SE403214B - Forfarande for framstellning av monolitiska, komplementera transistorer - Google Patents
Forfarande for framstellning av monolitiska, komplementera transistorerInfo
- Publication number
- SE403214B SE403214B SE7510075A SE7510075A SE403214B SE 403214 B SE403214 B SE 403214B SE 7510075 A SE7510075 A SE 7510075A SE 7510075 A SE7510075 A SE 7510075A SE 403214 B SE403214 B SE 403214B
- Authority
- SE
- Sweden
- Prior art keywords
- monolitical
- procedure
- manufacturing
- complementary transistors
- transistors
- Prior art date
Links
- 230000000295 complement effect Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
- H10D84/67—Complementary BJTs
- H10D84/673—Vertical complementary BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
- H10D84/0119—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs
- H10D84/0121—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs the complementary BJTs being vertical BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US50757074A | 1974-09-19 | 1974-09-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
SE7510075L SE7510075L (sv) | 1976-03-22 |
SE403214B true SE403214B (sv) | 1978-07-31 |
Family
ID=24019174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7510075A SE403214B (sv) | 1974-09-19 | 1975-09-10 | Forfarande for framstellning av monolitiska, komplementera transistorer |
Country Status (10)
Country | Link |
---|---|
JP (1) | JPS5157172A (sv) |
BE (1) | BE833455A (sv) |
CA (1) | CA1038968A (sv) |
DE (1) | DE2541161A1 (sv) |
ES (1) | ES440909A0 (sv) |
FR (1) | FR2285717A1 (sv) |
GB (1) | GB1525247A (sv) |
IT (1) | IT1042581B (sv) |
NL (1) | NL7510994A (sv) |
SE (1) | SE403214B (sv) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55143064A (en) * | 1979-04-24 | 1980-11-08 | Nec Corp | Semiconductor device |
JPS57106046A (en) * | 1980-12-23 | 1982-07-01 | Toshiba Corp | Manufacture of semiconductor device |
JPH0713969B2 (ja) * | 1986-01-13 | 1995-02-15 | 三洋電機株式会社 | 縦型pnpトランジスタ |
GB2186117B (en) * | 1986-01-30 | 1989-11-01 | Sgs Microelettronica Spa | Monolithically integrated semiconductor device containing bipolar junction,cmosand dmos transistors and low leakage diodes and a method for its fabrication |
EP0347550A3 (en) * | 1988-06-21 | 1991-08-28 | Texas Instruments Incorporated | Process for fabricating isolated vertical and super beta bipolar transistors |
-
1975
- 1975-08-27 CA CA234,241A patent/CA1038968A/en not_active Expired
- 1975-09-10 SE SE7510075A patent/SE403214B/sv unknown
- 1975-09-16 DE DE19752541161 patent/DE2541161A1/de not_active Withdrawn
- 1975-09-16 IT IT27273/75A patent/IT1042581B/it active
- 1975-09-16 BE BE160072A patent/BE833455A/xx unknown
- 1975-09-18 JP JP50112210A patent/JPS5157172A/ja active Pending
- 1975-09-18 FR FR7528624A patent/FR2285717A1/fr active Granted
- 1975-09-18 NL NL7510994A patent/NL7510994A/xx not_active Application Discontinuation
- 1975-09-19 GB GB38498/75A patent/GB1525247A/en not_active Expired
-
1976
- 1976-01-23 ES ES440909A patent/ES440909A0/es active Pending
Also Published As
Publication number | Publication date |
---|---|
IT1042581B (it) | 1980-01-30 |
GB1525247A (en) | 1978-09-20 |
NL7510994A (nl) | 1976-03-23 |
CA1038968A (en) | 1978-09-19 |
JPS5157172A (sv) | 1976-05-19 |
FR2285717A1 (fr) | 1976-04-16 |
ES440909A0 (es) | 1977-03-16 |
DE2541161A1 (de) | 1976-04-01 |
BE833455A (fr) | 1976-01-16 |
FR2285717B1 (sv) | 1980-04-30 |
SE7510075L (sv) | 1976-03-22 |
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