TWI447972B - LED chip and LED chip and chip manufacturing methods - Google Patents
LED chip and LED chip and chip manufacturing methods Download PDFInfo
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- TWI447972B TWI447972B TW099146273A TW99146273A TWI447972B TW I447972 B TWI447972 B TW I447972B TW 099146273 A TW099146273 A TW 099146273A TW 99146273 A TW99146273 A TW 99146273A TW I447972 B TWI447972 B TW I447972B
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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本發明屬於LED技術領域,特別涉及到LED芯片內熱傳導的封裝結構以及實現低熱阻芯片的晶片結構。The invention belongs to the technical field of LEDs, and particularly relates to a package structure for heat conduction in an LED chip and a wafer structure for realizing a low heat resistance chip.
散熱已經成了大功率LED發展進程中的一大關鍵問題。LED散熱可分為兩大過程:內部的導熱傳熱過程和外部空氣對流傳熱過程。現公開的LED芯片的內導熱傳熱熱阻佔了整個傳熱熱阻非常大的比例,現下產品之中,熱阻最低的也要達到6℃/W,如果再加上鋁基板上的絕緣層熱阻,最小也要達到10℃/W。Heat dissipation has become a key issue in the development of high-power LEDs. LED heat dissipation can be divided into two major processes: internal heat transfer heat transfer process and external air convection heat transfer process. The thermal conduction heat transfer resistance of the currently disclosed LED chip accounts for a very large proportion of the entire heat transfer resistance. Among the current products, the lowest thermal resistance is also 6 ° C / W, if coupled with insulation on the aluminum substrate The layer thermal resistance should be as small as 10 °C/W.
LED芯片內的傳熱過程並不複雜,但由於傳熱學和成熟的傳熱技術知識,以及與傳熱關聯的其他基礎知識沒有充分地被LED行業內人員瞭解,因而造成當前LED散熱技術及產品被複雜化,處於初級階段。另外,現公開的LED芯片封裝結構,都是沿著以前小功率LED芯片以及傳統電子芯片封裝思路發展過來,不僅使內導熱傳熱熱阻高達以上所述數字,而且封裝效率低,封裝設備昂貴,封裝成本高,不易實現光模組一體化封裝。The heat transfer process in the LED chip is not complicated, but the knowledge of heat transfer and mature heat transfer technology, as well as other basic knowledge related to heat transfer, are not fully understood by the LED industry, thus causing current LED heat dissipation technology and Products are complicated and in their infancy. In addition, the currently disclosed LED chip package structure is developed along the previous small power LED chip and the traditional electronic chip packaging idea, not only the internal heat transfer heat transfer resistance is as high as the above mentioned number, but also the package efficiency is low, and the packaging equipment is expensive. The packaging cost is high, and it is difficult to realize the integrated packaging of the optical module.
本發明的目的就是針對LED芯片封裝結構問題,提出一種全新結構,不僅有效降低內部導熱熱阻問題,而且還有利於提高封裝效率,降低封裝成本,特別有助於實現光模組一體化封裝。The object of the invention is to solve the problem of the LED chip package structure, and propose a new structure, which not only effectively reduces the internal heat conduction thermal resistance problem, but also helps to improve the packaging efficiency and reduce the packaging cost, and is particularly useful for realizing the integrated module of the optical module.
本發明之LED芯片主要包括有一顆或多顆晶片、定位片和熱擴散件。定位片上開有晶片嵌口使晶片能夠鑲嵌於該嵌口之中,晶片和定位片貼附在熱擴散件的一面上,該面稱為熱擴散件的A面。定位片採用絕緣材料製成,定位片上設置有電路和引線焊盤。晶片正面(出光的那面)上的電極焊盤或側壁上的電極焊盤,與定位片上相對應的引線焊盤之間的導通連接採用了導線焊接連接、焊料焊接連接以及導電膠粘接連接。晶片與熱擴散件的A面之間採用了焊接或粘膠連接,熱擴散件則採用了銅質材料或鋁質材料、或銅鋁複合材料。The LED chip of the present invention mainly comprises one or more wafers, a positioning piece and a heat diffusion member. A wafer insert is formed in the positioning sheet to enable the wafer to be embedded in the insert. The wafer and the positioning piece are attached to one side of the heat diffusion member, and the surface is referred to as the A surface of the heat diffusion member. The positioning piece is made of an insulating material, and the positioning piece is provided with a circuit and a lead pad. The electrode pad on the front side of the wafer (the side on which the light is emitted) or the electrode pad on the side wall and the corresponding lead pad on the positioning piece are connected by wire bonding, solder bonding, and conductive bonding. . A solder or adhesive connection is used between the wafer and the A surface of the thermal diffusion member, and the thermal diffusion member is made of a copper material or an aluminum material, or a copper-aluminum composite material.
本發明最大的創新是採用晶片定位片,定位片上佈設有電路和引線焊盤,晶片則鑲嵌在定位件上的晶片嵌口之中,定位片的厚度設計成和晶片厚度一致,使得晶片正面上的電極焊盤與定位片上的引線焊盤的導通連接方法,不僅可以採用現在所採用的導線焊接方法(如金絲球焊方法),還可以採用焊料焊接導通方法以及導電膠粘接導通方法。具體措 施:晶片上的電極焊盤靠著邊緣,與定位片上相對應的引線焊盤緊靠著,可採用漏印方法將焊料(錫焊膏)或導電膠設置到兩焊盤上,再加熱熔化或固化,實現兩焊盤導通。可將複數芯片拼合在一起,一次漏印,一起加熱焊接(或固化),這樣生產效率高,成本低,省去昂貴的金絲球焊接設備和金絲。定位片採用絕緣片(膜)材料,採用沖切工藝加工晶片嵌口,效率高,精度高,可採用現印製電路工藝佈設電路以及引線焊盤。The greatest innovation of the present invention is the use of a wafer locating sheet on which the circuit and lead pads are placed, and the wafer is embedded in the wafer insert on the locating member. The thickness of the locating tab is designed to be uniform with the thickness of the wafer so that the wafer is on the front side. The method of conducting the connection between the electrode pad and the lead pad on the positioning piece can be performed not only by the wire bonding method (such as the gold ball bonding method) which is currently used, but also by the solder bonding method and the conductive bonding method. Specific measures Shi: the electrode pad on the wafer is placed against the edge, and the corresponding lead pad on the positioning piece is abutted, and the solder (solder paste) or the conductive paste can be placed on the two pads by a printing method, and then heated and melted. Or curing to achieve two-pad conduction. The multiple chips can be put together, one time missing, and the other is heated and welded (or cured), which is high in production efficiency and low in cost, and saves expensive gold ball welding equipment and gold wire. The positioning piece adopts an insulating sheet (film) material, and the die insert is processed by a punching process, and the efficiency is high and the precision is high, and the current printed circuit process can be used to lay the circuit and the lead pad.
對於倒裝式結構的芯片,以及晶片襯底為導電體的芯片(如碳化矽襯底的芯片),則可以在晶片的側壁(襯底的側壁)設置電極焊盤,可以採用焊料焊接或導電膠粘接方法使晶片上的電極焊盤與定位片上的引線焊盤連接導通。For a chip of a flip-chip structure, and a chip whose wafer substrate is a conductor (such as a chip of a tantalum carbide substrate), an electrode pad may be disposed on a sidewall of the wafer (a sidewall of the substrate), which may be soldered or electrically conductive. The glue bonding method connects the electrode pads on the wafer to the lead pads on the positioning tab.
定位片上佈設有電路,芯片的外接芯片管腳、或外接電源線則通過定位片上的電路與引線焊盤連接導通。採用這樣的結構優點有:便於在一個熱擴散件上設置數多顆晶片,構成大功率的光模組芯片,這些LED晶片之間的串聯或並聯則通過定位片上的電路來連接實現。LED芯片所需的輔助電子元件(比如防靜電元件)也可設置在定位片上,甚至可以採用類似LED晶片鑲嵌在定位片中的結構,將輔助電子元件(甚至輔助電子元件的晶片)鑲嵌在定位片 之中,並可採用同樣的焊接或導電膠粘接方法。採用晶片鑲嵌在定位片中的結構,有利於晶片定位和對位,便於大批量生產,提高效率。在後續的實施例中還有敍述。A circuit is arranged on the positioning piece, and the external chip pin of the chip or the external power supply line is connected to the lead pad through the circuit on the positioning piece. The advantage of adopting such a structure is that it is convenient to install a plurality of wafers on one heat diffusion member to form a high-power optical module chip, and the series or parallel connection between the LED chips is realized by connecting the circuits on the positioning sheet. The auxiliary electronic components (such as anti-static components) required for the LED chip can also be placed on the positioning piece, and even a structure similar to the LED chip embedded in the positioning piece can be used, and the auxiliary electronic component (or even the chip of the auxiliary electronic component) can be embedded in the positioning. sheet Among them, the same welding or conductive adhesive bonding method can be used. The structure in which the wafer is embedded in the positioning piece facilitates wafer positioning and alignment, facilitates mass production, and improves efficiency. It is also described in the subsequent embodiments.
本發明中的熱擴散件,雖然與現今產品的熱沉的傳熱過程類似,但本發明首次明確強調其最重要作用一一熱擴散作用,因而稱之為熱擴散件,當今LED行業普通都不清楚熱擴散的概念及其重要性。由於銅和鋁的導熱係數高,價格低,因而首選銅質材料或鋁制材料、或銅鋁複合材料製作熱擴散件。LED芯片封裝還必須考慮電的絕緣問題,絕緣和導熱又是相互矛盾,特別是對於高電壓絕緣。Although the heat diffusion member of the present invention is similar to the heat transfer process of the heat sink of the present product, the present invention clearly emphasizes its most important role for the first time, one for thermal diffusion, and thus is called a heat diffusion member, which is common in the LED industry today. The concept of thermal diffusion and its importance are not known. Due to the high thermal conductivity and low price of copper and aluminum, it is preferred to make a thermal diffusion member from a copper material or an aluminum material or a copper-aluminum composite material. LED chip packages must also consider electrical insulation issues, and insulation and thermal conduction are contradictory, especially for high voltage insulation.
LED晶片面積小,以1X1mm大小的晶片為例,即使耗電1.2W,其熱流密度就達到106 W/m2 之多,非常之高。降低熱流密度是非常重要的。現今產品為解決電的絕緣問題,普遍採用陶瓷片作為熱沉,由於成本原因,一般採用Al2 O3 陶瓷,Al2 O3 陶瓷的導熱係數為20W/m.K左右,LED晶片直接設置在陶瓷片上,如果陶瓷片厚度為0.2mm,則在陶瓷片上的導熱溫差就要達到10℃。本發明中,晶片直接設置在採用銅或鋁、或銅鋁複合材料製成的熱擴散件(A面)上,減少了晶片與熱擴散片之間的導熱過程,由於銅或鋁的導熱係數高,高熱流密度經過熱擴散 件,熱流密度被降低,為解決電的絕緣(主要高電壓絕緣)問題的絕緣層就可設置在熱擴散件與散熱片接觸傳熱的那側面(稱為熱擴散件的B面)。如果熱流密度降低了五倍,同樣採用0.2mm厚的Al2 O3 陶瓷片作為絕緣層,則絕緣層上的導熱溫度差就可降低到2℃。The area of the LED chip is small. Taking a wafer of 1×1 mm size as an example, even if the power consumption is 1.2 W, the heat flux density is as high as 10 6 W/m 2 , which is very high. It is very important to reduce the heat flux density. In today's products to solve the problem of electrical insulation, ceramic sheets are commonly used as heat sinks. For cost reasons, Al 2 O 3 ceramics are generally used, and the thermal conductivity of Al 2 O 3 ceramics is 20 W/m. Around K, the LED wafer is directly placed on the ceramic sheet. If the thickness of the ceramic sheet is 0.2 mm, the thermal conduction temperature difference on the ceramic sheet is 10 °C. In the present invention, the wafer is directly disposed on a heat diffusion member (A surface) made of a copper or aluminum or copper-aluminum composite material, which reduces the heat conduction process between the wafer and the heat diffusion sheet due to the thermal conductivity of copper or aluminum. The high and high heat flux density passes through the heat diffusion member, and the heat flux density is lowered. The insulating layer for solving the problem of electrical insulation (mainly high voltage insulation) can be disposed on the side where the heat diffusion member and the heat sink are in contact with heat transfer (referred to as heat). B side of the diffuser). If the heat flux density is reduced by a factor of five, and a 0.2 mm thick Al 2 O 3 ceramic sheet is also used as the insulating layer, the thermal conduction temperature difference on the insulating layer can be lowered to 2 ° C.
作為熱擴散作用的熱擴散件不僅要採用導熱性高的材料,其面積和厚度也要足夠大,如果晶片為1X1mm,1W,熱擴散件的厚度應達到1.0mm以上,面積應大於5mm2 ,其目的和作用就是使熱量在熱擴散件內有效擴散,降低熱流密度。As a heat diffusion member, the heat diffusion member should not only use a material with high thermal conductivity, but also have a large enough area and thickness. If the wafer is 1×1 mm, 1 W, the thickness of the heat diffusion member should be 1.0 mm or more, and the area should be greater than 5 mm 2 . Its purpose and function is to effectively diffuse heat in the heat diffusion member and reduce the heat flow density.
晶片最好使直接焊接在熱擴散件上,因為晶片與熱擴散件結合處熱流密度最高,結合面的材料(焊料或粘膠)的導熱係數要盡可能高,金屬材料的導熱係數高,如錫的導熱係數為60W/m.K,遠高於導熱粘膠(比如銀膠)數倍。Preferably, the wafer is directly soldered to the thermal diffusion member because the heat transfer density at the junction of the wafer and the thermal diffusion member is the highest, and the thermal conductivity of the bonding surface material (solder or adhesive) is as high as possible, and the thermal conductivity of the metallic material is high, such as The thermal conductivity of tin is 60W/m. K, much higher than the thermal adhesive (such as silver glue) several times.
圖1所示的本發明LED芯片,晶片3鑲嵌在定位片6中的晶片嵌口中,晶片3和定位片6一起貼在熱擴散件7的A面;晶片正面以及部份定位片表面設置有固晶保護層5;晶片上的電極焊盤2與定位片上的引線焊盤1緊靠著,兩焊盤之間的導通連接採用超聲波球工藝,導線4(金線或鋁線)兩頭 從焊盤表面立起。由於導線線徑細,強度低,晶片正面上的固晶保護層5則應採用點膠工藝設置,如圖所示,固晶保護層5厚度不均勻。In the LED chip of the present invention shown in FIG. 1, the wafer 3 is embedded in the wafer insert in the positioning piece 6, and the wafer 3 and the positioning piece 6 are attached together on the A side of the heat diffusion member 7; the front surface of the wafer and the surface of the positioning piece are provided with a die-bonding protective layer 5; the electrode pad 2 on the wafer is in close contact with the lead pad 1 on the positioning piece, and the conductive connection between the two pads is performed by an ultrasonic ball process, and the wires 4 (gold wire or aluminum wire) are both ends Stand up from the surface of the pad. Since the wire diameter is thin and the strength is low, the die-bonding protective layer 5 on the front side of the wafer should be set by a dispensing process. As shown in the figure, the thickness of the die-bonding protective layer 5 is not uniform.
圖2所示的本發明LED芯片,導線4兩頭平貼在兩焊盤上,採用壓焊工藝焊接,由於導線平躺,強度相對高一點,固晶保護層5就可採用流延工藝設置,固晶保護層厚度就可均勻,如圖中所示。In the LED chip of the present invention shown in FIG. 2, the wires 4 are flatly attached to the two pads and soldered by a pressure welding process. Since the wires are lying flat and the strength is relatively high, the solid crystal protective layer 5 can be set by a casting process. The thickness of the die bond layer is uniform, as shown in the figure.
圖3所示的本發明LED芯片,晶片3上的電極焊盤2和定位片6上的引線焊盤1之間距離更近,之間的導通連接就可直接採用焊料(比如錫)焊接導通、或採用導電膠粘接導通。沒有導線、靠焊料(或導電膠)導電,固晶保護層5就可採用粘膠貼膜(或貼片)方法以及印刷(漏印)方法設置。In the LED chip of the present invention shown in FIG. 3, the distance between the electrode pad 2 on the wafer 3 and the lead pad 1 on the positioning piece 6 is closer, and the conduction connection between the electrodes 3 can be directly soldered and turned on by solder (such as tin). Or conductive bonding with conductive adhesive. The conductive crystal protective layer 5 can be provided by an adhesive film (or patch) method and a printing (slip printing) method without wires and by solder (or conductive paste).
圖4所示的本發明LED芯片,晶片上的一側電極焊盤2設置在晶片3的側壁上,另一電極焊盤2設置在晶片3的正面上。襯底為導電體(如碳化矽襯底)的晶片,適合採用這樣的設計。In the LED chip of the present invention shown in FIG. 4, one electrode pad 2 on the wafer is disposed on the sidewall of the wafer 3, and the other electrode pad 2 is disposed on the front surface of the wafer 3. A wafer in which the substrate is an electrical conductor such as a tantalum carbide substrate is suitable for such a design.
圖4中還示出,在熱擴散件7的A面設置有低壓絕緣層9,由於晶片3直接貼在(焊或粘)低壓絕緣層9上,熱流密度非常高,低壓絕緣層9的導熱熱阻必須低,但絕緣材料的導熱係數都低,因而絕緣層的厚度就應該薄,如此則耐電壓的絕緣強度也就低,所以被稱為低壓絕緣層。Also shown in Fig. 4, a low-voltage insulating layer 9 is provided on the A side of the heat diffusion member 7, since the wafer 3 is directly attached (welded or bonded) to the low-voltage insulating layer 9, the heat flux density is very high, and the heat conduction of the low-voltage insulating layer 9 The thermal resistance must be low, but the thermal conductivity of the insulating material is low, so the thickness of the insulating layer should be thin, so that the dielectric strength withstand voltage is low, so it is called a low-voltage insulating layer.
採用氣相沉積法生成的陶瓷絕緣膜,比如金鋼石、SiC、AlN、BN、BeO、Al2 O3 等陶瓷膜,緻密、絕緣性好、導熱性高,特別是金剛石、SiC、AlN、BN、BeO為高導熱性陶瓷,不僅可用於本發明中的熱擴散片A面上的低壓絕緣層,更加適用於以後將闡述的晶片上的陶瓷絕緣膜。氣相沉積法包括有物理氣相沉積(PVD)和化學氣相沉積(VCD),這兩種工藝都可用於製造本發明中的低壓絕緣層。Ceramic insulating film formed by vapor deposition, such as diamond, SiC, AlN, BN, BeO, Al 2 O 3 and other ceramic films, compact, good insulation, high thermal conductivity, especially diamond, SiC, AlN, BN and BeO are highly thermally conductive ceramics, and can be used not only for the low-voltage insulating layer on the surface of the heat diffusion sheet A in the present invention, but also for the ceramic insulating film on the wafer to be described later. The vapor deposition method includes physical vapor deposition (PVD) and chemical vapor deposition (VCD), both of which can be used to manufacture the low-voltage insulating layer in the present invention.
低壓絕緣層9還可採用陽極氧化工藝,直接從熱擴散件表面的金屬鋁生長出的氧化鋁膜,但該氧化鋁膜厚度不大於50μm。因為採用陽極氧化生成的氧化鋁膜,有孔隙,雖然可進行封孔處理(如採用矽脂),但該膜的導熱係數不高,因而膜的厚度不應太厚,不應大於50μm。如果熱擴散件採用銅材,此時就應該採用銅鋁複合材料。The low-voltage insulating layer 9 may also be an anodized process, an aluminum oxide film grown directly from the metal aluminum on the surface of the heat diffusion member, but the thickness of the aluminum oxide film is not more than 50 μm. Since the aluminum oxide film formed by anodization has pores, although it can be sealed (for example, rouge), the thermal conductivity of the film is not high, so the thickness of the film should not be too thick and should not be larger than 50 μm. If the heat spreader is made of copper, then a copper-aluminum composite should be used.
圖5所示的本發明LED芯片,晶片上兩電極焊盤2都設置在晶片3的側壁上,這樣的設計適合於晶片倒裝(也稱覆晶)結構,以後有更詳細描述。固晶保護層5可採用印刷(如漏印)方法設置,可將螢光材料加入固晶保護層的材料中。In the LED chip of the present invention shown in Fig. 5, both electrode pads 2 on the wafer are disposed on the sidewalls of the wafer 3. Such a design is suitable for wafer flip-chip (also referred to as flip chip) structure, which will be described in more detail later. The die-bonding protective layer 5 can be provided by a printing (e.g., missing) method, and a fluorescent material can be added to the material of the die-bonding protective layer.
圖5中還示出有絕緣膜10,該絕緣層設在定位片和晶片的背面,沿著晶片3與定位片6之間的嵌縫,如圖6所示,晶片背面中部留有沒有被絕緣膜 10覆蓋的面積,該面積至少要有一半以上的晶片面積,該面積用於導熱作用。採用噴塗或印刷(如漏印)方法設置絕緣膜10,可以使絕緣漆滲入晶片3與定位片6之間的嵌縫中,提高絕緣可靠性。這樣的設計,對於採用正裝式結構,利用晶片襯底(如藍寶石)作為高壓絕緣層的結構,更為重要。Also shown in Fig. 5 is an insulating film 10 which is provided on the back surface of the positioning piece and the wafer, along the caulking between the wafer 3 and the positioning piece 6, as shown in Fig. 6, the middle of the back side of the wafer is left untouched. Insulating film The area covered by 10, which has at least half of the area of the wafer, which is used for thermal conduction. By providing the insulating film 10 by spraying or printing (such as a missing printing), the insulating varnish can be infiltrated into the caulking between the wafer 3 and the positioning piece 6, thereby improving the insulation reliability. Such a design is more important for a structure in which a wafer substrate (such as sapphire) is used as a high-voltage insulating layer in a front-mounted structure.
晶片的高熱流密度,經過熱擴散件後,熱流密度降低,就可在熱擴散件熱量導出面,即稱為熱擴散件的B面,設置承擔耐高電壓的絕緣層,該絕緣層稱為高壓絕緣層,如圖5所示,在熱擴散件7的B面,設置有高壓絕緣層11。The high heat flux density of the wafer, after the heat diffusion member is reduced, the heat flux density is lowered, and the insulating layer capable of withstanding high voltage is provided on the heat-dissipating surface of the heat-diffusing member, that is, the surface B, which is called the heat-diffusing member. As shown in FIG. 5, the high-voltage insulating layer is provided with a high-voltage insulating layer 11 on the surface B of the heat diffusion member 7.
本發明中,高壓絕緣層定義為承受直流擊穿電壓達到500V以上的絕緣層。In the present invention, the high voltage insulating layer is defined as an insulating layer that withstands a DC breakdown voltage of 500 V or more.
高壓絕緣層也可以採用陽極氧化法直接從熱擴散件表面的金屬鋁上生長出的氧化鋁膜。如果絕緣強度要求高,比如達到承受2000V電壓,氧化鋁膜就要達到0.2mm厚,採用陽極氧化生成的難度增加,再由於空隙存在,氧化鋁膜的導熱熱阻過大。可以選擇採用燒結成瓷的氧化鋁陶瓷片,緻密、導熱係數高,生產製造工藝成熟,廣泛應用於電子元器件中,成本也不高。氧化鋁陶瓷片與熱擴散件之間可採用焊接(釺焊)法或導熱膠粘結法連接,採用焊接法時,氧化鋁陶瓷片需要表面金屬化。The high-voltage insulating layer may also be an aluminide film grown directly from the metal aluminum on the surface of the heat diffusion member by anodization. If the dielectric strength is required to be high, for example, to withstand a voltage of 2000 V, the aluminum oxide film should be 0.2 mm thick, and the difficulty of anodizing is increased, and the thermal resistance of the aluminum oxide film is too large due to the existence of voids. It can choose to use alumina ceramic sheets sintered into porcelain, which has high density, high thermal conductivity and mature manufacturing process. It is widely used in electronic components and the cost is not high. The alumina ceramic sheet and the heat diffusion member may be joined by a soldering method or a thermal conductive adhesive bonding method. When the soldering method is used, the aluminum oxide ceramic sheet needs to be surface metallized.
圖7示出一種採用了本發明LED芯片的LED發光模組,稱為LED燈芯,LED芯片中設置有多顆晶片,並通過螺釘13固定在LED燈芯的導熱芯12上,導熱芯12採用了圓錐體結構,芯片產生的熱量通過熱擴散件7與導熱芯12之間的接觸傳熱傳到導熱芯12,再由導熱芯的圓錐面與散熱片之間的接觸傳熱傳到散熱片上,之後再散出。熱擴散件7的A面上設置有低壓絕緣層9,高壓絕緣層11則設置在導熱芯12上。FIG. 7 shows an LED lighting module using the LED chip of the present invention, which is called an LED wick. The LED chip is provided with a plurality of wafers, and is fixed on the heat conducting core 12 of the LED wick by screws 13, and the heat conducting core 12 is adopted. The cone structure, the heat generated by the chip is transferred to the heat conducting core 12 through the contact heat transfer between the heat diffusing member 7 and the heat conducting core 12, and is transferred to the heat sink by the heat transfer between the conical surface of the heat conducting core and the heat sink. Then scatter. A low-voltage insulating layer 9 is disposed on the A surface of the heat diffusion member 7, and the high-voltage insulating layer 11 is disposed on the heat conductive core 12.
圖7中,每個晶片3前設置有透鏡14,透鏡14中又嵌有螢光體15,可將LED芯片上的數個透鏡設計成一整體部件,完成螢光體的嵌裝後,整體粘接在晶片前,透鏡15又可成為晶片3的固晶保護層。In FIG. 7, a lens 14 is disposed in front of each of the wafers 3, and a phosphor 15 is embedded in the lens 14. The plurality of lenses on the LED chip can be designed as a whole component, and the whole body is adhered after the phosphor is embedded. In the front of the wafer, the lens 15 can again become a die-bonding protective layer of the wafer 3.
圖8所示的LED燈芯中,熱擴散件與導熱芯12合為一體,為圓錐體。如果電的隔離絕緣要求高的話,這樣的設計適合於晶片為正裝式,晶片襯底為絕緣體(如藍寶石襯底)。可採用漏印方法設置固晶保護層5,並在固晶保護層5中加入螢光材料。圖中還示出採用聚光型燈芯罩16。In the LED wick shown in Fig. 8, the heat diffusion member is integrated with the heat conductive core 12 and is a cone. If the electrical isolation insulation is required to be high, such a design is suitable for the wafer to be a formal type, and the wafer substrate is an insulator (such as a sapphire substrate). The die-bonding protective layer 5 may be provided by a missing printing method, and a fluorescent material may be added to the die-bonding protective layer 5. Also shown is a concentrating wick cover 16.
圖1至6所示的LED芯片,以及圖7中的LED芯片,熱擴散件7為板式結構。為承擔熱擴散作用,熱擴散件的面積要足夠大,熱擴散件7的面積應大於該熱擴散件上所有LED晶片面積之和的五倍;熱 擴散件的厚度也要足夠厚,通常取不小於0.5mm,如果1X1mm晶片功耗達1.0W,熱擴散件的厚應大於1.0mm。The LED chip shown in FIGS. 1 to 6, and the LED chip in FIG. 7, the heat diffusion member 7 is a plate structure. In order to bear the heat diffusion effect, the area of the heat diffusion member should be large enough, and the area of the heat diffusion member 7 should be greater than five times the sum of the area of all the LED chips on the heat diffusion member; The thickness of the diffuser should also be sufficiently thick, usually not less than 0.5 mm. If the power consumption of the 1X1 mm wafer is 1.0 W, the thickness of the heat spreader should be greater than 1.0 mm.
圖9、10、11示出一種本發明LED芯片製造工序,工序包括有:晶片嵌入定位片的晶片嵌入工序、晶片上的電極焊盤與定位片上的引線焊盤之間的焊盤導通連接工序、設置固晶保護層工序、晶片與熱擴散件之間的焊接或粘接工序。圖9為晶片3鑲嵌入定位片6的晶片嵌入工序,並完成了電極焊盤與引線焊盤之間的焊盤導通連接工序。圖中所示為焊料焊接或導電膠粘結,該工序中應該採用一平整襯板,將晶片3和定位片6貼在該襯板上,最好是在襯板面上鋪一層膜,膜上帶一點膠,當晶片嵌入定位片時能被粘住,不易脫落,膠水應選不耐溫,當焊接時,受高溫,膠水自行揮發,以便以後的工序簡單,容易把膜去掉,襯板是生產過程中的輔助工具。9 , 10 and 11 illustrate a manufacturing process of an LED chip according to the present invention, the process comprising: a wafer embedding process in which a wafer is embedded in a positioning piece, a pad conducting connection process between an electrode pad on the wafer and a lead pad on the positioning piece; And providing a process of bonding a protective layer, a soldering or bonding process between the wafer and the heat diffusion member. FIG. 9 shows a wafer embedding process in which the wafer 3 is embedded in the positioning piece 6, and a pad conduction connection process between the electrode pad and the lead pad is completed. The figure shows solder soldering or conductive adhesive bonding. In this process, a flat lining should be used to attach the wafer 3 and the positioning piece 6 to the lining. It is preferable to lay a film on the lining surface. With a little glue on the top, when the wafer is embedded in the positioning piece, it can be stuck, not easy to fall off. The glue should be selected to be temperature-resistant. When welding, it is subject to high temperature, and the glue volatilizes itself, so that the subsequent process is simple, and the film is easily removed. The board is an auxiliary tool in the production process.
圖10所示為設置固晶保護層工序,可採用點膠法、或噴塗法、或流延法、或印刷法(比如漏印法)、或貼片(膜)法。設置固晶保護層的工序還可放在焊盤導通連接工序之前。晶片3前有了固晶保護層5,晶片3被固定在定位片6上,不會脫落,晶片又受到保護層保護,水和空氣不易從該面進入接觸到 晶片,這也就是固晶保護層名稱的來由,該技術特徵與現LED芯片生產中的固晶工藝區別明顯。晶片被固定,晶片和定位片就可以從襯板上取下,進行下一道工序,如果需要設置絕緣膜10,此時就可進行該工序了。之後的工序有採用焊接或粘接方法,將晶片貼在熱擴散件上的工序,如圖11所示。Fig. 10 shows a step of providing a solid crystal protective layer, which may be carried out by a dispensing method, a spraying method, a casting method, a printing method (such as a stencil method), or a patch (film) method. The process of setting the die bond layer can also be performed before the pad conduction connection process. There is a die-bonding protective layer 5 in front of the wafer 3. The wafer 3 is fixed on the positioning piece 6, and does not fall off. The wafer is protected by a protective layer, and water and air are not easily accessible from the surface. Wafer, which is the name of the solid crystal protective layer, this technical feature is distinct from the solid crystal process in the current LED chip production. The wafer is fixed, and the wafer and the positioning piece can be removed from the liner to perform the next process. If the insulating film 10 is required, the process can be performed. The subsequent steps include a step of attaching the wafer to the heat diffusion member by soldering or bonding, as shown in FIG.
可在一大張的定位片材上排列數多個定位片,每個定位片上可嵌入數多顆晶片,熱擴散件也同樣,這樣可同時設置焊料或導電膠(比如採用漏印方法),整體加熱焊接或固化,整體設置固晶保護層,大張的定位片與晶片一起,整張地貼在熱擴散件上,之後再分切,這樣生產效率得到提高。A plurality of positioning pieces can be arranged on a large positioning sheet, and a plurality of wafers can be embedded on each positioning piece, and the heat diffusion parts are also the same, so that solder or conductive glue can be set at the same time (for example, by using a missing printing method). The whole heat is welded or cured, and the solid crystal protective layer is integrally disposed. The large positioning piece is attached to the heat diffusion member together with the wafer, and then slit, so that the production efficiency is improved.
通電檢測工序可以設置在焊盤導通連接工序之後,設置固晶保護層工序之前,這樣就可將有問題的焊接或導電膠粘接進行修補,或更換有問題的晶片。這對於有多顆晶片的LED芯片的生產,能夠有效的提高成品率,該技術特徵在現有的LED芯片製造中是沒有的。The power-on detection process may be performed after the pad-on connection process and before the die-bonding layer process is performed, so that the problematic solder or conductive paste bond can be repaired or the problematic wafer can be replaced. This can effectively improve the yield of LED chips with multiple wafers, which is not available in the manufacture of existing LED chips.
圖12所示的本發明LED晶片,襯底21為絕緣體,與現有藍寶石襯底的正裝式LED晶片類似,LED工作層18外層設置有透明電極17,透明電極17上設有電極焊盤2(圖中左邊的電極焊盤2),該電極焊盤稱為外層電極焊盤,透明電極17外表面設置有 保護層19。本發明LED晶片與現產品不同的主要特徵是:在靠近外層電極焊盤(如圖中左邊的電極焊盤2)的LED工作層18的側壁上覆蓋有絕緣層20,該絕緣層延伸到襯底21,其作用和目的是:當採用焊料焊接導通或導電膠粘接導通連接電極焊盤和引線焊盤時,防止焊料或導電膠接觸到LED工作層18中的另一半導體層,產生短路問題。外層電極焊盤可能是p側電極焊盤,也可能是n側電極焊盤(採用剝離技術,變換襯底)。可以採用氣相成膜法(沉積法),在生成保護膜19時,同時生成絕緣層20,也可以採用平版型印刷技術設置絕緣層20。In the LED chip of the present invention shown in FIG. 12, the substrate 21 is an insulator. Similar to the conventional LED chip of the sapphire substrate, the outer layer of the LED working layer 18 is provided with a transparent electrode 17, and the transparent electrode 17 is provided with an electrode pad 2. (the electrode pad 2 on the left side in the figure), the electrode pad is referred to as an outer electrode pad, and the outer surface of the transparent electrode 17 is provided with Protective layer 19. The main feature of the LED chip of the present invention which is different from the current product is that the sidewall of the LED working layer 18 adjacent to the outer electrode pad (the electrode pad 2 on the left side in the figure) is covered with an insulating layer 20 which extends to the lining. The bottom 21 has the function and purpose of preventing the solder or the conductive paste from contacting the other semiconductor layer in the LED working layer 18 when the solder bonding or the conductive adhesive is used to connect the electrode pads and the lead pads, thereby causing a short circuit. problem. The outer electrode pad may be a p-side electrode pad or an n-side electrode pad (using a lift-off technique to change the substrate). The vapor phase film formation method (deposition method) may be employed, and the insulating layer 20 may be simultaneously formed when the protective film 19 is formed, or the insulating layer 20 may be provided by a lithographic printing technique.
圖13所示的本發明LED芯片中,採用了如圖12所示的晶片,並且在襯底21上設置有大面積的導熱焊盤22。晶片採用焊接法貼在熱擴散件7上,有利於晶片上的熱量傳到熱擴散件7上。如圖所示,電極焊盤2與引線焊盤1之間採用焊料焊接導通連接或導電膠粘接導通連接,有了絕緣層20,左側的焊料或導電膠不會接觸到LED工作層18中另一半導體層(圖中的內層),發生短路現象。In the LED chip of the present invention shown in Fig. 13, a wafer as shown in Fig. 12 is employed, and a large-area heat-conductive pad 22 is provided on the substrate 21. The wafer is attached to the heat diffusion member 7 by soldering, and the heat on the wafer is transferred to the heat diffusion member 7. As shown in the figure, the solder pad conductive connection or the conductive adhesive bonding conduction connection is used between the electrode pad 2 and the lead pad 1. With the insulating layer 20, the solder or conductive paste on the left side does not contact the working layer 18 of the LED. Another semiconductor layer (the inner layer in the figure) has a short circuit phenomenon.
圖14所示的本發明LED晶片,兩電極焊盤2都在晶片的正面,為正裝式,外層電極焊盤旁邊的LED工作層18側壁上的絕緣層20,不僅延伸到襯底21,而且還延伸到了襯底21的側壁上,這是因為該晶片 的襯底21為導電體,比如碳化矽襯底。圖中還能夠看出,晶片的背面(襯底下面)設置有採用氣相沉積方法生成的陶瓷絕緣膜23。In the LED chip of the present invention shown in FIG. 14, both electrode pads 2 are on the front side of the wafer, and the insulating layer 20 on the side wall of the LED working layer 18 beside the outer electrode pad extends not only to the substrate 21. And also extended to the sidewall of the substrate 21 because of the wafer The substrate 21 is an electrical conductor such as a tantalum carbide substrate. It can also be seen that the back surface of the wafer (below the substrate) is provided with a ceramic insulating film 23 formed by a vapor deposition method.
圖15所示的本發明LED芯片,所用晶片與圖14所示類似,襯底為導電體,左邊電極焊盤(外層電極焊盤)旁邊的絕緣層20延伸到了襯底21的側壁上,這樣能保證左邊的焊料或導電膠8不易接觸到導電的襯底,發生短路情況。不同之處有:晶片上另外的電極焊盤2(圖中右邊)設置在晶片的側壁上,還有晶片背面設置有大面積的導熱焊盤22,晶片通過焊接貼在熱擴散件7上。The LED chip of the present invention shown in Fig. 15 has a wafer similar to that shown in Fig. 14, the substrate is an electric conductor, and the insulating layer 20 beside the left electrode pad (outer electrode pad) extends to the side wall of the substrate 21, so that It can ensure that the solder or conductive paste 8 on the left side is not easy to contact the conductive substrate, and a short circuit occurs. The difference is that another electrode pad 2 (right side in the figure) on the wafer is disposed on the sidewall of the wafer, and a large-area heat-conductive pad 22 is disposed on the back surface of the wafer, and the wafer is attached to the heat diffusion member 7 by soldering.
圖16所示的本發明LED芯片,採用倒裝式(也稱覆晶式),襯底21為晶片正面(出光面),晶片上其中一側電極焊盤設置在晶片(襯底)的側壁上,並採用了焊料焊接或導電膠粘接法與定位片6上的引線焊盤實現導通連接。晶片上另一側電極焊盤在晶片的背面,作為導熱焊盤22使用,熱擴散件7被用作為導線使用。在熱擴散件7的B面設有高壓絕緣層11。The LED chip of the present invention shown in FIG. 16 is flip-chip type (also referred to as flip chip type), and the substrate 21 is a front side (light-emitting surface) of the wafer, and one side electrode pad on the wafer is disposed on the sidewall of the wafer (substrate). The solder connection or the conductive adhesive bonding method is used to achieve a conductive connection with the lead pads on the positioning piece 6. The other side electrode pad on the wafer is on the back side of the wafer, and is used as the heat transfer pad 22, and the heat diffusion member 7 is used as a wire. A high voltage insulating layer 11 is provided on the B surface of the heat diffusion member 7.
如圖17所示的本發明LED芯片,也採用倒裝式,晶片上的兩側電極焊盤2都設置在晶片(襯底)的側壁上,其中一側電極焊盤旁邊的LED工作層的側壁設置有絕緣層20,在晶片的背面設置有採用了 氣相沉積法生成的陶瓷絕緣膜23,並在該膜外側設有大面積的導熱焊盤22。絕緣層20也可以採用氣相沉積法與陶瓷絕緣膜23一起同時生成。The LED chip of the present invention as shown in FIG. 17 is also flip-chip type, and the electrode pads 2 on both sides of the wafer are disposed on the sidewall of the wafer (substrate), wherein the LED working layer beside the one electrode pad The sidewall is provided with an insulating layer 20, which is disposed on the back side of the wafer. The ceramic insulating film 23 is formed by vapor deposition, and a large-area heat-conductive pad 22 is provided outside the film. The insulating layer 20 can also be simultaneously formed by the vapor deposition method together with the ceramic insulating film 23.
圖18所示的本發明LED晶片,兩側電極焊盤2都在晶片的正面,並設置在晶片的角上,晶片為長方形,可以防止晶片嵌入定位元片時發生方位錯誤。圖19所示的本發明LED晶片,兩側電極焊盤2都設置在晶片的側壁上,也設置在角上,並且晶片的四角被加工成四分之一圓缺口。電極焊盤設置在晶片角上的優點有:電極焊盤所占晶片有效發光面積小。In the LED chip of the present invention shown in Fig. 18, the electrode pads 2 on both sides are on the front side of the wafer and are disposed at the corners of the wafer. The wafer is rectangular, which prevents the orientation error of the wafer when the positioning element is embedded. In the LED wafer of the present invention shown in Fig. 19, the electrode pads 2 on both sides are disposed on the side walls of the wafer, also on the corners, and the four corners of the wafer are processed into a quarter circle notch. The advantage that the electrode pads are disposed on the corners of the wafer is that the electrode pads occupy a small effective light-emitting area of the wafer.
圖20所示的本發明LED芯片,定位片6上的一個晶片嵌口放有三顆晶片,這樣的設計可用於三基色合成的白光LED芯片製作、紅光晶片補色的白光LED芯片製作、以及用於LED顯示幕中的應用和液晶顯示幕的背光中的應用。In the LED chip of the present invention shown in FIG. 20, three wafers are placed on one of the wafer inserts on the positioning piece 6. This design can be used for the production of a white LED chip with three primary colors, a white LED chip with a red light complementary color, and the like. Application in LED display screens and backlighting of liquid crystal display screens.
(1)‧‧‧引線焊盤(1)‧‧‧ Lead pad
(2)‧‧‧電極焊盤(2) ‧‧‧electrode pads
(3)‧‧‧晶片(3) ‧‧‧ wafer
(4)‧‧‧導線(4) ‧‧‧ wires
(5)‧‧‧固晶保護層(5) ‧‧‧Crystal protective layer
(6)‧‧‧定位片(6) ‧‧‧ Positioning film
(7)‧‧‧熱擴散件(7) ‧ ‧ heat spreaders
(8)‧‧‧焊料或導電膠(8)‧‧‧Solder or conductive adhesive
(9)‧‧‧低壓絕緣層(9) ‧‧‧Low-voltage insulation
(10)‧‧‧絕緣膜(10)‧‧‧Insulation film
(11)‧‧‧高壓絕緣層(11)‧‧‧High voltage insulation
(12)‧‧‧導熱芯(12)‧‧‧Conductor core
(13)‧‧‧螺釘(13)‧‧‧ screws
(14)‧‧‧透鏡(14) ‧ ‧ lens
(15)‧‧‧螢光體(15)‧‧‧Silver
(16)‧‧‧燈芯罩(16)‧‧‧War cover
(17)‧‧‧透明電極(17) ‧‧‧Transparent electrode
(18)‧‧‧LED工作層(n型半導體層+發光層+p型半導體層)(18) ‧‧‧LED working layer (n-type semiconductor layer + luminescent layer + p-type semiconductor layer)
(19)‧‧‧保護膜(19) ‧ ‧ protective film
(20)‧‧‧絕緣層(20)‧‧‧Insulation
(21)‧‧‧襯底(21) ‧‧‧Substrate
(22)‧‧‧導熱焊盤(22)‧‧‧ Thermal pad
(23)‧‧‧陶瓷絕緣膜(23)‧‧‧Ceramic insulating film
圖1是本發明LED芯片的特徵剖面示意圖,採用超聲波金絲球法焊接導線,點膠法設置固晶保護層。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing the characteristics of an LED chip of the present invention. The wire is welded by an ultrasonic gold wire method, and a solid crystal protective layer is provided by a dispensing method.
圖2是本發明LED芯片的特徵剖面示意圖,採用壓焊法焊接導線,流延法設置固晶保護層。2 is a schematic cross-sectional view showing the characteristics of the LED chip of the present invention. The wire is welded by a pressure welding method, and the solid crystal protective layer is provided by a casting method.
圖3是本發明LED芯片的特徵剖面示意圖,採用焊 料焊接或導電膠粘接法實現晶片上的電極焊盤與定位片上的引線焊盤連接導通,固晶保護層可採用貼膜法設置。3 is a schematic cross-sectional view of a LED chip of the present invention, using soldering The material soldering or the conductive adhesive bonding method realizes the connection between the electrode pads on the wafer and the lead pads on the positioning piece, and the solid crystal protective layer can be disposed by the filming method.
圖4是本發明LED芯片的特徵剖面示意圖,採用焊料焊接或導電膠粘接法實現晶片上的電極焊盤與定位片上的引線焊盤連接導通,晶片上的一側電極焊盤設置在晶片的側壁上,熱擴散件的A面設置有低壓絕緣層。4 is a schematic cross-sectional view showing a characteristic of an LED chip of the present invention. The electrode pad on the wafer is connected to the lead pad on the positioning piece by soldering or conductive bonding, and one electrode pad on the wafer is disposed on the wafer. On the side wall, the A surface of the heat diffusion member is provided with a low voltage insulating layer.
圖5是本發明LED芯片的特徵剖面示意圖,晶片上的兩側電極焊盤都設置在晶片的側壁上,熱擴散件的B面設置有高壓絕緣層,熱擴散件的A面與定位片以及晶片部分面積之間設置有絕緣膜。5 is a schematic cross-sectional view of the LED chip of the present invention, both side electrode pads on the wafer are disposed on the sidewall of the wafer, and the B surface of the heat diffusion member is provided with a high voltage insulating layer, the A surface of the thermal diffusion member and the positioning piece and An insulating film is disposed between the partial areas of the wafer.
圖6是本發明LED芯片中的定位片和晶片的背面特徵示意圖,沿著晶片與定位片的嵌縫,設置絕緣膜,但晶片中部沒有絕緣膜。Fig. 6 is a schematic view showing the back surface of the positioning piece and the wafer in the LED chip of the present invention. The insulating film is provided along the caulking of the wafer and the positioning piece, but there is no insulating film in the middle of the wafer.
圖7是採用了本發明LED芯片的LED燈芯(或稱光模組)的特徵剖面示意圖,導熱芯採用圓錐體結構。7 is a schematic cross-sectional view showing an LED wick (or optical module) using the LED chip of the present invention, and the heat conducting core adopts a cone structure.
圖8是採用了本發明LED芯片的LED燈芯的特徵剖面示意圖,熱擴散件與導熱芯合為一體,並採用了聚光型燈芯罩。Fig. 8 is a schematic cross-sectional view showing the LED wick using the LED chip of the present invention. The heat diffusion member is integrated with the heat conductive core, and a concentrating wick cover is used.
圖9、10、11是本發明LED芯片的一種製造工序過程示意圖。9, 10 and 11 are schematic views showing a manufacturing process of the LED chip of the present invention.
圖12是本發明LED晶片的特徵剖面示意圖,襯底為絕緣體,晶片上的兩電極焊盤都在晶片的正面。Figure 12 is a schematic cross-sectional view showing the LED wafer of the present invention. The substrate is an insulator, and both electrode pads on the wafer are on the front side of the wafer.
圖13是本發明LED芯片的特徵剖面示意圖,襯底為絕緣體,正裝式結構。Figure 13 is a schematic cross-sectional view showing the characteristics of the LED chip of the present invention, the substrate being an insulator and a formal structure.
圖14是本發明LED晶片的特徵剖面示意圖,襯底為導電體,晶片上的兩電極焊盤都在晶片的正面。Figure 14 is a schematic cross-sectional view showing the LED wafer of the present invention. The substrate is an electrical conductor, and both electrode pads on the wafer are on the front side of the wafer.
圖15是本發明LED芯片的特徵剖面示意圖,襯底為導電體,正裝式結構,其中一側電極焊盤設置在晶片的側壁上。Figure 15 is a schematic cross-sectional view showing the characteristics of the LED chip of the present invention. The substrate is an electrical conductor, a formal structure in which one side electrode pad is disposed on the sidewall of the wafer.
圖16是本發明LED芯片的特徵剖面示意圖,襯底為絕緣體,倒裝式結構,其中一側電極焊盤設置在晶片的側壁上。Figure 16 is a schematic cross-sectional view showing the characteristics of the LED chip of the present invention, the substrate being an insulator, a flip-chip structure in which one side electrode pad is disposed on the sidewall of the wafer.
圖17是本發明LED芯片的特徵剖面示意圖,襯底為絕緣體,倒裝式結構,晶片上的兩側電極焊盤都設置在晶片的側壁上。Figure 17 is a schematic cross-sectional view showing the characteristics of the LED chip of the present invention. The substrate is an insulator, a flip-chip structure, and both side electrode pads on the wafer are disposed on the sidewall of the wafer.
圖18是本發明的LED晶片特徵示意圖,電極焊盤在晶片的正面,並設置在四個角上。Figure 18 is a schematic illustration of the LED wafer of the present invention with the electrode pads on the front side of the wafer and disposed at four corners.
圖19是本發明的LED晶片特徵示意圖,電極焊盤在晶片的側壁上,並設置在四個角上。Figure 19 is a schematic illustration of the LED wafer of the present invention with electrode pads on the sidewalls of the wafer and disposed at four corners.
圖20是本發明LED芯片的特徵示意圖,表示一個晶片嵌口中鑲嵌有多顆晶片。Figure 20 is a schematic illustration of the LED chip of the present invention showing a plurality of wafers embedded in a wafer insert.
(1)‧‧‧引線焊盤(1)‧‧‧ Lead pad
(2)‧‧‧電極焊盤(2) ‧‧‧electrode pads
(5)‧‧‧固晶保護層(5) ‧‧‧Crystal protective layer
(6)‧‧‧定位片(6) ‧‧‧ Positioning film
(7)‧‧‧熱擴散件(7) ‧ ‧ heat spreaders
(8)‧‧‧焊料或導電膠(8)‧‧‧Solder or conductive adhesive
(18)‧‧‧LED工作層(18) ‧‧‧LED working layer
(20)‧‧‧絕緣層(20)‧‧‧Insulation
(22)‧‧‧導熱焊(22) ‧‧‧thermal welding
(23)‧‧‧陶瓷絕緣膜(23)‧‧‧Ceramic insulating film
Claims (11)
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Citations (4)
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TW200511509A (en) * | 2003-09-01 | 2005-03-16 | Siliconware Precision Industries Co Ltd | Photosensitive semiconductor device and method for fabrication the same |
TW200512952A (en) * | 2003-09-23 | 2005-04-01 | United Epitaxy Co Ltd | Light emitting diodes in series connection and method of making the same |
TW200705630A (en) * | 2005-07-21 | 2007-02-01 | Phoenix Prec Technology Corp | Electrical connection structure of semiconductor chip in carrier board and method for fabricating the same |
TWM366013U (en) * | 2009-04-01 | 2009-10-01 | Taiwan Solutions Systems Corp | LED lamp module |
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TW200511509A (en) * | 2003-09-01 | 2005-03-16 | Siliconware Precision Industries Co Ltd | Photosensitive semiconductor device and method for fabrication the same |
TW200512952A (en) * | 2003-09-23 | 2005-04-01 | United Epitaxy Co Ltd | Light emitting diodes in series connection and method of making the same |
TW200705630A (en) * | 2005-07-21 | 2007-02-01 | Phoenix Prec Technology Corp | Electrical connection structure of semiconductor chip in carrier board and method for fabricating the same |
TWM366013U (en) * | 2009-04-01 | 2009-10-01 | Taiwan Solutions Systems Corp | LED lamp module |
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