TW202505943A - Circuit board and manufacturing method thereof - Google Patents
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- TW202505943A TW202505943A TW112127543A TW112127543A TW202505943A TW 202505943 A TW202505943 A TW 202505943A TW 112127543 A TW112127543 A TW 112127543A TW 112127543 A TW112127543 A TW 112127543A TW 202505943 A TW202505943 A TW 202505943A
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- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000010410 layer Substances 0.000 claims abstract description 236
- 239000002184 metal Substances 0.000 claims abstract description 190
- 229910052751 metal Inorganic materials 0.000 claims abstract description 190
- 239000000758 substrate Substances 0.000 claims abstract description 81
- 239000012792 core layer Substances 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims description 21
- 238000000059 patterning Methods 0.000 claims description 15
- 238000003825 pressing Methods 0.000 claims 2
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- 102100026388 L-amino-acid oxidase Human genes 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
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- 238000009713 electroplating Methods 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
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- 229920005989 resin Polymers 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
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Abstract
Description
本發明是有關於一種電路板及其製造方法,特別是有關於一種具有多種功能元件通道的電路板及其製造方法。The present invention relates to a circuit board and a manufacturing method thereof, and in particular to a circuit board with multiple functional element channels and a manufacturing method thereof.
隨著電子產品往輕型化、小型化方向發展,越來越多的產品將多種不同訊號或能量的通道設計在同一塊電路板上,其中前述通道例如是用於幫助散熱的導熱通道、高電流通道及具有空腔的高速或高頻訊號傳輸通道。然而,不同功能的元件通道各自具有不同的尺寸(例如長度或寬度)及結構,而將這些功能不同的通道製作於同一塊電路板通常需要相當複雜且高難度的製程,導致良率難以提升,甚至下降。As electronic products develop towards lightweight and miniaturization, more and more products are designing multiple channels of different signals or energies on the same circuit board, such as heat conduction channels for heat dissipation, high current channels, and high-speed or high-frequency signal transmission channels with cavities. However, component channels with different functions have different sizes (such as length or width) and structures, and making these channels with different functions on the same circuit board usually requires a very complex and difficult process, which makes it difficult to improve the yield, or even reduces it.
本發明的目的是在於提供一種具有多種功能元件通道的電路板,能提升產品良率。The purpose of the present invention is to provide a circuit board with multiple functional component channels, which can improve the product yield.
本發明的另一目的是在於提供上述電路板的製造方法,以幫助提升上述電路板的產品良率。Another object of the present invention is to provide a method for manufacturing the above-mentioned circuit board to help improve the product yield of the above-mentioned circuit board.
本發明至少一實施例所提出的一種電路板,包含核心層、第一線路結構及第二線路結構。核心層具有第一表面及與第一表面相對的第二表面。第一線路結構設置於第一表面上並包含第一基材、第一絕緣層、第一金屬圖案層及第一金屬層。第一基材包含第一穿孔及與第一穿孔間隔設置的第二穿孔,第一穿孔及第二穿孔暴露第一表面。第一絕緣層設置於第一穿孔中並接觸第一表面。第一金屬圖案層包含第一導熱部及第一線路部,第一導熱部設置於第一絕緣層上,第一線路部設置於第二穿孔中並與第一表面形成第一空腔。第一金屬層包含第二導熱部及第一導通部,第二導熱部設置於第一導熱部上,第一導通部設置於第一基材上。第二線路結構設置於第二表面上並包含第二基材、第二絕緣層、第二金屬圖案層及第二金屬層。第二基材包含第三穿孔及與第三穿孔間隔設置的第四穿孔,第三穿孔及第四穿孔暴露第二表面。第二絕緣層設置於第三穿孔中並接觸第二表面。第二金屬圖案層包含第三導熱部及第二線路部,第三導熱部設置於第二絕緣層上,第二線路部設置於第四穿孔中並與第二表面形成第二空腔。第二金屬層包含第四導熱部及第二導通部,第四導熱部設置於第三導熱部上,第二導通部設置於第二基材上。A circuit board proposed in at least one embodiment of the present invention comprises a core layer, a first circuit structure and a second circuit structure. The core layer has a first surface and a second surface opposite to the first surface. The first circuit structure is arranged on the first surface and comprises a first substrate, a first insulating layer, a first metal pattern layer and a first metal layer. The first substrate comprises a first through-hole and a second through-hole arranged with an interval from the first through-hole, and the first through-hole and the second through-hole expose the first surface. The first insulating layer is arranged in the first through-hole and contacts the first surface. The first metal pattern layer comprises a first heat conducting portion and a first circuit portion, the first heat conducting portion is arranged on the first insulating layer, and the first circuit portion is arranged in the second through-hole and forms a first cavity with the first surface. The first metal layer includes a second heat-conducting portion and a first conductive portion, the second heat-conducting portion is arranged on the first heat-conducting portion, and the first conductive portion is arranged on the first substrate. The second circuit structure is arranged on the second surface and includes a second substrate, a second insulating layer, a second metal pattern layer and a second metal layer. The second substrate includes a third through-hole and a fourth through-hole arranged with intervals from the third through-hole, and the third through-hole and the fourth through-hole expose the second surface. The second insulating layer is arranged in the third through-hole and contacts the second surface. The second metal pattern layer includes a third heat-conducting portion and a second circuit portion, the third heat-conducting portion is arranged on the second insulating layer, the second circuit portion is arranged in the fourth through-hole and forms a second cavity with the second surface. The second metal layer includes a fourth heat-conducting portion and a second conductive portion, the fourth heat-conducting portion is arranged on the third heat-conducting portion, and the second conductive portion is arranged on the second substrate.
在本發明至少一實施例中,所述電路板包含導熱通道、線路通道及電流通道,導熱通道包含所述第一絕緣層、所述第一導熱部、所述第二導熱部、所述第二絕緣層、所述第三導熱部及所述第四導熱部,線路通道包含所述第一線路部、所述第一空腔、所述第二線路部及所述第二空腔,電流通道包含所述第一導通部及所述第二導通部。In at least one embodiment of the present invention, the circuit board includes a heat conduction channel, a circuit channel and a current channel, the heat conduction channel includes the first insulating layer, the first heat conduction part, the second heat conduction part, the second insulating layer, the third heat conduction part and the fourth heat conduction part, the circuit channel includes the first circuit part, the first cavity, the second circuit part and the second cavity, and the current channel includes the first conductive part and the second conductive part.
在本發明至少一實施例中,所述第一線路結構更包含第三金屬圖案層,第三金屬圖案層包含第五導熱部及第三導通部,第五導熱部設置於所述第二導熱部上,第三導通部設置於所述第一導通部上,所述第二線路結構更包含第四金屬圖案層,第四金屬圖案層包含第六導熱部及第四導通部,第六導熱部設置於所述第四導熱部上,第四導通部設置於所述第二導通部上。In at least one embodiment of the present invention, the first circuit structure further includes a third metal pattern layer, the third metal pattern layer includes a fifth heat conducting portion and a third conductive portion, the fifth heat conducting portion is disposed on the second heat conducting portion, and the third conductive portion is disposed on the first conductive portion, and the second circuit structure further includes a fourth metal pattern layer, the fourth metal pattern layer includes a sixth heat conducting portion and a fourth conductive portion, the sixth heat conducting portion is disposed on the fourth heat conducting portion, and the fourth conductive portion is disposed on the second conductive portion.
在本發明至少一實施例中,所述導熱通道更包含所述第五導熱部及所述第六導熱部,所述電流通道更包含所述第三導通部及所述第四導通部。In at least one embodiment of the present invention, the heat conduction channel further includes the fifth heat conduction portion and the sixth heat conduction portion, and the current channel further includes the third conductive portion and the fourth conductive portion.
本發明至少一實施例所提出的一種電路板的製作方法,包含提供第一初始基材及第二初始基材。形成第一初始金屬層於第一初始基材上,形成第二初始金屬層於第二初始基材上。圖案化第一初始基材以形成具有間隔設置的第一穿孔及第二穿孔的第一基材,圖案化第二初始基材以形成具有間隔設置的第三穿孔及第四穿孔的第二基材。形成第一金屬圖案層於第一穿孔中及第二穿孔中,形成第二金屬圖案層於第三穿孔中及第四穿孔中。形成第一絕緣層於第一穿孔中的第一金屬圖案層上,形成第二絕緣層於第三穿孔中的第二金屬圖案層上。提供核心層。之後,壓合第一基材與核心層以形成位於第二穿孔中的第一空腔,壓合第二基材與核心層以形成位於第四穿孔中的第二空腔。圖案化第一初始金屬層以形成第一金屬層,圖案化第二初始金屬層以形成第二金屬層。A method for manufacturing a circuit board proposed in at least one embodiment of the present invention includes providing a first initial substrate and a second initial substrate. Forming a first initial metal layer on the first initial substrate, and forming a second initial metal layer on the second initial substrate. Patterning the first initial substrate to form a first substrate having a first through hole and a second through hole arranged at intervals, and patterning the second initial substrate to form a second substrate having a third through hole and a fourth through hole arranged at intervals. Forming a first metal pattern layer in the first through hole and the second through hole, and forming a second metal pattern layer in the third through hole and the fourth through hole. Forming a first insulating layer on the first metal pattern layer in the first through hole, and forming a second insulating layer on the second metal pattern layer in the third through hole. Providing a core layer. Then, the first substrate and the core layer are pressed to form a first cavity in the second through hole, and the second substrate and the core layer are pressed to form a second cavity in the fourth through hole. The first initial metal layer is patterned to form a first metal layer, and the second initial metal layer is patterned to form a second metal layer.
在本發明至少一實施例中,形成所述第一金屬圖案層的步驟包含形成第一導熱部於所述第一穿孔中及形成第一線路部於所述第二穿孔中。圖案化所述第一初始金屬層的步驟包含形成第二導熱部於所述第一導熱部上及形成第一導通部於所述第二基材上。形成所述第二金屬圖案層的步驟包括形成第三導熱部於所述第三穿孔中及形成第二線路部於所述第四穿孔中。圖案化所述第二初始金屬層的步驟包括形成第四導熱部於所述第三導熱部上及形成第二導通部於所述第二基材上。In at least one embodiment of the present invention, the step of forming the first metal pattern layer includes forming a first heat conducting portion in the first through hole and forming a first circuit portion in the second through hole. The step of patterning the first initial metal layer includes forming a second heat conducting portion on the first heat conducting portion and forming a first conductive portion on the second substrate. The step of forming the second metal pattern layer includes forming a third heat conducting portion in the third through hole and forming a second circuit portion in the fourth through hole. The step of patterning the second initial metal layer includes forming a fourth heat conducting portion on the third heat conducting portion and forming a second conductive portion on the second substrate.
在本發明至少一實施例中,所述第一絕緣層、所述第一導熱部、所述第二導熱部、所述第二絕緣層、所述第三導熱部及所述第四導熱部形成導熱通道,所述第一線路部、所述第一空腔、所述第二線路部及所述第二空腔形成線路通道,所述第一導通部及所述第二導通部形成電流通道。In at least one embodiment of the present invention, the first insulating layer, the first heat conducting portion, the second heat conducting portion, the second insulating layer, the third heat conducting portion and the fourth heat conducting portion form a heat conducting channel, the first circuit portion, the first cavity, the second circuit portion and the second cavity form a circuit channel, and the first conductive portion and the second conductive portion form a current channel.
在本發明至少一實施例中,在圖案化所述第一初始金屬層及所述第二初始金屬層之前,更包含形成第三金屬圖案層於所述第一初始金屬層上,以及形成第四金屬圖案層於所述第二初始金屬層上。In at least one embodiment of the present invention, before patterning the first initial metal layer and the second initial metal layer, the method further includes forming a third metal pattern layer on the first initial metal layer and forming a fourth metal pattern layer on the second initial metal layer.
在本發明至少一實施例中,形成所述第三金屬圖案層的步驟包含形成第五導熱部,所述第二導熱部位於所述第一導熱部與第五導熱部之間,及形成第三導通部,所述第一導通部位於所述第一基材與第三導通部之間,形成所述第四金屬圖案層的步驟包括形成第六導熱部,所述第四導熱部位於所述第三導熱部與所述第六導熱部之間,及形成第四導通部,所述第二導通部位於所述第二基材與所述第四導通部之間。In at least one embodiment of the present invention, the step of forming the third metal pattern layer includes forming a fifth heat conducting portion, the second heat conducting portion is located between the first heat conducting portion and the fifth heat conducting portion, and forming a third conductive portion, the first conductive portion is located between the first substrate and the third conductive portion, and the step of forming the fourth metal pattern layer includes forming a sixth heat conducting portion, the fourth heat conducting portion is located between the third heat conducting portion and the sixth heat conducting portion, and forming a fourth conductive portion, the second conductive portion is located between the second substrate and the fourth conductive portion.
在本發明至少一實施例中,所述導熱通道更包含所述第五導熱部及所述第六導熱部,所述電流通道更包括所述第三導通部及所述第四導通部。In at least one embodiment of the present invention, the heat conduction channel further includes the fifth heat conduction portion and the sixth heat conduction portion, and the current channel further includes the third conductive portion and the fourth conductive portion.
在本發明至少一實施例中,所述第一穿孔的深度及所述第二穿孔的深度分別大於所述第一金屬圖案層的厚度,所述第三穿孔的深度及所述第四穿孔的深度分別大於所述第二金屬圖案層的厚度。In at least one embodiment of the present invention, the depth of the first through-hole and the depth of the second through-hole are respectively greater than the thickness of the first metal pattern layer, and the depth of the third through-hole and the depth of the fourth through-hole are respectively greater than the thickness of the second metal pattern layer.
在以下的內文中,為了清楚呈現本發明的技術特徵,圖式中的元件(例如層、膜、基板以及區域等)的尺寸(例如長度、寬度、厚度與深度)會以不等比例的方式放大,而且有的元件數量會減少。因此,下文實施例的說明與解釋不受限於圖式中的元件數量以及元件所呈現的尺寸與形狀,而應涵蓋如實際製程及/或公差所導致的尺寸、形狀以及兩者的偏差。例如,圖式所示的平坦表面可以具有粗糙及/或非線性的特徵,而圖式所示的銳角可以是圓的。所以,本發明圖式所呈示的元件主要是用於示意,並非旨在精準地描繪出元件的實際形狀,也非用於限制本發明的申請專利範圍。In the following text, in order to clearly present the technical features of the present invention, the dimensions (e.g., length, width, thickness, and depth) of the elements (e.g., layers, films, substrates, and regions, etc.) in the drawings will be enlarged in unequal proportions, and the number of some elements will be reduced. Therefore, the description and explanation of the embodiments below are not limited to the number of elements in the drawings and the dimensions and shapes presented by the elements, but should cover the dimensions, shapes, and deviations therefrom caused by actual processes and/or tolerances. For example, the flat surface shown in the drawings may have rough and/or nonlinear features, and the sharp corners shown in the drawings may be rounded. Therefore, the elements presented in the drawings of the present invention are mainly used for illustration, and are not intended to accurately depict the actual shape of the elements, nor are they used to limit the scope of the patent application of the present invention.
其次,本發明所出現的「約」、「近似」或「實質上」等這類用字不僅涵蓋明確記載的數值與數值範圍,而且也涵蓋發明所屬技術領域中具有通常知識者所能理解的可允許偏差範圍,其中此偏差範圍可由測量時所產生的誤差來決定,而此誤差例如是起因於測量系統或製程條件兩者的限制。舉例而言,兩物件(例如基板的平面或走線)「實質上平行」或「實質上垂直」,其中「實質上平行」與「實質上垂直」分別代表這兩物件之間的平行與垂直可包含允許偏差範圍所導致的不平行與不垂直。Secondly, the words "approximately", "approximately" or "substantially" used in the present invention not only cover the numerical values and numerical ranges clearly recorded, but also cover the permissible deviation range that can be understood by a person of ordinary skill in the technical field to which the invention belongs, wherein the deviation range can be determined by the error generated during measurement, and the error is caused by the limitations of the measurement system or process conditions, for example. For example, two objects (such as the planes or traces of a substrate) are "substantially parallel" or "substantially perpendicular", wherein "substantially parallel" and "substantially perpendicular" respectively represent that the parallelism and perpendicularity between the two objects may include non-parallelism and non-perpendicularity caused by the permissible deviation range.
本發明所使用的空間相對用語,例如「下方」、「之下」、「上方」、「之上」等,這是為了便於敘述一元件或特徵與另一元件或特徵之間的相對關係,如圖中所繪示。這些空間上的相對用語的真實意義包含其他的方位。例如,當圖示上下翻轉180度時,一元件與另一元件之間的關係,可能從「下方」、「之下」變成「上方」、「之上」。此外,本發明所使用的空間上的相對敘述也應作同樣的解釋。The spatially relative terms used in the present invention, such as "below", "under", "above", "on", etc., are for the purpose of facilitating the description of the relative relationship between one element or feature and another element or feature, as shown in the figure. The true meaning of these spatially relative terms includes other orientations. For example, when the figure is flipped 180 degrees up and down, the relationship between one element and another element may change from "below" or "under" to "above" or "on". In addition, the spatially relative descriptions used in the present invention should also be interpreted in the same way.
應當可以理解的是,雖然本發明可能會使用到「第一」、「第二」、「第三」等術語來描述各種元件或者特徵,但這些元件或者特徵不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一特徵與另一特徵。另外,本發明所使用的術語「或」,應視實際情況可能包含相關聯的列出項目中的任一個或者多個的組合。It should be understood that, although the present invention may use terms such as "first", "second", and "third" to describe various components or features, these components or features should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one feature from another feature. In addition, the term "or" used in the present invention may include any one or more combinations of the related listed items depending on the actual situation.
雖然本發明中利用一系列的操作或步驟來說明製造方法,但是這些操作或步驟所示的順序不應被解釋為本發明的限制。例如,某些操作或步驟可以按不同順序進行及/或與其它步驟同時進行。此外,在此所述的每一個操作或步驟可以包含數個子步驟或動作。Although the present invention uses a series of operations or steps to illustrate the manufacturing method, the order in which these operations or steps are shown should not be interpreted as a limitation of the present invention. For example, certain operations or steps can be performed in different orders and/or simultaneously with other steps. In addition, each operation or step described herein can include a plurality of sub-steps or actions.
此外,本發明可通過其他不同的具體實施例加以施行或應用,本發明的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種實施例的組合、修改與變更。In addition, the present invention may be implemented or applied through other different specific embodiments, and the details of the present invention may also be combined, modified and changed in various embodiments based on different viewpoints and applications without departing from the concept of the present invention.
圖1是本發明至少一實施例的電路板的局部剖面示意圖。請參閱圖1,電路板1包含核心層30、第一線路結構10及第二線路結構20。核心層30具有第一表面S1及第二表面S2,第一表面S1與第二表面S2相對。第一線路結構10設置於核心層30的第一表面S1上,第二線路結構20設置於第二表面S2上。FIG1 is a partial cross-sectional schematic diagram of a circuit board of at least one embodiment of the present invention. Referring to FIG1 , the
第一線路結構10包含第一基材110、第一絕緣層112、第一金屬圖案層114及第一金屬層116。第一基材110包含第一穿孔T1及第二穿孔T2,第一穿孔T1與第二穿孔T2間隔設置,第一穿孔T1及第二穿孔T2暴露核心層30的第一表面S1。The
第一絕緣層112設置於第一穿孔T1中並接觸核心層30的第一表面S1。第一金屬圖案層114包含第一導熱部114h及第一線路部114t,第一導熱部114h設置於第一穿孔T1中並設置於第一絕緣層112上,第一線路部114t設置於第二穿孔T2中並與第一表面S1形成第一空腔C1,即第一線路部114t未接觸第一表面S1。第一金屬層116包含第二導熱部116h及第一導通部116c,第二導熱部116h設置於第一導熱部114h上,第一導通部116c設置於第一基材110上。The
第二線路結構20包含第二基材210、第二絕緣層212、第二金屬圖案層214及第二金屬層216。第二基材210包含第三穿孔T3及第四穿孔T4,第三穿孔T3與第四穿孔T4間隔設置,第三穿孔T3及第四穿孔T4暴露核心層30的第二表面S2。The
第二絕緣層212設置於第三穿孔T3中並接觸核心層30的第二表面S2。第二金屬圖案層214包含第三導熱部214h及第二線路部214t,第三導熱部214h設置於第三穿孔T3中並設置於第二絕緣層212上,第二線路部214t設置於第四穿孔T4中並與第二表面S2形成第二空腔C2,即第二線路部214t未接觸第二表面S2。第二金屬層216包含第四導熱部216h及第二導通部216c,第四導熱部216h設置於第三導熱部214h上,第二導通部216c設置於第二基材210上。The second
藉由上述的結構設計,可使絕緣層與導熱部、線路部與空腔以及導通部分別做為不同功能的元件通道,進而形成具有多種功能元件通道的電路板。By means of the above structural design, the insulating layer and the heat conducting part, the circuit part and the cavity, and the conducting part can be used as component channels with different functions respectively, thereby forming a circuit board with component channels with multiple functions.
如圖1所示,電路板1包含導熱通道HC、線路通道TC及電流通道CC。導熱通道HC包含第一絕緣層112、第一金屬圖案層114的第一導熱部114h、第一金屬層116的第二導熱部116h、第二絕緣層212、第二金屬圖案層214的第三導熱部214h及第二金屬層216的第四導熱部216h。線路通道TC包含第一金屬圖案層114的第一線路部114t、第一空腔C1、第二金屬圖案層214的第二線路部214t及第二空腔C2。電流通道CC包含第一金屬層116的第一導通部116c及第二金屬層216的第二導通部216c。As shown in FIG1 , the
在一些實施例中,藉由第一金屬圖案層114的第一線路部114t搭配第一空腔C1及第二金屬圖案層214的第二線路部214t搭配第二空腔C2,以使線路通道TC做為高速或高頻訊號傳輸線路通道,例如應用於4G或5G的通訊元件。In some embodiments, the
在一些實施例中,藉由設置第一金屬層116的第二導熱部116h及第二金屬層216的第四導熱部216h,以形成具有散熱效果的導熱通道HC。此外,藉由設置第一金屬層116的第一導通部116c及第二金屬層216的第二導通部216c,以形成適合傳輸高電流的電流通道CC。In some embodiments, a heat conduction channel HC having a heat dissipation effect is formed by providing the second
在一些實施例中,第一穿孔T1、第二穿孔T2、第三穿孔T3及第四穿孔T4的數量可分別為一個以上。如圖1所示,第一穿孔T1及第三穿孔T3的數量分別為一個,第二穿孔T2及第四穿孔T4的數量分別為兩個,但本發明不以此為限,可視不同設計需求,調整穿孔的數量。In some embodiments, the number of the first through hole T1, the second through hole T2, the third through hole T3 and the fourth through hole T4 may be more than one. As shown in FIG1 , the number of the first through hole T1 and the third through hole T3 is one, and the number of the second through hole T2 and the fourth through hole T4 is two, but the present invention is not limited thereto, and the number of through holes may be adjusted according to different design requirements.
在一些實施例中,第一金屬圖案層114的第一導熱部114h接觸第一絕緣層112,第一金屬層116的第二導熱部116h接觸第一導熱部114h,第一金屬層116的第一導通部116c接觸第一基材110。In some embodiments, the first
在一些實施例中,第二金屬圖案層214的第三導熱部214h接觸第二絕緣層212,第二金屬層216的第四導熱部216h接觸第三導熱部214h,第二金屬層216的第二導通部216c接觸第二基材210。In some embodiments, the third
請繼續參閱圖1,第一線路結構10更包含第三金屬圖案層118,第三金屬圖案層118包含第五導熱部118h及第三導通部118c,第五導熱部118h設置於第二導熱部116h上,第三導通部118c設置於第一導通部116c上。第二線路結構20更包含第四金屬圖案層218,第四金屬圖案層218包含第六導熱部218h及第四導通部218c,第六導熱部218h設置於第四導熱部216h上,第四導通部218c設置於第二導通部216c上。Continuing to refer to FIG. 1 , the
如圖1所示,導熱通道HC更包含第三金屬圖案層118的第五導熱部118h及第四金屬圖案層218的第六導熱部218h,電流通道CC更包含第三金屬圖案層118的第三導通部118c及第四金屬圖案層218的第四導通部218c。As shown in FIG. 1 , the heat conducting channel HC further includes a fifth
在一些實施例中,第三金屬圖案層118的厚度大於第一金屬圖案層114的厚度,第四金屬圖案層218的厚度大於第二金屬圖案層214的厚度,藉由厚度較大的第三金屬圖案層118的第五導熱部118h及第四金屬圖案層218的第六導熱部218h,可進一步提升導熱通道HC的散熱效果。此外,藉由厚度較大的第三金屬圖案層118的第三導通部118c及第四金屬圖案層218的第四導通部218c,可進一步提升電流通道CC的耐高電流效果。In some embodiments, the thickness of the third
在一些實施例中,第三金屬圖案層118的第五導熱部118h接觸第二導熱部116h,第三金屬圖案層118的第三導通部118c接觸第一導通部116c。在一些實施例中,第四金屬圖案層218的第六導熱部218h接觸第四導熱部216h,第四金屬圖案層218的第四導通部218c接觸第二導通部216c。In some embodiments, the fifth
圖2A到圖2L是本發明至少一實施例的電路板在不同製程階段的局部剖面圖。請參閱圖2A,提供第一初始基材110’及第二初始基材210’,並形成第一初始金屬層116’於第一初始基材110’上及形成第二初始金屬層216’於第二初始基材210’上。在一些實施例中,第一初始基材110’及第二初始基材210’的材料可包含樹脂,第一初始金屬層116’及第二初始金屬層216’的材料可包含金屬,例如銅。2A to 2L are partial cross-sectional views of a circuit board of at least one embodiment of the present invention at different process stages. Referring to FIG. 2A , a first
請參閱圖2B,圖案化第一初始基材110’以形成具有間隔設置的第一穿孔T1及第二穿孔T2的第一基材110,以及圖案化第二初始基材210’以形成具有間隔設置的第三穿孔T3及第四穿孔T4的第二基材210。在一些實施例中,第一穿孔T1、第二穿孔T2、第三穿孔T3及第四穿孔T4可由蝕刻製程形成,例如乾蝕刻。2B , the first
請參閱圖2C,形成第一金屬圖案層114於第一穿孔T1中及第二穿孔T2中,以及形成第二金屬圖案層214於第三穿孔T3中及第四穿孔T4中。在一些實施例中,第一金屬圖案層114及第二金屬圖案層214的材料可包含金屬,例如銅。在一些實施例中,第一金屬圖案層114及第二金屬圖案層214可由電鍍製程形成。在一些實施例中,第一穿孔T1的深度及第二穿孔T2的深度分別大於第一金屬圖案層114的厚度,第三穿孔T3的深度及第四穿孔T4的深度分別大於第二金屬圖案層214的厚度。Referring to FIG. 2C , a first
如圖2C所示,形成第一金屬圖案層114的步驟包含形成第一導熱部114h於第一穿孔T1中及第一線路部114t於第二穿孔T2中。形成第二金屬圖案層214的步驟包括形成第三導熱部214h於第三穿孔T3中及第二線路部214t於第四穿孔T4中。在一些實施例中,第一穿孔T1的深度大於第一導熱部114h的厚度,第二穿孔T2的深度大於第一線路部114t的厚度,第三穿孔T3的深度大於第三導熱部214h的厚度,第四穿孔T4的深度大於第二線路部214t的厚度。As shown in FIG. 2C , the step of forming the first
請參閱圖2D,形成第一絕緣層112於第一穿孔T1中的第一金屬圖案層114上,以及形成第二絕緣層212於第三穿孔T3中的第二金屬圖案層214上,以得到第一初始線路結構10’。在一些實施例中,第一絕緣層112及第二絕緣層212的材料可包含樹脂。在一些實施例中,第一穿孔T1的深度約等於第一導熱部114h與第一絕緣層112的厚度總和,第三穿孔T3的深度約等於第三導熱部214h與第二絕緣層212的厚度總和。Referring to FIG. 2D , a first insulating
請參閱圖2E及圖2F,提供核心層30,壓合第一初始線路結構10’、第二初始線路結構20’及核心層30,即壓合第一基材110與核心層30以形成位於第二穿孔T2中的第一空腔C1,壓合第二基材210與核心層30以形成位於第四穿孔T4中的第二空腔C2。然而,第二初始線路結構20’的製作方法與第一初始線路結構10’相同,如圖2A到圖2D所示,故在此不再贅述相同內容。Referring to FIG. 2E and FIG. 2F , a
如圖2E及圖2F所示,核心層30具有第一表面S1及與第一表面S1相對的第二表面S2,將核心層30設置於第一基材110與第二基材210之間,並壓合第一基材110、第二基材210及核心層30,分別使第一基材110貼附於核心層30的第一表面S1,第二基材210貼附於核心層30的第二表面S2。As shown in FIG. 2E and FIG. 2F , the
詳細而言,壓合第一基材110、第二基材210及核心層30,使形成於第二穿孔T2中的第一線路部114t與核心層30的第一表面S1之間形成第一空腔C1,亦使形成於第四穿孔T4中的第二線路部214t與核心層30的第二表面S2之間形成第二空腔C2。此外,形成於第一穿孔T1中的第一絕緣層112接觸核心層30的第一表面S1,形成於第三穿孔T3中的第二絕緣層212接觸核心層30的第二表面S2。在一些實施例中,核心層30的材料可包含樹脂,例如低流動膠片(low flow prepreg)或無流動膠片(no flow prepreg)。Specifically, the
請參閱圖2G到圖2L,圖案化第一初始金屬層116’以形成第一金屬層116,圖案化第二初始金屬層216’以形成第二金屬層216。首先,如圖2G所示,形成第一光阻膜F1於第一初始金屬層116’上,以及形成第二光阻膜F2於第二初始金屬層216’上。在一些實施例中,第一光阻膜F1及第二光阻膜F2可由壓合製程分別形成於第一初始金屬層116’上及第二初始金屬層216’上。Referring to FIG. 2G to FIG. 2L , the first
如圖2H所示,圖案化第一光阻膜F1以形成暴露第一初始金屬層116’的第一開口O1及第二開口O2,以及圖案化第二光阻膜F2以形成暴露第二初始金屬層216’的第三開口O3及第四開口O4。在一些實施例中,第一開口O1對應第一導熱部114h的位置而形成,即對應第一穿孔T1而形成,第三開口O3對應第三導熱部214h的位置而形成,即對應第三穿孔T3而形成。在一些實施例中,第一開口O1、第二開口O2、第三開口O3及第四開口O4可由微影製程形成。As shown in FIG2H , the first photoresist film F1 is patterned to form a first opening O1 and a second opening O2 exposing the first
如圖2I所示,形成第三金屬圖案層118於第一初始金屬層116’上,以及形成第四金屬圖案層218於第二初始金屬層216’上。詳細而言,形成第三金屬圖案層118包含形成第五導熱部118h於第一開口O1中的第一初始金屬層116’上,以及形成第三導通部118c於第二開口O2中的第一初始金屬層116’上,形成第四金屬圖案層218包含形成第六導熱部218h於第三開口O3中的第二初始金屬層216’上,以及形成第四導通部218c於於第四開口O4中的第二初始金屬層216’上。在一些實施例中,第三金屬圖案層118及第四金屬圖案層218的材料可包含金屬,例如銅。在一些實施例中,第三金屬圖案層118及第四金屬圖案層218可由電鍍製程形成。As shown in FIG2I , a third
如圖2J所示,分別形成第一保護層E1、第二保護層E2、第三保護層E3及第四保護層E4於第五導熱部118h、第三導通部118c、第六導熱部218h及第四導通部218c上。在一些實施例中,第一保護層E1、第二保護層E2、第三保護層E3及第四保護層E4的材料可包含金屬,例如錫。在一些實施例中,第一保護層E1、第二保護層E2、第三保護層E3及第四保護層E4可由電鍍製程形成。在一些實施例中,第一保護層E1、第二保護層E2、第三保護層E3及第四保護層E4分別直接接觸第五導熱部118h、第三導通部118c、第六導熱部218h及第四導通部218c。As shown in FIG. 2J , a first protective layer E1, a second protective layer E2, a third protective layer E3, and a fourth protective layer E4 are formed on the fifth
如圖2K所示,移除第一光阻膜F1及第二光阻膜F2。接著,如圖2L所示,以第一保護層E1及第二保護層E2為遮罩,圖案化第三金屬圖案層118下方的第一初始金屬層116’以形成第一金屬層116,以第三保護層E3及第四保護層E4為遮罩,圖案化第四金屬圖案層218下方的第二初始金屬層216’以形成第二金屬層216。在一些實施例中,可由蝕刻製程圖案化第一初始金屬層116’及第二初始金屬層216’。As shown in FIG2K , the first photoresist film F1 and the second photoresist film F2 are removed. Next, as shown in FIG2L , the first
詳細而言,圖案化第一初始金屬層116’的步驟包括形成第二導熱部116h於第一導熱部114h上及形成第一導通部116c於第一基材110上,圖案化第二初始金屬層216’的步驟包括形成第四導熱部216h於第三導熱部214h上及形成第二導通部216c於第二基材210上。換句話說,於第一導熱部114h與第五導熱部118h之間形成第二導熱部116h,於第一基材110與第三導通部118c之間形成第一導通部116c,於第三導熱部214h與第六導熱部218h之間形成第四導熱部216h,於第二基材210與第四導通部218c之間形成第二導通部216c。In detail, the step of patterning the first initial metal layer 116' includes forming the second
請參閱圖1及圖2L,在圖案化第一初始金屬層116’及第二初始金屬層216’之後,移除第一保護層E1、第二保護層E2、第三保護層E3及第四保護層E4,以形成第一線路結構10及第二線路結構20,且可得到如圖1所示包含導熱通道HC、線路通道TC及電流通道CC的電路板1。Please refer to Figures 1 and 2L. After patterning the first initial metal layer 116' and the second initial metal layer 216', the first protective layer E1, the second protective layer E2, the third protective layer E3 and the fourth protective layer E4 are removed to form the
綜上所述,在以上本發明至少一實施例的電路板及其製造方法,可使絕緣層與導熱部、線路部與空腔以及導通部分別做為不同功能的元件通道,進而形成具有多種功能元件通道的電路板,以及提升產品良率與可靠度。In summary, in at least one embodiment of the circuit board and its manufacturing method, the insulating layer and the heat conducting part, the wiring part and the cavity, and the conducting part can be used as component channels with different functions, thereby forming a circuit board with multiple functional component channels and improving product yield and reliability.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,所屬技術領域中具有通常知識者,在不脫離本發明精神和範圍內,當可作些許更動與潤飾,因此本發明保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above by way of embodiments, they are not intended to limit the present invention. A person having ordinary knowledge in the relevant technical field may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the attached patent application.
1:電路板 10:第一線路結構 10’:第一初始線路結構 110:第一基材 110’:第一初始基材 112:第一絕緣層 114:第一金屬圖案層 114h:第一導熱部 114t:第一線路部 116:第一金屬層 116’:第一初始金屬層 116c:第一導通部 116h:第二導熱部 118:第三金屬圖案層 118c:第三導通部 118h:第五導熱部 20:第二線路結構 20’:第二初始線路結構 210:第二基材 210’:第二初始基材 212:第二絕緣層 214:第二金屬圖案層 214h:第三導熱部 214t:第二線路部 216:第二金屬層 216’:第二初始金屬層 216c:第二導通部 216h:第四導熱部 218:第四金屬圖案層 218c:第四導通部 218h:第六導熱部 30:核心層 C1:第一空腔 C2:第二空腔 CC:電流通道 E1:第一保護層 E2:第二保護層 E3:第三保護層 E4:第四保護層 F1:第一光阻膜 F2:第二光阻膜 HC:導熱通道 O1:第一開口 O2:第二開口 O3:第三開口 O4:第四開口 S1:第一表面 S2:第二表面 T1:第一穿孔 T2:第二穿孔 T3:第三穿孔 T4:第四穿孔 TC:線路通道1: Circuit board 10: First circuit structure 10': First initial circuit structure 110: First substrate 110': First initial substrate 112: First insulating layer 114: First metal pattern layer 114h: First heat conducting portion 114t: First circuit portion 116: First metal layer 116': First initial metal layer 116c: First conductive portion 116h: Second heat conducting portion 118: Third metal pattern layer 118c: Third conductive portion 118h: Fifth heat conducting portion 20: Second circuit structure 20': Second initial circuit structure 210: Second substrate 210': Second initial substrate 212: Second insulating layer 214: Second metal pattern layer 214h: Third heat conducting portion 214t: second circuit portion 216: second metal layer 216': second initial metal layer 216c: second conductive portion 216h: fourth heat conducting portion 218: fourth metal pattern layer 218c: fourth conductive portion 218h: sixth heat conducting portion 30: core layer C1: first cavity C2: second cavity CC: current channel E1: first protective layer E2: second protective layer E3: third protective layer E4: fourth protective layer F1: first photoresist film F2: second photoresist film HC: heat conducting channel O1: first opening O2: second opening O3: third opening O4: fourth opening S1: first surface S2: second surface T1: first through hole T2: second through hole T3: third through hole T4: fourth through hole TC: circuit channel
圖1是本發明至少一實施例的電路板的局部剖面示意圖;以及 圖2A到圖2L是本發明至少一實施例的電路板在不同製程階段的局部剖面圖。FIG. 1 is a partial cross-sectional schematic diagram of a circuit board according to at least one embodiment of the present invention; and FIG. 2A to FIG. 2L are partial cross-sectional diagrams of a circuit board according to at least one embodiment of the present invention at different manufacturing stages.
國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無Domestic storage information (please note the order of storage institution, date, and number) None Overseas storage information (please note the order of storage country, institution, date, and number) None
1:電路板 1: Circuit board
10:第一線路結構 10: First circuit structure
110:第一基材 110: First substrate
112:第一絕緣層 112: First insulation layer
114:第一金屬圖案層 114: First metal pattern layer
114h:第一導熱部 114h: First heat transfer part
114t:第一線路部 114t: First Line Department
116:第一金屬層 116: First metal layer
116c:第一導通部 116c: first conductive part
116h:第二導熱部 116h: Second heat transfer part
118:第三金屬圖案層 118: The third metal pattern layer
118c:第三導通部 118c: Third conductive part
118h:第五導熱部 118h: Fifth heat conduction part
20:第二線路結構 20: Second circuit structure
210:第二基材 210: Second substrate
212:第二絕緣層 212: Second insulation layer
214:第二金屬圖案層 214: Second metal pattern layer
214h:第三導熱部 214h: The third heat transfer part
214t:第二線路部 214t: Second line unit
216:第二金屬層 216: Second metal layer
216c:第二導通部 216c: Second conductive part
216h:第四導熱部 216h: Fourth heat transfer part
218:第四金屬圖案層 218: Fourth metal pattern layer
218c:第四導通部 218c: Fourth conductive part
218h:第六導熱部 218h: Sixth heat transfer unit
30:核心層 30: Core layer
C1:第一空腔 C1: First cavity
C2:第二空腔 C2: Second cavity
CC:電流通道 CC: Current Channel
HC:導熱通道 HC: Heat conduction channel
S1:第一表面 S1: First surface
S2:第二表面 S2: Second surface
T1:第一穿孔 T1: First piercing
T2:第二穿孔 T2: Second piercing
T3:第三穿孔 T3: Third piercing
T4:第四穿孔 T4: Fourth piercing
TC:線路通道 TC: Line channel
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN202310882697.9A CN119342678A (en) | 2023-07-18 | 2023-07-18 | Circuit board and method for manufacturing the same |
CN2023108826979 | 2023-07-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI851352B TWI851352B (en) | 2024-08-01 |
TW202505943A true TW202505943A (en) | 2025-02-01 |
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TW112127543A TWI851352B (en) | 2023-07-18 | 2023-07-24 | Circuit board and manufacturing method thereof |
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CN (1) | CN119342678A (en) |
TW (1) | TWI851352B (en) |
Family Cites Families (3)
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KR101902392B1 (en) * | 2011-10-26 | 2018-10-01 | 엘지이노텍 주식회사 | Light emitting device |
CN111564374A (en) * | 2020-07-15 | 2020-08-21 | 珠海越亚半导体股份有限公司 | Method for manufacturing package substrate |
CN116232271A (en) * | 2023-02-27 | 2023-06-06 | 中电科技德清华莹电子有限公司 | Elastic wave device of composite film substrate |
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- 2023-07-18 CN CN202310882697.9A patent/CN119342678A/en active Pending
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