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CN101483971B - Circuit board and manufacturing method thereof - Google Patents

Circuit board and manufacturing method thereof Download PDF

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Publication number
CN101483971B
CN101483971B CN2008100031057A CN200810003105A CN101483971B CN 101483971 B CN101483971 B CN 101483971B CN 2008100031057 A CN2008100031057 A CN 2008100031057A CN 200810003105 A CN200810003105 A CN 200810003105A CN 101483971 B CN101483971 B CN 101483971B
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main line
masked segment
shielded
line
dielectric layer
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CN101483971A (en
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陈宗源
曾子章
江书圣
郑振华
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Unimicron Technology Corp
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Abstract

The invention discloses a circuit board and a manufacturing method thereof. The circuit board comprises a dielectric layer, a main circuit and two shielding circuits. The dielectric layer has an active surface. The main circuit is embedded in the dielectric layer, and the main circuit below the active surface is covered by the dielectric layer. The shielding circuits are arranged on the dielectric layer and are respectively positioned on two sides of the main circuit, and each shielding circuit is a continuous metal circuit. Wherein the thickness of the shielding circuit is greater than that of the main circuit.

Description

线路板及其制作方法 Circuit board and its manufacturing method

技术领域technical field

本发明涉及一种线路板及其制作方法,且特别涉及一种具有电磁屏蔽功效的线路板及其制作方法。 The invention relates to a circuit board and a manufacturing method thereof, in particular to a circuit board with electromagnetic shielding effect and a manufacturing method thereof. the

背景技术Background technique

一般而言,用以承载或是电性连接多个电子元件的线路板是由多个图案化导电层以及多个介电层交替叠合所构成。其中,这些图案化导电层是由铜箔层(copper foil)经过光刻蚀刻所定义形成的。这些介电层则是分别配置于两相邻的图案化导电层之间,以隔离这些图案化导电层。另外,线路板的表面上还可配置各种电子元件(例如有源元件或无源元件),并通过线路板内部线路来达到电性信号传递(electrical signal propagation)的目的。 Generally speaking, a circuit board for carrying or electrically connecting multiple electronic components is composed of multiple patterned conductive layers and multiple dielectric layers stacked alternately. Wherein, these patterned conductive layers are defined and formed by copper foil layer (copper foil) through photolithographic etching. The dielectric layers are respectively disposed between two adjacent patterned conductive layers to isolate the patterned conductive layers. In addition, various electronic components (such as active components or passive components) can also be arranged on the surface of the circuit board, and the purpose of electrical signal propagation can be achieved through the internal circuit of the circuit board. the

值得一提的是,随着这些电子元件之间传输的电性信号的频率越来越高,主要线路之间的电磁干扰及噪声会越来越严重。图1即绘示已知的一种防止电磁干扰的线路板的示意图。请参考图1,在已知的线路板100中,为解决主要线路110容易受到邻近线路或是电子元件的电磁干扰或是噪声的影响,已知技术即在主要线路110的上方以及下方额外增设用以屏蔽电磁干扰及噪声的叠层120(此叠层120为具有屏蔽功效的金属层122以及介电层124的组合)。然而,额外于主要线路110上方以及下方增设叠层120会使得线路板100的整体厚度较厚,不符合电子产品轻薄化的发展趋势。 It is worth mentioning that as the frequency of the electrical signals transmitted between these electronic components becomes higher and higher, the electromagnetic interference and noise between the main lines will become more and more serious. FIG. 1 is a schematic diagram of a known circuit board for preventing electromagnetic interference. Please refer to FIG. 1. In the known circuit board 100, in order to solve the problem that the main circuit 110 is easily affected by electromagnetic interference or noise from adjacent circuits or electronic components, the known technology is to add an additional circuit board above and below the main circuit 110. A laminated layer 120 for shielding electromagnetic interference and noise (the laminated layer 120 is a combination of a metal layer 122 and a dielectric layer 124 with shielding effect). However, additionally adding laminated layers 120 above and below the main circuit 110 will make the overall thickness of the circuit board 100 thicker, which is not in line with the development trend of thinner and lighter electronic products. the

发明内容Contents of the invention

本发明提供一种线路板及其制作方法,以使得线路板内部的主要线路有良好的信号传递功效,且能符合轻薄化的发展趋势。 The invention provides a circuit board and a manufacturing method thereof, so that the main circuit inside the circuit board has a good signal transmission effect and can meet the development trend of lightness and thinness. the

本发明提出一种线路板,其包括介电层、主要线路(main circuit)以及二屏蔽线路(shielding circuit)。介电层具有有源表面。主要线路内埋于介电层,且位于该有源表面以下的该主要线路被该介电层所包覆。这些屏蔽线路配置于该介电层,且分别位于主要线路的两侧,且各该屏蔽线路为连续的金属线路。其中,主要线路具有第一厚度,屏蔽线路具有第二厚度,第二厚度大于 该第一厚度。 The invention provides a circuit board, which includes a dielectric layer, a main circuit and two shielding circuits. The dielectric layer has an active surface. The main circuit is embedded in the dielectric layer, and the main circuit located below the active surface is covered by the dielectric layer. The shielding lines are arranged on the dielectric layer and are respectively located on two sides of the main line, and each of the shielding lines is a continuous metal line. Wherein, the main circuit has a first thickness, the shielded circuit has a second thickness, and the second thickness is greater than the first thickness. the

在本发明的一实施例中,屏蔽线路包括第一屏蔽部分以及第二屏蔽部分,第一屏蔽部分内埋于介电层,并与有源表面共平面,而第二屏蔽部分与第一屏蔽部分相接,且第一屏蔽部分的厚度实质上等于第一厚度。 In an embodiment of the present invention, the shielded circuit includes a first shielding part and a second shielding part, the first shielding part is buried in the dielectric layer and is coplanar with the active surface, and the second shielding part is the same as the first shielding part The parts are connected, and the thickness of the first shielding part is substantially equal to the first thickness. the

在本发明的一实施例中,第二屏蔽部分配置于有源表面上,且与第一屏蔽部分相接。 In an embodiment of the present invention, the second shielding portion is disposed on the active surface and is in contact with the first shielding portion. the

在本发明的一实施例中,第二屏蔽部分内埋于介电层。 In an embodiment of the invention, the second shielding portion is embedded in the dielectric layer. the

在本发明的一实施例中,屏蔽线路还包括第三屏蔽部分,其配置于有源表面上,且与第一屏蔽部分相接。 In an embodiment of the present invention, the shielded circuit further includes a third shielding portion disposed on the active surface and connected to the first shielding portion. the

本发明再提出一种线路板的制作方法,其包括下列步骤。首先,提供介电层,其具有有源表面。接着,提供载板,并于载板上形成主要线路以及屏蔽线路,其中这些屏蔽线路分别位于主要线路的两侧,且屏蔽线路的厚度大于主要线路的厚度。接着,于介电层的有源表面上压合具有主要线路以及这些屏蔽线路的载板。之后,移除载板,而主要线路以及这些屏蔽线路与有源表面共平面。 The present invention further proposes a method for manufacturing a circuit board, which includes the following steps. First, a dielectric layer is provided, which has an active surface. Next, a carrier board is provided, and a main circuit and a shielded circuit are formed on the carrier board, wherein the shielded circuits are respectively located on two sides of the main circuit, and the thickness of the shielded circuit is greater than that of the main circuit. Then, press-bond the carrier board with the main lines and the shielding lines on the active surface of the dielectric layer. Afterwards, the carrier board is removed, and the main traces, as well as these shielded traces, are coplanar with the active surface. the

在本发明的一实施例中,形成主要线路以及这些屏蔽线路的方法为电镀工艺(electroplating)。 In an embodiment of the present invention, the method of forming the main lines and the shielding lines is electroplating. the

在本发明的一实施例中,于载板上形成主要线路以及这些屏蔽线路的方法包括下列步骤。首先,于载板上形成第一图案化光致抗蚀剂层,第一图案化光致抗蚀剂层具有多个开口,其中这些开口暴露出部分载板。接着,于这些开口中形成主要线路以及二第一屏蔽部分,这些第一屏蔽部分形成于主要线路两侧的这些开口中,且第一屏蔽部分的厚度实质上等于主要线路的厚度。接着,于主要线路上覆盖第二图案化光致抗蚀剂层。接着,于每个第一屏蔽部分上形成第二屏蔽部分,其中每个屏蔽线路包括第一屏蔽部分与所对应的第二屏蔽部分。之后,移除第一图案化光致抗蚀剂层以及第二图案化光致抗蚀剂层。 In an embodiment of the present invention, a method for forming main circuits and the shielded circuits on a carrier includes the following steps. Firstly, a first patterned photoresist layer is formed on the carrier board. The first patterned photoresist layer has a plurality of openings, wherein the openings expose part of the carrier board. Then, a main line and two first shielding parts are formed in the openings, the first shielding parts are formed in the openings on both sides of the main line, and the thickness of the first shielding part is substantially equal to the thickness of the main line. Then, cover the second patterned photoresist layer on the main circuit. Next, a second shielding portion is formed on each first shielding portion, wherein each shielding line includes the first shielding portion and a corresponding second shielding portion. Afterwards, the first patterned photoresist layer and the second patterned photoresist layer are removed. the

在本发明的一实施例中,于载板形成第一图案化光致抗蚀剂层之前还包括于载板上形成电镀种子层(plating seed layer)。 In an embodiment of the present invention, before forming the first patterned photoresist layer on the carrier, it further includes forming a plating seed layer on the carrier. the

在本发明的一实施例中,移除载板之后还包括于有源表面上形成二第三屏蔽部分,每个第三屏蔽部分分别与第一屏蔽部分相接,而每个屏蔽线路包 括第一屏蔽部分与所对应的第二屏蔽部分、第三屏蔽部分。 In an embodiment of the present invention, after removing the carrier board, it also includes forming two third shielding parts on the active surface, each third shielding part is respectively connected to the first shielding part, and each shielding line includes The first shielding part corresponds to the second shielding part and the third shielding part. the

在本发明的一实施例中,形成主要线路、这些第一屏蔽部分以及这些第二屏蔽部分的方法为电镀工艺,而形成第三屏蔽部分的方法为喷印工艺(ink-jet printing)。 In an embodiment of the present invention, the method of forming the main circuit, the first shielding parts and the second shielding parts is an electroplating process, and the method of forming the third shielding part is ink-jet printing. the

在本发明的一实施例中,于介电层内埋主要线路以及于该介电层配置二屏蔽线路的方法包括下列步骤。首先,提供载板,并于载板形成第一图案化光致抗蚀剂层,第一图案化光致抗蚀剂层具有多个开口,其中这些开口暴露出部分载板。接着,于这些开口中形成主要线路以及二第一屏蔽部分,这些第一屏蔽部分形成于主要线路两侧的开口中,且第一屏蔽部分的厚度实质上等于主要线路的厚度。紧接着,移除第一图案化光致抗蚀剂层。然后,于介电层的有源表面上压合具有主要线路以及这些第一屏蔽部分的载板。接着,移除载板,而主要线路以及这些第一屏蔽部分与有源表面共平面。之后,于有源表面上形成二第二屏蔽部分,这些第二屏蔽部分分别与每个第一屏蔽部分相接,而每个屏蔽线路包括第一屏蔽部分与所对应的第二屏蔽部分。 In one embodiment of the present invention, the method for embedding a main circuit in a dielectric layer and disposing two shielding circuits in the dielectric layer includes the following steps. First, a carrier is provided, and a first patterned photoresist layer is formed on the carrier. The first patterned photoresist layer has a plurality of openings, wherein the openings expose part of the carrier. Then, a main line and two first shielding parts are formed in the openings, the first shielding parts are formed in the openings on both sides of the main line, and the thickness of the first shielding part is substantially equal to the thickness of the main line. Next, the first patterned photoresist layer is removed. Then, press-bond the carrier board with the main lines and the first shielding parts on the active surface of the dielectric layer. Next, the carrier plate is removed, and the main lines and these first shielding portions are coplanar with the active surface. Afterwards, two second shielding parts are formed on the active surface, and these second shielding parts are connected to each first shielding part respectively, and each shielding line includes the first shielding part and the corresponding second shielding part. the

在本发明的线路板中,每个主要线路的两侧分别设有屏蔽线路,屏蔽线路的厚度是大于主要线路的厚度。因此,屏蔽线路能有效地改善主要线路间的电磁干扰问题,主要线路即有良好的信号传输品质。值得一提的是,本发明除了能有效地改善主要线路间的电磁干扰问题以外,亦能使线路板能符合电子产品轻薄化的发展趋势。 In the circuit board of the present invention, shielding circuits are provided on both sides of each main circuit, and the thickness of the shielding circuit is greater than that of the main circuit. Therefore, shielded lines can effectively improve the electromagnetic interference between main lines, and the main lines have good signal transmission quality. It is worth mentioning that the present invention can not only effectively improve the electromagnetic interference problem between the main circuits, but also make the circuit board comply with the development trend of thinner and lighter electronic products. the

为让本发明的上述特征和优点能更明显易懂,下文特举优选实施例,并配合附图,作详细说明如下。 In order to make the above-mentioned features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings. the

附图说明Description of drawings

图1即绘示已知的一种防止电磁干扰的线路板的示意图。 FIG. 1 is a schematic diagram of a known circuit board for preventing electromagnetic interference. the

图2绘示本发明一实施例的线路板的制作流程图。 FIG. 2 shows a flow chart of manufacturing a circuit board according to an embodiment of the present invention. the

图3A至图3H绘示本发明一实施例的线路板的制作流程立体图。 FIG. 3A to FIG. 3H are perspective views illustrating the manufacturing process of the circuit board according to an embodiment of the present invention. the

图4绘示本发明另一实施例的线路板的立体图 Fig. 4 depicts the perspective view of the circuit board of another embodiment of the present invention

图5A至图5E绘示本发明再一实施例的线路板的制作流程立体图。 FIG. 5A to FIG. 5E are perspective views showing the manufacturing process of the circuit board according to another embodiment of the present invention. the

附图标记说明 Explanation of reference signs

100:线路板    110:主要线路 100: circuit board 110: main circuit

120:叠层      122:金属层 120: Lamination 122: Metal layer

300、300’、300”:线路板        310:介电层 300, 300’, 300”: circuit board 310: dielectric layer

312:有源表面                    320:主要线路 312: Active surface 320: Main line

330、330’、300”:屏蔽线路      332:第一屏蔽部分 330, 330’, 300”: shielded line 332: first shielded part

334、334’:第二屏蔽部分         336:第三屏蔽部分 334, 334': the second shielding part 336: the third shielding part

340:电镀种子层                  350:第一图案化光致抗蚀剂层 340: Plating seed layer 350: First patterned photoresist layer

352:开口                        360:第二图案化光致抗蚀剂层 352: Opening 360: Second patterned photoresist layer

370:载板                        X1:第一厚度 370: carrier board X1: first thickness

X2:第二厚度                     S1、S2:各个步骤 X2: second thickness S1, S2: each step

具体实施方式Detailed ways

图2绘示本发明一实施例的线路板的制作流程图。请参考图2,本实施例的线路板的制作方法包括下列步骤:首先,如步骤S1所述,提供介电层,其具有有源表面。接着,如步骤S2所述,于介电层内埋一主要线路以及于介电层配置二屏蔽线路,其中这些屏蔽线路分别位于主要线路的两侧,且屏蔽线路的厚度大于主要线路的厚度。为能更清楚地了解图2所示的线路板的制作方法,本实施例将于下文中以详细的立体流程图来做说明。 FIG. 2 shows a flow chart of manufacturing a circuit board according to an embodiment of the present invention. Please refer to FIG. 2 , the manufacturing method of the circuit board in this embodiment includes the following steps: First, as described in step S1 , a dielectric layer is provided, which has an active surface. Next, as described in step S2 , a main circuit is buried in the dielectric layer and two shielded circuits are arranged in the dielectric layer, wherein the shielded circuits are respectively located on two sides of the main circuit, and the thickness of the shielded circuit is greater than that of the main circuit. In order to understand more clearly the manufacturing method of the circuit board shown in FIG. 2 , this embodiment will be described below with a detailed three-dimensional flow chart. the

图3A至图3H绘示本发明一实施例的线路板的制作流程立体图。首先,如图3A所示,提供介电层310,其具有有源表面312。接着,如图3B至图3E所示,预先于载板370上制作主要线路320以及位于主要线路320两侧的二屏蔽线路330。其中,本实施例例如是在载板370上先形成电镀种子层340,并于电镀种子层340上形成第一图案化光致抗蚀剂层350(如图3B所示),以利后续主要线路320以及屏蔽线路330的制作过程。在本实施例中,第一图案化光致抗蚀剂层350例如是利用光刻工艺以形成于载板370上。第一图案化光致抗蚀剂层350有多个开口352,且这些开口352暴露出部分载板370上的电镀种子层340。 FIG. 3A to FIG. 3H are perspective views illustrating the manufacturing process of the circuit board according to an embodiment of the present invention. First, as shown in FIG. 3A , a dielectric layer 310 having an active surface 312 is provided. Next, as shown in FIG. 3B to FIG. 3E , the main circuit 320 and the two shielded circuits 330 located on both sides of the main circuit 320 are prefabricated on the carrier board 370 . Wherein, in this embodiment, for example, the electroplating seed layer 340 is first formed on the carrier 370, and the first patterned photoresist layer 350 (as shown in FIG. 3B ) is formed on the electroplating seed layer 340, so as to facilitate subsequent The manufacturing process of the circuit 320 and the shielded circuit 330. In this embodiment, the first patterned photoresist layer 350 is formed on the carrier 370 by using a photolithography process, for example. The first patterned photoresist layer 350 has a plurality of openings 352 , and these openings 352 expose part of the electroplating seed layer 340 on the carrier 370 . the

在载板370上形成电镀种子层340以及第一图案化光致抗蚀剂层350之后,接着例如是利用电镀工艺在这些开口352中形成主要线路320以及二第一屏蔽部分332(如图3C所示)。在本实施例中,这些第一屏蔽部分332是形成于主要线路320两侧的开口352中,且主要线路320具有第一厚度X1,第一厚度X1实质上等于第一屏蔽部分332的厚度。接着,于主要线路320上覆盖第二图案化光致抗蚀剂层360(第二图案化光致抗蚀剂层360亦例如是 利用光刻工艺以形成于主要线路320上),并再次应用电镀工艺于开口中的第一屏蔽部分332上形成第二屏蔽部分334(如图3D所示),而每个第一屏蔽部分332与所对应的第二屏蔽部分334即构成屏蔽线路330,而屏蔽线路330具有第二厚度X2,其大于主要线路的厚度X1。当然,其他优选实施例亦可应用其他适当的工艺以在开口中形成主要线路320、第一屏蔽部分332以及第二屏蔽部分334,本发明在此并不做任何限制。 After the electroplating seed layer 340 and the first patterned photoresist layer 350 are formed on the carrier 370, the main lines 320 and two first shielding parts 332 are formed in the openings 352 by, for example, an electroplating process (as shown in FIG. 3C shown). In this embodiment, the first shielding portions 332 are formed in the openings 352 on both sides of the main circuit 320 , and the main circuit 320 has a first thickness X1 substantially equal to the thickness of the first shielding portions 332 . Then, cover the second patterned photoresist layer 360 on the main circuit 320 (the second patterned photoresist layer 360 is also, for example, formed on the main circuit 320 by photolithography process), and apply again The electroplating process forms a second shielding portion 334 on the first shielding portion 332 in the opening (as shown in FIG. 3D ), and each first shielding portion 332 and the corresponding second shielding portion 334 constitute a shielding circuit 330, and The shielding line 330 has a second thickness X2 which is greater than the thickness X1 of the main line. Of course, in other preferred embodiments, other suitable processes can also be used to form the main circuit 320 , the first shielding portion 332 and the second shielding portion 334 in the opening, which is not limited by the present invention. the

再次应用电镀工艺于每个第一屏蔽部分332上形成第二屏蔽部分334之后,接着移除上述第一图案化光致抗蚀剂层、第二图案化光致抗蚀剂层以及第一图案化光致抗蚀剂层所覆盖的部分电镀种子层(如图3E所示)。如此一来,本实施例即完成在载板370上制作主要线路320及屏蔽线路330的流程。 After the electroplating process is applied again to form the second shielding portion 334 on each of the first shielding portions 332, then the first patterned photoresist layer, the second patterned photoresist layer and the first pattern are removed. Part of the electroplating seed layer covered by the photoresist layer (as shown in FIG. 3E ). In this way, this embodiment completes the process of fabricating the main circuit 320 and the shielding circuit 330 on the carrier board 370 . the

于载板370上完成主要线路320以及屏蔽线路330的制作后,接着如图3F至图3G所示,于介电层310的有源表面312上压合具有主要线路320以及这些屏蔽线路330的载板370。其中,主要线路320以及这些屏蔽线路330例如是被压合于介电层310与载板370之间。此外,由于载板370上的二屏蔽线路330是分别位于主要线路320两侧,因此当具有主要线路320以及这些屏蔽线路330的载板370压合于介电层310的有源表面312时,内埋于介电层310中的屏蔽线路330仍是位于主要线路320的两侧。之后,如图3H所示,移除载板370,而主要线路320以及这些屏蔽线路330即内埋于介电层310中,且主要线路320以及这些屏蔽线路330例如是与有源表面312共平面。如此一来,本实施例即完成线路板300的制作。 After the main circuit 320 and the shielded circuit 330 are fabricated on the carrier board 370, as shown in FIG. 3F to FIG. carrier plate 370 . Wherein, the main circuit 320 and the shielded circuits 330 are, for example, pressed and bonded between the dielectric layer 310 and the carrier 370 . In addition, since the two shielded lines 330 on the carrier board 370 are located on both sides of the main line 320 respectively, when the carrier board 370 with the main line 320 and these shielded lines 330 is pressed on the active surface 312 of the dielectric layer 310, The shielding trace 330 embedded in the dielectric layer 310 is still located on both sides of the main trace 320 . Afterwards, as shown in FIG. 3H , the carrier 370 is removed, and the main lines 320 and the shielded lines 330 are buried in the dielectric layer 310 , and the main lines 320 and the shielded lines 330 are shared with the active surface 312 , for example. flat. In this way, the fabrication of the circuit board 300 is completed in this embodiment. the

值得一提的是,由于主要线路320的两侧分别有屏蔽线路330,且屏蔽线路330的第二厚度X2是大于主要线路的厚度X1,因此与主要线路320相邻的其他主要线路(未绘示)或是电子元件(未绘示)所产生的电磁效应即不易对主要线路320产生干扰。换言之,本实施的线路板300有较佳的信号传输品质。此外,由于本实施例是在主要线路320的两侧设置屏蔽线路330,因此线路板300整体有较薄的厚度。 It is worth mentioning that since there are shielded lines 330 on both sides of the main line 320, and the second thickness X2 of the shielded line 330 is greater than the thickness X1 of the main line, other main lines (not shown) adjacent to the main line 320 Shown) or electromagnetic effects generated by electronic components (not shown) are less likely to interfere with the main circuit 320 . In other words, the circuit board 300 of this embodiment has better signal transmission quality. In addition, because in this embodiment, the shielding circuit 330 is disposed on both sides of the main circuit 320 , the overall circuit board 300 has a relatively thin thickness. the

此外,在移除载板370(如图3H所示)之后,亦可以于介电层310的有源表面312上形成二对应这些第一屏蔽部分332的第三屏蔽部分336(如图4所示,其绘示本发明另一实施例的线路板的立体图),以完成另一实施例的线路板300’的制作。在线路板300’中,这些第三屏蔽部分336是分别与内埋于介电层310且与有源表面312共平面的二第一屏蔽部分332相接。其中,每 个的屏蔽线路330’即是包括第一屏蔽部分332与所对应的第二屏蔽部分334、第三屏蔽部分336。本实施例例如是通过喷印工艺来形成上述的第三屏蔽部分336。当然,其他优选实施例亦可通过上述实施例所述的电镀工艺来制作第三屏蔽部分336。 In addition, after removing the carrier 370 (as shown in FIG. 3H ), two third shielding portions 336 corresponding to the first shielding portions 332 (as shown in FIG. 4 ) can also be formed on the active surface 312 of the dielectric layer 310. , which shows a perspective view of a circuit board in another embodiment of the present invention), to complete the fabrication of a circuit board 300' in another embodiment. In the circuit board 300', the third shielding portions 336 are in contact with the two first shielding portions 332 embedded in the dielectric layer 310 and coplanar with the active surface 312, respectively. Wherein, each shielding line 330' includes a first shielding part 332 and a corresponding second shielding part 334 and a third shielding part 336. In this embodiment, for example, the aforementioned third shielding portion 336 is formed by a jet printing process. Of course, in other preferred embodiments, the third shielding portion 336 can also be fabricated through the electroplating process described in the above embodiments. the

图5A至图5E绘示本发明再一实施例的线路板的制作流程立体图。请先参考图5A,在完成图3C的步骤(于开口中形成主要线路320以及第一屏蔽部分332)之后,本实施例可先移除载板370上的第一图案化光致抗蚀剂层以及第一图案化光致抗蚀剂层所覆盖的电镀种子层。接着,如图5B至图5C所示,于介电层310的有源表面312上压合具有主要线路320以及这些第一屏蔽部分332的载板370。其中,主要线路320以及这些第一屏蔽部分332例如是被压合于介电层310与载板370之间。此外,由于载板370上的二第一屏蔽部分332是分别位于主要线路320两侧,因此当具有主要线路320以及这些第一屏蔽部分332的载板370压合于介电层310的有源表面312时,内埋于介电层310中的二第一屏蔽部分332仍是位于主要线路320的两侧。 FIG. 5A to FIG. 5E are perspective views showing the manufacturing process of the circuit board according to another embodiment of the present invention. Please refer to FIG. 5A first. After completing the step in FIG. 3C (forming the main line 320 and the first shielding portion 332 in the opening), the first patterned photoresist on the carrier 370 can be removed first in this embodiment. layer and the plating seed layer covered by the first patterned photoresist layer. Next, as shown in FIGS. 5B to 5C , the carrier 370 having the main lines 320 and the first shielding portions 332 is bonded on the active surface 312 of the dielectric layer 310 . Wherein, the main circuit 320 and the first shielding parts 332 are pressed between the dielectric layer 310 and the carrier 370 , for example. In addition, since the two first shielding parts 332 on the carrier board 370 are located on both sides of the main circuit 320 respectively, when the carrier board 370 with the main circuit 320 and these first shielding parts 332 is pressed to the active part of the dielectric layer 310 The two first shielding portions 332 embedded in the dielectric layer 310 are still located on both sides of the main circuit 320 when the surface 312 is exposed. the

接着,如图5D所示,移除载板370,而内埋于介电层310的主要线路320以及这些第一屏蔽部分332是与有源表面312共平面。之后,如图5E所示,例如可通过喷印工艺以于有源表面312上形成二第二屏蔽部分334’,以完成本实施例的线路板300”的制作。其中,这些例如是铜膏的第二屏蔽部分334’分别与每个第一屏蔽部分332相接,而每个第一屏蔽部分332与所对应的第二屏蔽部分334’即构成本实施例的屏蔽线路330”。 Next, as shown in FIG. 5D , the carrier 370 is removed, and the main lines 320 embedded in the dielectric layer 310 and the first shielding portions 332 are coplanar with the active surface 312 . Afterwards, as shown in FIG. 5E , for example, two second shielding portions 334 ′ can be formed on the active surface 312 by a spray printing process to complete the production of the circuit board 300 ″ of this embodiment. Wherein, these are, for example, copper paste The second shielding portion 334' is connected to each first shielding portion 332 respectively, and each first shielding portion 332 and the corresponding second shielding portion 334' constitute the shielded circuit 330" of this embodiment. the

综上所述,本发明是在每个主要线路的两侧分别设置厚度大于主要线路厚度的屏蔽线路,因此与主要线路相邻的电子元件或是其他主要线路所产生的电磁效应即不易对此主要线路的信号传输品质造成影响。亦即,此主要线路有较佳的信号传输品质。此外,由于本发明是在主要线路的两侧设置屏蔽线路,且主要线路以及屏蔽线路主要是内埋于介电层中,因此相较于已知技术在主要线路上方以及下方额外增设用以屏蔽电磁干扰及噪声的叠层,本发明的线路板有较薄的整体厚度。换言之,本发明的线路板除了有良好的信号传递功效以外,亦能符合电子产品轻薄化的发展趋势。 In summary, the present invention sets shielding lines with a thickness greater than the thickness of the main lines on both sides of each main line, so that the electromagnetic effects generated by the electronic components adjacent to the main lines or other main lines are not easy to respond. The signal transmission quality of the main line is affected. That is, the main line has better signal transmission quality. In addition, since the present invention sets shielding lines on both sides of the main lines, and the main lines and the shielding lines are mainly embedded in the dielectric layer, compared with the known technology, additional shielding lines are added above and below the main lines. Lamination of electromagnetic interference and noise, the circuit board of the present invention has a thinner overall thickness. In other words, the circuit board of the present invention not only has good signal transmission efficiency, but also conforms to the development trend of thinner and lighter electronic products. the

虽然本发明已以优选实施例披露如上,然其并非用以限定本发明,本领域技术人员在不脱离本发明的精神和范围内,当可作些许的更动与润饰,因此本发明的保护范围当视后附的权利要求所界定的为准。 Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope is to be determined as defined by the appended claims. the

Claims (12)

1. wiring board comprises:
Dielectric layer has active surface;
Main line, in be embedded in this dielectric layer, and with this active surperficial copline, wherein this main line has first thickness, and is positioned at this following main line of this active surface and is coated by this dielectric layer; And
Two shielded lines are disposed at this dielectric layer, and lay respectively at the both sides of this main line, and wherein respectively this shielded line has second thickness, and this second thickness is greater than this first thickness, and respectively this shielded line is continuous metallic circuit.
2. wiring board as claimed in claim 1, wherein respectively this shielded line comprises first masked segment and secondary shielding part, be embedded in this dielectric layer in this first masked segment, and with this active surperficial copline, and this secondary shielding part is joined with this first masked segment, and the thickness of this first masked segment equals this first thickness in fact.
3. wiring board as claimed in claim 2, wherein this secondary shielding partly is disposed on this active surface, and joins with this first masked segment.
4. wiring board as claimed in claim 2 wherein is embedded in this dielectric layer in this secondary shielding part.
5. wiring board as claimed in claim 4, wherein respectively this shielded line also comprises the 3rd masked segment, it is disposed on this active surface, and joins with this first masked segment.
6. the manufacture method of a wiring board comprises:
Dielectric layer is provided, and it has active surface;
Support plate is provided, and forms a main line and this shielded line on this support plate, wherein this shielded line lays respectively at the both sides of this main line, and the thickness of this shielded line is greater than the thickness of this main line;
Pressing has this support plate of this main line and this shielded line on this active surface of this dielectric layer; And
Remove this support plate, and this main line and this shielded line and this active surperficial copline.
7. the manufacture method of wiring board as claimed in claim 6, the method that wherein forms this main line and this shielded line is an electroplating technology.
8. the manufacture method of wiring board as claimed in claim 6, the method that wherein forms this main line and this shielded line on this support plate comprises:
Form the first patterning photoresist layer on this support plate, this first patterning photoresist layer has a plurality of openings, and wherein this opening exposes this support plate of part;
Form this main line and 2 first masked segments in this opening, this first masked segment is formed in this opening of these main line both sides, and the thickness of this first masked segment equals the thickness of this main line in fact;
On this main line, cover the second patterning photoresist layer;
In respectively forming the secondary shielding part on this first masked segment, wherein respectively this shielded line comprises respectively this first masked segment and pairing this secondary shielding part; And
Remove this first patterning photoresist layer and this second patterning photoresist layer.
9. the manufacture method of wiring board as claimed in claim 8 wherein also was included on this support plate before this support plate forms this first patterning photoresist layer and forms plating seed layer.
10. the manufacture method of wiring board as claimed in claim 8, also be included in formation 2 the 3rd masked segments on this active surface after wherein removing this support plate, the 3rd masked segment joins with this first masked segment respectively, and respectively this shielded line comprises respectively this first masked segment and pairing this secondary shielding part, the 3rd masked segment.
11. the manufacture method of wiring board as claimed in claim 10, the method that wherein forms this main line, this first masked segment and this secondary shielding part is an electroplating technology, and the method that forms the 3rd masked segment is a jet printing technique.
12. the manufacture method of wiring board as claimed in claim 6 is wherein buried this main line and is comprised in the method that this dielectric layer disposes two shielded lines in this dielectric layer:
Support plate is provided, and forms the first patterning photoresist layer in this support plate, this first patterning photoresist layer has a plurality of openings, and wherein this opening exposes this support plate of part;
Form this main line and 2 first masked segments in this opening, this first masked segment is formed in this opening of these main line both sides, and the thickness of this first masked segment equals the thickness of this main line in fact;
Remove this first patterning photoresist layer;
Pressing has this support plate of this main line and this first masked segment on this active surface of this dielectric layer;
Remove this support plate, this main line and this first masked segment and this active surperficial copline; And
Form two secondary shielding parts on this active surface, this secondary shielding part is joined with this first masked segment respectively, and respectively this shielded line comprises respectively this first masked segment and pairing this secondary shielding part.
CN2008100031057A 2008-01-10 2008-01-10 Circuit board and manufacturing method thereof Expired - Fee Related CN101483971B (en)

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CN1902990A (en) * 2003-12-24 2007-01-24 莫莱克斯公司 Electromagnetically shielded slot transmission line

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Publication number Priority date Publication date Assignee Title
CN1902990A (en) * 2003-12-24 2007-01-24 莫莱克斯公司 Electromagnetically shielded slot transmission line

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Title
JP特开2001-154051A 2001.06.08

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