TW201518665A - Heating and pressurizing treatment oven for manufacturing electronic devices - Google Patents

Abstract

This invention relates to a heating and pressurizing treatment oven for manufacturing electronic devices. The heating and pressurizing treatment oven includes: a chamber having inner walls configured to form an accommodating space; at least one heating device provided in the accommodating space, and configured to modulate the temperature in the accommodating space to a predetermined temperature; a pressurizing device configured to modulate the pressure in the accommodating space to a predetermined pressure which is more than 1 atm; at least one thermal insulation liner including an outer layer and an inner layer, wherein the outer layer is provided on the inner walls of the chamber, and the inner layer is provided toward the interior of the accommodating space with respect to the outer layer, to form an enclosed thermal insulation space between the outer layer and the inner layer, and wherein the gap between the outer layer and the inner layer is more than 1 [mu]m; and a fan provided in the accommodating space, and connected to a driving motor via a transmission shaft extending out of the chamber.

Description

Heating and pressure treatment furnace for manufacturing electronic components

The present invention relates to a heating and pressurizing furnace for manufacturing electronic components.

A processing furnace having a heating and pressurizing function is often used in the process of manufacturing electronic components. The chamber of the furnace is generally made of stainless steel. For safety reasons (eg, explosion proof), the thickness of the chamber of the furnace must conform to the thickness range specified by law, so the thickness tends to be thicker than the thickness of a furnace that generally does not have a heating and pressurizing function. In the case of such a thickness, during the temperature rise of the treatment furnace, most of the supplied heat may be absorbed by the cavity of the treatment furnace until the heat absorption of the cavity of the treatment furnace reaches equilibrium, and the subsequent heat is supplied. The inside of the cavity is heated, thus causing the heating rate of the processing furnace to be slowed down; conversely, during the cooling of the processing furnace, the cavity of the processing furnace is continuously exothermic until the heat release of the cavity of the processing furnace reaches equilibrium. The inside of the chamber is cooled, which results in a slower rate of cooling of the furnace. Therefore, there is a need for a heating and pressurizing furnace for manufacturing electronic components that can increase the rate of temperature rise and fall without changing the thickness of the cavity.

In order to solve the above problems, according to an embodiment of the present invention, a heating and pressure treatment furnace for manufacturing an electronic component is provided, comprising: a cavity having an inner wall for forming an accommodation space; and at least one heating device Provided in the accommodating space, and used to modulate the temperature in the accommodating space to a predetermined temperature; a pressing device for adjusting the pressure in the accommodating space to be greater than 1 a predetermined pressure of atm (at atmospheric pressure); at least one thermal insulation liner comprising an outer layer and an inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is opposite to the outer layer And disposed inside the accommodating space to form an enclosed thermal insulation space between the outer layer and the inner layer, and wherein a distance between the outer layer and the inner layer is greater than 1 μm, The thickness of the inner layer is smaller than the thickness of the cavity portion corresponding to the thermal insulation lining, and the thermal insulation lining is provided with at least two through holes for communicating the enclosed thermal insulation space with the accommodating space. So that the pressure in the enclosed heat insulating space is substantially the same as the pressure in the accommodating space, thereby preventing deformation of the heat insulating lining layer when the pressure in the accommodating space is changed; and a fan disposed at the The accommodating space is connected to a driving motor via a transmission shaft protruding from the cavity, and the fan is driven to rotate by the driving motor to promote the temperature modulation efficiency of the heating device to the accommodating space.

According to another embodiment of the present invention, there is provided a heating and pressure processing furnace for manufacturing an electronic component, comprising: a cavity having an inner wall for forming an accommodating space; at least one heating device disposed at the The accommodating space is configured to modulate the temperature in the accommodating space to a predetermined temperature; the at least one thermal insulation lining comprises an outer layer and an inner layer, wherein the outer layer is disposed in the cavity a wall, and the inner layer is disposed inside the accommodating space with respect to the outer layer to form a closed insulating space between the outer layer and the inner layer, and wherein the outer layer and the inner layer are The spacing is greater than 1 μm, the thickness of the inner layer is less than the thickness of the cavity portion corresponding to the thermal insulation lining, the thermal insulation lining is provided with at least one first through hole; Adjusting the pressure in the accommodating space to a predetermined pressure greater than 1 atm, and passing through the at least one first through hole of the thermal insulation lining, enclosing the thermal insulation lining in the insulated space The pressure is adjusted to be substantially the same as the pressure in the accommodating space a pressure for preventing deformation of the thermal insulation lining when the pressure in the accommodating space is changed; and a fan disposed in the accommodating space and connected to the one via a transmission shaft protruding from the cavity The driving motor drives the fan to rotate through the driving motor to promote the temperature modulation efficiency of the heating device to the accommodating space.

According to still another embodiment of the present invention, there is provided a heating and pressure treatment furnace for manufacturing an electronic component, comprising: a cavity having an inner wall for forming an accommodation space; at least one heating device disposed at The accommodating space is configured to modulate the temperature in the accommodating space to a predetermined temperature; a first pressing device for adjusting the pressure in the accommodating space to be greater than 1 atm a predetermined pressure; at least one thermal insulation lining comprising an outer layer and an inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is opposite to the outer space of the accommodating space Providing a closed insulating space between the outer layer and the inner layer, and wherein a spacing between the outer layer and the inner layer is greater than 1 μm, the inner layer having a thickness less than the thermal insulation liner Corresponding to the thickness of the cavity portion, the thermal insulation lining is provided with at least one first through hole; and a second pressing device transmits the pressure in the enclosed thermal insulation space through the at least one first through hole Modulating to a pressure substantially the same as the pressure in the accommodating space, thereby preventing the thermal insulation lining from being deformed when the pressure in the accommodating space is changed; and a fan disposed in the accommodating space, and Connected to a drive motor via a drive shaft protruding from the cavity, the fan is driven to rotate by the drive motor to promote temperature modulation efficiency of the heating device to the accommodating space.

Other embodiments and advantages of the present invention will become more apparent from the detailed description of the accompanying drawings. In addition, elements and principles that are well known will not be described in the present specification in order to avoid obscuring the present invention.

In the accompanying drawings, the same elements are denoted by the same reference numerals.

1‧‧‧heating and pressure treatment furnace

1a‧‧‧ inner wall

3‧‧‧

5‧‧‧

7‧‧‧ accommodating space

9‧‧‧Insulation lining

9'‧‧‧Insulation lining

11‧‧‧ heating device

13‧‧‧Pressure device

15‧‧‧fan

17‧‧‧Drive shaft

19‧‧‧Drive motor

20‧‧‧ openings

21‧‧‧ openings

22‧‧‧ openings

23‧‧‧Control valve

25‧‧‧Particle detector

27‧‧‧First pressurizing device

29‧‧‧Second pressurizing device

31‧‧‧Parts

91‧‧‧ Middle insulation lining

91a‧‧‧ outer layer

91b‧‧‧ inner layer

91c‧‧‧through hole

91'‧‧‧ Middle insulation lining

92‧‧‧ Front insulation lining

92a‧‧‧ outer layer

92b‧‧‧ inner layer

92'‧‧‧ front insulation lining

93‧‧‧After thermal insulation lining

93a‧‧‧ outer layer

93b‧‧‧ inner layer

93c‧‧‧ openings

93'‧‧‧After thermal insulation lining

94‧‧‧First through hole

95‧‧‧Second through hole

100‧‧‧heating and pressure treatment furnace

200‧‧‧heating and pressure treatment furnace

G1‧‧‧ spacing

G2‧‧‧ spacing

G3‧‧‧ spacing

S1‧‧‧Enclosed insulation space

S2‧‧‧Enclosed insulation space

S3‧‧‧Enclosed insulation space

1 is a perspective view showing a heating and pressure treatment furnace for manufacturing an electronic component according to an embodiment of the present invention; FIG. 2 is a front view of the heating and pressure treatment furnace of FIG. 1; A cross-sectional view of the AA line; FIG. 4 is a simplified view of the cross section of FIG. 3, illustrating the position of each of the thermal insulation linings; FIG. 5 is an exploded perspective view of the thermal insulation lining of FIG. 4; 4 is an enlarged view of the range B; FIG. 7 shows an enlarged view of the range C of FIG. 4; FIG. 8 shows an enlarged view of the range D of FIG. 4; FIG. 9A shows a front view of the intermediate insulating liner of FIG. 5; An enlarged view of a range E of FIG. 9A is shown; FIG. 10 is a cross-sectional view showing a heating and pressurizing furnace for manufacturing an electronic component according to another embodiment of the present invention; and FIG. 11 is a view showing still another embodiment of the present invention. For example, heating and adding of electronic components Cross-sectional view of the pressure treating furnace; Fig. 12 shows an enlarged view of the range B of Fig. 4 including the partition; Fig. 13 shows an enlarged view of the range C of Fig. 4 including the partition; and Fig. 14 shows Fig. 4 including the partition An enlarged view of the range D.

1 shows a perspective view of a heating and pressurizing furnace 1 for manufacturing electronic components, FIG. 2 shows a front view of the heating and pressurizing furnace 1 of FIG. 1, and FIG. 3 shows along the front view of FIG. Figure 2 is a cross-sectional view taken along line AA. As shown in FIGS. 1-3, the heating and pressurizing furnace 1 includes a barrel 3 and a door 5. The door 5 can be opened and closed in a movable manner. The door 5 and the barrel 3 can form a cavity having an inner wall 1a for forming the accommodating space 7. In addition, the heating and pressure treatment furnace 1 may include: a heating device 11 disposed in the accommodating space 7 and configured to modulate the temperature in the accommodating space 7 to a predetermined temperature; and a pressurizing device 13 for The pressure in the accommodating space 7 is adjusted to a predetermined pressure greater than 1 atm; and the fan 15 is disposed in the accommodating space 7 and connected to the driving motor 19 via the transmission shaft 17 protruding from the cavity, through The drive motor 19 drives the fan 15 to rotate to promote the temperature modulation efficiency of the heating device 11 with respect to the accommodating space 7. The barrel 3 and the door 5 may be made of, for example, a material such as stainless steel.

In an embodiment of the invention, the barrel 3 may have, for example, a cylindrical shape, but the invention is not limited thereto. Further, although three heating devices 11 are shown in FIG. 3, the heating and pressure treatment furnace 1 may include only one or two heating devices 11 or three or more heating devices 11 (for example, four or five). The arrangement of the heating means 11 and the arrangement of the heating means 11 are not limited to the arrangement shown in FIG. 3, as long as the heating means 11 can uniformly modulate the temperature in the accommodating space 7. In an embodiment of the invention, the heating device 11 may for example be a heater, and the pressing device 13 may for example be a pressurized pump.

The heating and pressurizing treatment furnace 1 may comprise a thermal insulation lining 9. For purposes of illustration, the thermal insulation liner 9 is shown in the drawings of the present invention to include a front insulation liner 92, a mid-section insulation liner 91, and a rear insulation liner 93, although the invention is not limited thereto. That is, although the heat insulating lining 9 is shown in the drawings of the present invention to include three sections (i.e., the front section insulating lining 92, the middle section insulating lining 91, and the rear section insulating lining 93), the actual The upper thermal insulation lining 9 may comprise only 1 or 2 sections or 3 The above sections (for example, 4, 5, 6 sections, etc.).

Figure 4 shows a simplified view of the cross section of Figure 3, illustrating the position of the front insulating liner 92, the mid-span insulating liner 91, and the rear insulating liner 93; Figure 5 shows the insulating liner of Figure 4. Fig. 6 shows an enlarged view of the range B of Fig. 4; Fig. 7 shows an enlarged view of the range C of Fig. 4; and Fig. 8 shows an enlarged view of the range D of Fig. 4.

In an embodiment of the present invention, the front heat insulation liner 92, the middle heat insulation liner 91, and the rear heat insulation liner 93 may be independent of each other, or may be in communication with each other, or may be combined (ie, partially independent). , partially connected).

For example, in the embodiment illustrated in FIG. 5, the mid-section insulating liner 91 may have a cylindrical shape that may be integrally formed or multi-segmented; and the rear insulating liner 93 may have one or more openings 93c. .

The thermal insulation lining 9 may include an outer layer and an inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is disposed inside the accommodating space relative to the outer layer to form between the outer layer and the inner layer. An enclosed thermal insulation space, and the spacing between the outer layer and the inner layer may be greater than 1 μm, and the thickness of the inner layer may be less than the thickness of the cavity portion corresponding to the thermal insulation lining. Specifically, as shown in FIG. 6, the front insulating liner 92 may include an outer layer 92a and an inner layer 92b, wherein the outer layer 92a is disposed on the inner wall 1a of the cavity, and the inner layer 92b is opposed to the outer layer 92a. The accommodating space 7 is internally disposed to form a closed insulating space S2 between the outer layer 92a and the inner layer 92b, and the spacing G2 between the outer layer 92a and the inner layer 92b may be greater than 1 μm, and the inner layer 92b may be smaller than the door. 5 (ie, the cavity portion corresponding to the front insulating liner 92); as shown in FIG. 7, the middle insulating liner 91 may include an outer layer 91a and an inner layer 91b, wherein the outer layer 91a is disposed in the cavity The inner wall 1a and the inner layer 91b are disposed inside the accommodating space 7 with respect to the outer layer 91a to form a closed heat insulating space S1 between the outer layer 91a and the inner layer 91b, and the outer layer 91a and the inner layer 91b The spacing G1 may be greater than 1 μm, and the thickness of the inner layer 91b may be less than the thickness of the barrel 3 (ie, the portion of the cavity corresponding to the middle insulating liner 91); and as shown in FIG. The layer 93 may comprise an outer layer 93a and an inner layer 93b, wherein the outer layer 93a is disposed on the inner wall 1a of the cavity, and the inner layer 93b is opposite to the outer layer 9 3a is disposed inside the accommodating space 7 to form a closed heat insulating space S3 between the outer layer 93a and the inner layer 93b, and a gap G3 between the outer layer 93a and the inner layer 93b may be greater than 1 μm, and the thickness of the inner layer 93b Can be smaller than the barrel 3 (ie, with the rear section insulation lining The thickness of the corresponding portion of the layer 93). In an embodiment of the invention, the distances of the spacings G1, G2, G3 may be equal or unequal, and the volumes of the enclosed insulated spaces S1, S2, S3 may be equal or unequal. In an embodiment of the invention, the thermal insulation lining 9 can be made, for example, of metal, that is, the front thermal insulation lining 92, the middle thermal insulation lining 91, and the rear thermal insulation lining 93 can be made, for example, of metal. to make. In an example, the metal can be, for example, stainless steel.

Furthermore, in the embodiment shown in Figure 8, the barrel 3 can have openings 20, 21, 22, and these openings 20, 21, 22 can correspond to the openings 93c of the rear insulating liner 93, respectively. For example, referring to FIG. 3 and FIG. 8 , the pressing device 13 can pressurize the accommodating space 7 through the opening 20 and the opening 93 c of the thermal insulating lining 93 corresponding to the opening 20; The drive shaft 17 passes through the opening 22 and the opening 93c of the heat insulating lining 93 corresponding to the opening 22, and connects the fan 15 to the drive motor 19; the rear lining can be provided via the opening 21 and the opening 21 corresponding to the opening 21 The opening 93c of the 93 discharges the gas in the accommodating space 7 to the heating and pressure treatment furnace 1. In other embodiments of the invention, the front insulating liner 92 and/or the mid-span insulating liner 91 may also be provided with openings similar to the opening 93c of the rear insulating liner 93.

The heat insulation lining 9 may be provided with at least two through holes for communicating the enclosed heat insulating space with the accommodating space, so that the pressure in the enclosed heat insulating space is substantially the same as the pressure in the accommodating space. The heat insulating lining 9 is prevented from being deformed when the pressure in the accommodating space is changed. Figure 9A shows a front view of the mid-span insulation liner 91 of Figure 5; and Figure 9B shows an enlarged view of the range E of Figure 9A. As shown in FIGS. 3, 9A and 9B, the middle insulating lining 91 is provided with at least two through holes 91c for communicating the enclosed heat insulating space with the accommodating space so as to enclose the pressure in the heat insulating space. The pressure in the accommodating space is substantially the same as the pressure in the accommodating space, thereby preventing deformation of the middle insulating lining 91 when the pressure in the accommodating space is changed. In an embodiment of the invention, the through hole 91c may be, for example, a bore, a slit, or a structural feature to communicate the two regions. In addition, in other embodiments of the present invention, the front insulating lining 92 and the rear insulating lining 93 may also be respectively provided with through holes similar to the through holes 91c of the middle insulating lining 91 to insulate the front section. The pressure in the enclosed insulating space of the lining layer 92 and the pressure in the enclosed insulating space of the rear insulating lining 93 may be substantially the same as the pressure in the accommodating space, thereby preventing the front insulating lining 92 and the rear section from being separated. The thermal lining 93 is deformed when the pressure in the accommodating space is changed. As can be seen from the above, since the enclosed heat insulating space of the heat insulating lining 9 can communicate with the accommodating space 7 through the at least two through holes 91c, the gas in the accommodating space 7 can flow into the partition. The heat lining 9 is enclosed in an insulated space.

Figure 10 is a cross-sectional view showing a heating and pressurizing furnace 100 for manufacturing electronic components in accordance with another embodiment of the present invention. The heating and pressure treatment furnace 100 of Fig. 10 is similar to the heating and pressure treatment furnace 1 of Fig. 3. Similarly, for purposes of illustration, the thermal insulation liner 9' of the heating and pressurizing treatment furnace 100 is shown in FIG. 10 to include a front insulation liner 92', a mid-section insulation liner 91', and a rear insulation liner. Layer 93', but the invention is not limited thereto, that is, although in the drawings of the present invention, the thermal insulation lining 9' is shown to comprise three sections (i.e., the front section of the thermal insulation lining 92', the middle section of the thermal insulation lining Layer 91', and rear insulating lining 93'), but in practice the insulating lining 9' may comprise only one or two sections or more than three sections (eg 4, 5, 6 Sections, etc.).

The thermal insulation lining 9' may be provided with at least one first through hole 94; in the embodiment shown in Fig. 10, the first through hole 94 is disposed in the middle thermal insulation lining 91', however, in the other aspect of the invention In an embodiment, the first through hole 94 may be disposed in the front insulating liner 92' or the rear insulating liner 93'. As described above, the thermal insulation lining 9' may include an outer layer and an inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is disposed inside the accommodating space relative to the outer layer to A closed insulating space is formed between the inner layers, and the spacing between the outer layer and the inner layer may be greater than 1 μm. Specifically, as in the embodiment shown in FIGS. 6-8, the previous section of the thermal insulation lining 92', the middle thermal insulation lining 91', and the rear thermal insulation lining 93' may also each comprise an outer layer. And an inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is disposed inside the accommodating space relative to the outer layer to form a closed insulating space between the outer layer and the inner layer, and the outer layer is The spacing between the inner layers may be greater than 1 μm and the thickness of the inner layer may be less than the thickness of the cavity portion corresponding to the thermal insulation liner.

For the purpose of illustration and brevity, the heating device 11, the fan 15, the drive shaft 17, and the drive motor 19 are not depicted in FIG. 10, but it will be understood that the heating and pressurizing furnace 100 of FIG. 10 may include the above-described components. .

In the embodiment of the present invention, the front heat insulation liner 92', the middle heat insulation liner 91', and the rear heat insulation liner 93' may be independent of each other, or may be connected to each other, or may be combined (ie, , partially independent, partially connected). The mid-section thermal insulation lining 91' may have a cylindrical shape, which may be integrally formed or multi-segmented. In an embodiment of the invention, the thermal insulation lining 9' may be made, for example, of metal, ie the front insulation liner 92', the mid-span insulation 91', and the rear insulation liner 93' may for example Made of metal. In an example, the metal can be, for example, stainless steel.

As can be seen from FIG. 10, the pressing device 13 can pass through the first through hole 94 to adjust the pressure in the enclosed heat insulating space of the middle insulating liner 91' to be substantially the same as the pressure in the accommodating space 7. The pressure is applied to prevent deformation of the middle insulating liner 91' when the pressure in the accommodating space 7 is changed. In this embodiment, the pressurizing device 13 can modulate the pressure in the accommodating space 7 and the pressure in the enclosed heat insulating space of the middle insulating lining 91' to the predetermined pressure substantially simultaneously through the control valve 23. In the embodiment shown in FIG. 10, the front heat insulating lining 92', the middle heat insulating lining 91', and the rear heat insulating lining 93' may be in communication with each other, so that the pressing device 13 is disposed through the middle portion of the heat insulating layer. The first through hole 94 of the lining 91' can adjust the pressure in the enclosed heat insulating space of the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93' to The pressure is substantially the same as the pressure in the accommodating space 7.

In another embodiment of the present invention, the front heat insulating lining 92', the middle heat insulating lining 91', and the rear heat insulating lining 93' are all provided with a first through hole 94, and the pressing device 13 can transmit respectively The first through hole 94 is disposed in the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93', and the front insulating lining 92' is controlled by an individual control valve. The pressure in the enclosed heat insulating space of each of the middle insulating lining 91' and the rear insulating lining 93' is respectively adjusted to a pressure substantially equal to the pressure in the accommodating space 7, thereby preventing the front section from being separated. The thermal lining 92', the middle insulating lining 91', and the rear insulating lining 93' are deformed when the pressure in the accommodating space 7 is changed; and the pressure in the accommodating space 7 and the front insulating lining The pressure in the enclosed insulating space of the 92', the middle insulating lining 91', and the rear insulating lining 93' is substantially simultaneously modulated to a predetermined pressure.

The heat insulation lining 9' is provided with at least one second through hole 95, wherein the at least one second through hole 95 is passed through to communicate the enclosed heat insulating space with the outside of the cavity; in the embodiment shown in FIG. The two through holes 95 are disposed in the middle insulating lining 91'. However, in other embodiments of the present invention, the second through holes 95 may be disposed in the front insulating lining 92' or the rear insulating lining 93'.

In an embodiment of the invention, in the enclosed insulating space of the insulating linings 9 and 9', that is, in the front insulating linings 92 and 92', the middle insulating linings 91 and 91', and In the enclosed heat insulating space of the rear insulating lining layers 93 and 93', a substance (which may be referred to as "filling material") having a thermal conductivity lower than 16 W/mK is filled. In one embodiment of the invention, the substance can be a gas such as air or nitrogen. Moreover, in other embodiments of the invention, the substance can be carbon, glass, or water.

In an embodiment of the present invention, the heating and pressure treatment furnace may further include a particle detector 25 connectable to the at least one second through hole 95 to detect the enclosure of the discharge insulation liner 9'. The content of particles in the thermal space (ie, the front insulating lining 92', the middle insulating lining 91', and the enclosed insulating space of the rear insulating lining 93', for example, detecting the carbon, glass, or water The filling material discharges the amount of the enclosed heat insulating space, thereby judging whether it is necessary to supplement or replace the filling material in the enclosed heat insulating space.

Figure 11 is a cross-sectional view showing a heating and pressurizing furnace 200 for manufacturing electronic components in accordance with still another embodiment of the present invention. The heating and pressurizing furnace 200 of Fig. 11 is similar to the heating and pressurizing furnace 100 of Fig. 10. Moreover, for the purpose of illustration and brevity, the heating device 11, the fan 15, the drive shaft 17, and the drive motor 19 are not depicted in FIG. 11, but it is understood that the heating and pressurizing furnace 200 of FIG. 11 may include the above-described And other components.

As shown in FIG. 11, the heating and pressurizing treatment furnace 200 may include a first pressurizing device 27 and a second pressurizing device 29. The first pressing device 27 can be used to modulate the pressure in the accommodating space 7 to a predetermined pressure greater than 1 atm. In an embodiment of the invention, the first pressurizing device 27 and the second pressurizing device 29 may, for example, be pressurized pumps. The second pressing device 29 can pass through the first through hole 94 to change the pressure in the enclosed heat insulating space of the middle insulating layer 91' to substantially the same pressure as the pressure in the accommodating space 7, thereby preventing the middle portion. The heat insulating lining 91' is deformed when the pressure in the accommodating space 7 is changed.

In the embodiment shown in FIG. 11, the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93' may be in communication with each other, so that the second pressing device 29 is disposed in the middle The first through hole 94 of the heat insulating lining 91' can adjust the pressure in the enclosed heat insulating space of the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93'. It is changed to a pressure substantially the same as the pressure in the accommodating space 7.

In another embodiment of the present invention, the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93' are all provided with a first through hole 94, and the second pressing device 29 is The front insulating lining 92' and the middle insulating lining 91 are provided through the first through holes 94 respectively disposed in the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93'. ', and the pressure in the enclosed insulating space of each of the rear insulating linings 93' is respectively adjusted to a pressure substantially the same as the pressure in the accommodating space 7, thereby preventing the front insulating lining 92', the middle section The heat insulating lining 91' and the rear insulating lining 93' are deformed when the pressure in the accommodating space 7 is changed. First pressing device 27 and second pressing device 29 The operation is performed such that the pressure in the accommodating space 7 and the pressure in the enclosed heat insulating space are substantially simultaneously adjusted to a predetermined pressure. Moreover, in another embodiment of the present invention, the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93' are permeable to each other through the respective first through holes 94. Pressing device (such as a pressurized pump) is connected; and is permeable to the first pressing device 27 and to the front insulating liner 92', the middle insulating liner 91', and the rear insulating liner 93'. Corresponding pressing device, the pressure in the accommodating space 7 is in the enclosed heat insulating space of each of the front insulating lining 92', the middle insulating lining 91', and the rear insulating lining 93' The pressure is substantially simultaneously modulated to a predetermined pressure.

In accordance with an embodiment of the present invention, the heating and pressurizing treatment furnace may further comprise at least one separator that may be used to divide the enclosed insulating space of the insulating liner into a plurality of regions. For example, taking the thermal insulation lining 9 of FIG. 4 as an example, FIG. 12 shows an enlarged view of the range B of FIG. 4 including the partitioning member 31, wherein the partitioning member 31 thermally insulates the front insulating lining 92. The space S2 is divided into a plurality of regions; FIG. 13 shows an enlarged view of the range C of FIG. 4 including the partition member 31, wherein the partition member 31 divides the enclosed heat insulating space S1 of the middle insulating layer 91 into a plurality of regions; 14 shows an enlarged view of the range D of FIG. 4 including the partition member 31, wherein the partition member 31 divides the enclosed heat insulating space S3 of the rear stage insulating lining 93 into a plurality of regions. Although only one partition member 31 is shown in Figs. 12-14, the heat and pressure treatment furnace of the present invention may actually include more than one partition member 31. In addition, although not shown in the drawings, the partition member 31 may also be applied to the heat insulating lining 9' shown in FIGS. 10-11 to separate the enclosed heat insulating space of the heat insulating lining 9' into plural numbers. In the region, for example, the partition insulating space of at least one of the front insulating liner 92', the middle insulating liner 91', and the rear insulating liner 93' may be partitioned into a plurality of regions by means of a spacer 31. In an embodiment of the invention, the spacer 31 may be made, for example, of metal. In an example, the metal can be, for example, stainless steel.

While the invention has been described herein with reference to the preferred embodiments of the embodiments of the invention Modifications, variations, and equivalent substitutions are still within the scope of the invention.

1‧‧‧heating and pressure treatment furnace

1a‧‧‧ inner wall

3‧‧‧

5‧‧‧

7‧‧‧ accommodating space

9‧‧‧Insulation lining

11‧‧‧ heating device

13‧‧‧Pressure device

15‧‧‧fan

17‧‧‧Drive shaft

19‧‧‧Drive motor

91‧‧‧ Middle insulation lining

92‧‧‧ Front insulation lining

93‧‧‧After thermal insulation lining

Claims (15)

A heating and pressure processing furnace for manufacturing an electronic component, comprising: a cavity having an inner wall for forming an accommodating space; at least one heating device disposed in the accommodating space, and configured to The temperature in the accommodating space is adjusted to a predetermined temperature; a pressing device is used to modulate the pressure in the accommodating space to a predetermined pressure greater than 1 atm; at least one insulating lining includes an outer layer and An inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is disposed inside the accommodating space relative to the outer layer to form a circumference between the outer layer and the inner layer An enclosed thermal insulation space, wherein a spacing between the outer layer and the inner layer is greater than 1 μm, the inner layer having a thickness less than a thickness of the cavity portion corresponding to the thermal insulation lining The heat insulation lining is provided with at least two through holes for communicating the enclosed heat insulating space with the accommodating space, so that the pressure in the enclosed heat insulating space is substantially the same as the pressure in the accommodating space. In order to prevent the thermal insulation lining from being placed in the space Deformation occurs when the pressure is changed; and a fan is disposed in the accommodating space, and is connected to a driving motor via a driving shaft protruding from the cavity, and the fan is driven to rotate by the driving motor to promote The heating device adjusts the temperature of the accommodating space. A heating and pressure processing furnace for manufacturing an electronic component, comprising: a cavity having an inner wall for forming an accommodating space; at least one heating device disposed in the accommodating space, and configured to The temperature in the accommodating space is modulated to a predetermined temperature; the at least one insulating lining comprises an outer layer and an inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is opposite to the inner layer The outer layer is disposed inside the accommodating space to form an enclosed thermal insulation space between the outer layer and the inner layer, and wherein a spacing between the outer layer and the inner layer is greater than 1 Μm, the inner layer has a thickness smaller than a thickness of the cavity portion corresponding to the thermal insulation lining, the thermal insulation lining is provided with at least one first through hole; and a pressing device is used for the accommodating The pressure in the space is modulated to a predetermined pressure greater than 1 atm And modulating the pressure in the enclosed insulating space of the thermal insulation liner to a pressure substantially equal to the pressure in the accommodating space through the at least one first through hole of the thermal insulation lining And preventing the thermal insulation lining from being deformed when the pressure in the accommodating space is changed; and a fan disposed in the accommodating space and connected to the driving device via a transmission shaft protruding from the cavity The motor drives the fan to rotate through the drive motor to promote temperature modulation efficiency of the heating device in the accommodating space. A heating and pressure processing furnace for manufacturing an electronic component, comprising: a cavity having an inner wall for forming an accommodating space; at least one heating device disposed in the accommodating space, and configured to The temperature in the accommodating space is adjusted to a predetermined temperature; a first pressing device is used to adjust the pressure in the accommodating space to a predetermined pressure greater than 1 atm; at least one thermal insulation lining includes a An outer layer and an inner layer, wherein the outer layer is disposed on the inner wall of the cavity, and the inner layer is disposed inside the receiving space relative to the outer layer to form between the outer layer and the inner layer An enclosed thermal insulation space, wherein a spacing between the outer layer and the inner layer is greater than 1 μm, the inner layer having a thickness less than the portion of the cavity corresponding to the thermal insulation lining The thickness of the insulating lining is provided with at least one first through hole; a second pressing device transmits the pressure in the enclosed insulating space to the accommodating through the at least one first through hole The pressure in the space is essentially the same pressure, to prevent The heat insulation lining is deformed when the pressure in the accommodating space is changed; and a fan is disposed in the accommodating space and connected to a driving motor via a transmission shaft protruding from the cavity The drive motor drives the fan to rotate to promote temperature modulation efficiency of the heating device to the accommodating space. The heating and pressure treatment furnace for manufacturing an electronic component according to claim 2, wherein the pressing device is configured to make a pressure in the accommodating space and a pressure in the enclosed heat insulating space substantially The operation is performed by simultaneously adjusting to the predetermined pressure. The heating and pressure treatment furnace for manufacturing an electronic component according to claim 3, wherein the first pressing device and the second pressing device are configured to cause a pressure in the accommodating space and the The operation is performed in such a manner that the pressure in the enclosed heat insulating space is substantially simultaneously modulated to the predetermined pressure. The heating and pressure treatment furnace for manufacturing an electronic component according to claim 2, wherein the thermal insulation lining is provided with at least one second through hole, wherein the at least one second through hole is passed through The enclosed insulated space is in communication with the exterior of the cavity. A heating and pressure treatment furnace for manufacturing an electronic component according to claim 3, wherein the thermal insulation lining is provided with at least one second through hole through which the at least one second through hole is passed The enclosed insulated space is in communication with the exterior of the cavity. The heating and pressure processing furnace for manufacturing an electronic component according to claim 6, further comprising: a particle detector connected to the at least one second through hole. The heating and pressure treatment furnace for manufacturing an electronic component according to claim 7, further comprising: a particle detector connected to the at least one second through hole. The heating and pressure treatment furnace for manufacturing an electronic component according to any one of claims 1 to 9, wherein the enclosed heat insulating space is filled with a thermal conductivity of less than 16 W/mK. a substance. A heating and pressure treatment furnace for manufacturing an electronic component according to claim 10, wherein the substance is a gas. A heating and pressure treatment furnace for manufacturing an electronic component according to claim 11, wherein the gas is air or nitrogen. A heating and pressure treatment furnace for manufacturing an electronic component according to claim 10, wherein the substance is carbon, glass, or water. A heating and pressure treatment furnace for manufacturing an electronic component according to any one of claims 1 to 3, wherein the thermal insulation lining is made of metal. The heating and pressure treatment furnace for manufacturing an electronic component according to any one of claims 1 to 3, further comprising: at least one partition member for dividing the enclosed heat insulating space into a plurality of regions . A heating and pressure treatment furnace for manufacturing an electronic component according to claim 15, wherein the separator is made of metal.