、N-氧化物化合物類、哌啶1-氧自由基化合物類、吡咯啶1-氧自由基化合物類、N-亞硝基苯基羥基胺類、重氮鎓化合物類、陽離子染料類、含有硫醚基的化合物類、含有硝基的化合物類、磷系化合物類、內酯系化合物類、過渡金屬化合物類(FeCl3、CuCl2等)。另外,該些化合物類中,亦可為於同一分子內存在多個酚骨架或含磷骨架等表現出聚合抑制功能的結構的複合系化合物。例如,亦可較佳地使用日本專利特開平10-46035號公報中記載的化合物等。聚合抑制劑的具體例可列舉:對苯二酚、對甲氧基苯酚、二-第三丁基對甲酚、五倍子酚、第三丁基兒茶酚、苯醌、4,4'-硫代雙(3-甲基-6-第三丁基苯酚)、2,2'-亞甲基雙(4-甲基-6-第三丁基苯酚)、N-亞硝基苯基羥基胺鹽(銨鹽、三價鈰鹽等)。其中,較佳為對甲氧基苯酚。 The composition of the present invention may contain a polymerization inhibitor in order to prevent unnecessary thermal polymerization of the polymerizable compound during the production or storage of the composition. Examples of polymerization inhibitors include compounds containing phenolic hydroxyl groups, N-oxide compounds, piperidine 1-oxy radical compounds, pyrrolidine 1-oxy radical compounds, and N-nitrosobenzene. Hydroxyamines, diazonium compounds, cationic dyes, compounds containing sulfide groups, compounds containing nitro groups, phosphorus compounds, lactone compounds, transition metal compounds (FeCl 3 , CuCl 2 etc.). In addition, among these compounds, it may be a composite compound in which a plurality of phenol skeletons or phosphorus-containing skeletons are present in the same molecule, and the structure exhibits a polymerization inhibitory function. For example, the compounds described in Japanese Patent Laid-Open No. 10-46035 and the like can also be preferably used. Specific examples of polymerization inhibitors include: hydroquinone, p-methoxyphenol, di-tertiary butyl p-cresol, gallic phenol, tertiary butyl catechol, benzoquinone, 4,4'-sulfur Substituted bis(3-methyl-6-tertiary butylphenol), 2,2'-methylene bis(4-methyl-6-tertiary butylphenol), N-nitrosophenylhydroxylamine Salt (ammonium salt, trivalent cerium salt, etc.). Among them, p-methoxyphenol is preferred.
相對於組成物的總固體成分,聚合抑制劑的含量較佳為0.01質量%~5質量%。 The content of the polymerization inhibitor is preferably 0.01% by mass to 5% by mass relative to the total solid content of the composition.
相對於聚合性化合物的100質量份,聚合抑制劑較佳為含有0.001質量份~1質量份。上限較佳為0.5質量份以下,更佳為0.2質量份以下。下限較佳為0.01質量份以上,更佳為0.03質量份以上。 The polymerization inhibitor is preferably contained in 0.001 part by mass to 1 part by mass relative to 100 parts by mass of the polymerizable compound. The upper limit is preferably 0.5 parts by mass or less, more preferably 0.2 parts by mass or less. The lower limit is preferably 0.01 part by mass or more, more preferably 0.03 part by mass or more.
<<其他成分>> <<Other ingredients>>
本發明的組成物視需要亦可含有增感劑、硬化促進劑、填料、熱硬化促進劑、熱聚合抑制劑、塑化劑及其他助劑類(例如,導 電性粒子、填充劑、消泡劑、阻燃劑、調平劑、剝離促進劑、抗氧化劑、香料、表面張力調整劑、鏈轉移劑等)。藉由適宜含有該些成分,而可調整作為目標的近紅外線截止濾波器等光學濾波器的穩定性、膜物性等性質。該些成分例如可參考日本專利特開2012-003225號公報的段落編號0183(相對應的美國專利申請公開第2013/0034812號說明書的[0237])的記載、日本專利特開2008-250074號公報的段落編號0101~段落編號0104、段落編號0107~段落編號0109等的記載,將該些內容併入至本說明書中。另外,作為抗氧化劑,可列舉:苯酚化合物、亞磷酸酯化合物、硫醚化合物等。更佳為分子量500以上的苯酚化合物、分子量500以上的亞磷酸酯化合物或分子量500以上的硫醚化合物。亦可將該些的兩種以上混合而使用。作為苯酚化合物,可使用作為酚系抗氧化劑而已知的任意的苯酚化合物。作為較佳的苯酚化合物,可列舉受阻酚化合物。特佳為於酚性羥基所鄰接的部位(鄰位)具有取代基的化合物。所述取代基較佳為碳數1~22的經取代或未經取代的烷基,更佳為甲基、乙基、丙基、異丙基、丁基、異丁基、第三丁基、戊基、異戊基、第三戊基、己基、辛基、異辛基、2-乙基己基。另外,亦較佳為於同一分子內具有酚基與亞磷酸酯基的化合物(抗氧化劑)。另外,抗氧化劑亦可較佳地使用磷系抗氧化劑。作為磷系抗氧化劑,可列舉選自由三[2-[[2,4,8,10-四(1,1-二甲基乙基)二苯并[d,f][1,3,2]二氧雜磷雜庚英-6-基]氧基]乙基]胺、三[2-[(4,6,9,11-四-第三丁基二苯并[d,f][1,3,2]二氧雜磷 雜庚英-2-基)氧基]乙基]胺及亞磷酸乙基雙(2,4-二-第三丁基-6-甲基苯基)所組成的群組中的至少一種化合物。該些可作為市售品而容易獲取,可列舉:艾迪科斯塔波(ADEKASTAB)AO-20、艾迪科斯塔波(ADEKASTAB)AO-30、艾迪科斯塔波(ADEKASTAB)AO-40、艾迪科斯塔波(ADEKASTAB)AO-50、艾迪科斯塔波(ADEKASTAB)AO-50F、艾迪科斯塔波(ADEKASTAB)AO-60、艾迪科斯塔波(ADEKASTAB)AO-60G、艾迪科斯塔波(ADEKASTAB)AO-80、艾迪科斯塔波(ADEKASTAB)AO-330(艾迪科(ADEKA)(股))等。相對於組成物的總固體成分,抗氧化劑的含量較佳為0.01質量%~20質量%,更佳為0.3質量%~15質量%。抗氧化劑可僅為一種,亦可為兩種以上。於為兩種以上的情況下,較佳為合計量成為所述範圍。 The composition of the present invention may also contain sensitizers, hardening accelerators, fillers, thermal hardening accelerators, thermal polymerization inhibitors, plasticizers, and other auxiliary agents (for example, conductive Electrical particles, fillers, defoamers, flame retardants, leveling agents, peeling accelerators, antioxidants, fragrances, surface tension regulators, chain transfer agents, etc.). By appropriately containing these components, it is possible to adjust the stability of the targeted near-infrared cut filter and other optical filters, and properties such as film physical properties. For these components, refer to, for example, paragraph No. 0183 of Japanese Patent Laid-Open No. 2012-003225 (corresponding U.S. Patent Application Publication No. 2013/0034812 Specification [0237]), Japanese Patent Laid-Open No. 2008-250074 The paragraph number 0101~paragraph number 0104, paragraph number 0107~paragraph number 0109, etc., are incorporated into this specification. Moreover, as an antioxidant, a phenol compound, a phosphite compound, a thioether compound, etc. are mentioned. More preferably, it is a phenol compound with a molecular weight of 500 or more, a phosphite compound with a molecular weight of 500 or more, or a thioether compound with a molecular weight of 500 or more. These two or more types can also be mixed and used. As the phenol compound, any phenol compound known as a phenol-based antioxidant can be used. As a preferable phenol compound, hindered phenol compound can be mentioned. Particularly preferred is a compound having a substituent at the position (ortho position) adjacent to the phenolic hydroxyl group. The substituent is preferably a substituted or unsubstituted alkyl group having 1 to 22 carbon atoms, more preferably a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, and a tertiary butyl group. , Pentyl, isopentyl, third pentyl, hexyl, octyl, isooctyl, 2-ethylhexyl. In addition, a compound (antioxidant) having a phenol group and a phosphite group in the same molecule is also preferable. In addition, as the antioxidant, phosphorus-based antioxidants can also be preferably used. Examples of phosphorus antioxidants include those selected from tris[2-[[2,4,8,10-tetra(1,1-dimethylethyl)dibenzo[d,f][1,3,2 ]Dioxaphosphapin-6-yl]oxy]ethyl]amine, tris[2-[(4,6,9,11-tetra-tert-butyldibenzo[d,f][ 1,3,2]dioxaphosphate At least one compound in the group consisting of hepeptin-2-yl)oxy)ethyl)amine and phosphite ethylbis(2,4-di-tert-butyl-6-methylphenyl) . These can be easily obtained as commercially available products, including: ADEKASTAB AO-20, ADEKASTAB AO-30, ADEKASTAB AO-40, ADEKASTAB AO-50, ADEKASTAB AO-50F, ADEKASTAB AO-60, ADEKASTAB AO-60G, Eddy ADEKASTAB AO-80, ADEKASTAB AO-330 (ADEKA (share)) and so on. The content of the antioxidant relative to the total solid content of the composition is preferably 0.01% by mass to 20% by mass, and more preferably 0.3% by mass to 15% by mass. There may be only one type of antioxidant, or two or more types. In the case of two or more types, it is preferable that the total amount falls within the above-mentioned range.
(組成物的製備方法) (Preparation method of composition)
本發明的組成物可將所述成分混合來製備。 The composition of the present invention can be prepared by mixing the ingredients.
當製備組成物時,可一次性調配各成分,亦可將各成分溶解或分散於溶劑中後依次調配。另外,進行調配時的投入順序或作業條件並不受特別制約。例如,可將所有成分同時溶解或分散於溶劑中來製備組成物,視需要亦可先將各成分適宜製成兩種以上的溶液或分散液,於使用時(塗佈時)將該些混合來製備成組成物。 When preparing the composition, each component can be blended at once, or it can be blended sequentially after being dissolved or dispersed in a solvent. In addition, there are no particular restrictions on the order of input or working conditions during deployment. For example, all the components can be dissolved or dispersed in a solvent at the same time to prepare a composition. If necessary, each component can also be prepared into two or more solutions or dispersions, and these can be mixed during use (during coating) To prepare a composition.
另外,於使用包含顏料者作為近紅外線吸收劑的情況下,較佳為包括使顏料分散的製程。於使顏料分散的製程中,作為用於 顏料的分散的機械力,可列舉:壓縮、壓榨、衝擊、剪切、空蝕(cavitation)等。 In addition, in the case of using a pigment containing a pigment as a near-infrared absorber, it is preferable to include a process of dispersing the pigment. In the process of dispersing the pigment, as a The mechanical force for the dispersion of the pigment includes compression, squeezing, impact, shear, cavitation, and the like.
作為該些製程的具體例,可列舉:珠磨機、砂磨機、輥磨機、球磨機、塗料振盪器、微射流均質機、高速葉輪、砂研磨機(sand grinder)、射流混合機(flow jet mixer)、高壓濕式微粒化、超音波分散等。另外,於砂磨機(珠磨機)中的顏料的粉碎中,較佳為於藉由使用直徑小的珠粒、增大珠粒的填充率等而提高粉碎效率的條件下進行處理。另外,較佳為於粉碎處理後藉由過濾、離心分離等來去除粗粒子。另外,使顏料分散的製程及分散機可較佳地使用「分散技術大全,資訊機構股份有限公司發行,2005年7月15日」或「以懸浮液(suspension)(固/液分散系)為中心的分散技術與工業應用的實際,綜合資料集,經營開發中心出版部發行,1978年10月10日」、日本專利特開2015-157893號公報的段落編號0022中記載的製程及分散機。另外,於使顏料分散的製程中,亦可進行利用鹽磨(salt milling)步驟的顏料的微細化處理。用於鹽磨步驟的原材料、機器、處理條件等例如可使用日本專利特開2015-194521號公報、日本專利特開2012-046629號公報中記載者。 Specific examples of these processes include: bead mills, sand mills, roller mills, ball mills, paint shakers, micro-jet homogenizers, high-speed impellers, sand grinders, and flow mixers. jet mixer), high-pressure wet micronization, ultrasonic dispersion, etc. In addition, in the pulverization of the pigment in a sand mill (bead mill), it is preferable to perform the treatment under conditions that increase the pulverization efficiency by using beads with a small diameter, increasing the filling rate of the beads, or the like. In addition, it is preferable to remove coarse particles by filtration, centrifugal separation, etc. after the pulverization treatment. In addition, the process of dispersing the pigment and the dispersing machine can preferably use "Dispersion Technology Encyclopedia, issued by Information Agency Co., Ltd., July 15, 2005" or "suspension (solid/liquid dispersion)" The center’s dispersion technology and actual industrial application, a comprehensive collection of materials, issued by the Publishing Department of the Management Development Center, October 10, 1978", the process and dispersion machine described in paragraph number 0022 of Japanese Patent Laid-Open No. 2015-157893. In addition, in the process of dispersing the pigment, the miniaturization treatment of the pigment by the salt milling step may also be performed. The raw materials, equipment, processing conditions, etc. used in the salt milling step can be those described in Japanese Patent Laid-Open No. 2015-194521 and Japanese Patent Laid-Open No. 2012-046629, for example.
於製備組成物時,出於去除異物或減少缺陷等目的,較佳為藉由過濾器進行過濾。作為過濾器,若為自先前以來便用於過濾用途等的過濾器,則可無特別限定地使用。例如可列舉利用聚四氟乙烯(polytetrafluoroethylene,PTFE)等氟樹脂、尼龍(例 如尼龍-6、尼龍-6,6)等聚醯胺系樹脂、聚乙烯、聚丙烯(polypropylene,PP)等聚烯烴樹脂(包含高密度、超高分子量的聚烯烴樹脂)等原材料的過濾器。該些原材料中,較佳為聚丙烯(包含高密度聚丙烯)及尼龍。 When preparing the composition, for the purpose of removing foreign matter or reducing defects, it is preferable to filter by a filter. As the filter, if it is a filter that has been used for filtering purposes and the like since the past, it can be used without particular limitation. For example, the use of polytetrafluoroethylene (polytetrafluoroethylene, PTFE) and other fluororesin, nylon (examples Such as nylon-6, nylon-6, 6) and other polyamide resins, polyethylene, polypropylene (polypropylene, PP) and other polyolefin resins (including high-density, ultra-high molecular weight polyolefin resin) and other raw materials filters . Among these raw materials, polypropylene (including high-density polypropylene) and nylon are preferred.
過濾器的孔徑合適的是0.01μm~7.0μm左右,較佳為0.01μm~3.0μm左右,進而佳為0.05μm~0.5μm左右。藉由設為該範圍,可將微細的異物確實地去除。另外,亦較佳為使用纖維狀的濾材。作為纖維狀的濾材,例如可列舉聚丙烯纖維、尼龍纖維、玻璃纖維等,具體而言可使用羅基技術(Roki Techno)(股)製造的SBP型系列(SBP008等)、TPR型系列(TPR002、TPR005等)、SHPX型系列(SHPX003等)的濾筒(filter cartridge)。 The pore size of the filter is suitably about 0.01 μm to 7.0 μm, preferably about 0.01 μm to 3.0 μm, and more preferably about 0.05 μm to 0.5 μm. By setting it as this range, fine foreign matter can be reliably removed. In addition, it is also preferable to use a fibrous filter medium. As the fibrous filter material, for example, polypropylene fiber, nylon fiber, glass fiber, etc. can be cited. Specifically, SBP type series (SBP008 etc.) manufactured by Roki Techno (stock) and TPR type series (TPR002) can be used. , TPR005, etc.), SHPX series (SHPX003, etc.) filter cartridge (filter cartridge).
當使用過濾器時,亦可將不同的過濾器加以組合。此時,利用第1過濾器的過濾可僅進行一次,亦可進行兩次以上。 When using filters, different filters can also be combined. At this time, the filtration by the first filter may be performed only once, or may be performed twice or more.
另外,亦可於所述範圍內將孔徑不同的第1過濾器加以組合。此處的孔徑可參照過濾器生產商的標稱值。作為市售的過濾器,例如可自日本頗爾(Pall)股份有限公司(DFA4201NXEY等)、愛多邦得科東洋(Advantec Toyo)(股)、日本英特格(Nihon Entegris)(股)(原日本密科理(Mykrolis)(股))或北澤微濾器(Kitz Microfilter)(股)等所提供的各種過濾器中進行選擇。 In addition, it is also possible to combine first filters having different pore diameters within the above-mentioned range. The pore size here can refer to the nominal value of the filter manufacturer. As a commercially available filter, for example, available from Pall Co., Ltd. (DFA4201NXEY, etc.), Advantec Toyo (stock), Nihon Entegris (stock) ( Choose from a variety of filters provided by the original Japanese Mykrolis (stock) or Kitz Microfilter (stock).
第2過濾器可使用藉由與所述第1過濾器相同的材料等形成的過濾器。 As the second filter, a filter formed of the same material as the first filter can be used.
例如,利用第1過濾器的過濾可僅於分散液中進行,於混合 其他成分後,進行第2過濾。 For example, the filtration with the first filter can be performed only in the dispersion liquid, and in the mixing After the other ingredients, perform the second filtration.
例如,於藉由塗佈形成膜的情況下,本發明的組成物的黏度(23℃)較佳為處於1mPa.s~3000mPa.s的範圍。下限較佳為3mPa.s以上,更佳為5mPa.s以上。上限較佳為2000mPa.s以下,更佳為1000mPa.s以下。 For example, in the case of forming a film by coating, the viscosity (23°C) of the composition of the present invention is preferably at 1 mPa. s~3000mPa. The range of s. The lower limit is preferably 3mPa. s or more, more preferably 5mPa. s above. The upper limit is preferably 2000 mPa. s or less, more preferably 1000mPa. s or less.
本發明的組成物亦可用於固體攝像元件的光接收側的近紅外線截止濾波器(例如,相對於晶圓級透鏡的近紅外線截止濾波器等)、固體攝像元件的背面側(與光接收側為相反側)的近紅外線截止濾波器等。另外,亦可將本發明的組成物直接塗佈於影像感測器上進行塗膜形成來使用。 The composition of the present invention can also be used for a near-infrared cut filter on the light-receiving side of a solid-state image sensor (for example, a near-infrared cut filter for a wafer-level lens, etc.), and the back side of a solid-state image sensor (and the light-receiving side). It is the near-infrared cut filter on the opposite side). In addition, the composition of the present invention may be directly applied to an image sensor to form a coating film and used.
本發明的組成物由於可以能夠塗佈的狀態供給,故可容易地於固體攝像元件的所期望的構件或位置形成近紅外線截止濾波器。 Since the composition of the present invention can be supplied in a coated state, it is possible to easily form a near-infrared cut filter at a desired member or position of the solid-state imaging element.
另外,亦可將本發明的組成物應用於玻璃基材或含有銅的層上。 In addition, the composition of the present invention can also be applied to a glass substrate or a layer containing copper.
使用本發明的組成物而獲得的膜較佳為於700nm~1000nm的範圍內具有最大吸收波長,且所述的最大吸收波長下的吸光度Amax、與波長550nm下的吸光度A550的比即吸光度Amax/吸光度A550為50~500。 The film obtained by using the composition of the present invention preferably has a maximum absorption wavelength in the range of 700 nm to 1000 nm, and the ratio of the absorbance Amax at the maximum absorption wavelength to the absorbance A550 at a wavelength of 550 nm, that is, the absorbance Amax/ The absorbance A550 is 50~500.
另外,膜的最大吸收波長更佳為於720nm~980nm的範圍內具有,進而佳為於740nm~960nm的範圍內具有。另外,膜的吸光度Amax/吸光度A550更佳為70~450,進而佳為100~400。 In addition, the maximum absorption wavelength of the film is more preferably in the range of 720 nm to 980 nm, and more preferably in the range of 740 nm to 960 nm. In addition, the absorbance Amax/absorbance A550 of the film is more preferably 70 to 450, and still more preferably 100 to 400.
另外,使用本發明的組成物而獲得的膜的膜厚較佳為20μm以下,更佳為10μm以下,進而佳為5μm以下。膜厚的下限較佳為0.1μm以上,更佳為0.2μm以上,進而佳為0.3μm以上。所述膜厚的範圍的至少一個中,與吸光度A550的比即吸光度Amax/吸光度A550較佳為50~500。 In addition, the film thickness of the film obtained using the composition of the present invention is preferably 20 μm or less, more preferably 10 μm or less, and still more preferably 5 μm or less. The lower limit of the film thickness is preferably 0.1 μm or more, more preferably 0.2 μm or more, and still more preferably 0.3 μm or more. In at least one of the above-mentioned film thickness ranges, the ratio of absorbance Amax/absorbance A550 to absorbance A550 is preferably 50 to 500.
使用本發明的組成物而獲得的膜及後述的近紅外線截止濾波器的透過率較佳為滿足以下的(1)~(4)中的至少一個條件,進而佳為滿足(1)~(4)的所有條件。 The transmittance of the film obtained using the composition of the present invention and the near-infrared cut filter described later preferably satisfies at least one of the following conditions (1) to (4), and more preferably satisfies (1) to (4) ) All conditions.
(1)波長400nm下的透過率較佳為70%以上,更佳為80%以上,進而佳為85%以上,特佳為90%以上。 (1) The transmittance at a wavelength of 400 nm is preferably 70% or more, more preferably 80% or more, still more preferably 85% or more, particularly preferably 90% or more.
(2)波長500nm下的透過率較佳為70%以上,更佳為80%以上,進而佳為90%以上,特佳為95%以上。 (2) The transmittance at a wavelength of 500 nm is preferably 70% or more, more preferably 80% or more, still more preferably 90% or more, and particularly preferably 95% or more.
(3)波長600nm下的透過率較佳為70%以上,更佳為80%以上,進而佳為90%以上,特佳為95%以上。 (3) The transmittance at a wavelength of 600 nm is preferably 70% or more, more preferably 80% or more, still more preferably 90% or more, particularly preferably 95% or more.
(4)波長650nm下的透過率較佳為70%以上,更佳為80%以上,進而佳為90%以上,特佳為95%以上。 (4) The transmittance at a wavelength of 650 nm is preferably 70% or more, more preferably 80% or more, still more preferably 90% or more, particularly preferably 95% or more.
使用本發明的組成物而獲得的膜及後述的近紅外線截止濾波器的膜厚為20μm以下,波長400nm~650nm的所有範圍下的透過率較佳為70%以上,更佳為80%以上,進而佳為90%以上。另外,波長700nm~1000nm的範圍的至少一點下的透過率較佳為20%以下。 The film thickness of the film obtained using the composition of the present invention and the near-infrared cut filter described later is 20 μm or less, and the transmittance in all ranges of wavelengths from 400 nm to 650 nm is preferably 70% or more, more preferably 80% or more, More preferably, it is 90% or more. In addition, the transmittance at at least one point in the wavelength range of 700 nm to 1000 nm is preferably 20% or less.
<光學濾波器> <Optical Filter>
其次,對本發明的光學濾波器進行說明。本發明的光學濾波器為使用所述本發明的組成物而成者。光學濾波器可較佳地用作近紅外線截止濾波器、紅外線透過濾波器。另外,光學濾波器亦可用作紅外線遮蔽濾波器。再者,本發明中,所謂近紅外線截止濾波器,是指透過可見光區域的波長的光(可見光)並遮蔽近紅外區域的波長的光(近紅外線)的至少一部分的濾波器。另外,本發明中,所謂紅外線透過濾波器,是指遮蔽可見光區域的波長的光並透過近紅外區域的波長的光(近紅外線)的至少一部分的濾波器。 Next, the optical filter of the present invention will be described. The optical filter of the present invention is obtained by using the composition of the present invention described above. The optical filter can be preferably used as a near-infrared cut filter and an infrared transmission filter. In addition, optical filters can also be used as infrared shielding filters. In addition, in the present invention, the so-called near infrared cut filter refers to a filter that transmits light of a wavelength in the visible light region (visible light) and shields at least a part of light of a wavelength in the near infrared region (near infrared). In addition, in the present invention, the term "infrared transmission filter" refers to a filter that blocks light of a wavelength in the visible light region and transmits at least a part of light of a wavelength in the near-infrared region (near infrared).
於將本發明的光學濾波器用作紅外線透過濾波器的情況下,紅外線透過濾波器例如可列舉:遮蔽可見光且透過波長900nm以上的波長的光的濾波器等。於將本發明的光學濾波器用作紅外線透過濾波器的情況下,較佳為除使用本發明的組成物的層以外另存在包含遮蔽可見光的有色材料的層的濾波器。 When the optical filter of the present invention is used as an infrared transmission filter, the infrared transmission filter includes, for example, a filter that blocks visible light and transmits light having a wavelength of 900 nm or more. When the optical filter of the present invention is used as an infrared transmission filter, it is preferable to have a filter including a layer of a colored material that shields visible light in addition to the layer using the composition of the present invention.
光學濾波器中的包含本發明的組成物的膜的膜厚可根據目的而適宜調整。膜厚較佳為20μm以下,更佳為10μm以下,進而佳為5μm以下。膜厚的下限較佳為0.1μm以上,更佳為0.2μm以上,進而佳為0.3μm以上。 The film thickness of the film containing the composition of this invention in an optical filter can be adjusted suitably according to the objective. The film thickness is preferably 20 μm or less, more preferably 10 μm or less, and still more preferably 5 μm or less. The lower limit of the film thickness is preferably 0.1 μm or more, more preferably 0.2 μm or more, and still more preferably 0.3 μm or more.
於將本發明的光學濾波器用作近紅外線截止濾波器的情況下,除包含本發明的組成物的膜以外亦可進而具有抗反射膜、紫外線吸收膜等。作為紫外線吸收膜,例如可參考WO2015/099060號公報的段落編號0040~段落編號0070、段落編 號0119~段落編號0145中記載的吸收層,將該內容併入至本說明書中。作為抗反射膜,可列舉高折射層與低折射層交替地積層而成的積層體(例如,介電體多層膜等)。抗反射膜的分光特性可根據光源的波長、光學濾波器的分光特性等來適宜選擇。藉由將包含本發明的組成物的膜與抗反射膜組合而使用,亦可遮蔽廣泛區域的紅外線。關於抗反射膜的詳細情況,可參考日本專利特開2014-41318號公報的段落編號0255~段落編號0259的記載,將該內容併入至本說明書中。 When using the optical filter of this invention as a near-infrared cut filter, you may have an anti-reflection film, an ultraviolet absorption film, etc. other than the film containing the composition of this invention. As the ultraviolet absorbing film, for example, reference can be made to paragraph numbers 0040 to 0070 of WO2015/099060, and paragraph numbers. The absorbent layer described in No. 0119 to Paragraph No. 0145 is incorporated into this specification. As the anti-reflection film, a laminate in which a high-refractive layer and a low-refractive layer are alternately laminated (for example, a dielectric multilayer film, etc.) can be cited. The spectral characteristics of the anti-reflection film can be appropriately selected according to the wavelength of the light source, the spectral characteristics of the optical filter, and the like. By combining a film containing the composition of the present invention and an anti-reflection film, it is also possible to block infrared rays in a wide area. For the details of the anti-reflection film, reference can be made to the description of paragraph number 0255 to paragraph number 0259 of JP 2014-41318 A, and this content is incorporated into this specification.
本發明的光學濾波器可用於電荷耦合元件(CCD)或互補式金屬氧化膜半導體(CMOS)器件等固體攝像元件、或者紅外線感測器、圖像顯示裝置等各種裝置。另外,本發明的光學濾波器可用於具有吸收或截止近紅外線的功能的透鏡(數位照相機或行動電話或車載照相機等照相機用透鏡、f-θ透鏡、讀取透鏡等光學透鏡)及半導體光接收元件用的光學濾波器、為了節能而阻斷紅外線的近紅外線吸收膜或近紅外線吸收板、以太陽光的選擇性的利用為目的之農業用塗佈膜、利用近紅外線的吸收熱的記錄媒體、電子機器用或照片用近紅外線濾波器、保護眼鏡、太陽眼鏡、紅外線阻斷濾波器、光學文字讀取記錄濾波器、防止機密文檔複印用濾波器、電子照片感光體等。另外,作為CCD照相機用雜訊截止濾波器、CMOS影像感測器用濾波器亦有用。 The optical filter of the present invention can be used in various devices such as solid-state imaging elements such as charge coupled devices (CCD) or complementary metal oxide film semiconductor (CMOS) devices, or infrared sensors and image display devices. In addition, the optical filter of the present invention can be used for lenses that have a function of absorbing or blocking near infrared rays (lenses for cameras such as digital cameras, mobile phones, or car cameras, optical lenses such as f-theta lenses, reading lenses, etc.) and semiconductor light receiving Optical filters for components, near-infrared absorbing films or near-infrared absorbing plates that block infrared rays for energy conservation, agricultural coating films for the selective use of sunlight, recording media that use near-infrared absorbing heat, Near-infrared filters for electronic equipment or photographs, protective glasses, sunglasses, infrared cut filters, optical text reading and recording filters, filters for preventing copying of confidential documents, electronic photo photosensitive bodies, etc. It is also useful as a noise cut filter for CCD cameras and a filter for CMOS image sensors.
另外,本發明的光學濾波器具有使用本發明的組成物(較佳為進而包含遮蔽可見光的有色材料的組成物)的畫素與選 自紅、綠、藍、洋紅、黃、青、黑及無色中的畫素的態樣亦為較佳態樣。 In addition, the optical filter of the present invention has pixels and options using the composition of the present invention (preferably a composition further comprising a colored material that shields visible light). Aspects of pixels from red, green, blue, magenta, yellow, cyan, black, and colorless are also preferable.
<積層體> <Laminated body>
本發明的積層體具有使用本發明的感放射線性組成物的近紅外線截止濾波器與包含彩色著色劑的彩色濾波器。本發明的積層體中的近紅外線截止濾波器與彩色濾波器可於厚度方向上鄰接,亦可不鄰接。於近紅外線截止濾波器與彩色濾波器於厚度方向上不鄰接的情況下,可於不同於形成有彩色濾波器的基材的基材上形成有近紅外線截止濾波器,亦可於近紅外線截止濾波器與彩色濾波器之間介隔存在有構成固體攝像元件的其他構件(例如,微透鏡、平坦化層等)。 The laminate of the present invention has a near-infrared cut filter using the radiation-sensitive composition of the present invention and a color filter containing a color colorant. The near-infrared cut filter and the color filter in the laminate of the present invention may or may not be adjacent to each other in the thickness direction. When the near-infrared cut filter and the color filter are not adjacent to each other in the thickness direction, the near-infrared cut filter may be formed on a substrate different from the base on which the color filter is formed, or the near-infrared cut filter may be cut in the near-infrared Between the filter and the color filter, there are other members constituting the solid-state imaging element (for example, a microlens, a planarization layer, etc.).
<圖案形成方法> <Pattern Formation Method>
其次,對本發明的圖案形成方法進行說明。本發明的圖案形成方法包括:使用本發明的感放射線性組成物而於支撐體上形成感放射線性組成物層的步驟;以圖案狀對感放射線性組成物層進行曝光的步驟;以及將未曝光部顯影去除而形成圖案的步驟。以下,對各步驟進行詳細敘述。 Next, the pattern forming method of the present invention will be described. The pattern forming method of the present invention includes: a step of forming a radiation-sensitive composition layer on a support using the radiation-sensitive composition of the present invention; a step of exposing the radiation-sensitive composition layer in a pattern; and The step of developing and removing the exposed part to form a pattern. Hereinafter, each step will be described in detail.
<<形成感放射線性組成物層的步驟>> <<Steps of forming a radiation-sensitive composition layer>>
於形成感放射線性組成物層的步驟中,使用本發明的感放射線性組成物而於支撐體上形成感放射線性組成物層。 In the step of forming the radiation-sensitive composition layer, the radiation-sensitive composition of the present invention is used to form the radiation-sensitive composition layer on the support.
作為支撐體,例如可列舉:包含玻璃、矽、聚碳酸酯、聚酯、芳香族聚醯胺、聚醯胺醯亞胺、聚醯亞胺等材料的基材。 另外,可使用在基材上設置有CCD或CMOS等固體攝像元件(光接收元件)的固體攝像元件用支撐體。 Examples of the support include substrates containing materials such as glass, silicon, polycarbonate, polyester, aromatic polyamide, polyimide, and polyimide. In addition, a support for a solid-state imaging element in which a solid-state imaging element (light-receiving element) such as CCD or CMOS is provided on a substrate can be used.
圖案可形成於固體攝像元件用基板的形成有固體攝像元件的面側(表面),亦可形成於未形成固體攝像元件的面側(背面)。於支撐體上,視需要亦可設置底塗層以改良與上部的層的密接、防止物質的擴散或實現基板表面的平坦化。 The pattern may be formed on the surface side (front surface) of the solid-state imaging element substrate on which the solid-state imaging element is formed, or may be formed on the surface side (rear surface) where the solid-state imaging element is not formed. On the support, if necessary, an undercoat layer can also be provided to improve the adhesion with the upper layer, prevent the diffusion of substances, or realize the flattening of the substrate surface.
作為於支撐體上的本發明的感放射線性組成物的應用方法,可使用公知的方法。例如可列舉:滴加法(滴落澆鑄(drop casting));狹縫式塗佈法;噴霧法;輥塗法;旋轉塗佈法(spin coating);流延塗佈法;狹縫及旋轉法;預濕法(例如,日本專利特開2009-145395號公報中所記載的方法);噴墨(例如應需(on-demand)方式、壓電(piezo)方式、加熱(thermal)方式)、噴嘴噴射等噴出系印刷、柔版印刷、網版印刷、凹版印刷、逆轉膠版印刷、金屬遮罩印刷法等各種印刷法;使用模具等的轉印法;奈米壓印法等。藉由噴墨的應用方法並無特別限定,例如可列舉「擴展.使用的噴墨-專利中可見的無限可能性-,2005年2月發行,住友電木科技研究(Sumibe Techno Research)」中所示的日本專利公報中記載的方法(特別是第115~133頁)、或日本專利特開2003-262716號公報、日本專利特開2003-185831號公報、日本專利特開2003-261827號公報、日本專利特開2012-126830號公報、日本專利特開2006-169325號公報等中記載的方法。 As a method of applying the radiation-sensitive composition of the present invention to the support, a known method can be used. Examples include: drop method (drop casting); slit coating method; spray method; roll coating method; spin coating method; cast coating method; slit and spin method ; Pre-wet method (for example, the method described in Japanese Patent Laid-Open No. 2009-145395); inkjet (for example, on-demand method, piezo method, thermal method), Various printing methods such as nozzle jetting, such as printing, flexographic printing, screen printing, gravure printing, reverse offset printing, metal mask printing, etc.; transfer methods using molds, etc.; nanoimprinting methods, etc. The application method by inkjet is not particularly limited. For example, "Extended. Inkjet Used-Unlimited Possibilities Seen in Patent-Issued in February 2005, Sumibe Techno Research" The method described in the Japanese Patent Publication shown (especially pages 115 to 133), or Japanese Patent Laid-Open No. 2003-262716, Japanese Patent Laid-Open No. 2003-185831, and Japanese Patent Laid-Open No. 2003-261827 , Japanese Patent Application Publication No. 2012-126830, Japanese Patent Application Publication No. 2006-169325, etc.
形成於支撐體上的感放射線性組成物層可進行乾燥(預 烘烤)。於藉由低溫製程來形成圖案的情況下,亦可不進行預烘烤。於進行預烘烤的情況下,預烘烤溫度較佳為150℃以下,更佳為120℃以下,進而佳為110℃以下。下限例如可設為50℃以上,亦可設為80℃以上。預烘烤時間較佳為10秒~300秒,更佳為40秒~250秒,進而佳為80秒~220秒。乾燥可利用加熱板、烘箱等進行。 The radiation-sensitive composition layer formed on the support can be dried (pre- bake). When the pattern is formed by a low-temperature process, pre-baking may not be performed. In the case of pre-baking, the pre-baking temperature is preferably 150°C or lower, more preferably 120°C or lower, and still more preferably 110°C or lower. The lower limit may be 50°C or higher, or 80°C or higher, for example. The pre-baking time is preferably 10 seconds to 300 seconds, more preferably 40 seconds to 250 seconds, and still more preferably 80 seconds to 220 seconds. Drying can be carried out using a hot plate, oven, etc.
<<進行曝光的步驟>> <<Steps to Exposure>>
其次,以圖案狀對形成於支撐體上的感放射線性組成物層進行曝光。例如使用步進機等曝光裝置,介隔具有規定的遮罩圖案的遮罩對感放射線性組成物層進行曝光,藉此可進行圖案曝光。藉此,可使曝光部分硬化。 Next, the radiation-sensitive composition layer formed on the support is exposed in a pattern. For example, by using an exposure device such as a stepper to expose the radiation-sensitive composition layer through a mask having a predetermined mask pattern, pattern exposure can be performed. Thereby, the exposed part can be hardened.
作為可於曝光時使用的放射線(光),可較佳地使用g射線、i射線等紫外線(特佳為i射線)。照射量(曝光量)例如較佳為0.03J/cm2~2.5J/cm2,更佳為0.05J/cm2~1.0J/cm2。 As the radiation (light) that can be used in exposure, ultraviolet rays such as g-rays and i-rays (especially i-rays) can be preferably used. The irradiation amount (exposure amount) is, for example, preferably 0.03 J/cm 2 to 2.5 J/cm 2 , and more preferably 0.05 J/cm 2 to 1.0 J/cm 2 .
可適宜選擇曝光時的氧濃度,除於大氣下進行曝光以外,可於例如氧濃度為19體積%以下的低氧環境下(例如,15體積%、5體積%、實質上無氧)進行曝光,亦可於氧濃度超過21體積%的高氧環境下(例如,22體積%、30體積%、50體積%)進行曝光。另外,可適宜設定曝光照度,通常可自1000W/m2~100000W/m2(例如,5000W/m2、15000W/m2、35000W/m2)的範圍中選擇。氧濃度與曝光照度可組合適宜條件,例如可設為氧濃度為10體積%且照度為10000W/m2、氧濃度為35體積%且照度為20000W/m2 等。 The oxygen concentration during exposure can be appropriately selected. In addition to exposure in the atmosphere, exposure can be performed in a low-oxygen environment with an oxygen concentration of 19% by volume or less (for example, 15% by volume, 5% by volume, and substantially no oxygen). It can also be exposed in a high-oxygen environment with an oxygen concentration exceeding 21% by volume (for example, 22% by volume, 30% by volume, and 50% by volume). Further, exposure illuminance can be appropriately set, typically 1000W / m 2 ~ 100000W / m 2 ( e.g., 5000W / m 2, 15000W / m 2, 35000W / m 2) selected from the range. The oxygen concentration and the exposure illuminance can be combined with appropriate conditions. For example, an oxygen concentration of 10% by volume and an illuminance of 10,000 W/m 2 , an oxygen concentration of 35% by volume and an illuminance of 20,000 W/m 2 can be set.
<<顯影步驟>> <<Development Step>>
其次,將未曝光部顯影去除而形成圖案。未曝光部的顯影去除可使用顯影液進行。藉此,曝光步驟中的未曝光部的感放射線性組成物溶出至顯影液中,而僅使光硬化的部分殘留。 Next, the unexposed part is developed and removed to form a pattern. The development and removal of the unexposed part can be performed using a developer. Thereby, the radiation-sensitive composition of the unexposed part in the exposure step is eluted into the developing solution, and only the light-hardened part remains.
作為顯影液,理想的是不對基底的固體攝像元件或電路等造成損傷的有機鹼性顯影液。 As the developer, an organic alkaline developer that does not damage the solid-state imaging element or circuit of the substrate or the like is desirable.
顯影液的溫度例如較佳為20℃~30℃。顯影時間較佳為20秒~180秒。另外,為了提高殘渣去除性,亦可將以下步驟反覆進行幾次:每隔60秒甩去顯影液,進而供給新的顯影液。 The temperature of the developer is preferably 20°C to 30°C, for example. The development time is preferably 20 seconds to 180 seconds. In addition, in order to improve the residue removal performance, the following steps may be repeated several times: the developer is shaken off every 60 seconds, and then a new developer is supplied.
作為顯影液中所用的鹼性劑,例如可列舉:氨水、乙胺、二乙胺、二甲基乙醇胺、二甘醇胺、二乙醇胺、羥基胺、乙二胺、氫氧化四甲基銨、氫氧化四乙基銨、氫氧化四丙基銨、氫氧化四丁基銨、氫氧化苄基三甲基銨、二甲基雙(2-羥基乙基)氫氧化銨、膽鹼、吡咯、哌啶、1,8-二氮雜雙環[5.4.0]-7-十一烯等有機鹼性劑。顯影液可較佳地使用利用純水將該些鹼性劑稀釋而成的鹼性水溶液。鹼性水溶液的鹼性劑的濃度較佳為0.001質量%~10質量%,更佳為0.01質量%~1質量%。 The alkaline agent used in the developer includes, for example, ammonia, ethylamine, diethylamine, dimethylethanolamine, diglycolamine, diethanolamine, hydroxylamine, ethylenediamine, tetramethylammonium hydroxide, Tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide, dimethylbis(2-hydroxyethyl)ammonium hydroxide, choline, pyrrole, Piperidine, 1,8-diazabicyclo[5.4.0]-7-undecene and other organic alkaline agents. As the developer, an alkaline aqueous solution obtained by diluting these alkaline agents with pure water can be preferably used. The concentration of the alkaline agent in the alkaline aqueous solution is preferably 0.001% by mass to 10% by mass, more preferably 0.01% by mass to 1% by mass.
另外,顯影液中亦可使用無機鹼性劑。作為無機鹼性劑,例如較佳為氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸氫鈉、矽酸鈉、偏矽酸鈉等。 In addition, an inorganic alkaline agent can also be used in the developer. As the inorganic alkaline agent, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium silicate, sodium metasilicate, etc. are preferred.
另外,顯影液中亦可使用界面活性劑。作為界面活性劑的例 子,可列舉所述本發明的組成物中說明的界面活性劑,較佳為非離子系界面活性劑。 In addition, surfactants can also be used in the developer. As an example of surfactant Examples include the surfactants described in the composition of the present invention, and nonionic surfactants are preferred.
於使用包含鹼性水溶液的顯影液的情況下,較佳為於顯影後利用純水進行清洗(淋洗)。 In the case of using a developer containing an alkaline aqueous solution, it is preferable to wash (rinse) with pure water after development.
亦可於顯影後、實施乾燥後進行加熱處理(後烘烤)。後烘烤是用以使膜完全硬化的顯影後的加熱處理。於進行後烘烤的情況下,後烘烤溫度例如較佳為100℃~240℃。就膜硬化的觀點而言,更佳為200℃~230℃。另外,於使用有機電致發光(有機EL(Electroluminescence))元件作為發光光源的情況下或利用有機原材料構成影像感測器的光電轉換膜的情況下,後烘烤溫度較佳為150℃以下,更佳為120℃以下,進而佳為100℃以下,特佳為90℃以下。下限例如可設為50℃以上。可使用加熱板或對流烘箱(熱風循環式乾燥機)、高頻加熱機等加熱機構,以成為所述條件的方式,藉由連續式或批次式對顯影後的膜進行後烘烤。 It is also possible to perform heat treatment (post-baking) after development and drying. Post-baking is a heat treatment after development to completely harden the film. In the case of post-baking, the post-baking temperature is preferably 100°C to 240°C, for example. From the viewpoint of film hardening, it is more preferably 200°C to 230°C. In addition, when an organic electroluminescence (Electroluminescence) element is used as a light source or when the photoelectric conversion film of an image sensor is composed of organic materials, the post-baking temperature is preferably 150°C or lower. It is more preferably 120°C or lower, still more preferably 100°C or lower, and particularly preferably 90°C or lower. The lower limit can be set to 50°C or higher, for example. A heating mechanism such as a heating plate, a convection oven (hot air circulation type dryer), a high-frequency heater, etc. can be used to post-bake the developed film in a continuous or batch manner so as to meet the above-mentioned conditions.
另外,本發明的圖案形成方法亦可於對未曝光部進行顯影去除後(顯影後)進而具有進行曝光的步驟(以下,將顯影後的曝光亦稱為後曝光)。於使用包含肟化合物與α-胺基酮化合物作為光聚合起始劑的感放射線性組成物的情況下,較佳為進行後曝光。藉由以圖案形成前後的兩個階段對感放射線性組成物層進行曝光,可於最初的曝光(形成圖案之前的曝光)中使感放射線性組成物適度地硬化,且可於接下來的曝光(形成圖案之後的曝光)中使感放射線性組成物整體大致硬化。結果,即便後烘烤溫度為 180℃以下,亦可提高感放射線性組成物的硬化性。 In addition, the pattern forming method of the present invention may further have a step of exposing after developing and removing the unexposed part (after developing) (hereinafter, the exposure after developing is also referred to as post-exposure). In the case of using a radiation-sensitive composition containing an oxime compound and an α-aminoketone compound as a photopolymerization initiator, it is preferable to perform post-exposure. By exposing the radiation-sensitive composition layer in two stages before and after pattern formation, the radiation-sensitive composition can be properly cured in the initial exposure (exposure before patterning), and can be used in the next exposure During (exposure after patterning), the radiation-sensitive composition is substantially hardened as a whole. As a result, even if the post-baking temperature is Below 180°C, the curability of the radiation-sensitive composition can also be improved.
於以兩個階段進行曝光的情況下,亦可於後曝光後進而進行後烘烤。後烘烤溫度例如較佳為100℃~240℃。 In the case of exposure in two stages, post-exposure may be followed by post-baking. The post-baking temperature is preferably 100°C to 240°C, for example.
<固體攝像元件> <Solid-state imaging device>
本發明的固體攝像元件具有所述本發明的光學濾波器。作為本發明的固體攝像元件的構成,只要為具有本發明的光學濾波器且作為固體攝像元件而發揮功能的構成,則並無特別限定,例如可列舉以下般的構成。 The solid-state imaging element of the present invention has the optical filter of the present invention. The configuration of the solid-state imaging element of the present invention is not particularly limited as long as it has the optical filter of the present invention and functions as a solid-state imaging element. For example, the following configurations can be cited.
所述固體攝像元件為以下構成:於支撐體上具有構成固體攝像元件的光接收區域的多個光二極體(photodiode)及包含多晶矽等的傳輸電極,於光二極體及傳輸電極上具有僅光二極體的光接收部開口的包含鎢等的遮光膜,於遮光膜上具有以覆蓋遮光膜整個面及光二極體光接收部的方式形成的包含氮化矽等的器件保護膜,於器件保護膜上具有本發明的膜。 The solid-state imaging element has the following structure: a support body has a plurality of photodiodes (photodiodes) constituting a light receiving region of the solid-state imaging element and a transmission electrode including polysilicon, etc., and only two photodiodes are provided on the photodiode and the transmission electrode. A light-shielding film containing tungsten, etc. where the light-receiving portion of the polar body is opened, and a device protection film containing silicon nitride, etc., formed to cover the entire surface of the light-shielding film and the light-receiving portion of the photodiode is provided on the light-shielding film to protect the device The film has the film of the present invention on the film.
進而,亦可為於器件保護膜上且近紅外線截止濾波器之下(靠近支撐體之側)具有聚光機構(例如,微透鏡等。以下相同)的構成、或於近紅外線截止濾波器上具有聚光機構的構成等。另外,固體攝像元件中,彩色濾波器亦可具有在藉由隔離壁而分隔為例如格子狀的空間內將形成各色畫素的硬化膜埋入的結構。此種情況下的隔離壁較佳為相對於各色畫素而為低折射率。作為具有此種結構的攝像裝置的例子,可列舉日本專利特開2012-227478號公報、日本專利特開2014-179577號公報中記載的裝置。 Furthermore, it may be a configuration having a light-concentrating mechanism (for example, a micro lens, etc., the same below) on the device protective film and under the near-infrared cut filter (on the side close to the support), or on the near-infrared cut filter It has a condensing mechanism, etc. In addition, in the solid-state imaging device, the color filter may have a structure in which a cured film forming pixels of each color is buried in a space partitioned into, for example, a lattice shape by a partition wall. In this case, the partition wall preferably has a low refractive index with respect to each color pixel. As an example of an imaging device having such a structure, the devices described in Japanese Patent Laid-Open No. 2012-227478 and Japanese Patent Laid-Open No. 2014-179577 can be cited.
<圖像顯示裝置> <Image display device>
本發明的光學濾波器亦可用於液晶顯示裝置或有機電致發光(有機EL)顯示裝置等圖像顯示裝置。例如,藉由與各著色畫素(例如紅色、綠色、藍色)一起使用,可出於阻斷圖像顯示裝置的背光(例如白色發光二極體(白色LED(Light Emitting Diode)))中所含的紅外光並防止周邊機器的誤動作的目的、或出於形成各著色顯示畫素以及紅外畫素的目的而使用。 The optical filter of the present invention can also be used in image display devices such as liquid crystal display devices or organic electroluminescence (organic EL) display devices. For example, by using together with each colored pixel (such as red, green, blue), it can be used to block the backlight of the image display device (such as white light emitting diode (White LED (Light Emitting Diode))). The included infrared light is used for the purpose of preventing malfunctions of peripheral devices, or for the purpose of forming each colored display pixel and infrared pixel.
關於圖像顯示裝置的定義或圖像顯示裝置的詳細情況,例如記載於「電子顯示器器件(佐佐木昭夫著,工業調查會(股),1990年發行)」、「顯示器器件(伊吹順章著,產業圖書(股),1989年發行)」等中。另外,關於液晶顯示裝置,例如記載於「下一代液晶顯示器技術(內田龍男編輯,工業調查會(股),1994年發行)」中。對於本發明可應用的液晶顯示裝置並無特別限制,例如可應用於所述「下一代液晶顯示器技術」中所記載的多種方式的液晶顯示裝置。 The definition of image display devices or the details of image display devices, for example, are described in "Electronic Display Devices (by Sasaki Akio, Industrial Research Council (Stock), issued in 1990)" and "Display Devices (by Ibuki Junsho, Industrial Books (shares), issued in 1989)" etc. In addition, the liquid crystal display device is described in, for example, "Next Generation Liquid Crystal Display Technology (Edited by Tatsuo Uchida, Industrial Research Council (Stock), Issued in 1994)". The liquid crystal display device to which the present invention is applicable is not particularly limited. For example, it can be applied to various types of liquid crystal display devices described in the "Next Generation Liquid Crystal Display Technology".
圖像顯示裝置可具有白色有機EL元件。白色有機EL元件較佳為串聯結構。關於有機EL元件的串聯結構,於日本專利特開2003-45676號公報,三上明義主編,「有機EL技術開發的最前線-高亮度.高精度.長壽命化.專有技術集-」,技術資訊協會,第326-328頁,2008年等中有記載。有機EL元件所發出的白色光的光譜較佳為於藍色區域(430nm-485nm)、綠色區域(530nm-580nm)及黃色區域(580nm-620nm)中具有強的最大發光峰值者。 更佳為除該些發光峰值以外,進而於紅色區域(650nm-700nm)中具有最大發光峰值者。 The image display device may have a white organic EL element. The white organic EL device preferably has a tandem structure. Regarding the tandem structure of organic EL elements, published in Japanese Patent Laid-Open No. 2003-45676, edited by Akoyoshi Mikami, "The front line of organic EL technology development-high brightness, high precision, long life, and proprietary technology collection -", Technical Information Association, pages 326-328, recorded in 2008 etc. The spectrum of the white light emitted by the organic EL element is preferably one having a strong maximum emission peak in the blue region (430nm-485nm), the green region (530nm-580nm), and the yellow region (580nm-620nm). More preferably, in addition to these luminescence peaks, those having the largest luminescence peak in the red region (650 nm-700 nm) are further preferred.
<紅外線感測器> <Infrared Sensor>
本發明的紅外線感測器具有所述本發明的光學濾波器。作為紅外線感測器的構成,只要為具有本發明的光學濾波器且作為紅外線感測器而發揮功能的構成,則並無特別限定。 The infrared sensor of the present invention has the optical filter of the present invention. The structure of the infrared sensor is not particularly limited as long as it has the optical filter of the present invention and functions as an infrared sensor.
以下,使用圖式對本發明的紅外線感測器的一實施形態進行說明。 Hereinafter, an embodiment of the infrared sensor of the present invention will be described using drawings.
圖1中,符號110為固體攝像元件。設於固體攝像元件110上的攝像區域具有近紅外線截止濾波器111與紅外線透過濾波器114。另外,於近紅外線截止濾波器111上積層有彩色濾波器112。於彩色濾波器112及紅外線透過濾波器114的入射光hν側配置有微透鏡115。以覆蓋微透鏡115的方式形成有平坦化層116。近紅外線截止濾波器111可使用本發明的組成物而形成。
In FIG. 1,
彩色濾波器112為透過及吸收可見光區域的特定波長的光並形成有畫素的彩色濾波器,並無特別限定,可使用先前公知的畫素形成用的彩色濾波器。例如可使用形成有紅色(R)、綠色(G)、藍色(B)的畫素的彩色濾波器等。例如可參考日本專利特開2014-043556號公報的段落編號0214~段落編號0263的記載,將該內容併入至本說明書中。
The
紅外線透過濾波器114藉由後述的紅外LED的發光波長而選擇其特性。例如,於紅外LED的發光波長為850nm的情
況下,紅外線透過濾波器114的膜的厚度方向的透光率於波長400nm~650nm的範圍內的最大值較佳為30%以下,更佳為20%以下,進而佳為10%以下,特佳為0.1%以下。該透過率較佳為於波長400nm~650nm的範圍的整個區域中滿足所述條件。波長400nm~650nm的範圍內的最大值通常為0.1%以上。
The
紅外線透過濾波器114的膜的厚度方向的透光率於波長800nm以上(較佳為800nm~1300nm)的範圍內的最小值較佳為70%以上,更佳為80%以上,進而佳為90%以上。該透過率較佳為於波長800nm以上的範圍的一部分滿足所述條件,且較佳為於與紅外LED的發光波長相對應的波長下滿足所述條件。波長900nm~1300nm的範圍內的透光率的最小值通常為99.9%以下。
The minimum value of the light transmittance in the thickness direction of the film of the
紅外線透過濾波器114的膜厚較佳為100μm以下,更佳為15μm以下,進而佳為5μm以下,特佳為1μm以下。下限值較佳為0.1μm。若膜厚為所述範圍,則可製成滿足所述分光特性的膜。
The film thickness of the
以下示出紅外線透過濾波器114的分光特性、膜厚等的測定方法。
The methods for measuring the spectral characteristics, film thickness, and the like of the
關於膜厚,使用觸針式表面形狀測定器(愛發科(ULVAC)(股)製造的DEKTAK150)來對具有膜的乾燥後的基板進行測定。 Regarding the film thickness, a stylus-type surface profile measuring device (DEKTAK150 manufactured by ULVAC Co., Ltd.) was used to measure the dried substrate with the film.
膜的分光特性為使用紫外可見近紅外分光光度計(日立先端科技(Hitachi High-Technologies)(股)製造的U-4100)並於波長300nm~1300nm的範圍下測定透過率而得的值。 The spectroscopic properties of the film are values obtained by measuring the transmittance in a wavelength range of 300 nm to 1300 nm using an ultraviolet-visible-near-infrared spectrophotometer (U-4100 manufactured by Hitachi High-Technologies Co., Ltd.).
具有所述分光特性的紅外線透過濾波器114可使用包含遮蔽可見光的有色材料的組成物來形成。關於遮蔽可見光的有色材料的詳細情況,與所述本發明的組成物中說明的範圍相同。
The
另外,例如於紅外LED的發光波長為940nm的情況下,紅外線透過濾波器114較佳為膜的厚度方向的透光率於波長450nm~650nm的範圍內的最大值為20%以下,膜的厚度方向的波長835nm的透光率為20%以下,膜的厚度方向的透光率於波長1000nm~1300nm的範圍內的最小值為70%以上。
In addition, for example, when the emission wavelength of the infrared LED is 940 nm, the
具有所述分光特性的紅外線透過濾波器114可使用包含遮蔽可見光的有色材料與於750nm~950nm的範圍具有最大吸收波長的近紅外線吸收化合物的組成物來製造。關於遮蔽可見光的有色材料的詳細情況,與所述本發明的組成物中說明的範圍相同。作為近紅外線吸收化合物,可列舉所述本發明的組成物中說明的近紅外線吸收化合物等。
The
以下,列舉實施例來對本發明進行更具體的說明。以下的實施例所示的材料、使用量、比例、處理內容、處理程序等只要不脫離本發明的主旨,則可適宜變更。因而,本發明的範圍並不限定於以下所示的具體例。再者,只要無特別說明,則「%」及「份」為質量基準。以下的結構式中,Me表示甲基,Ph表示苯基。 Hereinafter, examples are given to explain the present invention more specifically. The materials, usage amounts, ratios, processing contents, processing procedures, etc. shown in the following examples can be appropriately changed as long as they do not deviate from the gist of the present invention. Therefore, the scope of the present invention is not limited to the specific examples shown below. In addition, unless otherwise specified, "%" and "parts" are quality standards. In the following structural formulae, Me represents a methyl group and Ph represents a phenyl group.
<酸價的測定方法> <Method of measuring acid value>
使測定樣品溶解於四氫呋喃/水=9/1(質量比)的混合溶媒 中,並使用電位差滴定裝置(商品名:AT-510,京都電子工業(股)製造),於25℃下,藉由0.1mol/L氫氧化鈉水溶液對所獲得的溶液進行中和滴定。將滴定pH曲線的拐點設為滴定終點,並藉由下式來算出酸價。 Dissolve the measurement sample in a mixed solvent of tetrahydrofuran/water=9/1 (mass ratio) In addition, a potentiometric titration device (trade name: AT-510, manufactured by Kyoto Electronics Industry Co., Ltd.) was used to neutralize the obtained solution with a 0.1 mol/L sodium hydroxide aqueous solution at 25°C. The inflection point of the titration pH curve is set as the titration end point, and the acid value is calculated by the following formula.
A=56.11×Vs×0.5×f/w A=56.11×Vs×0.5×f/w
A:酸價(mgKOH/g) A: Acid value (mgKOH/g)
Vs:滴定所需要的0.1mol/L氫氧化鈉水溶液的使用量(mL) Vs: the amount of 0.1mol/L sodium hydroxide aqueous solution needed for titration (mL)
f:0.1mol/L氫氧化鈉水溶液的滴定率 f: The titration rate of 0.1mol/L sodium hydroxide aqueous solution
w:測定樣品的質量(g)(固體成分換算) w: The mass of the sample to be measured (g) (conversion of solid content)
<胺價的測定> <Measurement of Amine Value>
使測定樣品溶解於乙酸中,並使用電位差滴定裝置(商品名:AT-510,京都電子工業(股)製造),於25℃下,藉由0.1mol/L過氯酸/乙酸溶液對所獲得的溶液進行中和滴定。將滴定pH曲線的拐點設為滴定終點,並藉由下式來算出胺價。 Dissolve the measurement sample in acetic acid, and use a potentiometric titration device (trade name: AT-510, manufactured by Kyoto Electronics Co., Ltd.) at 25° C. to obtain the result with a 0.1 mol/L perchloric acid/acetic acid solution pair The solution is neutralized and titrated. The inflection point of the titration pH curve is set as the titration end point, and the amine value is calculated by the following formula.
B=56.11×Vs×0.1×f/w B=56.11×Vs×0.1×f/w
B:胺價(mgKOH/g) B: Amine value (mgKOH/g)
Vs:滴定所需要的0.1mol/L過氯酸/乙酸溶液的使用量(mL) Vs: The usage amount of 0.1mol/L perchloric acid/acetic acid solution required for titration (mL)
f:0.1mol/L過氯酸/乙酸溶液的滴定率 f: The titer of 0.1mol/L perchloric acid/acetic acid solution
w:測定樣品的質量(g)(固體成分換算) w: The mass of the sample to be measured (g) (conversion of solid content)
<重量平均分子量的測定> <Measurement of weight average molecular weight>
關於樹脂的重量平均分子量的測定,使用HPC-8220GPC(東曹(TOSOH)(股)製造)作為測定裝置,使用TSKguardcolumn SuperHZ-L作為保護管柱,且使用將TSKgel SuperHZM-M、TSKgel SuperHZ4000、TSKgel SuperHZ3000、TSKgel SuperHZ2000直接連結而成的管柱作為管柱,將管柱溫度設為40℃,並注入10μL的試樣濃度為0.1質量%的四氫呋喃溶液,以每分鐘0.35mL的流量使作為溶出溶劑的四氫呋喃流動,並使用示差折射率(RI)檢測裝置檢測出試樣峰值,利用使用標準聚苯乙烯而製作的校準曲線來進行計算。 For the measurement of the weight average molecular weight of the resin, HPC-8220GPC (manufactured by TOSOH Co., Ltd.) was used as the measuring device, TSKguardcolumn SuperHZ-L was used as the guard column, and TSKgel SuperHZM-M, TSKgel SuperHZ4000, TSKgel SuperHZ3000 and TSKgel SuperHZ2000 directly connected as the column, set the column temperature to 40℃, and inject 10μL of tetrahydrofuran solution with a sample concentration of 0.1% by mass, and use it as the dissolution solvent at a flow rate of 0.35mL per minute The tetrahydrofuran is flowing, and the sample peak is detected using a differential refractive index (RI) detection device, and the calculation is performed using a calibration curve made using standard polystyrene.
<分散液的製備> <Preparation of dispersion>
(分散液1) (Dispersion 1)
藉由塗料振盪器對7.8質量份的化合物1、1.5質量份的顏料衍生物1、5.6質量份的分散劑1、85質量份的丙二醇單甲醚乙酸酯(Propyleneglycol monomethyl ether acetate,PGMEA)、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液1。 7.8 parts by mass of compound 1, 1.5 parts by mass of pigment derivative 1, 5.6 parts by mass of dispersant 1, 85 parts by mass of propylene glycol monomethyl ether acetate (Propyleneglycol monomethyl ether acetate, PGMEA), And 200 parts by mass of zirconia beads with a diameter of 0.5mm for 30 minutes, and then filtered using DFA4201NXEY (0.45μm nylon filter) manufactured by Pall (Stock), and then oxidized by filtration. The zirconium beads were separated to prepare a dispersion liquid 1.
化合物1:下述化合物 Compound 1: The following compound
[化65]
顏料衍生物1:下述化合物 Pigment Derivative 1: The following compound
分散劑1:下述結構的樹脂(酸價=32.3mgKOH/g、胺價=45.0mgKOH/g、重量平均分子量=21000)。附記於主鏈的數值表示重複單元的莫耳比,附記於側鏈的數值表示重複單元的個數。分散劑1亦為鹼可溶性樹脂。 Dispersant 1: Resin of the following structure (acid value=32.3 mgKOH/g, amine value=45.0 mgKOH/g, weight average molecular weight=21000). The numerical value attached to the main chain represents the molar ratio of the repeating unit, and the numerical value attached to the side chain represents the number of the repeating unit. Dispersant 1 is also an alkali-soluble resin.
[化67]
(分散液2) (Dispersion 2)
藉由塗料振盪器對7.8質量份的化合物2、1.5質量份的顏料衍生物1、5.6質量份的分散劑1、85質量份的丙二醇單甲醚乙酸酯(PGMEA)、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液2。 7.8 parts by mass of compound 2, 1.5 parts by mass of pigment derivative 1, 5.6 parts by mass of dispersant 1, 85 parts by mass of propylene glycol monomethyl ether acetate (PGMEA), and 200 parts by mass of After the zirconia beads with a diameter of 0.5mm were dispersed for 30 minutes, they were filtered using DFA4201NXEY (0.45μm nylon filter) manufactured by Pall Co., Ltd., and then the zirconia beads were separated by filtration. Dispersion 2.
化合物2:下述化合物 Compound 2: The following compound
(分散液3) (Dispersion 3)
藉由塗料振盪器對7.8質量份的化合物3、1.5質量份的顏料衍生物1、5.6質量份的分散劑1、85質量份的丙二醇單甲醚 (PGME)、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液3。 7.8 parts by mass of compound 3, 1.5 parts by mass of pigment derivative 1, 5.6 parts by mass of dispersant 1, and 85 parts by mass of propylene glycol monomethyl ether were applied by a paint shaker (PGME), and 200 parts by mass of zirconia beads with a diameter of 0.5mm for 30 minutes, and then filtered using DFA4201NXEY (0.45μm nylon filter) manufactured by Pall, Japan, and then borrowed The zirconia beads were separated by filtration to prepare dispersion 3.
化合物3:下述化合物 Compound 3: The following compound
(分散液4) (Dispersion 4)
藉由塗料振盪器對7.8質量份的化合物4(IRA884,依西頓(Exiton)公司製造)、5.6質量份的分散劑1、85質量份的PGMEA、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液4。 7.8 parts by mass of compound 4 (IRA884, manufactured by Exiton), 5.6 parts by mass of dispersant 1, 85 parts by mass of PGMEA, and 200 parts by mass of zirconia with a diameter of 0.5 mm After the beads were subjected to a dispersion treatment for 30 minutes, they were filtered using DFA4201NXEY (0.45 μm nylon filter) manufactured by Pall Co., Ltd., and then the zirconia beads were separated by filtration to prepare a dispersion liquid 4.
(分散液5) (Dispersion 5)
藉由塗料振盪器對7.8質量份的化合物5(SDO-C33,有本化學工業(股)製造)、5.6質量份的分散劑1、85質量份的PGMEA、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液5。 7.8 parts by mass of compound 5 (SDO-C33, manufactured by Yumoto Chemical Industry Co., Ltd.), 5.6 parts by mass of dispersant 1, 85 parts by mass of PGMEA, and 200 parts by mass of 0.5mm diameter After the zirconia beads were subjected to a 30-minute dispersion treatment, they were filtered using DFA4201NXEY (0.45 μm nylon filter) manufactured by Pall Co., Ltd., and then the zirconia beads were separated by filtration to prepare a dispersion liquid 5.
(分散液6) (Dispersion 6)
藉由塗料振盪器對7.8質量份的化合物6(SMP-388,林原(股)製造)、5.6質量份的分散劑1、85質量份的PGMEA、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液6。 7.8 parts by mass of compound 6 (SMP-388, manufactured by Hayashibara Co., Ltd.), 5.6 parts by mass of dispersant 1, 85 parts by mass of PGMEA, and 200 parts by mass of zirconia beads with a diameter of 0.5 mm were applied by a paint shaker After performing the dispersion treatment for 30 minutes, filtration was performed using DFA4201NXEY (0.45 μm nylon filter) manufactured by Pall Co., Ltd., and then the zirconia beads were separated by filtration to prepare a dispersion liquid 6.
(分散液7) (Dispersion 7)
藉由塗料振盪器對7.8質量份的化合物7、1.5質量份的顏料衍生物2、5.6質量份的分散劑2、85質量份的丙二醇單甲醚乙酸酯(PGMEA)、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液7。 7.8 parts by mass of compound 7, 1.5 parts by mass of pigment derivative 2, 5.6 parts by mass of dispersant 2, 85 parts by mass of propylene glycol monomethyl ether acetate (PGMEA), and 200 parts by mass of After the zirconia beads with a diameter of 0.5mm were dispersed for 30 minutes, they were filtered using DFA4201NXEY (0.45μm nylon filter) manufactured by Pall Co., Ltd., and then the zirconia beads were separated by filtration. Dispersion 7.
化合物7:下述化合物 Compound 7: The following compound
[化70]
顏料衍生物2:下述化合物 Pigment Derivative 2: The following compound
分散劑2:下述結構的樹脂(酸價=57mgKOH/g、重量平均分子量=33000)。附記於主鏈的數值表示重複單元的莫耳比,附記於側鏈的數值表示重複單元的個數。分散劑2亦為鹼可溶性樹脂。 Dispersant 2: Resin of the following structure (acid value=57mgKOH/g, weight average molecular weight=33000). The numerical value attached to the main chain represents the molar ratio of the repeating unit, and the numerical value attached to the side chain represents the number of the repeating unit. Dispersant 2 is also an alkali-soluble resin.
[化72]
(分散液8) (Dispersion 8)
將YMS-01A-2(住友金屬礦山(股)製造,鎢微粒子的分散物)用作分散液8。 YMS-01A-2 (manufactured by Sumitomo Metal Mining Co., Ltd., dispersion of tungsten fine particles) was used as the dispersion liquid 8.
(分散液9) (Dispersion 9)
藉由塗料振盪器對7.8質量份的化合物9(IRG-068,日本化藥(股)製造)、5.6質量份的分散劑1、85質量份的PGMEA、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液9。 7.8 parts by mass of compound 9 (IRG-068, manufactured by Nippon Kayaku Co., Ltd.), 5.6 parts by mass of dispersant 1, 85 parts by mass of PGMEA, and 200 parts by mass of 0.5 mm in diameter were oxidized by a paint shaker After the zirconium beads were subjected to a 30-minute dispersion treatment, they were filtered using DFA4201NXEY (0.45 μm nylon filter) manufactured by Pall Co., Ltd., and then the zirconium oxide beads were separated by filtration to prepare dispersion 9.
(分散液10) (Dispersion 10)
藉由塗料振盪器對7.8質量份的化合物10(IRA868,依西頓(Exiton)公司製造)、5.6質量份的分散劑1、85質量份的PGMEA、以及200質量份的直徑0.5mm的氧化鋯珠進行30分鐘的分散處理後,使用日本頗爾(Pall)(股)製造的DFA4201NXEY(0.45μm的尼龍過濾器)進行過濾,繼而藉由過濾將氧化鋯珠分離來製備分散液10。 7.8 parts by mass of compound 10 (IRA868, manufactured by Exiton), 5.6 parts by mass of dispersant 1, 85 parts by mass of PGMEA, and 200 parts by mass of zirconia with a diameter of 0.5 mm After the beads were subjected to a dispersion treatment for 30 minutes, they were filtered using DFA4201NXEY (0.45 μm nylon filter) manufactured by Pall Co., Ltd., and then the zirconia beads were separated by filtration to prepare a dispersion liquid 10.
<感放射線性組成物的製備> <Preparation of Radiation Sensitive Composition>
於以下述所示的比例(質量份)將下述表中所示的材料混合及攪拌後,利用孔徑0.45μm的尼龍製過濾器(日本頗爾(Pall)(股)製造,DFA4201NXEY)進行過濾來製備感放射線性組成物。再者,以下的表中,M/B比為自由基聚合性化合物與具有酸基的樹脂的質量比(自由基聚合性化合物/具有酸基的樹脂)。 After mixing and stirring the materials shown in the following table in the proportions (parts by mass) shown below, they were filtered with a nylon filter with a pore size of 0.45 μm (manufactured by Pall Co., Ltd., DFA4201NXEY) To prepare a radiation-sensitive composition. In addition, in the following tables, the M/B ratio is the mass ratio of the radical polymerizable compound to the resin having an acid group (radical polymerizable compound/resin having an acid group).
[表1]
所述表中所示的材料如下所述。 The materials shown in the table are as follows.
(自由基聚合性化合物) (Radical polymerizable compound)
M-510:阿羅尼斯(Aronix)M-510(東亞合成(股)製造,多元酸改質丙烯酸寡聚物) M-510: Aronix M-510 (manufactured by Toagosei Co., Ltd., polyacid modified acrylic oligomer)
M-305:阿羅尼斯(Aronix)M-305(東亞合成(股)製造,季戊四醇三丙烯酸酯與季戊四醇四丙烯酸酯的混合物,含有55質量%~63質量%的季戊四醇三丙烯酸酯) M-305: Aronix M-305 (manufactured by Toagosei Co., Ltd., a mixture of pentaerythritol triacrylate and pentaerythritol tetraacrylate, containing 55 mass% to 63 mass% of pentaerythritol triacrylate)
(鹼可溶性樹脂) (Alkali-soluble resin)
樹脂A:下述結構的樹脂(酸價=101mgKOH/g、重量平均分子量=38900)。附記於主鏈的數值表示重複單元的質量比,附記於側鏈的數值表示重複單元的個數。 Resin A: A resin having the following structure (acid value = 101 mgKOH/g, weight average molecular weight = 38900). The numerical value attached to the main chain represents the mass ratio of the repeating unit, and the numerical value attached to the side chain represents the number of the repeating unit.
樹脂B:壓克力庫亞(Acrycure)RD-F8(日本觸媒(股)製造) Resin B: Acrycure RD-F8 (manufactured by Nippon Shokubai Co., Ltd.)
(光自由基聚合起始劑) (Photo-radical polymerization initiator)
C-1:豔佳固(IRGACURE)OXE02(巴斯夫(BASF)公司製造) C-1: IRGACURE OXE02 (manufactured by BASF)
C-2:豔佳固(IRGACURE)369(巴斯夫(BASF)公司製造) C-2: IRGACURE 369 (manufactured by BASF)
C-3:下述化合物 C-3: The following compounds
C-4:B-CIM(保土谷化學工業(股)製造,2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑) C-4: B-CIM (manufactured by Hodogaya Chemical Industry Co., Ltd.), 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'- Biimidazole)
C-5:豔佳固(IRGACURE)OXE01(巴斯夫(BASF)公司製造) C-5: IRGACURE OXE01 (manufactured by BASF)
(紫外線吸收劑) (Ultraviolet absorber)
D-1:下述化合物 D-1: The following compounds
D-2:下述化合物 D-2: The following compound
[化76]
D-3:尤比娜璐(Uvinul)A(巴斯夫(BASF)公司製造) D-3: Uvinul A (manufactured by BASF)
(鏈轉移劑) (Chain transfer agent)
E-1:下述化合物 E-1: The following compounds
E-2:桑塞拉(sanceler)M(三新化學工業(股)製造,2-巰基苯并噻唑) E-2: Sanceler M (manufactured by Sanxin Chemical Industry Co., Ltd., 2-mercaptobenzothiazole)
E-3:卡蘭茨(Karenz)MT BD1(昭和電工(股)製造,1,4-雙(3-巰基丁醯氧基)丁烷) E-3: Karenz MT BD1 (manufactured by Showa Denko Co., Ltd., 1,4-bis(3-mercaptobutoxy)butane)
(界面活性劑) (Surfactant)
F-1:下述混合物(重量平均分子量=14000,表示重複單元的比例的%為質量%) F-1: The following mixture (weight average molecular weight = 14000, the% representing the proportion of repeating units is mass %)
[化78]
(聚合抑制劑) (Polymerization inhibitor)
G-1:對甲氧基苯酚 G-1: p-Methoxyphenol
(溶劑) (Solvent)
PGMEA:丙二醇單甲醚乙酸酯 PGMEA: Propylene Glycol Monomethyl Ether Acetate
PGME:丙二醇單甲醚 PGME: Propylene Glycol Monomethyl Ether
BDGAC:二乙二醇單丁醚乙酸酯 BDGAC: Diethylene glycol monobutyl ether acetate
<評價> <evaluation>
(矩形性) (Rectangularity)
利用旋塗法,將各感放射線性組成物以塗佈後的膜厚成為0.7μm的方式塗佈於附底塗層的矽晶圓上,之後於加熱板上以100℃進行2分鐘加熱,而獲得感放射線性組成物層。 Using the spin coating method, each radiation-sensitive composition was coated on a silicon wafer with a primer layer so that the film thickness after coating became 0.7μm, and then heated on a hot plate at 100°C for 2 minutes. And a radiation-sensitive composition layer is obtained.
繼而,使用i射線步進式曝光裝置FPA-3000i5+(佳能(Canon)(股)製造),介隔具有1.1μm見方的拜耳圖案的遮罩,對所獲得的感放射線性組成物層進行曝光(曝光量是選擇線寬成為1.1μm的最佳曝光量)。 Then, using an i-ray stepping exposure device FPA-3000i5+ (manufactured by Canon (Canon) Co., Ltd.), the obtained radiation-sensitive composition layer was exposed through a mask with a 1.1 μm square Bayer pattern ( The amount of exposure is the optimal amount of exposure that selects the line width to be 1.1μm).
繼而,使用氫氧化四甲基銨(Tetramethylammonium hydroxide,TMAH)0.3質量%水溶液,於23℃下對曝光後的感放 射線性組成物層進行60秒鐘覆液式顯影。之後,藉由旋轉噴淋來進行淋洗,進而藉由純水進行水洗而獲得圖案。 Then, tetramethylammonium hydroxide (Tetramethylammonium hydroxide, TMAH) 0.3% by mass aqueous solution was used, and the sensitivity after exposure was measured at 23°C. The radioactive composition layer was developed in a liquid-in-coup mode for 60 seconds. After that, rinsing is performed by rotating spray, and then a pattern is obtained by washing with pure water.
利用掃描式電子顯微鏡(Scanning electron microscope,SEM)來觀察(倍率25000倍)圖案部的剖面(畫素側壁)並評價矩形性。將結果示於下述表中。 A scanning electron microscope (Scanning Electron Microscope, SEM) was used to observe (magnification: 25000 times) the cross section (pixel side wall) of the pattern portion and evaluate the rectangularity. The results are shown in the following table.
4:畫素側壁的角度為85°以上且未滿95° 4: The angle of the side wall of the pixel is 85° or more and less than 95°
3:畫素側壁的角度為80°以上且未滿85°、或者為95°以上且未滿100° 3: The angle of the pixel side wall is 80° or more and less than 85°, or 95° or more and less than 100°
2:畫素側壁的角度為70°以上且未滿80°、或者為100°以上且未滿110° 2: The angle of the side wall of the pixel is 70° or more and less than 80°, or 100° or more and less than 110°
1:畫素側壁的角度未滿70°、或者為110°以上 1: The angle of the side wall of the pixel is less than 70°, or 110° or more
<殘渣殘留> <Remaining residue>
利用旋塗法,將各感放射線性組成物以塗佈後的膜厚成為0.7μm的方式塗佈於附底塗層的矽晶圓上,之後於加熱板上以100℃進行2分鐘加熱,而獲得感放射線性組成物層。 Using the spin coating method, each radiation-sensitive composition was coated on a silicon wafer with a primer layer so that the film thickness after coating became 0.7μm, and then heated on a hot plate at 100°C for 2 minutes. And a radiation-sensitive composition layer is obtained.
繼而,使用i射線步進式曝光裝置FPA-3000i5+(佳能(Canon)(股)製造),介隔遮罩以1.1μm見方的拜耳圖案對所獲得的感放射線性組成物層進行曝光(曝光量是選擇線寬成為1.1μm的最佳曝光量)。 Then, using the i-ray stepping exposure device FPA-3000i5+ (manufactured by Canon (Canon) Co., Ltd.), the obtained radiation-sensitive composition layer was exposed with a 1.1μm square Bayer pattern (exposure amount). It is to select the optimal exposure amount for the line width to be 1.1μm).
繼而,使用氫氧化四甲基銨(TMAH)0.3質量%水溶液,於23℃下對曝光後的感放射線性組成物層進行60秒鐘覆液式顯影。之後,藉由旋轉噴淋來進行淋洗,進而藉由純水進行水洗而獲得 圖案。 Then, using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH), the exposed radiation-sensitive composition layer was subjected to liquid-over development at 23° C. for 60 seconds. Afterwards, it is rinsed by rotating spray, and then rinsed by pure water to obtain pattern.
藉由圖像的二值化處理來對殘留於所獲得的圖案的基底上的殘渣的量進行評價。將結果示於下述表中。 The amount of residue remaining on the base of the obtained pattern was evaluated by the binarization process of the image. The results are shown in the following table.
3:殘渣的量未滿基底總面積的1% 3: The amount of residue is less than 1% of the total area of the substrate
2:殘渣的量為基底總面積的1%~3% 2: The amount of residue is 1%~3% of the total area of the substrate
1:殘渣的量超過基底總面積的3% 1: The amount of residue exceeds 3% of the total area of the substrate
(分光特性) (Spectroscopic characteristics)
利用旋塗法,將所述獲得的實施例及比較例的各感放射線性組成物以塗佈後的膜厚成為0.7μm的方式塗佈於玻璃晶圓上,之後於加熱板上以100℃進行2分鐘加熱。其次,使用i射線步進式曝光裝置FPA-3000i5+(佳能(Canon)(股)製造),以1000mJ/cm2進行曝光。進而,於加熱板上以220℃進行5分鐘加熱而形成感放射線性組成物層。對於形成有感放射線性組成物層的基板,使用分光光度計U-4100(日立先端科技(Hitachi High-Technologies)(股)製造),求出最大吸收波長、最大吸收波長下的吸光度Amax、波長550nm下的吸光度A550,並算出最大吸收波長下的吸光度Amax與波長550nm下的吸光度A550的比(吸光度Amax/吸光度A550)。 Using the spin coating method, each radiation-sensitive composition of the obtained Examples and Comparative Examples was coated on a glass wafer so that the film thickness after coating became 0.7μm, and then it was heated at 100°C on a hot plate. Heat for 2 minutes. Next, an i-ray stepper exposure device FPA-3000i5+ (manufactured by Canon Co., Ltd.) was used to perform exposure at 1000 mJ/cm 2. Furthermore, it heated at 220 degreeC for 5 minutes on a hotplate, and formed the radiation-sensitive composition layer. For the substrate on which the radiation-sensitive composition layer is formed, a spectrophotometer U-4100 (manufactured by Hitachi High-Technologies) is used to obtain the maximum absorption wavelength, the absorbance Amax and the wavelength at the maximum absorption wavelength The absorbance A550 at 550 nm, and the ratio of the absorbance Amax at the maximum absorption wavelength to the absorbance A550 at the wavelength 550 nm (absorbance Amax/absorbance A550) was calculated.
5:吸光度Amax/吸光度A550比為100~500,並且最大吸收波長為700nm以上且1000nm以下 5: The ratio of absorbance Amax/absorbance A550 is 100~500, and the maximum absorption wavelength is 700nm or more and 1000nm or less
4:吸光度Amax/吸光度A550比為50以上且未滿100,並且最大吸收波長為700nm以上且1000nm以下 4: The ratio of absorbance Amax/absorbance A550 is 50 or more and less than 100, and the maximum absorption wavelength is 700 nm or more and 1000 nm or less
3:吸光度Amax/吸光度A550比為20以上且未滿50,並且最大吸收波長為700nm以上且1000nm以下 3: Absorbance Amax/Absorbance A550 ratio is 20 or more and less than 50, and the maximum absorption wavelength is 700nm or more and 1000nm or less
2:吸光度Amax/吸光度A550比未滿20,並且最大吸收波長為700nm以上且1000nm以下 2: The ratio of absorbance Amax/absorbance A550 is less than 20, and the maximum absorption wavelength is 700nm or more and 1000nm or less
1:吸光度Amax/吸光度A550比未滿20,並且最大吸收波長未滿700nm或超過1000nm 1: The ratio of absorbance Amax/absorbance A550 is less than 20, and the maximum absorption wavelength is less than 700nm or more than 1000nm
如所述表所示,實施例的分光特性及矩形性優異,可形成紅外線遮蔽性良好且矩形性優異的圖案。進而亦可抑制殘渣殘留。另外,將使用實施例的感放射線性組成物的硬化膜組入至固體攝像元件中,結果紅外線遮蔽性高,圖像的視認性優異。 As shown in the table, the examples have excellent spectral characteristics and rectangularity, and can form a pattern with good infrared shielding properties and excellent rectangularity. Furthermore, residue residue can be suppressed. In addition, when the cured film using the radiation-sensitive composition of the example was incorporated into the solid-state imaging device, the infrared shielding property was high, and the visibility of the image was excellent.
相對於此,比較例的矩形性及分光特性的至少一者差。 In contrast, the comparative example is inferior in at least one of rectangularity and spectral characteristics.
(實施例101) (Example 101)
利用旋塗法,將實施例1的感放射線性組成物以塗佈後的膜厚成為0.7μm的方式塗佈於附底塗層的矽晶圓上,之後於加熱板上以100℃進行2分鐘加熱,而獲得感放射線性組成物層。 Using the spin coating method, the radiation sensitive composition of Example 1 was coated on a silicon wafer with an undercoating layer so that the film thickness after coating became 0.7 μm, and then it was applied on a hot plate at 100°C for 2 Minute heating to obtain a radiation-sensitive composition layer.
繼而,使用i射線步進式曝光裝置FPA-3000i5+(佳能(Canon)(股)製造),介隔具有1.1μm見方的拜耳圖案的遮罩,對所獲得的感放射線性組成物層進行曝光(曝光量是選擇線寬成為1.1μm的最佳曝光量)。 Then, using an i-ray stepping exposure device FPA-3000i5+ (manufactured by Canon (Canon) Co., Ltd.), the obtained radiation-sensitive composition layer was exposed through a mask with a 1.1 μm square Bayer pattern ( The amount of exposure is the optimal amount of exposure that selects the line width to be 1.1μm).
繼而,使用氫氧化四甲基銨(TMAH)0.3質量%水溶液,於23℃下對曝光後的感放射線性組成物層進行60秒鐘覆液式顯影。之後,藉由旋轉噴淋來進行淋洗,並藉由純水進行水洗,於加熱板上以220℃進行5分鐘加熱而獲得圖案。 Then, using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH), the exposed radiation-sensitive composition layer was subjected to liquid-over development at 23° C. for 60 seconds. After that, rinsing was performed by rotating spray, and washed with pure water, and heated at 220° C. for 5 minutes on a hot plate to obtain a pattern.
(實施例102) (Example 102)
利用旋塗法,將實施例1的感放射線性組成物以塗佈後的膜厚成為0.7μm的方式塗佈於附底塗層的矽晶圓上,之後於加熱板上以100℃進行2分鐘加熱,而獲得感放射線性組成物層。 Using the spin coating method, the radiation sensitive composition of Example 1 was coated on a silicon wafer with an undercoating layer so that the film thickness after coating became 0.7 μm, and then it was applied on a hot plate at 100°C for 2 Minute heating to obtain a radiation-sensitive composition layer.
繼而,使用i射線步進式曝光裝置FPA-3000i5+(佳能(Canon) (股)製造),介隔具有1.1μm見方的拜耳圖案的遮罩,對所獲得的感放射線性組成物層進行曝光(曝光量是選擇線寬成為1.1μm的最佳曝光量)。 Then, I used the i-ray stepper exposure device FPA-3000i5+ (Canon) (Stock) Manufacturing), the obtained radiation-sensitive composition layer is exposed through a mask having a Bayer pattern of 1.1 μm square (the exposure amount is the optimal exposure amount that selects the line width to be 1.1 μm).
繼而,使用氫氧化四甲基銨(TMAH)0.3質量%水溶液,於23℃下對曝光後的感放射線性組成物層進行60秒鐘覆液式顯影。之後,藉由旋轉噴淋來進行淋洗,並藉由純水進行水洗。進而,使用i射線步進式曝光裝置FPA-3000i5+(佳能(Canon)(股)製造),以1000mJ/cm2進行全面曝光,然後於加熱板上以220℃進行5分鐘加熱而獲得圖案。 Then, using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH), the exposed radiation-sensitive composition layer was developed for 60 seconds at 23°C. After that, the rinsing is carried out by rotating spray, and the washing is carried out with pure water. Furthermore, an i-ray stepping exposure device FPA-3000i5+ (manufactured by Canon Co., Ltd.) was used to perform full-surface exposure at 1000 mJ/cm 2 , and then heated on a hot plate at 220° C. for 5 minutes to obtain a pattern.
實施例101與實施例102中可形成紅外線遮蔽性及矩形性優異的圖案。另外,實施例101與實施例102中,利用掃描式電子顯微鏡(SEM)來觀察(倍率25000倍)圖案部的剖面(畫素側壁),結果相較於實施例101而實施例102的矩形性良好。 In Example 101 and Example 102, patterns with excellent infrared shielding properties and rectangularity can be formed. In addition, in Example 101 and Example 102, a scanning electron microscope (SEM) was used to observe the cross section (pixel side wall) of the pattern part (magnification 25000). The result was that the rectangularity of Example 102 was compared with Example 101. good.
110:固體攝像元件 110: solid-state image sensor
111:近紅外線截止濾波器 111: Near infrared cut filter
112:彩色濾波器 112: Color filter
114:紅外線透過濾波器 114: Infrared transmission filter
115:微透鏡 115: Micro lens
116:平坦化層 116: Planarization layer
hν:入射光 hν: incident light
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