200927995 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種鐵金屬基材之氮化處理方法 是關於可降低氣孔比例之鐵金屬基材之氮化處理方法。、 【先前技術】 Ο =於經統處理之1件具有耐高溫、耐疲 性及耐磨性等優異的特性，已廣泛運用於各領域中，= 頭、螺絲攻、壓鑄模、螺桿、連桿及齒輪凸輪等均有使用 1) f狀氮域财法為氣體統法，麵常係將一欲 2之鐵金屬基材放置於-氮化爐中，再將氨氣（NH3) =通入該氮化爐内，藉由將該鐵金屬基材加熱之一預定 使該減於該高溫環境及該鐵金驗材之催化下分 及魏㈤，部分氮軒將触鐵金屬基材之 合物層^以改良該鐵金屬基材之表面 1該魏爐内之壓力維持高於一大氣歷（正歷），以避 外界吸人王氣造成該鐵金屬基材氧域產生爆炸危險 ，如此，便可對該鐵金屬基材進行氮化處理。 金麗f —制之氮化處理方法為離子氮化法，其係將該鐵 5 ^材放置於錢化爐内，預先將爐内抽真空後導入氮 並將該氮化爐接上陽極，該鐵金屬基材接上陰極，於 下兩極間通以數百伏之直流電壓，此時該氮化爐 Μ氣將發生輝光放電形紅離子，藉由該正離子轟擊 Μ鐵金屬基材，使得該鐵金屬基材溫度上升，且該鐵金屬 200927995 基材表面受轟擊後所產生之元素將與說原子結合形成化合 ，，並吸附於該鐵金屬基材表面形成化合物層丨，如此^ 元成對該鐵金屬基材之氮化處理。 —般而言，上述習用鐵金屬基材之氮化處理方法具有 下列缺點’例如：習用之氣體氮化法中，由於該氮化爐内 之壓力較大’因此爐内之滲氮原子濃度相對較高，造成該 化合物層1亦相對較厚，使得該鐵金屬基材表面過脆，進 而造成化合物層1易碎之缺點；再者，如第1圖所示，由 於該氮化爐内參氮原子濃度相對較高，造成大量的活性氮 原子無法與該鐵金屬基材之原子結合形成該化合物，而彼 此相互結合形成氮氣分子並於該化合物層1中聚集形成氣 泡11」造成該化合物層i之孔隙度過高，因而具有強度降 ^低、容易剝離以及耐蝕性劣化之缺點。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nitriding treatment method for an iron metal substrate, which relates to a nitriding treatment method for an iron metal substrate which can reduce the ratio of pores. [Prior Art] Ο = One of the elements processed by the system has excellent characteristics such as high temperature resistance, fatigue resistance and wear resistance, and has been widely used in various fields, such as head, screw tapping, die-casting mold, screw, and even Rods and gear cams are used. 1) The f-nitrogen field method is a gas method. The surface of the iron metal substrate is placed in a nitriding furnace, and the ammonia gas (NH3) is passed. Into the nitriding furnace, by heating one of the iron metal substrates, the catalyzed lowering of the high-temperature environment and the iron-gold material and the Wei (5), the nitrogen-based metal substrate is The layer is modified to improve the surface of the iron metal substrate. The pressure in the furnace is maintained above an atmospheric calendar (positive calendar) to avoid the danger of explosion of the oxygen domain of the iron metal substrate caused by the external attraction. In this way, the ferrous metal substrate can be nitrided. The nitriding treatment method of Jinli f is made by ion nitriding method, in which the iron material is placed in a niobium furnace, the furnace is vacuumed, nitrogen is introduced, and the nitriding furnace is connected to the anode. The iron metal substrate is connected to the cathode, and a direct current voltage of several hundred volts is applied between the lower two poles. At this time, the neon gas of the nitriding furnace will generate glow discharge red ions, and the positive ions bombard the ruthenium iron metal substrate. The temperature of the iron metal substrate is increased, and the element produced by the bombardment of the surface of the iron metal 200927995 is combined with the atom to form a compound layer, and adsorbed on the surface of the iron metal substrate to form a compound layer, such that The nitriding treatment of the iron metal substrate. In general, the nitriding treatment method of the above-mentioned conventional iron metal substrate has the following disadvantages. For example, in the conventional gas nitriding method, since the pressure in the nitriding furnace is large, the nitriding atom concentration in the furnace is relatively Higher, causing the compound layer 1 to be relatively thick, so that the surface of the iron metal substrate is too brittle, thereby causing the disadvantage that the compound layer 1 is brittle; further, as shown in Fig. 1, due to the internal combustion of the nitriding furnace The nitrogen atom concentration is relatively high, causing a large amount of reactive nitrogen atoms to be unable to bond with the atoms of the iron metal substrate to form the compound, and mutually combine to form nitrogen molecules and aggregate in the compound layer 1 to form bubbles 11" to cause the compound layer Since the porosity of i is too high, there is a disadvantage that the strength is lowered, the peeling is easy, and the corrosion resistance is deteriorated.
Si 料，習轉子氛化法之設備成本較高，造成製作成 本之提升，再者，於該氮化爐内，各該鐵金屬基材之間需 保持-適當間距，以避免相鄰鐵金屬基材之間亦產生輝光 放電相互影響，而造成過度加熱之情形，因此該法可同時 處理之數量相對較低；再者，該鐵金屬基材係利用該輝土 放電方式進行加熱，若各該鐵金屬基材之厚薄不一，則各 =金屬基材之加熱速率不一，則無法使各該鐵金屬基材 3、到達相同處理溫度，因此，無法同時對不同外形之 金屬基材進行處理，造成使用上之不便利性；再者，該輝 先放電進行加熱之加熱均勻性不佳，造成該鐵金屬基材表 面之般度較不均勻’使得該化合物層1之均勻度較差，且 200927995 對於形狀複雜之鐵金屬基材與深孔亦無法處理。基於上述 原因’有必要進一步改良上述習用鐵金屬基材之氮化處理 方法。 【發明内容】 本發明之主要目的係提供一種鐵金屬基材之氮化處 理方法’其係利用一脈衝模式調整工作氣體之濃度，使得 本發明具有降低孔隙度及提升強度之功效。 ❹For the Si material, the equipment cost of the rotor vortexing method is higher, which leads to an increase in the production cost. Furthermore, in the nitriding furnace, it is necessary to maintain an appropriate spacing between the ferrous metal substrates to avoid adjacent iron metal. The glow discharges between the substrates also affect each other and cause excessive heating, so the method can simultaneously process the relatively low amount; further, the iron metal substrate is heated by the glow discharge method, if each When the thickness of the iron metal substrate is different, the heating rate of each metal substrate is different, and the iron metal substrate 3 cannot reach the same processing temperature. Therefore, it is impossible to simultaneously perform metal substrates of different shapes. The treatment causes inconvenience in use; furthermore, the uniformity of heating of the first discharge for heating is poor, and the surface of the iron metal substrate is less uniform, so that the uniformity of the compound layer 1 is poor. And 200927995 can not handle iron metal substrates and deep holes with complicated shapes. For the above reasons, it is necessary to further improve the nitriding treatment method of the above-mentioned conventional iron metal substrate. SUMMARY OF THE INVENTION The main object of the present invention is to provide a method for nitriding a ferrous metal substrate, which utilizes a pulse mode to adjust the concentration of the working gas, so that the present invention has the effect of reducing porosity and enhancing strength. ❹
本發明之次要目的係提供一種鐵金屬基材之氮化處 理方法，其係於一低於一大氣壓之低壓環境下進行該氮化 處理’使得本發明具有降低工作氣體消耗量之功效。 根據本發明之鐵金屬基材之氮化處理方法，其包含步 _驟：將一待處理之鐵金屬基材置入一容室中，並對該容室 進行抽氣使該谷室内形成一壓力低於一大氣壓之低壓學 浼，加熱該容室，使該容室内之鐵金屬基材之溫度提升至 一工作溫度；藉由一脈衝模式將一工作氣體充入該容室内 、以對該鐵金>1基材表面騎氮化處理^藉此達成降低孔 隙度、工作氣體消耗量及提升強度之功效。 【實施方式】 為讓本發明之上述及其他目的、特徵及優點能更明顯 ’’下文特舉本發明之較佳實施例，並配合所附圖式， 作詳細說明如下： 凊參照第2 ®所示，本發明第-實補之鐵金屬基材 其从化處理方法之第—步驟S1G係··將-待處理之鐵金屬 土置人今至中，並對該容室進行抽氣，使該容室内形 200927995 成一壓力低於-大氣壓之低壓環境。更詳言之，於本實施 例^該鐵金屬基材係選擇為鋼材。該容室係為一可密閉 之各至’以作為氮化爐用；該容室係設有—開口、一相對 應該開π之蓋體及-加歸置；該鐵金屬基材經由該開口 ^ k谷至内，並藉由该蓋體使該容室形成一密閉空間； -亥=熱農置係用以調整該容室内之卫作溫度；該容室另藉 由管線連接-進氣裝置及—減裝置（如㈣），該進氣裝 置係用以將—預錢體充人該容室中；該抽氣裝置係用以 將該容室内之氣體抽出形成該低壓環境，該低壓環境之壓 力係選擇介於(UH 1CU毫巴（mBa〇之間，在本實施g 中，該低壓環境之壓力為0.05毫巴（mBar)。 請再參照第2圖所示，本實施例之鐵金屬基材之氮化 處理方法的第二步驟S20係：加熱該容室，使該容室内之 鐵金屬基材之溫度提升至一工作溫度。更詳言之，藉由該 容室之加熱裝置進行加熱，以使該容室内之鐵金屬基材的 溫度提升至該工作溫度。其中，較佳係利用該進氣裝置通 入一加熱氣體，以使該容室内之加熱更加均勻，該工作溫 度係選擇介於550至600t之間，在本實施例中，該工^ 溫度為570°C，該加熱氣體係選擇為氮氣（N2)，且該加熱 氣體通入之壓力係選擇介於700至1〇〇〇毫巴之間，在本實 施例中，該加熱氣體通入之壓力為800毫巴。 請再參照第2圖所示，本實施例之鐵金屬基材之氮化 處理方法的第三步驟S30係：藉由一脈衝模式將一工作氣 體充入該谷至内，以對該鐵金屬基材表面進行氮化處理'' 200927995 更詳言之’該卫作氣體至少係包含 氨氣:Π:度下所分解產生之滲氮原子 該工作=中氨氣的濃度，進而降低氮化處理過程： 原子之=度，該脈衝模式係利用—進氣電 進 ΟA secondary object of the present invention is to provide a method of nitriding a ferrous metal substrate which is subjected to the nitriding treatment in a low pressure environment of less than one atmosphere. This allows the present invention to have a reduced working gas consumption. A method for nitriding a ferrous metal substrate according to the present invention comprises the steps of: placing a ferrous metal substrate to be treated into a chamber, and pumping the chamber to form a chamber in the valley a low pressure device having a pressure lower than one atmosphere, heating the chamber to raise the temperature of the iron metal substrate in the chamber to an operating temperature; charging a working gas into the chamber by a pulse mode to Iron gold > 1 substrate surface riding nitriding treatment ^ to achieve the effect of reducing porosity, working gas consumption and increasing strength. The above and other objects, features and advantages of the present invention will become more apparent <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; As shown in the first embodiment of the present invention, the iron-metal substrate of the present invention is subjected to the first step S1G of the treatment method, and the iron metal soil to be treated is placed in the middle and the middle, and the chamber is evacuated. The volume of the chamber 200927995 becomes a low pressure environment with a pressure lower than - atmospheric pressure. More specifically, in the present embodiment, the iron metal substrate is selected as a steel material. The chamber is a sealable portion for use as a nitriding furnace; the chamber is provided with an opening, a cover corresponding to π and a collocation; the ferrous metal substrate is through the opening ^ k Valley to the inside, and the chamber forms a confined space by the cover; - Hai = thermal farm is used to adjust the temperature of the toilet in the chamber; the chamber is connected by a pipeline - intake a device and a subtracting device (such as (4)), wherein the air intake device is configured to charge the pre-money body into the chamber; the air extracting device is configured to extract the gas in the chamber to form the low-pressure environment, the low-pressure environment The pressure of the environment is selected to be between (UH 1 CU mbar (mBa ,, in this embodiment g, the pressure of the low pressure environment is 0.05 mbar (mBar). Please refer to Fig. 2 again, the embodiment The second step S20 of the nitriding treatment method of the iron metal substrate is: heating the chamber to raise the temperature of the iron metal substrate in the chamber to a working temperature. More specifically, heating by the chamber The device is heated to raise the temperature of the iron metal substrate in the chamber to the operating temperature. The heating device is used to pass a heating gas to make the heating in the chamber more uniform. The operating temperature is selected to be between 550 and 600 t. In the embodiment, the temperature is 570 ° C. The heated gas system is selected to be nitrogen (N2), and the pressure of the heated gas is selected to be between 700 and 1 mbar. In the present embodiment, the pressure of the heated gas is 800 mbar. Referring to FIG. 2 again, the third step S30 of the nitriding treatment method for the iron metal substrate of the embodiment is: charging a working gas into the valley by a pulse mode to the iron Nitriding treatment on the surface of metal substrate '' 200927995 More specifically, 'the qi gas contains at least ammonia gas: 渗: the nitriding atom generated by decomposition, the work = the concentration of ammonia, and then reduce the nitriding Process: Atomic = degree, the pulse mode is utilized - intake air intake
裝置體充入該容室内，該進氣電磁閥之』 率係l擇為25 一人/小時，且氣體壓力係選擇為⑽至遍 毫巴之，。其中’初始進行氮化處理時，該鐵金屬基材表 面之渗IU子濃度並;f高’目此該玉錢财先選擇為純 氨氣，並通人2分鐘’峨立充分的滲_子濃度，接著 才將該工作氣錄換城氣、魏及絲之混合氣體，且 體積比例較佳係選擇為氮氣：氨氣：笑氣為28:70:2， 通入時間為3树。錢氣電賴之崎頻率、工作氣體 之組成成分及組成比例，以及工作氣體通入時間可視容室 大小、鐵金屬基材數量多寡、渗氮表面積大小及滲氮深1 而做調整，並不以前述數值為限。 X ^清再參照第2圖所不’進行該第三步驟S30之前較佳 係先進行-去鈍化程序S21。更詳言之，該去鈍化程序S21 係於弟一步驟S20維持該工作溫度1〇分鐘後，利用該抽氣 裝置將該容室内壓力抽至G」毫巴，以將該加熱氣體排= ，接著通入一活化氣體，以藉由該活化氣體於該鐵金屬羞 材表面形成一層氧化膜，使得後續第三步驟S3〇中之滲^ 原子可更容易於該鐵金屬基材表面著陸，並與該鐵金屬美 材共同形成-化合物層2;其中’該活化氣體係選擇為^ 200927995 氣。 . 請再參照第2圖所示，進行哕笛- 進仃該第二步驟S30後較佳係 .:實第溫至-冷卻溫度 f ^ Λ W 虱化處理後，關閉進氣裝 置及加熱裝置，並將該容室内抽直 溫至贼後即可將其取出。I’·鐵金屬基材降 美Γ、第1至3騎示’ #制本實施例之鐵金屬 ❹ 二鐵方法時首先進行該第-步驟S10，將 =鐵金屬基材置人該容室中，並利_域裝置對該容室 =仃抽乳’使該谷室内形成i力低於_大氣壓之低藏 =以避免該谷至内原有之氣體（如空氣）或雜質影響後 1續鼠化處理之效率；接著，進行該第二步驟㈣，通入該 d加熱氣體，並利用該加熱裝置加熱該容室，使該鐵金屬基 材之溫度提升至該工作溫度；再進行該去純化程序S21， 抽氣將該加熱氣體排除，再充入該活化氣體，以活化該鐵 ❹ 麵基材之表面並促喊核’料提升賴之氣化處理效 率’接著進行該第二步驟S30，將該工作氣體充入該容室 内-預定時間後’該工作氣體於該工作溫度下分解產生渗 氮原子，使該鐵金屬基材表面形成足夠濃度之滲氮原子， • 且該滲氮原子與該鐵金屬基材之原子共同結合形成該化合 ' 物層2，接著藉由該進氣電磁閥控制該進氣裝置以該脈衝 模式將該工作氣體充入該容室内，以降低該滲氮原子之濃 度，因此，該渗氮原子有時間游移與該鐵金屬基材之原子 、、、n合，並減少渗氣原子之間彼此結合成氮分子之機會，進 200927995 而降低該化合物層2中之氣泡產生率及孔隙度；最後進行 . »纟冷卻程序S31 ’使該鐵金屬基材於低壓環境下進行冷卻 ‘ ，如此便完成該鐵金屬基材之氮化處理方法。 睛參照第1及3圖所示，第！圖為經習用氛化處理後 之鐵金屬基材剖面；第3圖為經本發明之鐵金屬基材之| 化處理方法處理後的鐵金屬基材表面之剖面圖；可明顯觀 察到第1圖之鐵金屬基材的化合物層丨氣孔較多，且具有 明顯裂痕；她之下，經本發明處理後所形成之化合物層 0 2刹面明顯較為緻密’且無裂痕；因此本發明之鐵金屬基 材之氮化處理方法確實具有降低孔隙度及增進強度之功效 〇 -11 如上所述，相較於習用鐵金屬基材之氮化處理方法， 由於爐内之滲氮原子濃度相對較高，造成活性氮原子徠此 相彡結合形成氮氣分子並於該化合物層i中聚集形成氣泡 ，造成該化合物層1之孔隙度過高，因而具有強度降低、 容易剝離以及耐蝕性劣化之缺點；再者，習用離子氮化法 ® 具有s又備成本較咼、可同時處理之數量相對較低、無法同 時對不同外形之鐵金屬基材進行處理及加熱均勻性不佳等 缺點。反觀本發明利用該脈衝模式控制該工作氣體之充入 • 壓力，並於該低壓環境下進行氮化處理，藉此達成降低孔 隙度、工作氣體消耗量及提升強度之功效。 ” 雖然本發明已利用上述較佳實施例揭示，然其並非用 以隊定本發明，任何熟習此技藝者在不脫離本發明之精神 和範圍之内，相對上述實施例進行各種更動與修改仍屬本 —11 一 200927995 發明所保護之技術範疇，因此本發明之保護範圍當視後附 之申請專利範圍所界定者為準。 ' ❹ _ 12—— 200927995 【圖式簡單說明】 第1圖：習用氮化處理方法處理後之鐵金屬基材的剖視 〇 ‘ 第2圖：本發明較佳實施例之鐵金屬基材之氮化處理方 法的流程圖。 第3圖：本發明之氮化處理方法處理後之鐵金屬基材的 剖視。 ❹ 【主要元件符號說明】 1 化合物層 11 氣泡 2 化合物層 ❹ —13 —The device body is charged into the chamber, and the rate of the intake solenoid valve is selected to be 25 persons/hour, and the gas pressure is selected to be (10) to mbar. Wherein 'in the initial nitriding treatment, the surface of the iron metal substrate is osmotic concentration; f high', the jade money first selects pure ammonia gas, and passes through 2 minutes' standing full penetration _ Sub-concentration, then the working gas is changed to the mixed gas of city gas, Wei and silk, and the volume ratio is preferably selected as nitrogen: ammonia gas: laughing gas is 28:70:2, and the access time is 3 trees. The frequency of the gas and electricity Laisaki, the composition and composition ratio of the working gas, and the working gas access time can be adjusted according to the size of the chamber, the number of iron metal substrates, the size of the nitriding surface, and the depth of nitriding. Limited to the above values. It is preferable to perform the de-passivation process S21 before performing the third step S30 by referring to Fig. 2 again. More specifically, the depassivation process S21 is performed after the first step S20 is maintained at the operating temperature for 1 minute, and the chamber is pumped to G" mbar by the air extracting device to discharge the heating gas = Then, an activation gas is introduced to form an oxide film on the surface of the ferrous metal material by the activation gas, so that the osmotic atoms in the subsequent third step S3 更 can be more easily landed on the surface of the ferrous metal substrate, and Together with the ferrous metal material, a compound layer 2 is formed; wherein 'the activation gas system is selected to be 200927995 gas. Please refer to Fig. 2 again to perform the second step S30 after the whistle-intake.: The actual temperature to the cooling temperature f ^ Λ W After the deflation treatment, the air intake device and the heating device are turned off. And take the room out to the thief and then take it out. I'·Iron metal substrate Γ美Γ,第1至三骑示'# The iron metal ❹ of the present embodiment is the first step S10, and the iron metal substrate is placed in the chamber. In the middle, the _ domain device for the chamber = 仃 pumping 'make the valley indoor i-force is lower than _ atmospheric pressure low = to avoid the valley to the original gas (such as air) or impurities after the continuation The efficiency of the mouse treatment; then, performing the second step (4), introducing the d heating gas, and heating the chamber by the heating device to raise the temperature of the iron metal substrate to the working temperature; Purification procedure S21, pumping the heated gas out, and refilling the activating gas to activate the surface of the swarf surface substrate and urging the nucleus to improve the gasification treatment efficiency. Then proceeding to the second step S30 Filling the working gas into the chamber - after a predetermined time, the working gas is decomposed at the working temperature to generate a nitriding atom, so that a sufficient concentration of nitriding atoms is formed on the surface of the ferrous metal substrate, and the nitriding atom Forming the same with the atoms of the iron metal substrate Combining the layer 2, and then controlling the air intake device to charge the working gas into the chamber in the pulse mode by the intake solenoid valve to reduce the concentration of the nitriding atom, and therefore, the nitriding atom has time The migration is combined with the atoms of the iron metal substrate, and n, and reduces the chance of the gas-permeable atoms being combined with each other to form nitrogen molecules. In 200927995, the bubble generation rate and porosity in the compound layer 2 are lowered; »纟The cooling process S31 'cools the iron metal substrate in a low pressure environment', thus completing the nitriding treatment of the iron metal substrate. The eye is shown in Figures 1 and 3, the first! The figure shows a cross section of the iron metal substrate after the conventional treatment; and Fig. 3 is a cross-sectional view of the surface of the iron metal substrate treated by the chemical treatment method of the iron metal substrate of the present invention; The compound layer of the iron metal substrate has a large number of pores and has obvious cracks; underneath, the compound layer formed by the treatment of the present invention has a relatively dense '0 brake face' and no cracks; therefore, the iron metal base of the present invention The nitriding treatment method of the material does have the effect of reducing the porosity and improving the strength. 如上-11 As described above, the nitriding treatment method of the iron metal substrate is relatively high due to the relatively high nitriding atom concentration in the furnace. The reactive nitrogen atom is combined to form a nitrogen gas molecule and aggregates in the compound layer i to form a bubble, which causes the porosity of the compound layer 1 to be too high, thereby having the disadvantages of reduced strength, easy peeling, and deterioration of corrosion resistance; The conventional ion-nitriding method has a relatively low cost and can be processed at the same time. The amount of iron metal substrate can be processed and heated uniformly at the same time. Poor and other shortcomings. In contrast, the present invention utilizes the pulse mode to control the charging pressure of the working gas, and performs nitriding treatment in the low pressure environment, thereby achieving the effects of reducing the porosity, the working gas consumption, and the strength. Although the present invention has been disclosed in the above-described preferred embodiments, it is not intended to limit the invention, and various modifications and changes to the above embodiments are possible without departing from the spirit and scope of the invention. The scope of protection of the present invention is defined by the scope of the appended claims. ' ❹ _ 12 — 200927995 Sectional view of a ferrous metal substrate treated by a nitriding treatment process. FIG. 2 is a flow chart showing a nitriding treatment method of an iron metal substrate according to a preferred embodiment of the present invention. FIG. 3: nitriding treatment of the present invention A cross-sectional view of the treated iron metal substrate. ❹ [Main component symbol description] 1 Compound layer 11 Bubble 2 Compound layer ❹ —13 —