SE0300375D0 - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- SE0300375D0 SE0300375D0 SE0300375A SE0300375A SE0300375D0 SE 0300375 D0 SE0300375 D0 SE 0300375D0 SE 0300375 A SE0300375 A SE 0300375A SE 0300375 A SE0300375 A SE 0300375A SE 0300375 D0 SE0300375 D0 SE 0300375D0
- Authority
- SE
- Sweden
- Prior art keywords
- electrode
- sensing chamber
- resonator
- piezoelectric resonator
- analyte
- Prior art date
Links
- 239000013078 crystal Substances 0.000 abstract 3
- 239000012491 analyte Substances 0.000 abstract 2
- 239000012530 fluid Substances 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/222—Constructional or flow details for analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
- G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02818—Density, viscosity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0421—Longitudinal waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves
Landscapes
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Acoustics & Sound (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0300375A SE0300375D0 (sv) | 2003-02-12 | 2003-02-12 | Piezoelectric resonator |
JP2006502797A JP4977458B2 (ja) | 2003-02-12 | 2004-02-11 | 圧電共振器 |
EP04710140.7A EP1592958B1 (en) | 2003-02-12 | 2004-02-11 | Piezoelectric resonator |
CN200480004174XA CN1751234B (zh) | 2003-02-12 | 2004-02-11 | 压电谐振器 |
PCT/SE2004/000175 WO2004072622A1 (en) | 2003-02-12 | 2004-02-11 | Piezoelectric resonator |
US10/542,616 US20060107733A1 (en) | 2003-02-12 | 2004-02-11 | Piezoelectric resonator |
JP2010129348A JP5090500B2 (ja) | 2003-02-12 | 2010-06-04 | 圧電共振器 |
US13/329,894 US9762204B2 (en) | 2003-02-12 | 2011-12-19 | Piezoelectric resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0300375A SE0300375D0 (sv) | 2003-02-12 | 2003-02-12 | Piezoelectric resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
SE0300375D0 true SE0300375D0 (sv) | 2003-02-12 |
Family
ID=20290382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0300375A SE0300375D0 (sv) | 2003-02-12 | 2003-02-12 | Piezoelectric resonator |
Country Status (6)
Country | Link |
---|---|
US (2) | US20060107733A1 (sv) |
EP (1) | EP1592958B1 (sv) |
JP (2) | JP4977458B2 (sv) |
CN (1) | CN1751234B (sv) |
SE (1) | SE0300375D0 (sv) |
WO (1) | WO2004072622A1 (sv) |
Families Citing this family (31)
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ATE521887T1 (de) * | 2001-06-20 | 2011-09-15 | M S Tech Ltd | Anordnung von piezoelektrischen resonatoren zum nachweis von spuren einer substanz |
ITVR20040149A1 (it) * | 2004-09-22 | 2004-12-22 | Sanitaria Scaligera Spa | Sistema di monitoraggio rapido del gruppo sanguigno e per la rivelazione di reazioni immunoematologiche |
US7568377B2 (en) * | 2005-07-28 | 2009-08-04 | University Of South Florida | High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection |
DE102005043036B4 (de) * | 2005-09-09 | 2011-03-24 | Siemens Ag | Vorrichtung zur Ermittlung der viskosen Eigenschaften einer Flüssigkeit |
US20080169730A1 (en) * | 2007-01-11 | 2008-07-17 | Romi Mayder | Inverted mesa quartz crystal time base reference for automatic test equipment |
GB0708346D0 (en) * | 2007-04-30 | 2007-06-06 | Attana Ab | Sensor |
JP5040019B2 (ja) * | 2007-06-15 | 2012-10-03 | セイコーインスツル株式会社 | マイクロリアクター及びマイクロリアクターシステム |
AT504918B1 (de) * | 2007-10-19 | 2008-09-15 | Univ Linz | Vorrichtung zum bestimmen der viskosität einer flüssigkeit |
US7802466B2 (en) * | 2007-11-28 | 2010-09-28 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
WO2009075665A2 (en) * | 2007-11-28 | 2009-06-18 | Sierra Sensors Gmbh | Dry side sensor mounting for sensor chip assembly |
GB0803257D0 (en) * | 2008-02-22 | 2008-04-02 | Univ Leeds | Apparatus for inspection of a fliuid and method |
JP2009281786A (ja) * | 2008-05-20 | 2009-12-03 | Nippon Dempa Kogyo Co Ltd | 圧電センサ及び感知装置 |
ES2333088B2 (es) * | 2009-06-23 | 2011-02-07 | Universidad Politecnica De Valencia | Metodo y dispositivo de nanogravimetria en medios fluidos basado en resonadores piezoelectricos. |
EP2630479B1 (en) | 2010-10-20 | 2020-04-08 | Qorvo US, Inc. | Apparatus and method for measuring binding kinetics and concentration with a resonating sensor |
WO2012077224A1 (ja) * | 2010-12-10 | 2012-06-14 | 三菱電機株式会社 | 空中超音波センサ |
JP5435243B2 (ja) * | 2011-02-14 | 2014-03-05 | セイコーエプソン株式会社 | 振動子及び電子機器 |
CN104303052B (zh) * | 2012-01-16 | 2018-11-16 | 仪宝科技公司 | 用于测量流体物理性能的方法、装置、和系统 |
WO2013145845A1 (ja) * | 2012-03-26 | 2013-10-03 | 京セラ株式会社 | 圧電振動部品および携帯端末 |
WO2014024309A1 (ja) * | 2012-08-10 | 2014-02-13 | 富士通株式会社 | Qcmセンサとその製造方法 |
WO2014123519A1 (en) | 2013-02-06 | 2014-08-14 | Empire Technology Development Llc | Devices, systems, and methods for detecting odorants |
US9128010B2 (en) * | 2013-03-14 | 2015-09-08 | Ecolab Usa Inc. | Device and methods of using a piezoelectric microbalance sensor |
US20160077057A1 (en) * | 2013-04-16 | 2016-03-17 | Empire Technology Development Llc | Graded structure films |
JP2014219338A (ja) * | 2013-05-10 | 2014-11-20 | 京セラクリスタルデバイス株式会社 | 振動粘度計 |
US10352800B2 (en) * | 2016-06-03 | 2019-07-16 | Mks Instruments, Inc. | Micromachined bulk acoustic wave resonator pressure sensor |
KR102628485B1 (ko) * | 2016-06-28 | 2024-01-24 | 삼성디스플레이 주식회사 | 증착 모니터링을 위한 수정 진동자 센서 |
WO2018041327A1 (en) * | 2016-08-29 | 2018-03-08 | Abb Schweiz Ag | An industrial robot comprising a leakage detecting device configured to detect lubricant leaking from a gear unit |
JP7136219B2 (ja) * | 2018-09-27 | 2022-09-13 | I-Pex株式会社 | 物質検出素子 |
US20230221233A1 (en) * | 2019-10-18 | 2023-07-13 | Qatch Technologies | Apparatus and method for real time measuring of rheological properties of a fluid |
WO2022010833A1 (en) | 2020-07-08 | 2022-01-13 | Kampanics, L.L.C. | Acoustic wave devices for microfluidic applications |
CN116248068B (zh) * | 2022-09-28 | 2024-03-08 | 泰晶科技股份有限公司 | 一种超高频at切石英晶片及制造方法 |
CN118316414B (zh) * | 2024-06-05 | 2024-10-11 | 西安电子科技大学 | 一种具有矩形双环电极结构的石英晶体谐振器 |
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JP2002246874A (ja) * | 2001-02-13 | 2002-08-30 | Seiko Epson Corp | 高周波振動子及びその製造方法 |
DE10123040A1 (de) * | 2001-05-11 | 2002-11-21 | Bosch Gmbh Robert | Sensor zur Messung der Viskosität einer Flüssigkeit |
CA2357522A1 (en) * | 2001-09-20 | 2003-03-20 | Michael Thompson | Enhancement of acoustic wave sensor response by electrode modification |
GB0225353D0 (en) * | 2002-10-31 | 2002-12-11 | Amersham Biosciences Kk | Chip-based resonator and liquid-phase sensor |
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US7568377B2 (en) * | 2005-07-28 | 2009-08-04 | University Of South Florida | High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection |
-
2003
- 2003-02-12 SE SE0300375A patent/SE0300375D0/sv unknown
-
2004
- 2004-02-11 CN CN200480004174XA patent/CN1751234B/zh not_active Expired - Fee Related
- 2004-02-11 US US10/542,616 patent/US20060107733A1/en not_active Abandoned
- 2004-02-11 JP JP2006502797A patent/JP4977458B2/ja not_active Expired - Fee Related
- 2004-02-11 EP EP04710140.7A patent/EP1592958B1/en not_active Expired - Lifetime
- 2004-02-11 WO PCT/SE2004/000175 patent/WO2004072622A1/en active Application Filing
-
2010
- 2010-06-04 JP JP2010129348A patent/JP5090500B2/ja not_active Expired - Fee Related
-
2011
- 2011-12-19 US US13/329,894 patent/US9762204B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2004072622A1 (en) | 2004-08-26 |
US20060107733A1 (en) | 2006-05-25 |
JP4977458B2 (ja) | 2012-07-18 |
JP5090500B2 (ja) | 2012-12-05 |
CN1751234B (zh) | 2010-04-28 |
JP2006517668A (ja) | 2006-07-27 |
JP2010237218A (ja) | 2010-10-21 |
US20120090389A1 (en) | 2012-04-19 |
EP1592958A1 (en) | 2005-11-09 |
EP1592958B1 (en) | 2018-08-15 |
US9762204B2 (en) | 2017-09-12 |
CN1751234A (zh) | 2006-03-22 |
WO2004072622A8 (en) | 2004-12-23 |
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