TWI355355B - Sealing apparatus of vacuum device and method usin - Google Patents

Description

1355355 IX. Description of the Invention: [Technical Field] The present invention relates to the field of vacuum technology, and more particularly to a sealing device for a vacuum device and a method for sealing a vacuum device using the sealing device. β [Prior Art] Vacuum technology plays an important role in the manufacture of vacuum electronic devices, and vacuum problems are attracting more and more attention (see, Vacuum problems of miniaturization of vacuum electronic component: a new • generation of compact photomultipliers, Vacuum V64, P15-31 (2002)). The sealing quality of vacuum devices has a significant impact on the life of the device. Referring to Figure 1, the prior art provides a sealing device 20 for a vacuum device and a method of sealing the vacuum device using the sealing device 20 of the vacuum device. The sealing device 20 of the vacuum device includes a vacuum chamber 202; the front housing chamber 204 and the rear housing chamber 206 are respectively connected to the two ends of the vacuum chamber 202 through the first gate 208 and the second gate 210; The system 214 is in communication with the front accommodating chamber 204 and the rear accommodating chamber 206 and the vacuum chamber 202; at least one transport device 212 is disposed in the vacuum chamber 202, and the transport device 212 can be disposed in the front accommodating chamber 204 and rear. Moving between the accommodating chamber 206 and the vacuum chamber 202; a concentrating sealing device 216 is disposed outside the vacuum chamber 202, and the concentrating sealing device 216 can pass through the transparent hole 218 to the pre-sealing device 220 in the vacuum chamber 202. The exhaust pipe 222 is heat sealed. The method for sealing the pre-sealing device 220 by using the sealing device 20 of the above vacuum device comprises the following steps: providing at least one pre-sealing device 220, the pre-sealing device 220 comprising an exhaust pipe 222; A pre-sealed 1355355 device 220 is placed on the transport device 212 in the front accommodating chamber 204, and the front accommodating chamber 204 is evacuated to make the front accommodating chamber 204 and the vacuum chamber 202 have the same degree of vacuum; the first gate 208 is opened. After the transport device 212 carrying the pre-sealing device 220 is introduced into the vacuum chamber 202, the first gate 208 is closed; after the vacuum chamber 202 is evacuated for a period of time, the pre-sealing device 220 is made one by one from the concentrating and sealing device 216. The pre-sealing device 220 is sealed one by one by the concentrating and sealing device 216, and the vacuum is removed from the rear accommodating chamber 206 to make the vacuum of the rear accommodating chamber 206 and the vacuum chamber 202 the same; The second gate 210 closes the second gate 210 after the sealed pre-sealing device 220 enters the rear housing chamber 206; the sealed pre-sealing device 220 is taken out from the rear housing chamber 206. By repeating the above steps, a continuous sealing of the plurality of pre-sealing devices 220 can be achieved. However, the sealing of the vacuum device by the above device and method has the following disadvantages: First, an exhaust pipe 222 is required to be pre-sealed on the pre-sealing device 220, and the exhaust pipe 222 and the pre-sealing device 220 are sealed. Connection, therefore, the process is more complicated and the cost is higher. Second, the exhaust pipe 222 is used to seal the exhaust, leaving a protruding tail-shaped exhaust pipe on the packaged vacuum device, which threatens the safety and stability of the vacuum device. Third, the gas evolved by the exhaust pipe 222 upon heating enters the pre-sealing device 220, thereby affecting the vacuum of the vacuum device. In addition, the sealing device of the above vacuum device requires a special concentrating sealing device, and the preparation cost is high. In view of the above, it is indeed necessary to provide a sealing device for a vacuum device and a sealing method, which does not require a special concentrating sealing device, and the sealing method can reduce the manufacturing cost, obtain a high vacuum, and is not safe. Hidden vacuum devices. SUMMARY OF THE INVENTION 1355355 "two kinds of vacuum sealing devices, including: a vacuum chamber; a front two to the back of each chamber" and the front and rear housing chambers respectively pass the gate and the first a gate is connected to both ends of the vacuum chamber; a vacuum system is respectively connected with the front housing chamber, the rear housing chamber and the vacuum chamber; and the front chamber can be disposed in the front housing chamber, the vacuum chamber and the rear housing chamber曰 〃 ' 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该The low melting point glass powder furnace is provided with a control component; a first heating device is disposed on the vacuum chamber wall between the input pipe and the second gate. - A sealing method for the vacuum device, comprising the following steps: The (10) point glass material is placed in the low (four) glass secret furnace, and the low melting point glass powder furnace is evacuated (four), and then the low melting point glass powder is heated to a molten state; at least one pre-sealing is provided; Device, the pre-sealed device includes a -shell And a venting hole; placing the at least pre-sealing device on the front accommodating chamber (four) transport device, and vacuuming the front accommodating chamber through the (four) H system; and causing the at least one pre-sealing device to enter the vacuum chamber A certain amount of molten low-melting glass powder is disposed on the vent hole of each pre-sealing device through the lower side of the input pipe, thereby sealing the vent holes of the pre-sealing device one by one, and then solidifying and melting a low-melting glass powder; evacuating the rear valley chamber, and allowing the pre-sealing device to enter the rear housing chamber, and removing the pre-sealing device through the rear housing chamber. Compared with the prior art, The sealing device and the sealing method of the vacuum device provided by the technical solution have the following advantages: First, there is no need to pre-set an exhaust pipe on the pre-sealing device 11 1355.355, and there is no need to subsequently replace the exhaust pipe with the exhaust pipe. The step of sealing the sealing device makes the preparation process simple and the preparation cost is reduced. Secondly, the prepared vacuum device has no protruding tail-shaped exhaust pipe, which improves the safety and stability of the vacuum device. Third, it is not necessary The trachea avoids the gas released when the heating and softening of the exhaust pipe enters the pre-sealing device, thereby improving the vacuum degree of the vacuum device. Fourth, the sealing device of the vacuum device does not require a special concentrating sealing device, so that the manufacturing cost [Embodiment] The sealing device of the vacuum device of the present invention and the sealing method of the vacuum device will be described in detail below with reference to the accompanying drawings. Referring to FIG. 2, the embodiment of the present invention provides a sealing device for a vacuum device. 30. The sealing device 30 of the vacuum device comprises: a vacuum chamber 302; the front receiving chamber 304 and the rear receiving chamber 306 are respectively connected to the two ends of the vacuum chamber 302 through the first gate 312 and the second gate 314; An evacuation system 308 is in communication with the front housing chamber 304, the rear housing chamber 306, and the true air chamber 302; at least one transport device 310 is disposed in the front housing chamber 304, the vacuum chamber 302, and the rear housing chamber Between the movements 306; a temperature-controlled first heating device 336 is disposed in the vacuum chamber 302; a low-melting glass frit furnace 316 is disposed above the vacuum chamber 302, the low-melting glass frit furnace 316 passes an input The conduit 334 is in communication with the vacuum chamber 302. The volume of the vacuum chamber 302 and the front accommodating chamber 304 and the rear accommodating chamber 306 is not limited and can be designed according to actual conditions. The vacuum chamber 302 is used to bake, vent, and seal the pre-sealing device 330. The front housing chamber 304 is used to pre-vacuate the pre-sealing device 330 to ensure a higher degree of vacuum within the vacuum chambers 302 L, / 12 1355355. The rear housing chamber 306 is used to cool the pre-sealing device 330. Moreover, the sealed electronic device can be taken out through the rear accommodating chamber 306 without affecting the normal operation in the vacuum chamber 302. The vacuuming system 308 is a mechanical pump coupled to a molecular pump or a mechanical pump coupled to a condensing pump. Among them, the mechanical pump is used to pump low vacuum, and the molecular pump or condensate pump is used to pump high vacuum.

The transport device 310 is a carrier or other transport device. The transport device 310 can continuously transport a plurality of pre-sealed devices 330 and can transport a plurality of pre-sealed devices 330 at a time. The low-melting glass frit furnace 316 is disposed above the vacuum chamber 302 for loading and heating the low-melting glass frit 340. The low melting glass frit furnace 316 is in communication with the vacuuming system 308 described above (not shown). The low-melting glass frit furnace 316 can be vacuum-sealed after filling the low-melting glass frit 340. The bottom of the low melting glass frit furnace 316 is in communication with the vacuum chamber 302 via an input conduit 334 and the inlet conduit 334 extends into the vacuum chamber 302. A nozzle 322 is formed at one end of the input pipe 334 located inside the vacuum chamber 302. The low-melting glass frit 316 is provided with a control component. The control component can be an air inlet 318 and a suction port 320 at the top of the low-melting glass frit 316, and the air inlet 318 and the air inlet 320 are A first valve 342 and a second valve 344 are respectively disposed. A certain amount of the molten low-melting glass frit 340 can be placed on the exhaust hole 338 of the pre-sealing device 330 by the control member. The specific implementation process is as follows: when the first valve 342 is opened, it passes through the air inlet 318 to the low melting glass frit furnace 316.

13 1355355 is filled with an inert gas such that a certain amount of low-melting glass frit 340 is dropped under pressure through the inlet conduit 334 and its nozzle 322 to the venting opening 338 of the pre-sealing device 330. Then, the first valve 342 is closed while the second valve-gate 344 is opened, and a vacuum is applied through the suction port 320, so that the low-melting glass powder 340 is stopped from dripping. The temperature-controllable first heating device 336 is disposed on the inner wall of the vacuum chamber 302 and is located between the input conduit 334 and the second gate 314 adjacent to the input conduit 334. The I input conduit 334 can be heated by the temperature-controllable first heating means 336 to have the same temperature as the molten state of the low-melting glass frit 340, thereby ensuring that the molten low-melting glass powder 340 can pass through the input. The conduit 334 enters the vacuum chamber 302. Further, in this embodiment, a second temperature control device 346 can be disposed between the first gate 312 and the input pipe 334 on the inner wall of the vacuum chamber 302 for baking the pre-sealing device 330. gas. The first heating device 336 and the second heating device 346 may be a heating wire, an infrared illuminator or a laser illuminator or the like. It can be understood that the temperature control unit 336 and the second heating unit 346 can control the temperature between the first gate 312 and the second gate 314 during use. A first temperature gradient space 324, a second temperature gradient space 326, and a third temperature gradient space 328 are formed. Wherein, the second heating device 346 corresponds to the first temperature gradient space 324 between the first gate 312 and the input pipe 334, the first heating device 336 corresponds to the second temperature gradient space 326 located near the input pipe 334, and the third The temperature gradient space 328 is located between the second temperature gradient space 326 and the second gate 314. 14 1355355 In this embodiment, the division of the temperature gradient space is based on the broken line in Fig. 2. The first temperature gradient space 324 is a medium temperature zone for baking the pre-sealing device 330. The second temperature gradient space 326 is a high temperature zone to ensure that the low melting point glass frit 340 of the smelting state can enter the vacuum chamber 302 through the input conduit 334. The third temperature gradient space 328 is a low temperature region that solidifies the molten low-melting glass frit on the vent 338 of the pre-sealing device 330 to seal the vent 338 of the pre-sealing device 330. Wherein, the temperature of the first temperature gradient space 326 should be the same as the melting temperature of the low melting point glass powder. The temperature ranges of the first temperature gradient space 324, the second temperature gradient space 326, and the third temperature gradient space 328 are related to the softening temperature of the selected low-melting glass frit. In the present embodiment, the softening temperature of the low-melting glass frit is 300 C. The temperature range of the first temperature gradient space 324 is 200~300 C, and the temperature range of the second temperature gradient space 326 is 3〇〇~35〇c. The temperature range of the second temperature gradient space 328 is 5〇~2〇. Look at it. % The sealing device 30 of the vacuum device provided by the embodiment realizes baking, sealing and sealing of the pre-sealing device 33 by the temperature gradient distribution in the vacuum chamber 302, and does not require a special concentrating sealing device to prepare Reduce costs. Referring to FIG. 2 and FIG. 3 , the embodiment of the present invention further provides a method for sealing a vacuum device by using a sealing device 3 of the above vacuum device, which specifically includes the following steps: Step 1: a certain amount of low-melting glass frit The material 340 is placed in the low-melting glass frit furnace 316, and the low-melting glass frit furnace 316 is vacuum-sealed and then the low-melting glass frit 34 is heated to a molten state. 15

The low-melting point glass powder 340 can be any low-refining glass powder. In the process of heating the low-melting glass powder 340, a large amount of gas is discharged, so that during the heating process A further vacuum is required. • In the technical release case, since the gas in the low-melting glass powder 340 is discharged during the process of heating the low-point glass powder 340 to the molten state in the low-melting point glass powder furnace 316, it can be prevented. During the sealing process of the subsequent step, the internal vacuum of the vacuum device device is lowered due to the exhaust of the low-melting glass powder 340. In step two, at least one pre-sealing device 33 is provided. The pre-sealing device 330 includes a housing 332 and a venting opening 338. The material of the housing 332 of the pre-sealing device 330 can be selected from any material that can be sealed by a low-melting glass frit 34 玻璃, such as glass or metal. The size of the pre-sealing device 330 is selected according to actual conditions. The pre-sealing device 330 of this embodiment t is a vacuum electronic device. The housing 332 is glass, and a venting opening 338 is formed in the housing 332. The pre-sealed device 330 further includes other electronic components (not shown) disposed within the housing 332. The diameter of the vent hole 338 is preferably 2 to 1 mm. It can be understood that the vent hole 338 0 aperture should not be too small or too large. A small aperture is not conducive to rapid venting, but too large a hole diameter will affect the stability after sealing. It will be appreciated that the pre-sealing device 33 is not limited to vacuum electronic devices, and any device that requires permanent packaging may be used. In the first step, the pre-sealing device 330 is placed on the transport device 310 in the front accommodating chamber 3〇4, and the front accommodating chamber 3〇4 is evacuated by the vacuuming system 3〇8.

16 1355.355 First, the pre-sealing devices 330 are arranged on the transport device 310 in a predetermined order, and it is ensured that the venting holes 338 of the pre-sealing device 330 are upward. Then, the front accommodating chamber 304 is closed, and the front accommodating chamber 304 is evacuated/vacuum. It can be understood that, in this embodiment, the front housing chamber 304 can be pumped with a low vacuum only by a mechanical pump, or the front housing chamber 304 can be pumped with a low vacuum by a mechanical pump, and then the molecular pump or the condensing pump is used for the front volume. The chamber 304 draws a high vacuum so that the vacuum of the front housing chamber 304 and the vacuum chamber 302 are the same. I step four, the pre-sealing device 330 is entered into the vacuum chamber 302, and the pre-sealing device 330 is sealed one by one. First, the first gate 312 is opened, and after the transport device 310 equipped with the pre-sealing device 330 enters the vacuum chamber 302, the first gate 312 is closed. It can be understood that after the pre-sealing device 330 enters the vacuum chamber 302, the vacuum chamber 302 needs to be further evacuated to ensure that the pre-sealing device 330 can have a higher degree of vacuum. In particular, in the case where there is no pumping of the front housing chamber 304 in the third step, the step of further evacuating the vacuum chamber 302 is more necessary. Next, the transport device 310 incorporating the pre-sealed device 330 is passed through the first temperature gradient space 324. The baking venting of the pre-sealing device 330 is completed during this process. To minimize the gas within the pre-sealing device 330, the transport device 310 incorporating the pre-sealing device 330 can remain in the first temperature gradient space 324 for a period of time. Again, the transport device 310 incorporating the pre-sealed device 330 is passed through the second temperature gradient space 326. 17 1355355 After the end of the exhaust, the pre-sealing device 330 is passed one by one through the nozzle 322 of the input pipe 334. When the exhaust hole 338 of the pre-sealing device 330 reaches below the nozzle 322 of the input pipe 334, the first valve 342 is opened, / the low-melting glass frit furnace 316 is filled with an inert gas through the air inlet 318, thereby making sure The amount of the low-melting glass frit 340 is dropped to the vent 338 of the pre-sealing device 330 through the inlet pipe 334 and its nozzle 322 under pressure, and the vent 338 is sealed. Then, the first valve 342 is closed while the second valve 344 is opened, and the vacuum is drawn through the suction port 320, so that the low-melting-point β-glass powder 340 is stopped from dripping. Finally, the transport device 310 incorporating the pre-sealed device 330 is passed through a third temperature gradient space 328. In this process, since the third temperature gradient space 328 is a low temperature region, the molten glass powder located in the molten state on the vent hole 338 starts to solidify and is sealed. The temperature ranges of the first temperature gradient space 324, the second temperature gradient space 326 | and the third temperature gradient space 328 are related to the softening temperature of the selected low melting point glass frit. In the present embodiment, the softening temperature of the low-melting glass frit is 300 °C. The temperature of the first temperature gradient space 324 ranges from 200 to 300 ° C, the temperature of the second temperature gradient space 326 ranges from 300 to 350 ° C, and the temperature of the third temperature gradient space 328 ranges from 50 to 200 ° C. Step 5: Vacuuming the rear housing chamber 306, and the at least one pre-sealing device 330 enters the rear housing chamber 306, and the pre-sealing device 330 is taken out through the rear housing chamber 306. The process of evacuating the rear accommodating chamber 306 is the same as the step of evacuating the front accommodating chamber 304 18 1355355. When the vacuum of the rear housing chamber 3〇6 is the same as the degree of vacuum in the vacuum chamber, the second shutter 314 is opened. The second transport gate 31 is closed after the transport device 31 of the sealing device 330 is smashed into the rear accommodating chamber. Then, the gas is introduced into the rear accommodating chamber 3〇6, and when the pressure of the gas reaches a high atmospheric pressure, the sealed vacuum device is taken out.

Further, the present embodiment further includes a step of cooling the sealed vacuum device before the sealed vacuum device is taken out. Cooling can be natural cooling or water or air cooling. The sealing method of the vacuum device provided by the technical solution has the following advantages: first, there is no need to pre-set an exhaust pipe on the pre-sealing device, and the step of sealing the exhaust pipe and the pre-sealing device to prepare Process simplification. Secondly, the non-exhaust pipe is sealed, so that the prepared vacuum device has no protruding tail-shaped tube, which improves the safety and stability of the vacuum device. Second, there is no need for a special concentrating sealing device to reduce the manufacturing cost. In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application in this case. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the present invention are intended to be included in the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of a sealing device for a vacuum device of the prior art. Fig. 2 is a schematic structural view of a sealing device for a vacuum device of the present invention. 19 1355355 FIG. The sealing device of the vacuum device seals the flow chart of the vacuum device.

[Description of main components] Vacuum device sealing device 20, 30 Vacuum chamber 202, 302 Front housing chamber 204, 304 Rear housing chamber 206, 306 First gate 208, 312 Second gate 210, 314 Transport device 212, 310 vacuum system 214, 308 concentrating sealing device 216 through light transmission hole 218 pre-sealing device 220, 330 exhaust pipe 222 low melting point glass powder furnace 316 air inlet 318 suction port 320 nozzle 322 first temperature gradient space 324 Second temperature gradient space 326 third temperature gradient space 328 housing 332 input pipe 334 1355355 first heating device 336 vent hole 338 low melting point glass powder 340 first valve 342 - second valve 344 second heating device 346

twenty one

Claims (1)

1355355 X. Patent Application Range 1. A sealing device for a vacuum device includes: a vacuum chamber; - a valley chamber and a rear housing chamber, and the front housing chamber and the rear housing chamber respectively pass through The first gate and the second gate are in communication with the two ends of the vacuum chamber; - the vacuum system is purely connected to the front housing chamber, the rear housing chamber and the vacuum respectively; and, i, at least one transport device is available The movement between the accommodating chamber, the vacuum chamber and the rear accommodating chamber is improved; the improvement of the sealing device of the vacuum device comprises: - the low melting point glass powder is disposed above the material sputum, the listening glass powder = The furnace is connected to the vacuum chamber through the pipeline, and the low melting point glass powder furnace is provided with a control component; the first heating device is disposed on the inner wall of the input pipeline and the second gate. 2. The sealing device for a vacuum device according to claim i, wherein the step further comprises: - the second heating device is on the inner wall of the vacuum chamber between the first gate and the input pipe. 3. The sealing device for a vacuum device according to claim 2, wherein the first heating device and the second heating device define a -first temperature gradient between the first closed door and the second closed door, - a second temperature gradient chamber and a third temperature gradient space, the wall is annoying and the first heating means corresponds to the first temperature gradient space between the first and the input pipeline, the first 22 1355355 The plus, ,, and device correspond to a second temperature located near the input pipe, and the third temperature gradient space is located between the second and the second gates. The (10) degree gradient space and the second illuminator. 4. The vacuum device of claim 4, wherein the first heating device and the second heating device or the laser illuminator. In the case of the sealing device for a vacuum device according to claim 4, in the basin, the reduced-point glass (10) furnace is in communication with the vacuuming system. 6. The sealing device for a vacuum device according to claim 5, wherein the control unit comprises an air inlet and a suction port, and the air inlet, the air outlet and the air suction port are respectively disposed The first trick and the second valve; ', 7. A method for sealing a vacuum device, comprising the following steps: placing a -quantized (10) point glass powder in the (four) point glass frit furnace, and vacuum-sealing the low-melting glass powder furnace And then heating the low-melting glass frit to a molten state; μ providing at least a pre-sealing device 'the pre-sealing device includes a casing and a venting hole; placing the at least pre-sealing device The front housing is disposed in the transportation device in the room, and the front housing chamber is evacuated by the vacuuming system; the transportation device carrying the pre-sealing device is entered into the vacuum chamber, through the lower side of the input pipe, at each pre-sealing a certain amount of molten low-melting point glass powder is disposed on the vent hole of the device to seal the row of the pre-sealing device one by one, and then solidify the molten low-melting glass powder; and 23 1355.355 pairs The rear accommodating chamber performs vacuuming, and the pre-sealing device enters the rear chamber, and the pre-sealing device is taken out through the rear accommodating chamber. 8. The sealing method of the vacuum device according to Item 7, wherein the low-melting glass frit is heated to a molten state, and the low-melting glass frit furnace is evacuated. The sealing method of the vacuum device according to claim 7, wherein the material of the pre-sealing device is glass or metal. 10. A method of sealing a vacuum device according to claim 7 (4), wherein the vent hole of the pre-sealing device has a pore diameter of 2 to 1 mm. 11. The sealing method of a vacuum device according to claim 7, wherein the vacuum chamber is in operation, from the first gate to the second gate, forming a first-temperature gradient space, The second temperature gradient space and the third temperature gradient space, and the first temperature gradient space is a medium temperature region, the first gradient gradient space is a high temperature region, and the third temperature gradient space is a low temperature region.骞12. The sealing method of the vacuum device according to the U.S. Patent Application (IV), wherein the temperature of the first/jath gradient space is the same as the melting temperature of the low-melting glass powder. The method of sealing a vacuum device according to claim 12, wherein the temperature range of the first temperature gradient space is 2〇〇~3〇〇c, and the temperature range of the second temperature gradient space is 3〇〇~35〇.匸, the temperature range of the third temperature gradient space is 50~200. (: The sealing method of the vacuum device according to claim 13 of the patent application scope, wherein, after the pre-sealing device enters the vacuum chamber, the first temperature is passed through a first temperature of 24 1355355 degree gradient space and a second temperature gradient The space and the third temperature gradient space, and the step of placing a certain amount of the molten low-melting glass powder on the exhaust of the pre-sealing device is performed after the pre-sealing device enters the second temperature gradient. 15. The method of sealing a vacuum device according to claim 14, wherein the pre-sealing device is baked by the second heating device when the pre-sealing device passes through the first temperature gradient space. The method of sealing a vacuum device according to claim 7, wherein the pre-sealing device is further cooled, water cooled or winded after entering the rear housing chamber. The sealed vacuum device is cooled by cooling.