SG11201906975PA - Structure for rf use - Google Patents
Structure for rf useInfo
- Publication number
- SG11201906975PA SG11201906975PA SG11201906975PA SG11201906975PA SG11201906975PA SG 11201906975P A SG11201906975P A SG 11201906975PA SG 11201906975P A SG11201906975P A SG 11201906975PA SG 11201906975P A SG11201906975P A SG 11201906975PA SG 11201906975P A SG11201906975P A SG 11201906975PA
- Authority
- SG
- Singapore
- Prior art keywords
- layer
- dielectric layer
- front surface
- support substrate
- electrode
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q23/00—Antennas with active circuits or circuit elements integrated within them or attached to them
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76846—Layer combinations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/2283—Supports; Mounting means by structural association with other equipment or articles mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
- H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
- H10D30/0323—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon comprising monocrystalline silicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6708—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H10D30/6711—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect by using electrodes contacting the supplementary regions or layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6758—Thin-film transistors [TFT] characterised by the insulating substrates
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Thin Film Transistor (AREA)
- Semiconductor Integrated Circuits (AREA)
- Waveguides (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1750870A FR3062517B1 (fr) | 2017-02-02 | 2017-02-02 | Structure pour application radiofrequence |
PCT/FR2018/050196 WO2018142052A1 (fr) | 2017-02-02 | 2018-01-29 | Structure pour application radiofréquence |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201906975PA true SG11201906975PA (en) | 2019-08-27 |
Family
ID=58779151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201906975PA SG11201906975PA (en) | 2017-02-02 | 2018-01-29 | Structure for rf use |
Country Status (9)
Country | Link |
---|---|
US (3) | US11043756B2 (fr) |
EP (1) | EP3577683B1 (fr) |
JP (1) | JP7098851B2 (fr) |
KR (1) | KR102520751B1 (fr) |
CN (1) | CN110235238B (fr) |
FR (1) | FR3062517B1 (fr) |
SG (1) | SG11201906975PA (fr) |
TW (1) | TWI764978B (fr) |
WO (1) | WO2018142052A1 (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3062517B1 (fr) * | 2017-02-02 | 2019-03-15 | Soitec | Structure pour application radiofrequence |
FR3086096B1 (fr) * | 2018-09-14 | 2021-08-27 | Soitec Silicon On Insulator | Procede de realisation d'un substrat avance pour une integration hybride |
FR3091004B1 (fr) * | 2018-12-24 | 2020-12-04 | Soitec Silicon On Insulator | Structure de type semi-conducteur pour applications digitales et radiofréquences |
FR3091010B1 (fr) * | 2018-12-24 | 2020-12-04 | Soitec Silicon On Insulator | Structure de type semi-conducteur pour applications digitales et radiofréquences, et procédé de fabrication d’une telle structure |
US11271079B2 (en) * | 2020-01-15 | 2022-03-08 | Globalfoundries U.S. Inc. | Wafer with crystalline silicon and trap rich polysilicon layer |
TWI761255B (zh) | 2021-07-08 | 2022-04-11 | 環球晶圓股份有限公司 | 晶圓及晶圓的製造方法 |
FR3136325A1 (fr) * | 2022-06-02 | 2023-12-08 | Soitec | Dispositif a ondes elastiques de surface |
JP7609154B2 (ja) | 2022-11-11 | 2025-01-07 | 信越半導体株式会社 | 高周波デバイス用基板およびその製造方法 |
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EP0159601A3 (fr) * | 1984-04-10 | 1987-08-19 | Hartwig Wolfgang Prof.Dr. Thim | Arrangement de circuit logique à transistors à effet de champ d'une construction adaptée à cet arrangement |
US5841623A (en) * | 1995-12-22 | 1998-11-24 | Lam Research Corporation | Chuck for substrate processing and method for depositing a film in a radio frequency biased plasma chemical depositing system |
JPH1041512A (ja) * | 1996-07-23 | 1998-02-13 | Denso Corp | 半導体装置 |
JP2000058844A (ja) * | 1998-08-10 | 2000-02-25 | Denso Corp | 半導体装置及び半導体装置の製造方法 |
JP2004207271A (ja) * | 2002-12-20 | 2004-07-22 | Nec Electronics Corp | Soi基板及び半導体集積回路装置 |
US6956278B2 (en) * | 2003-06-30 | 2005-10-18 | Matrix Semiconductor, Inc. | Low-density, high-resistivity titanium nitride layer for use as a contact for low-leakage dielectric layers |
JP4773697B2 (ja) * | 2004-06-30 | 2011-09-14 | ルネサスエレクトロニクス株式会社 | Soi基板およびその製造方法ならびに半導体装置 |
US7709313B2 (en) * | 2005-07-19 | 2010-05-04 | International Business Machines Corporation | High performance capacitors in planar back gates CMOS |
US20100027355A1 (en) * | 2007-07-31 | 2010-02-04 | Dao Thuy B | Planar double gate transistor storage cell |
US7993752B2 (en) * | 2008-03-17 | 2011-08-09 | Nano PV Technologies, Inc. | Transparent conductive layer and method |
JP2010114165A (ja) * | 2008-11-04 | 2010-05-20 | Nikon Corp | 半導体装置、積層半導体装置および積層半導体装置の製造方法 |
JP4917085B2 (ja) * | 2008-12-15 | 2012-04-18 | 東京エレクトロン株式会社 | 半導体装置 |
US8133774B2 (en) * | 2009-03-26 | 2012-03-13 | International Business Machines Corporation | SOI radio frequency switch with enhanced electrical isolation |
US8742459B2 (en) * | 2009-05-14 | 2014-06-03 | Transphorm Inc. | High voltage III-nitride semiconductor devices |
FR2954626B1 (fr) * | 2009-12-23 | 2013-12-06 | Commissariat Energie Atomique | Resonateur acoustique comprenant un electret, et procede de fabrication de ce resonateur, application aux filtres commutables a resonateurs couples |
FR2967812B1 (fr) * | 2010-11-19 | 2016-06-10 | S O I Tec Silicon On Insulator Tech | Dispositif electronique pour applications radiofrequence ou de puissance et procede de fabrication d'un tel dispositif |
EP2656388B1 (fr) | 2010-12-24 | 2020-04-15 | QUALCOMM Incorporated | Couche riche en pièges pour dispositifs à semi-conducteurs |
US8536021B2 (en) | 2010-12-24 | 2013-09-17 | Io Semiconductor, Inc. | Trap rich layer formation techniques for semiconductor devices |
US8481405B2 (en) * | 2010-12-24 | 2013-07-09 | Io Semiconductor, Inc. | Trap rich layer with through-silicon-vias in semiconductor devices |
FR2973158B1 (fr) | 2011-03-22 | 2014-02-28 | Soitec Silicon On Insulator | Procédé de fabrication d'un substrat de type semi-conducteur sur isolant pour applications radiofréquences |
US9525399B2 (en) * | 2011-10-31 | 2016-12-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Planarized electrode for improved performance in bulk acoustic resonators |
CN103199110B (zh) * | 2012-01-09 | 2015-10-14 | 上海华虹宏力半导体制造有限公司 | 一种nldmos器件及其制造方法 |
JP6454716B2 (ja) * | 2014-01-23 | 2019-01-16 | サンエディソン・セミコンダクター・リミテッドSunEdison Semiconductor Limited | 高抵抗率soiウエハおよびその製造方法 |
US20150228714A1 (en) * | 2014-02-13 | 2015-08-13 | Rfaxis, Inc. | Isolation methods for leakage, loss and non-linearity mitigation in radio-frequency integrated circuits on high-resistivity silicon-on-insulator substrates |
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FR3024587B1 (fr) * | 2014-08-01 | 2018-01-26 | Soitec | Procede de fabrication d'une structure hautement resistive |
US10381260B2 (en) * | 2014-11-18 | 2019-08-13 | GlobalWafers Co., Inc. | Method of manufacturing high resistivity semiconductor-on-insulator wafers with charge trapping layers |
FR3029682B1 (fr) * | 2014-12-04 | 2017-12-29 | Soitec Silicon On Insulator | Substrat semi-conducteur haute resistivite et son procede de fabrication |
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WO2016187032A1 (fr) * | 2015-05-15 | 2016-11-24 | Skyworks Solutions, Inc. | Isolation de radiofréquence à l'aide d'ouverture de substrat |
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US9514987B1 (en) * | 2015-06-19 | 2016-12-06 | International Business Machines Corporation | Backside contact to final substrate |
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US9711521B2 (en) * | 2015-08-31 | 2017-07-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Substrate fabrication method to improve RF (radio frequency) device performance |
FR3042648B1 (fr) * | 2015-10-20 | 2018-09-07 | Soitec Silicon On Insulator | Dispositif a ondes acoustiques de surface et procede de fabrication associe |
FR3052592B1 (fr) * | 2016-06-08 | 2018-05-18 | Soitec | Structure pour applications radiofrequences |
FR3062238A1 (fr) * | 2017-01-26 | 2018-07-27 | Soitec | Support pour une structure semi-conductrice |
FR3062517B1 (fr) * | 2017-02-02 | 2019-03-15 | Soitec | Structure pour application radiofrequence |
EP3506499B1 (fr) * | 2017-12-07 | 2023-08-02 | Infineon Technologies AG | Filtre intégré avec éléments de résonateur d'onde de volume réglables |
DE102018215018A1 (de) * | 2018-09-04 | 2020-03-05 | Infineon Technologies Ag | Feuchtigkeitssensor |
-
2017
- 2017-02-02 FR FR1750870A patent/FR3062517B1/fr active Active
-
2018
- 2018-01-29 SG SG11201906975PA patent/SG11201906975PA/en unknown
- 2018-01-29 US US16/480,249 patent/US11043756B2/en active Active
- 2018-01-29 JP JP2019538653A patent/JP7098851B2/ja active Active
- 2018-01-29 EP EP18705431.7A patent/EP3577683B1/fr active Active
- 2018-01-29 KR KR1020197024060A patent/KR102520751B1/ko active Active
- 2018-01-29 CN CN201880009739.5A patent/CN110235238B/zh active Active
- 2018-01-29 WO PCT/FR2018/050196 patent/WO2018142052A1/fr unknown
- 2018-01-29 TW TW107103106A patent/TWI764978B/zh active
-
2021
- 2021-05-25 US US17/330,237 patent/US11502428B2/en active Active
-
2022
- 2022-08-01 US US17/816,599 patent/US20220368036A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
TW201830660A (zh) | 2018-08-16 |
KR102520751B1 (ko) | 2023-04-12 |
US11043756B2 (en) | 2021-06-22 |
EP3577683A1 (fr) | 2019-12-11 |
US20210280990A1 (en) | 2021-09-09 |
FR3062517B1 (fr) | 2019-03-15 |
EP3577683B1 (fr) | 2022-09-21 |
US20190372243A1 (en) | 2019-12-05 |
CN110235238A (zh) | 2019-09-13 |
CN110235238B (zh) | 2023-08-29 |
TWI764978B (zh) | 2022-05-21 |
KR20190112738A (ko) | 2019-10-07 |
US20220368036A1 (en) | 2022-11-17 |
FR3062517A1 (fr) | 2018-08-03 |
US11502428B2 (en) | 2022-11-15 |
WO2018142052A1 (fr) | 2018-08-09 |
JP7098851B2 (ja) | 2022-07-12 |
JP2020509576A (ja) | 2020-03-26 |
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