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TWI562336B - Semiconductor structure and method for manufacturing the same - Google Patents

Semiconductor structure and method for manufacturing the same

Info

Publication number
TWI562336B
TWI562336B TW104128847A TW104128847A TWI562336B TW I562336 B TWI562336 B TW I562336B TW 104128847 A TW104128847 A TW 104128847A TW 104128847 A TW104128847 A TW 104128847A TW I562336 B TWI562336 B TW I562336B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
semiconductor structure
semiconductor
Prior art date
Application number
TW104128847A
Other languages
English (en)
Other versions
TW201711167A (zh
Inventor
Erh-Kun Lai
Feng-Min Lee
Yu-Yu Lin
Dai-Ying Lee
Original Assignee
Macronix Int Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macronix Int Co Ltd filed Critical Macronix Int Co Ltd
Priority to TW104128847A priority Critical patent/TWI562336B/zh
Application granted granted Critical
Publication of TWI562336B publication Critical patent/TWI562336B/zh
Publication of TW201711167A publication Critical patent/TW201711167A/zh

Links

TW104128847A 2015-09-01 2015-09-01 Semiconductor structure and method for manufacturing the same TWI562336B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104128847A TWI562336B (en) 2015-09-01 2015-09-01 Semiconductor structure and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104128847A TWI562336B (en) 2015-09-01 2015-09-01 Semiconductor structure and method for manufacturing the same

Publications (2)

Publication Number Publication Date
TWI562336B true TWI562336B (en) 2016-12-11
TW201711167A TW201711167A (zh) 2017-03-16

Family

ID=58227346

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104128847A TWI562336B (en) 2015-09-01 2015-09-01 Semiconductor structure and method for manufacturing the same

Country Status (1)

Country Link
TW (1) TWI562336B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI642143B (zh) * 2017-06-13 2018-11-21 旺宏電子股份有限公司 電阻式隨機存取記憶體裝置及其製造方法
US10115769B1 (en) 2017-06-13 2018-10-30 Macronix International Co., Ltd. Resistive random access memory device and method for manufacturing the same
CN109148681A (zh) * 2017-06-16 2019-01-04 旺宏电子股份有限公司 电阻式随机存取存储器及其制造方法
TWI707449B (zh) * 2019-09-02 2020-10-11 華邦電子股份有限公司 可變電阻式記憶體及其製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201040963A (en) * 2009-05-15 2010-11-16 Macronix Int Co Ltd One-transistor, one resistor, one capacitor phase change memory
TW201411814A (zh) * 2012-09-14 2014-03-16 Ind Tech Res Inst 電阻式記憶胞、電阻式記憶陣列及其形成方法
TW201436193A (zh) * 2013-03-12 2014-09-16 Macronix Int Co Ltd 層間導體結構及其製造方法
TW201521094A (zh) * 2013-11-22 2015-06-01 Taiwan Semiconductor Mfg Co Ltd 積體電路裝置及其製造方法
TW201528346A (zh) * 2014-01-09 2015-07-16 Macronix Int Co Ltd 半導體元件及其製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201040963A (en) * 2009-05-15 2010-11-16 Macronix Int Co Ltd One-transistor, one resistor, one capacitor phase change memory
TW201411814A (zh) * 2012-09-14 2014-03-16 Ind Tech Res Inst 電阻式記憶胞、電阻式記憶陣列及其形成方法
TW201436193A (zh) * 2013-03-12 2014-09-16 Macronix Int Co Ltd 層間導體結構及其製造方法
TW201521094A (zh) * 2013-11-22 2015-06-01 Taiwan Semiconductor Mfg Co Ltd 積體電路裝置及其製造方法
TW201528346A (zh) * 2014-01-09 2015-07-16 Macronix Int Co Ltd 半導體元件及其製造方法

Also Published As

Publication number Publication date
TW201711167A (zh) 2017-03-16

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