A7 1250338 __ B7 _ 五、發明說明（/ ) 【發明說明】 本發明有關一種液晶面板用基板之貼合裝置及貼合方 法，係使用於液晶顯示器(LCD)之液晶面板(panel)之製造 過程中，用來對於兩片液晶面板用之基板於真空中進行對 準(粗對準及微對準)之動作。 尤其是關於一種液晶面板用基板之貼合裝置及貼合方 法，係在上下一對之加壓板上以裝卸自如之方式分別保持 一基板，將該等兩基板於真空中予以疊合，並藉由定位機 構往ΧΥ0方向作相對之調整移動，以進行兩基板之粗對 準及微對準，再將兩基板予以加壓且擠壓至既定之間隙。 習知之此種液晶面板用基板之貼合裝置及貼合方法， 係例如第5圖所示，有一上下方向開閉自如之真空室 (chambeOll，其包圍上下一對之加壓板Γ、2’與例如χγ 工作台等定位機構8之全部，而用來聯繫該定位機構8,與 驅動源8b’間之驅動軸8c’ ，則是藉由例如風箱(bellows)等 真空貫通零件12來穿過真空室11設置而成。 而且，關閉上述真空室11，再使其內部成爲真空之 後，自其外部利用驅動軸8c’使定位機構8’運轉，兩加壓 板Γ、2’會相對地往XY 6»方向調整移動，藉此進行兩基板 A、B之粗對準及微對準。 然而，這種習知之液晶面板用基板之貼合裝置及貼合 方法上，由於自外部驅動傳達而使真空室內之定位機構作 ΧΥ0移動來進行對準，使得驅動軸之真空貫通零件複雜 化。因此，不僅真空室內外之真空遮斷上所花費用大增， 4 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297 it ) 一 ' '~"" (請先閱讀背面之注意事項再填寫本頁) .I I I I ---訂·-------I - A7 1250338 __B7 _ 五、發明說明（2 ) 並因爲密封材料之黏度之故，在粗對準或微對準之動作上 必須相當費力，而對於驅動型態多所限制。 又，真空室爲了包圍上下一對加壓板及整個定位機 構，而使真空的空間變大，增加真空泵之容量，而且可使 用之基板尺寸也有所限制，而無法製造大型基板。 本發明之中，申請專利範圍第1、第2項之發明目的 係僅於兩加壓板之間作成密閉狀態，而在其外部作ΧΥΘ 移動來進行對準。申請專利範圍第3、第4項之發明目 的，係除申請專利範圍第1或第2之發明之目的之外，還 有在剛體製加壓板之任何平坦度或平行精度下，’均可防止 基板間之局部加壓。 申請專利範圍第5項之發明目的，係除申請專利範圍 第2項或第4項之發明目的之外，還有於後製程中以不注 入液晶之方式製作液晶面板。 爲了達成前述目的，本發明當中之申請專利範圍第1 項之發明特徵在於：具有 保持機構(3)，將設於前述兩加壓板（1、2)相對面之基 板(A、B)保持成不可移動； 上下方向可彈性變形之移動密封機構(4)，將兩加壓板 (1、2)相對之周緣部（la、2a)間，維持在密閉狀態下並且支 撐成往XY (9方向可相對地移動； 第一加壓機構（5)，使兩加壓板（1、2)相對地接近移 動，而區劃出一密閉空間（S)以使兩基板(A、B)被包圍在該 等兩加壓板(1、2)之間，並且使兩基板(A、B)接近至既定間 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) ---I----訂· —------· 一 Ϊ250338 A7 ----------B7 ------ 五、發明說明（$ ) 隔； 吸氣機構(6)，抽放上述密閉空間（S)內之氣體以達到既 定之真空度； 第二加壓機構(7)，使藉由上述第一加壓機構(5)而接近 之兩基板(A、B)，得以更接近至被環狀接著劑(c)密閉之位 置；及 定位機構(8)，配置於密閉空間(S)外，用來於上述第一 加壓機構(5)及第二加壓機構(7)之運轉狀態下，使兩加壓板 (1、2)往ΧΥ0方向作相對之調整移動。 申請專利範圍第2項之發明特徵在於依序進行下列步 驟： 在前述兩加壓板（1、2)之兩相對面上將兩片基板(A、B) 保持成不可移動； 藉由該等兩加壓板（1、2)之接近移動，利用上下方向 可彈性變形之移動密封機構(4)將兩相對的周緣部（la、2a) 之間，予以封閉而區劃出包圍兩基板(A、B)之密閉空間 (S)，並且使該密閉空間（S)內之兩基板(A、B)接近至既定間 隔； 邊抽出該密閉空間（S)內之空氣，邊使兩加壓板（1、2) 往ΧΥ0方向作相對之調整移動，以進行兩基板(A、B)之 粗對準； 該密閉空間（S)內達到既定之真空度後，再使上述移動 密封機構(4)，產生變形並且進一步接近至兩基板(A、B)之 間被環狀接著劑(C)封閉之位置上； 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 1250338 A7 _ ______________ B7 和1111 111 1 1 --------- - -------- -- - - --------------- __ 五、發明說明（# ) 使上述兩加壓板（1、2)往ΧΥ0方向作相對之調整移 動，再對已接近之兩基板(A、B)進行微對準；及 (請先閱讀背面之注意事項再填寫本頁) 將一片基板(A、B)從上述加壓板（1、2)兩者之一上予 以放開，使上述密閉空間（S)內恢復至大氣壓力，藉由兩基 板(A、B)內外所產生之氣壓差而均勻地擠壓至既定之間 隙。 申請專利範圍第3項之發明特徵在於申請專利範圍第 1項之發明構成，其中前述第二加壓機構(7)包含： 僅上下方向可彈性變形之可撓性板材(7b)，閉塞形成 於一加壓板（1)相對面中央之凹部（lb)，並且保持一基板(A) 不可移動；及 加壓部(7c)，抽放被該可撓性薄板材(7b)所閉塞之凹部 (lb)內氣體，使微對準時之可撓性薄板材(7b)變形而向另一 基板(B)膨出。 申請專利範圍第4項之發明特徵在於有申請專利範圍 第2項之發明構成而且具有下列步驟： 在僅上下方向可彈性變形之可撓性薄板材(閉塞形成於 前述一加壓板（1)相對面中央之凹部（lb)) (7b)上，保持一基 板(A)不可移動； 使上述閉塞凹部（lb)之內壓與密閉空間（S)之內壓均相 同，以進行粗對準；及 該粗對準之後，密閉空間（S)內達到既定之真空度後， 利用上述閉塞凹部（lb)之內壓上升而使可撓性薄板材(7b)變 形膨出，以使保持於可撓性薄板材(7b)上之一基板(A)再向 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 1250338 ___B7 _ 五、發明說明（t ) 另一基板(B)接近移動。 申請專利範圍第5項之發明特徵在於申請專利範圍第 2或第4項之發明構成，而且進行前述粗對準之前，於兩 基板之間注入適當量之液晶。 申請專利範圍第1、第2項之發明，係藉由保持有兩 片基板之加壓板之接近移動，並利用移動密封機構來封閉 彼此周緣部之間而區劃出密閉空間，並且使該兩基板接近 至既定間隔之後，邊抽出該密閉空間內之空氣，邊使用加 壓板往ΧΥ0方向作相對之調整移動以進行兩基板之粗對 準之動作，當達到既定之真空度後，則使上述移動密封機 構產生變形並且進一步接近至兩基板之間被環狀接著劑封 閉之位置上，在此狀態下，使上述兩加壓板往ΧΥ0方向 作相對之調整移動以進行兩基板之微對準，然後僅從上述 加壓板兩者之一上放開基板，使上述密閉空間內恢復至大 氣壓力，藉由兩基板內外所產生之氣壓差而均勻地擠壓至 既定之間隙。 申請專利範圍第3、第4項之發明，係除了申請專利 範圍第1項之發明構成之外，並且前述第二加壓機構，係 包含僅上下方向可彈性變形之可撓性薄板材，閉塞形成於 一加壓板相對面中央之凹部，並且保持一基板不可移動； 及加壓部，抽放被該可撓性薄板材所閉塞之凹部內氣體’ 使微對準時之可撓性薄板材變形而向另一基板膨出；或者 是除了申請專利範圍第2項之發明構成之外，並具有下列 步驟： 8 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) --------訂---------線 A7 1250338 ___ B7____ 五、發明說明（（） 在僅上下方向可彈性變形之可撓性薄板材(閉塞形成於 前述一加壓板（1)相對面中央之凹部（lb)) (7b)上，保持一基 板(A)不可移動； 使上述閉塞凹部（lb)之內壓與密閉空間（S)之內壓均相 同，以進行粗對準；及 該粗對準之後，密閉空間(S)內達到既定之真空度後， 利用上述閉塞凹部（lb)之內壓上升而使可撓性薄板材(7b)變 形膨出，以使保持於可撓性薄板材(7b)上之一基板(A)再向 另一基板(B)接近移動，因此，進行粗對準之後，可撓性薄 板材由於閉塞凹部之內壓上升而變形膨出，使保持於可撓 性薄板材之一基板再向另一基板接近，且利用環狀接著劑 C使兩者之間形成密閉狀態，使得該兩基板於微對準時， 會均勻地受擠壓至最終之間隙。 申請專利範圍第5項之發明，係除了申請專利範圍第 2或第4項之發明構成之外，而且在進行前述粗對準之 前，於兩基板之間住入適當量之液晶，因此，藉著讓密閉 空間內之空氣恢復至大氣壓力，並利用兩基板內外所產生 之氣壓差，使兩基板受均勻地擠壓，而能於封有液晶之狀 態下形成既定之間隙。 以下，根據圖式說明本發明之實施例。 該實施例係如第1圖〜第2圖所示，上方之加壓板1 係一上定盤(surface plate)，其受支撐成可在上下方向往復 運動而不可往ΧΥ0方向移動，而下方之加壓板2則爲一 受支撐於固定台板9上之下定盤，其藉由例如XY工作台 9 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) · I I-----訂—丨-------' 1250338 B7 五、發明說明（1 ) (請先閱讀背面之注意事項再填寫本頁) 等定位機構8可往ΧΥ0方向作調整移動；將吸附保持於 該上定盤1及下定盤2兩相對面上之兩片玻璃製基板A、 B，在真空環境中予以對準者。 上定盤1及下定盤2，係由例如金屬、碳等剛體所構 成，在該相對面之中央部位穿設有複數個吸引孔，以作爲 保持兩基板A、B於不可移動狀態之保持手段3，而該吸引 孔3與例如真空泵等吸引源(未圖示)之間用配管予以相連。 該吸引源，係其動作受控制器（未圖式）所控制，吸引 動作於安裝兩基板A、B之初期狀態下隨即開始，而於兩 基板A、B之微對準後解除兩基板中一邊之吸引動作，在 本實施例中是解除上方基板A之吸引，於後述密閉空間S 恢復至大氣壓力後，再解除下方基板B之吸引而恢復至初 期狀態。 該基板A、B，係例如由形成有所望圖案(pattern)之濾 色器(color filter)與TFT基板所構成，在兩相對面之一面， 圖示例的情形爲沿下方基板B之周緣部塗佈成筐狀之環狀 接著劑C，並因按需要在另一基板上散佈多個之隔離物 (spacer)(未圖示）。 此外，在上定盤1之周緣部la與下定盤2之周緣部 2a之間環狀設置包圍兩基板a、B之移動密封機構4，以 在維持此兩者間之密閉狀態下把兩基板支撐成往ΧΥΘ方 向可相對地移動自如。 在本實施例之情形，該移動密封機構4，係包含：移 動區塊4a，配合上定盤1及下定盤2之平面形狀所形成之 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 1250338 五、發明說明（《） 截面圓形或矩形；上下方向可彈性變形之環狀密封材4b， 裝設於此移動區塊4a上面，會接觸或離開上定盤1之周緣 部la，例如〇形環等；驅動真空密封材4c，裝設於移動 區塊4a下面，一直接觸下定盤2之周緣部2a，並按需要 會使用例如真空潤滑油脂(grease);及荷重承載球4d，用 來支撐者，以免上定盤1、移動區塊4a之重量等力量作用 於該驅動真空密封材4c。 尤其是按需要，爲了使該上定盤1及移動區塊4a往 ΧΥ0方向連結成一體，故自上定盤1到移動區塊4a之間 穿過複數支連結銷4e，而使上下方向可往復運動而XY <9 方向不能移動爲佳，此外，爲了防止移動區塊4a與下定盤 2在上下方向彼此分離，故在兩者之間最好架設例如拉伸 彈簧等彈性材料4f爲佳。 而且，上定盤1係成排地設有如第1圖元件符號5所 示之例如由上下驅動用壓缸等所構成之第一加壓機構。 此第一加壓機構5，係其動作被控制器(未圖示）所控 制，並於安裝基板A、B前之初期狀態下，使第1圖之一 點鎖線及第2圖(a)所示之上定盤1在上限位置待機’於安 裝好基板A、B之後，如第1圖之實線及第2圖(b)所示， 將上定盤1予以下降而於上定盤1與下定盤2之間區劃出 一包圍兩基板A、B之密閉空間S，於兩基板A、B之微對 準結束後，或後述密閉空間S恢復至大氣壓力之後’才上 升而恢復至初期狀態。 此密閉空間S設有吸氣機構，此吸氣機構係與配設於 11 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 1250338 五、發明說明（？） 第1圖元件符號6所示之外部例如真空泵相連，以抽放該 密閉空間S內之氣體(本實施例中之氣體爲空氣），以達成 既定之真空度。 此吸氣機構6，係其動作受控制器(未圖示)所控制，藉 由上定盤1及下定盤2之接近移動而形成密閉空間S之 後，由密閉空間S開始吸出空氣，當兩基板A、B之微對 準結束後，對於密閉空間S供應空氣使之恢復至大氣壓 力。 又，設有第二加壓機構7，用來使藉由前述第1加壓 機構5而已接近之兩基板A、B，再接近至兩基板A、B間 被環狀接著劑C所封閉之位置上。 此第二加壓機構7，在本實施例的情形，係由上下方 向伸縮自如之壓缸7a構成，配設於自前述移動區塊4a上 面到上定盤1之周緣部la，讓圓筒7a往上下方向縮短， 使前述環狀密封材4b往上下方向壓縮變形，兩基板A、B 藉此更加受壓。 另外，此第二加壓機構7，係其動作被控制器(未圖示) 所控制，於初期狀態，如第2圖(a)所示往上下方向伸長， 於兩基板A、B之粗對準結束後’會如第2圖(c)所示縮 短，而兩基板A、B之微對準結束後’或者是後述之密閉 空間S恢復至大氣壓力之後，會上升而恢復至初期狀態。 而且，在作爲前述密閉空間S外側之下定盤2之底面 成排地設有，由例如χγ工作台8a ’以及往χγ0方向驅 動下定盤2所用之驅動源8b等所構成之定位機構8 ’並根 12 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ——.---------0^--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 1250338 B7 五、發明說明（，。） (請先閱讀背面之注意事項再填寫本頁) 據把兩基板A、B上之標記(mark)由檢查機構（由顯微鏡及 攝影機構成)8c所輸出之資料來使驅動源8b運轉，據此下 定盤2及保持於此之下方基板B會往ΧΥ0方向調整移 動，而進行粗對準及微對準。 此外，又因應於需求，在抵接於兩基板A、B(位於前 述上定盤1及下定盤2之相對面上)之中央部份也可配設一 緩衝材10，該緩衝材10之材質須有良好緩衝性，而且其 厚度須以上述定位機構8往ΧΥ0方向作調整移動之際不 會發生位移爲佳。 圖式例之情形，係僅於下定盤2之相對面2b，設置數 mm厚之緩衝材1〇，但並不限定於此，亦可設置緩衝材10 於上定盤1及下定盤2之相對面兩者或僅有上定盤1之相 對面。 其次，依照製程順序說明上述液晶面板用基板之貼合 方法。 首先，如第2圖(a)所示，在上定盤1及下定盤2之相 對面，分別預先對準基板A、B並加以安裝。 據此，兩基板A、B分別爲被保持機構3所吸附保持 成不可移動之狀態。 然後，藉由第一加壓機構5之運轉而使第2圖(b)所示 之上定盤1及下定盤2相互靠近，上定盤1之周緣部la會 密接於環狀密封材4b，並於上定盤1與下定盤2之間區劃 出密閉空間S，包圍被保持著的兩基板A、B。 同時’兩基板A、B，係藉由上定盤1與下定盤2之接 13 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公t ) A7 1250338 五、發明說明（I丨） 近移動而接近至既定間隔，並於該狀態下保持1mm以下之 間隙而彼此相對。 又，塗佈於一基板B之環狀接著劑C，係不接觸另一 基板，而連通此兩基板A、B之間與密閉空間S ° 然後，藉由吸氣機構6之運轉而自密閉空間S抽出空 氣，當達到既定之真空度時，兩基板A、B之間也同樣地 被抽出空氣而達到真空狀態。 在此狀態下，藉由定位機構8之運轉使上定盤1與下 定盤2往ΧΥ0方向作相對之調整移動，以進行兩基板A、 B之粗對準。 、 而且，當達到既定真空度之後，則藉由第二加壓機構 7之運轉使第2圖(C)所示之上定盤1與下定盤2更爲接 近，讓環狀密封材4b壓縮變形，據此兩基板A、B即更加 接近，且另一基板A會密接於塗佈在一基板B之環狀接著 劑C，使兩者間形成密閉之狀態。 在此狀態下，藉由定位機構8之運轉使上定盤1與下 定盤2往ΧΥ0方向作相對之調整移動，以進行兩基板A、 B之微對準。 然後，藉由如第2圖(d)所示之保持機構3之運轉，僅 自上定盤1解除上方基板A之吸附，並藉由吸氣機構6之 運轉而注入空氣至密閉空間S內，而使S內之空氣恢復至 大氣壓力。 據此，利用兩基板A、B之內外所產生之氣壓差作均 勻地擠壓，而形成既成之間隙。 14 ί紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) " ~ * ------------· I I I----訂---------I (請先閱讀背面之注意事項再填寫本頁) A7 1250338 _ B7____ 五、發明說明（A) 此時，在粗對準之前，實際上在安裝兩基板A、B 時，若於適當狀態下封入適當量之液晶，使密閉空間S內 之空氣恢復至大氣壓力，藉以利用兩基板A、B之內外所 產生之氣壓差作均勻地擠壓，則能在封入液晶之狀態下形 成既定之間隙，因此，於後製程中無須注入液晶就能製造 出液晶面板。 此後，當密閉空間S內恢復至大氣壓力，則藉由第一 加壓機構5之運轉而分離上定盤1與下定盤2，打開密閉 空間S，並取出完成對準之兩基板A、B，再重覆上述之動 作。 因此，在上定盤1及下定盤2之間爲密閉狀態下，即 可於其外部作XY <9移動來進行對準。 其結果，即可將定位機構8、其驅動源8b等設置於大 氣中，而能使用一般零件，也不須真空貫通零件，因此， 可使構造簡單化，而不須花費在真空遮斷上，又因爲無須 費相當的力來進行粗對準或微對準之動作，故驅動型態變 得沒有限制。 此外，將所需之真空空間做成最小，而只需較小容量 之真空泵容量即足夠，故即使是大型基板亦能以高生產性 來製造。 又，因應於需求，若於前述上定盤1及下定盤2之相 對面之兩者之一或兩者，配設一緩衝材10(有良好緩衝性且 往ΧΥ0方向作調整移動之際不會產生位移)之情形下，可 防止上定盤1及下定盤2之單邊接觸，而易於形成均勻的 15 (請先閱讀背面之注意事項再填寫本頁) — --------訂---------線- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1250338 A7 _____B7____ 五、發明說明（β ) 間隙。 此外，第3圖及第4圖所示者，係本發明之另一實施 例。_述弟—*加壓機構7爲上下方向伸縮自如之圓筒7a(自 移動區塊4a上面往上定盤1之周緣部ia方向配設）。本實 施例不用該圓筒7a，而是使用包含僅可作上下方向彈性變 形之可撓性薄板材7b ;及加壓部7C之構成，該可撓性薄 板材7b，係閉塞形成於上定盤1之相對面中央之凹部lb， 亦保持上方基板A爲不可移動，而該加壓部7c，係抽出/ 送入被該可撓性薄板材7所閉塞之凹部lb內之氣體以進行 微對準時，用來使該可撓性薄板材7b產生變形並向下方基 板B膨出。本實施例之上述構成係和前述第1圖及第2圖 所示之實施例不同，其他構成均與第1圖及第2圖所示之 實施例相同。 上述可撓性薄板材7b，係例如不銹鋼等金屬製薄片 (film)等，其在上下方向可彈性變形而在χΥ0方向不能變 形，其中央部位是作爲保持機構3，穿設有複數個吸引 孔。 上述加壓部7c，係其動作受控制器(未圖示)所控制， 在達到於第4圖(a)所示之上述狀態及第4圖(b)所示之粗對 準之前都一直抽出/送入空氣，以使閉塞凹部lb之內壓與 吸氣機構6所造成之密閉空間S之內壓成爲相同，而僅於 粗對準後才注入空氣以使第4圖(c)所示之閉塞凹部lb之內 壓較密閉空間S之內壓爲大。 因此，第3圖及第4圖所示者，係於粗對準之後，如 16 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------------訂--------_ (請先閱讀背面之注意事項再填寫本頁) A7 1250338 五、發明說明（4 ) 第4圖(c)所示，因閉塞凹部lb之內壓上升而使得可撓性薄 板材7b膨出變形，使其所保持之上方基板A更接近下方 基板B，並藉由環狀接著劑C使兩者間形成密閉狀態’據 此，該兩基板A、B進行微對準時得以均勻地擠壓而接近 至最終間隙。 其結果，相較於前述第1圖及第2圖所示之實施例’ 其剛體製之上定盤1及下定盤2由於相對面之平坦度、定 盤間之平行精度，而容易導致基板A、B之間之局部加 壓，而在本實施例之情形，具有能完全防止該基板A、B 之間之局部加壓而不會損傷製品之優點。 此外，前述實施例中，上方之加壓板1爲上下方向往 復移動自如之上定盤，而下方之加壓板2爲受支撐成往 ΧΥΘ方向調整移動自如之下定盤，但其構成並不限定於 此，也可與此相反，變成受支撐成往XY 6>方向調整移動 自如之上定盤，以及受支撐成往上下方向往復移動自如之 下定盤。 另外，雖實施例中顯示是在真空環境中進行對準，但 並不限定於此，也可在特殊氣體環境中對準。 又，基板A、B之保持機構3、移動密封機構4、第一 加壓機構5、吸氣機構6、第二加壓機構7以及定位機構 8，均不限定於圖示之構造，只要是具有同樣作用之構造都 可使用。 尤其是保持基板A、B爲不可移動之狀態之保持機構3 上，若吸氣機構6所造成之密閉空間s內之真空度爲低真 17 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公1 ) --------------------^--------- (請先閱讀背面之注意事項再填寫本頁) A7 1250338 五、發明說明（σ ) 空時，則可使用利用真空差之真空吸附，但當密閉空間S 內爲高真空時而無法利用真空差之真空吸附時，保持機構 3就須藉由靜電夾頭或粘著薄片來保持基板A、B爲不可移 動之狀態。 此外，亦可使用磁性流體式真空密封材以取代移動密 封機構4之驅動真空密封材4c。 如以上之說明，本發明當中之申請專利範圍第1、第2 項之發明，係藉由保持有兩片基板之加壓板之接近移動， 並利用移動密封機構來封閉彼此的周緣部之間而區劃出密 閉空間，並且使兩基板接近至既定間隔，然後邊抽出該密 閉空間內之空氣，邊使兩加壓板往ΧΥΘ方向作相對之調 整移動以進行兩基板之粗對準，當達到既定之真空度後， 使上述移動密封機構產生變形並進一步接近至兩基板之間 被環狀接著劑封閉之位置上，於此狀態下，使上述兩加壓 板往ΧΥ0方向作相對之調整移動以進行兩基板之微對 準，然後，僅自上述加壓板兩者之一上放開基板，使上述 密閉空間內恢復至大氣壓力，藉由兩基板內外所產生之氣 壓差而均勻地擠壓至既定之間隙，因此，可於僅兩加壓板 之間爲密閉之狀態下，於其外部即可作ΧΥ0移動來進行 對準。 因此，相較於藉由來自外部的驅動傳達來使真空室內 之定位機構作ΧΥ0移動以進行對準之習知技術，本發明 可於大氣中設置定位機構或其驅動源等而可使用一般的零 件，並且無須真空貫通零件，而可使構造簡單化，而且無 18 本紙張尺度適用中國國家標準（CNS)A4規格（210>< 297公釐） (請先閱讀背面之注意事項再填寫本頁) ----訂---------線一 A7 1250338 五、發明說明（β ) 須花費在真空遮斷上，在粗對準或微對準上也不費力，故 驅動型態上並無限制。 又，讓需要真空之空間爲最小，故只需小容量的真空 泵，因此即使是大型基板亦能以高生產性製造出來。 申請專利範圍第3、第4項之發明功效，係除了申請 專利範圍第1或第2項之發明功效外，還有，於粗對準之 後，利用閉塞凹部之內壓上升而使可撓性薄板材變形膨 出，以使保持於可撓性薄板材上之一基板再向另一基板接 近，並利用環狀接著劑C使兩者間形成密閉狀態，藉此使 得該等兩基板於微對準時會均勻地受擠壓而接近至最終之 間隙，故在剛體製加壓板之任何平坦度或平行精度下，均 可防止基板間之局部加壓。 因此，雖剛體製之加壓板由於相對面之平坦度或定盤 間之平行精度之不同而容易在基板之間產生局部加壓，但 本發明能完全防止這些基板間所產生之局部加壓而不會使 製品不良。 申請專利範圍第5項之發明，係除了有申請專利範圍 第2或第4項之發明功效外，還有，藉著使密閉空間內之 空氣恢復至大氣壓力，使兩基板因兩基板內外所產生之氣 壓差而受均勻地擠壓，而可於封入有液晶之狀態下形成既 定之間隙，故於後製程中無須再注入液晶即可製作液晶面 板。 【圖式之簡單說明】 19 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) --------訂--------線 ' A7 1250338 五、發明說明（17 ) 第1圖，係表示本發明一實施例之液晶面板用基板之 貼合裝置之前視縱向剖面圖。 第2圖(a)〜(d)，係依製程之順序來表示液晶面板製造 方法之說明圖。 第3圖，係表示本發明另一實施例之液晶面板用基板 之貼合裝置之前視縱向剖面圖。 第4圖(a)〜(d)，係依製程之順序來表示液晶面板製造 方法之說明圖。 第5圖，係表示習知之液晶面板用基板之貼合裝置之 一例之前視縱向剖面圖。 【符號說明】 --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) A、B 基板 C 環狀接著劑 S 密閉空間 1 加壓板(上定盤) la 周緣部 lb 凹部 2 加壓板(下定盤) 2a 周緣部 3 保持機構 4 移動密封機構 5 第一加壓機構 6 吸氣機構 20 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） A7 1250338 _B7 五、發明說明（/§ ) 7 第二加壓機構 7b 可撓性薄板材 7c 加壓部 8 定位機構 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）A7 1250338 __ B7 _ V. OBJECT OF THE INVENTION The present invention relates to a bonding apparatus and a bonding method for a substrate for a liquid crystal panel, which are used in a manufacturing process of a liquid crystal panel of a liquid crystal display (LCD). The operation for aligning (thick alignment and micro-alignment) of a substrate for two liquid crystal panels in a vacuum. In particular, a bonding apparatus and a bonding method for a substrate for a liquid crystal panel are respectively detachably held on a pair of upper and lower pressure plates, and the two substrates are stacked in a vacuum, and The relative positioning movement is performed in the ΧΥ0 direction by the positioning mechanism to perform coarse alignment and micro-alignment of the two substrates, and then the two substrates are pressed and pressed to a predetermined gap. A bonding apparatus and a bonding method for a substrate for a liquid crystal panel of the related art are, for example, a vacuum chamber that opens and closes in a vertical direction as shown in FIG. 5, which surrounds a pair of upper and lower pressure plates Γ, 2' and For example, all of the positioning mechanisms 8 such as the χ gamma table, and the drive shaft 8c' for contacting the positioning mechanism 8 and the driving source 8b' are passed through the vacuum through part 12 such as a bellows. The vacuum chamber 11 is provided. Further, after the vacuum chamber 11 is closed and the inside thereof is vacuumed, the positioning mechanism 8' is operated from the outside by the drive shaft 8c', and the two pressure plates Γ, 2' are relatively moved toward each other. The XY 6» direction adjustment movement is performed to perform coarse alignment and micro alignment of the two substrates A and B. However, the bonding device and the bonding method of the conventional liquid crystal panel substrate are transmitted from the external driving. The positioning mechanism in the vacuum chamber is moved by ΧΥ0 to align, so that the vacuum through parts of the drive shaft are complicated. Therefore, not only the cost of vacuum interrupting inside and outside the vacuum chamber is greatly increased, 4 the paper scale is applicable to the Chinese national standard ( CNS)A4 specification (210 X 297 it ) A ' '~"" (Please read the note on the back and fill out this page) .IIII ---订·-------I - A7 1250338 __B7 _ V. Inventive Note (2) Because of the viscosity of the sealing material, it must be quite laborious in the operation of rough alignment or micro-alignment, and there are many restrictions on the driving type. The pressure plate and the entire positioning mechanism increase the space of the vacuum, increase the capacity of the vacuum pump, and the size of the substrate that can be used is also limited, and it is impossible to manufacture a large substrate. In the present invention, the patent scope is first and second. The object of the invention is to make a sealed state only between the two pressure plates, and to perform alignment by moving the outside of the two pressure plates. The object of the inventions of claims 3 and 4 is in addition to the patent application scope 1 or In addition to the purpose of the second invention, it is also possible to prevent partial pressurization between the substrates under any flatness or parallel precision of the rigid plate of the rigid system. The object of the invention of claim 5 is to apply for Invention of the second or fourth patent range In addition, in the post-process, a liquid crystal panel is produced by not injecting liquid crystal. In order to achieve the above object, the invention of claim 1 of the present invention is characterized in that it has a holding mechanism (3) which will be provided in The substrates (A, B) on the opposite sides of the two pressing plates (1, 2) are kept immovable; the movable sealing mechanism (4) which is elastically deformable in the up and down direction, and the peripheral edges of the two pressing plates (1, 2) Between the parts (la, 2a), it is maintained in a sealed state and supported in the XY direction (the 9 directions are relatively movable; the first pressing mechanism (5) causes the two pressure plates (1, 2) to relatively move, And a sealed space (S) is partitioned so that the two substrates (A, B) are enclosed between the two pressing plates (1, 2), and the two substrates (A, B) are brought close to a predetermined interval of 5 The paper scale applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the notes on the back and fill out this page) ---I----订··------· Ϊ250338 A7 ----------B7 ------ V. Invention Description ($) Separation; Suction mechanism (6), pumping the gas in the above confined space (S) to achieve the established a second pressurizing mechanism (7) that brings the two substrates (A, B) approached by the first pressurizing mechanism (5) closer to the position sealed by the annular adhesive (c) And a positioning mechanism (8) disposed outside the sealed space (S) for use in the operating state of the first pressurizing mechanism (5) and the second pressurizing mechanism (7) to cause two pressure plates (1) 2) Make relative adjustment movements in the direction of ΧΥ0. The invention of claim 2 is characterized in that the following steps are performed in sequence: the two substrates (A, B) are kept immovable on opposite sides of the two pressing plates (1, 2); The two pressing plates (1, 2) are moved close to each other, and the two opposite peripheral portions (la, 2a) are closed by a moving sealing mechanism (4) which is elastically deformable in the up-and-down direction to partition the two substrates (A) a sealed space (S) of B), and bringing the two substrates (A, B) in the sealed space (S) close to a predetermined interval; while extracting the air in the sealed space (S), and causing the two pressure plates (1, 2) making relative adjustment movements in the direction of ΧΥ0 to perform coarse alignment of the two substrates (A, B); after the predetermined vacuum degree is reached in the sealed space (S), the moving sealing mechanism is further enabled (4) ), deformed and further approached to the position where the two substrates (A, B) are closed by the annular adhesive (C); 6 This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -------------------- Order --------- line (please read the note on the back and fill out this page) 1250338 A7 _ _____ _________ B7 and 1111 111 1 1 --------- - -------- -- - - --------------- __ V. Description of invention ( #) Make the above two pressure plates (1, 2) move relative to each other in the direction of ΧΥ0, and then micro-align the two substrates (A, B) that are close to each other; and (please read the precautions on the back before filling in This page is to release one of the substrates (A, B) from one of the above-mentioned pressure plates (1, 2) to restore the inside of the sealed space (S) to atmospheric pressure by means of two substrates (A, B) The air pressure difference generated inside and outside is uniformly squeezed to a predetermined gap. The invention of claim 3 is characterized in that the second pressurizing mechanism (7) comprises: a flexible sheet material (7b) elastically deformable only in the up-and-down direction, and the occlusion is formed in the invention. a pressing plate (1) opposite to the center of the concave portion (lb), and holding a substrate (A) is immovable; and a pressing portion (7c) for drawing a recess closed by the flexible thin plate (7b) (lb) The internal gas deforms the flexible thin plate material (7b) at the time of micro-alignment and bulges toward the other substrate (B). The invention of claim 4 is characterized in that it has the invention of claim 2 and has the following steps: a flexible sheet which is elastically deformable only in the up and down direction (occlusion is formed in the aforementioned pressure plate (1) The substrate (A) is kept immovable in the recess (lb) (7b) at the center of the opposite surface; the internal pressure of the occluding recess (lb) and the internal pressure of the sealed space (S) are the same for coarse alignment After the rough alignment, after the predetermined vacuum degree is reached in the sealed space (S), the flexible thin plate (7b) is deformed and bulged by the internal pressure of the occluding recess (lb) to be retained. One of the substrates (A) on the flexible sheet (7b) is applied to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) to 7 paper scales. A7 1250338 ___B7 _ V. Invention Description (t) Another The substrate (B) is moving closer. The invention of claim 5 is characterized by the constitution of the invention of claim 2 or 4, and an appropriate amount of liquid crystal is injected between the two substrates before the rough alignment is performed. The invention of the first and second aspects of the patent application is to form a closed space by closing the pressing plates of the two substrates and closing the peripheral portions between the two by using a moving sealing mechanism, and making the two After the substrate is approached to a predetermined interval, the air in the sealed space is extracted, and the pressing plate is used to perform relative adjustment movement in the ΧΥ0 direction to perform coarse alignment of the two substrates. When the predetermined vacuum degree is reached, The moving sealing mechanism is deformed and further approaches to a position where the two substrates are closed by the annular adhesive. In this state, the two pressing plates are relatively moved in the ΧΥ0 direction to perform the micro-pairing of the two substrates. Then, the substrate is released from only one of the pressure plates, and the inside of the sealed space is returned to atmospheric pressure, and is uniformly pressed to a predetermined gap by the difference in air pressure generated between the inside and the outside of the substrate. The invention of claims 3 and 4 is in addition to the inventive constitution of the first application of the patent scope, and the second pressurizing mechanism includes a flexible thin plate which is elastically deformable only in the up and down direction, and is occluded. a concave portion formed at a center of an opposite surface of a pressing plate, and holding a substrate immovable; and a pressing portion for drawing a gas in the concave portion occluded by the flexible thin plate to make the flexible thin plate when micro-aligned Deformation to bulge to another substrate; or in addition to the inventive composition of claim 2, with the following steps: 8 This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ( Please read the notes on the back and fill out this page.) --------Book --------- Line A7 1250338 ___ B7____ V. Description of the invention (() can be elastically deformed only in the up and down direction a flexible thin plate (blocked on the concave portion (lb) at the center of the opposite surface of the pressing plate (1)) (7b), keeping a substrate (A) immovable; and pressing the inside of the blocking recess (lb) Same as the internal pressure of the confined space (S) for coarse alignment After the rough alignment, after the predetermined vacuum degree is reached in the sealed space (S), the flexible thin plate material (7b) is deformed and bulged by the internal pressure of the closing recessed portion (lb) to be retained. One of the substrates (A) on the flexible thin plate (7b) moves closer to the other substrate (B). Therefore, after the coarse alignment is performed, the flexible thin plate is deformed and bulged due to an increase in the internal pressure of the clogging recess. The substrate held on one of the flexible thin plates is further approached to the other substrate, and the annular adhesive C is used to form a sealed state therebetween, so that the two substrates are uniformly squeezed when being micro-aligned. The final gap. The invention of claim 5 is in addition to the inventive composition of the second or fourth aspect of the patent application, and an appropriate amount of liquid crystal is placed between the two substrates before the coarse alignment is performed. Therefore, by returning the air in the confined space to atmospheric pressure and utilizing the difference in air pressure generated between the inside and the outside of the two substrates, the two substrates are uniformly pressed, and a predetermined gap can be formed in a state in which the liquid crystal is sealed. Hereinafter, the present description is based on the schema The embodiment is as shown in Figs. 1 to 2, and the upper pressing plate 1 is a surface plate supported to reciprocate in the up and down direction and not to the direction of 0. Moving, and the pressing plate 2 below is supported by a fixed platen on the fixed platen 9, which is applied to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) by, for example, an XY table 9 (Please read the notes on the back and fill out this page) · I I-----Book-丨-------' 1250338 B7 V. Inventions (1) (Please read the notes on the back first) Fill in this page again) The positioning mechanism 8 can be adjusted and moved in the ΧΥ0 direction; the two glass substrates A and B which are adsorbed and held on the opposite faces of the upper fixed plate 1 and the lower fixed plate 2 are placed in a vacuum environment. Prospective. The upper fixed plate 1 and the lower fixed plate 2 are formed of a rigid body such as metal or carbon, and a plurality of suction holes are formed in a central portion of the opposite surface as a means for holding the two substrates A and B in an immovable state. 3. The suction hole 3 is connected to a suction source (not shown) such as a vacuum pump by a pipe. The attraction source is controlled by a controller (not shown), and the attraction operation starts immediately after the initial mounting of the two substrates A and B, and the two substrates are released after micro-alignment of the two substrates A and B. In the present embodiment, the suction of the upper substrate A is released, and after the sealed space S is restored to the atmospheric pressure, the suction of the lower substrate B is released, and the initial state is restored. The substrates A and B are formed, for example, by a color filter forming a pattern and a TFT substrate, on one of the opposite faces, and the example of the example is along the periphery of the lower substrate B. The ring-shaped adhesive C is applied in a basket shape, and a plurality of spacers (not shown) are spread on the other substrate as needed. Further, a moving sealing mechanism 4 that surrounds the two substrates a and B is annularly disposed between the peripheral edge portion 1a of the upper fixed plate 1 and the peripheral edge portion 2a of the lower fixed plate 2 to hold the two substrates in a sealed state therebetween. The support can be moved relatively freely in the direction of the forward direction. In the case of the embodiment, the moving sealing mechanism 4 comprises: a moving block 4a, and the paper size formed by the planar shape of the upper fixed plate 1 and the lower fixed plate 2 is applicable to the Chinese National Standard (CNS) A4 specification ( 210 X 297 mm) A7 1250338 V. Description of the invention (") Circular or rectangular cross-section; an annular sealing material 4b elastically deformable in the up-and-down direction, mounted on the moving block 4a, will contact or leave the upper plate a peripheral portion 1a, such as a 〇-shaped ring, etc.; driving the vacuum sealing material 4c, mounted under the moving block 4a, always contacting the peripheral portion 2a of the lower fixed plate 2, and using, for example, a vacuum grease as needed; And the load carrying ball 4d is used to support the force to prevent the weight of the fixed plate 1, the weight of the moving block 4a from acting on the driving vacuum sealing material 4c. In particular, in order to connect the upper fixed plate 1 and the moving block 4a in the ΧΥ0 direction as needed, a plurality of connecting pins 4e are passed between the upper fixed plate 1 and the moving block 4a, so that the vertical direction can be made It is preferable that the XY <9 direction cannot be moved in the reciprocating motion, and in order to prevent the moving block 4a and the lower fixed plate 2 from being separated from each other in the up and down direction, it is preferable to erect the elastic material 4f such as a tension spring between the two. . Further, the upper fixed tray 1 is provided with a first pressurizing mechanism constituted by, for example, a vertical driving cylinder or the like as indicated by the reference numeral 5 in Fig. 1 . The first pressurizing mechanism 5 is controlled by a controller (not shown), and in the initial state before the mounting of the substrates A and B, the dot lock line of the first figure and the second figure (a) are used. The upper fixed plate 1 is placed in the upper limit position. After the substrates A and B are mounted, as shown by the solid line in FIG. 1 and the second line (b), the upper fixed plate 1 is lowered to the upper fixed plate 1 A sealed space S surrounding the two substrates A and B is defined in the area between the lower and lower fixed plates 2, and after the micro-alignment of the two substrates A and B is completed, or after the sealed space S is restored to atmospheric pressure, it rises to the initial stage. status. This confined space S is provided with a suction mechanism which is equipped with 11 Chinese paper standards (CNS) A4 specifications (210 X 297 mm) ----------- ----------Book---------Line (please read the note on the back and fill in this page) 1250338 V. Invention Description (?) Figure 1 shows the symbol 6 The outside is connected, for example, by a vacuum pump to evacuate the gas in the sealed space S (the gas in the present embodiment is air) to achieve a predetermined degree of vacuum. The suction mechanism 6 is controlled by a controller (not shown), and the closed space S is formed by the close movement of the upper fixed plate 1 and the lower fixed plate 2, and then the air is sucked out from the sealed space S. After the micro-alignment of the substrates A and B is completed, air is supplied to the sealed space S to return it to atmospheric pressure. Further, a second pressurizing mechanism 7 is provided for closing the two substrates A and B which are close to each other by the first pressurizing mechanism 5, and the two substrates A and B are closed by the annular adhesive C. Location. In the case of the present embodiment, the second pressurizing mechanism 7 is constituted by a pressurizing cylinder 7a that is expandable and contractable in the up-and-down direction, and is disposed from the upper surface of the moving block 4a to the peripheral portion 1a of the upper fixed plate 1 to allow the cylinder 7a is shortened in the up-and-down direction, and the annular seal member 4b is compressed and deformed in the vertical direction, whereby the two substrates A and B are further pressed. Further, the second pressurizing mechanism 7 is controlled by a controller (not shown), and is elongated in the vertical direction as shown in Fig. 2(a) in the initial state, and is thick in both substrates A and B. After the alignment is completed, it will be shortened as shown in Fig. 2(c), and after the micro-alignment of the two substrates A and B is completed, or after the sealed space S described later returns to atmospheric pressure, it will rise and return to the initial state. . Further, a positioning mechanism 8' composed of, for example, a χγ table 8a' and a drive source 8b for driving the lower plate 2 in the χγ0 direction is provided in a row as the bottom surface of the fixed plate 2 outside the sealed space S. Root 12 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ——.---------0^-------- Order ------ ---Line · (Please read the notes on the back and fill in this page) 1250338 B7 V. Inventions (,.) (Please read the notes on the back and fill in this page) According to the two substrates A and B The mark (mark) is driven by the inspection mechanism (constructed by the microscope and the camera) 8c to operate the drive source 8b, whereby the lower plate 2 and the lower substrate B held therein are moved in the ΧΥ0 direction to perform coarse pairing. Accurate and micro-aligned. In addition, in response to the demand, a cushioning material 10 may be disposed on the central portion of the two substrates A and B (on the opposite sides of the upper fixed plate 1 and the lower fixed plate 2), and the cushioning material 10 The material must have good cushioning properties, and the thickness thereof should be such that the positioning mechanism 8 does not shift when moving in the ΧΥ0 direction. In the case of the example, the cushioning material 1 mm thick is provided only on the opposite surface 2b of the lower fixed plate 2, but the cushioning material 10 is not limited thereto, and the cushioning material 10 may be provided in the upper fixed plate 1 and the lower fixed plate 2 The opposite faces either have only the opposite faces of the upper plate 1 . Next, the bonding method of the above liquid crystal panel substrate will be described in accordance with the process sequence. First, as shown in Fig. 2(a), the substrates A and B are pre-aligned and mounted on the opposite sides of the upper fixed plate 1 and the lower fixed plate 2, respectively. According to this, the two substrates A and B are respectively in a state in which they are held by the holding mechanism 3 and are not movable. Then, by the operation of the first pressurizing mechanism 5, the upper fixed plate 1 and the lower fixed plate 2 shown in Fig. 2(b) are brought close to each other, and the peripheral edge portion 1a of the upper fixed plate 1 is in close contact with the annular sealing member 4b. And a sealed space S is defined between the upper fixed plate 1 and the lower fixed plate 2 to surround the two substrates A and B that are held. At the same time, 'two substrates A and B are connected by the upper fixed plate 1 and the lower fixed plate 2. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 metric tons) A7 1250338 V. Description of the invention (I丨) Moves close to a predetermined interval and maintains a gap of 1 mm or less in this state to face each other. Further, the annular adhesive C applied to one substrate B does not contact the other substrate, and communicates between the two substrates A and B and the sealed space S°, and then is self-sealing by the operation of the suction mechanism 6. The space S draws out air, and when a predetermined degree of vacuum is reached, the air is also extracted between the two substrates A and B to reach a vacuum state. In this state, the upper fixed disk 1 and the lower fixed disk 2 are relatively moved in the ΧΥ0 direction by the operation of the positioning mechanism 8, so that the coarse alignment of the two substrates A and B is performed. After the predetermined degree of vacuum is reached, the upper fixed plate 1 and the lower fixed plate 2 are brought closer to each other by the operation of the second pressing mechanism 7, so that the annular sealing member 4b is compressed. According to the deformation, the two substrates A and B are closer to each other, and the other substrate A is in close contact with the annular adhesive C applied to the substrate B to form a sealed state therebetween. In this state, the upper fixed disk 1 and the lower fixed disk 2 are relatively moved in the ΧΥ0 direction by the operation of the positioning mechanism 8, so that the micro-alignment of the two substrates A and B is performed. Then, by the operation of the holding mechanism 3 as shown in Fig. 2(d), the adsorption of the upper substrate A is released only from the upper fixed plate 1, and the air is injected into the sealed space S by the operation of the suction mechanism 6. And return the air in S to atmospheric pressure. According to this, the pressure difference generated between the inside and the outside of the two substrates A and B is uniformly squeezed to form a gap formed. 14 ί paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) " ~ * ------------· II I---- ---I (Please read the note on the back and fill out this page) A7 1250338 _ B7____ V. Invention Description (A) At this time, before the rough alignment, actually when installing the two substrates A and B, if In an appropriate state, an appropriate amount of liquid crystal is sealed to restore the air in the sealed space S to atmospheric pressure, so that the air pressure difference between the inside and the outside of the two substrates A and B can be uniformly squeezed, and the liquid crystal can be formed. The gap is established, so that the liquid crystal panel can be manufactured without injecting liquid crystal in the post-process. Thereafter, when the sealed space S returns to atmospheric pressure, the upper fixed plate 1 and the lower fixed plate 2 are separated by the operation of the first pressing mechanism 5, the sealed space S is opened, and the two substrates A and B which are aligned are taken out. And repeat the above actions. Therefore, in the sealed state between the upper fixed plate 1 and the lower fixed plate 2, XY <9 movement can be performed on the outside to perform alignment. As a result, the positioning mechanism 8, the drive source 8b, and the like can be placed in the atmosphere, and the general parts can be used without vacuuming the parts, so that the structure can be simplified without being spent on the vacuum interrupt. Moreover, since the operation of coarse alignment or micro alignment is performed without a considerable amount of force, the drive type is not limited. In addition, the required vacuum space is minimized, and a vacuum pump capacity of a smaller capacity is sufficient, so that even a large substrate can be manufactured with high productivity. Further, in response to the demand, if one or both of the opposing faces of the upper platen 1 and the lower platen 2 are disposed, a cushioning material 10 is disposed (there is a good cushioning property and is not adjusted in the direction of the ΧΥ0 direction. In the case of displacement, it can prevent the single side of the upper plate 1 and the lower plate 2 from contacting, and it is easy to form a uniform 15 (please read the note on the back and then fill in the page) — ------- -Order---------Line - This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) 1250338 A7 _____B7____ V. Invention Description (β) Clearance. Further, the figures shown in Figs. 3 and 4 are another embodiment of the present invention. The pressurizing mechanism 7 is a cylinder 7a that is expandable and contractable in the vertical direction (the upper portion of the moving block 4a is disposed in the direction of the peripheral portion ia of the upper fixed plate 1). This embodiment does not use the cylinder 7a, but a flexible thin plate 7b which can be elastically deformed only in the vertical direction, and a pressurizing portion 7C which is closed and formed in the upper portion. The concave portion lb at the center of the opposite surface of the disk 1 also keeps the upper substrate A from being immovable, and the pressing portion 7c extracts/feeds the gas in the concave portion 1b blocked by the flexible thin plate 7 to perform microfiltration. When aligned, the flexible sheet material 7b is deformed and bulged toward the lower substrate B. The above-described configuration of the present embodiment is different from the first embodiment shown in Figs. 1 and 2, and the other configurations are the same as those of the first and second embodiments. The flexible sheet material 7b is, for example, a metal film such as stainless steel, which is elastically deformable in the vertical direction and is not deformable in the χΥ0 direction, and has a central portion as a holding mechanism 3 and a plurality of suction holes. . The pressurizing portion 7c is controlled by a controller (not shown), and is always in the state shown in Fig. 4(a) and the rough alignment shown in Fig. 4(b). The air is extracted/sent in such a way that the internal pressure of the occluding recess lb is the same as the internal pressure of the slidable space S caused by the suction mechanism 6, and the air is injected only after the coarse alignment to make the image of Fig. 4(c) The internal pressure of the closed recess lb is larger than the internal pressure of the closed space S. Therefore, the figures shown in Figures 3 and 4 are after the coarse alignment, such as 16 paper scales applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --------- -----------Book--------_ (Please read the notes on the back and fill out this page) A7 1250338 V. Inventions (4) Figure 4 (c) It is shown that the flexible sheet material 7b is swelled and deformed due to an increase in the internal pressure of the clogging recess lb, so that the upper substrate A held by it is closer to the lower substrate B, and the annular adhesive C is used to form a hermetic seal therebetween. State 'According to this, when the two substrates A, B are micro-aligned, they are uniformly pressed to approach the final gap. As a result, compared with the embodiment shown in FIGS. 1 and 2, the plate 1 and the lower plate 2 on the rigid plate are likely to cause the substrate due to the flatness of the opposing faces and the parallel precision between the plates. The partial pressurization between A and B, and in the case of the present embodiment, has the advantage of being able to completely prevent partial pressurization between the substrates A and B without damaging the article. Further, in the above embodiment, the upper pressing plate 1 is reciprocally movable in the vertical direction, and the lower pressing plate 2 is supported to be adjusted in the direction of the weir to move freely, but the configuration is not In contrast to this, it is also possible to change the support to the XY 6> direction to move freely above the fixed plate, and to support the reciprocating movement in the up and down direction. Further, although the embodiment shows alignment in a vacuum environment, it is not limited thereto, and alignment may be performed in a special gas atmosphere. Further, the holding mechanisms 3 of the substrates A and B, the moving sealing mechanism 4, the first pressurizing mechanism 5, the air suction mechanism 6, the second pressurizing mechanism 7, and the positioning mechanism 8 are not limited to the illustrated structure, and Structures having the same function can be used. In particular, on the holding mechanism 3 in which the substrates A and B are kept immovable, if the vacuum in the sealed space s caused by the suction mechanism 6 is low, the paper size is applicable to the Chinese National Standard (CNS) A4 specification ( 210 X 297 1) --------------------^--------- (Please read the notes on the back and fill out this page) A7 1250338 V. Inventive Note (σ) When empty, vacuum adsorption using vacuum difference can be used, but when the vacuum in the closed space S is high vacuum and the vacuum difference cannot be utilized, the holding mechanism 3 must be clamped by the electrostatic chuck. The head or the adhesive sheet is used to keep the substrates A and B in an immovable state. Further, a magnetic fluid type vacuum sealing material may be used instead of the driving vacuum sealing material 4c of the moving sealing mechanism 4. As described above, the invention of claims 1 and 2 of the present invention is to close the peripheral portions of each other by a moving sealing mechanism by the proximity movement of the pressing plates holding the two substrates. And the sealed space is partitioned, and the two substrates are brought close to a predetermined interval, and then the air in the sealed space is extracted, and the two pressing plates are relatively adjusted and moved in the direction of the weir to perform coarse alignment of the two substrates. After the predetermined degree of vacuum, the moving sealing mechanism is deformed and further brought into a position where the two substrates are closed by the annular adhesive. In this state, the two pressing plates are relatively moved in the ΧΥ0 direction. The micro-alignment of the two substrates is performed, and then the substrate is released from only one of the pressure plates to restore the atmospheric pressure to the atmospheric pressure, and is uniformly squeezed by the difference in pressure between the inside and the outside of the substrate. Since it is pressed to a predetermined gap, alignment can be performed by ΧΥ0 movement outside the two pressure plates in a sealed state. Therefore, the present invention can provide a positioning mechanism or a driving source thereof in the atmosphere, and can be used in general, as compared with a conventional technique in which the positioning mechanism in the vacuum chamber is moved to perform alignment by external driving. Parts, and no need to vacuum through the parts, but the structure can be simplified, and no paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 >< 297 mm) (please read the notes on the back and fill in the form) Page) ----Book---------Line A7 1250338 V. Invention Note (β) It must be spent on vacuum interrupting, and it is not too laborious in rough alignment or micro-alignment, so drive There is no limit on the type. Further, since the space required for the vacuum is minimized, only a small-capacity vacuum pump is required, so that even a large substrate can be manufactured with high productivity. The effects of the inventions of claims 3 and 4 are in addition to the effects of the invention of claim 1 or 2, and after the coarse alignment, the internal pressure of the occlusion recess is used to increase the flexibility. The thin plate is deformed and bulged so that one of the substrates held on the flexible thin plate is approached to the other substrate, and the annular adhesive C is used to form a sealed state therebetween, thereby making the two substrates microscopically When aligned, it is evenly pressed to approach the final gap, so that any flatness between the substrates can be prevented under any flatness or parallel precision of the rigid plate. Therefore, although the pressurizing plate of the rigid system is liable to cause local pressurization between the substrates due to the difference in the flatness of the opposing faces or the parallel precision between the plates, the present invention can completely prevent partial pressurization between the substrates. Without making the product bad. The invention of claim 5 of the patent application is in addition to the effect of the invention of claim 2 or 4, and the return of the air in the confined space to atmospheric pressure, so that the two substrates are inside and outside the two substrates. The generated gas pressure difference is uniformly squeezed, and a predetermined gap can be formed in a state in which liquid crystal is sealed, so that the liquid crystal panel can be produced without re-injecting liquid crystal in the post-process. [Simple description of the drawings] 19 This paper scale applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the notes on the back and fill in this page) -------- - 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Figs. 2(a) to 2(d) are explanatory diagrams showing the method of manufacturing the liquid crystal panel in the order of the process. Fig. 3 is a front longitudinal sectional view showing a bonding apparatus of a substrate for a liquid crystal panel according to another embodiment of the present invention. Fig. 4 (a) to (d) are explanatory views showing the method of manufacturing the liquid crystal panel in the order of the process. Fig. 5 is a front longitudinal sectional view showing an example of a bonding apparatus for a conventional liquid crystal panel substrate. [Symbol description] -------------------- Order --------- line (please read the notes on the back and fill in this page) A, B substrate C annular adhesive S sealed space 1 pressure plate (upper plate) la peripheral portion lb recess 2 pressure plate (lower plate) 2a peripheral portion 3 holding mechanism 4 moving sealing mechanism 5 first pressing mechanism 6 suction Gas mechanism 20 This paper size is applicable to China National Standard (CNS) A4 specification (210 x 297 mm) A7 1250338 _B7 V. Invention description (/§) 7 Second pressurizing mechanism 7b Flexible sheet 7c Pressing portion 8 Positioning mechanism (please read the note on the back and fill out this page) This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm)