TW201920965A - Probe and method for manufacturing the same - Google Patents

Abstract

Provided are a probe and a method for manufacturing the same capable of suppressing outward bulging of a barrel when a plunger and the barrel are joined. A probe of the present invention includes a bar-shaped plunger having a distal end portion 111 and an insertion portion 112, and a barrel 12 having an opening end into which the insertion portion 112 is inserted, wherein the barrel has a plurality of slits 121, the plurality of slits 121 are formed apart from the opening end, at least a pair of joint portions 20 opposed to each other via a space inside the barrel 12 is defined in an area close to any one of the plurality of slits 121, the insertion portion 112 and the joint portion 20 are joined together in the space inside the barrel 12, and the barrel 12 is recessed toward the plunger 11 at the joining portion 20.

Description

Probe and manufacturing method thereof

The present invention relates to a probe for measuring characteristics of a subject.

In order to measure the characteristics of a test object such as a integrated circuit without separating it from the wafer, a probe that contacts the test object is used. The probe has a small diameter plunger that contacts the object to be inspected, and a tube body that is a large diameter cylindrical part into which a part of the plunger is inserted, and uses a structure in which the plunger is inserted into the tube body. (For example, refer to Patent Document 1).

(Prior technical literature) (Patent Literature)

[Patent Document 1] JP 2011-89918

The plunger and the pipe system are joined using spot welding or the like. However, in the case of spot welding (also called spot welding), a problem arises in that the pipe body bulges outward due to pressure. Therefore, in order to prevent the probes from contacting each other, the distance between the probes needs to be enlarged, and there is a problem that the arrangement of the probes is prevented from becoming narrower.

The present invention has been made by the inventor in view of the problems described above, and an object thereof is to provide a probe and a method for manufacturing the probe, which prevent the pipe body from swelling outward when the plunger is joined to the pipe body.

According to an aspect of the present invention, there is provided a probe, comprising: a rod-shaped plunger having a front end portion and an insertion portion; and a tube-shaped pipe body having an open end through which the insertion portion is inserted; and a tube system having A plurality of slits are formed separately from the open end, and at least one pair is defined to be opposite to each other across the interior space of the pipe body in an area close to any of the slits. The joint portion, the insertion portion, and the joint portion are joined in a space inside the pipe body, and the pipe system has a shape in which the joint portion is recessed toward the plunger.

According to another aspect of the present invention, there is provided a method for manufacturing a probe, comprising: a step of inserting an insertion portion of a rod-shaped plunger having a front end portion and an insertion portion from an open end of a tube-shaped pipe body; The pipe system has a plurality of slits formed by being separated from the open end; and in a state where the joint portion of at least one pair of the pipe bodies is pressed against the insertion portion, the pipe body is recessed toward the plunger at the joint portion. In the method of shape, the step of joining the insertion portion and the joint portion, the joint portion of the at least one pair is defined in a region close to any one of the plurality of slits, and is separated by a space inside the pipe body. And opposite.

According to the present invention, it is possible to provide a probe and a method for manufacturing the probe, which can prevent the pipe body from facing outward when the plunger and the pipe body are joined. Swell.

1‧‧‧ Probe

2‧‧‧ Probe Holder

11‧‧‧ plunger

12, 12A‧‧‧ tube body

20, 201, 201a to 201d, 202, 202a to 202d

101, 101a to 101d‧‧‧ First electrode

102, 102a to 102d‧‧‧Second electrode

111‧‧‧ front end

112‧‧‧ Insertion

121‧‧‧ slit

122‧‧‧ Link

D‧‧‧ diameter

L‧‧‧ length

S‧‧‧Width

W‧‧‧ interval

Fig. 1 is a schematic plan view showing the structure of a probe according to an embodiment of the present invention.

Fig. 2 is a schematic cross-sectional view showing the structure of a probe according to an embodiment of the present invention.

Fig. 3 is a schematic diagram showing an example of a probe holding an embodiment of the present invention.

FIG. 4 is a schematic diagram for explaining a method for manufacturing a probe according to an embodiment of the present invention.

Fig. 5 is a schematic cross-sectional view showing a state where a plunger of a probe according to an embodiment of the present invention is joined to a pipe body.

Fig. 6 is a schematic side view showing the structure of a probe according to an embodiment of the present invention.

FIG. 7 is a schematic cross-sectional view for explaining a method of manufacturing a probe of a comparative example.

Fig. 8 is a schematic diagram showing the shape of a probe of a comparative example.

Fig. 9 is a schematic diagram showing the structure of a probe according to a first modification of the embodiment of the present invention.

Fig. 10 is a sectional view taken along the X-X direction in Fig. 9.

Fig. 11 is a schematic view (No. 1) for explaining a method for manufacturing a probe according to a first modification of the embodiment of the present invention.

Fig. 12 is a diagram for explaining a first modification of the embodiment of the present invention; Schematic diagram of the manufacturing method of the probe (second).

Fig. 13 is a schematic diagram showing the structure of a probe according to a second modification of the embodiment of the present invention.

FIG. 14 is a cross-sectional view taken along the XIV-XIV direction of FIG. 13.

Fig. 15 is a schematic side view showing another configuration of a probe according to a second modification of the embodiment of the present invention.

FIG. 16 is a schematic diagram for explaining a method of manufacturing a probe according to a second modification of the embodiment of the present invention.

Fig. 17 is a schematic diagram for explaining another method of manufacturing a probe according to a second modification of the embodiment of the present invention.

Fig. 18 is a schematic diagram showing the structure of a pipe body of a probe according to a third modification of the embodiment of the present invention. Fig. 18 (a) is a diagram showing an example where the joint portion extends along the axial direction of the pipe body. ) Shows an example in which the joint portion extends in a direction perpendicular to the axial direction of the pipe body.

Fig. 19 is a schematic view showing another structure of a pipe body of a probe according to a third modification of the embodiment of the present invention, and Fig. 19 (a) is an example of arranging the slits shown in Fig. 18 (a) Fig. 19 (b) shows an example of arranging the slits shown in Fig. 18 (b).

Fig. 20 is a schematic diagram showing another structure of a pipe body of a probe according to a third modified example of the embodiment of the present invention. Fig. 20 (a) is an example showing an L-shaped slit, and Fig. 20 (b) and Fig. 20 (c) shows an example in which the slit is formed into a "ㄑ" shape.

Fig. 21 is a schematic diagram showing another structure of a pipe body of a probe according to a third modified example of the embodiment of the present invention, and Fig. 21 (a) is a diagram showing Fig. 20 The slit shown in (a) is an example of arrangement, and FIG. 21 (b) shows an example in which the slit shown in FIG. 20 (b) is arranged.

Fig. 22 is a schematic diagram showing the structure of a pipe body of a probe according to a fourth modified example of the embodiment of the present invention. Fig. 22 (a) is an example showing slits as a group, and Fig. 22 (b) is an example of opening. There are several examples of sewing groups.

Fig. 23 is a schematic diagram for explaining a method for manufacturing a probe according to another embodiment of the present invention.

FIG. 24 is a schematic diagram for explaining a method for manufacturing a probe according to another embodiment of the present invention.

Next, an embodiment of the present invention will be described with reference to the drawings. In the description of the following drawings, the same or similar parts are denoted by the same or similar symbols. In addition, if the drawing is schematic, it should be noted that the thickness ratio of each part is different from the real thing. Moreover, the drawings also include portions having different dimensional relationships or ratios from each other. The embodiments shown below are examples of devices and methods for embodying the technical idea of the present invention. The embodiments of the present invention do not specify the materials, shapes, structures, arrangements, etc. of the components described below.

As shown in FIG. 1, the probe 1 according to the embodiment of the present invention includes: a rod-shaped plunger 11 having a front end portion 111 and an insertion portion 112; and a tube-shaped pipe body 12 having a plurality of slits 121. The slits 121 are formed separately from the open ends where the insertion portions 112 are inserted. In the pipe body 12, a region that is easily deformed by an external force because it is close to a slit is defined as a joint portion 201.

As shown in FIG. 2, the joint portion 202 paired with the joint portion 201 is defined on the lower surface of the pipe body 12 while facing the joint portion 201 defined on the upper surface of the pipe body 12 shown in FIG. 1. That is, the tube body 12 defines at least a pair of joint portions facing each other across the tube-shaped internal space. Hereinafter, the joints defined in the pipe body 12 are collectively referred to as "joint 20". As shown in FIG. 2, the insertion portion 112 of the plunger 11 inserted into the inside of the pipe body 12 and the joint portion 20 defined in the pipe body 12 are in a joined state.

The slits 121 shown in FIGS. 1 and 2 are linear shapes extending along the axial direction of the pipe body 12. In addition, the joint portion 20 is defined between two adjacent slits 121. Therefore, when an external force is applied, the joint portion 20 is easily deformed.

The width S of the slit 121 and the interval W between the two slits 121 of the clamp joint portion 20 can be appropriately set in such a manner that the joint portion 20 is easily deformed by external force according to the material and outer diameter of the pipe body 12. For example, when the diameter D of the probe 1 is 105 μm, the width S of the slit 121 is about 5 μm to 70 μm, and the interval W of the slit 121 is about 5 μm to 90 μm. The maximum value of the width S depends on the interval W of the slit 121. In addition, the above dimensions are not circular arc dimensions, but parallel dimensions. The slit length L is about 5 to 700 μm. The distance from the slit 121 to the open end of the pipe body 12 is, for example, about 50 μm.

When the diameter D of the probe 1 is 95 μm, the width S of the slit 121 is about 5 μm to 65 μm, and the interval W of the slit 121 is about 5 μm to 90 μm. When the diameter of the probe 1 is 70 μm, the width S of the slit 121 is about 5 μm to 45 μm, and the interval W of the slit 121 is 5 μm. To about 70 μm. When the diameter of the probe 1 is 60 μm, the width S of the slit 121 is about 5 μm to 40 μm, and the interval W of the slit 121 is about 5 μm to 50 μm. The length L of the slit 121 is about 5 to 700 μm.

As shown in FIG. 1, two ends of the pipe body 12 are respectively provided with open ends, one plunger 11 is inserted at one open end, and the other plunger 11 is inserted at the other open end. The probe 1 is used, for example, when determining the electrical characteristics of a subject. At this time, the front end portion 111 of one of the plungers 11 is in contact with the subject. The front end 111 of the other plunger 11 is in contact with a terminal such as a wiring board, and is electrically connected to a measuring device such as a tester via the wiring board.

Therefore, the plunger 11 and the tube body 12 are made of a conductive material. For example, the plunger 11 is made of Ag, Pd, Cu, or the like, and the tube body 12 is made of Ni, or the like.

As shown in FIG. 1, a spiral notch is formed through the side surface of the pipe body 12 so that a part of the pipe body 12 is spring-shaped. Thereby, the pipe body 12 can expand and contract freely in the axial direction. Therefore, the plunger 11 can be brought into contact with the object under inspection and the wiring board under appropriate pressure. The notch is not formed in a region where the plunger 11 is not disposed inside.

The probe 1 is held by a probe holder 2 as shown in FIG. 3. The number of probes 1 required for the measurement of the subject is arranged through the probe holder 2. The plunger 11 exposed from one surface of the probe holder 2 is in contact with the subject. The plunger 11 exposed from the other surface of the probe holder 2 is electrically connected to the measuring device.

Hereinafter, the joining of the plunger 11 and the tube by spot welding will be described. An example of a method for manufacturing the probe 1 of the body 12.

A plunger 11 and a tube body 12 made of a conductive material are prepared. As described above, at least one pair of joint portions 20 facing each other across the internal space of the pipe body 12 is defined in an area of the pipe body 12 that is easily deformed by an external force due to the approach to the slit 121.

Then, the insertion portion 112 of the plunger 11 is inserted into the tube body 12 from the open end. Next, in a state in which the joint portion 201 and the joint portion 202 of the pipe body 12 are pressed against the insertion portion 112 of the plunger 11, the pipe body 12 is formed in the joint portion 20 into a shape that is recessed toward the plunger 11. The insertion portion 112 is joined to the joining portion 20.

That is, as shown in FIG. 4, the first electrode 101 and the second electrode 102 arranged along the diameter direction of the pipe body 12 are pressurized (pressurized) in the direction of the arrow, and at the same time, a current flows through the pipe body 12 and Between the plungers 11. That is, in a state where the joint portion 201 and the joint portion 202 facing each other across the space inside the tube body 12 are pressed against the plunger 11, a current is passed between the joint portion 201 and the joint portion 202. As a result, resistance heat is generated at the contact surface between the plunger 11 and the tube body 12. Due to this resistance heat, the metal melts and solidifies inside the plunger 11 and the tube body 12 to join the plunger 11 and the tube body 12. In addition, the slit 121 near the joint portion 201 and the slit 121 near the joint portion 202 are arranged in parallel with a virtual line connecting the first electrode 101 and the second electrode 102 in contact with the joint portion 20.

By the above-mentioned welding, as shown in FIG. 5, the inner wall surface of the pipe body 12 is joined to the surface of the plunger 11 at the joint portion 20. Since a pair of engaging portions 20 are defined on the side of the pipe body 12, the insertion portion 20 is inserted into the plunger 11. In a state where the inlet portion 112 is inserted into the inside of the tube body 12, the joint portion 201 and the joint portion 202 face each other with the plunger 11 therebetween.

Since the plunger 11 is joined to the pipe body 12 when the joint portion 20 defined in the easily deformed area is pressed against the insertion portion 112, as shown in FIG. 6, the pipe body 12 is engaged The portion 20 has a shape recessed toward the plunger 11. In addition, FIG. 6 is a side view of the probe 1 with the joint 20 located on the upper and lower surfaces. The deformation due to the pressure is concentrated on the joint 20, and the shape of the pipe body 12 other than the joint 20 The state is maintained before the plunger 11 and the pipe body 12 are joined.

In contrast, FIG. 7 shows a comparative example in which the pipe body 12A and the plunger 11 without the slit 121 are spot-welded. In the comparative example, the plunger 11 and the tube body 12A are pressed by the first electrode 101 and the second electrode 102 in the direction of the arrows and current is simultaneously flowed to thereby join the plunger 11 and the tube body 12A. By pressing at this time, as shown in FIG. 8, the surface of the pipe body 12A bulges due to a change in shape.

When the surface of the probe bulges, in order to prevent the probes from contacting each other, the interval between the probes must be widened. As a result, narrowing of the arrangement of the probes is prevented.

On the other hand, in the probe 1 shown in FIG. 1, an opening 121 is formed on the side surface of the pipe body 12 near the joint portion 20 of the pipe body 12 welded to the plunger 11 at a point. That is, a region that is easily deformed when an external force is applied is defined as the joint portion 20 in the pipe body 12. In this way, by intentionally forming the joint portion 20 in a manner of being recessed at the time of joining, as shown in FIG. 6, a probe 1 having a shape in which the side surface of the pipe body 12 is recessed in the joint portion 20 can be obtained.

As described above, according to the probe 1 according to the embodiment of the present invention, since only a predetermined portion of the tube body 12 is deformed to be recessed inward, the surface of the tube body 12 other than the joint portion 20 is suppressed from swelling outward. That is, the outer diameter of the portion of the joint portion 20 and the outer diameter of the pipe body 12 other than the joint portion 20 do not become larger than before the plunger 11 and the pipe body 12 are joined. Therefore, it is possible to narrow the arrangement of the probes 1.

<First Modification>

In the tube body 12 of the probe 1 according to the first modification shown in FIGS. 9 and 10, a pair of joint portions formed by a pair of joint portions 20 facing each other across the space inside the tube body 12 is a system. A plurality is defined along a circumferential direction perpendicular to the axial direction of the pipe body 12.

As shown in FIG. 10, the joint portion 201 a and the joint portion 202 a defined in the pipe body 12 constitute a joint portion pair. In addition, the joint portion 201b and the joint portion 202b constitute a joint portion pair, the joint portion 201c and the joint portion 202c constitute a joint portion pair, and the joint portion 201d and the joint portion 202d constitute a joint portion pair. Hereinafter, the joint portion 201a, the joint portion 201b, the joint portion 201c, and the joint portion 201d are collectively referred to as a "first joint portion group". The joint 202a, the joint 202b, the joint 202c, and the joint 202d are collectively referred to as a "second joint group".

11 and 12 show examples in which the pipe body 12 and the plunger 11 of the probe 1 of the first modified example are joined by spot welding. First, as shown in FIG. 11, the insertion portion 112 of the plunger 11 is inserted into the inside of the tube body 12 from the open end of the tube body 12 defining a plurality of joint portion pairs.

Next, as shown in Figure 12, make the contact surface arc-shaped The first electrode 101 composed of the plurality of shaped members is in contact with the first bonding portion group. Similarly, the second electrode 102 composed of a plurality of members having a contact surface having an arc shape is brought into contact with the second joint portion group. The protrusions provided on the contact surfaces of the end portions of the respective members of the first electrode 101 and the second electrode 102 are in contact with the joint portion 20. As shown in FIG. 12, the protruding portions of the two members are in contact with each of the joint portions 20, respectively. Then, the tube body 12 is pressurized by the first electrode 101 and the second electrode 102 so that the first bonding portion group and the second bonding portion group are pressed against the plunger 11, and a current is passed through the tube body 12 and Between the plungers 11. Thereby, the plunger 11 and the pipe body 12 are joined. After that, the first electrode 101 and the second electrode 102 are separated from the tube body 12.

According to the above-mentioned joining method, when joining the plunger 11 and the tube body 12, the joining portion 20 included in each of the joining portion pairs is simultaneously pressed against the insertion portion 112. Therefore, the swelling of the tube body 12 can be suppressed at a plurality of locations at the same time. In addition, it is not necessary to cause a current to flow through all the joint pairs to weld the plunger 11 and the tube 12 at a point. That is, the electric current can be caused to flow through only one part of the plurality of joint part pairs, for example, one joint part pair, and the plunger 11 and the pipe body 12 are welded at a point. Alternatively, a plurality of joint portions may be fused to the insertion portion 112 at the same time.

In addition, according to the structure of the pipe body 12 shown in FIG. 12, when the plunger 11 and the pipe body 12 are joined, the steps of aligning the first electrode 101 and the second electrode 102 with the pipe body 12 can be simplified. For example, when a set of the first electrode 101 and the second electrode 102 is used, if the joint pair is a set, the tube body 12 must be rotated in the axial direction as a rotation axis, and the joint 20 and the first electrode 101 and The second electrode 102 is aligned. However, Figure 12 In the tube body 12 shown in the figure, any one of the plurality of joint pairs may be opposed to the first electrode 101 and the second electrode 102, and therefore the step of rotating the tube body 12 may be omitted. Therefore, the manufacturing process of the probe 1 can be shortened.

<Second Modification>

In the pipe body 12 shown in FIG. 13, two slits 121 defining the joint portion 20 therebetween are connected by a connecting portion 122 that divides the joint portion 20.

When the plunger 11 and the pipe body 12 shown in FIG. 13 are welded at a point, the joint portion 20 divided by the connecting portion 122 is pressed against the surface of the plunger 11 and a current is passed through the pipe body 12 and the plunger 11 between. That is, as shown in FIG. 14, two joint portions 20 of the pipe body 12 and the plunger 11 are fused to both sides of the connecting portion 122 at a point.

In the pipe body 12 according to the modification shown in FIG. 13, the joint portion 20 is more easily deformed than the pipe body 12 shown in FIG. 1. Therefore, it is possible to further suppress the joint portion 20 of the pipe body 12 from bulging outward.

In addition, similar to the modification described with reference to FIG. 9, the slit 121 having the shape shown in FIG. 13 can be used, and as shown in FIG. 15, a plurality of joint pairs can be defined along the circumferential direction of the pipe body 12. . At this time, as shown in FIG. 16, the first electrode 101 and the second electrode 102 may be used to press only the joint portion pair of one pair of the tube body 12 against the plunger 11 and perform spot welding. At this time, only one pair of engagement portion pairs are engaged with the plunger 11.

Alternatively, as shown in FIG. 17, the first electrode 101 a, the second electrode 102 a, and the first electrode 101 b and the second electrode 102 b may be used to press the plurality of joint portions of the tube 12 against the plunger 11, respectively. And proceed Spot welding. At this time, the plurality of joint portions are engaged with the plunger 11. According to the joining method shown in FIG. 17, the swelling of the pipe body 12 can be suppressed at a plurality of locations at the same time.

<Third Modification>

In the above description, the example in which the joint portion 20 of the pipe body 12 is sandwiched by the linear slit 121 is shown. However, the shape of the slit 121 for providing the joint portion 20 easily deformed by an external force is not limited to a linear shape.

For example, as shown in FIGS. 18 (a) and 18 (b), a slit 121 having a “ㄇ” shape may be formed in the pipe body 12. That is, the joint portion 20 is defined in a tongue-like region surrounded by the slit 121 on three sides.

The pipe body 12 shown in FIG. 18 (a) is an example in which a tongue-shaped region of the joint portion 20 extends along the axial direction of the pipe body 12. The tube body 12 shown in FIG. 18 (b) is an example in which a tongue-like region extends in a circumferential direction perpendicular to the axial direction of the tube body 12. In addition, Figs. 19 (a) and 19 (b) show a plurality of slits 121 in the shape of "形状" shown in Figs. 18 (a) and 18 (b), respectively, along the pipe body 12. Example of the arrangement in the circumferential direction.

Furthermore, as shown in FIGS. 20 (a) to 20 (c), a slit 121 having a curved portion may be used to define the joint portion 20 in a region close to the curved portion of the slit 121.

In the example shown in Fig. 20 (a), the slit 121 is L-shaped. The L-shaped corner portion is a portion that is easily deformed by an external force. Therefore, as shown in FIG. 20 (a), the joint portion 20 is defined at a corner portion close to the L-shape.

In the example shown in FIG. 20 (b), the slit 121 is The "ㄑ" shape defines the joint 20 at a curved portion close to the "ㄑ". In the example shown in FIG. 20 (c), the slit 121 is formed by arranging two “ㄑ” shapes, and the joint portion 20 is defined in the middle of the “121” slits 121.

21 (a) and 21 (b) show examples of the pipe body 12 in which a plurality of slits 121 having curved portions are formed along the circumferential direction. FIG. 21 (a) is an example in which a plurality of L-shaped slits 121 are arranged in the circumferential direction of the pipe body 12. FIG. 21 (b) is an example in which a plurality of “形状” -shaped slits 121 are arranged in the circumferential direction of the pipe body 12.

<Fourth Modification>

In the pipe body 12 shown in FIG. 22 (a), a plurality of rectangular slits 121 are arranged separately along the axial direction of the pipe body 12. Further, the joint portion 20 is defined in the middle of the arranged slits 121. At this time, it is also possible to suppress the situation where the joint portion 20 is recessed and the tube body 12 is bulged outward when the plunger 11 is joined to the tube body 12. FIG. 22B shows an example in which a plurality of groups of slits 121 arranged along the axial direction are formed along the circumferential direction of the pipe body 12.

22 (a) and 22 (b) show an example where the slit 121 is rectangular. However, the shape of the slit 121 is not limited to a rectangular shape, and may be, for example, an L shape or a “ㄑ” shape.

(Other embodiments)

As described above, the present invention has been described according to the embodiments, but it should be understood that the discussion and drawings constituting a part of these disclosures are not intended to limit the present inventors. Relevant industry players should be able to consider various alternative implementation forms, examples, and application techniques.

For example, the description above shows the case where the cross-sectional shape of the probe 1 is a circular shape, but the cross-sectional shape may be a polygonal shape such as a quadrangle.

Furthermore, even when the plunger 11 and the pipe body 12 are crimped and joined by a joining method other than point welding, the swelling of the pipe body 12 to the outside can be suppressed by applying the present invention.

Furthermore, in the production of the probe 1 of the first modification shown in Figs. 9 and 10, it is also possible to use a 23rd electrode different from the electrode shown in Fig. 12 divided into a plurality of members having protrusions. The integrated arc-shaped first electrode 101 and the second electrode 102 shown in the figure. The joint portion 20 sandwiched by the slit 121 is pressed against the plunger 11 even if the outer periphery of the pipe body 12 is pressed by the first electrode 101 and the second electrode 102 shown in FIG. 23. Alternatively, as shown in FIG. 24, the first electrodes 101a to 101d and the second electrodes 102a to 102d may be performed on each of the joint portions 20 included in the first joint portion group and the second joint portion group. Pressurize while passing current.

As described above, the present invention includes various embodiments and the like not described herein.

Claims (11)

A probe is provided with: a rod-shaped plunger having a front end portion and an insertion portion; and a tube-shaped pipe body having an open end through which the insertion portion is inserted; the tube system having a plurality of slits, and the plurality of The slits are formed separately from the open end, and at least one pair of joints facing each other across the space inside the pipe body are defined in a region close to any one of the plurality of slits. The insertion portion and the joint portion are joined in a space inside the pipe body, and the pipe system has a shape in which the joint portion is recessed toward the plunger. The probe according to item 1 of the scope of patent application, wherein a plurality of joint portion pairs composed of a pair of the joint portions are defined along a circumferential direction perpendicular to the axial direction of the pipe body. The probe according to item 1 or item 2 of the scope of patent application, wherein the slit is a linear shape extending along the axial direction of the pipe body, and the joint is defined in two adjacent slits. between. The probe according to item 3 of the scope of patent application, wherein the two aforementioned slits defining the aforementioned joint portion are connected by a joint portion that divides the aforementioned joint portion. The probe according to item 1 or item 2 of the scope of patent application, wherein the slit is a zigzag shape and is defined in a region surrounded by the slit on three sides. There are the aforementioned joints. The probe according to item 1 or 2 of the scope of patent application, wherein the slit is provided with a curved portion, and the joint portion is defined in a region close to the curved portion. The probe according to item 1 or item 2 of the scope of patent application, wherein the plurality of slits are arranged adjacent to each other along the axial direction of the pipe body, and the joint portion is defined in the plurality of arranged ones. In the middle of the slit. The probe according to item 1 or 2 of the scope of patent application, wherein the two ends of the pipe body are respectively provided with the aforementioned open ends, one of the aforementioned plungers is inserted into one of the aforementioned open ends, and The aforementioned open end is inserted with another aforementioned plunger. A method for manufacturing a probe comprises the steps of inserting a rod-shaped plunger insertion portion having a front end portion and an insertion portion from an open end of a tube-shaped pipe body, and the tube system has a separation from the open end. A plurality of slits formed; and in a state in which the joint portion of at least one pair of the pipe body is pressed against the insertion portion, so that the pipe body has a shape in which the joint portion is recessed toward the plunger, A step of joining the insertion portion and the joint portion, the joint portion of the at least one pair is defined in a region close to any one of the plurality of slits, and is separated by a space inside the tube body Opposite. The method for manufacturing a probe according to item 9 of the scope of the patent application, wherein, in a state of being pressed against the plunger, a current is passed through the points between the joints of the pair to weld the The insertion part is connected with the foregoing The joints are joined. The method for manufacturing a probe according to item 9 or item 10 of the scope of patent application, wherein the insertion part of the plunger is inserted from the open end of the tube body, and the tube body is formed along the A circumferential direction perpendicular to the axial direction of the pipe body defines a plurality of joint portion pairs composed of the joint portions of the pair, and the joint portions respectively included in the plurality of joint portions pairs are simultaneously pressed against the insertion portion. .