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TW201022169A - Devices for vertical treatment of glass - Google Patents

Devices for vertical treatment of glass Download PDF

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Publication number
TW201022169A
TW201022169A TW098125452A TW98125452A TW201022169A TW 201022169 A TW201022169 A TW 201022169A TW 098125452 A TW098125452 A TW 098125452A TW 98125452 A TW98125452 A TW 98125452A TW 201022169 A TW201022169 A TW 201022169A
Authority
TW
Taiwan
Prior art keywords
glass
frit
glass sheet
area
sealing
Prior art date
Application number
TW098125452A
Other languages
Chinese (zh)
Other versions
TWI395720B (en
Inventor
James William Brown
Paul Oakley Johnson
Gautam Narendra Kudwa
Ljerka Ukrainczyk
Original Assignee
Corning Inc
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Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of TW201022169A publication Critical patent/TW201022169A/en
Application granted granted Critical
Publication of TWI395720B publication Critical patent/TWI395720B/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Nonlinear Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Surface Treatment Of Glass (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Liquid Crystal (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

An apparatus (10) for treating a substantially planar glass sheet (30) that is positioned in a substantially vertical plane. In one aspect, the glass sheet is for an LCD display. The glass treatment apparatus includes a washing section (200), a rinsing section (300), a drying section (400), and bottom rollers (510) to move the glass sheet therethrough along a conveyance path (100). The washing section includes drive rollers (530, 540) configured to support and drive the glass sheet without causing damage thereto. The rinsing section includes an arrangement of nozzles (310, 320) and liquid bearings (330, 340) for rinsing the glass sheet without causing excessive vibration. And the drying section includes an arrangement of air knives (410, 420) and fluid bearings (440, 450) for drying the glass sheet without causing excessive vibration.

Description

201022169 六、發明說明: 【發明所屬之技術領域】 _ 本發明一般係關於玻璃處理,以及更特別地關於LCD玻 璃之垂直洗滌,沖洗以及烘乾。 ' 【先前技術】 將玻璃切割,研磨,和拋光是顯示器玻璃後處理的主要 動作。在這些處理步驟期間,都會產生顆粒或碎片形式的 ❺玻璃碎屑。這些碎屑,以及施加到玻璃上用來保護玻璃表 面的各種塗層必須被除去以便執行接下來的步驟來製造適 合鎖售的液晶顯示器(&quot;LCD&quot;)。通常,我們會_特別針對 LCD玻璃所設計的玻璃清洗器。這些清洗器絕大部分可以 歸類為兩類:批次或線内。 、,線内類型清洗器一般可以分成兩類:水平類,其中玻璃 平放在皮帶或其他種驅動系統上;或垂直類,當玻璃薄片移 動過洗滌步驟時,玻璃薄片由一邊,或由一邊加上一犧牲側 φ 來支撐。由於垂直類讓前面和後面的處理步驟也有機會使 :垂直指向,因此垂直類逐漸較受喜愛,因為垂直類降低所 .:要的樓面空間,*且可域生較乾淨的玻璃。此外,垂直 才曰向可以降低實際上黏到玻璃薄片的碎屑量。通常,顆粒 ' =往下掉,而且藉由改變玻璃薄片的指向,有效表面積會降 低’使較少的空中碎屑黏到玻璃薄片。 〜^傳統的垂直線内清洗器是為了窗戶工業而製造,通 伽二考慮到相當薄玻璃薄片,如製造LCD裝置所使用的低 ,向剛度。例如,通常使用刷子授動,從玻璃薄片除去碎屑 201022169 。然而,在將玻璃薄片傳送過刷子區時,會產生兩個問題。 首先,必須對玻璃薄片施加適當的驅動力,以便克服^刷子的 力量。第二’玻璃必須適當支撐,以避免破裂,還要避免跟 玻璃薄片有大的接觸面積,因為可能會造成缺陷例如刮痕, ' 這對LCD顧客來說是無法接受的。 同時,在沖洗和供乾區域,玻璃薄片必須要適當支撐 使玻璃薄片不會受到過度振動,因為這可能使玻璃薄片跟 一部分沖洗或烘乾區域產生不想要的接觸。這些不想要的 接觸可能會刮傷或弄破大體上在垂直指向的玻璃薄片。 【發明内容】 本發明疋關於以大體上垂直指向來處理-包括洗務,沖 洗,和烘乾大體平面之玻璃薄片的裝置。 在一個實把例中供了洗務區域。在洗務區域,使用 刷子來攪動,從玻璃薄片表面除去碎屑。在洗滌區域中,使 用驅動滾輪將玻璃薄片運送過刷子。驅動滾輪的尺寸和材 _ 料是特定的以提供適當的力給玻璃薄片,將玻璃薄片運送 過洗滌區域提供適當支撐以避免玻璃薄片破裂,還減少跟 玻璃薄片的接觸面積以避免缺陷例如刮痕。 在第一實施例中,提供了沖洗區域。在沖洗區域中,沖 * 洗喷嘴和轴承的位置要經過設計以便適當地支撐玻璃薄片 ,而不會引起過多振動。具體來說,沖洗喷嘴放置在玻璃薄 片的一侧,而軸承放在玻璃薄片的對立側也就是沖洗喷嘴 的對面。 在第二實施例中,k供了供乾區域,含有氣刀來'丨共乾玻 201022169 璃薄片。當玻璃薄片運送過烘乾區域時,使用流體轴承來 支撐玻璃薄片。第一軸承配備在玻璃薄片運送方向上氣刀 的上游,而第二軸承配備在氣刀下游。氣刀放置在玻璃薄 片的對立侧,每一個供應特定壓力的氣流。此外,第一組軸 ' 承和第二軸承之間的距離留下一段無支撐的玻璃薄片長度 。氣刀所施加的壓力差異及第一和第二軸承之間的距離可 以經過設計以避免玻璃薄片過度振動。 _ 雖然三個實施分別地加以說明,其任何組合可使用在 一起。即洗滌區段,沖洗區段,以及烘乾區域可與各種其他 處理過程及/或其中裝置分離,單獨地,單元加以使用。 【實施方式】 本發明藉由下列詳細說明,附圖,範例以及申請專利範 圍,以及先前以及下列說明能夠立即地瞭解。不過,在目前 組成份,物體,裝置,以及方法被揭示出以及加以說明之前, 人們瞭解本發明並不受限於所揭示特定組成份,物體,裝置 ❹以及方法,除非另有說明,當然這些能夠加以變化。人們亦 瞭解在此所使用名詞只作為說明特定項目以及並不預期作 j 為限制。 ' 提供本發明下列詳細酬作如目前已知實施例揭示 出本發明。關於此方面,熟知此技術者瞭解以及明瞭本發 明在此所說明各項能夠作各種變化,同時仍然能夠得到本 發明優點。人們暸解本發明部份所需要優點能夠藉由選擇 部份本發明特㈣並錢用其_㈣達成。因而,業界 201022169 熟知此技術者瞭解本發明可作許多變化及改變以及在特定 情況中為需要的以及為本發明部份。因而,提供下列說明 -作域明本發明原取及並不作為限制用。 必需說明整個說明書中,單數形式之冠詞V,或” an ”包 含多數指示對像,除非另有清躲表示。因而,例如所指” 玻璃片”包含該兩&gt;{或多片該玻璃片,除非另有說明。 在此範圍能約表示為由&quot;大約&quot;一個特定數值及/或”大 約&quot;另-特定數值。當該範圍被表示,另一項包含由一個特 定數值及/或至其他特定數值。同樣地,當數值藉由使用前 置詞”大約”表示近似值時,人們了解特定數值形成另一項 。人們更進-步了解每—範圍之端軸對其他端點為有意 義的,以及與其他端點無關。 在此所使用&quot;可選擇的”或”可選擇地&quot;係指能夠或不能 夠發生事件或情況,以及說明能夠或不能夠發生事件或情 β況的-些例子。 這裡描述了處理大體平面之玻璃薄片30的玻璃處理設 備10。此玻璃處理裝置1〇可以包含洗滌區域2〇〇,沖洗區域 ' 300,和烘乾區域400。玻璃薄片30通常含有第一面32以及 相對的第二面34如圖4所示。玻璃薄片3〇可以用於例如LCD 顯示器。 在一個例子中,玻璃薄片30沿著運送路徑以運送方 201022169 向102運送過洗條區域200,沖洗區域300,和烘乾區域400 參看圖4。玻璃薄片30以大體上垂直的方式,沿著運送路徑 • 100運送。玻璃薄片使用放置在運送路徑100底部的多個底 部滾輪510來運送。底部滾輪510可以跟底部滾輪傳動520 連通,對一或多個底部滾輪510施加旋轉力以便沿著運送路 徑100來運送玻璃薄片30,經過洗滌區域200,沖洗區域3〇〇, 和烘乾區域400。每一區域,也就是洗條區域2〇〇,沖洗區域 ® 300,和烘乾區域400可以有它自己的滚輪傳動52〇,針對那 一區域的底部滾輪510。當這些區域以獨立單元分開使用 a夺’這種配置是有利的。或者,一個滚輪傳動52〇可以用在 超過個區域。如圖所示一個滾輪傳動520用於洗梅2〇〇 和沖洗300區域,而分開的滾輪傳動52〇用於烘乾區域棚。 滾輪傳動520可以透過任何已知的傳動系統類型連接到底 部滾輪510,如對這方面具有一般技術的人所瞭解的。 _ 洗滌區段: ^ ,玻璃處理袭置10包含洗條區域200含有洗滌 外罩20和貫穿其中的運送路徑100。當玻璃薄片30沿著運 -送路徑100以運送方向102運行時,玻璃薄片3〇定位在大體 垂直的指向。 洗心區域200至少包含—個第一刷子謂鄰接運送 路徑1 〇〇放置用來接觸破螭薄片30第-面32的至少一部分 201022169 以洗滌掉第一面32的碎屑。此外,洗滌區域2〇〇也包含至少 一個第二刷子220鄰接運送路徑1〇〇放置用來接觸玻璃薄 片30第二面34的至少一部分。洗滌區域2〇〇的配置使至少 一個的第一刷子2丨0放在至少一個的第二刷子220對面 。清楚的說,第一 210和第二22〇刷子的轴212 222位於 運送路徑100的對立側。然而,刷子的直徑要使得在刷子 ^ 210, 220之間沒有玻璃薄片時,每個刷子可以延伸過運送路 徑100,使得當出現玻璃薄片時,刷子跟玻璃薄片3〇有足夠 的接觸面積以便從玻璃薄片30上攪動不想要的顆粒。洗滌 區域200可以包含多對刷子21〇, 220沿著運送路徑放置其 中每一對刷子210, 200的軸212, 222在運送路徑1〇〇的對立 侧。以這種方式,由其中一個第一刷子21〇對玻璃薄片3〇 第一面32所施加的任何法線方向力量可以大體上等於並對 鲁 抗由其中一個第二刷子220對玻璃薄片30第二面34所施 加的任何法線方向力量。 為了協助洗滌,刷子210, 220可以旋轉。例如,但不局 限於第一刷子的軸212大體上平行於玻璃薄片3〇。同樣 的’第二刷子的軸222大體上平行於玻璃薄片30。馬達 250可以透過適當的傳動系統(為了簡單起見沒有顯示,但 是熟悉此技術的人都很容易暸解)連接到第一刷子的軸 212和第二刷子的轴222以便同時旋轉它們。刷子21〇 8 201022169 白會對抗破璃溥片30在運送方向1〇2沿著 路徑100的運H , 建送 A 運仃例如,如圖4所示,第一刷子210順時針 旋轉’而第〜刷子22〇逆時針旋轉。為了提供適當的授動 以除去碎屑,並且讓驅動滾輪530, 540(如底下所描述)可以 控制玻璃薄片3〇沿著奴路徑⑽的運送速度,刷子的旋轉 速度可叹大約絲叙/分鐘(咖)狀約麵对卿 參 (6〇至305表面公尺/分鐘),例如為250, 300, 350,400,450, 500’ 550, 600, 650, 700, 750, 800, 850, 900,或 950sfpm(75, 90’ 105’ 120,135,150,165,180,195, 210, 225, 240, 260, 275 ’290表面公尺/分鐘)。雖然圖中顯示兩對第一2丨〇和第 一組220刷子,但是只要刷子的對數適當都可以使用。 除了底部運送滚輪510之外,為了協助運送玻璃薄片3〇 ,玻璃處理裝置10也包含多個第—驅動雜53Q,鄰接運送 路徑100的一侧放置,和多個第二驅動滾輪54〇,鄰接運送路 徑100的第二侧放置。在一方面第一驅動滾輪53〇中的每 一個大體上都在對應之第二驅動滾輪54〇的對面,而多個第 二驅動滾輪540中的每一個,大體上都在對應之第一驅動滾 輪530的對面。為了運送玻璃薄片,多個第一驅動滚輪53〇 中的每一個會接觸玻璃薄片30第一面32的一部分,而多個 第二驅動滾輪540中的每一個會接觸玻璃薄片3〇第二面34 的一部分。 201022169 多個第一驅動滾輪530放置在轴534上,在垂直方向支 撐玻璃薄片30。在每個軸汹上的第一驅動滾輪53_, 決定於玻璃薄片的尺寸可以隨之變動。同樣的,多個第二 驅動滾輪540放置在轴⑽上。乡個第一轴534和多個第 二組轴544沿著運送路徑成對放置其中第一轴微放置 在運送路uo -側,而第二軸544放置在運送路徑⑽的 對立侧。馬達55G透過適合的傳動系統(為了簡單起見沒有 顯不,但是熟悉此技術的人都很容練齡連接到第— 彳第544轴。如圖4顯示,馬達55〇和傳動系統會使 第一驅動滾輪53G以逆時針方向旋轉,而使第二驅動滾輪 540以順時針方向旋轉,使得玻璃薄片3G沿著運送路徑1〇〇 往運送方向102移動。雖然圖中顯示三對第- 534和第二 組544軸,但是任何適當的對數都可以使用。 〆此外,驅動滾輪之尺寸和馬達的設計必須能夠提供適 田的驅動力對抗由刷子21 〇, 220所施力口的力以便將玻璃薄 片3〇運送過洗務區域200 I提供適當的支撐以避免玻璃薄 片3〇的破裂,還要減少跟玻璃薄片30的接觸面積以避免缺 陷例如刮痕。 ★ ^動滾輪530包含直徑538,以及驅動滾輪53〇接觸玻璃 薄片^分的覆蓋厚度536。圖10顯示—個驅動滾輪530的直 徑和厚度。每個驅動滚輪53G和540都有類似的厚度和直經 201022169 。厚度536可以在大約〇. 5射到大約2英对(ι· 2?公分到大 約5. 08公分)的範圍内。當厚度咖增加時,跟玻璃薄片3〇 會有較大的接觸面積,增加損壞玻璃薄片的危險。同時,由 於驅動滾輪53G,54G推向玻_片3〇,讓玻璃薄片3()在運送 方向102沿著運送路徑100移動會使得轴5料,544產生偏心 率,當厚度536增加時此偏心率越難平衡。當軸的偏心率增 加時,更難在驅動雜530, 540之職持可接受的空間讓玻 璃薄片30運行。另-方面,如果厚度咖太小,那麼將沒有 足夠的驅動力可以讓玻璃薄片3〇移動過洗蘇區域2〇〇。驅 動滾輪530的直徑538可以大到大約4英忖。第一 530和第 二組540驅動滾輪的直徑,以及轴534, 544的位置必須使得 滾輪530, 540彼此分開的間隙56〇小於欲運送之玻璃薄片3〇 的厚度36。參看圖9和圖1〇。換句話說每一對軸534 544 ^ 彼此間隔的距離要小於第一驅動滾輪530的一半直徑加上 第一驅動滾輪540的一半直徑再加上欲運送之玻璃薄片3〇 厚度36的總和。第一和第二驅動滾輪53〇 54〇之馬達的 ' 選擇要使得驅動滾輪530, 540具有一致性。一般來說,幾十 公釐的順應性是可接受的。如此,當玻璃薄片3〇運送過驅 動滚輪530, 540之間的間隙56〇時驅動滾輪53〇, 54〇會壓縮 (由於它們的順應性),來順應玻璃薄片3〇的厚度36。例如, 玻璃薄片30的厚度36可以是大約1公釐或較少,例如大約 201022169 0. 8公釐,大約〇· 7公釐,大約〇. 6公董大約〇· 5公釐或大約 0. 4公釐。 驅動滾輪的馬達也會影響玻璃薄片的運送 。此馬達不 .可以染污或刮傷玻璃薄片,而且跟玻璃薄片30有可接受的 摩擦係數以避免在玻璃薄片3〇運送期間驅動滾輪53〇, 54〇 和玻璃薄片30之間的滑動。由此可知,至少驅動滾輪聊, 540的外部532’ 542包含聚合橡膠例如乙烯丙稀二烯單體 ❹橡膠⑽DM乂或山都平(Santoprene)橡朦。參看圖9,聚合 橡膠的硬度可以在大約3〇蕭式硬度A(Sh〇re A)到大約6〇201022169 VI. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates generally to glass processing, and more particularly to vertical washing, rinsing, and drying of LCD glass. [Prior Art] Cutting, grinding, and polishing glass is the main action of post-processing glass. During these processing steps, bismuth glass crumbs in the form of granules or chips are produced. These chips, as well as the various coatings applied to the glass to protect the glass surface, must be removed to perform the next steps to make a liquid crystal display suitable for sale (&quot;LCD&quot;). Usually, we will specialize in glass cleaners designed for LCD glass. Most of these cleaners can be categorized into two categories: batch or inline. In-line type cleaners can generally be divided into two categories: horizontal, in which the glass is placed flat on a belt or other type of drive system; or vertical, when the glass sheet is moved through the washing step, the glass sheet is from one side, or from one side. Plus a sacrificial side φ to support. Since the vertical class also allows the front and back processing steps to be organic: vertical pointing, the vertical class is gradually more popular, because the vertical class reduces the area: the required floor space, * and can produce a cleaner glass. In addition, the vertical orientation can reduce the amount of debris actually sticking to the glass flakes. Typically, the particles ' = fall down and the effective surface area is reduced by changing the orientation of the glass flakes' to allow less airborne debris to stick to the glass flakes. ~^ The traditional vertical in-line cleaner is manufactured for the window industry, which considers the relatively low glass flakes, such as the low-direction stiffness used in the manufacture of LCD devices. For example, a brush is usually used to remove debris from the glass flakes 201022169. However, two problems arise when conveying a glass sheet through the brush zone. First, an appropriate driving force must be applied to the glass flakes in order to overcome the force of the brush. The second 'glass must be properly supported to avoid cracking and to avoid large contact areas with the glass sheets, as defects such as scratches may be caused,' which is unacceptable to LCD customers. At the same time, in the rinsing and drying areas, the glass flakes must be properly supported so that the glass flakes are not subject to excessive vibration, as this may cause unwanted contact between the glass flakes and a portion of the rinsing or drying zone. These unwanted contacts can scratch or break the glass flakes that are generally oriented vertically. SUMMARY OF THE INVENTION The present invention is directed to apparatus for processing, including washing, rinsing, and drying substantially planar glass flakes, in a substantially vertical orientation. The cleaning area is provided in a real example. In the wash area, use a brush to agitate and remove debris from the surface of the glass sheet. In the wash area, the drive glass is used to transport the glass sheets through the brush. The size and material of the drive roller are specific to provide the proper force to the glass sheet, transport the glass sheet through the wash area to provide proper support to avoid rupture of the glass sheet, and reduce the contact area with the glass sheet to avoid defects such as scratches. . In the first embodiment, a flushing area is provided. In the flushing area, the position of the wash nozzle and the bearing is designed to properly support the glass sheet without causing excessive vibration. Specifically, the rinsing nozzle is placed on one side of the glass sheet, and the bearing is placed on the opposite side of the glass sheet, that is, opposite the rinsing nozzle. In the second embodiment, k is supplied to the dry area, and contains an air knife to 'dry the glass 201022169. A fluid bearing is used to support the glass flakes as the glass flakes are transported through the drying zone. The first bearing is provided upstream of the air knife in the direction in which the glass sheet is conveyed, and the second bearing is provided downstream of the air knife. Air knives are placed on opposite sides of the glass sheet, each supplying a specific pressure of air. In addition, the distance between the first set of bearings and the second bearing leaves an unsupported length of glass flakes. The difference in pressure exerted by the air knife and the distance between the first and second bearings can be designed to avoid excessive vibration of the glass sheet. _ Although the three implementations are described separately, any combination thereof can be used together. That is, the washing section, the rinsing section, and the drying zone can be separated from various other processes and/or devices therein, individually, using the unit. [Embodiment] The present invention will be immediately understood by the following detailed description, drawings, examples and claims. However, it is understood that the present invention is not limited to the specific components, objects, devices and methods disclosed, unless otherwise stated. Can be changed. It is also understood that the nouns used herein are used only to describe a particular item and are not intended to be limiting. The following detailed description of the invention is provided as the presently disclosed embodiments disclose the invention. In this regard, it will be apparent to those skilled in the art <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; It is understood that the advantages required in part of the present invention can be achieved by selecting a part of the invention (IV) and using it _(d). Thus, it is apparent to those skilled in the art that the present invention may be susceptible to many variations and modifications, and in the particular embodiments. Accordingly, the following description is provided - the invention is intended to be illustrative and not limiting. It must be noted that throughout the specification, the singular form of the article V, or "an", includes a majority of the indicated object, unless otherwise indicated. Thus, for example, reference to a "glass sheet" includes the two &apos;{ or multiple sheets of the glass unless otherwise stated. Ranges in this range can be expressed as &quot;about&quot; a particular value and/or &quot;about&quot; another-specific value. When the range is expressed, the other item contains a particular value and/or to other specific values. Similarly, when values are approximated by the use of the preposition "about", it is understood that a particular value forms another. It is further understood that the end-axis of each range is meaningful to the other endpoints, as well as to other endpoints. Nothing. The use of &quot;optional&quot; or &quot;optional&quot; as used herein refers to an event or situation that can or cannot occur, and an example of whether an event or situation can or cannot occur. A glass processing apparatus 10 that processes a substantially planar glass sheet 30. The glass processing apparatus 1 can include a wash area 2, a rinse area '300, and a drying area 400. The glass sheet 30 typically contains a first side 32 and opposing The second side 34 is shown in Figure 4. The glass sheet 3 can be used, for example, in an LCD display. In one example, the glass sheet 30 is transported along the transport path to the transport side 201022169 to 102. Overwash zone 200, rinse zone 300, and drying zone 400 are shown in Figure 4. Glass flakes 30 are transported in a substantially vertical manner along transport path 100. The glass flakes use multiple bottoms placed at the bottom of transport path 100. Roller 510 is transported. Bottom roller 510 can be in communication with bottom roller drive 520, applying a rotational force to one or more bottom rollers 510 to transport glass sheet 30 along transport path 100, through wash area 200, flush area 3, And drying zone 400. Each zone, i.e., the scrubbing zone 2〇〇, the flushing zone® 300, and the drying zone 400 can have its own roller drive 52〇, for the bottom roller 510 of that zone. It is advantageous for the area to be used separately in separate units. Alternatively, a roller drive 52〇 can be used in more than one area. As shown, a roller drive 520 is used to wash the area and rinse 300 areas. A separate roller drive 52 is used to dry the zone shed. The roller drive 520 can be coupled to the bottom roller 510 by any known type of transmission system, as is conventional in this regard. It is understood that the washing section: ^, the glass treatment zone 10 comprises a washing zone 200 comprising a washing enclosure 20 and a transport path 100 therethrough. When the glass foil 30 runs along the transport-transport path 100 in the transport direction 102 The glass sheet 3 is positioned in a substantially vertical orientation. The core region 200 includes at least one first brush as an adjacent transport path 1 〇〇 placed to contact at least a portion of the first surface 32 of the broken sheet 30 201022169 to wash away In addition, the washing area 2〇〇 also includes at least one second brush 220 disposed adjacent to the transport path 1〇〇 for contacting at least a portion of the second side 34 of the glass sheet 30. The configuration of the wash area 2〇〇 places at least one of the first brushes 2丨0 opposite the at least one second brush 220. Clearly, the shafts 212 222 of the first 210 and second 22 〇 brushes are located on opposite sides of the transport path 100. However, the diameter of the brush is such that when there is no glass flake between the brushes 210, 220, each brush can extend across the transport path 100 such that when the glass flakes are present, the brush has sufficient contact area with the glass flakes 3 Unwanted particles are agitated on the glass flakes 30. The wash zone 200 can include a plurality of pairs of brushes 21, 220 placed along the transport path for each of the pairs of brushes 210, 200 having axes 212, 222 on opposite sides of the transport path 1". In this manner, any normal direction force applied by one of the first brushes 21 to the first face 32 of the glass sheet 3 can be substantially equal to and resisted by one of the second brushes 220 to the glass sheet 30. Any normal direction force exerted by two sides 34. To assist in washing, the brushes 210, 220 can be rotated. For example, but not limited to, the shaft 212 of the first brush is substantially parallel to the glass sheet 3〇. The same &apos;second brush axis 222 is substantially parallel to the glass sheet 30. The motor 250 can be coupled to the shaft 212 of the first brush and the shaft 222 of the second brush through a suitable transmission system (not shown for simplicity, but is readily apparent to those skilled in the art) to rotate them simultaneously. Brush 21〇8 201022169 White will fight the broken glass piece 30 in the transport direction 1〇2 along the path 100, the transport A, for example, as shown in Figure 4, the first brush 210 rotates clockwise' ~ Brush 22 rotates counterclockwise. In order to provide proper actuation to remove debris, and to drive the rollers 530, 540 (as described below) to control the transport speed of the glass sheet 3 along the slave path (10), the rotational speed of the brush can be sighed by about a minute/minute. (Caf) is about to face the ginseng (6〇 to 305 surface meters per minute), for example 250, 300, 350, 400, 450, 500' 550, 600, 650, 700, 750, 800, 850, 900, or 950sfpm ( 75, 90' 105' 120, 135, 150, 165, 180, 195, 210, 225, 240, 260, 275 '290 surface meters per minute). Although two pairs of first 2 丨〇 and first set 220 brushes are shown, they can be used as long as the logarithm of the brush is appropriate. In addition to the bottom transport roller 510, in order to assist in transporting the glass sheet 3, the glass processing apparatus 10 also includes a plurality of first drive impurities 53Q placed adjacent to one side of the transport path 100, and a plurality of second drive rollers 54A, adjacent The second side of the transport path 100 is placed. In each aspect, each of the first drive rollers 53A is substantially opposite the corresponding second drive roller 54A, and each of the plurality of second drive rollers 540 is substantially corresponding to the first drive. Opposite the roller 530. In order to transport the glass sheets, each of the plurality of first drive rollers 53A will contact a portion of the first face 32 of the glass sheet 30, and each of the plurality of second drive rollers 540 will contact the second side of the glass sheet 3 Part of 34. 201022169 A plurality of first drive rollers 530 are placed on the shaft 534 to support the glass sheets 30 in the vertical direction. The first drive roller 53_ on each of the shafts is determined by the size of the glass sheet. Similarly, a plurality of second drive rollers 540 are placed on the shaft (10). The first first axis 534 and the plurality of second set of axes 544 are placed in pairs along the transport path with the first axis being placed slightly on the transport path uo-side and the second axis 544 placed on the opposite side of the transport path (10). The motor 55G is transmitted through a suitable transmission system (not shown for the sake of simplicity, but those familiar with this technology are very capable of connecting to the — 544 shaft.) As shown in Figure 4, the motor 55〇 and the transmission system will make the first A driving roller 53G rotates in a counterclockwise direction, and the second driving roller 540 rotates in a clockwise direction, so that the glass sheet 3G moves along the conveying path 1 to the conveying direction 102. Although the figure shows three pairs of -534 and The second set of 544 axes, but any suitable logarithm can be used. 〆 In addition, the size of the drive roller and the design of the motor must be able to provide the driving force of the field against the force applied by the brush 21 〇, 220 to the glass The sheet 3 is conveyed through the wash area 200 I to provide appropriate support to avoid cracking of the glass sheet 3, and to reduce the contact area with the glass sheet 30 to avoid defects such as scratches. ★ The moving roller 530 includes a diameter 538, and The drive roller 53 is in contact with the cover thickness 536 of the glass sheet. Figure 10 shows the diameter and thickness of the drive roller 530. Each of the drive rollers 53G and 540 has a similar thickness and straightness. 201022169. The thickness 536 can range from about 〇. 5 to about 2 inches (ι·2? cm to about 5.08 cm). When the thickness of the coffee increases, there is a greater contact with the glass sheet 3〇. The area increases the risk of damaging the glass flakes. At the same time, since the driving rollers 53G, 54G are pushed toward the glass sheet 3, moving the glass sheet 3 () along the transport path 100 in the transport direction 102 causes the shaft 5, 544 to be eccentric. Rate, the eccentricity is more difficult to balance when the thickness 536 is increased. When the eccentricity of the shaft is increased, it is more difficult to drive the glass sheet 30 to operate in an acceptable space for driving the 530, 540. Another aspect, if the thickness is coffee Too small, there will be insufficient driving force to move the glass sheet 3〇 through the scrubbing area 2. The diameter 538 of the driving roller 530 can be as large as about 4 inches. The first 530 and the second group 540 drive the rollers. The diameter, as well as the position of the shafts 534, 544, must be such that the gaps 56 分开 separating the rollers 530, 540 from each other are less than the thickness 36 of the glass sheet 3 to be transported. See Figures 9 and 1〇. In other words, each pair of shafts 534 544 ^ The distance between each other is smaller than the first The half diameter of the moving roller 530 plus the half diameter of the first driving roller 540 plus the sum of the thicknesses 36 of the glass sheets 3 to be transported. The selection of the motors of the first and second driving rollers 53〇54 is to drive The rollers 530, 540 have consistency. In general, tens of millimeters of compliance is acceptable. Thus, when the glass sheet 3 is transported across the gap 56 between the drive rollers 530, 540, the roller 53 is driven. 54〇 will compress (due to their compliance) to conform to the thickness 36 of the glass sheet 3〇. For example, the thickness 36 of the glass flakes 30 may be about 1 mm or less, for example, about 201022169 0. 8 mm, about 〇·7 mm, about 〇. 6 dong, about 公·5 mm or about 0. 4 mm. The motor that drives the rollers also affects the transport of the glass sheets. This motor does not stain or scratch the glass flakes and has an acceptable coefficient of friction with the glass flakes 30 to avoid sliding between the rollers 53, 54 and the glass flakes 30 during transport of the glass flakes. Thus, it can be seen that at least the outer roller 532' 542 of the drive roller 540 comprises a polymeric rubber such as ethylene propylene diene monomer ❹ rubber (10) DM San or Santoprene rubber 朦. Referring to Figure 9, the hardness of the polymeric rubber can be about 3 〇 Xiao hardness A (Sh〇re A) to about 6 〇.

Shore A,例如 35, 40, 45, 50 或 55 Shore A。 如上面所提的,第一 53Q和第二54〇驅動滾輪大體 上彼此相對放置。這種配置的一個原因是為了平衡法線方 向力量。在一方面,多個第一滾輪530㈣每一個對玻璃 薄片30的第-面32施加第一個法線方向力量,而每一個對 應的第二滾輪540對玻璃薄片3〇的第二面&amp;施加第二法 線方向力量。在另-方面,第一法線方向力量大體上等 ‘於第二法線方向力量。讓相對的法線方向力量大體上保持 '相等可以大大降低對玻璃薄片30所造成的任何振動。 洗祕域200也包含多個喷嘴23〇,使喷嘴23〇配置在運 送路徑1〇〇的兩側。喷嘴230沿著運送方向1〇2放置在每個 相繼的驅動滾輪對530, 540和刷子對21〇, 22〇之間。喷嘴 12 201022169 230可以對驅動滾輪53〇, 54〇,刷子則,22〇,和玻璃薄片加 喷灌任何類型的流體來協助洗滌處理。此流體可以是任何 類型的清洗流體,例如通常是液體。 沖洗區段: 沖洗區域_包含第-沖洗噴嘴31G和第二沖洗喷 嘴320,在運送路徑1〇〇上彼此相對也包含第一 34〇和第二 組330液體軸承,在運送路徑1〇〇上彼此相對。參看圖4第 ® 组310和第二320沖洗喷嘴相對於彼此,幼對於第— 組340和第二330液體軸承放置以便支撐玻璃薄片3〇,而 不會造成可能損壞玻璃薄片30的過度振動。 第一沖洗噴嘴310配置在管道312上,大體上鄰接破 璃運送路徑1〇〇放置。第一沖洗噴嘴310透過管道312跟 液體來源連通。任何適當數目的沖洗喷嘴31〇都可以配置 在管道312上,決定於欲運送之玻璃薄片3〇的尺寸。此 雖然圖中顯示在沖洗區域300中有兩個含第一沖洗噴嘴 310的管道312,但是任何適當數目的管道312都可以用於 ' 第一沖洗喷嘴31〇。在一方面,液體包含水,但是其他適 _ 合用來沖洗的液體以及清潔劑都可以考慮。第一沖洗 喷嘴310是用來將液體導向玻璃薄片30的第一面32。 第二沖洗喷嘴320鄰接運送路徑1〇〇放置在運送路捏 100上跟第一沖洗噴嘴310相對的一侧。此外,如圖4所示 13 201022169 第一 310和第二320沖洗喷嘴在沿著運送路徑丨⑽的水 平位置上父錯放置。這種配置協助降低玻璃薄片30的振動 。第二沖洗噴嘴320也透過管道312跟液體連通,用來將 液體導向玻璃薄片的第二面34。類似第一沖洗喷嘴31〇, 在每個管道312上可以使用任何數目的第二沖洗喷嘴32〇 ,而在沖洗區域中可以使用任何適當數目含有第二沖洗 喷嘴320的管道312。 Φ ^ 第一液體軸承340面對玻璃薄片30的第二面34放置, 每個都含有頂部342和底部344。參看圖4和圖6。第一 液體軸承(和第二液體軸承330)表面上都保持一層水薄 膜’以避免玻璃接觸液體軸承。這些液體轴承在玻璃薄片 报薄時用來提供相當高的剛性,且確定不會接觸玻璃薄片 30。在水平和垂直方向上,第一液體軸承340放置在運 ❿送路化⑽上跟第一沖洗噴嘴310相對的一侧,且大體上 在對面。在水平方向,第一沖洗喷嘴310和第一液體 轴承340放置在沿著運送路徑100的相似位置,但是在對侧 。參看圖4’此外在垂直方向,至少有-些噴嘴310配置在 第一液體軸承340的頂部342和底部344之間。參看圖6, *好大σ卩为的沖洗喷嘴310都如此配置。以這種方式第 一組液體軸承340面對玻璃薄請的第二面34為玻璃薄片 提仏無-接觸的支撐,直接對抗第一沖洗喷嘴31〇的液 14 201022169 體所施加的法線㈣力量。第—液_承340配置成水 平列,圖中顯示了四列。參看圖β 耆圖6’任何適當的列數都可以 使用,決定於欲運送之玻璃薄片30的尺寸。將幾列第一 液體軸承340沿著跟運送方向1〇2平行的方向延伸一直貫 穿整個沖洗區域3GG。然而,在每列的第—液體轴承_Shore A, such as 35, 40, 45, 50 or 55 Shore A. As mentioned above, the first 53Q and the second 54" drive rollers are placed substantially opposite one another. One reason for this configuration is to balance the normal direction of the force. In one aspect, each of the plurality of first rollers 530 (four) applies a first normal direction force to the first face 32 of the glass sheet 30, and each of the corresponding second rollers 540 pairs the second face &amp; Apply the second normal direction force. On the other hand, the first normal direction force is roughly equal to ‘force in the second normal direction. Allowing the relative normal direction forces to remain substantially equal can greatly reduce any vibration caused to the glass flakes 30. The washing domain 200 also includes a plurality of nozzles 23, and the nozzles 23 are disposed on both sides of the transport path 1A. The nozzle 230 is placed between each successive pair of drive rollers 530, 540 and the pair of brushes 21, 22 in the transport direction 1 〇 2 . Nozzle 12 201022169 230 can apply a spray of any type of fluid to the drive rollers 53〇, 54〇, brush, 22〇, and glass sheets to assist in the washing process. This fluid can be any type of cleaning fluid, such as typically a liquid. Flushing section: The flushing zone _ comprises a first flushing nozzle 31G and a second flushing nozzle 320, and also comprises a first 34 〇 and a second set 330 of liquid bearings on the transport path 1 ,, on the transport path 1 〇〇 Opposite each other. Referring to Fig. 4, the first group 310 and the second 320 rinse nozzles are placed relative to each other, and the first group 340 and the second 330 liquid bearings are placed to support the glass sheets 3〇 without causing excessive vibration that may damage the glass sheets 30. The first rinse nozzle 310 is disposed on the conduit 312 and is disposed generally adjacent the glass transport path 1〇〇. The first rinse nozzle 310 is in communication with the source of liquid through conduit 312. Any suitable number of flushing nozzles 31A can be disposed on the conduit 312 depending on the size of the glass sheet 3 to be transported. Although the figure shows that there are two conduits 312 containing the first rinse nozzle 310 in the rinse zone 300, any suitable number of conduits 312 can be used for the 'first rinse nozzle 31'. In one aspect, the liquid contains water, but other liquids suitable for rinsing as well as detergents are contemplated. The first rinse nozzle 310 is a first face 32 for directing liquid to the glass sheet 30. The second flushing nozzle 320 is placed adjacent to the transport path 1A on the side of the transport path pinch 100 opposite to the first flushing nozzle 310. Further, as shown in Fig. 4, 13 201022169 The first 310 and second 320 rinse nozzles are placed in a wrong position along the horizontal position of the transport path 丨 (10). This configuration assists in reducing the vibration of the glass flakes 30. The second rinse nozzle 320 is also in fluid communication through conduit 312 for directing liquid to the second side 34 of the glass sheet. Similar to the first rinse nozzle 31, any number of second rinse nozzles 32'' can be used on each of the tubes 312, and any suitable number of tubes 312 containing the second rinse nozzles 320 can be used in the rinse region. Φ ^ The first liquid bearing 340 is placed facing the second side 34 of the glass sheet 30, each having a top 342 and a bottom 344. See Figures 4 and 6. The first liquid bearing (and the second liquid bearing 330) maintains a thin film of water on the surface to prevent the glass from contacting the liquid bearing. These liquid bearings are used to provide a relatively high rigidity when the glass sheets are thinned, and are determined not to contact the glass sheets 30. In the horizontal and vertical directions, the first liquid bearing 340 is placed on the side of the transport path (10) opposite the first flushing nozzle 310, and is substantially opposite. In the horizontal direction, the first rinse nozzle 310 and the first liquid bearing 340 are placed at similar positions along the transport path 100, but on the opposite side. Referring to Figure 4', further in the vertical direction, at least some of the nozzles 310 are disposed between the top 342 and the bottom 344 of the first liquid bearing 340. Referring to Fig. 6, the flushing nozzles 310 of the large σ卩 are configured as such. In this way, the second surface 34 of the first group of liquid bearings 340 facing the thin glass is provided with a non-contact support for the glass sheet, directly against the normal applied by the liquid 14 201022169 of the first rinse nozzle 31 (4) power. The first liquid _ 340 is arranged in a horizontal column, and four columns are shown in the figure. Any suitable number of columns can be used with reference to Figure β, Figure 6', depending on the size of the glass sheet 30 to be shipped. A plurality of rows of the first liquid bearings 340 are extended in a direction parallel to the transport direction 1〇2 throughout the entire flushing region 3GG. However, the first liquid bearing in each column _

内’有間隙348來順應第二嘴嘴32〇噴_玻璃薄片%的 第二面34。這些間隙348讓一部分的第二面34可以直接接 收來自第二沖洗喷嘴320的流體,同時玻璃薄片30的第一 面32仍然由第二液體軸承33〇支撐。 第二液體軸承330鄰接運送路徑1〇〇,放置在運送路 仏100上跟第一沖洗喷嘴32〇相對的一側且大體上在對 面。第二液體軸承330的數目和配置可以類似上面參考 第液體軸承340所描述的。此外,第二液體軸承330 相對於第一 310和第二320沖洗喷嘴,及第一液體軸 承340的關係,可以類似第一液體軸承340相對於第二 320和第一 310沖洗喷嘴,及第二液體轴承330的關係, 如上面所描述。 第一 310和第二320沖洗喷嘴能夠以大範圍的可接 受體積速率和壓力,將液體導向玻璃薄片30的第一32和第 二面34。因此,在一方面,液體以大約〇. 2到大約2加命/分 鐘(GPM)的速率導向玻璃薄片30的第一 32和第二面34。在 15 201022169 另一方面,液體以大約10到大約50磅/平方英吋(pSi)(大約 68950牛頓/平方公尺(N/m2)到大約344738N/m2)的壓力導 向玻璃薄片30的第一 32和第二面34。當體積流速和壓力落 在這些範圍内,且位置關係如上面所描述時,液體造成的玻 璃薄片30振動大約是50微米或更少,這對應用在典型LCD裝 置中的玻璃薄片30來說不會過度。 烘乾區段: β 烘乾區域4〇〇是用來從玻璃薄片3〇的面犯,34除去液體 。在一方面,烘乾區域400包含至少一個第一氣刀41〇,第 二組氣刀420,管道430上的喷嘴,流體軸承44〇, 45〇,和導引 滾輪470。由氣刀41〇, 420所施加的氣體壓力和流體軸承 權肩之間的距離,要能夠避免對玻璃薄片造成不想要的 振動。 藝第-氣刀410鄰接運送路徑1〇〇放置跟氣體來源聯通 。纽璃薄片30沿著運送路徑1〇〇以運送方向1〇2通過時 =氣刀41〇將氣體導向玻璃薄片3〇的第一面%以形成 祕,從破璃薄片3G的第—面32除去液體。 :樣的’在這方面,至少有一個第二氣刀·鄰接運 徑ion、G放置跟祕來源連通,在麵㈣3G沿著運送路 二面/運达方向1〇2移動時,將氣體導向玻璃薄片30的第 一。第二氣刀420大體上面對第—氣刀41〇放置。 201022169 在薄片3 0任一側的氣流都受到精準控制以便將由於壓力形 成的不平衡,而對玻璃薄片3〇造成的振動降低到可接受的 程度。當玻璃薄片3〇 —側氣刀所施加的壓力,跟玻璃薄片 30對立側另一個氣刀的壓力不同時,就會造成壓力的不平 衡。過度振動不僅會造成刮痕,也會妨礙有效的烘乾。幾 百帕斯卡(pascal)的壓力不平衡會引起不想要的振動而影 響烘乾。每一個氣刀410, 420以大約1500L/min(公升/分) 到大約2800L/min的速率將氣體導向玻璃薄片30,然而其他 範圍也可以考慮,例如 16〇〇, 1700, 1800,1900, 2000, 2100, 2200, 2300,2400, 2500, 2600,和 2700L/min。氣體可以是壓 縮空氣。其他氣體也可以考慮,包括但不局限於鼓風空氣 和氮氣。 烘乾區域400包含第一和第二流體軸承440,450, 在玻璃薄片30運送過氣刀410, 420時用來支撐玻璃薄片30 。第一轴承440位於玻璃薄片30運送方向1〇2上,氣刀410 ,420的上游。第一流體軸承440的放置用來支樓玻璃薄 ‘ 片30的相對面32, 34。第一流體轴承440可以包含水或液 * 體軸承用來支稽玻璃薄片30。第二流體軸承450位於運 送方向102上,氣刀410, 420的下游。第二流體轴承54〇的 玫置用來支撐玻璃薄片30的相對面32, 34可以包含空氣# 承。第一和第二流體軸承440, 450之間,平行於玻璃薄 17 201022169 片運达方向102的距離460會留下一段無支樓的玻璃薄片3〇 長度參看圖6,般來說如果距離備太大那麼玻璃薄片 30在氣刀410, 42G之間可能跟運送路徑的中心部分偏離 太大以致於產生不想要的差別烘乾,也就是說在玻璃薄片 30對立側有不同的供乾條件。此外,距離棚可以跟氣刀 410, 420之間的麗力差-起控制以避免玻璃薄片3〇的過度 振動。如果振動變得過度,玻璃薄片30可能會不期望地黏 到氣刀410’420跟周圍結構有不期望的接觸且/或可能會 破裂。例如,第一軸承440和第二軸承450之間的距離 460可以大約75刪(公釐),最好是大約4〇_,❿更好的是大 約25刪。一般來說,較短的距離46〇可以配合氣刀“ο, 42〇 之間較大的壓力差來使用,而不會對玻璃薄片3〇造成過度 振動。同樣的,較長的距離460可以配合氣刀410, 420之間 Φ 較小的壓力差來使用,而不會對玻璃薄片3〇造成過度振動 。更具體地說,在一方面當距離460大約是75公釐時,壓力 差可以大到大約300Pa。另一方面,當距離460大約是25公 ' 釐或大約40公釐時,壓力差可以大到大約15〇〇 pa,例如, ' 400, 5〇〇, 600, 700, 800, 900,1〇〇〇, 11〇〇, 12〇〇, 1300,或 1400The inner portion has a gap 348 to conform to the second surface 34 of the second nozzle 32. These gaps 348 allow a portion of the second face 34 to directly receive fluid from the second rinse nozzle 320 while the first face 32 of the glass sheet 30 is still supported by the second liquid bearing 33A. The second liquid bearing 330 abuts the transport path 1 〇〇 and is placed on the side of the transport path 100 opposite the first flushing nozzle 32 且 and substantially opposite. The number and configuration of the second liquid bearings 330 can be similar to that described above with reference to the first liquid bearing 340. In addition, the relationship of the second liquid bearing 330 with respect to the first 310 and the second 320 flushing nozzles, and the first liquid bearing 340 may be similar to the first liquid bearing 340 with respect to the second 320 and the first 310 flushing nozzle, and the second The relationship of the liquid bearing 330 is as described above. The first 310 and second 320 rinse nozzles are capable of directing liquid to the first 32 and second faces 34 of the glass sheet 30 at a wide range of acceptable volume rates and pressures. Thus, in one aspect, the liquid is directed to the first 32 and second faces 34 of the glass flakes 30 at a rate of from about 2 to about 2 add/minutes (GPM). On 15 201022169, on the other hand, the liquid is directed to the first of the glass sheets 30 at a pressure of from about 10 to about 50 pounds per square inch (pSi) (about 68,950 Newtons per square meter (N/m 2 ) to about 344,738 N/m 2 ). 32 and second side 34. When the volume flow rate and pressure fall within these ranges, and the positional relationship is as described above, the liquid sheet 30 vibration caused by the liquid is about 50 μm or less, which is not applied to the glass flake 30 used in a typical LCD device. Will be excessive. Drying section: β Drying zone 4〇〇 is used to remove the liquid from the face of the glass sheet 3, 34. In one aspect, the drying zone 400 includes at least one first air knife 41, a second set of air knife 420, a nozzle on the conduit 430, fluid bearings 44A, 45A, and a guide roller 470. The distance between the gas pressure applied by the air knives 41 〇, 420 and the fluid bearing shoulders is such as to avoid unwanted vibration of the glass sheets. Art-air knife 410 is adjacent to the transport path 1〇〇 and is placed in communication with the gas source. When the glazing sheet 30 passes along the conveying path 1 〇〇 in the conveying direction 1 〇 2 = the air knife 41 〇 directs the gas to the first surface % of the glass sheet 3 以 to form a secret, from the first surface 32 of the glass slab 3G Remove the liquid. : "In this respect, at least one second air knife · adjacent path diameter ion, G placed in contact with the secret source, in the face (4) 3G along the two sides of the transport path / transport direction 1 〇 2, the gas is directed The first of the glass sheets 30. The second air knife 420 is placed substantially facing the first air knife 41. 201022169 The airflow on either side of the sheet 30 is precisely controlled to reduce the vibration caused by the pressure of the glass sheet to an acceptable level due to the imbalance formed by the pressure. When the pressure applied by the glass sheet 3's side air knife is different from the pressure of the other air knife on the opposite side of the glass sheet 30, an imbalance of pressure is caused. Excessive vibration not only causes scratches, but also prevents effective drying. Pressure imbalances of a few hundred pascals can cause unwanted vibrations that affect drying. Each air knife 410, 420 directs gas to the glass sheet 30 at a rate of from about 1500 L/min (liters per minute) to about 2800 L/min, although other ranges are also contemplated, such as 16 inch, 1700, 1800, 1900, 2000. , 2100, 2200, 2300, 2400, 2500, 2600, and 2700 L/min. The gas can be compressed air. Other gases are also contemplated, including but not limited to blast air and nitrogen. The drying zone 400 includes first and second fluid bearings 440, 450 for supporting the glass flakes 30 as the glass sheets 30 are transported through the air knives 410, 420. The first bearing 440 is located in the conveying direction 1〇2 of the glass sheet 30, upstream of the air knives 410, 420. The placement of the first fluid bearing 440 is used to support the glass thinner &apos; opposing faces 32, 34 of the sheet 30. The first fluid bearing 440 may contain water or liquid bearings for aligning the glass sheets 30. The second fluid bearing 450 is located in the transport direction 102 downstream of the air knives 410, 420. The mounting of the second fluid bearing 54A is used to support the opposing faces 32 of the glass sheet 30, which may contain air. Between the first and second fluid bearings 440, 450, parallel to the thin glass of glass 17 201022169, the distance 460 of the sheet transport direction 102 will leave a length of glass sheet without a branch. 3〇 Length See Figure 6, generally if the distance is prepared Too large then the glass flakes 30 may deviate too much from the central portion of the transport path between the air knives 410, 42G to produce an undesirable differential drying, that is, different drying conditions on opposite sides of the glass flakes 30. In addition, the distance shed can be controlled from the difference between the air knives 410, 420 to avoid excessive vibration of the glass sheets 3 。. If the vibration becomes excessive, the glass flakes 30 may undesirably adhere to the air knife 410' 420 with undesired contact with the surrounding structure and/or may rupture. For example, the distance 460 between the first bearing 440 and the second bearing 450 can be about 75 centimeters (mm), preferably about 4 〇 _, and more preferably about 25 db. In general, a shorter distance of 46 〇 can be used with a larger pressure difference between the air knife “ο, 42 , without excessive vibration of the glass sheet 3 。. Similarly, a longer distance of 460 can It is used with a small pressure difference between the air knives 410, 420 without excessive vibration of the glass flakes. More specifically, on the one hand, when the distance 460 is about 75 mm, the pressure difference can be Up to about 300 Pa. On the other hand, when the distance 460 is about 25 ng or about 40 mm, the pressure difference can be as large as about 15 〇〇pa, for example, '400, 5〇〇, 600, 700, 800 , 900,1〇〇〇, 11〇〇, 12〇〇, 1300, or 1400

Pa。在一個實施例中,距離460可以是大約40公釐,而氣刀 410,420之間的壓力差可以是大約300Pa。在一個實施例中 ,距離460可以是大約25公釐,而氣刀410,420之間的壓力差 18 201022169 可以是大約300Pa。 此外,在烘乾區域棚中還配備含嘴嘴的管道·。其 道430可以連接到流體來源,就在破璃薄片3〇運送過氣^ 410, 420之月ι〗將流體導向玻璃薄片3〇。 、β;; 此外,在烘乾區域中還配備導引滾輪4?〇用來支产玻璃 薄片的頂部。導引滾輪470是閒置滾輪提供額外的支心 玻璃薄片30的頂部,也就是在第一和第二轴承姻· 上方的玻璃薄片30部分。導引滾輪的位置报重要以避 免對玻璃薄片30品質區域域造成任何損壞,並維持有效的 運送。因此,導引滚輪470的放置只接觸玻璃薄片3〇的非— 2質區域域,也就是圍繞玻璃薄片3Q圓周的區域域,通常從 每一邊延伸進來大約5到10公釐。 雖然圖中顯示的烘乾區域侧連接到沖洗區域3〇〇的出 ❿ P,但是洪乾區域棚也可以作為獨立單元來使用。此外, 在冲洗區域300和供乾區域侧之間也可以配置其他裝置 和/或處理。同樣的,洗蘇2〇〇和沖洗咖區域也可以彼此分 :開作為獨立單元使用,而其他農置和/或處理以也可以配置 ' 在其間。 雖然本發明一些實施例已揭示於先前說明書中為業界 热知此技術者了解,本發明許多變化以及其他實施例受益 於所揭示先前說明以及相關附圖揭示内容。人們了解本發 19 201022169 明並不受限於上述所揭示特定實施例中,以及許多變化以 及其他實施例預期包含於申請專利範圍内。除此,雖然在 此以及下列申請專概ffi巾採麟定名詞為-般性及說明 性,以及並非作為限制本發明或下列申請專利範圍之目的。 【圖式簡單說明】 本發明這些優先實施例這些以及其他特性閱讀針對下 列附圖作說明之詳細說明將變為清楚。 圖1為玻璃處理裝置一項實施例之前端透視圖。 圖2為圖1玻璃處理裝置之後端透視圖。 圖3為圖1玻璃處理裝置後側平面圖,其顯示出洗滌區 域’沖洗區域,和烘乾區域。 圖4為圖1玻璃處理裝置之頂視圖。 圖5為由圖1左側觀看之玻璃處理裝置平面圖。 圖6為圖1玻璃處理裝置之前端平面圖。 圖7為沿著圖6直線7-7展開玻璃處理裝置之斷面圖。 圖8為沿著圖6直線8-8展開玻璃處理裝置之斷面圖。 圖9為圖1玻璃處理裝置之洗滌區段中兩個驅動滾輪之 分解圖。 圖10為圖9中所顯示驅動滾輪之側視圖。 【主要元件符號說明】 坡璃處理裝置10;洗滌外罩20;玻璃薄片3〇· 20 201022169 32;第二面34;厚度36;運送路徑100;運送方向102;洗 滌區域200;刷子210, 220;刷子的軸212, 222;喷嘴230; 馬達250;沖洗區域300;沖洗喷嘴310, 320;管道312;液 體轴承340, 330;液體軸承頂部342;液體軸承底部344; 間隙348;烘乾區域400;氣刀410, 420;管道430;流體軸 承440, 450;距離460;導引滾輪470;底部滾輪510;滾輪 傳動520;驅動滾輪530, 540;驅動滾輪外部532, 542;軸 ® 534,544;厚度 536;直徑 538;馬達 550;間隙 560。Pa. In one embodiment, the distance 460 can be about 40 mm, and the pressure differential between the air knives 410, 420 can be about 300 Pa. In one embodiment, the distance 460 can be about 25 mm, and the pressure differential 18 201022169 between the air knives 410, 420 can be about 300 Pa. In addition, a pipe with a mouth is also provided in the drying area shed. The channel 430 can be connected to the source of the fluid, and the fluid is directed to the glass sheet 3 at the end of the glass sheet 3, 420. And β;; In addition, a guide roller 4 is also provided in the drying zone for producing the top of the glass foil. The guide roller 470 is an idle roller that provides the additional top of the glass sheet 30, that is, the portion of the glass sheet 30 above the first and second bearings. The position of the guide rollers is important to avoid any damage to the quality area of the glass sheet 30 and to maintain efficient shipping. Therefore, the placement of the guide roller 470 contacts only the non-plasma region of the glass sheet 3, that is, the region surrounding the circumference of the glass sheet 3Q, usually extending from each side by about 5 to 10 mm. Although the side of the drying zone shown in the figure is connected to the exit P of the flushing zone 3, the flooding zone can also be used as a stand-alone unit. In addition, other means and/or treatments may be provided between the flushing zone 300 and the dry zone side. Similarly, the wash 2 and rinse coffee areas can also be separated from one another: open as a stand-alone unit, while other farms and/or treatments can also be configured 'between. While a few embodiments of the invention have been disclosed in the foregoing description, it is understood by those skilled in the art that many variations and other embodiments of the present invention benefit from the disclosure of the foregoing description and the accompanying drawings. It is understood that the present invention is not limited to the specific embodiments disclosed above, and many variations and other embodiments are intended to be included within the scope of the claims. In addition, the following claims are intended to be generic and illustrative, and are not intended to limit the scope of the invention or the following claims. BRIEF DESCRIPTION OF THE DRAWINGS These and other features of the present invention will be apparent from the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a front perspective view of an embodiment of a glass processing apparatus. Figure 2 is a perspective view of the rear end of the glass processing apparatus of Figure 1. Figure 3 is a rear plan view of the glass processing apparatus of Figure 1, showing the washing zone &amp; flushing zone, and drying zone. Figure 4 is a top plan view of the glass processing apparatus of Figure 1. Figure 5 is a plan view of the glass processing apparatus viewed from the left side of Figure 1. Figure 6 is a plan view of the front end of the glass processing apparatus of Figure 1. Figure 7 is a cross-sectional view of the glass processing apparatus deployed along line 7-7 of Figure 6. Figure 8 is a cross-sectional view of the glass processing apparatus deployed along line 8-8 of Figure 6. Figure 9 is an exploded view of two drive rollers in the wash section of the glass processing apparatus of Figure 1. Figure 10 is a side elevational view of the drive roller shown in Figure 9. [Description of main component symbols] glass processing apparatus 10; washing cover 20; glass sheet 3〇·20 201022169 32; second side 34; thickness 36; transport path 100; transport direction 102; washing area 200; brush 210, 220; Brush shaft 212, 222; nozzle 230; motor 250; flushing zone 300; flushing nozzle 310, 320; pipe 312; liquid bearing 340, 330; liquid bearing top 342; liquid bearing bottom 344; gap 348; drying zone 400; Air knife 410, 420; pipe 430; fluid bearing 440, 450; distance 460; guide roller 470; bottom roller 510; roller drive 520; drive roller 530, 540; drive roller outer 532, 542; shaft® 534, 544; thickness 536 Diameter 538; motor 550; gap 560.

21twenty one

Claims (1)

201022169 七、申請專利範圍 ^種包含密·璃封料方法财法包含下列 提供第一玻璃板; 驟· 提供第二玻璃板; 上==:在第—麵板上,使玻璃料在第-破璃板 ❹ :由靖 _===== 使用密封裝置加熱麵料,使玻補細並形成將第一 7板連接到第二玻璃板的密封,同時將液體容納在第一 玻璃板和第二玻璃板之間。 =申第1項之方法,其中在進行沉積她 u更進儿3預先燒結破璃料至第一破璃板。 35依據=專利翻第1項之方法,其t㈣亦直接地接觸 ^雜第-破填板上玻璃料外側,同時密封裝置加熱玻 璃料以形成連接第-玻璃板至第二玻璃板之密封。 射請專利範圍第1項之方法,其t摻雜至少-種過度 ==及降低熱膨脹係數之填充料,其中至少一種過渡金 屬為达、封裝置發射出光線之特定波+ =申2範圍第4項之方法身玻璃料含有預先決 疋數罝之降低熱膨脹係數填充料,其能夠滲入玻璃料以及 22 201022169 条發離開玻璃料與第一玻璃板間之界面,同時使用密封裝 置來加熱玻璃料以形成連接第一玻璃板至第二玻璃板之密 封。 ^依據申請專纖圍第4項之方法,其中排除降低轉腺係 .數填充料之玻璃料含有下列組成份划(〇-1〇%莫耳比); Fe2〇3(〇-2〇%莫耳比);祕(〇_2〇%莫耳比);Ζη〇(〇—2_ 耳比);隱(20-40%莫耳比);狐(3〇_6〇%莫耳比乂⑽咖 20°/。莫耳比);A12〇3(〇-5%莫耳比);祕(Q_5%莫耳比顧 (0-5%莫耳比);以及8丨2〇3(〇_5%莫耳比)。 專纖目^ 1狀方法,針麵獅下列玻璃 種類選取出:驗金屬鋅-鱗酸鹽玻璃,鈒—鱗酸鹽玻璃,錯一硼 酸鹽玻璃,以及她及黯合驗金鱗_磷_玻璃。 請細㈣第1項之綠,其中密_置使用來加 熱玻璃料,其方式為在玻璃料中沿著密封線保持實質上固 定之溫度,_玻频熔融以及形錢料—玻璃板 二玻璃板之密封。 9·依射請專利細第丨項之方法,射在細密封震置加 熱玻璃料以形成連接第-玻璃板至第二破璃板的密封 更進一步包含沉積至少一個組件於第二玻 依據中請專職圍”項之方法,其巾在仙密封 熱玻璃料以形成連接第-玻璃板至第二破加 更進-步包含沉積至少-個組件於第二玻璃板上封之則 U·依據申請專利範圍第10項之方法,其中密封駭發射出 雷射光束以及動態地改變雷射光束之功率以溶融玻璃料 23 201022169 其方式為在玻璃料中沿著密封線保持實質上固定之溫度 該密封線不具有電極區域以及具有電極佔據區域。’皿又, 12. 依據申請專利範圍第1〇項之方法其中密封發射出雷射 光束使絲縣玻補,其巾雷攸束速度絲地改變,其 .^式為在玻璃料中沿著密封線保持實質上固定之溫度,該、 岔封線不具有電極區域以及具有電極佔據區域。 13. 依據申請專利範圍㈣項之方法其中反射器放置於第 二玻璃板上,同時密封裝置發射雷射光束經由第一玻璃板 以炼融玻璃料,其方式為在玻璃料中沿著密封線保持實質 上固疋之/1度,密封線不具有電極區域以及具有電極佔 據區域。 14. 依據申請專利範圍第1〇項之方法其中部份地反射性遮 罩放置於第二玻璃板上,同時密封裝置發射f射光束經由 部份放射性遮罩以及第一玻璃板以熔融玻璃料,其方式為 在玻璃料中沿著密封線保持實質上固定之溫度,該密封線 φ 不具有電極區域以及具有電極佔據區域。 15. 依據申請專·_ 1G項之方法,其巾密封裝置發射較 低功率雷射光束以在第—回合過程中沿著密封線溶融玻璃 • ^及再第二回合過程中密封裝置再發射較高功率雷射於 . 著雄封線在較低功率雷射光束第一回合過程中並不達到 改正溫度之玻璃料部份。 依據申請專利範圍第10項之方法,其中使用反饋構件使 =裝置操作最佳化以縣玻璃料,其方式為在玻璃料中 /σ著雄、封線保持實質上固定之溫度,該密封線不具有電極 24 201022169 區域以及具有電極佔據區域。 17.依據申睛專利範圍第】〇 :貝之方法其中密封裝置使用特 別地成形孔徑以導引失焦雷射光束以熔融玻璃料,其方式 為在玻璃料中沿著密封線保持實質上固定之溫度,該密封 線不具有電極區域以及具有雜佔據區域。 ❹ 25201022169 VII. The scope of application for patents ^ The method of containing the glass seal method includes the following first glass plates provided; the second glass plate is provided; on the ==: on the first panel, the glass frit is in the first Glass ❹ : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : Between two glass plates. = The method of claim 1, wherein in the deposition, she is further pre-sintered into the first glass plate. 35 According to the method of Patent Reversal 1, the t(4) is also directly in contact with the outside of the frit of the miscellaneous-breaking plate, and the sealing device heats the glass frit to form a seal connecting the first glass plate to the second glass plate. The method of claim 1, wherein the t-doping is at least one type of over-== and a filler that lowers the coefficient of thermal expansion, wherein at least one of the transition metals is a specific wave that emits light from the sealing device + = 2 range The method of claim 4 contains a pre-determined number of reduced thermal expansion coefficient fillers that can penetrate the frit and 22 201022169 strips from the interface between the frit and the first glass sheet, while using a sealing device to heat the frit To form a seal connecting the first glass sheet to the second glass sheet. ^ According to the method of applying for the fourth section of the special fiber, which excludes the reduction of the gland. The frit of the filler contains the following composition (〇-1〇% molar ratio); Fe2〇3 (〇-2〇%) Moerby); secret (〇_2〇% Mo Erbi); Ζη〇 (〇-2_ ear ratio); hidden (20-40% Mo Erbi); fox (3〇_6〇% Mo Erbi乂(10) Coffee 20°/. Mo Erbi); A12〇3 (〇-5% Mo Erbi); Secret (Q_5% Mo Erbi (0-5% Mo Erbi); and 8丨2〇3 (〇 _5% Mo Erbi). Special fiber type ^ 1 method, the following glass types of needle-faced lions are selected: metal zinc-scaled glass, bismuth-sodium silicate glass, erbium borate glass, and her黯合金金Scale_Phosphorus_Glass. Please fine (4) Green of item 1, where _ is used to heat the glass frit in such a way as to maintain a substantially fixed temperature along the seal line in the frit, _ glass frequency Melting and forming money material - sealing of glass plate and two glass plates. 9. According to the method of patent fine detailing, the fine glass material is sprayed on the fine sealing to form the connection of the first glass plate to the second glass plate. The seal further includes depositing at least one component in the second glass According to the method of the full-time project, the towel is sealed in the hot frit to form the connection of the first glass plate to the second breaking plus further step comprising depositing at least one component on the second glass plate. A method according to claim 10, wherein the sealed crucible emits a laser beam and dynamically changes the power of the laser beam to melt the frit 23 201022169 in such a manner as to remain substantially fixed along the seal line in the frit The sealing line does not have an electrode area and has an electrode occupying area. 'Dish, 12. According to the method of the first aspect of the patent application, wherein the laser beam is emitted and sealed to make the silky glass, the towel thunder beam speed wire The ground is changed to maintain a substantially fixed temperature along the seal line in the frit, the seal line does not have an electrode area and has an electrode occupying area. 13. The method according to the method of claim (4) The device is placed on the second glass plate while the sealing device emits a laser beam through the first glass plate to smelt the glass frit in such a manner as to remain along the sealing line in the frit The sealing line has no electrode area and has an electrode occupying area. 14. According to the method of the first aspect of the patent application, a part of the reflective mask is placed on the second glass plate while The sealing device emits a f-beam that passes through the partial radioactive mask and the first glass sheet to melt the frit in such a manner as to maintain a substantially fixed temperature in the frit along the seal line, the seal line φ having no electrode area and having The electrode occupies the area. 15. According to the method of application _ 1G, the towel sealing device emits a lower power laser beam to melt the glass along the sealing line during the first round. ^ and seal during the second round The device re-transmits a higher power laser. The male seal line does not reach the glass frit portion of the corrected temperature during the first round of the lower power laser beam. According to the method of claim 10, wherein the feedback member is used to optimize the operation of the device to the county glass frit in such a manner that the σ is in the glass frit and the sealing line is maintained at a substantially fixed temperature. There is no electrode 24 201022169 area and has an electrode occupying area. 17. According to the scope of the patent application, the sealing method uses a specially shaped aperture to guide the out-of-focus laser beam to melt the glass frit in such a manner as to remain substantially fixed along the sealing line in the glass frit. At the temperature, the seal line does not have an electrode area and has a heterogeneous area. ❹ 25
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