TW202330188A - Device and method for trimming grinding wheel - Google Patents

Abstract

The embodiment of the invention discloses a device and method for trimming a grinding wheel, and the device comprises at least one pair of supporting rollers, and the central axes of the at least one pair of supporting rollers are parallel to each other; the finishing belt is wound on the at least one pair of supporting rollers in a detachable manner; the at least one pair of supporting rollers can rotate around the central axes of the supporting rollers to drive the finishing belt to do reciprocating motion in the extending direction of the finishing belt so as to finish the grinding wheel.

Description

A device and method for dressing grinding wheels

The invention relates to the technical field of semiconductor manufacturing, in particular to a device and method for dressing a grinding wheel.

The production technology of semiconductor silicon wafers usually includes processing processes such as crystal pulling, wire cutting, grinding, and polishing. Double-side grinding is a grinding technique used to simultaneously grind both main surfaces of a silicon wafer to make the silicon wafer have a highly flat surface. During the double-sided grinding process, a special device is required to hold the silicon wafer so that the grinding wheel can grind both main surfaces of the silicon wafer at the same time. Usually, this holding device includes a pair of hydrostatic pressure plates arranged oppositely, and the silicon wafer is arranged between the two hydrostatic pressure plates in the vertical direction. The hydrostatic pressure plate can be positioned between itself and the main surface of the silicon wafer A fluid barrier is formed between the wafers so that the wafer can be held upright without contact with the two hydrostatic plates, and at the same time the two major surfaces of the wafer can be ground by opposing grinding wheels. Compared with solid clamping, the fluid clamping method of the hydrostatic plate reduces damage to the silicon wafer, and enables the silicon wafer to move (rotate) tangentially relative to the surface of the hydrostatic plate with less friction.

In the above grinding process, the quality of the grinding wheel is crucial to the grinding quality. With the continuous processing of the equipment, the grinding wheels on the left and right sides, especially the grinding teeth, will continue to be worn out. The worn grinding teeth may not be flat as a whole, and the roughness of the grinding teeth may not meet the technical requirements. These Factors eventually lead to deterioration of the processing accuracy of silicon wafers. Therefore, regular dressing of the grinding wheel has a significant impact on the grinding process and the quality of the wafer. Grinding wheels need to be dressed on a regular basis. The current method is to align the circumferential edge of the disc dresser with the grinding surface of the grinding tooth, and continuously move the grinding wheel towards the dresser while the dresser and grinding wheel are rotating simultaneously. Give to dress the grinding surface of the grinding wheel by the dresser.

However, how to improve the trimming efficiency of the trimmer under the premise of ensuring the trimming effect is an urgent problem to be solved in this field.

In view of this, the embodiment of the present invention expects to provide a device for dressing a grinding wheel, so as to ensure grinding efficiency and grinding effect.

Technical scheme of the present invention is realized like this: In a first aspect, an embodiment of the present invention provides a device for dressing a grinding wheel, the device for dressing a grinding wheel includes: At least one pair of support rollers, the central axes of the at least one pair of support rollers are parallel to each other; a trimming tape removably wound on the at least one pair of support rollers; Wherein, the at least one pair of supporting rollers is configured to drive the dressing belt to reciprocate along the extending direction of the dressing belt by rotating around their respective central axes to dress the grinding wheel.

In a second aspect, an embodiment of the present invention provides a method for dressing a grinding wheel, the method for dressing a grinding wheel is performed by using the device for dressing a grinding wheel according to the first aspect.

The embodiment of the present invention provides a device and method for dressing the grinding wheel; different from the integrated structure of the dressing device in the related art, the device provided by the embodiment of the present invention has a split structure, that is, the device for dressing the grinding wheel It includes a dressing belt wound on at least one pair of support rollers in a detachable manner, and the dressing belt is driven to reciprocate along the extension direction by the rotation of the support rollers around the central axis to dress the grinding wheel, thereby, according to The actual production needs to replace the dressing belt, for example, it can be replaced when the dressing belt is worn out, without discarding the whole dressing device, and it is also possible to replace the dressing belts with different dressing capabilities in sequence, in a combined dressing method, such as rough trimming first and then The same grinding wheel is dressed in the way of finishing, so as to improve the dressing efficiency while ensuring the dressing accuracy.

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

It is to be understood that the terms "length", "width", "top", "bottom", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner" and "outer" are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device Or elements must have a certain orientation, be constructed and operate in a certain orientation, and thus should not be construed as limiting the invention.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

In the present invention, terms such as "installation", "connection", "connection" and "fixation" should be interpreted in a broad sense, for example, it can be a fixed connection or a detachable connection, unless otherwise clearly specified and limited. , or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components or the interaction relationship between two components. Those with ordinary knowledge in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

Referring to FIG. 1 , it shows an embodiment of a dressing device 1 for dressing a grinding wheel W in the related art. The dressing unit 2 is a support shaft 3 that rotates about its own axis of rotation, wherein the dressing device dresses the grinding teeth T of the grinding wheel W with its peripheral surface while rotating about its own central axis.

Currently, when dressing a grinding wheel using this dressing device 1 , the grinding wheel W is continuously fed toward the dressing device 1 so that the grinding teeth T can be dressed by the circumferential surface of the dressing part 2 . The peripheral surface of the trimming part has grinding ability and the worn part and/or uneven part on the grinding tooth T is removed by mutual grinding with the grinding tooth T, so that the surface of the grinding tooth T recovers the grinding ability and becomes flat.

The trimming device in the related art is usually designed in one piece, and the trimming surface cannot be replaced after being consumed and worn, and the whole trimming device has to be discarded, resulting in high production costs. In addition, the peripheral surface of the trimming device in the related art usually only has one trimming ability, so using a single trimming device can only achieve one trimming effect, if you want to improve the trimming efficiency, you need to make the peripheral surface of the trimming part rougher In order to have a higher dressing ability, however, the grinding surface of the grinding wheel trimmed by this dressing device will also be too rough. When using this grinding wheel to grind the surface of the silicon wafer, it will often make the ground The accuracy of the surface of the silicon wafer cannot meet the requirements; on the contrary, if the peripheral surface of the trimming part is set to be finer so that the grinding surface of the grinding wheel trimmed by it is also fine, the dressing efficiency will inevitably be reduced , That is to say, it is difficult to balance the trimming accuracy and trimming efficiency with a single trimming device.

In order to solve the above problems, referring to FIG. 2 , an embodiment of the present invention provides a device 100 for dressing grinding wheels, the device 100 for dressing grinding wheels includes: at least one pair of support rollers 101, the at least one pair of support rollers The central axes of 101 are parallel to each other; the trimming belt 102 wound on the at least one pair of supporting rollers 101 in a detachable manner; wherein, the at least one pair of supporting rollers 101 is arranged to be able to drive the trimming belt by rotating around their respective central axes 102 reciprocates along the extending direction of the dressing belt 102 to dress the grinding wheel W. A specific description will be given below with reference to FIG. 2 .

Referring to Fig. 2, the device 100 for dressing the grinding wheel comprises: two supporting rollers capable of rotating along the X direction around their respective central axes, that is, the first supporting roller 101a and the second supporting roller 101b, in Fig. 2, the first supporting roller A support roller 101a and a second support roller 101b are arranged one above the other and their central axes are parallel to each other. It should be noted that the device 100 may include more support rollers, such as 3, 4, etc., whose central axes are parallel to each other. The schemes all fall within the protection scope of the present invention; the trimming tape 102 is wound on two supporting rollers in a detachable manner. The surfaces facing each other of the trimming belt and the supporting roller can be rough, for example, so that when the supporting roller rotates, the trimming belt can be driven to reciprocate in the Y direction around the supporting roller by frictional force, alternatively, the facing surfaces of the trimming belt and the supporting roller A convex portion and a concave portion that can be engaged with each other may also be formed on the surfaces of each other, so that the supporting roller drives the dressing tape to reciprocate through the engagement of the convex portion and the concave portion. When the dressing tape reciprocates, for example, the tip of the grinding teeth T of the grinding wheel W may be fed toward the outer surface of the dressing tape to grind the grinding teeth T of the grinding wheel W by the outer surface of the dressing tape. Grinding teeth T of W for dressing.

The embodiment of the present invention provides a device 100 for dressing grinding wheels; different from the one-piece structure of the dressing device in the related art, the device 100 provided by the embodiment of the present invention has a split structure, that is, the device 100 for dressing the grinding wheel The device 100 includes a dressing belt 102 detachably wound on at least one pair of support rollers 101, and the dressing belt 102 is driven to reciprocate along the extending direction by the rotation of the support roller 101 around the central axis to reciprocate the grinding wheel W Carry out trimming, thereby, can change trimming belt 102 according to actual production needs, for example, it can be replaced when trimming band 102 wears and tear, and needn't discard whole trimming device; Also can replace in turn the trimming band 102 that has different trimming ability , the same grinding wheel is dressed in a combined dressing method such as rough dressing first and then finishing, so as to improve the dressing efficiency while ensuring the dressing accuracy.

In order to further facilitate the realization of combined trimming, optionally, the trimming tape 102 includes at least two trimming parts with different trimming capabilities, so that different trimming effects can be achieved by using a single trimming tape without using multiple trimming parts. The device does not need to replace the trimming belt, which saves production costs and space, and avoids increasing labor costs.

For a trimming tape comprising a plurality of trimming parts, optionally, the at least two trimming parts are arranged in the extending direction. Specifically, referring to FIG. 2, the trimming tape 102 includes a first trimming part 102a and a second trimming part 102b , the first trimming portion 102a and the second trimming portion 102b have different trimming capabilities, for example, the first trimming portion 102a can be greater than the trimming capacity of the second trimming portion 102b, when using the trimming belt 102 to dress the grinding wheel W, One of the first trimming portion 102a and the second trimming portion 102b may be rotated in a single direction by the rotation of the support roller 101 to be opposite to the tip of the grinding teeth T of the grinding wheel W, and then rotated in alternate directions by the backup roller 101. The entire dressing belt is reciprocated, and the trimming portion of the first trimming portion 102a and the second trimming portion 102b that performs the trimming operation can always be in contact with the tip of the grinding teeth T of the grinding wheel W within the reciprocating motion range of the dressing belt, The finishing of the first stage can be realized through the grinding operation; after the finishing of the first stage is completed, the other part of the first finishing part 102a and the second finishing part 102b can be rotated in a single direction by the support roller 101 again as required. One is rotated to face the tip of the grinding teeth T of the grinding wheel W, and then a second stage of dressing is performed on the grinding wheel W in a similar manner to the first stage of dressing. Thus, during the whole trimming process, the switching between the first trimming portion 102a and the second trimming portion 102b can be achieved only by rotating the support roller 101 , without additional operations.

According to another optional embodiment of the present invention, referring to Fig. 3, the at least two trimming parts are arranged side by side in the width direction perpendicular to the extension direction, as shown in Fig. 3, the first trimming part 102a and the second trimming part 102a The parts 102b are adjacent to each other in the width direction of the dressing tape, so that the two trimming parts are always in the same trimming plane. Direction rotation causes the dressing belt 102 to reciprocate to dress the grinding wheel W through the first trimming part 102a or the second trimming part 102b. The dressing part performing the dressing operation can always be in contact with the end of the grinding tooth T of the grinding wheel W to achieve the first stage dressing of it by the grinding operation; if it is necessary to perform the second stage dressing by another dressing part , the grinding wheel W can be translated along the width direction of the dressing belt so that the grinding wheel falls within the dressing range of this other dressing portion, and then the second stage is performed on the grinding wheel W in a manner similar to the dressing of the first stage trimming. Since in this embodiment, the first trimming portion 102a and the second trimming portion 102b are always located in the same plane, this is more conducive to the continuous dressing of the grinding wheel W, especially the end of the grinding teeth T of the grinding wheel W.

For the dressing device in the related art, referring to Fig. 1, since its dressing part 2 is roughly disc-shaped, only a part of the dressing part 2 can be in contact with a part of the grinding teeth T of the grinding wheel W at any time, so all the grinding teeth of the grinding wheel The teeth cannot be trimmed at the same time, which makes it difficult to keep the ends of the trimmed ground teeth in the same plane. In response to this problem, according to an alternative embodiment of the present invention, the size of each trimming portion is set to be able to trim all grinding teeth of a grinding wheel at the same time. Taking FIG. 2 as an example, the first trimming portion 102a and the second trimming portion 102b are respectively The length and width of the grinding wheel W are all set to be larger than the diameter of the grinding wheel W, thus a sufficiently large dressing surface can be provided to simultaneously dress the end faces of all grinding teeth T of the grinding wheel W, and the provided dressing surface is a plane, which It is more beneficial to trim the end surfaces of all the grinding teeth T of the grinding wheel W to be flat.

In the actual dressing operation, since the degree of wear of each grinding wheel is different, the degree of dressing required should also be different. For this problem, optionally, referring to FIG. 4 , the device 100 for dressing a grinding wheel further includes a controller 103 configured to control the dressing by controlling the rotation direction and speed of the at least one pair of support rollers 101. The direction and speed of the reciprocating motion of the belt 102. In the embodiment shown in FIG. 4, the controller 103 is connected to the first support roller 101a and the second support roller 101b to control the rotation direction and the rotation speed of the first support roller 101a and the second support roller 101b, since the trimming belt 102 The movement is driven by the supporting rollers, so the direction and speed of the trimming belt 102 can also be controlled. In the actual dressing operation, you can choose to dress the grinding wheel at a faster speed to approach the target size at a higher speed by the dressing part with higher dressing capacity, and then switch to the dressing part with lower dressing capacity The grinding wheel is finely dressed at a lower speed, so that the conditioned grinding wheel can fully meet the precision requirements, and the dressing efficiency is also significantly improved compared with the dressing device in the related art.

During the dressing process, the friction between the dressing belt 102 and the grinding teeth T will generate a large amount of heat, which will not only affect the dressing effect, but also may accelerate the wear of the dressing belt and grinding teeth. In order to reduce the thermal impact on the device 100 and the grinding wheel The influence of W, optionally, referring to FIG. 5, the device 100 for dressing the grinding wheel also includes an injector 104, which is used to spray the dressing belt 102 and the grinding wheel when the dressing belt 102 performs a dressing operation. Wheel W sprays coolant.

Further or alternatively, the at least one pair of support rollers 101 is made of porous material and is passed through cooling liquid, so as to cool the at least one pair of support rollers and the dressing belt, The supporting roller 101 is fed with cooling liquid, and the cooling liquid can seep and flow to the trimming belt 102 through holes in the supporting roller 101 , so as to cool the supporting roller 101 and the trimming belt 102 .

The embodiment of the present invention also proposes a method for dressing a grinding wheel, the device for dressing a grinding wheel is implemented by using the above-mentioned device 100 for dressing a grinding wheel.

It should be noted that: the technical solutions described in the embodiments of the present invention can be combined arbitrarily if there is no conflict.

It is obvious that those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the patent scope of the present invention and the scope of equivalent technologies, the present invention is also intended to include these modifications and variations.

1: Trimming device 100: device 101: support roller 101a: first support roller 101b: the second support roller 102: Dressing tape 102a: First trimming part 102b: Second trimming part 103: Controller 104: Injector 2: Trimming Department 3: Support shaft T: Grinding teeth W: grinding wheel

Fig. 1 is a schematic diagram of a device for dressing a grinding wheel in the related art; Figure 2 is a schematic diagram of a device for dressing a grinding wheel provided by an embodiment of the present invention; Figure 3 is a schematic diagram of a device for dressing a grinding wheel provided by another embodiment of the present invention; 4 is a schematic diagram of a device for dressing a grinding wheel provided by another embodiment of the present invention; Fig. 5 is a schematic diagram of a device for dressing a grinding wheel provided by another embodiment of the present invention.

100: device

101: support roller

101a: first support roller

101b: the second support roller

102: Dressing tape

102a: First trimming part

102b: Second trimming part

T: Grinding teeth

W: grinding wheel

Claims (9)

An apparatus for dressing a grinding wheel comprising: At least one pair of support rollers, the central axes of the at least one pair of support rollers are parallel to each other; a trimming tape removably wound on the at least one pair of support rollers; Wherein, the at least one pair of supporting rollers is configured to drive the dressing belt to reciprocate along the extending direction of the dressing belt by rotating around their respective central axes to dress the grinding wheel. The apparatus for dressing a grinding wheel as recited in claim 1, wherein the dressing belt includes at least two dressing portions having different dressing capabilities. The device for dressing a grinding wheel as claimed in claim 2, wherein the at least two dressing portions are aligned in the extending direction. The apparatus for dressing a grinding wheel according to claim 2, wherein the at least two dressing portions are arranged side by side in a width direction perpendicular to the extending direction. The device for dressing a grinding wheel as claimed in claim 3 or 4, wherein each dressing portion is dimensioned to be able to dress all grinding teeth of a grinding wheel simultaneously. The device for dressing the grinding wheel as claimed in any one of claims 1 to 4, wherein the device for dressing the grinding wheel further includes a controller, the controller is configured to control the at least one pair of support rollers The direction and speed of rotation control the direction and speed of the reciprocating motion of the dressing tape. The device for dressing a grinding wheel as claimed in any one of claims 1 to 4, wherein the device for dressing a grinding wheel further comprises an injector for feeding the The dressing belt and the grinding wheel spray coolant. The device for dressing a grinding wheel as claimed in any one of claims 1 to 4, wherein the at least one pair of support rollers is made of a porous material and is fed with a cooling liquid to the at least one pair of support rollers and The dressing is cooled. A method for dressing a grinding wheel, the method for dressing a grinding wheel is performed by using the device for dressing a grinding wheel as described in any one of claims 1 to 8.

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