SU437809A1 - The method of obtaining spikes on metal rods - Google Patents

Description

one

The invention relates to an electrolytic metal treatment method and can be used in a thin film technology for producing masks and point contacts in semiconductor technology.

The known method of sharpening rods of various metals by the method of electrolytic etching, the essence of which is that one of the ends of the rod is immersed in an electrolytic bath with a 20% KOH solution to a depth of 1-1.5 mm, voltage is applied to the electrodes and production t etching.

The electrolyte meniscus formed on the rod, as the diameter of the rod decreases, is gradually lowered due to etching, and the end of the rod is sharpened.

Using this method, it is possible to obtain a tip with a diameter of 1 micron on rods with a diameter of 35 microns. When sharpening a rod with a diameter of more than 0.5 mm, the diameter of the tip sharply increases.

In order to obtain an edge of a smaller diameter, the software of the proposed method proposes to sharpen the rods in two stages.

First stage. A bar of the required length is inserted into the mandrel and secured with a screw. In a burner flame, with uniform rotation of the rod, metal is burned at a distance of 5–7 mm from the end, in

as a result, a neck is formed (0.1 - 0.2 mm) with a bullet at the end. Metal burning out time is 1-2 min. Second phase. At this stage, leads

electrolytic etching of the rod prepared in the first stage according to the scheme. Formed with a bul protects the end of the rod during etching.

The drawing shows a diagram of the electrolytic etching of the rod.

The rod 1 is fixed in the holder 2 and mounted on a tripod 3, and which is placed a glass bath 4 with electrolyte (20% NaOH) and a stainless steel cathode 5 in the form of a glass with a window 6. Through the movement mechanism 7 the rod 1 is completely lowered into bath 4. The voltage equal to the selected mode is applied to electrodes 5 and 1. The etching is carried out until then.

until the boule is separated from the end of the rod (control is carried out through the viewing window 6 in the cathode), then, using the movement mechanism 7, the rod 1 is lifted from the bath 4 and washed in distilled

water. The diameter of the sharpened end after etching is 0.5-1 µm, the time of etching is 1-2 minutes.

Example. According to the method described above, a sharpening of tungsten rods with a diameter of 3 mm, which are used

as masks when spraying films on quartz substrates. A tip is obtained on rods with a diameter of "0.5-1 µm.

Subject invention

The method of producing spikes on metal rods, including electrolytic

etching the end of the rod, characterized in that, in order to obtain tips of smaller diameter, the metal of the rod is burned in the burner flame before forming a boule at the end of the rod, and electrolytic etching is carried out before the boule is separated.