[go: up one dir, main page]

TWI456242B - 放射線檢測器 - Google Patents

放射線檢測器 Download PDF

Info

Publication number
TWI456242B
TWI456242B TW101103271A TW101103271A TWI456242B TW I456242 B TWI456242 B TW I456242B TW 101103271 A TW101103271 A TW 101103271A TW 101103271 A TW101103271 A TW 101103271A TW I456242 B TWI456242 B TW I456242B
Authority
TW
Taiwan
Prior art keywords
layer
radiation detector
organic resin
fluorescent light
active area
Prior art date
Application number
TW101103271A
Other languages
English (en)
Other versions
TW201241466A (en
Inventor
Katsuhisa Homma
Original Assignee
Toshiba Kk
Toshiba Electron Tubes & Devic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Kk, Toshiba Electron Tubes & Devic filed Critical Toshiba Kk
Publication of TW201241466A publication Critical patent/TW201241466A/zh
Application granted granted Critical
Publication of TWI456242B publication Critical patent/TWI456242B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/496—Luminescent members, e.g. fluorescent sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20188—Auxiliary details, e.g. casings or cooling
    • G01T1/20189—Damping or insulation against damage, e.g. caused by heat or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/244—Auxiliary details, e.g. casings, cooling, damping or insulation against damage by, e.g. heat, pressure or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)

Claims (6)

  1. 一種放射線檢測器，其特徵在於包括：基板，其至少被劃分為主動區域與接著區域，且包含位於上述主動區域內並將螢光轉換為電信號之光電轉換元件、位於上述主動區域內之最表層之有機樹脂保護層、及位於上述接著區域之最表層之無機保護膜；閃爍體層，其以覆蓋上述光電轉換元件之方式形成於上述有機樹脂保護層上並將放射線轉換為上述螢光；防濕體，其以覆蓋上述閃爍體層之方式形成；及接著層，其形成於上述無機保護層上並將上述防濕體與上述基板接著。
  2. 如請求項1之放射線檢測器，其中上述有機樹脂保護膜係由熱塑性有機樹脂所形成。
  3. 如請求項1或2之放射線檢測器，其中上述無機保護膜係由氮化矽、氧化矽、碳化矽及該等之複合材料中之任一種所形成。
  4. 如請求項1或2之放射線檢測器，其中上述接著層係由UV硬化型接著劑所形成。
  5. 如請求項3之放射線檢測器，其中上述接著層係由UV硬化型接著劑所形成。
  6. 如請求項1之放射線檢測器，其進而包括形成於上述閃爍體層與上述防濕體之間並反射上述螢光之反射膜。
TW101103271A 2011-02-01 2012-02-01 放射線檢測器 TWI456242B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011019432A JP5629593B2 (ja) 2011-02-01 2011-02-01 放射線検出器

Publications (2)

Publication Number Publication Date
TW201241466A TW201241466A (en) 2012-10-16
TWI456242B true TWI456242B (zh) 2014-10-11

Family

ID=46602412

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101103271A TWI456242B (zh) 2011-02-01 2012-02-01 放射線檢測器

Country Status (7)

Country Link
US (1) US8853808B2 (zh)
EP (1) EP2672292B1 (zh)
JP (1) JP5629593B2 (zh)
KR (1) KR20130114211A (zh)
CN (1) CN103348263B (zh)
TW (1) TWI456242B (zh)
WO (1) WO2012105185A1 (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014071077A (ja) * 2012-10-01 2014-04-21 Canon Inc 放射線検出装置、及び、放射線検出システム
WO2015146855A1 (ja) * 2014-03-28 2015-10-01 富士フイルム株式会社 放射線検出装置及び放射線検出装置の製造方法
JP6523620B2 (ja) * 2014-06-16 2019-06-05 キヤノン電子管デバイス株式会社 放射線検出器及びその製造方法
US10712454B2 (en) * 2014-07-25 2020-07-14 General Electric Company X-ray detectors supported on a substrate having a metal barrier
US9513380B2 (en) * 2014-07-25 2016-12-06 General Electric Company X-ray detectors supported on a substrate having a surrounding metal barrier
JP2016128779A (ja) * 2015-01-09 2016-07-14 株式会社東芝 放射線検出器及びその製造方法
JP6487263B2 (ja) * 2015-04-20 2019-03-20 浜松ホトニクス株式会社 放射線検出器及びその製造方法
CN109196332B (zh) * 2016-01-05 2021-09-07 得克萨斯大学体系董事会 用于光学发射检测的装置和方法
US10481280B2 (en) * 2016-07-07 2019-11-19 Canon Kabushiki Kaisha Radiation detecting apparatus, radiation detecting system, and manufacturing method for radiation detecting apparatus
JP2018155699A (ja) * 2017-03-21 2018-10-04 コニカミノルタ株式会社 放射線検出器
EP3770922A4 (en) * 2018-03-23 2021-12-15 Toray Industries, Inc. SCINTILLATOR PLATE, RADIATION DETECTOR AND METHOD OF MANUFACTURING A SCINTILLATOR PLATE
JP2019174366A (ja) * 2018-03-29 2019-10-10 シャープ株式会社 撮像パネル
CN110323235A (zh) * 2018-03-29 2019-10-11 夏普株式会社 摄像面板
JP2019174365A (ja) * 2018-03-29 2019-10-10 シャープ株式会社 撮像パネル
JPWO2019244610A1 (ja) * 2018-06-22 2021-07-08 富士フイルム株式会社 放射線検出器及び放射線画像撮影装置
JP7240998B2 (ja) * 2018-11-13 2023-03-16 キヤノン電子管デバイス株式会社 放射線検出モジュール、放射線検出器、及び放射線検出モジュールの製造方法
JP6692509B1 (ja) * 2019-04-09 2020-05-13 野洲メディカルイメージングテクノロジー株式会社 シンチレータモジュール、シンチレータセンサユニット及び製造方法
KR102666048B1 (ko) * 2019-05-29 2024-05-13 엘지디스플레이 주식회사 디지털 엑스레이 검출기와 이를 포함하는 디지털 엑스레이 검출 장치 및 이의 제조 방법
JP7325295B2 (ja) * 2019-10-24 2023-08-14 浜松ホトニクス株式会社 シンチレータパネル、放射線検出器、シンチレータパネルの製造方法、及び、放射線検出器の製造方法
US11804503B2 (en) * 2020-06-12 2023-10-31 Sharp Kabushiki Kaisha Photoelectric conversion device and x-ray imaging device
CN114023845B (zh) * 2020-07-17 2024-08-20 睿生光电股份有限公司 X射线装置及其制造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1869732A (zh) * 2000-01-13 2006-11-29 浜松光子学株式会社 放射线图像传感器及闪烁器板
CN101002110A (zh) * 2004-08-10 2007-07-18 佳能株式会社 放射线探测装置、闪烁体板及其制造方法和放射线探测系统
TW201022664A (en) * 2008-11-11 2010-06-16 Hamamatsu Photonics Kk Radiation detection device, radiation image acquiring system, and method for detecting radiation
US20100246758A1 (en) * 2009-03-30 2010-09-30 Peter Hackenschmied X-ray radiation detector for detecting ionizing radiation, in particular for use in a ct system

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5132539A (en) * 1991-08-29 1992-07-21 General Electric Company Planar X-ray imager having a moisture-resistant sealing structure
JP3405706B2 (ja) * 1997-02-14 2003-05-12 浜松ホトニクス株式会社 放射線検出素子
CN1256596C (zh) 1997-02-14 2006-05-17 浜松光子学株式会社 放射线检测元件及其制造方法
JP2004264239A (ja) * 2003-03-04 2004-09-24 Canon Inc 放射線撮像装置
US7355184B2 (en) * 2003-04-07 2008-04-08 Canon Kabushiki Kaisha Radiation detecting apparatus and method for manufacturing the same
JP4266898B2 (ja) * 2004-08-10 2009-05-20 キヤノン株式会社 放射線検出装置とその製造方法および放射線撮像システム
JP4685027B2 (ja) * 2004-10-28 2011-05-18 シャープ株式会社 二次元画像検出装置およびその製造方法
JP2006337184A (ja) * 2005-06-02 2006-12-14 Canon Inc 放射線検出装置
JP2006343277A (ja) * 2005-06-10 2006-12-21 Canon Inc 放射線検出装置及び放射線撮像システム
JP4921180B2 (ja) * 2006-01-25 2012-04-25 キヤノン株式会社 放射線検出装置及び放射線撮像システム
JP2008215951A (ja) * 2007-03-01 2008-09-18 Toshiba Corp 放射線検出器
JP2008261651A (ja) * 2007-04-10 2008-10-30 Toshiba Corp シンチレータパネル、シンチレータパネルの製造方法および放射線検出器
JP5022805B2 (ja) * 2007-07-26 2012-09-12 東芝電子管デバイス株式会社 放射線検出器
JP4764407B2 (ja) 2007-11-20 2011-09-07 東芝電子管デバイス株式会社 放射線検出器及びその製造方法
JP2010101640A (ja) * 2008-10-21 2010-05-06 Toshiba Corp 放射線検出器
JP5305996B2 (ja) * 2009-03-12 2013-10-02 株式会社東芝 放射線検出器およびその製造方法
JP2010286447A (ja) * 2009-06-15 2010-12-24 Toshiba Electron Tubes & Devices Co Ltd 放射線検出器及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1869732A (zh) * 2000-01-13 2006-11-29 浜松光子学株式会社 放射线图像传感器及闪烁器板
CN101002110A (zh) * 2004-08-10 2007-07-18 佳能株式会社 放射线探测装置、闪烁体板及其制造方法和放射线探测系统
TW201022664A (en) * 2008-11-11 2010-06-16 Hamamatsu Photonics Kk Radiation detection device, radiation image acquiring system, and method for detecting radiation
US20100246758A1 (en) * 2009-03-30 2010-09-30 Peter Hackenschmied X-ray radiation detector for detecting ionizing radiation, in particular for use in a ct system

Also Published As

Publication number Publication date
US8853808B2 (en) 2014-10-07
EP2672292A4 (en) 2014-11-05
CN103348263B (zh) 2015-11-25
JP5629593B2 (ja) 2014-11-19
JP2012159398A (ja) 2012-08-23
EP2672292B1 (en) 2018-02-28
US20130313667A1 (en) 2013-11-28
CN103348263A (zh) 2013-10-09
KR20130114211A (ko) 2013-10-16
TW201241466A (en) 2012-10-16
EP2672292A1 (en) 2013-12-11
WO2012105185A1 (ja) 2012-08-09

Similar Documents

Publication Publication Date Title
TWI456242B (zh) 放射線檢測器
CA2633667A1 (en) Radiation image conversion panel, scintillator panel, and radiation image sensor
JP2008309770A5 (zh)
JP2009541939A5 (zh)
WO2011113008A3 (en) Multilayer film for photovoltaic applications
JP2013138002A5 (ja) 封止体及び発光モジュール
JP2014209480A5 (zh)
BRPI0917927A2 (pt) composição adesiva fotossensível e um filme adesivo, folha adesiva, padrão de adesivo, wafer semicondutor com camada adesiva e dispositivo semicondutor que utiliza a composição adesiva fotossensível
JP2008513256A5 (zh)
KR20170040287A (ko) 주위 금속 배리어를 가지는 기판 상에 지지된 엑스레이 검출기
JP2011066397A5 (ja) 光検出装置
JP2011508437A5 (zh)
JP2011523212A5 (zh)
JP2012107960A5 (zh)
MX374442B (es) Sustrato que tiene una multicapa con propiedades termicas y una capa de absorcion.
JP2013036766A5 (zh)
JP2015151424A5 (zh)
JP2014148081A5 (zh)
JP2014238271A5 (zh)
JP2009283456A5 (zh)
JP2012137651A5 (zh)
WO2010001061A3 (fr) Miroir et procede d'obtention d'un miroir
JP2010121207A5 (zh)
JP2008309769A5 (zh)
JP2012054493A5 (zh)