TW202002351A - Display panel and manufacturing method thereof - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims description 12
- 238000004381 surface treatment Methods 0.000 claims description 11
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 4
- 238000009832 plasma treatment Methods 0.000 claims description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 85
- 239000000463 material Substances 0.000 description 28
- 239000010408 film Substances 0.000 description 13
- -1 region Substances 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 230000002209 hydrophobic effect Effects 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000002940 repellent Effects 0.000 description 3
- 239000005871 repellent Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- WYSBZCPNRXECEW-UHFFFAOYSA-N 1-diazo-2H-anthracene Chemical class C1=CC=C2C=C3C(=[N+]=[N-])CC=CC3=CC2=C1 WYSBZCPNRXECEW-UHFFFAOYSA-N 0.000 description 1
- KAESVJOAVNADME-UHFFFAOYSA-N 1H-pyrrole Natural products C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- RQIPKMUHKBASFK-UHFFFAOYSA-N [O-2].[Zn+2].[Ge+2].[In+3] Chemical compound [O-2].[Zn+2].[Ge+2].[In+3] RQIPKMUHKBASFK-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000412 dendrimer Substances 0.000 description 1
- 229920000736 dendritic polymer Polymers 0.000 description 1
- 150000004985 diamines Chemical class 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 150000007978 oxazole derivatives Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
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Abstract
Description
本發明是有關於一種顯示面板及其製作方法,且特別是有關於一種具有介電圖案的顯示面板及其製作方法。The invention relates to a display panel and a manufacturing method thereof, and in particular to a display panel with a dielectric pattern and a manufacturing method thereof.
有機發光二極體(Organic light emitting diode;OLED)具有諸如壽命長、厚度薄、對比高、低熱產生及低功率消耗等優點,因此已被廣泛應用於家用及各種設備中的指示器或光源。Organic light emitting diode (Organic light emitting diode; OLED) has advantages such as long life, thin thickness, high contrast, low heat generation, and low power consumption, so it has been widely used as an indicator or light source in homes and various devices.
噴墨塗佈技術(Ink Jet Printing,IJP)在OLED的製程上能夠提升材料利用率以降低製程成本,但在進行噴墨塗佈之前需形成對應畫素設置的疏水擋牆(bank),以定義每一畫素的區域。然而,在液滴噴塗於擋牆所構成的容置空間內時,液體的表面張力與擋牆側壁附著力的不同導致後續經乾燥製程所形成之薄膜的厚度均勻度不佳,致使畫素周圍的亮度及色度與中心有明顯差異。Ink Jet Printing (IJP) technology can improve the material utilization rate in the OLED process to reduce the process cost, but before the inkjet coating needs to form a corresponding pixel set hydrophobic bank (bank), to Define the area of each pixel. However, when the droplets are sprayed into the containing space formed by the retaining wall, the difference between the surface tension of the liquid and the adhesion of the sidewall of the retaining wall results in poor uniformity of the thickness of the film formed by the subsequent drying process, resulting in the surrounding of the pixels The brightness and chromaticity are obviously different from the center.
本發明提供一種顯示面板,可以改善開口率及膜厚均勻度,提供良好的顯示品質。The invention provides a display panel which can improve the aperture ratio and the uniformity of the film thickness and provide good display quality.
本發明的顯示面板,包括基板、主動元件層設置於基板上、絕緣層設置於主動元件層上且具有多個第一區和第一區之間的第二區、多個第一電極彼此分離且分別設置於絕緣層的第一區上、多個介電圖案彼此分離且分別設置於第一電極上且具有多個開口、多個有機發光圖案分別設置於介電圖案上及開口中、以及第二電極設置於有機發光圖案上。開口分別與第一電極重疊。介電圖案之間的間隙與絕緣層的第二區重疊。The display panel of the present invention includes a substrate, an active device layer disposed on the substrate, an insulating layer disposed on the active device layer, and having a plurality of first regions and a second region between the first regions, and a plurality of first electrodes separated from each other And are respectively disposed on the first region of the insulating layer, a plurality of dielectric patterns are separated from each other and are respectively disposed on the first electrode and have a plurality of openings, and a plurality of organic light emitting patterns are respectively disposed on and in the dielectric patterns, and The second electrode is disposed on the organic light emitting pattern. The openings overlap with the first electrodes, respectively. The gap between the dielectric patterns overlaps the second region of the insulating layer.
本發明的顯示面板的製作方法包括以下步驟。提供基板。設置主動元件層於基板上。設置絕緣層於主動元件層上,絕緣層具有多個第一區和第一區之間的第二區。設置多個第一電極於絕緣層上,第一電極彼此分離且分別位於第一區上。設置多個介電圖案於第一電極上,介電圖案彼此分離且具有多個開口。開口分別與第一電極重疊,介電圖案之間的間隙與絕緣層的第二區重疊,且間隙暴露絕緣層。間隙暴露的絕緣層進行表面處理。設置多個有機發光圖案分別於介電圖案上及開口中。以及,設置第二電極於有機發光圖案上。The manufacturing method of the display panel of the present invention includes the following steps. Provide a substrate. The active device layer is arranged on the substrate. An insulating layer is disposed on the active device layer. The insulating layer has a plurality of first regions and a second region between the first regions. A plurality of first electrodes are provided on the insulating layer. The first electrodes are separated from each other and are respectively located on the first region. A plurality of dielectric patterns are provided on the first electrode. The dielectric patterns are separated from each other and have a plurality of openings. The openings overlap with the first electrodes, the gap between the dielectric patterns overlaps with the second region of the insulating layer, and the gap exposes the insulating layer. The insulating layer with the exposed gap is surface-treated. A plurality of organic light emitting patterns are arranged on the dielectric pattern and in the opening. And, a second electrode is provided on the organic light emitting pattern.
基於上述,本發明一實施例的顯示面板,由於顯示面板在第一電極上設置介電圖案,且介電圖案具有親水及/或親墨性,而介電圖案之間的間隙所暴露的絕緣層可透過表面處理而具有疏水及/或疏墨性。因此,有機發光圖案可固定至介電圖案上。如此,本顯示面板不需藉由習知的擋牆結構即可定義出多個畫素結構,且可以避免相鄰的有機發光圖案的混合或混色,更可以提升顯示面板的開口率,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案的膜厚可以一致且均勻,使顯示面板可以提供均勻的亮度及良好的顯示品質。Based on the above, in the display panel according to an embodiment of the present invention, since the display panel is provided with a dielectric pattern on the first electrode, and the dielectric pattern has hydrophilicity and/or ink affinity, the insulation between the gaps between the dielectric patterns is exposed The layer can be hydrophobic and/or ink repellent by surface treatment. Therefore, the organic light emitting pattern can be fixed to the dielectric pattern. In this way, the display panel can define a plurality of pixel structures without using a conventional retaining wall structure, and can avoid mixing or color mixing of adjacent organic light-emitting patterns, and can further increase the aperture ratio of the display panel and enhance the display quality. In addition, since this embodiment does not require a conventional retaining wall structure, the film thickness of the organic light-emitting pattern can be uniform and uniform, so that the display panel can provide uniform brightness and good display quality.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, the embodiments are specifically described below in conjunction with the accompanying drawings for detailed description as follows.
在附圖中,為了清楚起見,放大了層、膜、面板、區域等的厚度。在整個說明書中,相同的附圖標記表示相同的元件。應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件”上”或”連接到”另一元件時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為”直接在另一元件上”或”直接連接到”另一元件時,不存在中間元件。如本文所使用的,”連接”可以指物理及/或電性連接。再者,”電性連接”或”耦合”係可為二元件間存在其它元件。In the drawings, the thickness of layers, films, panels, regions, etc., are exaggerated for clarity. Throughout the specification, the same reference numerals denote the same elements. It should be understood that when an element such as a layer, film, region, or substrate is referred to as being “on” or “connected to” another element, it can be directly on or connected to the other element, or Intermediate elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to physical and/or electrical connections. Furthermore, "electrical connection" or "coupling" may be that there are other elements between the two elements.
應當理解,儘管術語”第一”、”第二”、”第三”等在本文中可以用於描述各種元件、部件、區域、層及/或部分,但是這些元件、部件、區域、及/或部分不應受這些術語的限制。這些術語僅用於將一個元件、部件、區域、層或部分與另一個元件、部件、區域、層或部分區分開。因此,下面討論的”第一元件”、”部件”、”區域”、”層”或”部分”可以被稱為第二元件、部件、區域、層或部分而不脫離本文的教導。It should be understood that although the terms "first", "second", "third", etc. may be used herein to describe various elements, components, regions, layers, and/or sections, these elements, components, regions, and/or Or part should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Accordingly, "first element", "component", "region", "layer" or "portion" discussed below may be referred to as a second element, component, region, layer or section without departing from the teachings herein.
除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which this invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant technology and the present invention, and will not be interpreted as idealized or excessive Formal meaning unless explicitly defined as such in this article.
圖1A至圖1F繪示為本發明一實施例中顯示面板的製作流程的剖面示意圖。圖2A繪示為本發明一實施例中設置多個介電圖案前的顯示面板的局部上視示意圖。圖2B繪示為本發明一實施例的顯示面板的局部上視示意圖。圖2A及圖2B為了方便說明及觀察,僅示意性地繪示部分構件。在本實施例中,顯示面板10(繪示於圖1F)包括基板100、主動元件層120、絕緣層140、多個第一電極150、多個介電圖案160、多個有機發光圖案200以及第二電極180。以下將以一實施例說明顯示面板10的製作方法。FIG. 1A to FIG. 1F are schematic cross-sectional views of a manufacturing process of a display panel according to an embodiment of the invention. FIG. 2A is a schematic partial top view of a display panel before a plurality of dielectric patterns are provided in an embodiment of the invention. 2B is a schematic partial top view of a display panel according to an embodiment of the invention. For convenience of description and observation, FIGS. 2A and 2B only schematically show some components. In this embodiment, the display panel 10 (shown in FIG. 1F) includes a
請參考圖1A,首先提供基板100。基板100的材料可以是玻璃、石英、有機聚合物、不透光/反射材料(例如:導電材料、金屬、晶圓、陶瓷或其它可適用的材料)或是其它可適用的材料。若使用導電材料或金屬時,則在基板100上覆蓋一層絕緣材料(未繪示),以避免短路問題。Please refer to FIG. 1A, the
接著,設置主動元件層120於基板100上。主動元件層120可例如是主動元件陣列(未繪示),其中上述的主動元件陣列包括多個薄膜電晶體(thin film transistor,TFT)(未繪示)。薄膜電晶體例如為低溫多晶矽薄膜電晶體(low temperature poly-Si,LTPS)或非晶矽薄膜電晶體(amorphous Si,a-Si),但本發明不以此為限。Next, the
再來,設置絕緣層140於主動元件層120上。絕緣層140具有多個第一區12和這些第一區12之間的第二區14。在本實施例中,絕緣層140的材料包括無機材料。無機材料包括氮化矽(SiNx
)或其他合適材料,本發明不以此為限。Next, an
然後,設置多個第一電極150於絕緣層140上。這些第一電極150彼此分離且分別位於第一區12上。請同時參考圖1A及圖2A,在本實施例中,每一第一電極150分別設置於每一第一區12上,且多個第一區12由第二區14隔開以彼此獨立。在本實施例中,每一第一電極150位於對應的第一區12中彼此獨立以陣列方式排列,但本發明不以此為限。在其他實施例中,每一第一電極150也可以一預先設計的圖案形狀排列。Then, a plurality of
於一實施例中,第一電極150可以是單層、雙層或多層結構。第一電極150的材料可為導體材料,例如:鋁(Al)、銀(Ag)、鉻(Cr)、銅(Cu)、鎳(Ni)、鈦(Ti)、鉬(Mo)、鎂(Mg)、鉑(Pt)、金(Au)等,又或例如可為為金屬氧化物,例如:銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物、銦鎵氧化物等,又或是其它適當材料、或者是上述至少二者的堆疊層。舉例而言,第一電極150可以是由ITO/Ag/ITO所構成的三層結構,但本發明不以此為限。在其他實施例中,第一電極150也可以是Ti/Al/Ti或是由Mo/Al/Mo所構成的三層結構。在一些實施例中,第一電極150的形成方法可以是化學氣相沉積(CVD)、物理氣相沉積(PVD)、原子層沉積(ALD)、蒸鍍(VTE)、濺鍍(SPT)或其組合。在一些實施例中,第一電極150可作為有機發光圖案200的陽極(anode),但本發明不以此為限。In an embodiment, the
請參考圖1B及圖2A,接著,設置多個介電層160於這些第一電極150上。舉例而言,這些介電圖案160於垂直基板100的方向上部分重疊這些第一電極150,且介電圖案160的部分位於第二區14中。這些介電圖案160彼此分離且具有多個開口162。這些開口162位於第一區12中,且在垂直基板100的方向上,分別與對應的第一電極150重疊。具體而言,這些開口162暴露出這些第一電極150。在本實施例中,這些介電圖案160之間的間隙D與絕緣層140的第二區14重疊,且間隙D暴露絕緣層。在本實施例中,介電圖案160的形成方法例如先將介電材料(未繪示)整面地形成於絕緣層140上並覆蓋第一電極150。再透過例如黃光微影製程圖案化介電材料以形成多個彼此分離的介電圖案160及對應的開口162,但本發明不以此為限。Please refer to FIG. 1B and FIG. 2A, and then, a plurality of
值得一提的是,請參考圖1C,然後,於間隙D暴露的絕緣層140進行表面處理300。舉例而言,進行表面處理300的步驟包括以四氟甲烷(CF4
)作為工作氣體對絕緣層140進行電漿處理。在本實施例中,在進行表面處理300的步驟後,於間隙D暴露的絕緣層140對於丙二醇甲醚醋酸酯(Propylene glycol methyl ether acetate , PGMEA)具有高接觸角度,且接觸角度大於40°。換句話說,間隙D所暴露的絕緣層140具有疏水及/或疏墨性。具體而言,上述所暴露的絕緣層140具有疏水性表面。如此一來,相較於習知透過擋牆結構以形成定義畫素結構的容置空間,本實施例不需設置擋牆結構以容置後續形成的有機發光圖案200,即可定義出畫素結構並避免相鄰介電圖案160上的有機發光圖案200的混合或混色。It is worth mentioning that please refer to FIG. 1C, and then, the insulating
接著,請參考圖1D、圖1E及圖2B,設置多個有機發光圖案200分別於介電圖案160上及這些開口162中。請先參考圖1D,在本實施例中,為了提升材料的利用率以降低顯示面板10的製造成本,可藉由噴墨塗佈(ink jet printing,IJP)製程來形成有機發光圖案200。舉例而言,有機發光材料200’可由噴墨塗佈製程設置於介電圖案160上且位於開口162中並接觸第一電極150。有機發光材料200’例如為作為畫素的有機發光圖案200的液態材料。Next, please refer to FIG. 1D, FIG. 1E and FIG. 2B, a plurality of organic
然後,請參考圖1D、圖1E及圖2,透過一固化程序(未繪示),將液態的有機發光材料200’乾燥後形成固態的有機發光圖案200。在一些實施例中,有機發光圖案200可為多層結構,包括電洞注入層(hole injection layer,HIL)、電洞傳輸層(hole transfer layer,HTL)和發光層(emission layer,EL)。圖1E為了方便說明及清楚表示,僅以一層結構表示。Then, referring to FIGS. 1D, 1E, and 2, through a curing process (not shown), the liquid organic light-emitting material 200' is dried to form a solid organic light-emitting
在一些實施例中,電洞注入層的材料例如是苯二甲藍銅、星狀芳胺類、聚苯胺、聚乙烯二氧噻吩或其他適合的材料。電洞傳輸層的材料例如是三芳香胺類、交叉結構二胺聯苯、二胺聯苯衍生物或其他適合的材料。發光層可以是紅色有機發光圖案、綠色有機發光圖案、藍色有機發光圖案或是混合各頻譜的光產生的不同顏色(例如白、橘、黃等)發光圖案。In some embodiments, the material of the hole injection layer is, for example, xylylene copper, star arylamines, polyaniline, polyethylene dioxythiophene, or other suitable materials. The material of the hole transport layer is, for example, triaromatic amines, cross-structured diamine biphenyl, diamine biphenyl derivatives or other suitable materials. The light-emitting layer may be a red organic light-emitting pattern, a green organic light-emitting pattern, a blue organic light-emitting pattern, or a different color (for example, white, orange, yellow, etc.) light-emitting pattern generated by mixing light of various spectra.
值得注意的是,基於液體的表面張力與擋牆結構之吸附力的不同會導致液滴乾燥過程有膜厚不均的狀況,故以上述習知製程所形成的有機發光圖案的厚度隨著靠近擋牆結構漸增,而導致膜厚不均勻。由於本發明一實施例的顯示面板10透過在第一電極150上設置介電圖案160,且介電圖案160的PGMEA接觸角度為小於10°。換句話說,介電圖案160具有親水及/或親墨性。因此,液滴狀的有機發光材料200’可以吸附至介電圖案160上,並透過疏水及/或疏墨性的絕緣層140而固定在介電圖案160。如此,本實施例不需習知的擋牆結構以容置這些有機發光材料200’,即可定義出多個畫素結構。因此,介電圖案160除了可避免相鄰介電圖案160上的有機發光圖案200的混合或混色更可以提升顯示面板10的開口率,提升顯示品質。此外,由於本實施例不需設置習知的擋牆結構,如此,固化有機發光材料200’後形成的有機發光圖案200的膜厚可以一致且均勻,以提供均勻的亮度及良好的顯示品質。It is worth noting that the difference between the surface tension of the liquid and the adsorption force of the retaining wall structure will cause the film thickness to be uneven during the drying process. Therefore, the thickness of the organic light-emitting pattern formed by the above-mentioned conventional process increases as The structure of the retaining wall is increasing, which leads to uneven film thickness. Since the
請參考圖1F及圖2B,圖1F繪示為圖2B的顯示面板10沿著剖面線A-A’的剖面示意圖。然後,設置第二電極180於有機發光圖案200上。在本實施例中,於設置第二電極180的步驟之前,可更包括設置電子傳輸層170於有機發光圖案200與第二電極180之間。電子傳輸層170舉例是藉由熱蒸鍍製程形成於有機發光圖案200上,以降低有機發光圖案200的驅動電壓。電子傳輸層170例如是整面的設置於絕緣層140上並覆蓋介電圖案160,並於第二區14中接觸間隙D所暴露的絕緣層140。在本實施例中,電子傳輸層的材料可以是噁唑衍生物及其樹狀物、金屬螯合物(例如Alq3)、唑類化合物、二氮蒽衍生物、含矽雜環化合物或其他適合的材料。Please refer to FIGS. 1F and 2B. FIG. 1F is a schematic cross-sectional view of the
在本實施例中,第二電極180可以整面的方式設置在有機發光圖案200上並重疊介電圖案160、有機發光圖案200及第一電極150,但本發明不以此為限。第二電極180的材料可為透明的導體材料,例如銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物或銦鍺鋅氧化物等金屬氧化物。在一些實施例中,第二電極180的形成方法可以是化學氣相沉積(CVD)、物理氣相沉積(PVD)、原子層沉積(ALD)、蒸鍍(VTE)、濺鍍(SPT)或其組合。在一些實施例中,第二電極180可作為有機發光圖案200的陰極(cathode)。In this embodiment, the second electrode 180 may be disposed on the organic
簡言之,由於本發明一實施例的顯示面板10在第一電極150上設置介電圖案160,且介電圖案160具有親水及/或親墨性,而介電圖案160之間的間隙D所暴露的絕緣層140可透過表面處理300而具有疏水及/或疏墨性。因此,液滴狀的有機發光材料200’可以吸附至介電圖案160上,並被絕緣層140的間隙D的疏水及/或疏墨性推開而固定在介電圖案160上。如此,本顯示面板10不需藉由習知的擋牆結構以容置這些有機發光材料200’,即可定義出多個畫素結構。因此,介電圖案160除了可避免相鄰介電圖案160上的有機發光圖案200的混合或混色更可以提升顯示面板10的開口率,提升顯示品質。此外,顯示面板10的製程還可被簡化,並降低製作成本。另外,由於本實施例不需設置習知的擋牆結構,如此,固化有機發光材料200’後形成的有機發光圖案200的膜厚可以一致且均勻,使顯示面板10可以提供均勻的亮度及良好的顯示品質。In short, since the
在結構上,請參考圖1F及圖2B,顯示面板10包括,基板100、主動元件層120設置於基板100上、絕緣層140設置於主動元件層120上、多個第一電極150、多個介電圖案160、多個有機發光圖案200以及第二電極180設置於有機發光圖案200上。絕緣層140具有多個第一區12和這些第一區12之間的第二區14。這些第一電極150彼此分離且分別設置於絕緣層140的這些第一區12上。這些介電圖案160彼此分離且分別設置於這些第一電極150上,且具有多個開口162。這些開口162於垂直基板100的方向上分別與這些第一電極150重疊。這些有機發光圖案200分別設置於這些介電圖案200上及這些開口162中,且這些介電圖案之間的間隙D與絕緣層140的第二區14重疊。第二電極180設置於有機發光圖案200上。在本實施例中,顯示面板10更包括電子傳輸層170設置於有機發光圖案200與第二電極180之間。電子傳輸層170接觸絕緣層140。In terms of structure, please refer to FIGS. 1F and 2B, the
請參考圖1F、圖2A及圖2B,在本實施例中,各第一電極150於基板100上的正投影在各介電圖案160於基板100上的正投影內。換句話說,介電圖案160的一部分可以重疊並接觸第一電極150,且另一部份重疊並接觸絕緣層140。此外,有機發光圖案200重疊介電圖案160。介電圖案160於基板100上的正投影外邊緣在有機發光圖案200於基板100上的正投影邊緣內。有機發光圖案200於間隙D中與絕緣層140接觸。在上述的設置下,有機發光圖案200可固定至介電圖案160上。如此,本顯示面板10不需藉由習知的擋牆結構即可定義出多個畫素結構,且可以避免相鄰的有機發光圖案200的混合或混色,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案200的膜厚可以一致且均勻,使顯示面板10可以提供均勻的亮度及良好的顯示品質。Please refer to FIGS. 1F, 2A and 2B. In this embodiment, the orthographic projection of each
在本實施例中,於垂直基板100的方向上,開口162的邊緣至第二區14的距離W1為大於等於1微米,且小於等於5微米。此外,第一電極150的邊緣至介電圖案160的外邊緣的距離W2為大於等於1微米,且小於等於5微米。在上述的設置下,開口160的尺寸可以調整以提升開口率,且相鄰的有機圖案200之間的距離可以更進一步地縮小,以增加畫素結構的數量,因此更可以提升顯示面板10的顯示品質。In this embodiment, in the direction perpendicular to the
簡言之,由於本發明一實施例的顯示面板10在第一電極150上設置介電圖案160,且介電圖案160具有親水及/或親墨性,而介電圖案160之間的間隙D所暴露的絕緣層140可透過表面處理300而具有疏水及/或疏墨性。因此,有機發光圖案200可固定至介電圖案160上。如此,本顯示面板10不需藉由習知的擋牆結構即可定義出多個畫素結構,且可以避免相鄰的有機發光圖案200的混合或混色,更可以提升顯示面板10的開口率,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案200的膜厚可以一致且均勻,使顯示面板10可以提供均勻的亮度及良好的顯示品質。In short, since the
下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,關於省略了相同技術內容的部分說明可參考前述實施例,下述實施例中不再重複贅述。The following embodiments continue to use the element numbers and partial contents of the previous embodiments, wherein the same reference numerals are used to denote the same or similar elements. For the description of the parts that omit the same technical content, please refer to the previous embodiments. Repeat the details.
圖3A繪示為本發明另一實施例的顯示面板的剖面示意圖。本實施例所示的顯示面板10A與圖1F所示的顯示面板10類似,主要的差異在於:絕緣層140的第二區14具凸起結構142A,且凸起結構142A於基板100上的正投影與第一電極150於基板100上的正投影分離。在本實施例中,凸起結構142A與絕緣層140為同一膜層。舉例而言,絕緣層140於形成後,可透過黃光微影製程對絕緣層140進行圖案化,以在第二區14形成凸起結構142A。在上述的設置下,凸起結構142A可以形成於相鄰的第一電極150之間,並協助介電圖案160定義出多個畫素結構。具體而言,凸起結構142A可進一步避免相鄰的有機發光圖案200因流動產生的混合或混色。此外,凸起結構142A位於第一電極150之間不具有發光功能的第二區14,因此不會影響顯示面板10A的開口率。如此,顯示面板10A可獲致與上述實施例類似的技術功效。3A is a schematic cross-sectional view of a display panel according to another embodiment of the invention. The
在本實施例中,凸起結構142A的高度H1A為大於等於0.1微米,且小於等於10微米。舉例而言,凸起結構142A的高度H1A為凸起結構142A的頂面143A至絕緣層140的表面的高度。在上述的設置下,凸起結構142A的高度H1A可以調整至類似於有機發光圖案200的厚度。因此,有機發光圖案200的膜厚可以均勻,更可以減少漏電流的產生,使顯示面板10可以提供均勻的亮度及良好的顯示品質。In this embodiment, the height H1A of the
圖3B繪示為本發明又一實施例的顯示面板的剖面示意圖。本實施例所示的顯示面板10B與圖3A所示的顯示面板10A類似,主要的差異在於:顯示面板10B的凸起結構142B的剖面形狀為圓弧形,而顯示面板10A的凸起結構142A的剖面形狀為梯形。如此,顯示面板10B可獲致與上述實施例類似的技術功效。3B is a schematic cross-sectional view of a display panel according to another embodiment of the invention. The
綜上所述,本發明一實施例的顯示面板及其製作方法,由於顯示面板在第一電極上設置介電圖案,且介電圖案具有親水及/或親墨性,而介電圖案之間的間隙所暴露的絕緣層可透過表面處理而具有疏水及/或疏墨性。因此,有機發光圖案可固定至介電圖案上。如此,本顯示面板不需藉由習知的擋牆結構即可定義出多個畫素結構,且可以避免相鄰的有機發光圖案的混合或混色,更可以提升顯示面板的開口率,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案的膜厚可以一致且均勻,使顯示面板可以提供均勻的亮度及良好的顯示品質。此外,相鄰的第一電極之間可以形成凸起結構,以進一步避免相鄰的有機發光圖案因流動產生的混合或混色。此外,凸起結構位於第一電極之間不具有發光功能的第二區,因此不會影響顯示面板的開口率。另外,凸起結構的高度更可以調整至類似於有機發光圖案的厚度。因此,有機發光圖案的膜厚可以均勻,更可以減少漏電流的產生,使顯示面板可以提供均勻的亮度及良好的顯示品質。In summary, the display panel and the manufacturing method thereof according to an embodiment of the present invention, because the display panel is provided with a dielectric pattern on the first electrode, and the dielectric pattern has hydrophilicity and/or ink affinity, and between the dielectric patterns The insulating layer exposed by the gap can be hydrophobic and/or ink repellent through surface treatment. Therefore, the organic light emitting pattern can be fixed to the dielectric pattern. In this way, the display panel can define a plurality of pixel structures without using a conventional retaining wall structure, and can avoid mixing or color mixing of adjacent organic light-emitting patterns, and can further increase the aperture ratio of the display panel and enhance the display quality. In addition, since this embodiment does not require a conventional retaining wall structure, the film thickness of the organic light-emitting pattern can be uniform and uniform, so that the display panel can provide uniform brightness and good display quality. In addition, a convex structure may be formed between adjacent first electrodes to further avoid mixing or color mixing of adjacent organic light emitting patterns due to flow. In addition, the convex structure is located in the second region that does not have a light-emitting function between the first electrodes, and therefore does not affect the aperture ratio of the display panel. In addition, the height of the raised structure can be adjusted to be similar to the thickness of the organic light emitting pattern. Therefore, the film thickness of the organic light emitting pattern can be uniform, and the generation of leakage current can be further reduced, so that the display panel can provide uniform brightness and good display quality.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to the scope defined in the appended patent application.
10、10A、10B‧‧‧顯示面板12‧‧‧第一區14‧‧‧第二區100‧‧‧基板120‧‧‧主動元件層140‧‧‧絕緣層142A、142B‧‧‧凸起結構150‧‧‧第一電極160‧‧‧介電圖案162‧‧‧開口170‧‧‧電子傳輸層180‧‧‧第二電極200‧‧‧有機發光圖案200’‧‧‧有機發光材料300‧‧‧表面處理A-A’‧‧‧剖面線D‧‧‧間隙H1A‧‧‧高度W1‧‧‧第一距離W2‧‧‧第二距離10, 10A, 10B ‧‧‧
圖1A至圖1F繪示為本發明一實施例中顯示面板的製作流程的剖面示意圖。 圖2A繪示為本發明一實施例中設置多個介電圖案前的顯示面板的局部上視示意圖。 圖2B繪示為本發明一實施例的顯示面板的局部上視示意圖。 圖3A繪示為本發明另一實施例的顯示面板的剖面示意圖。 圖3B繪示為本發明又一實施例的顯示面板的剖面示意圖。FIG. 1A to FIG. 1F are schematic cross-sectional views of a manufacturing process of a display panel according to an embodiment of the invention. FIG. 2A is a schematic partial top view of a display panel before a plurality of dielectric patterns are provided in an embodiment of the invention. 2B is a schematic partial top view of a display panel according to an embodiment of the invention. 3A is a schematic cross-sectional view of a display panel according to another embodiment of the invention. 3B is a schematic cross-sectional view of a display panel according to another embodiment of the invention.
10‧‧‧顯示面板 10‧‧‧Display panel
12‧‧‧第一區 12‧‧‧ District 1
14‧‧‧第二區 14‧‧‧District 2
100‧‧‧基板 100‧‧‧ substrate
120‧‧‧主動元件層 120‧‧‧Active component layer
140‧‧‧絕緣層 140‧‧‧Insulation
150‧‧‧第一電極 150‧‧‧First electrode
160‧‧‧介電圖案 160‧‧‧Dielectric pattern
162‧‧‧開口 162‧‧‧ opening
170‧‧‧電子傳輸層 170‧‧‧Electronic transmission layer
180‧‧‧第二電極 180‧‧‧Second electrode
200‧‧‧有機發光圖案 200‧‧‧ organic light-emitting pattern
A-A’‧‧‧剖面線 A-A’‧‧‧hatching
D‧‧‧間隙 D‧‧‧clearance
W1‧‧‧第一距離 W1‧‧‧ First distance
W2‧‧‧第二距離 W2‧‧‧Second distance
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TW107137602A TWI678009B (en) | 2018-06-22 | 2018-10-24 | Display panel and manufacturing method thereof |
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TW107142834A TWI679789B (en) | 2018-06-22 | 2018-11-30 | Organic light emitting diode display apparatus |
TW107142955A TWI684815B (en) | 2018-06-22 | 2018-11-30 | Display panel and method of fabricating the same |
TW107143785A TWI685702B (en) | 2018-06-22 | 2018-12-05 | Display apparatus |
TW107144587A TWI678802B (en) | 2018-06-22 | 2018-12-11 | Display panel and method for manufacturing the same |
TW107144975A TWI679765B (en) | 2018-06-22 | 2018-12-13 | Display device and manufacturing method thereof |
TW107146598A TWI695527B (en) | 2018-06-22 | 2018-12-22 | Display panel |
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TW108102163A TWI696870B (en) | 2018-06-22 | 2019-01-19 | Display device |
TW108102272A TWI683375B (en) | 2018-06-22 | 2019-01-21 | Light emitting device |
TW108103467A TWI690753B (en) | 2018-06-22 | 2019-01-30 | Display panel and its manufacturing method |
TW108104630A TWI694626B (en) | 2018-06-22 | 2019-02-12 | Pixel structure |
TW108104827A TWI683168B (en) | 2018-06-22 | 2019-02-13 | Pixel structure and manufacturing method thereof |
TW108106211A TWI680589B (en) | 2018-06-22 | 2019-02-25 | Light-emitting device and manufacturing method thereof |
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TW108109084A TWI710832B (en) | 2018-06-22 | 2019-03-18 | Quantum dot display panel |
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