TWI610475B - Micro-generator and producing method thereof - Google Patents

Abstract

The invention relates to a micro-electromechanical power generation element and a manufacturing method thereof. A plurality of parallel lower wires, at least one connection wire and an insulating layer are formed on a substrate, a bank structure is formed on the lower wire, and a bank wall structure is formed in the center of the bank wall structure. A accommodating space is used to form a sacrificial layer and a magnetic element, and a rotor element is formed after the sacrificial layer is removed, and a perforation is formed on the embankment wall structure, and a wire is formed in the perforation to connect with the lower wire on the substrate, and then to the embankment. An upper wire is formed on the top of the wall structure, so that the upper and lower wires and the connecting wire form a group of windings, and a cover is covered; when the rotor element moves or rotates, changes in the windings of the magnetic field through the group can be caused. The power generation effect is achieved, so that the micro-electro-mechanical chip can realize the power generation element, reducing the occupied volume and weight.

Description

Micro-electromechanical power generation element and manufacturing method thereof

The invention relates to a micro-electro-mechanical component and a manufacturing method thereof, and more particularly to a micro-electro-mechanical power generation component and a manufacturing method thereof.

As environmental protection consciousness has been gradually valued, green energy electronic products have gradually become a mainstream of industrial and technological development. Among them, bicycle lights, such as inductive power generation, utilize wheel frame rotation to generate electricity, or such as those worn on the body during night running. Night running warning lights, which use the vibration caused by the runner's body to generate electricity, are all green energy electronics products that are now combined with green energy electronics and the sporting goods industry.

The technology of power generation components is very important for green energy electronic products. At present, most power generation components are composed of magnets and metal coils, which occupy a considerable proportion of product volume and weight. Therefore, for sports products that require downsizing and weight reduction It is not a small burden, so if there are miniaturized power generation components, it will help the development of various green energy electronic products.

In view of the shortcomings of the existing power generating elements occupying large volume and high weight, which are not conducive to lightweight green energy electronic product design, the present invention provides a micro-electromechanical power generating element and a manufacturing method thereof.

The technical means adopted to achieve the above purpose is to make the MEMS power generation element include: a substrate; a bank structure is formed on the substrate, and an accommodation space is formed in the center; A rotor element contains magnetic material and is movably disposed in an accommodation space in the center of the embankment wall structure; a set of windings is formed on the periphery of the embankment wall structure corresponding to the rotor element and is at least partially covered in Inside the embankment structure; a cover plate is arranged on the embankment structure.

The above micro-electro-mechanical power generation element is packaged as a micro-electro-mechanical element (MEMS). When there is a change in the external magnetic field or a shock, it will cause the internal rotor element to move or rotate, causing changes in the magnetic lines of force passing through the winding, and then winding. The inductive current is generated to achieve the purpose of power generation, and the present invention uses micro-electromechanical elements to realize power generation elements, which can greatly reduce the volume and weight, and help reduce and reduce the technology trend of technology.

To achieve the above purpose, the method for manufacturing a micro-electromechanical power generation element includes: providing a substrate; forming two sets of side-by-side lower wires and a connecting wire on the substrate, and the two sets of lower wires are separated by a distance, and the The connecting wire connects two lower wires of the two lower wires; an insulating layer, a sacrificial layer, and a rotor element are formed at the interval between the two lower wires, and the rotor element includes a magnetic substance and is covered by the sacrificial layer. Inside; forming a bank structure around the sacrificial layer to cover the two groups of lower wires, and forming a plurality of corresponding wire perforations corresponding to the two groups of lower wires on the bank structure, and removing the sacrificial layer; A wire is formed in the wire perforation, and a plurality of upper wires are formed on the top of the embankment structure to connect a part of the wires in the perforation, so that the upper wire, the lower wire and the wire in the embankment structure form a group of winding resistances; on the top of the embankment structure Cover a cover.

According to the above manufacturing method, the micro-electromechanical power generation element of the present invention can be manufactured, and the rotor element can be rotated or moved in the center of the dyke wall structure, so as to achieve the purpose of realizing the generator structure by the micro-electromechanical.

10‧‧‧ substrate

20‧‧‧ lower wire

21、21’‧‧‧Connecting wires

22‧‧‧Wire

23, 23’‧‧‧ on the wire

30‧‧‧ Insulation

40‧‧‧ sacrificial layer

41‧‧‧First sacrificial layer

42‧‧‧Second Sacrifice Layer

50‧‧‧rotor element

51‧‧‧Rotor element seat

60‧‧‧wall structure

61‧‧‧Wire perforation

70‧‧‧ cover

FIG. 1 is a flowchart of steps of the manufacturing method of the present invention.

FIG. 2 to FIG. 7 are state diagrams of the processes in FIG. 1.

FIG. 8 is a schematic diagram of a finished product of the present invention.

FIG. 9a is a partial schematic diagram of a preferred embodiment of the present invention.

FIG. 9b is a partial schematic diagram of another preferred embodiment of the present invention.

In order to understand the technical features and practical effects of the present invention in detail, and can be implemented in accordance with the contents of the description, the preferred embodiment shown in the drawings is further described in detail as follows.

Please refer to FIG. 1 and FIG. 2. The method for manufacturing a micro-electromechanical power generation element according to the present invention includes: providing a substrate 10; further referring to FIGS. 3 a and 3 b, forming two sets of parallel lower wires 20 and at least one connection on the substrate 10 Conductor 21, the two sets of lower conductors 20 are spaced a distance apart, and two of the lower conductors 20 are connected by the connecting conductor 21; as shown in FIGS. 4a and 4b, an insulating layer 30 is formed at the interval between the two sets of lower conductors 20, As shown in FIG. 5, a sacrificial layer 40 and a rotor element 50 are formed. The rotor element 50 includes a magnetic substance and is enclosed in the sacrificial layer 40. In this embodiment, a first The sacrificial layer 41 forms the rotor element 50 on the first sacrificial layer 41, and forms a second sacrificial layer 42 on the rotor element 50 to cover the rotor element 50 and the first sacrificial layer 41 to form the insulating layer 30. The purpose is to maintain electrical insulation between the connecting wires 21 on the substrate 10 and the rotor element 50. Therefore, in this embodiment, the insulating layer 30 covers at least two connecting wires 21 between the two lower wires 20, or As shown in Figure 4c, the two sets of lower wires 20 and the connection are fully covered Line 21; Further, as shown in FIGS. 6 a, 6 b and 7, a bank structure 60 is formed around the sacrificial layer 40 to cover the two groups of lower wires 20, and the bank structure 60 corresponds to the two groups of lower wires 20 to form a plurality of correspondences. And the sacrificial layer 40 are removed. In this embodiment, the plurality of wire perforations 61 may be formed by a lithographic etching process. At this time, the sacrificial layer 40 may be removed together during the etching step, or a laser may be used. The plurality of wire perforations 61 are formed by perforation, and the sacrificial layer 40 is removed by an etching solution. As shown in FIG. 7, a wire 22 is formed in the wire perforation 61 of the bank structure 60, and a plurality of upper wires are formed on the top of the bank structure 60. 23, the connecting part of the conducting wire 22 in the conducting wire perforation 61, so that the upper conducting wire 23, the lower conducting wire 20 and the conducting wire 22 in the bank structure 60 form a group of winding resistances; as shown in FIG. A cover plate 70 is used to encapsulate the rotor element 50 in the bank structure 60.

As shown in FIG. 5, in the above manufacturing method, the steps of forming the first and second sacrificial layers 41 and 42 and the rotor element 50 can further form a groove in the first sacrificial layer 41 and inside the groove. The rotor element holder 51 is formed. In this way, when the first and second sacrificial layers 41 and 42 are removed, the rotor element holder 51 can be further provided at the bottom of the rotor element 50, so that the rotor element 50 can be more easily moved and rotated. A further rotor element holder 51 is further formed on the top surface of the rotor element 50.

Because the above-mentioned wires must form a plurality of turns in the same direction (clockwise or counterclockwise), the wiring method can be as shown in Figures 9a and 9b, where Figure 9a shows one of the winding configuration methods, which is tied to the bank An oblique upper wire 23 is formed on the top of the wall structure 60, so that the whole constitutes a group of windings in a clockwise direction, or a lower wire 20 may be formed obliquely on the substrate 10, forming a vertical direction on the top of the embankment structure 60. The upper wires 23 in parallel form a winding structure reversed from the top and bottom of FIG. 9a. The winding shown in FIG. 9b is matched with one upper wire 23 'or connecting wire 21' for every three wires, so that the whole constitutes a plurality of turns clockwise. A set of windings.

The micro-electro-mechanical power generation element manufactured by the above-mentioned micro-electro-mechanical power generation element manufacturing method includes: a substrate 10; A bank structure 60 is formed on the substrate 10 and a receiving space is formed in the center. A rotor element 50 is a magnetic substance and is movably disposed in the receiving space in the center of the bank structure 60. In this embodiment, a rotor element holder 51 is formed at the bottom and top of the rotor element 50; a set of windings is formed on the periphery of the bank structure 60 corresponding to the rotor element 50, and at least partially covers the bank structure 60, in the present embodiment, the set of windings includes a plurality of lower wires 20 formed on the substrate 10, a connection wire 21 formed on the substrate 10, and a plurality of wires 22 formed in the bank structure 60. And a plurality of upper wires 23 formed on the top of the bank structure 60; a cover plate 70 is arranged on the bank structure 60.

Since the above-mentioned rotor element 50 is packaged in the center of the bank structure 60, when the entire micro-electro-mechanical chip is shaken, the rotor element 50 moves in the accommodation space of the bank structure 60, so that the magnetic field lines passing through the winding can be made. A change is generated, and an induced current is generated on the winding to achieve the purpose of generating electricity.

Or when the magnetic field outside the micro-electro-mechanical chip changes and causes the rotor element to rotate, the magnetic field lines passing through the winding can also be changed to generate induced current to achieve the purpose of generating electricity.

In summary, the present invention uses micro-electro-mechanical chips to realize the production of power generation elements, which can greatly reduce the volume and weight occupied by power generation elements, achieve the purpose of reduction and weight reduction, and help green energy electronic products to reduce size and weight. Technology trends.

The above description is only the preferred embodiments of the present invention, and is not intended to limit the scope of the rights claimed by the present invention. Any other equivalent changes or modifications made without departing from the spirit disclosed by the present invention should be included in the present invention. Within the scope of patent application.

Claims (7)

A micro-electro-mechanical power generation element includes: a substrate; a bank structure formed on the substrate and an accommodation space formed in the center; a rotor element including a magnetic substance and movably disposed on the bank In the accommodation space in the center of the structure; a set of windings is formed on the periphery of the embankment structure corresponding to the rotor element and is at least partially covered in the embankment structure; a cover plate is arranged on the embankment structure A rotor element holder is formed at the bottom and top of the rotor element; and the set of windings includes a plurality of lower conductors formed on the substrate, a connection conductor formed on the substrate, and a plurality of the conductors are formed on the bank The wires in the structure and a plurality of upper wires formed on the top of the bank structure. A method for manufacturing a micro-electromechanical power generation element, comprising: providing a substrate; forming two sets of juxtaposed lower wires and a connecting wire on the substrate, the two sets of lower wires being separated by a distance, and connecting the two with the connecting wire Two of the lower wires in the group; an insulating layer, a sacrificial layer, and a rotor element are formed at the interval between the two groups of lower wires; the rotor element contains a magnetic substance and is enclosed in the sacrificial layer; A bank structure is formed around the layer to cover the two groups of lower wires, and a plurality of corresponding wire holes are formed on the bank structure corresponding to the two groups of lower wires, and the sacrificial layer is removed; and a wire is formed in the wire holes of the bank structure A plurality of upper wires are formed on the top of the embankment structure to connect a part of the wires in the perforation, so that the upper wire, the lower wire and the wires in the embankment structure form a group of winding resistances; a cover is placed on the top of the embankment structure . The method for manufacturing a micro-electro-mechanical power generation element according to claim 2, wherein the step of forming the sacrificial layer and the rotor element comprises first forming a first sacrificial layer, forming the rotor element on the first sacrificial layer, and forming the rotor element on the rotor element. A second sacrificial layer is formed on the rotor element and the first sacrificial layer. According to the method for manufacturing a micro-electromechanical power generation element according to claim 3, a groove is further formed in the first sacrificial layer, and a rotor element holder is formed in the groove, so that the rotor element holder is provided at the bottom of the rotor element. According to the method for manufacturing a micro-electromechanical power generation element described in claim 4, a groove is further formed in the second sacrificial layer, and another rotor element holder is formed in the groove, so that the rotor element holder is provided on the top of the rotor element. According to the manufacturing method of the micro-electro-mechanical power generation device described in claim 2, the plurality of wire perforations are formed by a lithographic etching process, and the sacrificial layer can be removed during the etching step. According to the manufacturing method of the micro-electro-mechanical power generation element described in claim 2, the plurality of wire perforations are formed by laser perforation, and the sacrificial layer is removed by an etching solution.