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TW201614387A - Light-emitting device used in peripheral exposure apparatus - Google Patents

Light-emitting device used in peripheral exposure apparatus

Info

Publication number
TW201614387A
TW201614387A TW104132035A TW104132035A TW201614387A TW 201614387 A TW201614387 A TW 201614387A TW 104132035 A TW104132035 A TW 104132035A TW 104132035 A TW104132035 A TW 104132035A TW 201614387 A TW201614387 A TW 201614387A
Authority
TW
Taiwan
Prior art keywords
light
emitting device
exposure apparatus
device used
edge portion
Prior art date
Application number
TW104132035A
Other languages
Chinese (zh)
Other versions
TWI596443B (en
Inventor
Katsumi Ashida
Original Assignee
Hoya Candeo Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Candeo Optronics Corp filed Critical Hoya Candeo Optronics Corp
Publication of TW201614387A publication Critical patent/TW201614387A/en
Application granted granted Critical
Publication of TWI596443B publication Critical patent/TWI596443B/en

Links

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Microscoopes, Condenser (AREA)
  • Led Device Packages (AREA)

Abstract

This invention provides a light-emitting device used in a peripheral exposure apparatus having the feature of effectively suppressing graphical corruption. The light-emitting device irradiates the light with rapid increase of irradiation intensity between a circuit pattern formation area and a chip edge portion. In the light-emitting device used in a peripheral exposure apparatus that has a light source of emitted light, irradiates the light to an edge portion of an article to be irradiated, and exposes the edge portion, the light source has a specified light intensity distribution. The light intensity on the edge portion of the article to be irradiated decreases from the inner side to the outer side of the article to be irradiated.
TW104132035A 2014-10-01 2015-09-30 Light-emitting device used in peripheral exposure apparatus TWI596443B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014202704A JP6082721B2 (en) 2014-10-01 2014-10-01 Light irradiation device for peripheral exposure equipment

Publications (2)

Publication Number Publication Date
TW201614387A true TW201614387A (en) 2016-04-16
TWI596443B TWI596443B (en) 2017-08-21

Family

ID=55674405

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104132035A TWI596443B (en) 2014-10-01 2015-09-30 Light-emitting device used in peripheral exposure apparatus

Country Status (4)

Country Link
JP (1) JP6082721B2 (en)
KR (1) KR101985848B1 (en)
CN (1) CN105487340B (en)
TW (1) TWI596443B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107748484A (en) * 2017-11-22 2018-03-02 武汉新芯集成电路制造有限公司 A kind of measuring method of minimum exposure energy
JP7007963B2 (en) * 2018-03-16 2022-01-25 Hoya株式会社 Light irradiation device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2845629B2 (en) * 1991-02-13 1999-01-13 東京エレクトロン株式会社 Exposure method
JPH05217885A (en) * 1992-01-31 1993-08-27 Canon Inc Wafer edge exposure apparatus
JP3707060B2 (en) * 1994-06-29 2005-10-19 株式会社ニコン Illumination optics
JP3947365B2 (en) 2001-04-17 2007-07-18 株式会社Ｓｏｋｕｄｏ Edge exposure device
JP4302373B2 (en) * 2002-07-25 2009-07-22 浜松ホトニクス株式会社 Light guide device
JP2007194583A (en) * 2005-12-21 2007-08-02 Ａｒｋ Ｔｅｃｈ株式会社 Light source device for peripheral exposure
JP2007178778A (en) * 2005-12-28 2007-07-12 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 Light guide and light irradiation apparatus
JP2013122470A (en) * 2010-03-31 2013-06-20 Toray Eng Co Ltd Peripheral exposure device and peripheral exposure method
JP5495334B2 (en) * 2011-09-22 2014-05-21 Ｎｅｃエンジニアリング株式会社 Optical recording head and image forming apparatus

Also Published As

Publication number Publication date
KR20160039545A (en) 2016-04-11
KR101985848B1 (en) 2019-09-03
TWI596443B (en) 2017-08-21
JP2016072543A (en) 2016-05-09
JP6082721B2 (en) 2017-02-15
CN105487340A (en) 2016-04-13
CN105487340B (en) 2018-03-23

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees