TW202213612A - Vacuum-laminating device and method of manufacturing laminated body - Google Patents

Abstract

The subject of the present invention application is to provide a vacuum-laminating device and a method of manufacturing a laminated body that can reduce the number of parts requiring for vacuum measures and perform alignment operations and lamination operations. The vacuum-laminating device 100 of the solution of the present invention application is provided with: a transportation plate 1 for holding a workpiece W; an alignment means 30 for fixing and supporting the transportation plate 1 and aligning the workpiece W held by the transportation plate 1; and a laminating means 50 for laminating the aligned workpieces W under vacuum; and a transportation means 40, which fixes and supports the transportation plate 1 while the workpiece W is held on the transportation plate 1, and conveys the workpiece W from the alignment means 30 to the laminating means 50; the transportation plate 1 can be disassembled and assembled with the alignment means 30 and the transportation means 40, and the workpiece W is charged and fixed on one side, and the other side is magnetically fixed to the transportation means 40. Thereby, it is possible to reduce the number of parts that require for vacuum measures, and to perform alignment operations and laminating operations.

Description

Vacuum lamination device and method for producing laminate

In particular, the present invention relates to a vacuum lamination device having a detachable conveying plate and a method for manufacturing a lamination body.

A vacuum lamination device is a device for laminating a plurality of workpieces constituting an electronic component, and has an alignment means and a lamination means. This alignment means can suppress the misalignment of the workpieces in the layered body to be formed by aligning the workpieces before laminating the workpieces by the lamination means. Furthermore, when the lamination means is to perform the lamination operation of the workpieces, the lamination is performed under vacuum to prevent air from entering between the layers of the workpieces. Under such a vacuum, in order to adsorb and fix the workpiece, means other than negative pressure suction such as charging and fixing are used.

Here, Patent Document 1 describes a vacuum lamination device including charging means and alignment means in a vacuum chamber, charging and fixing one workpiece to the charging means, and placing the other workpiece on the alignment means , in a vacuum chamber (vacuum chamber) set under vacuum to perform alignment operation or lamination operation.

[Prior Art Literature]

[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2013-167712

However, in Patent Document 1, the charging means and the aligning means constituted by a large number of parts are subjected to vacuum measures for maintaining sealing properties and slidability, which may increase the cost.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a vacuum lamination apparatus and a method for manufacturing a laminated body that can perform an alignment operation and Layered action.

In order to solve the above-mentioned problems, a vacuum lamination apparatus of the present invention is a vacuum lamination apparatus for sequentially laminating a plurality of workpieces, and includes a conveying plate for holding the workpieces, and alignment means for fixedly supporting the conveying plate and carrying out the conveying. Alignment of the workpieces held by the plate; lamination means for laminating the aligned workpieces on a lamination table under vacuum; and transport means for moving between the alignment means and the lamination means, in the above The workpiece is held on the conveying plate, the conveying plate is fixedly supported, and the workpiece is conveyed from the alignment means to the stacking means; the conveying plate is detachable from the alignment means and the conveying means, respectively, and The workpiece is charged and fixed on one side, and the other side is magnetically fixed with the conveying means.

Furthermore, in the above-mentioned vacuum lamination apparatus, the conveying plate may be formed of a magnetic body, and an insulator may be provided on one side of the conveying plate.

Furthermore, in the above-mentioned vacuum lamination apparatus, the conveying plate system may be provided with the The adhesive first surface of the workpiece is the opposite non-adhesive second surface to be charged and fixed.

Furthermore, in the above-mentioned vacuum lamination apparatus, the alignment means may include an alignment stage and a setting block provided on the alignment stage, and the conveying plate may be configured so that the workpiece and the alignment stage are not aligned. The contact state is placed in the aforementioned setting block.

Furthermore, in the above-mentioned vacuum lamination apparatus, the conveyance means may be in contact with the lamination means to form a closed space, and the conveyance plate may be moved by the conveyance means in the closed space under vacuum. Instead, the aforementioned workpieces are laminated.

Furthermore, the vacuum lamination apparatus may further include conveying plate recovery means for removing static electricity from the conveying plate, peeling the conveying plate from the workpiece, and recovering the conveying plate.

In order to solve the above-mentioned problems, the method for manufacturing a layered product of the present invention is a method for manufacturing a layered product in which a plurality of workpieces are sequentially layered, including the steps of: charging and fixing the workpieces to one side of the conveying plate; In the state where the plate is fixed and supported on the alignment stage, the step of aligning the workpieces charged and fixed by the transport plate is performed; in the state where the workpiece is charged and fixed on one side of the transport plate, the other side of the transport plate is charged. One side is magnetically fixed, and the aligned workpieces are transported from the alignment stage to the stacking stage; and the aligned workpieces are stacked on the stacking stage under vacuum.

Furthermore, in the above-mentioned method of manufacturing a layered body, the step of conveying the workpiece may be such that the conveying plate is magnetically fixed in a vacuum chamber having an upper wall and a side wall, and the vacuum chamber is brought into contact with the lamination table. form a closed space.

According to the present invention, it is possible to provide a vacuum lamination apparatus and a method for manufacturing a laminated body The vacuum lamination device and the method for manufacturing a laminated body can reduce the number of parts requiring vacuum measures, and perform the alignment operation and the lamination operation.

1: Shipping board

1a: one side of the transport plate 1

1b: The other side of the transport plate 1

10: Flip unit (flip means)

11: Flip table

20: Charged unit (charged means)

21: Charged particle irradiation section

30: Alignment unit (alignment means)

31: Alignment stage

32: Setting Blocks

33: XY theta axis electric actuator

34: Align the camera unit

40: Delivery unit (transportation means)

41: Vacuum Chamber

41s: Zhou Wall

41t: Upper wall

42: Transport plate chuck

42h: Through hole

42m: Magnetic part

43: Lifting Piston

44: Guide shaft

45: Peel Piston

50: Lamination unit

51: Stacking table

60: Transport board recovery unit (transport board recovery means)

61: Control means

62: Elimination means

100: Vacuum Lamination Device

A: Live/flipped position

a: adhesive layer

B: Alignment stage position

C: Standby position

c: charged particle

D: Position of the stacking table

G: Holding position

i: static-removing air

L: Laminate

p: protective layer

Pa: atmospheric pressure

W: workpiece

Wa: Workpiece with adhesive

FIG. 1 is a schematic top view of a vacuum lamination device according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of the vacuum lamination device shown in FIG. 1 cut along the XZ plane.

3 is a schematic cross-sectional view illustrating the charging operation in the lamination process of the workpiece to the alignment operation, respectively (a) showing the charging operation, (b) showing the peeling of the protective layer and the inverting operation by the inverting unit, (c) respectively. ) shows the conveying action performed by the inversion unit, and (d) shows the alignment action.

4 is a schematic cross-sectional view illustrating the conveying operation performed by the conveying unit in the lamination process of workpieces, respectively (a) showing the state of preparation for conveying, (b) showing the magnetic fixing state of the conveying plate, (c) showing the alignment stage The separated state of , (d) shows the abutment state to the stacking table.

5 is a schematic cross-sectional view illustrating the lamination operation under vacuum in the lamination process of the workpiece, respectively (a) showing the vacuuming state, (b) showing the lamination state, (c) showing the extended state of the peeling piston, (d) The magnetic fixation release state of the conveying plate is shown, and (e) the retracted state of the peeling piston is shown.

6 is a schematic cross-sectional view (a) to (c), (e) and a schematic plan view (d) for explaining the recovery operation of the conveying plate in the lamination process of the workpieces, respectively (a) showing the open air state, (b) The separation state of the conveying unit and the stacking table is displayed, (c) and (d) show the recovery operation of the conveying plate, and (e) shows the completed state of the collecting operation of the conveying plate.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below are examples of those in which the present invention is embodied. Therefore, depending on the configuration of the device to which the present invention can be applied and various conditions, the configuration of the embodiments described below should be appropriately modified or changed, and the present invention is not limited to the following embodiments.

<About terminology>

In the description of this specification and the claim, each term is defined as follows. The "lamination" referred to means lamination of a plurality of sheets (including two sheets). The "layered body" referred to means what is formed by bonding a plurality of (including two) workpieces W together. The "movement along the XY θ axis" refers to the movement along the X axis direction and the Y axis direction and the rotation along the θ axis direction.

FIG. 1 is a schematic top view showing a vacuum lamination apparatus 100 according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the vacuum lamination apparatus 100 shown in FIG. 1 cut along the XZ plane. Here, the X-axis direction indicates the direction in which the workpiece W moves when each processing step is performed on the workpiece W, and the Y-axis direction indicates the direction orthogonal to the X-axis direction. In addition, the Z-axis direction represents the direction orthogonal to the X-axis direction and the Y-axis direction, and represents the direction in which the workpiece W faces when each processing step is performed on the workpiece W. FIG.

<About the vacuum lamination device>

The vacuum lamination apparatus 100 is an apparatus for laminating a plurality of workpieces W belonging to various substrates after thinning electronic components with high precision and high speed. The vacuum lamination apparatus 100 includes a conveying plate 1, a reversing unit (reversing means) 10, a charging unit (charging means) 20, an alignment unit (aligning means) 30, a conveying unit (conveying means) 40, and a lamination unit (lamination means) ) 50 and a conveyance board recovery unit (a conveyance board collection means) 60 . The following descriptions are given in the order of these units. In addition, the vacuum lamination apparatus 100 is further provided with a control means (not shown in the figure). The control means controls the driving of the inversion unit 10 , the charging unit 20 , the alignment unit 30 , the conveying unit 40 , the lamination unit 50 , and the conveying plate collecting unit 60 , and the like.

In this embodiment, as shown in FIG. 3( a ), the workpiece W is provided with an adhesive layer a on one side (first side) and a protective layer p for preventing dust and the like from adhering to the adhesive layer a. However, it is not limited to this, for example, various types of workpieces W such as those provided with the adhesive layer a and the protective layer p on both sides or without the adhesive layer a and the protective layer p on either side can be used.

<About the delivery board>

When viewed from the Z-axis direction, the conveying plate 1 has a substantially rectangular shape set so that the workpiece W can be placed without protruding, and is composed of a magnetic material such as iron-based and SUS440. Furthermore, an insulator (not shown), such as a silicon-based material such as silicone rubber, is provided at least in an area on one side 1a of the surface of the conveying plate 1 (refer to FIG. 3( a )) where the workpiece W can be placed. Through this insulator, the workpiece W is charged and fixed on one side 1a of the conveying plate 1 . On the other hand, the other side 1b (refer to FIG. 3(a)) which is located on the opposite side to the one side 1a and belongs to the back surface of the conveyance plate 1 is provided by the conveyance plate chuck 42 (refer to FIG. 4(b)) And magnetic fixation.

The conveying plate 1 of the present embodiment is made of a magnetic body, and by disposing an insulator on one side 1a of the conveying plate 1, different fixing means can be applied to the same conveying plate 1 (the one side 1a of the conveying plate 1 is charged with electricity and the other The other side 1b of 1 is fixed magnetically). Furthermore, in the present embodiment, by providing the conveying plate 1 to be detachable to each unit (reversing unit 10 , aligning unit 30 , conveying unit 40 ), the workpiece W can be transported to each unit using the conveying plate 1 . move. In this way, since each unit can be physically distinguished, it is not necessary to arrange the charging unit and the alignment unit in the vacuum chamber as in Patent Document 1, and only the conveying plate 1 for charging and fixing the workpiece W can be arranged. Thereby, the members which must be vacuum-measured can be eliminated, and the alignment operation and the lamination operation can be performed.

<About the flip unit>

The inversion unit 10 includes an inversion table 11 and an inversion unit drive mechanism (not shown), and the inversion unit drive mechanism performs the X-axis direction of the inversion unit 10 (arrow III direction: electrification/inversion position A, alignment table position B) ), movement along the Z-axis (direction of arrow IV), and rotation around the Y-axis (direction of arrow II). The inversion table 11 includes a transport plate fixing mechanism (not shown) that fixes the transport plate 1 in a state where the transport plate 1 is placed on the inversion table 11 . The transport plate fixing mechanism can also be constituted by vacuum suction by a plurality of suction ports provided on the inversion table 11, mechanical chuck, magnetic force, etc., or a combination of these. In addition, the holding force by the transport plate fixing mechanism is preset to a value such that the transport plate 1 does not drop from the inversion table 11 when the inversion table 11 to which the transport plate 1 is fixed is turned over.

<About the charged unit>

The charging unit 20 includes a charged particle irradiating portion 21 for irradiating the charged particles c, and a charging unit driving mechanism (not shown) for moving the charging unit 20 in the X-axis direction (arrow I direction), and is disposed in the reversing unit 10 above the Z-axis. The charged particle irradiation unit 21 irradiates the charged particles c downward in the vertical direction, and may be, for example, an ionizer that irradiates anions or cations. As shown in FIG. 1 , the charged particle irradiation section 21 extends in the Y-axis direction so as to cover the inversion table 11 .

<About Alignment Unit>

The alignment unit 30 includes: an alignment stage 31; a setting block 32 provided on the alignment stage 31; Furthermore, the alignment unit 30 includes an alignment imaging unit 34 that captures an image of an alignment mark, which is a mark for positioning reference of the workpiece W, from below. by These elements are described in order below.

The alignment table 31 includes a plurality of window portions (not shown) that extend from each corner portion of the alignment table 31 toward the center portion and are formed of a transparent member.

Viewed from the Z-axis direction, a plurality of installation blocks 32 are arranged along the outer periphery of the alignment table 31 so as to be point-symmetrical with respect to the center of the alignment table 31 . Furthermore, the setting block 32 is provided with a plurality of suction ports (not shown) on the upper surface for vacuum suction of the conveying plate 1 . In the present embodiment, a plurality of installation blocks 32 are arranged to be point-symmetrical with respect to the center of the alignment stage 31 . However, it is not limited to this, and it is also possible to completely surround the outer periphery of the alignment stage 31 . mode setting.

The XYθ-axis electric actuator 33 is capable of moving along the XYθ-axis, that is, moving and rotating in the XY plane, in order to align the workpiece W to the reference position.

The alignment imaging unit 34 includes an alignment camera (not shown) and an alignment illumination (not shown), and images alignment marks of the workpiece W from below the alignment stage 31 through a plurality of windows.

<About Shipping Unit>

The conveying unit 40 includes: a vacuum chamber 41; a conveying plate chuck 42; an X-axis direction (arrow V direction: alignment table position B, standby position C, stacking table position D) and Z-axis directions ( A transport unit drive mechanism (not shown) that moves in the directions of arrows IV and VI). These elements are sequentially described below.

The vacuum chamber 41 includes: an upper wall 41t having a substantially rectangular shape;

The upper wall 41 t of the vacuum chamber 41 is provided with a drive mechanism, which is composed of the lift piston 43 , the pair of guide shaft portions 44 , and the pair of peeling pistons 45 , and is responsible for driving in the vacuum chamber 41 . First, the lower end of the elevating piston 43 is fixed to the conveying plate chuck 42, and is contracted in the Z-axis direction by expanding and contracting. Between the standby state and the extended state extending in the Z-axis direction (arrow VII direction), the transfer plate chuck 42 is moved in the Z-axis direction (arrow VII direction). In addition, the lower ends of the pair of guide shaft portions 44 are respectively fixed to the transport plate chuck 42, and when the lift piston 43 expands and contracts in the Z-axis direction, in order to maintain the horizontality of the transport plate chuck 42, it is synchronized with the lift piston 43. to stretch. Furthermore, the pair of peeling pistons 45 are extended and contracted between a standby state in which they are contracted in the Z-axis direction and a movement-restricted state in the Z-axis direction (arrow VIII direction) through the through hole 42h of the transfer plate chuck 42 . ) stretched state. In addition, the pair of peeling pistons 45 are set so that the lower ends of the peeling pistons 45 and the lower surface of the transfer plate chuck 42 are flush with the lower surface of the conveying plate chuck 42 in a movement restricted state extending in the Z-axis direction (arrow VIII direction) (see FIG. 5(c)).

In this embodiment, the lift piston 43 and the pair of peeling pistons 45 are configured to be freely expandable and contractible by, for example, a pneumatic cylinder or a hydraulic cylinder. Furthermore, the driving mechanism in the vacuum chamber 41 of the present embodiment adopts a guide block structure separated by a sealing member, thereby preventing fluid communication between the inner space and the outer space of the vacuum chamber 41 via the driving mechanism. . In addition, the arrangement and the number of the drive mechanisms in the vacuum chamber 41 of the present embodiment are merely examples, and the most suitable arrangement or number can be appropriately selected.

A seal member (not shown) is continuously provided at the lower end of the peripheral wall 41s of the vacuum chamber 41 so as to form a closed region when viewed from below in the Z-axis direction. The inner space of the vacuum chamber 41 can be maintained in a hermetic state by making the sealing member of the vacuum chamber 41 abut against and closely contact with the stacking table 51 (see FIG. 4( d )).

When viewed from the Z-axis direction, the transport plate chuck 42 has a substantially rectangular shape set so as to hold the transport plate 1 without protruding, and includes a pair of through holes 42h and a plurality of magnetic portions 42m. The pair of through-holes 42h are arranged at positions corresponding to the peeling piston 45, and the diameter of the through-hole 42h is set larger than that of the peeling piston 45 so that the peeling piston 45 can be inserted in a non-contact state. Furthermore, the plurality of magnetic parts 42m are used for magnetically fixing the conveying plate 1 to the conveying plate chuck 42, It consists of permanent magnets.

The conveying plate chuck 42 of the present embodiment has a through hole 42h so as to allow the peeling piston 45 to expand and contract in the Z-axis direction. However, it is not limited to this. For example, a continuous notch may be provided on the outer peripheral edge of the conveying plate chuck 42. department. In addition, although the magnetic part 42m of this embodiment consists of a permanent magnet, it is not limited to this, For example, the electromagnet which performs ON/OFF control based on the instruction|indication from a control means may be used. In addition, the arrangement or the number of the through-holes 42h and the magnetic portion 42m of the conveying plate chuck 42 in the present embodiment is merely an example, and the most suitable arrangement or the number can be appropriately selected.

The conveyance unit drive mechanism can move the conveyance unit 40 in the X-axis direction (arrow V direction: alignment table position B, standby position C, stacking table position D) and Z-axis direction (arrow IV and VI directions). In particular, the conveyance unit 40 can be moved in the Z-axis direction (the directions of arrows IV and VI) by the conveyance unit drive mechanism, so that the conveyance plate 1 can be recovered (refer to FIG. 4(b) and FIG. 4(c) ). , or the formation of a closed space for evacuation (refer to FIG. 4(d)), etc., the details of which will be described later.

<About Lamination Unit>

The stacking unit 50 includes a stacking table 51 on which the workpieces W are stacked. When viewed from the Z-axis direction, the stacking table 51 has a substantially rectangular shape set so that the vacuum chamber 41 of the conveying unit 40 does not protrude. A closed space is formed on the table 51 . Furthermore, the stacking table 51 includes an exhaust port (not shown) and an open port (not shown) for evacuating and releasing the airtight space formed by the vacuum chamber 41 and the stacking table 51 to the atmosphere. Furthermore, the stacking table 51 includes a workpiece fixing mechanism (not shown) that fixes the workpiece W in a state where the workpiece W is placed on the stacking table 51 .

The exhaust port and the open port of the present embodiment are provided in the stacking table 51 , but are not limited thereto, and may be provided in the vacuum chamber 41 , for example. Furthermore, if the workpiece W is fixed on the build-up table 51, this embodiment The type of the workpiece fixing mechanism can be any type, for example, vacuum adsorption or attachment by an adhesive can be used. Here, when the workpiece fixing mechanism is vacuum suction, the vacuum degree in the vacuum suction of the workpiece W is set to be larger than the vacuum degree of the closed space formed in the vacuum chamber 41 .

<About the transport board recovery unit>

The conveying plate collecting unit 60 includes: holding means 61 ; static electricity removing means 62 ; These elements are described in sequence below.

The holding means 61 can hold the conveyance plate 1 from the up-down direction, and can move the conveyance plate 1 in the XY plane (XY axis direction and θ direction) (refer to FIG. 6( d )). As long as the holding means 61 can hold the conveying plate 1, any form may be used, and for example, a machine hand or a pusher driven by an electric actuator, a pneumatic actuator, or the like may be used. Wait.

The neutralization means 62 is constituted by an ionizer, generates electric charges necessary for neutralization of electric charges, and supplies the electric charges to the charged object (insulator provided on one side 1a of the conveying plate 1 ) as the electrostatic elimination air i. As shown in FIG. 6( c ), the static elimination means 62 makes the electrostatic adsorption force of the uppermost part of the transport plate 1 and the laminated body L active by discharging the static elimination air i to the insulator provided on the one side 1 a of the transport plate 1 . decreased.

The static elimination means 62 of the present embodiment uses an ionizer, however, it is not limited to this. In addition, for example, the insulator provided on one side 1a of the conveying plate 1 may be formed wider than the area where the workpiece W is placed, and The outer peripheral edge of this insulator is directly held by the holding means 61 having conductivity. Thereby, since the electric charge neutralization of the insulator is performed by the outer periphery of the insulator and the holding means 61, the electrostatic attraction force of the uppermost part of the conveyance plate 1 and the laminated body L can be reduced more positively.

The conveying plate recovery unit drive mechanism can bring the gripping means 61 close to the conveying plate 1, and Furthermore, these means are moved in the X-axis direction (arrow IX direction), respectively, so that the static elimination means 62 is brought close to the stacking table 51 .

<About the lamination process of the workpiece>

The lamination process of the workpiece|work W in the concrete vacuum lamination|stacking apparatus 100 is demonstrated sequentially using FIGS. 3-6. In addition, the drive system of each unit (reversing unit 10, charging unit 20, aligning unit 30, conveying unit 40, laminating unit 50, and conveying plate collecting unit 60) is mainly based on the control means, and is executed according to the instruction from the control means. Here, in the lamination process of the workpieces, since the conveying plate 1 is always fixed to one of the units, the positioning and conveying of the workpieces W can be performed in a stable state.

<About electrified action>

First, as shown in FIG. 3( a ), the other side of the conveying plate 1 is placed in contact with the inversion table 11 disposed at the charging/reversing position A by the conveying plate supply unit (not shown). and the conveying plate 1 is fixed to the turning table 11 by the conveying plate fixing mechanism. Next, by a workpiece supply unit (not shown), the surface (second surface) of the workpiece W not provided with the adhesive layer a and the protective layer p is placed in contact with one side 1a of the conveying plate 1. on the insulator. Furthermore, by the charging unit driving mechanism, the charging unit 20 is moved in the X-axis direction (arrow I(1) direction) so as to traverse the upper side of the inversion table 11 . At this time, by irradiating the charged particles c downward from the charged particle irradiation section 21, the surface of the insulating system provided on the one side 1a of the conveying plate 1 is charged, and the workpiece W is charged and fixed to one side of the conveying plate 1 through the insulator. 1a. Here, as shown in FIG. 1 , when viewed from the Z-axis direction, one side 1 a of the conveying plate 1 on which the workpiece W is placed, that is, a region where the workpiece W is not placed, is formed so as to surround the workpiece W.

In the electrification operation of the present embodiment, the workpiece W is placed on the inversion table 11 and fixed. After being placed on the predetermined conveying plate 1, the workpiece W is charged and fixed to the insulator by the charging unit 20, but it is not limited to this. For example, before placing the workpiece W on the conveying plate 1 fixed to the inversion table 11, the insulator of the conveying plate 1 may be charged by the charging unit 20, and then the workpiece W may be charged and fixed to the insulator. In addition, as in the electrification operation of the present embodiment, after the workpiece W is placed on the conveying plate 1 fixed to the inversion table 11, the workpiece W is charged and fixed to the insulator, so that the position of the workpiece W on the conveying plate 1 can be suppressed. It is possible to suppress the risk of discharge from the insulator and the occurrence of contamination in the insulator.

<About the inversion and conveyance of the inversion unit>

First, as shown in FIG.3(b), the protective layer p provided in the workpiece|work W charged and fixed to the conveyance board 1 is peeled by peeling means (not shown). Thereby, the workpiece W charged and fixed to the conveying plate 1 becomes the workpiece W in which the adhesive layer a having adhesiveness is provided only on one side (hereinafter referred to as "workpiece Wa with adhesive"). After that, the inversion unit 10 is rotated by 180° around the Y-axis (arrow II(2) direction) by the inversion unit drive mechanism, and the adhesive layer a of the work Wa with the adhesive is disposed so as to face downward. Here, the fixing holding force of the other side 1b of the conveying plate 1 relative to the inversion table 11 by the conveying plate fixing mechanism, and the workpiece Wa with the adhesive relative to the conveying plate by the electrification fixing The electrostatic attraction force on the one side 1a of 1 is preset to a value such that the conveying plate 1 and the workpiece Wa with the adhesive do not fall from the inversion table 11 when the inversion table 11 is inverted.

In this embodiment, the workpiece W in which the adhesive layer a and the protective layer p are provided only on one side is used as the workpiece W that is charged and fixed on the conveying plate 1, but it is not limited to this. For example, the adhesive layers a and The protective layer p is provided on the workpiece W on both sides, or the workpiece W on which the adhesive layer a and the protective layer p are not provided on both sides. In addition, the workpiece W in which the adhesive layer a and the protective layer p are provided on both sides is used as an electrified fixation on the conveying plate 1 When the workpiece W is placed, the protective layer p on either side of the workpiece W is directly placed on the insulator on one side 1a of the conveying plate 1 .

Next, as shown in FIG. 3( c ), the reversing unit 10 is moved from the charging/reversing position A along the X-axis direction (arrow III(3) direction) to the alignment stage position B by the reversing unit driving mechanism, Move in the downward direction of the Z-axis (arrow IV(4) direction). Thereby, the area|region where the workpiece|work Wa is not mounted on the one side 1a of the conveyance board 1 is made to contact the upper surface of the setting block 32 of the alignment unit 30. Then, after the conveying plate 1 is adsorbed and fixed to the upper surface of the setting block 32 , the fixing of the other side 1 b of the conveying plate 1 to the inversion table 11 by the conveying plate fixing mechanism is released. Thereafter, as shown in (d) of FIG. 3 , the inversion unit 10 is moved upward in the Z-axis direction (arrow IV (5) direction) by the inversion unit drive mechanism, and then moves from the alignment stage position B along the X-axis direction. (arrow III (6) direction) to move to the charged/reversed position A.

<About alignment action>

As shown in FIG.3(d), the alignment imaging unit 34 imaging|photographs an alignment mark with respect to one of the workpiece|work Wa provided with the adhesive agent from below. The captured image is sent to an image processing device (not shown), which calculates the respective positions of a pair of alignment marks through image processing, and calculates the position of the calculated pair of alignment marks and a preset reference position error. Here, if the error is within a predetermined range, it is determined that the alignment of the adhesive-attached workpiece Wa is properly performed, and the positioning operation of the adhesive-attached workpiece Wa is terminated. On the other hand, if the error is outside the predetermined range, it is determined that the alignment of the work Wa with the adhesive is not properly performed. At this time, the XY θ axis electric actuator 33 moves the adhesive-attached workpiece Wa along the XY θ axis through the alignment stage 31 , the setting block 32 and the conveying plate 1 so as to minimize the error. This alignment with respect to the preset reference position is continued until the error falls within a predetermined range.

In the alignment operation of the present embodiment, the workpiece Wa with the adhesive and the alignment stage 31 are separated from each other. Since it is performed in a non-contact state, dust and the like do not adhere to the adhesive layer a, and it can be performed smoothly.

<About the transport action performed by the transport unit>

The conveyance operation performed by the conveyance unit will be described using FIG. 4( a ) to FIG. 4( d ), and is divided into two states of the magnetic fixing state of the conveying plate and the conveying state, respectively.

(magnetically fixed state of the transport plate)

The conveyance unit 40 stops at the standby position C in the standby state in which the lift piston 43 and the peeling piston 45 are retracted. First, when the alignment unit 30 determines that the alignment of the workpiece Wa with the adhesive has been properly performed, as shown in (a) of FIG. V(7) direction) moves from the standby position C to the alignment stage position B. Thereafter, as shown in FIG. 4( b ), the conveying unit 40 is moved downward in the Z-axis direction (arrow IV (8) direction) by the conveying unit drive mechanism, and the conveying plate chuck 42 abuts on the conveying plate 1 on the other side of 1b. At this time, the conveyance plate 1 made of a magnetic body is magnetically fixed by the conveyance plate chuck 42 by the plurality of magnetic force portions 42m made of permanent magnets. Here, in the conveyance plate 1, the suction holding force to the installation block 32 acting on the lower side in the Z-axis direction is set to be larger than the magnetic force of the magnetic force portion 42m acting on the upper side in the Z-axis direction. Thereby, the conveying plate 1 is magnetically fixed to the conveying plate chuck 42 in a state of being adsorbed and fixed to the setting block 32 without being floated from the setting block 32 , so that it is possible to prevent the belt fixed to the conveying plate 1 from being electrified. The position of the workpiece Wa of the adhesive is shifted.

In this embodiment, permanent magnets are used for the magnetic portion 42m, but instead of using electromagnets for ON/OFF control, when the transfer plate chuck 42 abuts against the other side 1b of the transfer plate 1 Before and after the timing (timing), switch from OFF control to ON control to generate magnetic force.

(shipping status)

First, after releasing the suction and fixation of one side 1a of the conveying plate 1 to the upper surface of the setting block 32, as shown in FIG. 4(c), the conveying unit 40 is moved upward in the Z-axis direction ( Arrow IV (9) direction). After that, as shown in FIG. 4( d ), the conveying unit 40 is moved from the alignment stage position B to the stacking stage position D by the conveying unit drive mechanism, and moves in the X-axis direction (arrow V(10) direction) Then, move downward in the Z-axis direction (in the direction of arrow VI (11)). Thereby, the sealing member provided in the lower end of the peripheral wall 41s of the vacuum chamber 41 abuts and closely contacts with the stacking table 51, so that a closed space (internal pressure is atmospheric pressure Pa) is formed in the vacuum chamber 41. At this time, the work Wa with the adhesive charged and fixed to the conveying plate 1 and the layered body L stacked on the stacking table 51 are arranged to face each other in the vertical direction in a non-contact state.

Here, in the layered body L stacked on the stacking table 51, only the lowermost workpiece W is the workpiece W without the adhesive layer a, which is fixed to the stacking table 51 by the workpiece fixing mechanism, and the other workpieces W are adhered with tapes. The workpiece Wa of the agent is formed and fixed by mutual adhesive force. In this embodiment, the pressing force of the vacuum chamber 41 with respect to the stacking table 51 is adjusted to a desired value by the conveyance unit drive mechanism, thereby improving the air density of the closed space formed in the vacuum chamber 41 .

<About the stacking operation>

From now on, the lamination operation will be described with reference to three states divided into a vacuum state, a lamination state, and a magnetic fixation release state of the conveying plate using FIGS. 5( a ) to 5 ( e ). In addition, in FIG.5(b)-FIG.5(e), in order to grasp|ascertain the operation|movement of the lift piston 43 or a pair of peeling piston 45 easily, the member which is in an operating state is shown in gray.

(vacuum state)

First, as shown in FIG. 5( a ), the gas in the closed space formed in the vacuum chamber 41 is evacuated through the exhaust port provided in the stacking table 51 , thereby evacuation is performed (refer to the drawing). point area). The vacuum pressure Pv in the closed space is set to, for example, about -100 (kpa). Here, the work Wa with the adhesive is charged and fixed to the conveying plate 1, and the conveying plate 1 is magnetically fixed by the conveying plate chuck 42. Therefore, even under vacuum, the work Wa or the conveying plate 1 with the adhesive will not be transported from the conveying plate 1. The plate chuck 42 is dropped.

(layered state)

After the vacuum pressure Pv in the vacuum chamber 41 reaches a desired value, as shown in FIG. 5(b), the lift piston 43 is shifted to the extended state, and the plate chuck 42 is moved downward in the Z-axis direction (arrow VII (12). ) direction) move. Then, the workpiece Wa with the adhesive charged and fixed to the conveying plate 1 abuts on the uppermost part of the layered body L stacked on the stacking table 51 . Furthermore, in this state, the lift piston 43 moves the transfer plate chuck 42 downward in the Z-axis direction (direction of arrow VII (12)) by a predetermined amount in accordance with the type of adhesive used for the workpiece Wa with the adhesive. push amount. Thereby, the workpiece|work Wa with an adhesive agent fixed to the conveyance board 1 by the adhesive force is integrally laminated|stacked with the laminated body L by the adhesive force.

In this embodiment, after vacuuming the space between the work Wa with the adhesive charged and fixed to the conveying plate 1 and the laminated body L laminated on the lamination table 51, the work Wa with the adhesive and the laminated body are evacuated. The body L is integrally laminated, and air is prevented from being mixed between the layers of the laminated body L. Furthermore, in the present embodiment, the conveyance unit 40 can perform not only the conveyance of the conveyance plate 1 but also the formation of a closed space, the lamination of the workpieces W, and the like, so that the units constituting the vacuum lamination apparatus 100 can be simplified. Generation and cost reduction. In addition, in the lamination operation of the present embodiment, in order to further improve the lamination accuracy of the lamination body L, for example, a pin guide lamination method may be adopted, that is, the lamination table 51 and the transfer plate chuck may be used. A method in which the needles and guide holes of 42 are engaged with each other to perform stacking.

(The magnetic fixation of the transport plate is released)

First, as shown in FIG. 5( c ), the pair of peeling pistons 45 extend downward in the Z-axis direction (in the direction of arrow VIII ( 13 )), and penetrate the penetrating holes provided in the transfer plate chuck 42 in a non-contact state. Hole 42h. The extension of the peeling piston 45 is stopped when the lower end of the peeling piston 45 reaches a position flush with the lower surface of the transfer plate chuck 42 , that is, abuts the other side 1 b of the transfer plate 1 . Here, since the lower end of the peeling piston 45 is in contact with the conveying plate 1 and is firmly fixed in a movement restricted state, the upward movement of the conveying plate 1 in the Z-axis direction is restricted.

Next, as shown in FIG. 5( d ), by raising and lowering the piston 43 , the conveying plate chuck 42 moves upward in the Z-axis direction (arrow VII(14) direction), and is in a retracted standby state. At this time, a force larger than the magnetic force acting on the magnetic portion 42m of the conveyance plate 1 is applied to the conveyance plate chuck 42 by the lift piston 43, and the magnetic fixation of the conveyance plate chuck 42 and the conveyance plate 1 is released. Furthermore, since the upward movement of the conveying plate 1 in the Z-axis direction is restricted by the peeling piston 45, the interlayers of the layered body L are not loaded with external forces that would cause peeling, and the layering accuracy of the layered body L can be maintained. Then, as shown in FIG.5(e), the peeling piston 45 moves to the upper direction (arrow VIII (15) direction) of the Z-axis direction, and is in the standby state of being retracted.

In the present embodiment, the magnetic portion 42m uses a permanent magnet, but instead of using an electromagnet for ON/OFF control, the lower end of the peeling piston 45 is in contact with the other side 1b of the conveying plate 1. The sequence before and after is switched from ON control to OFF control to make the magnetic force disappear.

<About the collection operation of the conveying board>

The collection|recovery operation of a conveyance board is demonstrated using FIG.6(a)-FIG.6(e), and is divided into two states which are a collection|recovery preparation state and a collection|recovery state, respectively. In addition, FIG. 6(a) to FIG. 6(c) and FIG. 6(e) are for explanation Fig. 6(d) is a schematic plan view of the conveying plate 1 and the layered body L shown in Fig. 6(c) only.

(recycling ready state)

First, as shown in FIG. 6( a ), gas is supplied into the closed space formed in the vacuum chamber 41 through the opening port provided in the stacking table 51 , and the atmosphere is released so that the internal pressure becomes the atmospheric pressure Pa . Then, as shown in FIG. 6( b ), the conveying unit 40 is moved upward in the Z-axis direction (arrow VI (16) direction) by the conveying unit drive mechanism, and then moves along the X-axis direction (arrow V (17) direction). ) direction) moves from the stacking table position D to the standby position C.

(recycling status)

As shown in FIG. 6( c ), the conveying plate collecting unit 60 is moved in the X-axis direction (arrow IX direction) by the conveying plate collecting unit drive mechanism, whereby the gripping means 61 approaches the conveying plate 1 and the static electricity removing means 62 is close to the stacking table 51 . Then, after the transport plate 1 at the grasping position G is grasped from the up-down direction by the grasping means 61, as shown in FIG. 6(d), the transport plate 1 moves in the XY plane (XY axis direction and θ direction). Moreover, the static-removing air i is flowed between the conveyance plate 1 and the laminated body L by the static-removing means 62 .

Here, the static elimination mechanism using the holding means 61 and the static elimination means 62 will be described. First, the electrification fixation between the workpiece Wa with the adhesive layered on the uppermost part of the layered body L and the conveying plate 1 is strong against the tensile force in the Z-axis direction, but against the shear force parallel to the XY plane, It is easier to produce lateral displacement. Therefore, as shown in FIG.6(c), the conveyance plate 1 is slid relative to the laminated body L in the XY plane by the holding means 61 while the position of the laminated body L is maintained in a fixed state. At this time, since the static removing air i is flowed between the conveying plate 1 and the layered body L by the static removing means 62, the layered The electrostatic attraction force between the workpiece Wa with the adhesive on the uppermost part of the layered body L and the conveying plate 1 gradually becomes weaker from the outer side toward the inner side of the insulator. By repeating the sliding and the inflow of the static-removing air i, the conveying plate 1 is separated from the layered body L and collected. As a result, as shown in FIG.6(e), on the lamination|stacking table 51, the workpiece|work Wa with an adhesive agent is laminated|stacked integrally on the uppermost part of the laminated body L.

In the present embodiment, when the conveying plate 1 is separated and recovered from the layered body L, the interlayers of the layered body L are not loaded with external force that would cause peeling, so that air can be prevented from entering between the layers. Furthermore, the workpiece W in this embodiment has been described using the workpiece Wa with an adhesive. However, when a workpiece W having an adhesive layer a and a protective layer p on both sides is used instead, the workpiece W may be laminated on the workpiece W. After the laminate L, the protective layer p on the upper surface side of the workpiece W is peeled off. Furthermore, in this embodiment, when the adhesive force of the adhesive between the layers of the laminated body L is greater than the electrostatic adsorption force between the laminated body L and the conveying plate 1 , the conveying plate 1 can also be moved along the conveying plate 1 by the holding means 61 . Move in the XY plane and move along the Z axis. This is because even if an external force in the Z-axis direction is applied to the layered body L by the holding means 61, the layers of the layered body L do not peel off, so that air can be prevented from entering between layers and the layering accuracy can be maintained.

As described above, the lamination process of laminating one piece of workpiece W on the laminate L has been described. However, when it is necessary to laminate the workpiece W on the laminate L again, the required number of lamination processes are repeatedly performed (Fig. 3 to FIG. 6 ), a desired layered body L can be formed.

1: Shipping board

10: Flip unit (flip means)

11: Flip table

20: Charged unit (charged means)

21: Charged particle irradiation section

30: Alignment unit (alignment means)

31: Alignment stage

32: Setting Blocks

33: XY theta axis electric actuator

34: Align the camera unit

40: Delivery unit (transportation means)

41: Vacuum Chamber

41s: Zhou Wall

41t: Upper wall

42: Transport plate chuck

42h: Through hole

42m: Magnetic part

43: Lifting Piston

44: Guide shaft

45: Peel Piston

50: Lamination unit

51: Stacking table

60: Transport board recovery unit (transport board recovery means)

61: Control means

62: Elimination means

100: Vacuum Lamination Device

A: Live/flipped position

B: Alignment stage position

C: Standby position

c: charged particle

D: Position of the stacking table

i: static-removing air

Claims (8)

A vacuum lamination device, which is used for laminating a plurality of workpieces in sequence, has: The conveying plate is used to hold the aforementioned workpieces; an alignment means for fixedly supporting the conveying plate and aligning the workpiece held by the conveying plate; Lamination means, which is to laminate the above-mentioned workpieces that have been aligned on a lamination table under vacuum; and a conveyance means, which is moved between the alignment means and the lamination means, supports the conveyance plate while the workpiece is held on the conveyance plate, and conveys the workpiece from the alignment means to the lamination means; The conveying plate is detachable from the aligning means and the conveying means, and fixes the workpiece on one side electrically, and magnetically fixes the other side with the conveying means. The vacuum lamination apparatus according to claim 1, wherein the conveying plate is made of a magnetic body, and an insulator is provided on one side of the conveying plate. The vacuum lamination device according to claim 1, wherein the conveying plate electrically fixes the non-adhesive second surface on the opposite side to the first surface of the workpiece having adhesiveness. The vacuum lamination apparatus according to claim 1, wherein the alignment means includes an alignment stage and a setting block provided on the alignment stage, The conveying plate is placed on the setting block so that the workpiece and the alignment stage are in a non-contact state. The vacuum lamination apparatus according to claim 1, wherein the conveyance means is brought into contact with the lamination means to form a closed space, and the conveyance plate is moved by the conveyance means in the closed space under vacuum. Instead, the aforementioned workpieces are laminated. The vacuum lamination device according to claim 1, further comprising means for recovering the conveying plate, The conveying plate recovery means can remove electricity from the conveying plate, peel the conveying plate from the workpiece, and recover the conveying plate. A method for manufacturing a layered body, comprising sequentially layering a plurality of workpieces, the method for manufacturing the layered body comprising: The step of charging and fixing the aforementioned workpiece on one side of the aforementioned conveying plate; The step of aligning the above-mentioned workpieces charged and fixed by the above-mentioned conveying plate in a state where the above-mentioned conveying plate is fixedly supported on the alignment stage; The step of magnetically fixing the other side of the conveying plate in a state of electrifying and fixing the workpiece to one side of the conveying plate, and conveying the aligned workpiece from the alignment stage to the stacking stage; and The step of laminating the aligned workpieces on the lamination table under vacuum. The method for manufacturing a laminate according to claim 7, wherein the step of conveying the workpiece is performed by magnetically fixing the conveying plate in a vacuum chamber having an upper wall and a side wall, and the vacuum chamber is abutted on the lamination table. form a closed space.

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