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CN116377376A - A method for low-temperature ion carbonitriding of nickel-based alloys - Google Patents

A method for low-temperature ion carbonitriding of nickel-based alloys Download PDF

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CN116377376A
CN116377376A CN202310152410.7A CN202310152410A CN116377376A CN 116377376 A CN116377376 A CN 116377376A CN 202310152410 A CN202310152410 A CN 202310152410A CN 116377376 A CN116377376 A CN 116377376A
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nickel
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carbonitriding
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曹驰
陈志林
张春华
张果林
林家豪
罗丽萍
陈贤武
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Wenzhou Pump Valve Engineering Research Institute Of Lanzhou University Of Technology
Lanzhou University of Technology
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
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Abstract

本发明属于金属表面硬化处理技术领域,为了解决采用常规离子碳氮共渗方法对镍基合金进行表面处理后,渗层厚度低,耐腐蚀性下降的问题,本发明公开了一种镍基合金低温离子碳氮共渗的方法。该方法首先将镍基合金工件放入离子渗扩炉内,并将离子渗扩炉内的气压抽真空,然后通入氩气进行辉光轰击,分别通入乙炔、氮气和氢气进行高压力离子渗碳渗氮,最后使用配方清洗剂洗去表面的金属氮化物。通过采用本发明的镍基合金低温离子碳氮共渗的方法,可以使镍基合金表面形成具有一定厚度且厚度均匀的硬化层,从而使镍基合金在保持原有耐蚀性的同时具有良好的硬度与耐磨性。

Figure 202310152410

The invention belongs to the technical field of metal surface hardening treatment. In order to solve the problem that the thickness of the permeated layer is low and the corrosion resistance is reduced after the surface treatment of the nickel-based alloy is carried out by the conventional ion carbonitriding method, the invention discloses a nickel-based alloy A method of low temperature ion carbonitriding. In this method, the nickel-based alloy workpiece is first placed in the ion diffusion furnace, and the air pressure in the ion diffusion furnace is evacuated, then argon gas is introduced for glow bombardment, and acetylene, nitrogen and hydrogen are respectively introduced for high-pressure ionization. Carburizing and nitriding, and finally using a formula cleaner to wash off the metal nitrides on the surface. By adopting the method for low-temperature ion carbonitriding of nickel-based alloys of the present invention, a hardened layer with a certain thickness and uniform thickness can be formed on the surface of nickel-based alloys, so that the nickel-based alloys have good corrosion resistance while maintaining the original corrosion resistance. hardness and wear resistance.

Figure 202310152410

Description

一种镍基合金低温离子碳氮共渗的方法A method for low-temperature ion carbonitriding of nickel-based alloys

技术领域technical field

本发明涉及金属表面强硬化处理技术领域,更具体地说,涉及一种镍基合金低温离子碳氮共渗的方法。The invention relates to the technical field of metal surface hardening treatment, and more specifically relates to a method for low-temperature ion carbonitriding of nickel-based alloys.

背景技术Background technique

镍基合金是一种重要的战略性金属材料,其具有良好的耐蚀性和抗氧化性,并且还有特殊的电磁学、记忆性等功能类性能,是当前国内外研究的热点金属之一。但是镍基合金的耐磨性等其他力学性能并不理想,大大限制了镍基合金的产业应用,因此可以使用离子碳氮共渗提高其力学性能。Nickel-based alloy is an important strategic metal material. It has good corrosion resistance and oxidation resistance, and also has special functional properties such as electromagnetics and memory. It is one of the hot research metals at home and abroad. . However, the wear resistance and other mechanical properties of nickel-based alloys are not ideal, which greatly limits the industrial application of nickel-based alloys. Therefore, ion carbonitriding can be used to improve their mechanical properties.

碳氮共渗是在一定温度、一定介质下使碳、氮原子渗入工件表面的化学表面热处理工艺。这种工艺可以在镍基合金上产生一层硬化层,它一定程度上结合了渗碳处理硬化深度大和渗氮处理硬度高的优点,使工件具有很高的硬度、热稳定性和弥散度的同时硬化渗层深度也大,因而材料的力学性能得到较大提高。Carbonitriding is a chemical surface heat treatment process that infiltrates carbon and nitrogen atoms into the surface of a workpiece at a certain temperature and in a certain medium. This process can produce a hardened layer on the nickel-based alloy. It combines the advantages of large hardening depth of carburizing treatment and high hardness of nitriding treatment to a certain extent, so that the workpiece has high hardness, thermal stability and dispersion. At the same time, the depth of the hardened infiltration layer is also large, so the mechanical properties of the material are greatly improved.

虽然镍基合金通过离子渗氮可以获得性能较好的硬化层,但是在进行镍基合金离子渗氮时,往往会将镍基合金渗氮层中的大部分Cr离子以含铬氮化物的形式析出,使得镍基合金的耐蚀性有所下降。而且传统的镍基合金离子渗氮后,表面会形成以CrN和Cr2N3等物质为主的钝化膜阻碍碳氮共渗的进行,导致镍基合金离子渗氮所形成的氮化层薄,并且厚度不均匀。因此提出了对镍基合金低温离子碳氮共渗的方法,能够在维持其耐蚀性的前提下提升硬度和耐磨性。Although nickel-based alloys can obtain a hardened layer with better performance through ion nitriding, most of the Cr ions in the nitriding layer of nickel-based alloys are often in the form of chromium-containing nitrides during ion nitriding of nickel-based alloys. Precipitation reduces the corrosion resistance of nickel-based alloys. Moreover, after the traditional nickel-based alloy ion nitriding, a passivation film mainly composed of CrN and Cr2N3 will be formed on the surface to hinder the progress of carbonitriding, resulting in a thin nitride layer formed by nickel-based alloy ion nitriding, and Uneven thickness. Therefore, a low-temperature ion carbonitriding method for nickel-based alloys is proposed, which can improve hardness and wear resistance while maintaining its corrosion resistance.

发明内容Contents of the invention

为了解决采用碳氮共渗处理方法对镍基合金进行表面处理后,存在耐蚀性降低、氮化层厚度薄且厚度不均的问题,本发明提出了一种全新的镍基合金碳氮共渗的方法。通过采用本发明的镍基合金碳氮共渗处理工艺,并使用酸性清洗剂进行酸洗后可以去除表面氮化物,从而使镍基合金在保持原有耐蚀性的同时具有良好的硬度与耐磨性。In order to solve the problems of reduced corrosion resistance, thin and uneven thickness of the nitrided layer after the surface treatment of the nickel-based alloy by the carbonitriding treatment method, the present invention proposes a brand new carbonitrided nickel-based alloy. method of infiltration. By adopting the nickel-based alloy carbonitriding treatment process of the present invention, and using an acidic cleaning agent for pickling, the surface nitrides can be removed, so that the nickel-based alloy has good hardness and corrosion resistance while maintaining the original corrosion resistance. Abrasive.

为实现上述目的,本发明提供了如下技术方案:To achieve the above object, the present invention provides the following technical solutions:

一种镍基合金低温离子碳氮共渗的方法,包括如下步骤:A method for low-temperature ion carbonitriding of nickel-based alloys, comprising the steps of:

第一步:将完成表面清洁和烘干处理的镍基合金工件放入离子渗 扩炉内,并将离子渗扩炉内的气压抽真空至10Pa以下;The first step: put the nickel base alloy workpiece that has been cleaned and dried on the surface into the ion diffusion furnace, and evacuate the air pressure in the ion diffusion furnace to below 10Pa;

第二步:通入氩气,设定电压为750~850V,调整气体压力小于80Pa,开启辉光并轰击0.5~2h,其中轰击的具体时间可以是0.5h;Step 2: Introduce argon gas, set the voltage to 750-850V, adjust the gas pressure to less than 80Pa, turn on the glow and bombard for 0.5-2h, and the specific time of bombardment can be 0.5h;

第三步:关掉氩气,向离子氮化炉内通入乙炔和氢气进行离子轰击,调整气体比例提高气压至100~300Pa,使离子渗扩炉内的温度达到500~550℃,并保温2~10h,之后关闭乙炔气体,待炉内温度冷却至450℃以下,通入氮气,打开离子渗扩炉,设定温度在400~450℃并进行离子渗氮1~5h;Step 3: Turn off the argon gas, feed acetylene and hydrogen into the ion nitriding furnace for ion bombardment, adjust the gas ratio and increase the air pressure to 100-300Pa, make the temperature in the ion permeation furnace reach 500-550°C, and keep warm 2~10h, then turn off the acetylene gas, wait for the temperature in the furnace to cool down to below 450°C, feed nitrogen gas, turn on the ion permeation furnace, set the temperature at 400~450°C and carry out ion nitriding for 1~5h;

第四步:对完成低温离子碳氮共渗的镍基合金使用酸性清洗剂 进行酸洗。Step 4: Pickling the nickel-based alloy that has completed low-temperature ion carbonitriding with an acidic cleaning agent.

通过采用上述技术方案,离子碳氮共渗是利用辉光放电原理,渗入气体电离产生的活性氮、碳原子,在工件表面吸附后向内部扩散形成硬化层的化学热处理工艺。将工件作为阴极放入通有含氮介质的负压容器中,炉壁作为阳极通以直流电,介质中的氮、氢原子被电离,在强电场的作用下,轰击金属表面,离子的动能转化为热能,加热至所需温度,氮、碳原子被工件表面吸收,并向内部扩散形成氮、碳化物。本发明相对镍基合金进行常规碳氮共渗改进为两段式离子碳氮共渗,即在离子碳氮共渗之前,首先采用高压力氩离子溅射镍基合金表面,达到去除钝化膜和表面完全活化的目的,保证硬化层的厚度;然后进行离子碳氮共渗,使镍基合金表面达到溅射和沉积过程的动态平衡,促进碳、氮原子的快速渗入,保证硬化层的厚度均匀性,并且本发明通过对时间和温度的调整优化,在保证加工效率和加工成本并且不降低镍基合金耐腐蚀性前提下,使镍基合金表面形成具有一定厚度且厚度均匀的高质量硬化层,从而使镍基合金获得良好的硬度和耐磨性。By adopting the above technical scheme, ion carbonitriding is a chemical heat treatment process that utilizes the principle of glow discharge to infiltrate active nitrogen and carbon atoms generated by gas ionization, absorb on the surface of the workpiece and diffuse to the inside to form a hardened layer. Put the workpiece as a cathode into a negative pressure container with a nitrogen-containing medium, and the furnace wall is used as an anode to pass a direct current, and the nitrogen and hydrogen atoms in the medium are ionized. Under the action of a strong electric field, the metal surface is bombarded, and the kinetic energy of the ions is converted When heated to the required temperature as thermal energy, nitrogen and carbon atoms are absorbed by the surface of the workpiece, and diffuse to the inside to form nitrogen and carbide. The present invention improves conventional carbonitriding of nickel-based alloys into two-stage ion carbonitriding, that is, before ion carbonitriding, firstly, high-pressure argon ions are used to sputter the surface of nickel-based alloys to remove the passivation film The purpose of fully activating the surface is to ensure the thickness of the hardened layer; then carry out ion carbonitriding, so that the surface of the nickel-based alloy can achieve a dynamic balance between the sputtering and deposition processes, and promote the rapid infiltration of carbon and nitrogen atoms to ensure the thickness of the hardened layer uniformity, and the present invention adjusts and optimizes the time and temperature, under the premise of ensuring the processing efficiency and processing cost and not reducing the corrosion resistance of the nickel-based alloy, the surface of the nickel-based alloy forms a high-quality hardened surface with a certain thickness and uniform thickness layer, so that nickel-based alloys can obtain good hardness and wear resistance.

优选的,在第二步进行氩气高压轰击,轰击时气压必须小于80Pa、电压高于750V,以保证足够强的溅射作用来消除镍基表面的钝化膜。Preferably, in the second step, argon high-pressure bombardment is carried out. During the bombardment, the gas pressure must be less than 80Pa and the voltage higher than 750V, so as to ensure a strong enough sputtering effect to eliminate the passivation film on the nickel-based surface.

优选的,在第三步中,进行高压力离子渗碳时离子氮化炉内的温度为500℃,进一步地,离子渗碳时间为8h,离子渗氮时间为4h,这样获得的氮化层厚度可以达到13.06μm。Preferably, in the third step, the temperature in the ion nitriding furnace is 500°C when performing high-pressure ion carburizing, and further, the ion carburizing time is 8 hours, and the ion nitriding time is 4 hours. The nitrided layer obtained in this way The thickness can reach 13.06μm.

优选的,在第四步中,酸洗时使用的酸性清洗剂配比为硝酸300ml/L,氢氟酸40ml/L,重铬酸钾25g/L,酸性缓蚀剂0.5g/L,表面活性剂2ml/L,余量为水;其中可具体采用配比为硝酸300ml/L,氢氟酸40ml/L,重铬酸钾25g/L,酸性缓蚀剂0.5g/L,表面活性剂2ml/L,余量为水。Preferably, in the fourth step, the proportioning of the acid cleaning agent used during pickling is 300ml/L of nitric acid, 40ml/L of hydrofluoric acid, 25g/L of potassium dichromate, 0.5g/L of acid corrosion inhibitor, and the surface The active agent is 2ml/L, and the balance is water; among them, the ratio of nitric acid 300ml/L, hydrofluoric acid 40ml/L, potassium dichromate 25g/L, acid corrosion inhibitor 0.5g/L, surfactant 2ml/L, the balance is water.

优选的,还包括第五步:对完成第四步的镍基合金工件进行抛光处理,达到表面粗糙度Ra<0.8,对完成酸洗、抛光后的镍基合金工件进行表面的清洗,晾干。Preferably, the fifth step is also included: polishing the nickel-based alloy workpiece completed in the fourth step to achieve a surface roughness Ra<0.8, cleaning the surface of the nickel-based alloy workpiece after pickling and polishing, and drying .

本发明的有益效果:在离子碳氮共渗之前,首先采用高压力氩离子溅射镍基合金表面,达到去除钝化膜和表面完全活化的目的,保证硬化层的厚度;通过对时间和温度的调整优化,在保证加工效率和加工成本并且不降低镍基合金耐腐蚀性前提下,使镍基合金表面形成具有一定厚度且厚度均匀的高质量硬化层,从而使镍基合金获得良好的硬度和耐磨性;通过使用酸性清洗剂进行酸洗后可以去除表面氮化物,从而使镍基合金在保持原有耐蚀性的同时具有良好的硬度与耐磨性。Beneficial effects of the present invention: before ion carbonitriding, first use high-pressure argon ion sputtering on the surface of the nickel-based alloy to achieve the purpose of removing the passivation film and fully activating the surface, and ensure the thickness of the hardened layer; by adjusting the time and temperature On the premise of ensuring the processing efficiency and processing cost without reducing the corrosion resistance of the nickel-based alloy, a high-quality hardened layer with a certain thickness and uniform thickness is formed on the surface of the nickel-based alloy, so that the nickel-based alloy can obtain good hardness and wear resistance; surface nitrides can be removed after pickling with an acidic cleaning agent, so that the nickel-based alloy has good hardness and wear resistance while maintaining the original corrosion resistance.

附图说明Description of drawings

图1为本发明具体实施例反映镍基合金工件硬化层厚度的示意图一;Fig. 1 is the schematic diagram one that reflects the thickness of the hardened layer of the nickel-based alloy workpiece in a specific embodiment of the present invention;

图2为本发明具体实施例反映镍基合金工件硬化层厚度的示意图二;Fig. 2 is the schematic diagram two reflecting the thickness of the hardened layer of the nickel-based alloy workpiece in a specific embodiment of the present invention;

图3为本发明具体实施例反映镍基合金工件硬化层厚度的示意图三;Fig. 3 is the schematic diagram three reflecting the thickness of the hardened layer of the nickel-based alloy workpiece in a specific embodiment of the present invention;

图4为本发明具体实施例反映镍基合金工件硬化层厚度的示意图四;Fig. 4 is the schematic diagram four reflecting the thickness of the hardened layer of the nickel-based alloy workpiece in a specific embodiment of the present invention;

图5为本发明具体实施例反映镍基合金工件硬化层厚度的示意图五;Fig. 5 is the schematic diagram five reflecting the thickness of the hardened layer of the nickel-based alloy workpiece according to a specific embodiment of the present invention;

图6为本发明具体实施例反映镍基合金工件硬化层厚度的示意图六;Fig. 6 is a schematic diagram six reflecting the thickness of the hardened layer of a nickel-based alloy workpiece according to a specific embodiment of the present invention;

图7为本发明具体实施例反映镍基合金工件试验前后的表面形貌示意图一;Figure 7 is a schematic diagram of the surface morphology before and after the test of a specific embodiment of the invention reflecting a nickel-based alloy workpiece;

图8为本发明具体实施例反映镍基合金工件试验前后的表面形貌示意图二;Figure 8 is a schematic diagram of the surface morphology before and after the test of a specific embodiment of the invention reflecting a nickel-based alloy workpiece II;

图9为本发明具体实施例反映镍基合金工件试验前后的表面形貌示意图三。Fig. 9 is a third schematic diagram showing the surface morphology of a nickel-based alloy workpiece before and after a test according to a specific embodiment of the present invention.

实施方式Implementation

本发明通过对镍基合金工艺的改进,使镍基合金经过碳氮共渗后表面形成具有一定厚度且厚度均匀的硬化层,从而使镍基合金获得良好的硬度、耐磨性和耐蚀性 。In the present invention, through the improvement of the nickel-based alloy process, a hardened layer with a certain thickness and uniform thickness is formed on the surface of the nickel-based alloy after carbonitriding, so that the nickel-based alloy can obtain good hardness, wear resistance and corrosion resistance .

本发明具体实施时包括以下步骤:Comprise the following steps when the present invention is concretely implemented:

第一步,首先通过超声波清洗机对待处理的镍基合金工件进行表面清洁处理和烘干处理,避免油污杂质对后续碳氮共渗的影响;然后将完成表面清洁处理和烘干处理的镍基合金工件放入离子渗扩炉内,并将离子渗扩炉内的气压抽真空至10Pa以下,以便于击穿气体产生辉光放电。此外,也可以采用其他表面清洁和烘干的处理工艺实现对镍基合金工件除锈、除油和烘干的目的。The first step is to clean and dry the surface of the nickel-based alloy workpiece to be treated by an ultrasonic cleaning machine to avoid the influence of oil and impurities on the subsequent carbonitriding; then the nickel-based alloy workpiece that has been cleaned and dried The alloy workpiece is placed in the ion infiltration furnace, and the air pressure in the ion infiltration furnace is evacuated to below 10Pa, so as to facilitate the breakdown gas to generate glow discharge. In addition, other surface cleaning and drying processes can also be used to achieve the purpose of derusting, degreasing and drying nickel-based alloy workpieces.

第二步,向离子渗扩炉内通入氩气,设定电压在750~850V,调整气体压力在80Pa以下,开启离子渗扩炉轰击0.5h,可以保证足够强的溅射作用来达到消除镍基合金表面的氧化膜和使表面完全活化的目的,同时还可以提高镍基合金的清洗效果和离子渗扩炉内的升温速度,从而节省时间,提高工作效率。The second step is to feed argon gas into the ion diffusion furnace, set the voltage at 750-850V, adjust the gas pressure below 80Pa, and turn on the ion diffusion furnace to bombard for 0.5h, which can ensure a strong enough sputtering effect to eliminate The oxide film on the surface of the nickel-based alloy and the purpose of fully activating the surface can also improve the cleaning effect of the nickel-based alloy and the heating rate in the ion diffusion furnace, thereby saving time and improving work efficiency.

第三步,对镍基合金工件进行碳氮共渗。待离子渗扩炉内的温度达到500~550℃时,调整压力使离子渗扩炉的压力在300Pa进行离子渗碳8h,即向离子氮化炉内通入乙炔和氢气进行离子轰击。通过该步的离子渗碳处理,使工件表面发生强烈的离子溅射,促进镍基合金表面状态的改变,达到去除钝化膜和使表面完全活化的目的;停止乙炔气体的通入,开始通入氮气(其中在通入乙炔和通入氮气的两个阶段都有氢气),使离子渗扩炉内的压力为300Pa,并将离子氮化炉内的温度维持在450℃以下进行离子渗氮4h。此时,通过对镍基合金工件进行低温高压力离子渗氮处理,使工件表面达到离子溅射和离子沉积的动态平衡,促进低温下氮原子的快速渗入,从而获得高质量的均匀硬化层。The third step is to carry out carbonitriding on the nickel-based alloy workpiece. When the temperature in the ion infiltrating furnace reaches 500-550°C, adjust the pressure so that the pressure in the ion infiltrating furnace is 300 Pa for ion carburizing for 8 hours, that is, acetylene and hydrogen are introduced into the ion nitriding furnace for ion bombardment. Through the ion carburizing treatment of this step, strong ion sputtering occurs on the surface of the workpiece, which promotes the change of the surface state of the nickel-based alloy, and achieves the purpose of removing the passivation film and fully activating the surface; stop the introduction of acetylene gas, and start to pass Nitrogen gas (there is hydrogen in the two stages of feeding acetylene and nitrogen gas), so that the pressure in the ion permeation furnace is 300Pa, and the temperature in the ion nitriding furnace is maintained below 450°C for ion nitriding 4h. At this time, by performing low-temperature and high-pressure ion nitriding treatment on the nickel-based alloy workpiece, the surface of the workpiece can achieve a dynamic balance between ion sputtering and ion deposition, and promote the rapid infiltration of nitrogen atoms at low temperature, thereby obtaining a high-quality uniform hardened layer.

第四步,对完成第三步硬化处理的镍基合金工件使用酸洗液进行酸洗,使用的酸性清洗剂成分配比为硝酸300ml/L,氢氟酸40ml/L,重铬酸钾25g/L,酸性缓蚀剂0.5g/L,表面活性剂2ml/L,余量为水。随后对完成酸洗的试样进行抛光处理,达到表面粗糙度Ra<0.8,提高其表面光洁度。最后对完成电解抛光的镍基合金工件进行清洗。The fourth step is to pickle the nickel-based alloy workpiece that has completed the third step of hardening treatment with pickling solution. The proportion of the acidic cleaning agent used is 300ml/L of nitric acid, 40ml/L of hydrofluoric acid, and 25g of potassium dichromate. /L, acid corrosion inhibitor 0.5g/L, surfactant 2ml/L, the balance is water. Then, polish the pickled sample to achieve a surface roughness of Ra<0.8 and improve its surface finish. Finally, the electropolished nickel-based alloy workpiece is cleaned.

本发明的工作原理为:利用辉光放电原理,渗氮气氛电离产生的活性氮、碳原子,在工件表面吸附后向内部扩散形成硬化层的化学热处理工艺。本发明相对镍基合金进行常规碳氮共渗改进为两段式离子碳氮共渗,即在离子碳氮共渗之前,首先采用氩离子溅射镍基合金表面,达到去除钝化膜和使表面完全活化的目的,保证硬化层的厚度;然后进行离子碳氮共渗,使镍基合金表面达到溅射和沉积过程的动态平衡,促进碳、氮原子的快速渗入,保证硬化层的厚度均匀性,在对试样进行碳氮共渗处理之后使用特制的酸性清洗剂进行清洗,并且通过对时间和温度的调整优化,在保证加工效率和加工成本并且不降低镍基合金耐腐蚀性前提下,使镍基合金表面形成具有一定厚度且厚度均匀的高质量硬化层,从而使镍基合金获得良好的硬度、耐磨性和耐蚀性。The working principle of the present invention is: using the principle of glow discharge, the active nitrogen and carbon atoms generated by the ionization of the nitriding atmosphere are adsorbed on the surface of the workpiece and then diffused to the inside to form a chemical heat treatment process of a hardened layer. Compared with the conventional carbonitriding of nickel-based alloys, the present invention is improved into two-stage ion carbonitriding, that is, before ion carbonitriding, argon ions are firstly used to sputter the surface of nickel-based alloys to remove the passivation film and make the The purpose of fully activating the surface is to ensure the thickness of the hardened layer; then carry out ion carbonitriding, so that the surface of the nickel-based alloy can achieve a dynamic balance between the sputtering and deposition processes, promote the rapid infiltration of carbon and nitrogen atoms, and ensure the uniform thickness of the hardened layer After the carbonitriding treatment, the sample is cleaned with a special acid cleaning agent, and the time and temperature are adjusted and optimized to ensure the processing efficiency and cost without reducing the corrosion resistance of the nickel-based alloy. , to form a high-quality hardened layer with a certain thickness and uniform thickness on the surface of the nickel-based alloy, so that the nickel-based alloy can obtain good hardness, wear resistance and corrosion resistance.

Figure SMS_1
Figure SMS_1

结合表1,实施例1,离子渗扩炉内的渗碳温度为500℃,渗氮温度为360℃时,在通入氩气的条件下,气压为300Pa、时间为12h,最后获得的硬化层厚度为13.06μm,如图1所示;对比实施例3,在满足其他条件下,改变实验条件为不通入氩气,最后获得的硬化层厚度为9.39μm,如图3所示;Combined with Table 1, Example 1, when the carburizing temperature in the ion permeation furnace is 500°C, and the nitriding temperature is 360°C, under the condition of feeding argon, the pressure is 300Pa, the time is 12h, and the finally obtained hardened The thickness of the layer is 13.06 μm, as shown in Figure 1; for Comparative Example 3, under other conditions, the experimental condition is changed so that no argon gas is introduced, and the thickness of the finally obtained hardened layer is 9.39 μm, as shown in Figure 3;

结合表1,实施例2,离子渗扩炉内的渗碳温度为550℃,渗氮温度为360℃时,在通入氩气的条件下,气压为300Pa、时间为12h,最后获得的硬化层厚度为17.49μm,如图2所示;对比实施例4,在满足其他条件下,改变实验条件为不通入氩气,最后获得的硬化层厚度为12.41μm,如图4所示;即说明在其他外部条件不变的情况下,实验前通入氩气能够提高硬化层的厚度。通过采用本发明的镍基合金低温离子渗氮方法,可以获得17μm以上的硬化层,从而满足镍基合金在实际生产需求中的使用。Combined with Table 1 and Example 2, when the carburizing temperature in the ion permeation furnace is 550°C and the nitriding temperature is 360°C, under the condition of feeding argon, the air pressure is 300Pa, the time is 12h, and the finally obtained hardened Layer thickness is 17.49 μm, as shown in Figure 2; Comparative Example 4, under satisfying other conditions, change experimental condition to not pass into argon gas, the hardened layer thickness that obtains at last is 12.41 μm, as shown in Figure 4; Under the condition that other external conditions remain unchanged, the thickness of the hardened layer can be increased by injecting argon gas before the experiment. By adopting the low-temperature ion nitriding method of the nickel-based alloy of the present invention, a hardened layer of more than 17 μm can be obtained, thereby satisfying the use of the nickel-based alloy in actual production requirements.

此外,针对实施例1中完成碳氮共渗处理的三处不同区域分别进行了硬化层厚度检测,结果如表2所示。In addition, the thickness of the hardened layer was detected in three different areas where the carbonitriding treatment was completed in Example 1, and the results are shown in Table 2.

Figure SMS_2
Figure SMS_2

结合表2,通过实施例1获得镍基合金在三个不同区域检测的硬化层厚度差值小于1.3μm,其中,第一区域厚度为13.06μm,如图1所示;第二区域厚度为11.87μm,如图5所示;第三区域厚度为11.77μm,如图6所示。通过采用本发明的镍基合金碳氮共渗的方法,可以获得足够厚且均匀的硬化层。Combined with Table 2, the difference in the thickness of the hardened layer detected by the nickel-based alloy in three different regions obtained through Example 1 is less than 1.3 μm, wherein the thickness of the first region is 13.06 μm, as shown in Figure 1; the thickness of the second region is 11.87 μm μm, as shown in Figure 5; the thickness of the third region is 11.77 μm, as shown in Figure 6. By adopting the carbonitriding method of the nickel base alloy of the present invention, a sufficiently thick and uniform hardened layer can be obtained.

针对碳氮共渗及碳氮共渗且酸洗后的试样耐腐蚀性实验,模拟复杂工况,在容器中准备镍基合金试样、碳氮共渗处理后的镍基合金试样以及碳氮共渗处理且酸洗后的试样三种不同处理后的试样进行盐酸全浸腐蚀试验。试验时将试样放入温度为60℃的水浴锅中,试验中所使用的试剂是浓度为9.1%的盐酸(化学式为:HCl)溶液,实验时间72h。试验结束得出的腐蚀速率如表3所示。For the corrosion resistance experiment of samples after carbonitriding and carbonitriding and pickling, simulate complex working conditions, prepare nickel-based alloy samples in containers, nickel-based alloy samples after carbonitriding treatment, and Samples after carbonitriding treatment and pickling Three kinds of samples after different treatments were subjected to hydrochloric acid full immersion corrosion test. During the test, the sample was placed in a water bath at a temperature of 60°C. The reagent used in the test was a solution of hydrochloric acid (chemical formula: HCl) with a concentration of 9.1%, and the test time was 72 hours. The corrosion rate obtained at the end of the test is shown in Table 3.

Figure SMS_3
Figure SMS_3

结合表3,通过镍基合金再三种不同加工情况检测出的耐腐蚀程度,其中,实施例5为未进行任何处理的试样,其在进行盐酸全浸腐蚀试验后的腐蚀速率为0.09mm/a,表面形貌如图7所示;实施例6,为进行碳氮共渗后的试样,进行盐酸全浸试验后,出现较多的失重,腐蚀速率为7.46mm/a,试验后的试样表面变色严重,腐蚀产物多,如图8所示;实施例7,在碳氮共渗处理后且酸洗的试样,进行盐酸全浸试验后,腐蚀速率为0.08mm/a,试样表面没有出现变色,如图9所示;In combination with Table 3, the degree of corrosion resistance detected by three different processing conditions of nickel-based alloys, wherein, Example 5 is a sample without any treatment, and its corrosion rate after carrying out the hydrochloric acid full immersion corrosion test is 0.09mm/ a, surface morphology as shown in Figure 7; embodiment 6, for the sample after carbonitriding, after hydrochloric acid full immersion test, there is more weight loss, the corrosion rate is 7.46mm/a, after the test The surface of the sample has serious discoloration and many corrosion products, as shown in Figure 8; in Example 7, after the carbonitriding treatment and pickling of the sample, the corrosion rate was 0.08 mm/a after the hydrochloric acid full immersion test. There was no discoloration on the surface of the sample, as shown in Figure 9;

通过采用本发明的镍基合金碳氮共渗的方法,可以在获得很好的硬度和耐磨性的前提下保持镍基合金原有的耐腐蚀性,甚至可以小幅度强化镍基合金的耐腐蚀性,从而满足镍基合金在实际使用中对硬度、耐磨性、耐蚀性以及使用寿命的要求。By adopting the nickel-based alloy carbonitriding method of the present invention, the original corrosion resistance of the nickel-based alloy can be maintained under the premise of obtaining good hardness and wear resistance, and the corrosion resistance of the nickel-based alloy can even be slightly strengthened. Corrosion, so as to meet the requirements of nickel-based alloys for hardness, wear resistance, corrosion resistance and service life in actual use.

Claims (6)

1.一种镍基合金低温离子碳氮共渗的方法,其特征在于,包括如下步骤:1. a method for low temperature ion carbonitriding of nickel base alloy, is characterized in that, comprises the steps: 第一步:将完成表面清洁和烘干处理的镍基合金工件放入离子渗 扩炉内,并将离子渗扩炉内的气压抽真空至10Pa以下;The first step: put the nickel base alloy workpiece that has been cleaned and dried on the surface into the ion diffusion furnace, and evacuate the air pressure in the ion diffusion furnace to below 10Pa; 第二步:通入氩气,设定电压为750~850V,调整气体压力小于80Pa,开启辉光并轰击0.5~2h;Step 2: Introduce argon gas, set the voltage to 750-850V, adjust the gas pressure to less than 80Pa, turn on the glow and bombard for 0.5-2h; 第三步:关掉氩气,向离子氮化炉内通入乙炔和氢气进行离子轰击,调整气体比例提高气压至100~300Pa,使离子渗扩炉内的温度达到500~550℃,并保温2~10h,之后关闭乙炔气体,待炉内温度冷却至450℃以下,通入氮气,打开离子渗扩炉,设定温度在400~450℃并进行离子渗氮1~5h;Step 3: Turn off the argon gas, feed acetylene and hydrogen into the ion nitriding furnace for ion bombardment, adjust the gas ratio and increase the air pressure to 100-300Pa, make the temperature in the ion permeation furnace reach 500-550°C, and keep warm 2~10h, then turn off the acetylene gas, wait for the temperature in the furnace to cool down to below 450°C, feed nitrogen gas, turn on the ion permeation furnace, set the temperature at 400~450°C and carry out ion nitriding for 1~5h; 第四步:对完成低温离子碳氮共渗的镍基合金使用酸性清洗剂 进行酸洗。Step 4: Pickling the nickel-based alloy that has completed low-temperature ion carbonitriding with an acidic cleaning agent. 2.根据权利要求1所述的镍基合金低温离子碳氮共渗的方法,其特征在于,在第四步中,酸洗时使用的酸性清洗剂配比为硝酸200~500ml/L,氢氟酸20~50ml/L,重铬酸钾10~50g/L,酸性缓蚀剂0.5~5g/L,表面活性剂2~5ml/L,余量为水。2. the method for nickel base alloy low temperature ion carbonitriding according to claim 1, is characterized in that, in the 4th step, the acid cleaning agent proportioning that uses during pickling is nitric acid 200~500ml/L, hydrogen Fluoric acid 20-50ml/L, potassium dichromate 10-50g/L, acid corrosion inhibitor 0.5-5g/L, surfactant 2-5ml/L, and the balance is water. 3.根据权利要求2所述的镍基合金低温离子碳氮共渗的方法,其特征在于,酸洗时使用的酸性清洗剂配比为硝酸300ml/L,氢氟酸40ml/L,重铬酸钾25g/L,酸性缓蚀剂0.5g/L,表面活性剂2ml/L,余量为水。3. the method for nickel-based alloy low-temperature ion carbonitriding according to claim 2, is characterized in that, the acid cleaning agent proportioning that uses during pickling is nitric acid 300ml/L, hydrofluoric acid 40ml/L, heavy chromium Potassium acid 25g/L, acidic corrosion inhibitor 0.5g/L, surfactant 2ml/L, the balance is water. 4.根据权利要求1或2或3所述的镍基合金低温离子碳氮共渗的方法,其特征在于,在第二步中,轰击时间为0.5h。4. The method for low-temperature ion carbonitriding of nickel-based alloys according to claim 1, 2 or 3, characterized in that, in the second step, the bombardment time is 0.5h. 5.根据权利要求1或2或3所述的镍基合金低温离子碳氮共渗的方法,其特征在于,在第三步中,通入乙炔时间为4~8h,通入氮气时间为2~4h。5. according to the method for claim 1 or 2 or 3 described nickel base alloy low-temperature ion carbonitriding, it is characterized in that, in the 3rd step, the time of feeding acetylene is 4~8h, and the time of feeding nitrogen is 2 ~4h. 6.根据权利要求1或2或3所述的镍基合金低温离子碳氮共渗的方法,其特征在于,还包括第五步:对完成第四步的镍基合金工件进行抛光处理,达到表面粗糙度Ra<0.8。6. according to the method for claim 1 or 2 or 3 described nickel base alloy low temperature ion carbonitriding, it is characterized in that, also comprises the 5th step: the nickel base alloy workpiece that finishes the 4th step is carried out polishing treatment, reaches Surface roughness Ra<0.8.
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