JP2005150266A - Manufacturing method of plasma display panel and plasma display device and display panel processor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide technology for preventing damp air from arriving at the surface of an air knife used at the time of drying in a process for drying a display panel substrate after it is washed. <P>SOLUTION: A display panel processor is provided with a washing room (1); a washing device (4) which is installed in the washing room (1) and washes the display panel substrate (3); a drying room (2) where a conveyance port (5) which leads to the washing room (1) is opened; a conveyance device (6) turning the display panel substrate (3) in a prescribed conveyance direction (A) through the conveyance port (5), and conveying it from the washing room (1) to the drying room (2); the air knife (7) which is disposed in the drying room (2) and dries the display panel substrate (3); and nozzles (8 and 8') which are disposed on an upstream side of the conveyance direction (A) against the air knife (7) in the drying room (2), jet drying air to a direction (C) having a component in a direction opposite to the conveyance direction (A), and jet drying air to the display panel substrate (3). <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a plasma display panel manufacturing method, a plasma display device manufacturing method, and a display panel processing apparatus suitable for manufacturing a plasma display panel, and more particularly to an improvement in a process of washing and drying a display panel substrate.

  In the manufacturing process of a display panel such as a plasma display panel, after the display panel substrate is treated with a chemical solution, the display panel substrate needs to be washed with water and dried.

  As a technique for drying the display panel substrate, a method using an air knife is known. The air knife blows dry air on the display panel substrate with a strong force to blow off water droplets, thereby drying the display panel substrate.

  One problem with this substrate drying technique is that water droplets adhere to the surface of the air knife due to condensation. When water droplets formed by condensation on the surface of the air knife fall on the display panel substrate, a defect called water bleed (watermark) occurs on the display panel substrate. For this reason, provision of the technique which suppresses generation | occurrence | production of the dew condensation on the surface of an air knife is calculated | required.

Patent Document 1 discloses a manufacturing apparatus for a liquid crystal display device that suppresses the occurrence of condensation on the surface of an air knife. The known manufacturing apparatus includes a cleaning device unit for washing the liquid crystal substrate with water, a draining device unit adjacent to the cleaning device unit in the transport direction of the liquid crystal substrate, and a drying device unit adjacent to the draining device unit in the transport direction. I have. The draining device section is provided with an air knife and an air nozzle located downstream of the air knife in the transport direction of the liquid crystal substrate. The air nozzle blows dry air onto the downstream side surface of the air knife. Condensation on the surface of the air knife is suppressed by blowing dry air onto the downstream side surface of the air knife. The air nozzle also has a role of preventing heat from being transferred from the drying device to the draining device by blowing dry air in the vertical direction to generate an air curtain.
JP 2000-284247 A

  In order to prevent condensation on the surface of the air knife more completely, it is effective to prevent moist air (that is, air containing a lot of vapor) that causes condensation from reaching the surface of the air knife. It is. It is desired to provide a technique for preventing damp air from reaching the surface of the air knife.

  An object of the present invention is to provide a technique for preventing damp air from reaching the surface of an air knife used for drying in a step of drying the display panel substrate after washing it.

  The means for achieving the above object will be described below. In order to clarify the correspondence between the description of [Claims] and the description of [Best Mode for Carrying Out the Invention], the technical matters included in the means include [for carrying out the invention]. The number / symbol used in the best form] is added. However, the added numbers and symbols shall not be used for the interpretation of the technical scope of the invention described in [Claims].

  The display panel processing apparatus of the present invention is provided in the flushing chamber (1) and the flushing chamber (1), and communicates with the flushing device (4) for flushing the display panel substrate (3) and the flushing chamber (1). The drying chamber (2) in which the transfer port (5) is opened, and the display panel substrate (3) from the washing chamber (1) to the drying chamber through the transfer port (5) in a predetermined transfer direction (A). (2) Conveying device (6) for conveying, and air knife (7) provided in drying chamber (2) for drying display panel substrate (3), and air knife in drying chamber (2) (7) is provided on the upstream side in the transport direction (A), and blows dry air in a direction (C) having a component opposite to that in the transport direction (A). And nozzles (8, 8 ') for spraying on (3). The nozzle (8, 8 ') blows dry air in a direction (C) having a component opposite to that in the transport direction (A), so that air flowing in the direction opposite to the transport direction (A) (that is, upstream) Flow occurs. This air flow is caused by the wet air leaking from the washing chamber (1) into the drying chamber (2) and the moist air generated by the water remaining on the display panel substrate (3). From flowing into the air knife (7). Thereby, the display panel processing apparatus of this invention suppresses the dew condensation on the surface of an air knife (7) effectively. The said display panel processing apparatus is especially effective when the water washing apparatus (4) rinses the display panel board | substrate (3) using warm water.

  When the washing apparatus (4) uses hot water to wash the display panel substrate (3), the nozzle (8 ′) mixes cold water having a temperature lower than the hot water and dry air to mix the gas-liquid mixed fluid (8a). It is preferable to generate ') and spray the gas-liquid mixed fluid (8') onto the display panel substrate (3). As the display panel substrate (3) is cooled by cold water, generation of moist air is suppressed,

  In order to suppress the damp air from reaching the air knife (7), the display panel processing apparatus further includes a first exhaust device (12) for exhausting the drying chamber (2) at a first exhaust speed. It is preferable that the flushing chamber (1) is provided with a second exhaust device (11) that exhausts the flush chamber (1) at a second exhaust speed higher than the first exhaust speed.

  The display panel processing apparatus preferably further includes a partition (13) provided between the nozzle (8, 8 ′) and the air knife (7) in the drying chamber (2). is there. A partition (13) inhibits generation | occurrence | production of the flow of the air which goes to an air knife (7), and suppresses that moist air reaches | attains an air knife (7).

  In another aspect of the present invention, a display panel processing apparatus according to the present invention includes a flushing chamber (1), a flushing device (4) provided in the flushing chamber (1), and flushing the display panel substrate (3). , The drying chamber (2) in which the transfer port (5) leading to the washing chamber (1) is opened, and the display panel substrate (3) from the washing chamber (1) to the drying chamber (2) through the transfer port (5). ), An air knife (7) for drying the display panel substrate (3), and a drying chamber (2) are exhausted at a first exhaust speed. And a second exhaust device (11) for exhausting the flushing chamber (1) at a second exhaust speed higher than the first exhaust speed. Moist air leaks from the flushing chamber (1) into the drying chamber (2) by exhausting the flushing chamber (1) at a second exhaust rate greater than the first exhaust rate at which the drying chamber (2) is exhausted. Exiting is suppressed, and this prevents moist air from reaching the air knife (7).

In still another aspect of the present invention, a plasma display panel manufacturing method according to the present invention includes:
Treating the plasma display panel substrate (31, 32) with a chemical solution;
Washing the plasma display panel substrate (31, 32) treated with the chemical in the washing chamber (1);
The plasma display panel substrate (31, 32) that has been washed in water is transported in a predetermined transport direction (A), so that the plasma display panel substrate (31, 32) is moved from the water washing chamber (1) to the drying chamber (2). Moving in,
Dry air is ejected from the nozzles (8, 8 ') provided in the drying chamber (2) in a direction having a component opposite to the conveying direction (A), and the dry air is applied to the plasma display panel substrate (31, 32). Spraying,
The plasma display panel substrate (31, 32) is dried by an air knife (7) provided downstream in the transport direction (A) with respect to the nozzle (8, 8 ′). This manufacturing method is particularly effective when the plasma display panel substrates (31, 32) are washed with warm water.

When warm water is used for washing, the manufacturing method further includes:
Cold water having a temperature lower than that of hot water is mixed with dry air to generate a gas-liquid mixed fluid, and the gas-liquid mixed fluid is sprayed onto the plasma display panel substrate (31) by the nozzle (8, 8 '). Is preferred.

  The nozzles (8, 8 ′) have a distance from the plasma display panel substrate (31, 32) in the direction perpendicular to the transport direction (A), from the plasma display panel substrate (31, 32) to the air knife (7). It is preferable to be provided at a position larger than the distance.

When the washing room (1) has an opening (5) leading to the drying room (2),
The plasma display panel manufacturing method further includes:
Exhausting the drying chamber (2) at a first exhaust speed;
Preferably, the flushing chamber (1) is evacuated at a second evacuation rate greater than the first evacuation rate.

In still another aspect of the present invention, a method of manufacturing a plasma display panel according to the present invention includes treating a plasma display panel substrate with a chemical solution,
Washing the plasma display panel substrate (31, 32) treated with the chemical in the washing chamber (1);
The rinsed plasma display panel substrate (31, 32) is transferred from the flushing chamber (1) to the drying chamber (2) through a transfer port (5) that opens to both the flushing chamber (1) and the drying chamber (2). Carrying,
Drying the plasma display panel substrate (31, 32) with an air knife (7);
Evacuating the drying chamber (2) at the first pumping speed;
Evacuating the flushing chamber (1) at a second pumping speed greater than the first pumping speed.

In still another aspect of the present invention, a plasma display device according to the present invention includes:
A first step of manufacturing a plasma display panel (30) using the above plasma display panel manufacturing method;
A driving circuit (81, 82, etc.) for driving the plasma display panel, and a second step of manufacturing the plasma display panel as one module (52);
A third step of electrically connecting the analog interface (51) for converting the format of the analog video signal (62) to the digital video signal (64) and supplying the digital image signal to the module (52) to the module (52). And.

  According to the present invention, there is provided a technique for preventing damp air from reaching the surface of an air knife used for drying in a step of drying the display panel substrate after washing it.

  As shown in FIG. 1, the display panel processing apparatus according to the present invention includes a flushing chamber 1 and a drying chamber 2 adjacent to the flushing chamber 1. The flushing chamber 1 and the drying chamber 2 are connected to exhaust devices 11 and 12 for exhausting the flushing chamber 1 and the drying chamber 2, respectively. Exhaust valves 11a and 12a for adjusting the exhaust speed are provided between the exhaust devices 11 and 12, the flushing chamber 1 and the drying chamber 2, respectively.

  A flush nozzle 4 that blows warm water toward the display panel substrate 3 is provided in the flush chamber 1. The display panel substrate 3 conveyed to the rinsing chamber 1 is washed with warm water sprayed by the rinsing nozzle 4. Since washing is performed using warm water, the humidity in the flushing chamber 1 is high, and the flushing chamber 1 becomes a source of moist air.

  A transport port 5 leading to the drying chamber 2 is provided on the side wall of the water washing chamber 1, and a transport device 6 is provided so as to penetrate the transport port 5. The transport device 6 transports the display panel substrate 3 from the washing chamber 1 to the drying chamber 2 in the transport direction A. During the conveyance, the display panel substrate 3 is kept substantially horizontal. Immediately after being transported to the drying chamber 2, the hot water W adheres to the surface of the display panel substrate 3 and the temperature is high. For this reason, immediately after being transported to the drying chamber 2, the display panel substrate 3 is in a state where it is easy to generate damp air on its surface.

  An air knife 7 is provided in the drying chamber 2. The air knife 7 blows dry air in a direction B from a slit provided in parallel to a horizontal plane, and blows the dry air toward the display panel substrate 3. By blowing dry air, the hot water W remaining on the display panel substrate 3 is blown off, and the display panel substrate 3 is dried.

  In the drying chamber 2, an air shower 8 is further provided on the upstream side of the air knife 7 with respect to the transport direction A and above the transport device 6. The air shower 8 is a nozzle that blows dry air in a direction C having a component opposite to the transport direction A and blows it toward the display panel substrate 3. The air shower 8 generates an air flow in the direction opposite to the conveyance direction A. This air flow includes an air flow 9 generated in the drying chamber 2 by damp air rising from the display panel substrate 3 conveyed to the drying chamber 2 and damp air leaking from the washing chamber 1 to the drying chamber 2. Is prevented from reaching the air knife 7. Further, the air shower 8 reduces the amount of hot water W remaining on the display panel substrate 3 by blowing dry air onto the display panel substrate 3. By these actions, the air shower 8 effectively suppresses the occurrence of condensation on the surface of the air knife 7. As a result, the air shower 8 effectively prevents the generation of a watermark on the display panel substrate 3 due to the drop of water droplets generated by condensation.

  In order to prevent wet air from leaking from the washing chamber 1 to the drying chamber 2, the exhaust devices 11, 12 are configured so that the exhaust device 11 has a higher speed than the exhaust speed at which the exhaust device 12 exhausts the drying chamber 2. It is preferable to operate so that the exhaust speed at which 1 is exhausted becomes larger. By operating the exhaust devices 11 and 12 in this way, an air flow from the drying chamber 2 toward the rinsing chamber 1 is generated, and damp air is prevented from leaking from the rinsing chamber 1 to the drying chamber 2. The exhaust speed of the exhaust devices 11 and 12 can be adjusted by adjusting the opening degree of the exhaust valves 11a and 12a.

  In order to further effectively prevent the moist air from reaching the air knife 7, it is preferable to provide a partition plate 13 between the air knife 7 and the air shower 8. The partition plate 13 is provided in a direction perpendicular to the transport direction A. The partition plate 13 inhibits the generation of airflow toward the air knife 7, thereby effectively suppressing the occurrence of condensation on the surface of the air knife 7.

It should be noted that the role of the air shower 8 is not to dry the display panel substrate 3 completely unlike the air knife 7. Due to this difference in role, the direction suitable as the direction B in which the air knife 7 ejects dry air is different from the direction suitable as the direction C in which the air shower 8 ejects dry air. To blow away the hot water W efficiently direction B in which air knife 7 spewing dry air, it is preferable to be oriented such that the major surface and the angle theta ₁ of the display panel substrate 3 is reduced. On the other hand, the direction C in which the air shower 8, which aims to shut off the moist air from the air knife 7, blows dry air, is the angle θ ₂ formed by the direction C and the main surface of the display panel substrate 3. However, it is preferable that the direction B is directed in a direction larger than an angle θ ₁ formed by the direction B and the main surface of the display panel substrate 3.

The difference between the roles of the air knife 7 and the air shower 8 is that the preferred height of the air knife 7 (that is, the distance from the main surface of the display panel substrate 3 to the air knife 7 in the vertical direction) and the preferred choice of the air shower 8 The difference in height (that is, the distance from the main surface of the display panel substrate 3 to the air shower 8 in the vertical direction). In order to reduce the angle θ ₁ formed by the direction B of blowing the dry air 7a and the main surface of the display panel substrate 3, the air knife 7 has a low height (that is, the main surface of the display panel substrate 3 in the vertical direction). It is preferable that the distance from the air knife 7 is short. On the other hand, it is not suitable that the height of the air shower 8 is low. The air shower 8 is preferably separated from the display panel substrate 3 in order to prevent condensation on the surface. Therefore, the air shower 8 is preferably provided at a position higher than the air knife 7.

  In another embodiment of the present invention, as shown in FIG. 2, an air shower 8 that blows dry air is replaced with a spray nozzle 8 'that mixes dry air and cold water and jets a gas-liquid mixed fluid. Has been. The temperature of the cold water used for the generation of the gas-liquid mixed fluid is lower than the hot water ejected by the water washing nozzle 4 of the water washing chamber 1.

  FIG. 3 shows a supply system 13 for supplying dry air and cold water to the spray nozzle 8 'used in another embodiment. The supply system 13 includes an air pipe 14 a to which compressed dry air is supplied, a cold water pipe 14 b to which cold water is supplied, pressure control valves 15 a and 15 b, pressure gauges 16 a and 16 b, and a mix chamber 17. ing. In response to the pressures of the air pipe 14a and the cold water pipe 14b respectively measured by the pressure gauges 16a and 16b, the opening degree of the pressure regulating valves 15a and 15b is controlled. The supplied dry air and cold water are mixed in the mix chamber 17 and are jetted from the spray nozzle 8 'as a gas-liquid mixed fluid 8a'.

  Referring to FIG. 2, the spray nozzle 8 ′, like the air shower 8, generates a flow of air in the direction opposite to the conveying direction A by ejecting a gas-liquid mixed fluid, and the moist air is applied to the air knife 7. The amount of hot water W remaining on the display panel substrate 3 is further reduced. In addition, the spray nozzle 8 ′ cools the display panel substrate 3 by spraying a gas-liquid mixed fluid containing cold water onto the display panel 3, and suppresses generation of vapor from the surface of the display panel substrate 3. By these actions, the spray nozzle 8 ′ more effectively suppresses the occurrence of condensation on the surface of the air knife 7.

  The display panel processing apparatus shown in FIGS. 1 and 2 is preferably used in a plasma display panel manufacturing process. In the manufacturing process of a plasma display panel, a chemical treatment process for treating a display panel substrate using a chemical liquid, and a water washing / drying process for washing the display panel substrate with water and further drying after the chemical treatment process. The display panel processing apparatus of FIGS. 1 and 2 is preferably used in this washing / drying step.

  FIG. 4 illustrates a plasma display panel 30 assembled by assembling a display panel substrate manufactured using the display panel processing apparatus of FIG. The plasma display panel 30 is formed of a front substrate 31 and a rear substrate 32 which are plasma display panel substrates manufactured using the display panel processing apparatus of FIG. The front substrate 31 is formed of a first transparent glass substrate 33, a transparent dielectric layer 34 bonded to the back side of the first transparent glass substrate 33, and a surface protective layer 35 bonded to the back side of the transparent dielectric layer 34. Has been. A scan electrode 36 and a sustain electrode 37 are disposed between the first transparent glass substrate 33 and the transparent dielectric layer 34. Scan electrode 36 and sustain electrode 37 are arranged in parallel to each other. Scan electrode 36 and sustain electrode 37 are each formed of a transparent electrode and a bus electrode. The transparent dielectric layer 34 covers the scan electrode 36 and the sustain electrode 37.

  The back substrate 32 is formed of a second transparent glass substrate 38, a white dielectric layer 39 bonded to the front side of the second transparent glass substrate 38, and a plurality of partition walls 41 bonded to the front side of the white dielectric layer 39. Has been. The partition wall 41 partitions the display cell. A data electrode 42 is disposed between the second transparent glass substrate 38 and the white dielectric layer 39. The data electrode 42 is orthogonal to the scan electrode 36 and the sustain electrode 37. The white dielectric layer 39 covers the data electrode 42. On the side surface of the partition wall 41 and the front surface of the white dielectric layer 39, a phosphor layer 43 that converts ultraviolet rays generated by the discharge of the discharge gas into visible light is formed. The phosphor layer 43 is coated in three primary colors R, G, and B for each cell.

  The front substrate 31 and the rear substrate 32 are assembled while being fixed to each other with a gap provided between the front substrate 31 and the rear substrate 32. The width of the gap is designed to be about 100 μm. The periphery of the side surfaces of the front substrate 31 and the back substrate 32 is hermetically sealed with a sealing material, and the gap is formed in a sealed space. The sealed space is filled with helium, neon, xenon, or a mixed gas containing these. A vent pipe (not shown) that passes through the second transparent glass substrate 38 and opens in a sealed space is passed through the back substrate 32. The opening at the outer end of the vent pipe is connected to an exhaust / gas filling device (not shown), and after the air and other gases are sucked from the opening and exhausted, the aforementioned gas is sealed from the opening. After the injection, the opening is chipped on by the heating means and the opening end is closed, and the injected gas is hermetically filled in the sealed space.

  The side peripheral surfaces 44 of the first transparent glass substrate 33 and the second transparent glass substrate 38 of the plasma display panel 30 that require such hermeticity are formed as planes orthogonal to the above-described one surface P1. A fusing material is applied to the side peripheral surface 44.

  The plasma display panel 30 of FIG. 4 is preferably incorporated in the plasma display device 50 shown in FIG. The plasma display device 50 includes an analog interface 51 and a plasma display panel module 52.

  The analog interface 51 includes a Y / C separation circuit 53 including a chroma decoder, an A / D conversion circuit 54, an image format conversion circuit 55, a synchronization signal control circuit 57 including a PLL circuit 56, and an inverse γ conversion circuit 58. And a system control circuit 59 and a PLE control circuit 61. The analog interface 51 converts the received analog video signal (analog RGB signal 62 and analog video signal 63) into a digital video signal, and then outputs the digital video signal 64 to the plasma display panel module 52. More specifically, the analog video signal 63 transmitted from the TV tuner is decomposed into luminance signals of each color of RGB by the Y / C separation circuit 53, and then digitized by the A / D conversion circuit 54, and the inverse γ conversion circuit. The digital video signal 64 is subjected to inverse γ conversion at 58. When the pixel configuration of the plasma display panel module 52 is different from the pixel configuration of the analog video signal 63, after the A / D conversion, the image format conversion circuit 55 converts the pixel configuration into an appropriate image format, and then the inverse γ conversion circuit 58 It is converted into a digital video signal 64 which has been subjected to inverse γ conversion.

  The PLL circuit 56 included in the synchronization signal control circuit 57 generates a sampling clock 65 and a data clock signal 66 based on the horizontal synchronization signal supplied simultaneously with the analog video signal 63. The sampling clock 65 and the data clock signal 66 are output from the analog interface 51 and input to the plasma display panel module 52. The PLE control circuit 61 increases the display luminance when the average luminance level is equal to or lower than a predetermined value, and decreases the display luminance when the average luminance level is equal to or higher than the predetermined value. The system control circuit 59 generates various control signals 67. The control signal 67 is output from the analog interface 51 and input to the plasma display panel module 52.

  The plasma display panel module 52 includes a digital signal processing / control circuit 68, a panel portion 69, and an in-module power supply circuit 71 incorporating a DC / DC converter. The panel part 69 includes the plasma display panel 30 described above. The digital signal processing / control circuit 68 includes an input interface signal processing circuit 72, a frame memory 73, a memory control circuit 74, and a driver control circuit 75. The average luminance level of the digital video signal 64 input from the analog interface 51 to the input interface signal processing circuit 72 is calculated by an input signal average luminance level calculation circuit (not shown) in the input interface signal processing circuit 72, For example, it is output to the PLE control circuit 61 as 5-bit data. The PLE control data 76 calculated by the PLE control circuit 61 corresponding to the average brightness level is input to a brightness level control circuit (not shown) in the input interface signal processing circuit 72.

  The frame memory 73 temporarily stores the digital RGB control signal input to the input interface signal processing circuit 72 as video data. Then, in accordance with a control signal from the memory control circuit 74, video data having a configuration required by the PDP driver is output to the panel portion 69 at a predetermined timing. The memory control circuit 74 outputs a control signal for controlling the frame memory 73 to the frame memory 73. The driver control circuit 75 outputs a driver control signal for controlling each driver to the panel portion 69.

  The panel portion 69 is formed of the plasma display panel 30, a scanning driver 81 that drives the scanning electrode 36 (see FIG. 4), and a data driver 82 that drives the data electrode 42 (see FIG. 4). The panel portion 69 further includes a high voltage pulse circuit 83 that supplies a pulse voltage to the plasma display panel 30, the scan driver 81, and the data driver 82, and a power recovery circuit 86 that recovers surplus power from the high voltage pulse circuit 83. . It has.

  The plasma display panel 30 has 1365 × 768 pixels arranged in 1365 (pieces) × 768 (pieces). In the plasma display panel 30, the scanning driver 81 controls the scanning electrode 36 and the data driver 82 controls the data electrode 42, thereby controlling lighting or non-lighting of a predetermined pixel among the number of pixels. Perform the default display.

  A logic power supply (not shown) supplies logic power to the digital signal processing / control circuit 68 and the panel portion 69 via the power input terminal 84. The in-module power supply circuit 71 is supplied with a DC power supply from a display power supply (not shown) via a power input terminal 85, converts the DC power voltage into a predetermined voltage, and supplies it to the panel portion 69. Yes.

  The digital signal processing / control circuit 68, the panel portion 69, and the in-module power supply circuit 71 are assembled as one module. The plasma display panel module 52 forms one module assembled in this way. The analog interface 51 is separated from the plasma display panel module 52 and is mechanically independent. The plasma display panel module 52 is electrically connected to the analog interface 51 through electrical wiring for transmitting a control signal 67, a digital video signal 64, a sampling clock 65, a data clock signal 66, PLE control data 76, and other signals. .

  After the analog interface 51 and the plasma display panel module 52 are formed separately, the analog interface 51 and the plasma display panel module 52 are incorporated into the casing of the plasma display device and are fixedly supported. 50 is assembled. The plasma display device 50 modularized in this way can manufacture the analog interface 51 and the plasma display panel module 52 separately from other equipment parts. For this reason, when the plasma display device 50 breaks down, the plasma display panel module 52 of the failed plasma display device 50 is replaced with another new plasma display device 50, and the plasma display device 50 is repaired. The repair time can be shortened.

FIG. 1 shows an embodiment of a display panel processing apparatus according to the present invention. FIG. 2 shows another embodiment of the display panel processing apparatus according to the present invention. FIG. 3 shows a supply system for supplying dry air and cold water to the spray nozzle in another embodiment. FIG. 4 shows an example of a plasma display panel manufactured by the display panel processing apparatus according to the present invention. FIG. 5 shows a plasma display device incorporating a plasma display panel manufactured by the display panel processing apparatus according to the present invention.

Explanation of symbols

1: Washing chamber 2: Drying chamber 3: Display panel substrate 4: Washing nozzle 5: Transfer port 6: Transfer device 7: Air knife 8: Air shower 9: Air flow 11, 12: Exhaust device 11a, 12a: Exhaust valve 13: Partition plate 14a: Air piping 14b: Cold water piping 15a, 15b: Pressure adjusting valve 16a, 16b: Pressure gauge 17: Mix chamber 30: Plasma display panel 31, 32: Display panel substrate 51: Analog interface 52: Plasma display panel module

Claims (12)

A flush room,
A rinsing device provided in the rinsing chamber for rinsing the display panel substrate;
A drying chamber having an opening for conveying to the washing chamber;
A transport device for transporting the display panel substrate from the washing chamber to the drying chamber through the transport port in a predetermined transport direction;
An air knife provided in the drying chamber for drying the display panel substrate;
In the drying chamber, provided upstream of the air knife in the transport direction, the dry air is blown out in a direction having a component opposite to the transport direction, and the dry air is ejected from the display panel. A display panel processing apparatus comprising a nozzle for spraying onto a substrate. The display panel processing apparatus according to claim 1,
The water washing device is for washing the display panel substrate with warm water,
The nozzle sprays a gas-liquid mixed fluid generated by mixing cold water having a temperature lower than that of the hot water and the dry air onto the display panel substrate. The display panel processing apparatus according to claim 1,
A first exhaust device for exhausting the drying chamber at a first exhaust speed;
A display panel processing apparatus, comprising: a second exhaust device that exhausts the flush chamber at a second exhaust speed greater than the first exhaust speed. The display panel processing apparatus according to claim 1,
In addition,
A display panel processing apparatus comprising a partition provided between the nozzle and the air knife in the drying chamber. A flush room with a transfer port;
A rinsing device provided in the rinsing chamber for rinsing the display panel substrate;
A drying chamber connected to the flushing chamber via the transfer port;
A transfer device for transferring the display panel substrate from the washing chamber to the drying chamber via the transfer port;
An air knife provided in the drying chamber for drying the display panel substrate;
A first exhaust device for exhausting the drying chamber at a first exhaust speed;
A display panel processing apparatus, comprising: a second exhaust device that exhausts the flush chamber at a second exhaust speed greater than the first exhaust speed. Treating the plasma display panel substrate with chemicals;
Rinsing the plasma display panel substrate treated with the chemical in a rinsing chamber;
Moving the plasma display panel substrate that has been rinsed toward a predetermined conveyance direction to move the plasma display panel substrate from the washing chamber into a drying chamber;
Spraying dry air from a nozzle provided in the drying chamber in a direction having a component opposite to the conveying direction, and blowing the dry air onto the plasma display panel substrate;
A plasma display panel manufacturing method comprising: drying the plasma display panel substrate with an air knife provided on the downstream side in the transport direction with respect to the nozzle. In the plasma display panel manufacturing method according to claim 6,
The plasma display panel substrate is washed with warm water using a plasma display panel manufacturing method. In the plasma display panel manufacturing method according to claim 7,
In addition,
A method for producing a plasma display panel, comprising: mixing cold water having a temperature lower than that of the hot water and the dry air to generate a gas-liquid mixed fluid, and spraying the gas-liquid mixed fluid onto the plasma display panel substrate by the nozzle. . In the plasma display panel manufacturing method according to claim 6,
The method of manufacturing a plasma display panel, wherein the nozzle is provided at a position where a distance from the plasma display panel substrate in a direction perpendicular to the transport direction is larger than a distance from the plasma display panel substrate to the air knife. In the plasma display panel manufacturing method according to claim 6,
The washing room is provided with an opening leading to the drying room,
The plasma display panel manufacturing method further includes:
Exhausting the drying chamber at a first exhaust speed;
Evacuating the flush chamber at a second pumping speed greater than the first pumping speed. Treating the plasma display panel substrate with chemicals;
After the chemical treatment step, washing the plasma display panel substrate in a washing chamber;
Transporting the washed plasma display panel substrate from the washing chamber to the drying chamber through a transport opening that opens to both the washing chamber and the drying chamber;
Drying the plasma display panel substrate with an air knife;
Exhausting the drying chamber at a first exhaust speed;
Evacuating the flush chamber at a second pumping speed greater than the first pumping speed. A first step of manufacturing a plasma display panel using the plasma display panel manufacturing method according to any one of claims 6 to 11,
A driving circuit for driving the plasma display panel, and a second step of manufacturing the plasma display panel as a module;
A method of manufacturing a plasma display device, comprising: a third step of electrically connecting an analog interface that converts an analog image signal to a digital image signal and supplies the digital image signal to the module electrically connected to the module.

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