TWD112952S1 - Semiconductor manufacturing machine - Google Patents

Abstract

[Purpose of the article]; The article of this creation is a semiconductor manufacturing machine, which is a semiconductor manufacturing machine that performs etching processing in a vacuum chamber for semiconductor wafers inserted from the front to manufacture semiconductor components. ; [Features of the creation]; As shown in the three-dimensional diagram and the top view, the manufacturing machine has a slightly rectangular base bed, and above the base bed, an etching chamber, a lifting device, a grinding chamber, a vacuum exchange chamber, a wafer cassette loading table, a transfer arm, a monitor unit, a loading chamber, etc. are arranged in a symmetrical manner in sequence; the etching chamber is a rectangular body and is installed in a Y shape on the base bed, and at the same time, long columnar lifting devices are installed on both sides of the etching chamber, and in the slightly middle of the base bed, a A polygonal transfer arm is arranged in the center, and three circular parts are formed above the transfer arm. On the vertical sides of the transfer arm, slightly rectangular grinding chambers are arranged respectively, and a circular mesh part is provided on the top of the grinding chamber. In addition, oblong vacuum exchange chambers are arranged on the other two oblique sides of the transfer arm respectively. In addition, a vertical large rectangular loading chamber is arranged in front of the base bed part, a monitor part is arranged on the left side of the loading chamber, and two wafer box loading tables are upright in front of the loading chamber.