TWI405971B - - Google Patents
Info
- Publication number
- TWI405971B TWI405971B TW98131188A TW98131188A TWI405971B TW I405971 B TWI405971 B TW I405971B TW 98131188 A TW98131188 A TW 98131188A TW 98131188 A TW98131188 A TW 98131188A TW I405971 B TWI405971 B TW I405971B
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- conductive material
- insulating material
- circuit board
- test
- Prior art date
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A high-frequency vertical probe card structure, including at least one probe and a top-down stacked circuit board, a first insulating material, a conductive material body, and a second insulating material, the probe penetrates the first insulating material, the conductive material body and the second insulating material and exposes the probe tip to contact the test points of the chip under test, the connection section of the probe connects to the circuit board to enable the probe to conduct high-frequency electrical signals between the circuit board and the test points, the probe body is surrounded by the conductive material body, and a gap exists between the probe and the conductive material body, so that the probe body can use air as the medium to provide the probe body with low dielectric conduction, thereby enhancing transmission quality of the high-frequency electrical signals and increasing test accuracy of the chip under test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98131188A TW201111790A (en) | 2009-09-16 | 2009-09-16 | High-frequency vertical probe card structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98131188A TW201111790A (en) | 2009-09-16 | 2009-09-16 | High-frequency vertical probe card structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201111790A TW201111790A (en) | 2011-04-01 |
| TWI405971B true TWI405971B (en) | 2013-08-21 |
Family
ID=44909012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98131188A TW201111790A (en) | 2009-09-16 | 2009-09-16 | High-frequency vertical probe card structure |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201111790A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106124808A (en) * | 2016-08-30 | 2016-11-16 | 四川汉舟电气股份有限公司 | A kind of measurement control module of high-performance combination instrument |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6853208B2 (en) * | 2000-08-09 | 2005-02-08 | Nihon Denshizairyo Kabushiki Kaisha | Vertical probe card |
| TW200813441A (en) * | 2006-09-11 | 2008-03-16 | Jung-Tang Huang | Vertical probe card |
| TWI297077B (en) * | 2002-04-16 | 2008-05-21 | Nhk Spring Co Ltd | Electroconductive contact probe |
| JP2008157831A (en) * | 2006-12-26 | 2008-07-10 | Japan Electronic Materials Corp | Probe card |
| TWM362994U (en) * | 2006-11-21 | 2009-08-11 | Wen-Yu Lv | Probe card |
-
2009
- 2009-09-16 TW TW98131188A patent/TW201111790A/en unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6853208B2 (en) * | 2000-08-09 | 2005-02-08 | Nihon Denshizairyo Kabushiki Kaisha | Vertical probe card |
| TWI297077B (en) * | 2002-04-16 | 2008-05-21 | Nhk Spring Co Ltd | Electroconductive contact probe |
| TW200813441A (en) * | 2006-09-11 | 2008-03-16 | Jung-Tang Huang | Vertical probe card |
| TWM362994U (en) * | 2006-11-21 | 2009-08-11 | Wen-Yu Lv | Probe card |
| JP2008157831A (en) * | 2006-12-26 | 2008-07-10 | Japan Electronic Materials Corp | Probe card |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106124808A (en) * | 2016-08-30 | 2016-11-16 | 四川汉舟电气股份有限公司 | A kind of measurement control module of high-performance combination instrument |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201111790A (en) | 2011-04-01 |
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