CN101483971B - Circuit board and manufacturing method thereof - Google Patents
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- CN101483971B CN101483971B CN2008100031057A CN200810003105A CN101483971B CN 101483971 B CN101483971 B CN 101483971B CN 2008100031057 A CN2008100031057 A CN 2008100031057A CN 200810003105 A CN200810003105 A CN 200810003105A CN 101483971 B CN101483971 B CN 101483971B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 claims description 31
- 229920002120 photoresistant polymer Polymers 0.000 claims description 31
- 238000009713 electroplating Methods 0.000 claims description 13
- 238000005516 engineering process Methods 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims 9
- 238000003825 pressing Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 230000008054 signal transmission Effects 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005288 electromagnetic effect Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Abstract
Description
技术领域technical field
本发明涉及一种线路板及其制作方法,且特别涉及一种具有电磁屏蔽功效的线路板及其制作方法。 The invention relates to a circuit board and a manufacturing method thereof, in particular to a circuit board with electromagnetic shielding effect and a manufacturing method thereof. the
背景技术Background technique
一般而言,用以承载或是电性连接多个电子元件的线路板是由多个图案化导电层以及多个介电层交替叠合所构成。其中,这些图案化导电层是由铜箔层(copper foil)经过光刻蚀刻所定义形成的。这些介电层则是分别配置于两相邻的图案化导电层之间,以隔离这些图案化导电层。另外,线路板的表面上还可配置各种电子元件(例如有源元件或无源元件),并通过线路板内部线路来达到电性信号传递(electrical signal propagation)的目的。 Generally speaking, a circuit board for carrying or electrically connecting multiple electronic components is composed of multiple patterned conductive layers and multiple dielectric layers stacked alternately. Wherein, these patterned conductive layers are defined and formed by copper foil layer (copper foil) through photolithographic etching. The dielectric layers are respectively disposed between two adjacent patterned conductive layers to isolate the patterned conductive layers. In addition, various electronic components (such as active components or passive components) can also be arranged on the surface of the circuit board, and the purpose of electrical signal propagation can be achieved through the internal circuit of the circuit board. the
值得一提的是,随着这些电子元件之间传输的电性信号的频率越来越高,主要线路之间的电磁干扰及噪声会越来越严重。图1即绘示已知的一种防止电磁干扰的线路板的示意图。请参考图1,在已知的线路板100中,为解决主要线路110容易受到邻近线路或是电子元件的电磁干扰或是噪声的影响,已知技术即在主要线路110的上方以及下方额外增设用以屏蔽电磁干扰及噪声的叠层120(此叠层120为具有屏蔽功效的金属层122以及介电层124的组合)。然而,额外于主要线路110上方以及下方增设叠层120会使得线路板100的整体厚度较厚,不符合电子产品轻薄化的发展趋势。 It is worth mentioning that as the frequency of the electrical signals transmitted between these electronic components becomes higher and higher, the electromagnetic interference and noise between the main lines will become more and more serious. FIG. 1 is a schematic diagram of a known circuit board for preventing electromagnetic interference. Please refer to FIG. 1. In the
发明内容Contents of the invention
本发明提供一种线路板及其制作方法,以使得线路板内部的主要线路有良好的信号传递功效,且能符合轻薄化的发展趋势。 The invention provides a circuit board and a manufacturing method thereof, so that the main circuit inside the circuit board has a good signal transmission effect and can meet the development trend of lightness and thinness. the
本发明提出一种线路板,其包括介电层、主要线路(main circuit)以及二屏蔽线路(shielding circuit)。介电层具有有源表面。主要线路内埋于介电层,且位于该有源表面以下的该主要线路被该介电层所包覆。这些屏蔽线路配置于该介电层,且分别位于主要线路的两侧,且各该屏蔽线路为连续的金属线路。其中,主要线路具有第一厚度,屏蔽线路具有第二厚度,第二厚度大于 该第一厚度。 The invention provides a circuit board, which includes a dielectric layer, a main circuit and two shielding circuits. The dielectric layer has an active surface. The main circuit is embedded in the dielectric layer, and the main circuit located below the active surface is covered by the dielectric layer. The shielding lines are arranged on the dielectric layer and are respectively located on two sides of the main line, and each of the shielding lines is a continuous metal line. Wherein, the main circuit has a first thickness, the shielded circuit has a second thickness, and the second thickness is greater than the first thickness. the
在本发明的一实施例中,屏蔽线路包括第一屏蔽部分以及第二屏蔽部分,第一屏蔽部分内埋于介电层,并与有源表面共平面,而第二屏蔽部分与第一屏蔽部分相接,且第一屏蔽部分的厚度实质上等于第一厚度。 In an embodiment of the present invention, the shielded circuit includes a first shielding part and a second shielding part, the first shielding part is buried in the dielectric layer and is coplanar with the active surface, and the second shielding part is the same as the first shielding part The parts are connected, and the thickness of the first shielding part is substantially equal to the first thickness. the
在本发明的一实施例中,第二屏蔽部分配置于有源表面上,且与第一屏蔽部分相接。 In an embodiment of the present invention, the second shielding portion is disposed on the active surface and is in contact with the first shielding portion. the
在本发明的一实施例中,第二屏蔽部分内埋于介电层。 In an embodiment of the invention, the second shielding portion is embedded in the dielectric layer. the
在本发明的一实施例中,屏蔽线路还包括第三屏蔽部分,其配置于有源表面上,且与第一屏蔽部分相接。 In an embodiment of the present invention, the shielded circuit further includes a third shielding portion disposed on the active surface and connected to the first shielding portion. the
本发明再提出一种线路板的制作方法,其包括下列步骤。首先,提供介电层,其具有有源表面。接着,提供载板,并于载板上形成主要线路以及屏蔽线路,其中这些屏蔽线路分别位于主要线路的两侧,且屏蔽线路的厚度大于主要线路的厚度。接着,于介电层的有源表面上压合具有主要线路以及这些屏蔽线路的载板。之后,移除载板,而主要线路以及这些屏蔽线路与有源表面共平面。 The present invention further proposes a method for manufacturing a circuit board, which includes the following steps. First, a dielectric layer is provided, which has an active surface. Next, a carrier board is provided, and a main circuit and a shielded circuit are formed on the carrier board, wherein the shielded circuits are respectively located on two sides of the main circuit, and the thickness of the shielded circuit is greater than that of the main circuit. Then, press-bond the carrier board with the main lines and the shielding lines on the active surface of the dielectric layer. Afterwards, the carrier board is removed, and the main traces, as well as these shielded traces, are coplanar with the active surface. the
在本发明的一实施例中,形成主要线路以及这些屏蔽线路的方法为电镀工艺(electroplating)。 In an embodiment of the present invention, the method of forming the main lines and the shielding lines is electroplating. the
在本发明的一实施例中,于载板上形成主要线路以及这些屏蔽线路的方法包括下列步骤。首先,于载板上形成第一图案化光致抗蚀剂层,第一图案化光致抗蚀剂层具有多个开口,其中这些开口暴露出部分载板。接着,于这些开口中形成主要线路以及二第一屏蔽部分,这些第一屏蔽部分形成于主要线路两侧的这些开口中,且第一屏蔽部分的厚度实质上等于主要线路的厚度。接着,于主要线路上覆盖第二图案化光致抗蚀剂层。接着,于每个第一屏蔽部分上形成第二屏蔽部分,其中每个屏蔽线路包括第一屏蔽部分与所对应的第二屏蔽部分。之后,移除第一图案化光致抗蚀剂层以及第二图案化光致抗蚀剂层。 In an embodiment of the present invention, a method for forming main circuits and the shielded circuits on a carrier includes the following steps. Firstly, a first patterned photoresist layer is formed on the carrier board. The first patterned photoresist layer has a plurality of openings, wherein the openings expose part of the carrier board. Then, a main line and two first shielding parts are formed in the openings, the first shielding parts are formed in the openings on both sides of the main line, and the thickness of the first shielding part is substantially equal to the thickness of the main line. Then, cover the second patterned photoresist layer on the main circuit. Next, a second shielding portion is formed on each first shielding portion, wherein each shielding line includes the first shielding portion and a corresponding second shielding portion. Afterwards, the first patterned photoresist layer and the second patterned photoresist layer are removed. the
在本发明的一实施例中,于载板形成第一图案化光致抗蚀剂层之前还包括于载板上形成电镀种子层(plating seed layer)。 In an embodiment of the present invention, before forming the first patterned photoresist layer on the carrier, it further includes forming a plating seed layer on the carrier. the
在本发明的一实施例中,移除载板之后还包括于有源表面上形成二第三屏蔽部分,每个第三屏蔽部分分别与第一屏蔽部分相接,而每个屏蔽线路包 括第一屏蔽部分与所对应的第二屏蔽部分、第三屏蔽部分。 In an embodiment of the present invention, after removing the carrier board, it also includes forming two third shielding parts on the active surface, each third shielding part is respectively connected to the first shielding part, and each shielding line includes The first shielding part corresponds to the second shielding part and the third shielding part. the
在本发明的一实施例中,形成主要线路、这些第一屏蔽部分以及这些第二屏蔽部分的方法为电镀工艺,而形成第三屏蔽部分的方法为喷印工艺(ink-jet printing)。 In an embodiment of the present invention, the method of forming the main circuit, the first shielding parts and the second shielding parts is an electroplating process, and the method of forming the third shielding part is ink-jet printing. the
在本发明的一实施例中,于介电层内埋主要线路以及于该介电层配置二屏蔽线路的方法包括下列步骤。首先,提供载板,并于载板形成第一图案化光致抗蚀剂层,第一图案化光致抗蚀剂层具有多个开口,其中这些开口暴露出部分载板。接着,于这些开口中形成主要线路以及二第一屏蔽部分,这些第一屏蔽部分形成于主要线路两侧的开口中,且第一屏蔽部分的厚度实质上等于主要线路的厚度。紧接着,移除第一图案化光致抗蚀剂层。然后,于介电层的有源表面上压合具有主要线路以及这些第一屏蔽部分的载板。接着,移除载板,而主要线路以及这些第一屏蔽部分与有源表面共平面。之后,于有源表面上形成二第二屏蔽部分,这些第二屏蔽部分分别与每个第一屏蔽部分相接,而每个屏蔽线路包括第一屏蔽部分与所对应的第二屏蔽部分。 In one embodiment of the present invention, the method for embedding a main circuit in a dielectric layer and disposing two shielding circuits in the dielectric layer includes the following steps. First, a carrier is provided, and a first patterned photoresist layer is formed on the carrier. The first patterned photoresist layer has a plurality of openings, wherein the openings expose part of the carrier. Then, a main line and two first shielding parts are formed in the openings, the first shielding parts are formed in the openings on both sides of the main line, and the thickness of the first shielding part is substantially equal to the thickness of the main line. Next, the first patterned photoresist layer is removed. Then, press-bond the carrier board with the main lines and the first shielding parts on the active surface of the dielectric layer. Next, the carrier plate is removed, and the main lines and these first shielding portions are coplanar with the active surface. Afterwards, two second shielding parts are formed on the active surface, and these second shielding parts are connected to each first shielding part respectively, and each shielding line includes the first shielding part and the corresponding second shielding part. the
在本发明的线路板中,每个主要线路的两侧分别设有屏蔽线路,屏蔽线路的厚度是大于主要线路的厚度。因此,屏蔽线路能有效地改善主要线路间的电磁干扰问题,主要线路即有良好的信号传输品质。值得一提的是,本发明除了能有效地改善主要线路间的电磁干扰问题以外,亦能使线路板能符合电子产品轻薄化的发展趋势。 In the circuit board of the present invention, shielding circuits are provided on both sides of each main circuit, and the thickness of the shielding circuit is greater than that of the main circuit. Therefore, shielded lines can effectively improve the electromagnetic interference between main lines, and the main lines have good signal transmission quality. It is worth mentioning that the present invention can not only effectively improve the electromagnetic interference problem between the main circuits, but also make the circuit board comply with the development trend of thinner and lighter electronic products. the
为让本发明的上述特征和优点能更明显易懂,下文特举优选实施例,并配合附图,作详细说明如下。 In order to make the above-mentioned features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings. the
附图说明Description of drawings
图1即绘示已知的一种防止电磁干扰的线路板的示意图。 FIG. 1 is a schematic diagram of a known circuit board for preventing electromagnetic interference. the
图2绘示本发明一实施例的线路板的制作流程图。 FIG. 2 shows a flow chart of manufacturing a circuit board according to an embodiment of the present invention. the
图3A至图3H绘示本发明一实施例的线路板的制作流程立体图。 FIG. 3A to FIG. 3H are perspective views illustrating the manufacturing process of the circuit board according to an embodiment of the present invention. the
图4绘示本发明另一实施例的线路板的立体图 Fig. 4 depicts the perspective view of the circuit board of another embodiment of the present invention
图5A至图5E绘示本发明再一实施例的线路板的制作流程立体图。 FIG. 5A to FIG. 5E are perspective views showing the manufacturing process of the circuit board according to another embodiment of the present invention. the
附图标记说明 Explanation of reference signs
100:线路板 110:主要线路 100: circuit board 110: main circuit
120:叠层 122:金属层 120: Lamination 122: Metal layer
300、300’、300”:线路板 310:介电层 300, 300’, 300”: circuit board 310: dielectric layer
312:有源表面 320:主要线路 312: Active surface 320: Main line
330、330’、300”:屏蔽线路 332:第一屏蔽部分 330, 330’, 300”: shielded line 332: first shielded part
334、334’:第二屏蔽部分 336:第三屏蔽部分 334, 334': the second shielding part 336: the third shielding part
340:电镀种子层 350:第一图案化光致抗蚀剂层 340: Plating seed layer 350: First patterned photoresist layer
352:开口 360:第二图案化光致抗蚀剂层 352: Opening 360: Second patterned photoresist layer
370:载板 X1:第一厚度 370: carrier board X1: first thickness
X2:第二厚度 S1、S2:各个步骤 X2: second thickness S1, S2: each step
具体实施方式Detailed ways
图2绘示本发明一实施例的线路板的制作流程图。请参考图2,本实施例的线路板的制作方法包括下列步骤:首先,如步骤S1所述,提供介电层,其具有有源表面。接着,如步骤S2所述,于介电层内埋一主要线路以及于介电层配置二屏蔽线路,其中这些屏蔽线路分别位于主要线路的两侧,且屏蔽线路的厚度大于主要线路的厚度。为能更清楚地了解图2所示的线路板的制作方法,本实施例将于下文中以详细的立体流程图来做说明。 FIG. 2 shows a flow chart of manufacturing a circuit board according to an embodiment of the present invention. Please refer to FIG. 2 , the manufacturing method of the circuit board in this embodiment includes the following steps: First, as described in step S1 , a dielectric layer is provided, which has an active surface. Next, as described in step S2 , a main circuit is buried in the dielectric layer and two shielded circuits are arranged in the dielectric layer, wherein the shielded circuits are respectively located on two sides of the main circuit, and the thickness of the shielded circuit is greater than that of the main circuit. In order to understand more clearly the manufacturing method of the circuit board shown in FIG. 2 , this embodiment will be described below with a detailed three-dimensional flow chart. the
图3A至图3H绘示本发明一实施例的线路板的制作流程立体图。首先,如图3A所示,提供介电层310,其具有有源表面312。接着,如图3B至图3E所示,预先于载板370上制作主要线路320以及位于主要线路320两侧的二屏蔽线路330。其中,本实施例例如是在载板370上先形成电镀种子层340,并于电镀种子层340上形成第一图案化光致抗蚀剂层350(如图3B所示),以利后续主要线路320以及屏蔽线路330的制作过程。在本实施例中,第一图案化光致抗蚀剂层350例如是利用光刻工艺以形成于载板370上。第一图案化光致抗蚀剂层350有多个开口352,且这些开口352暴露出部分载板370上的电镀种子层340。 FIG. 3A to FIG. 3H are perspective views illustrating the manufacturing process of the circuit board according to an embodiment of the present invention. First, as shown in FIG. 3A , a
在载板370上形成电镀种子层340以及第一图案化光致抗蚀剂层350之后,接着例如是利用电镀工艺在这些开口352中形成主要线路320以及二第一屏蔽部分332(如图3C所示)。在本实施例中,这些第一屏蔽部分332是形成于主要线路320两侧的开口352中,且主要线路320具有第一厚度X1,第一厚度X1实质上等于第一屏蔽部分332的厚度。接着,于主要线路320上覆盖第二图案化光致抗蚀剂层360(第二图案化光致抗蚀剂层360亦例如是 利用光刻工艺以形成于主要线路320上),并再次应用电镀工艺于开口中的第一屏蔽部分332上形成第二屏蔽部分334(如图3D所示),而每个第一屏蔽部分332与所对应的第二屏蔽部分334即构成屏蔽线路330,而屏蔽线路330具有第二厚度X2,其大于主要线路的厚度X1。当然,其他优选实施例亦可应用其他适当的工艺以在开口中形成主要线路320、第一屏蔽部分332以及第二屏蔽部分334,本发明在此并不做任何限制。 After the
再次应用电镀工艺于每个第一屏蔽部分332上形成第二屏蔽部分334之后,接着移除上述第一图案化光致抗蚀剂层、第二图案化光致抗蚀剂层以及第一图案化光致抗蚀剂层所覆盖的部分电镀种子层(如图3E所示)。如此一来,本实施例即完成在载板370上制作主要线路320及屏蔽线路330的流程。 After the electroplating process is applied again to form the
于载板370上完成主要线路320以及屏蔽线路330的制作后,接着如图3F至图3G所示,于介电层310的有源表面312上压合具有主要线路320以及这些屏蔽线路330的载板370。其中,主要线路320以及这些屏蔽线路330例如是被压合于介电层310与载板370之间。此外,由于载板370上的二屏蔽线路330是分别位于主要线路320两侧,因此当具有主要线路320以及这些屏蔽线路330的载板370压合于介电层310的有源表面312时,内埋于介电层310中的屏蔽线路330仍是位于主要线路320的两侧。之后,如图3H所示,移除载板370,而主要线路320以及这些屏蔽线路330即内埋于介电层310中,且主要线路320以及这些屏蔽线路330例如是与有源表面312共平面。如此一来,本实施例即完成线路板300的制作。 After the
值得一提的是,由于主要线路320的两侧分别有屏蔽线路330,且屏蔽线路330的第二厚度X2是大于主要线路的厚度X1,因此与主要线路320相邻的其他主要线路(未绘示)或是电子元件(未绘示)所产生的电磁效应即不易对主要线路320产生干扰。换言之,本实施的线路板300有较佳的信号传输品质。此外,由于本实施例是在主要线路320的两侧设置屏蔽线路330,因此线路板300整体有较薄的厚度。 It is worth mentioning that since there are shielded
此外,在移除载板370(如图3H所示)之后,亦可以于介电层310的有源表面312上形成二对应这些第一屏蔽部分332的第三屏蔽部分336(如图4所示,其绘示本发明另一实施例的线路板的立体图),以完成另一实施例的线路板300’的制作。在线路板300’中,这些第三屏蔽部分336是分别与内埋于介电层310且与有源表面312共平面的二第一屏蔽部分332相接。其中,每 个的屏蔽线路330’即是包括第一屏蔽部分332与所对应的第二屏蔽部分334、第三屏蔽部分336。本实施例例如是通过喷印工艺来形成上述的第三屏蔽部分336。当然,其他优选实施例亦可通过上述实施例所述的电镀工艺来制作第三屏蔽部分336。 In addition, after removing the carrier 370 (as shown in FIG. 3H ), two
图5A至图5E绘示本发明再一实施例的线路板的制作流程立体图。请先参考图5A,在完成图3C的步骤(于开口中形成主要线路320以及第一屏蔽部分332)之后,本实施例可先移除载板370上的第一图案化光致抗蚀剂层以及第一图案化光致抗蚀剂层所覆盖的电镀种子层。接着,如图5B至图5C所示,于介电层310的有源表面312上压合具有主要线路320以及这些第一屏蔽部分332的载板370。其中,主要线路320以及这些第一屏蔽部分332例如是被压合于介电层310与载板370之间。此外,由于载板370上的二第一屏蔽部分332是分别位于主要线路320两侧,因此当具有主要线路320以及这些第一屏蔽部分332的载板370压合于介电层310的有源表面312时,内埋于介电层310中的二第一屏蔽部分332仍是位于主要线路320的两侧。 FIG. 5A to FIG. 5E are perspective views showing the manufacturing process of the circuit board according to another embodiment of the present invention. Please refer to FIG. 5A first. After completing the step in FIG. 3C (forming the
接着,如图5D所示,移除载板370,而内埋于介电层310的主要线路320以及这些第一屏蔽部分332是与有源表面312共平面。之后,如图5E所示,例如可通过喷印工艺以于有源表面312上形成二第二屏蔽部分334’,以完成本实施例的线路板300”的制作。其中,这些例如是铜膏的第二屏蔽部分334’分别与每个第一屏蔽部分332相接,而每个第一屏蔽部分332与所对应的第二屏蔽部分334’即构成本实施例的屏蔽线路330”。 Next, as shown in FIG. 5D , the
综上所述,本发明是在每个主要线路的两侧分别设置厚度大于主要线路厚度的屏蔽线路,因此与主要线路相邻的电子元件或是其他主要线路所产生的电磁效应即不易对此主要线路的信号传输品质造成影响。亦即,此主要线路有较佳的信号传输品质。此外,由于本发明是在主要线路的两侧设置屏蔽线路,且主要线路以及屏蔽线路主要是内埋于介电层中,因此相较于已知技术在主要线路上方以及下方额外增设用以屏蔽电磁干扰及噪声的叠层,本发明的线路板有较薄的整体厚度。换言之,本发明的线路板除了有良好的信号传递功效以外,亦能符合电子产品轻薄化的发展趋势。 In summary, the present invention sets shielding lines with a thickness greater than the thickness of the main lines on both sides of each main line, so that the electromagnetic effects generated by the electronic components adjacent to the main lines or other main lines are not easy to respond. The signal transmission quality of the main line is affected. That is, the main line has better signal transmission quality. In addition, since the present invention sets shielding lines on both sides of the main lines, and the main lines and the shielding lines are mainly embedded in the dielectric layer, compared with the known technology, additional shielding lines are added above and below the main lines. Lamination of electromagnetic interference and noise, the circuit board of the present invention has a thinner overall thickness. In other words, the circuit board of the present invention not only has good signal transmission efficiency, but also conforms to the development trend of thinner and lighter electronic products. the
虽然本发明已以优选实施例披露如上,然其并非用以限定本发明,本领域技术人员在不脱离本发明的精神和范围内,当可作些许的更动与润饰,因此本发明的保护范围当视后附的权利要求所界定的为准。 Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope is to be determined as defined by the appended claims. the
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