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TWD206688S - 通氣基座 - Google Patents

通氣基座 Download PDF

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Publication number
TWD206688S
TWD206688S TW108304268F TW108304268F TWD206688S TW D206688 S TWD206688 S TW D206688S TW 108304268 F TW108304268 F TW 108304268F TW 108304268 F TW108304268 F TW 108304268F TW D206688 S TWD206688 S TW D206688S
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Taiwan
Prior art keywords
design
vented
susceptor
item
dotted line
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TW108304268F
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English (en)
Inventor
烏戴 奇蘭 羅肯姆
山姆 金
沙奇特 拉提
卞大凱
Original Assignee
荷蘭商Ａｓｍ Ｉｐ 控股公司
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Application filed by 荷蘭商Ａｓｍ Ｉｐ 控股公司 filed Critical 荷蘭商Ａｓｍ Ｉｐ 控股公司
Publication of TWD206688S publication Critical patent/TWD206688S/zh

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Abstract

【物品用途】;本設計物品是一種通氣基座，用於在半導體沈積工具內將半導體晶圓保持在其上。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。

Description

通氣基座
本設計物品是一種通氣基座，用於在半導體沈積工具內將半導體晶圓保持在其上。
圖式所揭露之虛線部分，為本案不主張設計之部分。
TW108304268F 2019-01-17 2019-07-16 通氣基座 TWD206688S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/677,173 USD920936S1 (en) 2019-01-17 2019-01-17 Higher temperature vented susceptor
US29/677,173 2019-01-17

Publications (1)

Publication Number Publication Date
TWD206688S true TWD206688S (zh) 2020-08-21

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TW108304268F TWD206688S (zh) 2019-01-17 2019-07-16 通氣基座

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TW (1) TWD206688S (zh)

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Publication number Priority date Publication date Assignee Title
TWI839443B (zh) * 2019-01-17 2024-04-21 荷蘭商 Ａｓｍ Ｉｐ 私人控股有限公司 通風基座
USD920936S1 (en) * 2019-01-17 2021-06-01 Asm Ip Holding B.V. Higher temperature vented susceptor
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USD1067204S1 (en) * 2022-05-31 2025-03-18 Asm Ip Holding B.V. Susceptor
JP1741173S (ja) * 2022-10-20 2023-04-06 半導体ウェハ及びサセプタ加熱用ヒータ

Citations (1)

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